CN209140887U - A kind of two dimension decoupling macro/micromotion platform - Google Patents
A kind of two dimension decoupling macro/micromotion platform Download PDFInfo
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- CN209140887U CN209140887U CN201821716567.9U CN201821716567U CN209140887U CN 209140887 U CN209140887 U CN 209140887U CN 201821716567 U CN201821716567 U CN 201821716567U CN 209140887 U CN209140887 U CN 209140887U
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Abstract
The utility model discloses a kind of two dimension decoupling macro/micromotion platform, including plane bottom plate and host computer, X-axis moving parts, Y-axis moving parts, intermediary movements component, macro motion driving mechanism and micromotion driving mechanism are provided on plane bottom plate；X-axis moving parts include the first guide rail and the first moving slide block；Y-axis moving parts include the second guide rail and the second moving slide block；Intermediary movements component includes X-axis guide rail, Y-axis guide rail, halfpace；Macro motion driving mechanism is for driving the macro movement of the first moving slide block and the second moving slide block to feed；Micromotion driving mechanism is for driving the micromotion of the first moving slide block and the second moving slide block to compensate.Above-mentioned two dimension decoupling macro/micromotion platform, by mutual glitch-free macro micro-structure, realizes the two-way development of high-speed cruising and accurate error compensation, can be realized simple and fast high-precision motion in practical work process.
Description
Technical field
The utility model relates to microelectronic manufacturing technology field more particularly to a kind of two dimension decoupling macro/micromotion platforms.
Background technique
The manufacture of the high production capacity of microelectronic product high quality, high accuracy positioning and High acceleration motion depending on key mechanism
The two take into account.High-precision can be used the compound motion that macro/micromotion combines with positioning with High acceleration motion and realize, domestic
Outer existing similar research.However, the cores such as swifching mechanism and behavior description of macro micro- composite high speed movement and its subsystem movement
Problem, including mathematical description, vibration behavior, kinetic characteristic and estimation of stability etc., are not solved effectively always.At a high speed
The structure design of precision movement platform is determined in vibration suppressing method design with control strategy, and it is currently micro- with future to become raising
The key of electronic manufacture equipment and its motion platform.In addition, the actuator system of micro-nano motion generation, is related to electricity, magnetic, machine
The multiple physical fields Coupling method such as structure, functional material, it is multidisciplinary melt that movenent performance is by more multifactor impact constraints and influences
The sciences problems of conjunction；The mechanism that micro-nano precision under macro micro- compound motion operating condition based on functional material generates, especially material
Characteristic, structure size and constituent are to non-linear sluggish, creep and drift effect physical essence and affecting laws, correlation reason
The shortcoming of opinion limits always the accuracy of high-speed motion platform.
Currently, the contradiction between the high-speed motion and precise motion of macro/micromotion platform, has become micro-electronic manufacturing dress
The standby bottleneck developed towards big stroke, high speed, high acceleration, the contour performance indicator of high-precision.
In conclusion how to solve macro/micromotion platform to high-speed cruising and the two-way development of precise motion asking there are bottleneck
Topic has become the technical problem of those skilled in the art's urgent need to resolve.
Utility model content
The purpose of the utility model is to provide a kind of two dimension decoupling macro/micromotion platforms, to solve macro/micromotion platform to height
There is bottleneck in speed operation and the two-way development of precise motion.
To achieve the goals above, the utility model provides a kind of two dimension decoupling macro/micromotion platform, including plane bottom
Plate and host computer are provided with X-axis moving parts on the plane bottom plate, Y-axis moving parts, intermediary movements component, macro movement are driven
Motivation structure and micromotion driving mechanism；
The X-axis moving parts include two the first guide rails being arranged in parallel along the x axis and are separately positioned on described the
And it can be along the first moving slide block of the corresponding first guide rail sliding on one guide rail；
The Y-axis moving parts include two the second guide rails being arranged in parallel along the y axis and are separately positioned on described the
And it can be along the second moving slide block of the corresponding second guide rail sliding on two guide rails；
The intermediary movements component include both ends be connected on two second moving slide blocks X-axis guide rail, two
Hold the Y-axis guide rail being connected on two first moving slide blocks, halfpace；
It is provided with X-axis grating scale in the X-axis guide rail, Y-axis grating scale is provided in the Y-axis guide rail, and the X-axis is led
Rail and the Y-axis guide rail are arranged in a manner of right-angled intersection；The halfpace is located at an angle of the crossing of the right-angled intersection
It can move above and with the movement of the X-axis guide rail and the Y-axis guide rail, the first reading head is provided on the halfpace
With the second reading head；First reading head is used to read the reading of the X-axis grating scale, and second reading head is for reading
The reading of the Y-axis grating scale；
First reading head, second reading head, the macro motion driving mechanism and the micromotion driving mechanism
It is connect with the host computer, and the macro motion driving mechanism is for driving first moving slide block and second movement
The macro movement of sliding block is fed；The micromotion driving mechanism is for driving first moving slide block and second moving slide block
Micromotion compensation.
Preferably, the macro motion driving mechanism is linear motor.
Preferably, the micromotion driving mechanism includes piezoelectric ceramic actuator and for reading first moving slide block
With the capacitance sensor of the micromotion numerical value of second moving slide block.
Preferably, the structure type of the piezoelectric ceramic actuator is the structure type of piezoelectric ceramics combination spring.
Preferably, the corresponding position contacted with the X-axis guide rail of the halfpace is provided with the first track roller, described
The corresponding position contacted with the Y-axis guide rail of halfpace is provided with the second track roller.
Preferably, the bottom of the plane bottom plate is additionally provided with shock insulation platform.
Preferably, the shock insulation platform is marble platform.
Content, above-mentioned two dimension decoupling macro/micromotion platform, including plane bottom plate and host computer are introduced compared to background technique,
X-axis moving parts, Y-axis moving parts, intermediary movements component, macro motion driving mechanism and micromotion is provided on plane bottom plate to drive
Motivation structure；X-axis moving parts include two the first guide rails being arranged in parallel along the x axis and be separately positioned on the first guide rail and
The first moving slide block that can be slided along corresponding first guide rail；Y-axis moving parts include two and are arranged in parallel along the y axis
Second guide rail and the second moving slide block that is separately positioned on the second guide rail and can be slided along corresponding second guide rail；Centre fortune
Dynamic component includes that the X-axis guide rail that is connected on two the second moving slide blocks of both ends, both ends are connected to two first fortune
Y-axis guide rail, halfpace on movable slider；It is provided with X-axis grating scale in X-axis guide rail, Y-axis grating is provided in Y-axis guide rail
Ruler, and X-axis guide rail and Y-axis guide rail are arranged in a manner of right-angled intersection；Halfpace is located on an angle of the crossing of right-angled intersection
And can be moved with the movement of X-axis guide rail and Y-axis guide rail, the first reading head and the second reading head are provided on halfpace；
First reading head is used to read the reading of X-axis grating scale, and the second reading head is used to read the reading of Y-axis grating scale；First reading
Head, the second reading head, macro motion driving mechanism and micromotion driving mechanism are connect with host computer, and macro motion driving mechanism is used
In the macro movement feeding for driving the first moving slide block and the second moving slide block；Micromotion driving mechanism is for driving the first movement to slide
The compensation of the micromotion of block and the second moving slide block.Above-mentioned two dimension decoupling macro/micromotion platform is in practical work process, with centre
The initial position of platform is origin, establishes macro movement rectangular coordinate system, sends macro fortune to macro motion driving mechanism by host computer
The instruction of dynamic stroke, macro motion driving mechanism drive the first moving slide block and the second moving slide block to execute macro movement feeding, specifically
Macro motion process be host computer by the first reading head obtain X-axis grating scale reading, pass through the second reading head obtain Y-axis light
The reading of grid ruler, and make comparisons with the numerical value of macro movement travel, judge whether presetting in macro motion positions accuracy rating, if
It is that then macro motion compensation is completed, if otherwise macro motion driving mechanism continues that the first moving slide block and the second moving slide block is driven to hold
The macro movement feeding of row；After macro movement, host computer sends the instruction of micromotion stroke, micromotion to micromotion driving mechanism
Driving mechanism drives the first moving slide block and the second moving slide block to execute micromotion compensation, specific micromotion compensation process are as follows:
Host computer obtains halfpace by micromotion driving mechanism and reads in the micromotion of X-direction and Y direction, and and micromotion
The numerical value of stroke is made comparisons, and is judged whether within the scope of default micromotion positioning accuracy, if so, the compensation of micromotion is completed simultaneously
Terminate, if otherwise micromotion driving mechanism continues that the first moving slide block and the second moving slide block is driven to execute micromotion compensation.On
Two dimension decoupling macro/micromotion platform is stated, the mobile decoupling in X, Y-direction is realized, reduces the dry of two directions of motion of X, Y
It disturbs, so that reducing influences brought by complicated structure link and macro micro- compound movement.Namely by mutually glitch-free macro micro-
Structure realizes the two-way development of high-speed cruising and accurate error compensation, can be realized simple and fast high-precision motion.
Detailed description of the invention
Fig. 1 is the arragement construction of each moving parts of two dimension decoupling macro/micromotion platform provided by the embodiment of the utility model
Schematic diagram；
Fig. 2 is the structural schematic diagram of halfpace provided by the embodiment of the utility model；
Fig. 3 is the structural schematic diagram of micromotion driving mechanism provided by the embodiment of the utility model；
Fig. 4 is corresponding portion on the two-dimentional X-axis track decoupled on macro/micromotion platform provided by the embodiment of the utility model
The attachment structure schematic diagram of part and host computer.
Figure 1 above-Fig. 4,
Plane bottom plate 1, host computer 2, the first guide rail 3, the first moving slide block 4, the second guide rail 5, the second moving slide block 6, X-axis
It is guide rail 7, Y-axis guide rail 8, halfpace 9, X-axis grating scale 10, Y-axis grating scale 11, the first reading head 12, the second reading head 13, macro
Motion driving mechanism 14, micromotion driving mechanism 15, piezoelectric ceramic actuator 16, capacitance sensor 17, the first track roller 18,
Second track roller 19, shock insulation platform 20.
Specific embodiment
The core of the utility model is to provide a kind of two dimension decoupling macro/micromotion platform, to solve macro/micromotion platform to height
There is bottleneck in speed operation and the two-way development of precise motion.
In order to make those skilled in the art more fully understand technical solution provided by the utility model, below in conjunction with attached
The utility model is described in further detail with specific embodiment for figure.
If Fig. 1-Fig. 4 shows, a kind of two dimension decoupling macro/micromotion platform provided by the embodiment of the utility model, including plane bottom
Plate 1 and host computer 2 are provided with X-axis moving parts, Y-axis moving parts, intermediary movements component, macro movement driving on plane bottom plate 1
Mechanism 14 and micromotion driving mechanism 15；X-axis moving parts include two the first guide rails 3 being arranged in parallel along the x axis and divide
The first moving slide block 4 that can be slided on first guide rail 3 and along corresponding first guide rail 3 is not set；Y-axis moving parts include
Two along Y axis direction parallel arrangement the second guide rail 5 and be separately positioned on the second guide rail 5 and can be led along corresponding second
The second moving slide block 6 that rail 5 slides；Intermediary movements component includes the X-axis that both ends are connected on two the second moving slide blocks 6
Guide rail 7, both ends are connected to Y-axis guide rail 8 on two the first moving slide blocks 4, halfpace 9；X is provided in X-axis guide rail 7
Axis grating scale 10 is provided with Y-axis grating scale 11, and X-axis guide rail 7 and Y-axis guide rail 8 cloth in a manner of right-angled intersection in Y-axis guide rail 8
It sets；Halfpace 9 is located on an angle of the crossing of right-angled intersection and can transport with the movement of X-axis guide rail 7 and Y-axis guide rail 8
It is dynamic, the first reading head 12 and the second reading head 13 are provided on halfpace 9；First reading head 12 is for reading X-axis grating scale
10 reading, the second reading head 13 are used to read the reading of Y-axis grating scale 11；First reading head 12, the second reading head 13, macro fortune
Dynamic driving mechanism 14 and micromotion driving mechanism 15 are connect with host computer 2, and macro motion driving mechanism 14 is for driving first
The macro movement of moving slide block 4 and the second moving slide block 6 is fed；Micromotion driving mechanism 15 is for driving 4 He of the first moving slide block
The micromotion of second moving slide block 6 compensates.
Above-mentioned two dimension decoupling macro/micromotion platform is in practical work process, using the initial position of halfpace as origin,
Macro movement rectangular coordinate system is established, sends the instruction of macro movement travel to macro motion driving mechanism by host computer, macro movement is driven
Motivation structure drives the first moving slide block and the second moving slide block to execute macro movement feeding, and specific macro motion process is logical for host computer
Cross the first reading head obtain X-axis grating scale reading, by the second reading head obtain Y-axis grating scale reading, and with macro movement
The numerical value of stroke is made comparisons, and judges whether presetting in macro motion positions accuracy rating, if so, macro motion compensation is completed, if
Otherwise macro motion driving mechanism continues that the first moving slide block and the second moving slide block is driven to execute macro movement feeding；When macro movement is tied
Shu Hou, host computer send the instruction of micromotion stroke to micromotion driving mechanism, and the first movement of micromotion driving mechanism driving is slided
Block and the second moving slide block execute micromotion compensation, specific micromotion compensation process are as follows: host computer passes through micromotion driving machine
Structure obtains halfpace and reads in the micromotion of X-direction and Y direction, and makes comparisons with the numerical value of micromotion stroke, judges
Whether within the scope of default micromotion positioning accuracy, if so, the compensation of micromotion is completed and is terminated, if otherwise micromotion drives
Mechanism continues that the first moving slide block and the second moving slide block is driven to execute micromotion compensation.Above-mentioned two dimension decoupling macro/micromotion is flat
Platform realizes the mobile decoupling in X, Y-direction, reduces the interference of two direction of motion of X, Y, to reduce complicated structure
It is influenced brought by link and macro micro- compound movement.Namely by mutual glitch-free macro micro-structure, realize high-speed cruising and essence
The two-way development of close error compensation, can be realized simple and fast high-precision motion.
In some specific embodiments, above-mentioned macro motion driving mechanism 14 is preferably linear motor.Specific first,
Second moving slide block is fixedly connected with the mover of corresponding linear motor, and stator is fixed on plane bottom plate.It will be understood
, above-mentioned linear motor is only preferable examples of the utility model embodiment for macro motion driving mechanism, practical
In application process, it can also be other common driving mechanisms of those skilled in the art.
In some specific embodiments, above-mentioned micromotion driving mechanism 15 can specifically include piezoelectric ceramic actuator
16 and the micromotion numerical value for reading the first moving slide block 4 and the second moving slide block 6 capacitance sensor 17.Such micromotion
Process is to read the motion value of micromotion by capacitance sensor and feed back to host computer 2, then PC control piezoelectricity
Ceramic driver drives the first, second moving slide block to do corresponding micromotion compensation.
In some more particular embodiments, the structure type of above-mentioned piezoelectric ceramic actuator 16 is preferably piezoelectric ceramics
In conjunction with the structure type of spring.Of course, it should be understood that the structure type of above-mentioned piezoelectric ceramics combination spring is only this reality
It, can be in actual application with new embodiment for the preferable examples of the structure type of piezoelectric ceramic actuator
It is those skilled in the art common other structures form, such as piezoelectric ceramics combination flexible hinge structure etc..
It further carries out in scheme, the corresponding position contacted with X-axis guide rail 7 of above-mentioned halfpace 9 is provided with first and leads
Rail idler wheel 18, the corresponding position contacted with Y-axis guide rail 8 of halfpace 9 are provided with the second track roller 19.It is led by setting first
Rail idler wheel and the second track roller, which make halfpace move and move with X-axis guide rail and Y-axis guide rail, to be become by sliding friction
Rolling friction, movement is more smooth, reduces frictional resistance.
In addition, in general, being additionally provided with shock insulation platform 20, and the shock insulation platform 20 1 in the bottom of plane bottom plate 1
As preferably marble platform.
In order to which those skilled in the art better understand the work of two dimension decoupling macro/micromotion platform provided by the utility model
Make principle, be illustrated below with reference to specific motion process:
Working principle is mainly that the macro feeding of platform carries out fast feed by linear motor, by pressing after macro platform fast and stable
The two-dimentional microfluidic platform of electroceramics and spring composition carries out micro- compensation, realizes fast feed and fine compensation.
In the motion process of platform, selection X/Y kinematic axis first is moved, and needs position to be achieved by host computer input
It moves (preset value), linear motor is then driven to carry out macro movement, band moving platform first carries out high speed with high acceleration (usually > 10g)
Movement arrives before macro movement travel terminal and carries out retarded motion with same acceleration.In the process by being mounted on halfpace
The first, second reading head of grating scale read the grating scale data on cross guide rail (i.e. halfpace X/Y axis rail), will
This information is sent to host computer, with the current position of the macro movement of determination, after measurement reaches a threshold value, macro movement feeding knot
Beam.Location information with preset value compared with, both is determined difference and exports micro-displacement and instruct and give piezoelectric ceramics drive by subsequent host computer
Dynamic device carries out fine compensation by its fine motion, reaches final preset value with this.
What needs to be explained here is that host computer applies predeterminated voltage to piezoelectric ceramic actuator in platform starting, make it
Elongation is the half of piezoelectric ceramics total kilometres, so that micromotion platform moves positive and negative two to macro platform X/Y axis in motion process
Direction can carry out micro- compensation.Initial position origin is determined first, macro kinetic coordinate system is established with this origin, then by host computer
Macro movement travel (S is sent to the macro motion driving mechanism of X/Y axishx/Shy) instruction, macro motion driving mechanism responded, X/Y
The driving feeding of axis linear motor, in macro movement travel, the first, second reading head is by the reading (N of X/Y axis increment grating scalehx/
Nhy) send host computer back to, when it is less than threshold value e1, macro movement stops.Then, flat by fine motion according to macro motion positions error
Platform carries out fine compensation, and host computer sends X/Y axis micromotion stroke (S to micromotion driving mechanismWx/SWy) instruction, micromotion
Driving mechanism is responded, and the feeding of X/Y axis Piezoelectric Ceramic, X/Y axis capacitance sensor is by sensor reading (Nwx/Nwy) give
Host computer is returned, when it is less than threshold value e2, micro- compensation campaign stops.In entire motion process, the origin of macro kinetic coordinate system
It always is using initial position as origin, the compensation of micromotion is positioned as close to the opposite origin movement travel of the macro movement of X/Y axis
The given path increment of host computer, i.e. X/Y axis linear motor are with respect to the increment of motion of origin and given path increment in given error
In range.Wherein, e1 is macro motion positions precision, e2 is micromotion positioning accuracy.
Two dimension decoupling macro/micromotion platform provided by the utility model is described in detail above.It needs to illustrate
That all the embodiments in this specification are described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts between the embodiments can be referred to each other.
It should also be noted that, herein, such as the terms "include", "comprise" or its any other variant are intended to contain
Lid non-exclusive inclusion, so that article or equipment including a series of elements not only include those elements, but also
It including other elements that are not explicitly listed, or further include for this article or the intrinsic element of equipment.Do not having
In the case where more limitations, the element that is limited by sentence "including a ...", it is not excluded that in the article including above-mentioned element
Or there is also other identical elements in equipment.
Specific case used herein is expounded the principles of the present invention and embodiment, above embodiments
Explanation be merely used to help understand the core concept of the utility model.It should be pointed out that for the ordinary skill of the art
For personnel, without departing from the principle of this utility model, several improvements and modifications can be made to this utility model,
Modifications and modifications also fall within the protection scope of the claims of the utility model.
Claims (7)
1. a kind of two dimension decoupling macro/micromotion platform, which is characterized in that including plane bottom plate (1) and host computer (2), the plane
X-axis moving parts, Y-axis moving parts, intermediary movements component, macro motion driving mechanism (14) He Weiyun are provided on bottom plate (1)
Dynamic driving mechanism (15)；
The X-axis moving parts include two the first guide rails (3) being arranged in parallel along the x axis and are separately positioned on described first
And it can be along the first moving slide block (4) of corresponding first guide rail (3) sliding on guide rail (3)；
The Y-axis moving parts include two the second guide rails (5) being arranged in parallel along the y axis and are separately positioned on described second
And it can be along the second moving slide block (6) of corresponding second guide rail (5) sliding on guide rail (5)；
The intermediary movements component include both ends be connected on two second moving slide blocks (6) X-axis guide rail (7),
Both ends are connected to Y-axis guide rail (8) on two first moving slide blocks (4), halfpace (9)；
It is provided with X-axis grating scale (10) on the X-axis guide rail (7), is provided with Y-axis grating scale (11) on the Y-axis guide rail (8),
And the X-axis guide rail (7) and the Y-axis guide rail (8) are arranged in a manner of right-angled intersection；The halfpace (9) is located at described
It can move on one angle of the crossing of right-angled intersection and with the movement of the X-axis guide rail (7) and the Y-axis guide rail (8), it is described
The first reading head (12) and the second reading head (13) are provided on halfpace (9)；First reading head (12) is for reading
The reading of the X-axis grating scale (10), second reading head (13) are used to read the reading of the Y-axis grating scale (11)；
First reading head (12), second reading head (13), the macro motion driving mechanism (14) and the micromotion
Driving mechanism (15) is connect with the host computer (2), and the macro motion driving mechanism (14) is for driving first fortune
The macro movement of movable slider (4) and second moving slide block (6) is fed；The micromotion driving mechanism (15) is described for driving
The compensation of the micromotion of first moving slide block (4) and second moving slide block (6).
2. two dimension decoupling macro/micromotion platform as described in claim 1, which is characterized in that the macro motion driving mechanism (14)
For linear motor.
3. two dimension decoupling macro/micromotion platform as described in claim 1, which is characterized in that the micromotion driving mechanism (15)
Including piezoelectric ceramic actuator (16) and for reading the micro- of first moving slide block (4) and second moving slide block (6)
The capacitance sensor (17) of motion value.
4. two dimension decoupling macro/micromotion platform as claimed in claim 3, which is characterized in that the piezoelectric ceramic actuator (16)
Structure type be piezoelectric ceramics combination spring structure type.
5. two dimension decoupling macro/micromotion platform as described in claim 1, which is characterized in that the halfpace (9) it is corresponding with
The position of X-axis guide rail (7) contact is provided with the first track roller (18), and halfpace (9) correspondence is led with the Y-axis
The position of rail (8) contact is provided with the second track roller (19).
6. two dimension decoupling macro/micromotion platform as described in claim 1, which is characterized in that the bottom of the plane bottom plate (1)
It is additionally provided with shock insulation platform (20).
7. two dimension decoupling macro/micromotion platform as claimed in claim 6, which is characterized in that the shock insulation platform (20) is Dali
Stone platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821716567.9U CN209140887U (en) | 2018-10-22 | 2018-10-22 | A kind of two dimension decoupling macro/micromotion platform |
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| CN201821716567.9U CN209140887U (en) | 2018-10-22 | 2018-10-22 | A kind of two dimension decoupling macro/micromotion platform |
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| CN209140887U true CN209140887U (en) | 2019-07-23 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110497363A (en) * | 2019-08-22 | 2019-11-26 | 陕西科技大学 | A kind of micro- Gripping platform of Three Degree Of Freedom and its application method of the macro micro- combination of modularization |
| CN113172180A (en) * | 2021-04-14 | 2021-07-27 | 深圳市泰达智能装备有限公司 | Coarse aluminum wire bonding machine |
-
2018
- 2018-10-22 CN CN201821716567.9U patent/CN209140887U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110497363A (en) * | 2019-08-22 | 2019-11-26 | 陕西科技大学 | A kind of micro- Gripping platform of Three Degree Of Freedom and its application method of the macro micro- combination of modularization |
| CN110497363B (en) * | 2019-08-22 | 2023-03-17 | 陕西科技大学 | Modularized macro-micro combined three-degree-of-freedom micro-clamping platform and using method thereof |
| CN113172180A (en) * | 2021-04-14 | 2021-07-27 | 深圳市泰达智能装备有限公司 | Coarse aluminum wire bonding machine |
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