CN208034111U - A kind of XY high-precision movement platforms of coplanar decoupling - Google Patents
A kind of XY high-precision movement platforms of coplanar decoupling Download PDFInfo
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- CN208034111U CN208034111U CN201820393838.5U CN201820393838U CN208034111U CN 208034111 U CN208034111 U CN 208034111U CN 201820393838 U CN201820393838 U CN 201820393838U CN 208034111 U CN208034111 U CN 208034111U
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Abstract
The utility model embodiment provides a kind of XY high-precision movement platforms of coplanar decoupling, by by first base, first moving parts, second base, second moving parts and moving platform are presented with stacked structure, space can be efficiently used, simplify the framework of entire platform and the composition of simplified assembly, and since the direction of motion of the first moving parts and the second moving parts is vertical, moving platform is splitted into three pieces of sub-components, the relative motion between mass motion and sub-component by each autokinesis of the first moving parts and the second moving parts to control moving platform, dual decoupling is realized to macro micro- two-stage (totally four driving sources) parallel drive in same plane, realize macro micro- compound motion on the directions XY, realize the precise positioning of plane space position.
Description
Technical field
The utility model is related to micro-electronic manufacturing manufacture field more particularly to a kind of XY high-precision movements of coplanar decoupling are flat
Platform.
Background technology
With the high speed development of microelectronics manufacturing industry, the manufacture of the high production capacity of microelectronic product high quality, micro-electronic manufacturing dress
It is standby that its nucleus movement platform and system are proposed in space availability ratio, stroke, speed, acceleration, kinetic stability etc.
High comprehensive requirement.
Existing XY platforms mostly use greatly two concatenated mode combinations of motor and form, and structural system is not compact, space profit
It is not high with rate, and there is related link is lengthy and jumbled, moving parts are more, load the defects of big, it is difficult to meet high-speed motion well
With precision positioning requirement.
Utility model content
The utility model discloses a kind of XY high-precision movement platforms of coplanar decoupling, can efficiently use space, and can be real
Precision positioning under present high-speed motion environment.
The present invention provides a kind of XY high-precision movement platforms of coplanar decoupling, including：First base, second base, first
Moving parts, the second moving parts and moving platform；
The first base, first moving parts, the second base, second moving parts and described move are put down
Platform is cascading from the bottom up；
First direction of motion of first moving parts and second direction of motion of second moving parts are mutually hung down
Directly；
The moving platform is connected and composed between any two by sub- moving platform, the first synkinesia part and the second synkinesia part；
First moving parts are for driving the moving platform progress to be moved along the macro of first direction of motion；
Second moving parts are used for when the second synkinesia part is fixed, the drive sub- moving platform and described
The progress of first synkinesia part is moved along the macro of second direction of motion；
First moving parts are additionally operable to when the second synkinesia part is fixed, and drive the sub- moving platform and institute
State micromotion of the first synkinesia part progress along first direction of motion；
Second moving parts are additionally operable to when the first synkinesia part and the second synkinesia part are fixed,
The sub- moving platform is driven to carry out the micromotion along second direction of motion.
Preferably, first moving parts include：First macro movement parts and with the described first macro movement parts elastic connection
The first macro/micromotion part, between the two be equipped with the first piezoelectric ceramics；
Second moving parts include：Second macro movement parts and macro with the second of the described second macro movement parts elastic connection
Micromotion part is equipped with the second piezoelectric ceramics between the two.
Preferably, there is the first extension, first extension to have the first empty slot in the described first macro movement parts；Institute
The first cavity for having on the first macro/micromotion part and accommodating first extension is stated, first cavity is equipped with for being embedded in
First protrusion of the non-end of the first empty slot；
There is the second extension, second extension to have the second empty slot in the second macro movement parts；Described second
There is the second cavity for accommodating second extension, second cavity is equipped with for being embedded in described the on macro/micromotion part
Second protrusion of the non-end of two empty slots.
Preferably, first piezoelectric ceramics is arranged in first empty slot and is located at the side of first protrusion,
In the first empty slot and other side of first protrusion is equipped with the first high steel spring；
Second piezoelectric ceramics be arranged in second empty slot and positioned at it is described second protrusion side, described second
In the empty slot and other side of second protrusion is equipped with the second high steel spring.
Preferably, the described first macro movement parts are slidably connected with the second synkinesia part, first macro/micromotion
Part is slidably connected with the sub- moving platform；
The second macro movement parts are slidably connected with the first synkinesia part, the second macro/micromotion part with it is described
Sub- moving platform is slidably connected.
Preferably, a kind of XY high-precision movement platforms of coplanar decoupling provided by the invention further include：First motor and second
Motor；
The stator of the first motor is installed in the first base；
The stator of second motor is installed in the second base；
It is the first motor to have the first L-type movement parts, the first L-type movement parts in the first macro movement parts
Mover；
It is second motor to have the second L-type movement parts, the second L-type movement parts in the second macro movement parts
Mover.
Preferably, the sub- moving platform and the first synkinesia part all have sliding rail, the second synkinesia part
The sliding slot to match with the sliding rail with the sub- moving platform and the first synkinesia part.
Preferably, there is the sub- moving platform third protrusion, the first synkinesia part to have the receiving third convex
The groove risen.
Preferably, the stator both sides of the first motor is provided with the first guide rail, and first guide rail is described for being arranged
First moving parts；
The stator both sides of second motor is provided with the second guide rail, and second guide rail is for being arranged second movement
Component.
Preferably, the first motor and second motor are U-type groove linear motor.
As can be seen from the above technical solutions, the utility model embodiment has the following advantages：
A kind of XY high-precision movement platforms of coplanar decoupling provided by the invention include：First base, second base, the first fortune
Dynamic component, the second moving parts and moving platform；First base, the first moving parts, second base, the second moving parts and dynamic flat
Platform is cascading from the bottom up；First direction of motion of the first moving parts and second direction of motion of the second moving parts
It is mutually perpendicular to；Moving platform is connected and composed between any two by sub- moving platform, the first synkinesia part and the second synkinesia part；First
Moving parts are for driving moving platform progress to be moved along the macro of first direction of motion；Second moving parts are used in the second auxiliary fortune
When moving part is fixed, with mover moving platform and the first synkinesia part move along the macro of second direction of motion；First exercise group
Part is additionally operable to when the second synkinesia part is fixed, and band mover moving platform and the first synkinesia part are carried out along first direction of motion
Micromotion；Second moving parts are additionally operable to when the first synkinesia part and the second synkinesia part are fixed, and band mover is dynamic flat
Platform carries out the micromotion along second direction of motion.The present invention is by by first base, the first moving parts, second base, second
Moving parts and moving platform are presented with stacked structure, can efficiently use space, the framework for simplifying entire platform and simplification
The composition of component, and since the direction of motion of the first moving parts and the second moving parts is vertical, moving platform is splitted into three pieces of sons
Component controls mass motion and the sub-component of moving platform by each autokinesis of the first moving parts and the second moving parts
Between relative motion realize precise positioning to realize the macro/micromotion on the directions XY.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is a kind of front view of the XY high-precision movement platforms of coplanar decoupling provided by the invention；
Fig. 2 is a kind of explosive view of the XY high-precision movement platforms of coplanar decoupling provided by the invention；
Fig. 3 is the structural schematic diagram of the first moving parts and the second moving parts.
Specific implementation mode
The utility model embodiment discloses a kind of XY high-precision movement platforms of coplanar decoupling, can efficiently use space,
And it can realize the precision positioning under high-speed motion environment.
It please refers to Fig.1 to Fig.3, a kind of one embodiment of the XY high-precision movement platforms of coplanar decoupling provided by the invention,
In the present embodiment, for convenience of description, the movement locus of the first moving parts is set as X-direction, by the second moving parts
Movement locus is set as Y direction.Platform provided in this embodiment includes：First base 1, second base 2, the first moving parts 3,
Second moving parts 4 and moving platform 5；
First base 1, the first moving parts 3, second base 2, the second moving parts 4 and moving platform 5 are from the bottom up successively
It is stacked, first direction of motion (in the present embodiment, the direction is X-direction) of the first moving parts 3 and the second exercise group
Second direction of motion (in the present embodiment, the direction is Y-direction) of part 4 is mutually perpendicular to.
In order to realize that moving platform 5 is divided into three parts by macro movement and micromotion, the present invention on the same platform, specifically by
Sub- moving platform 51, the first synkinesia part 52 and the second synkinesia part 53 connect and compose between any two.Optionally, sub- moving platform
51, the connection relation of the first synkinesia part 52 and the second synkinesia part 53 between any two can be：Sub- moving platform 51 and
One synkinesia part 52 all has sliding rail, and the second synkinesia part 53 has and sub- moving platform 51 and the first synkinesia part 52
The sliding slot that sliding rail matches, sub- moving platform 51 have third protrusion, and the first synkinesia part 52, which has, accommodates the recessed of third protrusion
Slot.
Optionally, in order to drive micromotion of the sub- moving platform 51 in XY both directions, the present invention to pass through on piezoelectric ceramics
The mode deformed upon after electricity realizes micromotion.First moving parts 3 include：First macro movement parts 31 and with the first macro movement parts
First macro/micromotion part 32 of 31 elastic connections is equipped with the first piezoelectric ceramics 33 between the two.Second moving parts 4 include：The
Two macro movement parts 41 and with second it is macro movement 41 elastic connections the second macro/micromotion part 42, between the two be equipped with the second piezoelectricity
Ceramics 43.
Optionally, in order to which piezoelectric ceramics is arranged between macro/micromotion part and macro movement parts, the structure of the two can be carried out
Matching.The concrete structure to match can be that there is the first extension, the first extension to have first in the first macro movement parts 31
Empty slot；There is the first cavity for accommodating the first extension, the first cavity are equipped on first macro/micromotion part 32 for being embedded in the
First protrusion of the non-end of one empty slot.There is the second extension 411, the second extension 411 to have the in second macro movement parts 41
Two empty slots 412；There is the second cavity 413 for accommodating the second extension 411, on the second cavity 413 on second macro/micromotion part 42
Equipped with the second protrusion 414 for being embedded in 412 non-end of the second empty slot.
Optionally, the first piezoelectric ceramics 33 is arranged in the first empty slot and in the side of the first protrusion, the first empty slot
And first protrusion the other side be equipped with the first high steel spring 34.Second piezoelectric ceramics 43 is arranged in the second empty slot and is located at second
The side of protrusion, the second empty slot is interior and the second raised other side is equipped with the second high steel spring 44.Herein to piezoelectric ceramics deformation
The process of macro/micromotion part is driven to illustrate afterwards：Since piezoelectric ceramics and Gao Gang are placed in the raised both sides of macro/micromotion part respectively
Spring, when piezoelectric ceramics does not power on, the elastic force of high pressure spring at this time carries out squeezing action to piezoelectric ceramics by protrusion and (holds out against pressure
Electroceramics), prevent piezoelectric ceramics from deforming upon.After the power is turned on, ceramics deform upon in itself applies a pressure to ceramics to protrusion, should
Pressure is more than the elastic force of spring at this time, therefore under force, macro/micromotion part is subjected to displacement i.e. micromotion.
Optionally, the first macro movement parts 31 are slidably connected with the second synkinesia part 53, the first macro/micromotion part 32 and son
Moving platform 51 is slidably connected.Second macro movement parts 41 are slidably connected with the first synkinesia part 52, the second macro/micromotion part 42 with
Sub- moving platform 51 is slidably connected.As shown in Fig. 2, the upper end of the first macro movement parts 31 opens up fluted, the direction of the groove and Y-axis
Direction is consistent, and by the groove, the first macro movement parts 31 and the sliding rail of the second synkinesia part 53 are slidably connected.The known to similarly
Connection type, the second macro movement parts 41 between one macro/micromotion part 32 and sub- moving platform 51 and between the first synkinesia part 52
Connection type, the connection type between the second macro/micromotion part 42 and sub- moving platform 51.
Optionally, a kind of XY high-precision movement platforms of coplanar decoupling provided by the invention further include：First motor and second
Motor.The stator 61 of first motor is installed in first base, and the stator 71 of the second motor is installed in second base.First is macro
It is the mover of first motor, the second macro movement parts 41 to have the first L-type movement parts 62, the first L-type movement parts 62 in movement parts 31
It is the mover of the second motor above to have the second L-type movement parts 72, the second L-type movement parts 72.First motor and the second motor are U
Type groove linear motor.It is understood that for convenience of description, motor herein can refer to first motor and also can refer to the second motor, electricity
The mover of machine stretches into the stator of electronics, after stator is powered, generates magnetic force moving mover therebetween and moves along a straight line, i.e.,
The linear motion of macro movement parts (the first macro movement parts 31 and/or the second macro movement parts 41), macro movement parts has been driven then to drive
The linear motion of entire moving parts, and then driven the macro movement of moving platform.
Optionally, 61 both sides of stator of first motor is provided with the first guide rail 8, and the first guide rail 8 is for being arranged the first movement
Component 3.71 both sides of stator of second motor is provided with the second guide rail 9, and the second guide rail is for being arranged the second moving parts 4.Such as Fig. 2
It is shown, the first macro movement parts 31, the first macro/micromotion part 32 lower surface offer sliding slot, be used for and the first guide rail 8 match
Resultant motion, similarly the connection type between the second macro movement parts 41, the second macro/micromotion part 42 and the second guide rail, no longer superfluous herein
It states.
It should be noted that the macro movement in XY both directions had both may be implemented in platform provided by the invention, it can also be real
Micromotion in existing XY both directions, this Four processes can select multiple processes to be carried out one by one, can also appoint in four
Meaning combination is carried out at the same time, and is realized macro micro- compound.It is illustrated below against Four processes：
When the macro movement of X-direction need to be carried out, first motor drive the first macro movement parts 31, the first macro/micromotion part 32,
Moving platform 5 realizes macro movement in X direction.
When that need to carry out the macro movement of Y-direction, the second synkinesia part 53 is fixed at this time, the second motor driving second
Macro movement parts 41, the second macro/micromotion part 42, sub- moving platform 51, the realization of the first synkinesia part 52 are moved along the macro of Y-direction.
When that need to carry out the micromotion of X-direction, the second synkinesia part 53 is fixed at this time, and the first piezoelectric ceramics 33 drives
Dynamic first macro/micromotion part 32, sub- moving platform 51, the first synkinesia part 52 realize micromotion in X direction.
When that need to carry out the micromotion of Y-direction, the first synkinesia part 52 and the second synkinesia part 53 are fixed not at this time
Dynamic, the second piezoelectric ceramics 43 drives the second macro/micromotion part 42, sub- moving platform 51 to realize the micromotion along Y-direction.
In the present embodiment, the first macro/micromotion part 32 is equipped with reading head installation part, is installed on the reading head installation part
There is reading head, the grating scale along X axis coordinated with the reading head is installed on the first guide rail 8.The reading head and grating scale can
Displacement information to record X-direction feeds back to computer.
The present invention realizes XY two axle movements, simple in structure, moving parts with the frame mode of ring fastening type in same plane
Less, load is small, greatly reduces motion complexity.The present invention uses the design concept of macro micro- compound positioning, i.e., first uses high property
The macro movement parts of energy linear motor driving XY realize macro movement and micron order positioning accuracy, then push XY macro micro- using piezoelectric ceramics
Movement parts realize micromotion and nano grade positioning precision, and then moving platform is made to overcome the contradiction of stroke, speed and precision, final real
Precision under existing high-speed motion environment generates.For the present invention also by linear motor and piezoelectric ceramics Driven by Coaxial, grating scale can be same
The precision measure of the macro micro- compound motions of Shi Shixian, is easy to feedback control.
The utility model has following advantages：
(1) it is presented with stacked structure, simplifies the framework of entire platform and the composition of simplified assembly, can efficiently use
X/Y plane space, the very advantageous in the microelectronics manufacturing industry of narrow space；
(2) macro micro- two-stage common rail driving, synchronous control.Effectively overcome switching problem and macro microbit of the macro movement with micromotion
The error problem for moving compound tense effectively reduces moving parts, and simple in structure light and handy, platform loads are small, possessing high speed, Gao Jia
While fast, big stroke advantage, and high-precision feature is had both, realizes the accurate generation under high-speed motion environment；
(3) design " three groups of sub-components " realizes macro mobile decoupling and micromotion decoupling in the same plane, i.e., macro micro-
" the coplanar bilingual coupling " of four driving sources.Realize macro micro- compound motion on the directions XY, the precise positioning of plane space position.
A kind of XY high-precision movement platforms of coplanar decoupling provided by the utility model are described in detail above, it is right
In those of ordinary skill in the art, based on the idea of the embodiment of the present invention, in specific embodiments and applications
There will be changes, in conclusion the content of the present specification should not be construed as a limitation of the present invention.
Claims (10)
1. a kind of XY high-precision movement platforms of coplanar decoupling, which is characterized in that including：First base, second base, the first movement
Component, the second moving parts and moving platform；
The first base, first moving parts, the second base, second moving parts and the moving platform from
Under be up cascading；
First direction of motion of first moving parts and second direction of motion of second moving parts are mutually perpendicular to；
The moving platform is connected and composed between any two by sub- moving platform, the first synkinesia part and the second synkinesia part；
First moving parts are for driving the moving platform progress to be moved along the macro of first direction of motion；
Second moving parts are used for when the second synkinesia part is fixed, and drive the sub- moving platform and described first
The progress of synkinesia part is moved along the macro of second direction of motion；
First moving parts are additionally operable to when the second synkinesia part is fixed, and drive the sub- moving platform and described the
One synkinesia part carries out the micromotion along first direction of motion；
Second moving parts are additionally operable to, when the first synkinesia part and the second synkinesia part are fixed, drive
The sub- moving platform carries out the micromotion along second direction of motion.
2. the XY high-precision movement platforms of coplanar decoupling according to claim 1, which is characterized in that first moving parts
Including：First macro movement parts and the first macro/micromotion part with the described first macro movement parts elastic connection are equipped with the between the two
One piezoelectric ceramics；
Second moving parts include：Second macro movement parts and second macro micro- fortune with the described second macro movement parts elastic connection
Moving part is equipped with the second piezoelectric ceramics between the two.
3. the XY high-precision movement platforms of coplanar decoupling according to claim 2, which is characterized in that the first macro movement parts
It is upper that there is the first extension, first extension to have the first empty slot；Have on the first macro/micromotion part described in accommodating
First cavity of the first extension, first cavity are equipped with the first protrusion for being embedded in the non-end of the first empty slot；
There is the second extension, second extension to have the second empty slot in the second macro movement parts；Described second is macro micro-
There is the second cavity for accommodating second extension, second cavity to be equipped with empty for being embedded in described second in movement parts
Second protrusion of the non-end of slot.
4. the XY high-precision movement platforms of coplanar decoupling according to claim 3, which is characterized in that first piezoelectric ceramics
Be arranged in first empty slot and positioned at the side of first protrusion, in first empty slot and first protrusion it is another
Side is equipped with the first high steel spring；
Second piezoelectric ceramics is arranged in second empty slot and positioned at the side of second protrusion, second empty slot
The other side of interior and described second protrusion is equipped with the second high steel spring.
5. the XY high-precision movement platforms of the coplanar decoupling according to claim 2 to 4 any one, which is characterized in that described
First macro movement parts are slidably connected with the second synkinesia part, and the first macro/micromotion part is slided with the sub- moving platform
Connection；
The second macro movement parts are slidably connected with the first synkinesia part, and the second macro/micromotion part and the son are dynamic
Platform is slidably connected.
6. the XY high-precision movement platforms of coplanar decoupling according to claim 5, which is characterized in that further include：First motor
With the second motor；
The stator of the first motor is installed in the first base；
The stator of second motor is installed in the second base；
It is the dynamic of the first motor to have the first L-type movement parts, the first L-type movement parts in the first macro movement parts
Son；
It is the dynamic of second motor to have the second L-type movement parts, the second L-type movement parts in the second macro movement parts
Son.
7. the XY high-precision movement platforms of coplanar decoupling according to claim 1, which is characterized in that the sub- moving platform and institute
It states the first synkinesia part and all has sliding rail, the second synkinesia part has and the sub- moving platform and first auxiliary
The sliding slot that the sliding rail of movement parts matches.
8. the XY high-precision movement platforms of coplanar decoupling according to claim 7, which is characterized in that the sub- moving platform has
Third protrusion, the first synkinesia part have the groove for accommodating the third protrusion.
9. the XY high-precision movement platforms of coplanar decoupling according to claim 6, which is characterized in that the first motor is determined
Sub- both sides is provided with the first guide rail, and first guide rail is for being arranged first moving parts；
The stator both sides of second motor is provided with the second guide rail, and second guide rail is for being arranged second exercise group
Part.
10. the XY high-precision movement platforms of coplanar decoupling according to claim 6, which is characterized in that the first motor and
Second motor is U-type groove linear motor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820393838.5U CN208034111U (en) | 2018-03-22 | 2018-03-22 | A kind of XY high-precision movement platforms of coplanar decoupling |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820393838.5U CN208034111U (en) | 2018-03-22 | 2018-03-22 | A kind of XY high-precision movement platforms of coplanar decoupling |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108213992A (en) * | 2018-03-22 | 2018-06-29 | 广东工业大学 | A kind of XY high-precision movement platforms of coplanar decoupling |
| CN109686690A (en) * | 2019-02-01 | 2019-04-26 | 广东工业大学 | One kind inlaying stacked XYZ Three-Dimensional Dynamic micro-move device device |
| CN117055634A (en) * | 2023-08-17 | 2023-11-14 | 千凰微纳装备科技(北京)有限公司 | Switching method of double grating scales of high-speed precise motion platform |
-
2018
- 2018-03-22 CN CN201820393838.5U patent/CN208034111U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108213992A (en) * | 2018-03-22 | 2018-06-29 | 广东工业大学 | A kind of XY high-precision movement platforms of coplanar decoupling |
| CN109686690A (en) * | 2019-02-01 | 2019-04-26 | 广东工业大学 | One kind inlaying stacked XYZ Three-Dimensional Dynamic micro-move device device |
| CN109686690B (en) * | 2019-02-01 | 2024-06-07 | 广东工业大学 | Inlay range upon range of formula XYZ three-dimensional developments micro-drive arrangement |
| CN117055634A (en) * | 2023-08-17 | 2023-11-14 | 千凰微纳装备科技(北京)有限公司 | Switching method of double grating scales of high-speed precise motion platform |
| CN117055634B (en) * | 2023-08-17 | 2024-05-17 | 千凰微纳装备科技(北京)有限公司 | Switching method of double grating scales of high-speed precise motion platform |
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