CN101296778A - Position control device of worktable - Google Patents
Position control device of worktable Download PDFInfo
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- CN101296778A CN101296778A CNA2005800519366A CN200580051936A CN101296778A CN 101296778 A CN101296778 A CN 101296778A CN A2005800519366 A CNA2005800519366 A CN A2005800519366A CN 200580051936 A CN200580051936 A CN 200580051936A CN 101296778 A CN101296778 A CN 101296778A
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- travelling table
- workbench
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Control Of Position Or Direction (AREA)
- Machine Tool Units (AREA)
Abstract
When the positioning of a movable table is performed in four-axis control using four supporting means, asynchronous positioning control using three of the four axes is performed first with the other axis used for torque control. Immediately before or after the completion of the positioning using the three axes, the other axis is switched for positioning control and the final positioning to the target position is performed.
Description
Technical field
The present invention relates to be applicable to the processing of high meticulous electronic unit and precision positioning apparatus for assembling, that carry out workbench, based on the position control device of the workbench of multiaxis control.
Background technology
In assembling on the meticulous circuit substrate of height or form electronic unit or process or carry out under their situation of instrumentation the position of prior initialization circuit substrate of needs or plate-shaped member to forming tabular high meticulous electronic unit.The location of carrying out is by on the travelling table that circuit substrate or tabular electronic unit is arranged on level and this workbench is driven control carry out for this reason.In the past, as the localization method of this workbench, for example be disclosed in the patent documentation 1.This method is used 3 support units with the axle that carries out Linear Driving, foursquare travelling table is supported near 3 positions the bottom surface in bight and is maintained in level, use motor to make each driving shaft rotation of these support units, the strong point at 3 positions is moved respectively, thus the position of decision travelling table.In this case, utilize 3 XY θ controls, wherein, travelling table for example with 2 axles along the directions X of horizontal plane move, with remaining 1 axle along with the rectangular horizontal plane of directions X on the Y direction move and follow 3 moving of axle of this moment and rotate along the θ direction.
In recent years, follow the maximization of circuit substrate and tabular electronic unit and require large-scale travelling table.Under the situation of so large-scale travelling table having been used the method for controlling based on above-mentioned 3 XY θ, the problem that the positioning accuracy of travelling table exists is, with respect to directions X based on 2 controls, on the Y of only 1 control direction, special on the position of leaving from driving shaft deterioration.Its reason is, on the Y direction, only locate and the maintenance travelling table with 1 axle, so when driving shaft left, the rigidity of this workbench part and this distance be step-down accordingly in the position of workbench, so can be subjected to the influence of the problem that the structure owing to support unit causes.
In addition, the method that is used to solve the problems of mechanical rigidity that causes owing to above-mentioned 3 XY θ control methods is disclosed in patent documentation 2.This method is 4 following XY θ control methods: utilize 4 support units that are configured on the workbench pedestal, and can relatively move twelve Earthly Branches support travelling table parallel with datum level, and utilize 4 linear drive units respectively these support units to be carried out linear drives the relative workbench pedestal of travelling table is relatively moved.And, in the method, calculate the axle moving target value of 4 linear drive units that any given position on the datum level of travelling table is provided, corresponding with the move of X, Y and θ direction, make the translational speed of 4 support units drive 4 linear drive units pro rata simultaneously with axle moving target value, so that the mobile time started point of 4 support units and concluding time point are consistent, and travelling table is moved to the target location.The displacement that the location of this moment has according to 4 axles makes the feature of 4 axles with the synchronizing speed action.
But, in above-mentioned this control method, make the translational speed of 4 support units drive 4 linear drive units pro rata simultaneously with axle moving target value, so that the mobile time started point of 4 support units and concluding time point are consistent, so the actuating quantity ratio of 4 between centers must be correctly consistent on the amount of movement in calculated value and the actual machine, for this reason, require complicated control.In addition, for the following speed control of 1 pulse in the linear drive unit (pulse control motor), there is the problem that is difficult to correctly carry out ratio, Synchronization Control at each between centers.In addition, be easy to take place the conflict of each between centers etc. owing to the error of calculation, machine error, Resolution Error etc., under the situation of carrying out high-speed mobile, because there are restriction in the high speed that control is calculated, the High Level of resolution ratio etc. in control.That is, under the situation of 4 XY θ control methods of patent documentation 2,, be difficult to carry out high-precision location with high speed motion though can compensate to a certain degree mechanical rigid.
Patent documentation 1: No. 2700050 communique of Japan's special permission
Patent documentation 2: No. 3604686 communique of Japan's special permission
Summary of the invention
The present invention finishes in order to solve above-mentioned problem, its purpose is to provide a kind of position control device of workbench, can control compensation mechanical rigid when large-scale travelling table positioned by XY θ, and can carry out high-precision location with high speed motion.
The position control device utilization of workbench of the present invention is arranged at least 4 support units on the workbench pedestal, with respect to the workbench pedestal flatly, and can support travelling table rotationally around the strong point of each support unit, these support units convert linear drives respectively to by the axle rotation with the motor of correspondence, make travelling table with respect to the workbench pedestal along directions X, the Y direction, the θ direction relatively moves, thereby travelling table is navigated to the target location, wherein, calculate with respect to the measured value of the side-play amount of target location according to any given position from the datum level of the travelling table of current placement, be used to provide X, the axle moving target value of each motor of the move of Y and θ direction, non-synchronously begin simultaneously based on the positioning control of 3 motor arbitrarily, control the translational speed of 3 corresponding support units respectively individually, all reach the time point of the axle moving target value of correspondence at these 3 motor, end is based on the positioning control of 3 axles, on the other hand, 3 motor position control during, remaining motor is driven with torque control, to provide auxiliary force to orientation based on 3 axles, after the positioning control of 3 whole axles will finish preceding or just finish, switch to positioning control from torque control and drive, till consistent with an own moving target value.
According to the present invention, only utilize the value of the displacement from the current location to the target location to control, and control rate is not carried out Synchronization Control, so control method has realized simplification, and, can not take place because the conflict of each between centers that the error of calculation, mechanical assembly error, Motor Control Resolution Error etc. cause etc. have the effect that can carry out Position Control with level and smooth action.In addition, the conflict power of the between centers that causes owing to complicated computing, the error of calculation, drive actions constant time lag can not take place, so can carry out high-precision location with high speed motion.
Description of drawings
Fig. 1 is that the part of structure of position control device that the workbench of embodiments of the present invention 1 is shown is cut plane open.
Fig. 2 is the plane and the front elevation of structure that the support unit of embodiments of the present invention 1 is shown.
Fig. 3 illustrates for the amount of movement of the motor that calculates embodiments of the present invention 1 and makes travelling table move the key diagram of the state of small quantity along directions X.
Fig. 4 illustrates for the amount of movement of the motor that calculates embodiments of the present invention 1 and makes travelling table move the key diagram of the state of small quantity along the Y direction.
Fig. 5 illustrates for the amount of movement of the motor that calculates embodiments of the present invention 1 and makes travelling table move the key diagram of the state of small quantity along the θ direction.
Fig. 6 is the key diagram that the state before the location action of travelling table of embodiments of the present invention 1 is shown.
Fig. 7 is the key diagram of initial mobile state of a control of location action that the travelling table of embodiments of the present invention 1 is shown.
Fig. 8 is the key diagram of positioning states that the travelling table of embodiments of the present invention 1 is shown.
Fig. 9 is the block diagram of structure of driving control device that the motor of the positioning control of carrying out embodiments of the present invention 1 is shown.
Figure 10 is that the part of structure example of position control device that the workbench of embodiments of the present invention 2 is shown is cut plane open.
Figure 11 is that the part of other structure example of position control device that the workbench of embodiments of the present invention 2 is shown is cut plane open.
The specific embodiment
Below, in order to illustrate in greater detail the present invention, describe being used to implement best mode of the present invention with reference to the accompanying drawings.
Embodiment 1
Fig. 1 is that the part of structure of position control device that the workbench of embodiments of the present invention 1 is shown is cut plane open.Present embodiment 1 explanation uses 4 axles to come travelling table is carried out the example of XY θ control.
Travelling table 10 has the datum level of uniform in-plane, is supported at strong point A, B, C, the D place at 4 positions by 4 support units 30 that are arranged on the workbench pedestal 20, so that datum level level all the time.Support unit 30 has the rotatable parts 38 that rotate around axle 37, embeds in the hole 11 that is arranged on the travelling table 10 by the outer rim with rotatable parts 38, supports travelling table 10 rotationally.The driving control of 4 support units 30 is undertaken by motor M1～M4 separately.
Fig. 2 illustrates the detailed structure of support unit 30, but support unit 30 be with above-mentioned patent documentation 1 and patent documentation 2 in the essentially identical structure in unit used, be structure general in this field.Shown in Fig. 2 (a), support unit 30 possesses the mechanism that makes rotatable parts 38 motions as shown by arrows along X (level horizontal stroke) direction, Y (level is vertical) direction, θ (horizontally rotating) direction.Therefore, support unit 30 possesses the 1st linear moving mechanism that is made of the 1st guide rail 31 and the 1st guiding piece 32.The 1st guide rail 31 has the predetermined length that linearity ground extends, be fixed on the workbench pedestal 20 parallel with the datum level 10a of travelling table 10 above.The 1st guiding piece 32 is arranged to slide across the 1st guide rail 31.The 1st guiding piece 32 possesses nut body 56 in the above.Nut body 56 with dispose feed screw 55 superincumbent, that constitute by ball screw or sliding screw etc. with the form of extending abreast with the 1st guide rail 31 and screw togather, and have the function that the rotation of feed screw 55 is converted to the line movement of the 1st guiding piece 32.(the output shaft 51a that is equivalent to M1～M4) links the motor 51 that feed screw 55 is used via couplers such as ball screw 53 and the Position Control that is made of the servomotor that is arranged on the workbench pedestal 20, rotates under the effect of motor 51.
In addition, support unit 30 possesses the 2nd linear moving mechanism that is made of the 2nd guide rail 34 and the 2nd guiding piece 35.The 2nd guide rail 34 has the predetermined length that linearity ground extends, and is parallel with the datum level 10a of travelling table 10 and have right-angle relationship with the 1st guide rail 31, the top by being fixed in nut body 56 in centre or integrally formed and supported.The 2nd guiding piece 35 is arranged to slide across the 2nd guide rail 34.Therefore, the 2nd guiding piece 35 has with respect to the rectangular direction of motion of the direction of motion of the 1st guiding piece 32.In addition, the 2nd guiding piece 35 bottom of the axle 37 that extends along the direction vertical of fixed support at an upper portion thereof with respect to the datum level 10a of travelling table 10.In the upper end of axle 37, rotatable parts 38 are arranged on foreign steamer and can be rotated freely with respect to axle 37 via ball bearing.
In Fig. 1, travelling table 10 is supported by the strong point (A, B, C, D) of 4 support units, and use 4 axles of motor M1～M4 to control, but, need in advance according to obtaining amount of movement based on each motor with the relation of the amount of movement of travelling table 10 in driving when control of carrying out each motor.Therefore, as Fig. 3 is extremely illustrated in fig. 5, make travelling table 10, and each amount of movement of workbench is at this moment measured along X (laterally), Y (vertically), the individually mobile small quantity of θ (direction of rotation).Then, will provide the amount of movement of each motor of this amount of movement to calculate according to the output of its encoder.In this case, as the device that the amount of movement of workbench is measured, use for example microphotographic camera of the pre-position on 2 tops that in Fig. 3, is separately positioned on the+symbol on 4 angles that are shown in travelling table.Then, according to the position of the initial+symbol of taking on image coordinate with in the position of moving the+symbol of taking the back, handle by image and to obtain displacement.
At first, as shown in Figure 3, make travelling table 10 move small quantity Δ XT along directions X, will according to this moment encoder the amount of movement of each motor of obtaining of output be made as following value.
The amount of movement of M1=Δ XM1X (1)
The amount of movement of M2=Δ XM2X (2)
The amount of movement of M3=Δ YM3X (3)
The amount of movement of M4=Δ YM4X (4)
Next, as shown in Figure 4, make travelling table 10 move small quantity Δ YT along the Y direction, will according to this moment encoder the amount of movement of each motor of obtaining of output be made as following value.
The amount of movement of M1=Δ XM1Y (5)
The amount of movement of M2=Δ XM2Y (6)
The amount of movement of M3=Δ YM3Y (7)
The amount of movement of M4=Δ YM4Y (8)
Next, as shown in Figure 5, make travelling table 10 move small quantity Δ θ T along the θ direction, will according to this moment encoder the amount of movement of each motor of obtaining of output be made as following value.
The amount of movement of M1=Δ XM1 θ (9)
The amount of movement of M2=Δ XM2 θ (10)
The amount of movement of M3=Δ YM3 θ (11)
The amount of movement of M4=Δ YM4 θ (12)
According to the data of above-mentioned formula (1)～(12), use following formula (13)～(16) to calculate to send as an envoy to travelling table 10 to carry out the amount of movement of each motor when mobile to the position of amount of movement Δ X (laterally), Δ Y (vertically) and Δ θ (direction of rotation).
The amount of movement of M1=Δ X Δ XM1X/ Δ XT+ Δ Y Δ XM1Y/ Δ YT+ Δ θ Δ XM1 θ/Δ θ T (13)
The amount of movement of M2=Δ X Δ XM2X/ Δ XT+ Δ Y Δ XM2Y/ Δ YT+ Δ θ Δ XM2 θ/Δ θ T (14)
The amount of movement of M3=Δ X Δ XM3X/ Δ XT+ Δ Y Δ XM3Y/ Δ YT+ Δ θ Δ XM3 θ/Δ θ T (15)
The amount of movement of M4=Δ X Δ XM4X/ Δ XT+ Δ Y Δ XM4Y/ Δ YT+ Δ θ Δ XM4 θ/Δ θ T (16)
In the location action in above-mentioned computational methods,,, can more correctly position so compare with situation about controlling with the design theory value owing to form the controlling value that has also absorbed the assembly error in the actual machine.
Next, the method to the location of carrying out travelling table 10 describes.
In Fig. 6, establish current travelling table 10 and be positioned at the position of representing with solid line.That is, be positioned at position with respect to the skew of the position (target location of location) of the workbench 10b that illustrates below with the two point dotted line.Assigned address arbitrarily (for example 2+mark) on the datum level 10a that utilizes microphotographic camera to measure as described above to obtain travelling table 10 is with respect to X, the Y of target location and the side-play amount of θ direction.Next, use formula (13)～formula (16) calculates the axle moving target value of 4 motor M1～M4 of the move that is used to provide X, Y and θ direction respectively according to the said determination value.
Next, begin the positioning control of in advance carrying out simultaneously based on 3 axles of 3 motor among 4 motor M1～M4, for example motor M1, M3, M4.On the other hand, remaining motor M2 utilizes torque control to be driven.In positioning control based on motor M1, M3, M4, axle moving target value according to 3 axles, 3 axles are moved respectively with asynchronous speed, control the translational speed of 3 corresponding support units 30 respectively individually, make motor M1, M3, M4 action, up to till axle moving target value is consistent.Therefore, in this case, though the mobile time started point of 3 support units 30 is consistent, the concluding time point is different.On the other hand, during this period, remaining motor M2 controls with torque and moves, so own is driven, to provide auxiliary force to the orientation based on above-mentioned 3 axles, is carried out the location of travelling table 10 by the support unit corresponding with it 30.Its result, the position of travelling table 10 becomes state as shown in Figure 7.
Next, in the location status of the travelling table 10 in Fig. 7, the position in bight of travelling table 10 of motor M2 side of having carried out torque control is with respect to target offset.For this offset ST, at the support unit of motor M1 because guide rail etc. and when on the Y direction, having clearance delta SM, distance L T till according to the length L M of the guiding piece of guide rail, from the strong point A relevant with motor M1 to the bight of motor M2 side, formula (17) is set up.
ΔST＝ΔSM×LT/LM (17)
Herein, under the LT situation big with respect to LM, because this ratio value, thereby Δ ST is exaggerated and becomes and can't ignore.
Therefore, in order to dwindle offset ST significantly and travelling table 10 to be navigated to the target location as shown in Figure 8, carry out positioning control based on motor M2.The amount of movement of the axle of the motor M2 of this moment becomes axle moving target value that front through type (14) calculates and the value obtained according to the output umber of pulse of the encoder of motor M2 poor when torque is controlled.Motor M2 drives, and till the amount of movement of translational speed that makes support unit 30 and above-mentioned difference reaches a moving target value pro rata, thus travelling table 10 is set to the target location.In addition, before the time point that the driving of motor M2 is altered to positioning control is made as and will finishes based on the location of 3 axles of above-mentioned motor M1, M3, M4 or after just having finished.
Fig. 9 illustrates the structure of the driving control device of the motor M1～M4 that is used to carry out above-mentioned positioning control.
In Fig. 9, as mentioned above, based on the initial positioning control of 3 motor M1, M3, M4 the time, provide according to running switching signal s3 to motor driver 202 from the instruction of CPU portion 101, motor driver 202 only switches to motor M2 the running of torque control.At this moment, clamp-pulse generator 102 will be offered the motor driver 201,203,204 of correspondence by CPU portion 101 according to the positioning control pulse s1 of program appointment.Therefore, each motor driver 201,203,204 provides separately motor drive signal s4 to motor M1, M3, the M4 of correspondence, and drive motor M1, M3, M4 position control.And the motor driver 202 that is switched into the running of torque control position at motor M1, M3, M4 control driving during, make motor M2 be in the driving condition of torque control.
Motor M1～M4 provides the pulse s2 that takes place from each encoder 51b to encoder pulse count device 103 in the driving that utilizes positioning control.103 couples of pulse s2 separately of encoder pulse count device count the control position that calculates each motor and offer CPU portion 101.CPU portion 101 control position of motor M1, M3, M4 therein reaches under the situation of axle moving target value separately, make from clamp-pulse generator 102, with the stopping of motor M1, M3, positioning control pulse s1 that M4 is corresponding.In addition, CPU portion 101 before the control position of motor M1, M3, M4 becomes the axle moving target value that will reach separately value or reached under situation when state (Fig. 7) of axle moving target value, the running switching signal s3 that cut-out provides to motor driver 202 from input and output portion 104 provides positioning control pulse s1 at motor M2 to motor driver 202.Thus, motor M2 switches from torque control, and positions control.During this positioning control, encoder pulse count device 103 calculates its control position according to the pulse s2 that the encoder 51b from motor M2 takes place.CPU portion 101 has reached under the situation of axle moving target value in the control position of M2, makes to stop end positioning control (state of Fig. 8) from clamp-pulse generator 102, corresponding with motor M2 positioning control pulse s1.
Like this, according to present embodiment 1, using 4 support units to come the location of travelling table is carried out under the situation of 4 controls, make based on the positioning control of wherein 3 axles and non-synchronously carry out in advance, during this period, carry out torque control with remaining 1 axle, after will finishing preceding based on the location of 3 axles or just having finished, should remaining 1 axle switch to positioning control and finally navigate to the target location.Therefore, only utilize the value of the displacement from the current location to the target location to control, and control rate is not carried out Synchronization Control, so control method has realized simplification, and, can not take place because the conflict of each between centers that the error of calculation, mechanical assembly error, Motor Control Resolution Error etc. cause etc. have the effect that can carry out Position Control with level and smooth action.In addition, the conflict power of the between centers that causes owing to complicated computing, the error of calculation, drive actions constant time lag can not take place, so can carry out high speed motion.
Figure 10 is that the part of structure of position control device that the workbench of embodiments of the present invention 2 is shown is cut plane open.This example illustrates the travelling table 10 that the strong point A～F that uses 6 support units 30 supports rectangle, and the situation of being carried out 6 controls by motor M21～M26.In this control method, for example using 3 motor M21, M25, M26 to carry out under the situation of initial positioning control, during this period, other motor M22, M23, M24 carry out torque control, after the positioning control of motor M21, M25, M26 will be finished preceding or just finish, use other motor M22, M23, M24 to position control.Action during the positioning control of this motor M22, M23, M24 also begins simultaneously, and non-synchronously carries out mutually.
In addition, Figure 11 illustrates and uses 6 other examples that the strong point supported and carried out 6 controls.In this example, use these 6 strong points of G～L to support the travelling table 10 of regular hexagon, use motor M31～M36 to control with axle parallel with each limit of regular hexagon.In this control method, for example using 3 motor M31, M32, M34 to carry out under the situation of initial positioning control, during this period, other motor M33, M35, M36 carry out torque control, after the positioning control of motor M31, M32, M34 will be finished preceding or just finish, use other motor M33, M35, M36 to position control and get final product.
According to present embodiment 2, compare with the example of above-mentioned embodiment 1, be effective using more large-area travelling table and improving under the situation of position rigidity of workbench.
Utilizability on the industry
Like this, the position control device of workbench of the present invention can improve and carry out large substrate Accurate contraposition, the mechanical rigid after the accurate contraposition in the large-scale workbench, and can carry out Be applied with the location of the workbench of high capacity, thus be applicable to that expection will increase from now on, at one Carry out the industry device of a plurality of Precision Machining or assembling on the large substrate.
Claims (2)
1. the position control device of a workbench, utilization is arranged at least 4 support units on the workbench pedestal, with respect to the workbench pedestal flatly, and can support travelling table rotationally around the strong point of each support unit, these support units convert linear drives respectively to by the axle rotation with the motor of correspondence, make above-mentioned travelling table with respect to above-mentioned workbench pedestal along directions X, the Y direction, the θ direction relatively moves, thereby above-mentioned travelling table is navigated to the target location, it is characterized in that
Calculate with respect to the measured value of the side-play amount of target location according to any given position from the datum level of the above-mentioned travelling table of current placement, be used to provide X, the axle moving target value of each motor of the move of Y and θ direction, non-synchronously begin simultaneously based on the positioning control of 3 motor arbitrarily, control the translational speed of 3 corresponding support units respectively individually, all reach the time point of the axle moving target value of correspondence at these 3 motor, end is based on the positioning control of 3 axles
On the other hand, above-mentioned 3 motor position control during, remaining motor is driven with torque control, to provide auxiliary force to orientation based on above-mentioned 3 axles, after the positioning control of whole above-mentioned 3 axles will finish preceding or just finish, switch to positioning control from torque control and drive, till consistent with an own moving target value.
2. the position control device of workbench according to claim 1, it is characterized in that, using the support unit more than 5 to support under the situation of travelling table, position at first beyond any 3 motor of control, switch to a plurality of motor that positioning control uses from torque control and non-synchronously drive mutually when its positioning control.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2005/019717 WO2007049345A1 (en) | 2005-10-26 | 2005-10-26 | Table-positioning controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101296778A true CN101296778A (en) | 2008-10-29 |
Family
ID=37967469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005800519366A Pending CN101296778A (en) | 2005-10-26 | 2005-10-26 | Position control device of worktable |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4615024B2 (en) |
| KR (1) | KR101156901B1 (en) |
| CN (1) | CN101296778A (en) |
| WO (1) | WO2007049345A1 (en) |
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| CN102653058A (en) * | 2012-05-04 | 2012-09-05 | 西安电子科技大学 | Ultra-thin triaxial servo positioning platform for positioning two-dimensional plane |
| CN103137532A (en) * | 2011-11-22 | 2013-06-05 | 财团法人金属工业研究发展中心 | Coplanar three-axis positioning device |
| CN103167923A (en) * | 2010-10-19 | 2013-06-19 | 小松Ntc株式会社 | Crankshaft mirror |
| CN107443883A (en) * | 2013-02-25 | 2017-12-08 | 斯克林集团公司 | Alignment device and alignment methods |
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| JP5644333B2 (en) * | 2010-09-29 | 2014-12-24 | 株式会社Ihi | 4-axis alignment stage |
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| JPH1043978A (en) * | 1996-08-02 | 1998-02-17 | Sakai Giken:Kk | Moving table device |
| JPH11305839A (en) * | 1998-04-21 | 1999-11-05 | Fanuc Ltd | Method for controlling plural servo motors |
| JP3604686B1 (en) * | 2003-06-03 | 2004-12-22 | 株式会社ファースト | 4-axis XYθ table and control method thereof |
| KR100545322B1 (en) * | 2003-06-03 | 2006-01-24 | 가부시키가이샤 파스트 | X-Y-? positioning table with 4 driving axis and the drive-control method of the table |
| JP2006215950A (en) * | 2005-02-07 | 2006-08-17 | Yaskawa Electric Corp | Translation driving/translation/rotating freedom degree mechanism device and two-dimensional positioning device using it |
-
2005
- 2005-10-26 KR KR1020087012430A patent/KR101156901B1/en active IP Right Grant
- 2005-10-26 WO PCT/JP2005/019717 patent/WO2007049345A1/en active Application Filing
- 2005-10-26 CN CNA2005800519366A patent/CN101296778A/en active Pending
- 2005-10-26 JP JP2007542538A patent/JP4615024B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103167923A (en) * | 2010-10-19 | 2013-06-19 | 小松Ntc株式会社 | Crankshaft mirror |
| CN103167923B (en) * | 2010-10-19 | 2015-06-10 | 小松Ntc株式会社 | Crankshaft milling machine |
| CN102368387A (en) * | 2011-09-22 | 2012-03-07 | 高雄应用科技大学 | Electric adjusting positioning mechanism |
| CN103137532A (en) * | 2011-11-22 | 2013-06-05 | 财团法人金属工业研究发展中心 | Coplanar three-axis positioning device |
| CN103137532B (en) * | 2011-11-22 | 2015-10-21 | 财团法人金属工业研究发展中心 | Coplanar three-axis positioning device |
| CN102653058A (en) * | 2012-05-04 | 2012-09-05 | 西安电子科技大学 | Ultra-thin triaxial servo positioning platform for positioning two-dimensional plane |
| CN107443883A (en) * | 2013-02-25 | 2017-12-08 | 斯克林集团公司 | Alignment device and alignment methods |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007049345A1 (en) | 2007-05-03 |
| KR101156901B1 (en) | 2012-06-21 |
| JPWO2007049345A1 (en) | 2009-04-30 |
| KR20080069631A (en) | 2008-07-28 |
| JP4615024B2 (en) | 2011-01-19 |
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