CN202769193U - Plane three-degree of freedom parallel precision positioning platform of partial decoupling - Google Patents
Plane three-degree of freedom parallel precision positioning platform of partial decoupling Download PDFInfo
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- CN202769193U CN202769193U CN 201220462166 CN201220462166U CN202769193U CN 202769193 U CN202769193 U CN 202769193U CN 201220462166 CN201220462166 CN 201220462166 CN 201220462166 U CN201220462166 U CN 201220462166U CN 202769193 U CN202769193 U CN 202769193U
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Abstract
The utility model discloses a plane three-degree of freedom parallel precision positioning platform of partial decoupling. The plane three-degree of freedom parallel precision positioning platform of the partial decoupling comprises a mobile platform, a fixed platform and three groups of driving subcircuits which are identical in structure and arranged between the mobile platform and the fixed platform. Each driving subcircuit comprises a pentatricopeptide repeats (PPR) driving chain which is formed by the connection of a first sliding pair, a second sliding pair and a rotating pair. In the PPR driving chain, a guide rail of the first sliding pair is fixedly connected with the fixed platform, a guide rail of the second sliding pair is fixedly connected with a slide block of the first sliding pair, one end of a rotating hinge of the rotating pair is connected with a slide block of the second sliding pair, and the other one end of the rotating hinge of the rotating pair is fixedly connected with the mobile platform. Movement input is partially decoupled, and Y-direction (X-direction) driven movement is not triggered by X-direction (Y-direction) movement input. According to the plane three-degree of freedom parallel precision positioning platform of the partial decoupling, defects that movement coupling and kinematics solution are complex and design and process are cumbersome in an existing parallel mechanism are overcome. the plane three-degree of freedom parallel precision positioning platform of the partial decoupling is capable of satisfying requirement of high precision of a precision positioning platform, and provided with wide application prospect in the fields of precision machining, microelectronic manufacture and the like.
Description
Technical field
The utility model relates to position adjusting mechanism, relates in particular to a kind of planar three freedom parallel precise locating platform of partly decoupled.
Background technique
Precisely locating platform has widespread demand in fields such as microelectronic, precision machining.The precisely locating platform of at present extensive use can be divided into series connection platform and parallel connection platform two large classes.Series connection platform each party to motion all overlap independently drive unit control by one, thereby control is easily, but its huge structure, install loaded down with trivial details, the bottom degrees of freedom is stressed large, distortion easy to wear.Compare the series connection platform, parallel connection platform has without cumulative error, the advantages such as precision is high, dynamic response is fast, compact structure, good rigidity.Therefore parallel connection platform more can satisfy the requirement of precision positioning.
The general planar three freedom locating platform in parallel that is used for precision positioning is that a kind of 3-PRP(3 represents number of degrees of freedom, and P represents sliding pair, and R represents revolute) parallel-connection structure, its structure is as shown in Figure 1.This locating platform has overcome the shortcomings such as the series connection platform structure is complicated, dynamic response is poor, but this design is rotated moving platform X, Y, Theta() highly coupling of motion: when platform turns over several angle, any one motion all can cause the driven of another one translational motion in two translational motions.Because the height coupling of input, the error originated from input of each motion not only affects the positional accuracy of its driving direction, also affects the positional accuracy of its coupling direction, error thereby be exaggerated; Simultaneously, the input coupling makes 3-PRP parallel connection platform kinematics solution complicated, and motion control is loaded down with trivial details.
Summary of the invention
The purpose of this utility model is to overcome the problems such as existing 3PRP parallel connection platform coupling is strong, precision is lower, kinematics solution is complicated, a kind of planar three freedom parallel precise locating platform of partly decoupled is provided, has fully satisfied the high-precision requirement of locating platform.
The utility model is achieved through the following technical solutions:
A kind of planar three freedom parallel precise locating platform of partly decoupled, comprise moving platform, fixed platform, three groups of driving branch roads that structure is identical are installed between moving platform and fixed platform, and every group drives branch road and comprises successively and connect the chain that forms PPR according to the first sliding pair, the second sliding pair, revolute.
The PPR chain, namely the guide rail of the first sliding pair and fixed platform are affixed, and the slide block of the guide rail of the second sliding pair and the first sliding pair is affixed, and turning joint one end of revolute connects on the slide block of the second sliding pair, the affixed moving platform of the other end.
The driving branch road that these three groups of structures are identical is divided into, and two groups of Y-direction driving branch roads that be arranged in parallel and one group of X-direction with the perpendicular setting of Y-direction drive branch road; The moving direction that is Y-direction driving branch road the first sliding pair is parallel to Y-axis, and X-direction drives the moving direction of branch road the first sliding pair perpendicular to Y-axis.
Add shock mount between the edge of moving platform and the fixed platform, the draw direction of spring is parallel with horizontal plane.
Locating platform also adds input grating closed-loop feedback arrangement.
The utility model has the following advantages compared with prior art:
1, can realize the movement of orthogonal direction in the plane and the rotation on vertical this plane.
2, motion input part decoupling zero, the motion input of X-direction (Y-direction) can not cause that Y-direction (X-direction) is driven.Kinematics solution is simple, convenient control of motion, and precision is high.
3, three driving branch structures are identical, simple in structure, and design and installation is more convenient.
4, three groups drive branch road support moving platform, do not need supplemental support, save cost.
5, add shock mount between the edge of moving platform and the fixed platform, have spring pre-tightening, and input grating closed-loop feedback arrangement is housed, further improve Location accuracy.
The technological means that the utility model is simple and easy to do, the shortcomings such as existing paralleling mechanism sports coupling, kinematics solution is complicated, design processing is loaded down with trivial details have been overcome, can satisfy the high-precision requirement of precisely locating platform, have broad application prospects in fields such as precision machining, microelectronic manufacturings.
Description of drawings
Fig. 1 is prior art planar three freedom locating platform structural representation in parallel.
Fig. 2 is the planar three freedom parallel precise locating platform structural representation of the utility model partly decoupled.
Embodiment
Below in conjunction with specific embodiment the utility model is done further concrete detailed description the in detail.
Embodiment
As shown in Figure 2.The planar three freedom parallel precise locating platform of the utility model partly decoupled, comprise moving platform, fixed platform, three groups of driving branch roads that structure is identical are installed between moving platform and fixed platform, wherein: every group drives branch road and comprises successively according to the first sliding pair 3, the second sliding pair 4, revolute 4-1 connects the PPR chain that forms, namely the guide rail 3-1 of the first sliding pair 3 and fixed platform 2 are affixed, the guide rail 4-2 of the second sliding pair 4 and the slide block of the first sliding pair 3 are affixed, turning joint one end of revolute 4-1 connects on the slide block of the second sliding pair 4, the affixed moving platform 1 of the other end.
Need to prove, the driving branch road that these three groups of structures are identical is divided into, and two groups of Y-direction driving branch roads 11 that be arranged in parallel, 12 and one groups of X-directions with the perpendicular setting of Y-direction drive branch road 13; Be that the moving direction that Y-direction drives branch road 11, the first sliding pair of 12 is parallel to Y-axis, X-direction drives the moving direction of branch road 13 first sliding pair perpendicular to Y-axis.
Add the shock mount (not shown) between the edge of moving platform 1 and the fixed platform 2, the draw direction of spring is parallel with horizontal plane, eliminates the eccentric slot of revolute and the normal direction gap of sliding pair (the first sliding pair 3, the second sliding pair 4), improves Location accuracy.
Locating platform also installs input grating closed-loop feedback arrangement (not shown) additional, for detection of actual input quantity and compensate, improves input precision, thereby improves the platform Location accuracy.
Below in conjunction with Fig. 2, specify the action mechanism of this patent
When moving platform 1 turns over several angle, it is parallel respectively that two groups of Y-directions drive two slide blocks of branch road 11, the first sliding pair of 12, the second sliding pair, and to drive two slide blocks of the first sliding pair in the branch roads 11,12 and the second sliding pair vertical with two groups of Y-directions respectively for two slide blocks that X-direction drives the first sliding pair and the second sliding pair in the branch road 13.X-direction drives branch road 13(Y to driving branch road 11,12) the motion input, can not cause that Y-direction drives branch road 11,12(X to driving branch road 13) driven.Therefore X-direction drives branch road 13(Y to driving branch road 11,12) kinematic error of direction can not pass to Y-direction and drive branch road 11,12(X to driving branch road 13) direction.Thereby realize that moving platform 1 at the relative decoupling of X-axis, Y direction translation, is independent of each other between X-axis, Y direction translational motion, kinematics solution is easy, and control is simple, and has improved precision.
As mentioned above, when two actuating motor (not shown) motion inputs were identical in the Y-direction driving branch road 11,12, the slide block that X-direction drives the second sliding pair 4 in the branch road 13 moved along its guide rail 4-2, and moving platform 1 is realized the Y-direction translation; When X-direction drove an amount of exercise of actuating motor input of branch road 13, the slide block that Y-direction drives the second sliding pair 4 in the branch road 11,12 moved along its guide rail 4-2, and moving platform 1 is realized the X-direction translation; When two actuating motor input quantities were not identical in the Y-direction driving branch road 11,12, moving platform 1 rotated around Z axis.
As mentioned above, just can realize preferably the utility model.
Above-described embodiment only is the better mode of execution of the utility model; but mode of execution of the present utility model is not restricted to the described embodiments; other are any not to deviate from change, the modification done under Spirit Essence of the present utility model and the principle, substitute, combination, simplify; all should be the substitute mode of equivalence, be included within the protection domain of the present utility model.
Claims (5)
1. the planar three freedom parallel precise locating platform of a partly decoupled, comprise moving platform, fixed platform, three groups of driving branch roads that structure is identical are installed between moving platform and fixed platform, are it is characterized in that: every group drives branch road and comprises successively and connect the PPR chain that forms according to the first sliding pair, the second sliding pair, revolute.
2. the planar three freedom parallel precise locating platform of partly decoupled according to claim 1, it is characterized in that: the PPR chain, namely the guide rail of the first sliding pair and fixed platform are affixed, the slide block of the guide rail of the second sliding pair and the first sliding pair is affixed, turning joint one end of revolute connects on the slide block of the second sliding pair, the affixed moving platform of the other end.
3. the planar three freedom parallel precise locating platform of partly decoupled according to claim 1 and 2, it is characterized in that: the driving branch road that these three groups of structures are identical is divided into, and two groups of Y-direction driving branch roads that be arranged in parallel and one group of X-direction with the perpendicular setting of Y-direction drive branch road; The moving direction that is Y-direction driving branch road the first sliding pair is parallel to Y-axis, and X-direction drives the moving direction of branch road the first sliding pair perpendicular to Y-axis.
4. the planar three freedom parallel precise locating platform of partly decoupled according to claim 3, it is characterized in that: add shock mount between the edge of moving platform and the fixed platform, the draw direction of spring is parallel with horizontal plane.
5. the planar three freedom parallel precise locating platform of partly decoupled according to claim 3 is characterized in that: locating platform also adds input grating closed-loop feedback arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220462166 CN202769193U (en) | 2012-09-11 | 2012-09-11 | Plane three-degree of freedom parallel precision positioning platform of partial decoupling |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220462166 CN202769193U (en) | 2012-09-11 | 2012-09-11 | Plane three-degree of freedom parallel precision positioning platform of partial decoupling |
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| CN202769193U true CN202769193U (en) | 2013-03-06 |
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| CN 201220462166 Withdrawn - After Issue CN202769193U (en) | 2012-09-11 | 2012-09-11 | Plane three-degree of freedom parallel precision positioning platform of partial decoupling |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102878394A (en) * | 2012-09-11 | 2013-01-16 | 华南理工大学 | Partially-decoupled plane three-freedom-degree parallel precision positioning platform |
| CN103322393A (en) * | 2013-06-25 | 2013-09-25 | 成都福誉科技有限公司 | Leading-out hinged two-dimensional deflection adjusting device |
| CN109947139A (en) * | 2017-12-21 | 2019-06-28 | 广州中国科学院先进技术研究所 | A kind of high-accuracy parallel connection platform and its controller |
| CN109960284A (en) * | 2017-12-22 | 2019-07-02 | 广州中国科学院先进技术研究所 | A kind of high-accuracy parallel connection platform and its controller |
-
2012
- 2012-09-11 CN CN 201220462166 patent/CN202769193U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102878394A (en) * | 2012-09-11 | 2013-01-16 | 华南理工大学 | Partially-decoupled plane three-freedom-degree parallel precision positioning platform |
| CN102878394B (en) * | 2012-09-11 | 2014-09-10 | 华南理工大学 | Partially-decoupled plane three-freedom-degree parallel precision positioning platform |
| CN103322393A (en) * | 2013-06-25 | 2013-09-25 | 成都福誉科技有限公司 | Leading-out hinged two-dimensional deflection adjusting device |
| CN109947139A (en) * | 2017-12-21 | 2019-06-28 | 广州中国科学院先进技术研究所 | A kind of high-accuracy parallel connection platform and its controller |
| CN109947139B (en) * | 2017-12-21 | 2024-01-23 | 广州中国科学院先进技术研究所 | High-precision parallel platform and controller thereof |
| CN109960284A (en) * | 2017-12-22 | 2019-07-02 | 广州中国科学院先进技术研究所 | A kind of high-accuracy parallel connection platform and its controller |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130306 Effective date of abandoning: 20140910 |
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| RGAV | Abandon patent right to avoid regrant |