CN109960284A - A kind of high-accuracy parallel connection platform and its controller - Google Patents
A kind of high-accuracy parallel connection platform and its controller Download PDFInfo
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Abstract
The invention discloses a kind of high-accuracy parallel connection platform and its controller, which includes communication module, data resolution module, inverse kinematic model module, kinematics correction model module, locus interpolation module；Communication module is used to be communicated with the host computer of parallel connection platform, obtains the current location and target position of moving platform；The current location and target position for the moving platform that data resolution module is used to receive carry out data parsing, and character string is converted to floating number；Inverse kinematic model module is used to acquire the theoretical amount of feeding of each motor shaft using inverse kinematic model；Kinematics correction model module is used to acquire the correction amount of each motor shaft amount of feeding using kinematics correction model；Locus interpolation module is used to obtain the practical amount of feeding of each motor shaft according to the correction amount of the theoretical amount of feeding of each motor shaft and each motor shaft amount of feeding to drive each motor action.Controller of the present invention is greatly improved the positioning accuracy of high-accuracy parallel connection platform.
Description
Technical field
The present invention relates to robotic technology fields, and in particular to a kind of high-accuracy parallel connection platform and its controller.
Background technique
The high speed development of IC industry proposes urgent demand to the positioning system exploitation of high-accuracy high-resolution.The system
Need to meet micron order even nanoscale positioning accuracy, traditional serial mechanism is difficult to be competent at.Plane parallel mechanism due to
Its own the advantages of, is increasingly becoming the mainstream of high-accuracy locating platform, but controls more complex.To find out its cause, being primarily due to this
All there are various errors from the links such as assembly are worked into class mechanism, at present still without the short-cut method of a set of maturation to these mistakes
Difference is demarcated and is compensated.
Locating platform in parallel has the advantages such as high speed, high-precision, high load compared to traditional located in series platform, makes it
It is more and more widely used in the micro-nanos field operation such as precision assembly, accurate measurement.Three Degree Of Freedom or more lower-mobility
Parallel institution can solve most of problem in engineer application, and driving element is less, structure is more compact, it is clear that raw in industry
Practical application value is had more in production.But parallel institution belongs to non-linear strongly coupled system, there is model in practical applications
Not precisely, the problems such as error is difficult to eliminate, Kinematic Calibration is difficult, seriously affect final using effect.
The controller of locating platform currently on the market only establishes inverse kinematic model according to ideal platform structure,
The movement for realizing platform, does not account for various error components, and the level for more depending on process and assemble is improved to the precision of platform,
Limit further increasing for platform precision.
Summary of the invention
In view of this, in order to solve the above problem in the prior art, the present invention propose a kind of high-accuracy parallel connection platform and
Its controller, the controller can inevitably manufacture installation error to platform and carry out self compensation, final achievable platform
High-speed, high precision positioning.
The present invention is solved the above problems by following technological means:
A kind of high-accuracy parallel connection platform, including pedestal are provided with X1 driving mould group, X2 driving mould group, Y driving mould on pedestal
Group, X1 driving mould group, X2 driving mould group, Y driving mould group are connect with pedestal, and X1 drives mould group, X2 driving mould group, Y to drive mould group
On be provided with moving platform, X1 driving mould group, X2 driving mould group, Y driving mould group are connect with moving platform, close moving platform on pedestal
Two sides are provided with first camera, second camera.
Further, X1 driving mould group include X1 motor, X1 axis flexible clutch, X1 axial filament bar, X1 attachment device,
The motor shaft of first X1 guide rail, the 2nd X1 guide rail, X1 decussation roller collar, X1 motor connects X1 axis by X1 axis flexible clutch
X1 axial filament bar, the first X1 guide rail and the 2nd X1 guide rail are connected by screw rod, X1 attachment device, the 2nd X1 guide rail again with X1 decussation roller
The inner ring of collar is connected, and the outer ring of X1 decussation roller collar is connected with moving platform.
Further, X2 driving mould group include X2 motor, X2 axis flexible clutch, X2 axial filament bar, X2 attachment device,
The motor shaft of first X2 guide rail, the 2nd X2 guide rail, X2 decussation roller collar, X2 motor connects X2 axis by X2 axis flexible clutch
X2 axial filament bar, the first X2 guide rail and the 2nd X2 guide rail are connected by screw rod, X2 attachment device, the 2nd X2 guide rail again with X2 decussation roller
The inner ring of collar is connected, and the outer ring of X2 decussation roller collar is connected with moving platform.
Further, the Y driving mould group includes Y-motor, Y-axis flexible clutch, Y-axis screw rod, Y attachment device, the first Y
The motor shaft of guide rail, the second Y guide rail, Y decussation roller collar, Y-motor connects Y-axis screw rod, Y connection by Y-axis flexible clutch
Y-axis screw rod, the first Y guide rail are connected by device with the second Y guide rail, and the second Y guide rail is connected with the inner ring of Y decussation roller collar again, Y
The outer ring of decussation roller collar is connected with moving platform.
Further, the X1 motor, X2 motor, Y-motor all use servo motor.
Further, the high-accuracy parallel connection platform is both provided with limit switch in X1 axis, X2 axis, Y direction.
A kind of high-accuracy parallel connection platform controller, including communication module, data resolution module, inverse kinematic model mould
Block, kinematics correction model module, locus interpolation module；
Data resolution module is connect with communication module, inverse kinematic model module, kinematics correction model module respectively；
Locus interpolation module is connect with inverse kinematic model module, kinematics correction model module respectively；
The communication module is used to be communicated with the host computer of parallel connection platform, obtains current location and the target of moving platform
Position；
The current location and target position for the moving platform that the data resolution module is used to receive carry out data parsing,
Character string is converted into floating number；
The inverse kinematic model module is used to be acquired the theoretical of each motor shaft using inverse kinematic model and fed
Amount；
The kinematics correction model module is used to acquire repairing for each motor shaft amount of feeding using kinematics correction model
Positive quantity；
The locus interpolation module is used for according to the theoretical amount of feeding of each motor shaft and repairing for each motor shaft amount of feeding
Positive quantity obtains the practical amount of feeding of each motor shaft to drive each motor action.
Further, the controller further includes I/O module and logic module, logic module respectively with data resolution module
It is connected with I/O module；
The I/O module is used to receive the signal for the limit switch that parallel connection platform is arranged in each direction of motion；
The logic module is used to judge whether parallel connection platform to reach limit of sports record position or divided in each direction of motion
Whether analysis parallel connection platform meets required precision to judge to want to continue to act.
Further, the inverse kinematic model calculation method is as follows:
When the angle of moving platform rotation is δ θ
δX1=Rcos (δ θ+θ X1+θ0)-Rcos(θX1+θ0)
δX2=Rcos (δ θ+θ X2+θ0)-Rcos(θX2+θ0)
δ Y=Rsin (δ θ+θ Y+ θ0)-Rsin(θY+θ0)
Therefore from A1 point (x1, y1, θ0) move to A2 (x2, y2, θ0+ δ θ) point, the motion conditions of each motor are as follows:
δX1=Rcos (δ θ+θ X1+θ0)-Rcos(θX1+θ0)+(x2-x1)
δX2=Rcos (δ θ+θ X2+θ0)-Rcos(θX2+θ0)+(x2-x1)
δ Y=Rsin (δ θ+θ Y+ θ0)-Rsin(θX2+θ0)+(y2-y1)
The as inverse resolution model of the platform；
Wherein,
δX1: the opposite amount of feeding of X1 motor；
δX2: the opposite amount of feeding of X2 motor；
The opposite amount of feeding of δ Y:Y motor；
θX1: the angle position at X1 decussation roller collar center；
θX2: the angle position at X2 decussation roller collar center；
The angle position at θ Y:Y decussation roller collar center；
θ0: the angle of high-accuracy parallel connection platform before calculating.
Further, the kinematics correction model calculation method is as follows:
Before calibration, moving platform is moved into origin position first, origin at this time is defaulted as accurate origin position,
It is also the origin position in vision system, next specified moving platform runs to aiming spot, anti-according to ideal kinematics
Model is solved, the amount of feeding of theoretic X1 motor, X2 motor and Y-motor can be calculated；After motor has executed the amount of feeding, benefit
Acquisition image is removed with binocular camera, obtains the physical location of moving platform；Above-mentioned process, which executes, to be not less than 9 times, can be obtained not
Less than the practical amount of feeding of 9 groups of motors and the physical location of platform, recycles this not less than 9 groups of data, is based on least square method,
Kinematics correction model can be obtained.
Compared with prior art, beneficial effects of the present invention are as follows:
Parallel connection platform combination precision of the invention and cost requirement, by the way of servo-drive, in order to further increase
The precision of positioning system, controller of the invention have fully considered those inevitable process unit errors, move establishing
On the basis of learning model, closed loop feedback system is formed in conjunction with binocular camera, then Self-tuning System is carried out to the model parameter in turn, from
And the accuracy of the model is greatly improved, it can satisfy most of industrial requirements.
Controller of the invention is greatly improved high-accuracy under the premise of unobvious raising cost, through simple operations
The positioning accuracy of parallel connection platform is, it can be achieved that 0.1um grades of resettings.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is the structural schematic diagram of the high-accuracy parallel connection platform of the present invention；
Fig. 2 is the simplification figure of the high-accuracy parallel connection platform of the present invention；
Fig. 3 is kinematics Self-tuning System flow chart of the present invention；
Fig. 4 is the inner bay composition of the high-accuracy parallel connection platform controller of the present invention；
Description of symbols:
1, moving platform；2, first camera；3, X2 drives mould group；4, pedestal；5, X1 drives mould group；6, Y drives mould group；7,
Two cameras.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with attached drawing and specifically
Embodiment technical solution of the present invention is described in detail.It should be pointed out that described embodiment is only this hair
Bright a part of the embodiment, instead of all the embodiments, based on the embodiments of the present invention, those of ordinary skill in the art are not having
Every other embodiment obtained under the premise of creative work is made, shall fall within the protection scope of the present invention.
The structure for the high-accuracy parallel connection platform that controller of the present invention is directed to is as shown in Figure 1.
A kind of high-accuracy parallel connection platform, including pedestal 4 are provided with X1 driving mould group 5, X2 driving mould group 3, Y on pedestal 4 and drive
Dynamic model group 6, X1 driving mould group 5, X2 driving mould group 3, Y driving mould group 6 are connect with pedestal 4, and X1 drives mould group 5, X2 to drive mould group
3, Y drives and is provided with moving platform 1 in mould group 6, and X1 driving mould group 5, X2 driving mould group 3, Y driving mould group 6 are connect with moving platform 1,
Two sides on pedestal 4 close to moving platform 1 are provided with first camera 2, second camera 7.
The X1 driving mould group 5 is led including X1 motor, X1 axis flexible clutch, X1 axial filament bar, X1 attachment device, the first X1
Rail (P: prismatic pair), the 2nd X1 guide rail (P: prismatic pair), X1 decussation roller collar (R: revolute), the motor shaft of X1 motor pass through
X1 axis flexible clutch connects X1 axial filament bar, and X1 axial filament bar, the first X1 guide rail and the 2nd X1 guide rail are connected by X1 attachment device, the
Two X1 guide rails are connected with the inner ring of X1 decussation roller collar again, and the outer ring of X1 decussation roller collar is connected with moving platform 1.
The X2 driving mould group 3 is led including X2 motor, X2 axis flexible clutch, X2 axial filament bar, X2 attachment device, the first X2
Rail (P: prismatic pair), the 2nd X2 guide rail (P: prismatic pair), X2 decussation roller collar (R: revolute), the motor shaft of X2 motor pass through
X2 axis flexible clutch connects X2 axial filament bar, and X2 axial filament bar, the first X2 guide rail and the 2nd X2 guide rail are connected by X2 attachment device, the
Two X2 guide rails are connected with the inner ring of X2 decussation roller collar again, and the outer ring of X2 decussation roller collar is connected with moving platform 1.
Y driving mould group 6 include Y-motor, Y-axis flexible clutch, Y-axis screw rod, Y attachment device, the first Y guide rail (P:
Prismatic pair), the second Y guide rail (P: prismatic pair), Y decussation roller collar (R: revolute), it is flexible that the motor shaft of Y-motor passes through Y-axis
Shaft coupling connects Y-axis screw rod, and Y-axis screw rod, the first Y guide rail are connected by Y attachment device with the second Y guide rail, the second Y guide rail and and Y
The inner ring of decussation roller collar is connected, and the outer ring of Y decussation roller collar is connected with moving platform 1.
The high-accuracy parallel connection platform is both provided with limit switch in X1 axis, X2 axis, Y direction.
Locating platform currently on the market mostly uses stepper motor to drive greatly, it is contemplated that stepper motor resolution ratio itself is just very
Low, such locating platform can be only applied to the lower end occasion not high to positioning accuracy request at present.Separately there are some locating platforms
Using linear ultrasonic motor or piezoelectric ceramic motor etc., control is complicated, higher cost.The X1 electricity of the high-accuracy parallel connection platform of the present invention
Machine, X2 motor, Y-motor all use servo motor, further increase the precision of positioning.
On the one hand controller is communicated with host computer (vision system), obtain the current pose (x, y, θ) of platform, another
Aspect controls the co-operating of 3 servo motors by command pulse, so that control platform runs to designated position.
The top priority of controller is that the positive inverse resolution model of kinematics is established according to platform structure.
The foundation of the positive inverse resolution model of kinematics
The mechanism that platform can be obtained in simplified platform is as shown in Figure 2.
When the angle of platform rotation is δ θ
δX1=Rcos (δ θ+θ X1+θ0)-Rcos(θX1+θ0)
δX2=Rcos (δ θ+θ X2+θ0)-Rcos(θX2+θ0)
δ Y=Rsin (δ θ+θ Y+ θ0)-Rsin(θY+θ0)
Therefore from A1 point (x1, y1, θ0) move to A2 (x2, y2, θ0+ δ θ) point, the motion conditions of each motor are as follows:
δX1=Rcos (δ θ+θ X1+θ0)-Rcos(θX1+θ0)+(x2-x1)
δX2=Rcos (δ θ+θ X2+θ0)-Rcos(θX2+θ0)+(x2-x1)
δ Y=Rsin (δ θ+θ Y+ θ0)-Rsin(θX2+θ0)+(y2-y1)
The as inverse equation of the platform.
Wherein,
δX1: the opposite amount of feeding [mm] of X1 motor；
δX2: the opposite amount of feeding [mm] of X2 motor；
The opposite amount of feeding [mm] of δ Y:Y motor；
θX1: the angle position at X1 decussation roller collar center, 3 pi/2s；
θX2: the angle position at X2 decussation roller collar center, pi/2；
The angle position at θ Y:Y decussation roller collar center, 0；
θ0: the angle of high-accuracy parallel connection platform before calculating；
Above equation is converted into matrix form, then is inverted to transition matrix, forward kinematics solution mould can be obtained
Type.
Parameter automatic Calibration
The kinematics model acquired according to the above method is model ideally, but in practical applications, it examines
System is considered there are various potential errors, and the control effect for relying on the model is unsatisfactory, especially to positioning accuracy request height
Occasion, which is difficult to meet application requirement.
This controller has fully considered these error sources, propose it is a kind of utilize binocular camera carry out model Self-tuning System
Method.Specific Self-tuning System process is as shown in Figure 3.
In conjunction with Fig. 3, specific process can be stated are as follows: before calibration, platform be moved to origin position first, at this time
Origin be defaulted as the origin position in accurate origin position and vision system.Next specified platform runs to target
Point position can calculate the amount of feeding of theoretic X1 motor, X2 motor and Y-motor according to ideal inverse kinematic model.
After motor has executed the amount of feeding, acquisition image is removed using binocular camera, obtains the physical location of platform.Above-mentioned process is held
Row 9 times, the practical amount of feeding of 9 groups of motors and the physical location of platform can be obtained, recycle this 9 groups of data, based on minimum two
Revised parameter model can be obtained in multiplication.
Controller utilizes the available more preferably control effect of revised parameter model.
High-accuracy parallel connection platform controller design
After completing controller core content-kinematics correction model, entire controller next can be designed
Inside structure.
The high-accuracy parallel connection platform controller of the present invention, including communication module, data resolution module, inverse kinematic model mould
Block, kinematics correction model module, locus interpolation module；
Data resolution module is connect with communication module, inverse kinematic model module, kinematics correction model module respectively；
Locus interpolation module is connect with inverse kinematic model module, kinematics correction model module respectively；
The communication module is used to be communicated with the host computer of parallel connection platform, obtains current location and the target of moving platform
Position；
The current location and target position for the moving platform that the data resolution module is used to receive carry out data parsing,
Character string is converted into floating number；
The inverse kinematic model module is used to be acquired the theoretical of each motor shaft using inverse kinematic model and fed
Amount；
The kinematics correction model module is used to acquire repairing for each motor shaft amount of feeding using kinematics correction model
Positive quantity；
The locus interpolation module is used for according to the theoretical amount of feeding of each motor shaft and repairing for each motor shaft amount of feeding
Positive quantity obtains the practical amount of feeding of each motor shaft to drive each motor action.
The controller further includes I/O module and logic module, and logic module connects with data resolution module and I/O module respectively
It connects；
The I/O module is used to receive the signal for the limit switch that parallel connection platform is arranged in each direction of motion；
The logic module is used to judge whether parallel connection platform to reach limit of sports record position or divided in each direction of motion
Whether analysis parallel connection platform meets required precision to judge to want to continue to act.
On the one hand this controller passes through the communication modes such as RS232 serial ports or TCP/IP network interface and is communicated with host computer, obtain
Obtain the current location and target position of platform.After obtaining these data, need to parse these data (by character string turn
It is changed to floating number), the amount of feeding of each motor shaft is then acquired using kinematics correction model, finally drives the dynamic of 3 motors
Make.
It is also provided with I/O module and logic module inside controller, is both provided with limit switch in each direction of motion,
It can further protecting platform.Whether can meet required precision with analysis platform simultaneously to judge to want to continue to act.
Under the premise of the environment of entire platform does not change, it is only necessary to which a kinematics parameters adjusting can mention significantly
The positioning accuracy of high platform.Certainly, if changing the environment of platform, it is only necessary to which primary parameter Self-tuning System again updates amendment
Model is the positioning accuracy that can guarantee platform.
Parallel connection platform combination precision of the invention and cost requirement, by the way of servo-drive, in order to further increase
The precision of positioning system, controller of the invention have fully considered those inevitable process unit errors, move establishing
On the basis of learning model, closed loop feedback system is formed in conjunction with binocular camera, then Self-tuning System is carried out to the model parameter in turn, from
And the accuracy of the model is greatly improved, it can satisfy most of industrial requirements.
Controller of the invention is greatly improved high-accuracy under the premise of unobvious raising cost, through simple operations
The positioning accuracy of parallel connection platform is, it can be achieved that 0.1um grades of resettings.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Protect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (10)
1. a kind of high-accuracy parallel connection platform, which is characterized in that including pedestal, X1 driving mould group, X2 driving mould are provided on pedestal
Group, Y drive mould group, X1 driving mould group, X2 driving mould group, Y driving mould group connect with pedestal, X1 driving mould group, X2 drive mould group,
Moving platform is provided in Y driving mould group, X1 driving mould group, X2 driving mould group, Y driving mould group connect with moving platform, lean on pedestal
The two sides of nearly moving platform are provided with first camera, second camera.
2. high-accuracy parallel connection platform according to claim 1, which is characterized in that X1 driving mould group include X1 motor,
X1 axis flexible clutch, X1 axial filament bar, X1 attachment device, the first X1 guide rail, the 2nd X1 guide rail, X1 decussation roller collar, X1 electricity
The motor shaft of machine connects X1 axial filament bar by X1 axis flexible clutch, and X1 attachment device is by X1 axial filament bar, the first X1 guide rail and the
Two X1 guide rails be connected, the 2nd X1 guide rail is connected with the inner ring of X1 decussation roller collar again, the outer ring of X1 decussation roller collar with move
Platform is connected.
3. high-accuracy parallel connection platform according to claim 1, which is characterized in that X2 driving mould group include X2 motor,
X2 axis flexible clutch, X2 axial filament bar, X2 attachment device, the first X2 guide rail, the 2nd X2 guide rail, X2 decussation roller collar, X2 electricity
The motor shaft of machine connects X2 axial filament bar by X2 axis flexible clutch, and X2 attachment device is by X2 axial filament bar, the first X2 guide rail and the
Two X2 guide rails be connected, the 2nd X2 guide rail is connected with the inner ring of X2 decussation roller collar again, the outer ring of X2 decussation roller collar with move
Platform is connected.
4. high-accuracy parallel connection platform according to claim 1, which is characterized in that the Y driving mould group includes Y-motor, Y-axis
Flexible clutch, Y-axis screw rod, Y attachment device, the first Y guide rail, the second Y guide rail, Y decussation roller collar, the motor shaft of Y-motor
Y-axis screw rod is connected by Y-axis flexible clutch, Y-axis screw rod, the first Y guide rail are connected by Y attachment device with the second Y guide rail, and second
Y guide rail is connected with the inner ring of Y decussation roller collar again, and the outer ring of Y decussation roller collar is connected with moving platform.
5. high-accuracy parallel connection platform according to claim 1, which is characterized in that the X1 motor, X2 motor, Y-motor are all
Using servo motor.
6. high-accuracy parallel connection platform according to claim 1, which is characterized in that the high-accuracy parallel connection platform X1 axis,
Limit switch is both provided on X2 axis, Y direction.
7. a kind of high-accuracy parallel connection platform controller, which is characterized in that anti-including communication module, data resolution module, kinematics
Solve model module, kinematics correction model module, locus interpolation module；
Data resolution module is connect with communication module, inverse kinematic model module, kinematics correction model module respectively；Track
Interpolation module is connect with inverse kinematic model module, kinematics correction model module respectively；
The communication module is used to be communicated with the host computer of parallel connection platform, obtains the current location and target position of moving platform
It sets；
The current location and target position for the moving platform that the data resolution module is used to receive carry out data parsing, by word
Symbol string is converted to floating number；
The inverse kinematic model module is used to acquire the theoretical amount of feeding of each motor shaft using inverse kinematic model；
The kinematics correction model module is used to acquire the correction amount of each motor shaft amount of feeding using kinematics correction model；
The locus interpolation module is used for according to the theoretical amount of feeding of each motor shaft and the correction amount of each motor shaft amount of feeding
The practical amount of feeding of each motor shaft is obtained to drive each motor action.
8. high-accuracy parallel connection platform controller according to claim 7, which is characterized in that the controller further includes IO mould
Block and logic module, logic module are connect with data resolution module and I/O module respectively；
The I/O module is used to receive the signal for the limit switch that parallel connection platform is arranged in each direction of motion；
The logic module is for judging whether parallel connection platform reaches limit of sports record position or analysis simultaneously in each direction of motion
Whether connection platform meets required precision to judge to want to continue to act.
9. high-accuracy parallel connection platform controller according to claim 7, which is characterized in that the inverse kinematic model meter
Calculation method is as follows:
When the angle of moving platform rotation is δ θ
δX1=Rcos (δ θ+θ X1+θ0)-Rcos(θX1+θ0)
δX2=Rcos (δ θ+θ X2+θ0)-Rcos(θX2+θ0)
δ Y=Rsin (δ θ+θ Y+ θ0)-Rsin(θY+θ0)
Therefore from A1 point (x1, y1, θ0) move to A2 (x2, y2, θ0+ δ θ) point, the motion conditions of each motor are as follows:
δX1=Rcos (δ θ+θ X1+θ0)-Rcos(θX1+θ0)+(x2-x1)
δX2=Rcos (δ θ+θ X2+θ0)-Rcos(θX2+θ0)+(x2-x1)
δ Y=Rsin (δ θ+θ Y+ θ0)-Rsin(θX2+θ0)+(y2-y1)
The as inverse resolution model of the platform；
Wherein,
δX1: the opposite amount of feeding of X1 motor；
δX2: the opposite amount of feeding of X2 motor；
The opposite amount of feeding of δ Y:Y motor；
θX1: the angle position at X1 decussation roller collar center；
θX2: the angle position at X2 decussation roller collar center；
The angle position at θ Y:Y decussation roller collar center；
θ0: the angle of high-accuracy parallel connection platform before calculating.
10. high-accuracy parallel connection platform controller according to claim 7, which is characterized in that the kinematics correction model
Calculation method is as follows:
Before calibration, moving platform is moved into origin position first, origin at this time is defaulted as accurate origin position, and
Origin position in vision system, next specified moving platform runs to aiming spot, according to ideal inverse kinematic mould
Type can calculate the amount of feeding of theoretic X1 motor, X2 motor and Y-motor；After motor has executed the amount of feeding, using double
Lens camera removes acquisition image, obtains the physical location of moving platform；Above-mentioned process, which executes, to be not less than 9 times, can be obtained not less than 9
The practical amount of feeding of group motor and the physical location of platform, recycle this not less than 9 groups of data, are based on least square method
Obtain kinematics correction model.
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