CN117055634B - Switching method of double grating scales of high-speed precise motion platform - Google Patents
Switching method of double grating scales of high-speed precise motion platform Download PDFInfo
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- G—PHYSICS
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- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/14—Control of position or direction using feedback using an analogue comparing device
- G05D3/1445—Control of position or direction using feedback using an analogue comparing device with a plurality of loops
- G05D3/1463—Control of position or direction using feedback using an analogue comparing device with a plurality of loops using PID devices
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention relates to a high-speed precise motion platform double-grating ruler switching method, which comprises a motion platform, wherein the motion platform comprises a low-precision motion interval and a high-precision motion interval; the motion platform converts position points from a low-precision motion control section to a high-precision motion control section; when the motion structure part of the motion platform passes through the feedback position of the first encoder and the feedback position of the second encoder, the new feedback position is output as the real-time position of the motion structure part; the motion control unit realizes undisturbed switching by utilizing mutual tracking of two paths of feedback signals. The invention relates to a switching method of a double grating ruler of a high-speed precise motion platform, which combines high speed and high precision, and utilizes the same motion platform to feed back motion control units by adopting grating ruler systems with different precision when different working positions are adopted; the high speed of the low-precision process section and the low speed of the high-precision process section are realized through undisturbed switching control strategy, stroke design and acceleration and deceleration optimization; the complex structural design of the micro-motion stage part is reduced, and the space and the weight of the whole motion stage are reduced.
Description
Technical Field
The invention relates to the field of precise motion control, in particular to a method for switching a double grating ruler of a high-speed precise motion platform.
Background
The high-precision motion platform is a core technology of high-end equipment and advanced manufacturing industry, and is widely applied to semiconductor processing detection equipment, LCD, micro LED, exposure, lithography, other manufacturing equipment and the like at present.
The high-precision motion platform needs to realize nano-scale or even sub-nano-scale precision under high speed and high acceleration. The motion control part uses the grating system as a position feedback unit of a closed-loop servo system. The grating ruler has the advantages of high precision, strong anti-interference capability, long service life and the like, and becomes a main tool for micro-nano displacement measurement.
In either the transmissive or reflective photoelectric grating scale, a light emitting element or a light receiving device is used, and the change in light is detected by a scale cell and the displacement is output. However, due to the limitation of the optical path structure and the scanning frequency of the optical signal detection circuit, the measurement resolution (precision) of the single grating ruler is inversely proportional to the maximum allowable moving speed. For example, the same type of Sanfeng grating system ST36D has a signal period of 4um and a maximum allowable moving speed of 360mm/s when the electron subdivision resolution is 50 nm; when the electron subdivision resolution is 100nm, the maximum allowable moving speed is 720mm/s;
the high-precision motion platform is divided into a loading position, an exposure scanning position and an alignment scanning position in practical application. The accuracy requirement for the moving average difference (MA) of the upper sheet position is below 10um, the accuracy requirement for the moving average difference (MA) of the exposure scanning position and the alignment scanning position is below 100nm, the strict requirement for the productivity is made, and the comprehensive moving average speed of the moving table is not lower than 600mm/s.
In order to meet the above technical requirements, the conventional motion platform generally adopts macro-motion and micro-motion systems, and the systems have the advantages of complex structural design, high manufacturing cost, high failure rate and high maintenance cost.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the double grating ruler switching method for the high-speed precise motion platform, which has the advantages of simple structure, low manufacturing cost, low failure rate, low maintenance cost and simplicity in operation.
The technical scheme adopted by the invention is as follows:
a switching method of a double grating ruler of a high-speed precise motion platform,
The motion platform comprises a low-precision motion interval and a high-precision motion interval;
The low-precision movement interval adopts a20 um grid-distance increment grating ruler; the first control unit is connected with the feedback receiving port;
the high-precision movement interval adopts a 4um grid-pitch analog quantity grating ruler; the second control unit is connected with the feedback receiving port;
The motion platform converts position points from a low-precision motion control section to a high-precision motion control section; when the motion structure part of the motion platform passes through the feedback position of the first encoder and the feedback position of the second encoder, the new feedback position is output as the real-time position of the motion structure part; the motion control unit realizes undisturbed switching by utilizing mutual tracking of two paths of feedback signals.
Preferably, the feedback position of the first encoder is arranged at the zero position of the reading head mounted on the moving table; the whole process reads, and 0-1500mm process sections participate in servo regulation;
the feedback position of the second encoder is arranged at the zero position of the reading head arranged on the moving table, and the whole-course reading is carried out, and the 500mm-2000mm process section participates in servo regulation;
The feedback positions of the first encoder and the feedback positions of the second encoder are added, the stroke covers the whole process section of the moving table, the two parts of positions are mutually independent, and data acquisition is carried out when the moving table moves to the corresponding section.
Preferably, the specific control process of the undisturbed control strategy of the motion control unit is as follows:
Undisturbed switching process: the signal of the undisturbed switching position ON/OFF is turned over, so that the output of the logic function block SEL is different, and when the signal is ON, a second path 2' of the logic function block is selected; when the signal is OFF, selecting a first path 1';
Step 1: the undisturbed switching position is positioned at a section of the motion platform from low precision to high precision, and a 1500mm stroke position point is illustrated, and is judged by the absolute value (position point-1500) being smaller than the dead zone 1 um; the New Position of the New feedback is the output of the two paths of encoders after the selection operation;
Step 2, the motion of the motion platform is in a stroke section of 0-1500mm, the state of the undisturbed switching position is OFF, the SEL1 functional block selects the input of a first path as output, and the new feedback position is equal to the feedback position 1 of the encoder;
at this time, the 2 nd input of the SEL1 functional block is not output; the encoder feedback position 2 only participates in tracking operation, and the result of the operation is not output.
Step 3, the moving table moves to a 1500mm position, the undisturbed switching position state of the position point is ON through the comparison of the algorithm in the step 1, and at the switching moment, 500ms is waited;
Step 4, at this time, the selection function block SEL2 selects the 2 nd input, the 1 st input is no longer output, but the output of SEL2 always remains the value of the previous period, that is, the value of the previous period, and the SEL2 output is no longer changed;
The selection function block SEL1 selects the 2 nd output;
And step 5, the self-holding of the deviation data between the feedback of the two encoders is selected by the SEL2 at the switching moment through the arithmetic logic, so that the undisturbed switching is realized.
Compared with the prior art, the invention has the beneficial effects that:
The invention relates to a switching method of a double grating ruler of a high-speed precise motion platform, which combines high speed and high precision, and utilizes the same motion platform to feed back motion control units by adopting grating ruler systems with different precision when different working positions are adopted; the high speed of 1200mm/s of the low-precision process section and the low speed of 200mm/s of the high-precision process section are realized through undisturbed switching control strategy, stroke design and acceleration and deceleration optimization, and the comprehensive speed is not lower than 400mm/s. ; the complex structural design of the micro-motion stage part is reduced, and the space and the weight of the whole motion stage are reduced.
Drawings
FIG. 1 is a schematic diagram of a double grating scale undisturbed switching control scheme of the double grating scale switching method of the high-speed precision motion platform;
FIG. 2 is a schematic diagram of undisturbed switching algorithm of the switching method of the double grating scale of the high-speed precision motion platform;
FIG. 3 is a velocity graph of the dual grating scale switching method of the high-speed precision motion platform of the present invention;
Fig. 4 is a graph of the actual motion of the high-speed precision motion platform double grating ruler switching method of the invention.
Detailed Description
The invention is described in detail below with reference to the attached drawings and examples:
As can be seen from fig. 1-4, a method for switching double grating scales of a high-speed precise motion platform,
The motion platform comprises a low-precision motion interval and a high-precision motion interval;
The low-precision movement interval adopts a20 um grid-distance increment grating ruler; the first control unit is connected with the feedback receiving port;
the high-precision movement interval adopts a 4um grid-pitch analog quantity grating ruler; the second control unit is connected with the feedback receiving port;
The motion platform converts position points from a low-precision motion control section to a high-precision motion control section; when the motion structure part of the motion platform passes through the feedback position of the first encoder and the feedback position of the second encoder, the new feedback position is output as the real-time position of the motion structure part; the motion control unit realizes undisturbed switching by utilizing mutual tracking of two paths of feedback signals.
Preferably, the first encoder feedback position is set at a zero position where the reading head is mounted on the motion stage. The whole process reads, and the process section (0-1500 mm range) participates in servo regulation.
The feedback position of the second encoder is arranged at the zero position of the reading head which is arranged on the moving table, and the reading head reads in the whole course [ in this way, the phenomenon of lost number can occur when moving at high speed, the process introduces tracking operation ], and the process section (500 mm-2000mm range) participates in servo adjustment;
The first encoder feedback position and the second encoder feedback position are added, and the stroke covers the whole process section of the motion platform. The two parts are mutually independent, and data acquisition is carried out when the motion platform moves to the corresponding interval.
Preferably, the specific control process of the undisturbed control strategy of the motion control unit is as follows:
Undisturbed switching process: the signal of the undisturbed switching position ON/OFF is turned over, so that the output of a logic function block SEL (SEL 1 and SEL2 in the illustration) is different, and when the logic function block SEL is ON, a second path 2' of the logic function block is selected; when the signal is OFF, selecting a first path 1';
Step 1: the undisturbed switching position is positioned at a low-precision to high-precision section of the motion platform, and a 1500mm stroke position point is illustrated. Judging by the absolute value (position point-1500) smaller than the dead zone 1 um; the New Position (actual Position) is the output of the two paths of encoders after the selection operation;
Step 2, the motion of the motion platform is in a stroke section of 0-1500mm, the state of the undisturbed switching Position is OFF, the SEL1 functional block selects the input of a first path as output, and the New feedback Position (New Position) is equal to the encoder feedback Position1 (Encoder Position 1);
At this time, the 2 nd input of the SEL1 functional block is not output. Encoder feedback position2 (Encoder Position 2) is only involved in the tracking operation, (Encoder Position1-Encoder Position 2) + Encoder Position2, and the result of this operation is not output.
Step 3, the moving table moves to a 1500mm position, the undisturbed switching position state of the position point is ON by comparison of the algorithm in step 1, and at the same time, 500ms (t 3 value in the legend 3) is waited for at the switching moment
At this time, the selection function SEL2 selects the 2 nd input, the 1 st input (Encoder Position th to Encoder Position th inputs) is no longer output, but the output of SEL2 is always kept at the value of the last cycle, that is, the (Encoder Position1 to Encoder Position 2) value of the last cycle, and the SEL2 output is no longer changed.
The selection function block SEL1 selects the 2 nd output, i.e., (Encoder Position1-Encoder Position 2) + Encoder Position2 arithmetic part output. Only Encoder Position2 is the variation.
And step 5, the self-holding of the deviation data between the feedback of the two encoders is selected by the SEL2 at the switching moment through the arithmetic logic, so that the undisturbed switching is realized. The feedback value does not produce a step change in the entire motion position interval of the platform. Thereby ensuring the stability of the adjusting process.
Step 6, designing different acceleration values according to the process requirement that the comprehensive speed is 600mm/S and the stroke is 2000mm, and passing the speed (V=V 0 +at) and the stroke (S=VT);
Step 7, designing different acceleration values according to the process requirement that the comprehensive speed is 600mm/S and the stroke is 2000mm, and passing the speed (V=V 0 +at) and the stroke (S=Vt+1/2 at 2); realize low-precision high-speed section s1=1500mm; in this application t=1.3 s, the speed is 1200mm/s; high-precision low-speed segment s1=500 mm; in this application t=2.67 s, the speed is 200mm/s; the switching time is 500ms, and after comprehensive operation, the comprehensive movement speed of the movement platform is 447mm/s, so that the requirement of 400mm/s is met.
And 9, performing repeated movement verification to meet the process requirements.
The Position input of the Position loop is a New feedback Position after undisturbed switching, the comparison operation is carried out with a motion Position instruction given by an upper Position, and the output control of the regulator is gradually stable by adjusting the proportion, integral and differential values of the part of the control layer pid regulator.
The input of the speed ring is derived from the internal operation of position, time and acceleration, and compared with the speed instruction given by the upper position, and the output control of the regulator is gradually stable by adjusting the proportion, integral and differential value of the pid regulator part of the control layer.
The accuracy and rigidity of the motion platform are matched through the comprehensive adjustment of the PID regulator in the double loops.
The loop is closed loop feedback, and the position loop is that the position difference between the target and the current position is reflected by the motor encoder and transmitted back to the controller. The target position is compared with the actual position of the motor, and the deviation is used to generate an adjustment command of the motor through a position regulator. The speed loop is that the relation between the target speed and the current speed difference and the time is reflected and transmitted to the controller. The deviation of the speed setting and the time speed is used to generate a regulating command of the motor through a position regulator. The motion servo is typically a tricyclic servo system. Speed and torque loops. Wherein the torque ring is the current control of the motor itself. The rigidity and the precision of the motion structure can be reflected only by the good performance of the closed loop of the position and the speed ring.
The invention relates to a switching method of a double grating ruler of a high-speed precise motion platform, which combines high speed and high precision, and utilizes the same motion platform to feed back motion control units by adopting grating ruler systems with different precision when different working positions are adopted; the high speed of 1200mm/s of the low-precision process section and the low speed of 200mm/s of the high-precision process section are realized through undisturbed switching control strategy, stroke design and acceleration and deceleration optimization, and the comprehensive speed is not lower than 400mm/s. ; the complex structural design of the micro-motion stage part is reduced, and the space and the weight of the whole motion stage are reduced.
The above description is only of the preferred embodiment of the present invention, and is not intended to limit the structure of the present invention in any way. Any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention fall within the technical scope of the present invention.
Claims (2)
1. A switching method of a double grating ruler of a high-speed precise motion platform is characterized in that,
The motion platform comprises a low-precision motion interval and a high-precision motion interval;
The low-precision movement interval adopts a20 um grid-distance increment grating ruler; the first control unit is connected with the feedback receiving port;
the high-precision movement interval adopts a 4um grid-pitch analog quantity grating ruler; the second control unit is connected with the feedback receiving port;
The motion platform converts position points from a low-precision motion control section to a high-precision motion control section; when the motion structure part of the motion platform passes through the feedback position of the first encoder and the feedback position of the second encoder, the new feedback position is output as the real-time position of the motion structure part; the motion control unit realizes undisturbed switching by utilizing mutual tracking of two paths of feedback signals;
The specific control process of the undisturbed control strategy of the motion control unit is as follows:
Undisturbed switching process: the signal of the undisturbed switching position ON/OFF is turned over, so that the output of the logic function block SEL is different, and when the signal is ON, a second path 2' of the logic function block is selected; when the signal is OFF, selecting a first path 1';
Step1: the undisturbed switching position is positioned at a position point of a stroke from low precision to high precision of the motion platform, and the position point of 1500mm is judged by an absolute value smaller than 1um of the dead zone; the New Position of the New feedback is the output of the two paths of encoders after the selection operation;
Step 2, the motion of the motion platform is in a stroke section of 0-1500mm, the state of the undisturbed switching position is OFF, the SEL1 functional block selects the input of a first path as output, and the new feedback position is equal to the feedback position 1 of the encoder;
at this time, the 2 nd input of the SEL1 functional block is not output; the encoder feedback position 2 only participates in tracking operation, and the result of the operation is not output;
step 3, the moving table moves to a 1500mm position, the undisturbed switching position state of the position point is ON through the comparison of the algorithm in the step 1, and at the switching moment, 500ms is waited;
Step 4, at this time, the selection function block SEL2 selects the 2 nd input, the 1 st input is no longer output, but the output of SEL2 always remains the value of the previous period, that is, the value of the previous period, and the SEL2 output is no longer changed;
The selection function block SEL1 selects the 2 nd output;
And step 5, the self-holding of the deviation data between the feedback of the two encoders is selected by the SEL2 at the switching moment through the arithmetic logic, so that the undisturbed switching is realized.
2. The method for switching the double grating scale of the high-speed precise motion platform according to claim 1, which is characterized in that:
The feedback position of the first encoder is arranged at the zero position of the reading head mounted on the moving table; the whole process reads, and 0-1500mm process sections participate in servo regulation;
the feedback position of the second encoder is arranged at the zero position of the reading head arranged on the moving table, and the whole-course reading is carried out, and the 500mm-2000mm process section participates in servo regulation;
The feedback positions of the first encoder and the feedback positions of the second encoder are added, the stroke covers the whole process section of the moving table, the two parts of positions are mutually independent, and data acquisition is carried out when the moving table moves to the corresponding section.
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