Three Degree Of Freedom is controlled platform
Technical field
The utility model relates to the integrated circuit testing field, and particularly Three Degree Of Freedom is controlled platform.
Background technology
Three Degree Of Freedom is controlled the fixed mechanism that platform (Manipulator) mainly comprises motion chassis, elevating mechanism, switching mechanism and measuring head in the prior art, as shown in Figure 1.Measuring head is fixed on the switching mechanism by fixed mechanism, and switching mechanism is fixed on the elevating mechanism, and elevating mechanism is fixed on the motion chassis.
Switching mechanism is responsible for the Three Degree Of Freedom upset that the realization Three Degree Of Freedom is controlled platform (Manipulator) as major part.Described mechanism module comprises a plurality of options, and each mechanism is responsible for finishing different functions, as: move horizontally, oscilaltion, flip horizontal, flip vertical etc.
There is following problem in prior art:
Elevating mechanism generally adopts screw mandrel, and lift adjustment speed is slow, the regulative mode inconvenience, and stroke is short, does not have locking device;
Switching mechanism generally has only arm formula twin shaft to spin upside down, and does not have level and flip vertical, can not realize that Three Degree Of Freedom regulates arbitrarily.
The utility model content
The purpose of this utility model is to provide a kind of Three Degree Of Freedom to control platform, make the measuring head operating surface about, about and the place ahead demand of docking with mechanical arm or probe station, thereby effectively improve efficient and the speed controlled.
For solving the problems of the technologies described above, embodiment of the present utility model provides a kind of Three Degree Of Freedom to control platform, comprises: motion chassis 11, elevating mechanism 12, switching mechanism, measuring head fixed mechanism 16 and measuring head 17;
Described elevating mechanism 12 is fixed on the described motion chassis 11, and described switching mechanism is fixed on the described elevating mechanism 12, and the measuring head fixed mechanism is fixed on described measuring head on the described switching mechanism;
Wherein, described switching mechanism module comprises and horizontally rotates parts 13, vertical rotation parts 14 and arm turning part 15; Described horizontally rotate drive described vertical rotation parts 14, described arm turning part 15 and described measuring head 17 when parts 13 rotate and do together and horizontally rotate; Described vertical rotation parts 14 drive described arm turning part 15 when rotating and described measuring head 17 is done vertical rotation together; Described measuring head overturns in arm turning part 15.
As further improvement, described to horizontally rotate parts be uniaxial horizontal 180 degree rotatable parts; Described vertical rotation parts are the vertical 360 degree rotatable parts of single shaft; Described arm turning part is that arm twin shaft 270 degree spin upside down parts.Switching mechanism has used uniaxial horizontal rotatable parts, realization level 180 degree rotate, and have used single shaft vertical rotation parts, realize that vertical 360 degree rotate, and having increased lockover and stop means at the arm turning part, the angle of upset is 270 degree to the maximum.
As further improvement, described elevating mechanism 12 comprises load-bearing 22, belt 24, fixed block 25, slide rail 23; The weight of described load-bearing is consistent with the general assembly (TW) of described switching mechanism, described measuring head fixed mechanism 16 and measuring head 17; Described belt 24 passes described fixed block 25, one ends and connects described load-bearing 22, and the other end connects described switching mechanism; The lifting on described slide rail 23 of described switching mechanism.Up-down mode has adopted fixed pulley and belt to drive the proportioning load-bearing and switching mechanism is done heterodromous pattern.
As further improvement, described switching mechanism at the stroke of lifting on the described slide rail 23 in 700 millimeters to 1300 millimeters altitude ranges.The switching mechanism overall fixed moves up and down by certain stroke in the slide rail of elevating mechanism.
As further improvement, described elevating mechanism also comprises: locking device 26; Described locking device 26 is locked described switching mechanism on described elevating mechanism in described switching mechanism lifting or when turning to the precalculated position that described measuring head desire stops.Up-down mode has increased the device with the test macro mechanical fasteners, realizes integrated motion.
As further improvement, described switching mechanism as an integral installation on described slide rail.
As further improvement, described motion chassis 11 comprises support chassis and castor; Described castor is installed in described support chassis bottom; Described elevating mechanism is fixed on the described support chassis.
Compared with prior art, the utlity model has following advantage:
1, abandons the mode of screw mandrel lifting, the flexibility ratio when having improved descending operation and smoothness and elevating movement speed.The shake that has produced when effectively having improved the screw mandrel lifting.
2, can realize the locking of arbitrary height in effective lifting travel, improve performance accuracy.
3, the rotation in horizontal direction 180 degree has increased usable floor area, can reduce the movement of platform.
4, vertical direction 360 degree rotate has arbitrarily increased the mode that the user selects the measuring head operating surface, uses convenient.
5, elevating mechanism cooperates with switching mechanism, realized in the effective range user up and down and the place ahead altogether arbitrarily angled with outside probe station (Prober) or the mechanical arm (Handler) of five positions dock demand, the raising merging precision.And effectively shorten the length of test signal line.
Description of drawings
Fig. 1 is the connection diagram of controlling platform in the prior art;
Fig. 2 is the connection diagram that Three Degree Of Freedom is controlled platform in the utility model;
Fig. 3 is the structural representation that Three Degree Of Freedom is controlled platform in the utility model;
Among the figure: 11. motion chassis; 12. elevating mechanism; 13. horizontally rotate mechanism; 14. vertical rotation mechanism; 15. arm switching mechanism; 16. fixed mechanism; 17. measuring head; 21. castor; 22. load-bearing; 23. slide rail; 24. belt; 25. pulley; 26. locking device; 27. the line to test macro.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing embodiment of the present utility model is explained in detail.Yet, persons of ordinary skill in the art may appreciate that in the utility model embodiment, in order to make the reader understand the application better many ins and outs have been proposed.But, even without these ins and outs with based on many variations and the modification of following embodiment, also can realize each claim of the application technical scheme required for protection.
Embodiment of the present utility model relates to a kind of Three Degree Of Freedom and controls platform, as shown in Figures 2 and 3, it comprises motion chassis 11, elevating mechanism 12, switching mechanism, measuring head fixed mechanism 16 and measuring head 17, elevating mechanism 12 is fixed on the motion chassis 11, switching mechanism is fixed on the elevating mechanism 12, and the measuring head fixed mechanism is fixed on measuring head on the described switching mechanism.
Wherein, the switching mechanism module comprises and horizontally rotates parts 13, vertical rotation parts 14 and arm turning part 15; Drive vertical rotation parts 14, arm turning part 15 and measuring head 17 are done together and are horizontally rotated when horizontally rotating parts 13 rotations; Vertical rotation parts 14 drive arm turning part 15 when rotating and measuring head 17 is done vertical rotation together; Measuring head overturns in arm turning part 15.Horizontally rotate parts and can be uniaxial horizontal 180 degree rotatable parts; The vertical rotation parts can be the vertical 360 degree rotatable parts of single shaft; The arm turning part can spin upside down parts for arm twin shaft 270 degree.
Switching mechanism has used uniaxial horizontal rotatable parts, realization level 180 degree rotate, and have used single shaft vertical rotation parts, realize that vertical 360 degree rotate, and having increased lockover and stop means at the arm turning part, the angle of upset is 270 degree to the maximum.Motion chassis 11 comprises support chassis and castor 21; Castor is installed in the support chassis bottom; Elevating mechanism is fixed on the support chassis.That is to say, realize the whole movement of controlling platform by castor.
Up-down mode has adopted fixed pulley and belt to drive the proportioning load-bearing and switching mechanism is done heterodromous pattern.Elevating mechanism 12 comprises load-bearing 22, belt 24, fixed block 25, slide rail 23; The weight of load-bearing is consistent with the general assembly (TW) of switching mechanism, measuring head fixed mechanism 16 and measuring head 17; Belt 24 passes fixed block 25, one ends and connects load-bearing 22, and the other end connects switching mechanism; Switching mechanism lifting on slide rail 23.That is to say, at first the weight of proportioning load-bearing 22 is adjusted to the heavy amount basically identical with switching mechanism 13,14,15 fixed mechanisms 16 and measuring head 17 in the elevating mechanism 12.The weight at the two ends of belt 24 is equal substantially on the fixed block 25 like this, switching mechanism toward appearing on the stage or only needing when pressing down a very little strength just can realize that switching mechanism moves up and down at the slide rail 23 that the restriction of elevating mechanism forms.In addition, switching mechanism, moves up and down by certain stroke on the slide rail of elevating mechanism as an overall fixed.Switching mechanism at the stroke of lifting on the slide rail 23 in 700 millimeters to 1300 millimeters altitude ranges.
Up-down mode has increased the device with the test macro mechanical fasteners, realizes integrated motion.Elevating mechanism also comprises: locking device 26; Locking device 26 is in the switching mechanism lifting or when turning to the precalculated position that the measuring head desire stops, and the locking switching mechanism is on described elevating mechanism.That is to say that when switching mechanism rises or drops to suitable position, with locking device 26 switching mechanism is locked on the elevating mechanism, whole switching mechanism just has been adjusted to suitable height.
In addition, drive vertical rotation parts 14, arm turning part 15 and measuring head 17 are done together and are horizontally rotated when horizontally rotating parts 13 rotations, in the slewing areas of 180 degree, lock with locking device when turning to correct position; Drive arm switching mechanism and measuring head were done vertical rotation together when vertical rotation mechanism rotated, and in the slewing areas of 360 degree, locked with locking device when turning to correct position; Measuring head is realized the upset in 270 degree in the arm switching mechanism, and locks by locking device.
In practical application of the present utility model, measuring head (17) can be single measuring head, also can connect a test macro.When connecting a test macro, the elevating mechanism 12 that Three Degree Of Freedom can be controlled platform is fastened on the mainframe of test macro by the fastener of test macro, realizes integrated motion.It is compacter to make test macro control the connection of platform and probe station (Prober) or mechanical arm (Handler), reduces the floor area of test factory build-in test station.
In addition, what deserves to be mentioned is, also can further proportioning load-bearing regulative mode be installed hand rotating shaft or motor instead and rotate the function that drives belt rotation realization lift adjustment.
The Three Degree Of Freedom that the utility model provides is controlled platform and is comprised following advantage:
1, Three Degree Of Freedom is controlled platform and is carried the motion chassis, and convenient transportation is with mobile.
2, the improvement of elevating mechanism has improved the dirigibility of controlling platform control, stability, and reduce cost.
3, three not the rotating mechanism of same-action cooperate and can realize and the probe station (Prober) of outside or the slitless connection of mechanical arm (Handler) five positions, improve merging precision and reliability.
Persons of ordinary skill in the art may appreciate that above-mentioned embodiment is to realize specific embodiment of the utility model, and in actual applications, can do various changes to it in the form and details, and do not depart from spirit and scope of the present utility model.