CN103219049A - Precise positioning one-dimensional platform - Google Patents
Precise positioning one-dimensional platform Download PDFInfo
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- CN103219049A CN103219049A CN2013100684340A CN201310068434A CN103219049A CN 103219049 A CN103219049 A CN 103219049A CN 2013100684340 A CN2013100684340 A CN 2013100684340A CN 201310068434 A CN201310068434 A CN 201310068434A CN 103219049 A CN103219049 A CN 103219049A
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Abstract
The invention provides a precise positioning one-dimensional platform. The precise positioning one-dimensional platform comprises a movement mechanism and a positioning platform connected with the movement mechanism, wherein the movement mechanism comprises a motor, a connecting frame arranged on the motor and a piezoelectric actuator arranged on the connecting frame, and the positioning platform is connected with the piezoelectric actuator. The precise positioning one-dimensional platform achieves high acceleration, high speed and long range of a voice coil motor, compensates errors of the voice coil motor through the piezoelectric actuator, eliminates the vibration of the voice coil motor in the movement process through a buffering vibration-absorption platform, and finally achieves one-dimensional movement with high acceleration, high speed, long range and extremely precise positioning.
Description
Technical field
The present invention relates to a kind of platform, relate in particular to a kind of precision positioning one-dimensional platform.
Background technology
Positioning system plays critical effect in various accurate mechanical equipments.Along with the continuous development of precision engineerings such as microelectronics manufacturing, various ultraprecise processing, the large-stroke nanometer locating platform plays more and more vital role in modern science and technology, particularly be one of the research focus in precision engineering field in recent years always.Particularly in photoetching, in the microelectronics such as bonding, equipment need be done the flatness and reciprocator setting movement, and this motion is the accurate setting movement of carrying out under high speed frequent start-stop state of platform.Satisfying under the condition of predetermined accuracy, also will improve its speed and acceleration as much as possible, shortening machining time, reducing the running time, effectively boosting productivity.The one dimension locating platform is the reciprocal pinpoint key foundation that realizes the plane.
At present the domestic ultraprecise location of long stroke mainly is to wait by ball-screw and piezoelectric actuator or linear electric motors and piezoelectric actuator to finish.These location be difficult to realize simultaneously high acceleration, at a high speed, long stroke and ultraprecise locate.This application for modern field of microelectronic fabrication has certain limitation.
Summary of the invention
At the problems referred to above, the object of the present invention is to provide a kind of precision positioning one-dimensional platform, this precision positioning one-dimensional platform has solved prior art and can't realize simultaneously highly quickening, at a high speed and the precision positioning problem of long stroke.
Technical scheme of the present invention is achieved in that
A kind of precision positioning one-dimensional platform, it is characterized in that: comprise motion, the locating platform that is connected with described motion, described motion comprises motor, be arranged at the link on the described motor and be arranged at piezoelectric actuator on the described link, and described locating platform is connected with described piezoelectric actuator.
Preferably, described motor is a voice coil motor.
Preferably, described piezoelectric actuator is a piezoelectric ceramic actuator.
Preferably, also comprise the buffer shock-absorbing platform that is connected up and down with described motion, described buffer shock-absorbing platform comprises upper bed-plate, the lower bottom base that is connected with described upper bed-plate.
Preferably, described buffer shock-absorbing platform and described locating platform are arranged on the marble base.
Further, described upper bed-plate is provided with slide block, and described upper bed-plate middle part is provided with the buffer shock-absorbing block.
Further, described lower bottom base is provided with the guide rail that matches with described slide block, and described lower bottom base middle part is provided with snubber assembly and holds the mounting hole of described buffer shock-absorbing block.
Further, described snubber assembly comprise guide rod, the guide rod block that is connected with described guide rod one end, the guide rod lock that is connected with the described guide rod other end, the elastic component that is set in described guide rod outside.
Further, described elastic component is a spring.
Preferably, described locating platform comprises the platform link that is connected with described piezoelectric actuator, the location-plate, the platform base that is arranged at described location-plate bottom that are connected with described platform link, the motion measurement grating chi that is arranged at described platform base both sides.
The beneficial effect that the present invention produces is: the present invention couples together the formation motion to voice coil motor and piezoelectric actuator by link, motion and locating platform are fastenedly connected, and motion and buffer shock-absorbing platform are fastenedly connected, when voice coil motor is realized high acceleration, high speed and long stroke, error by piezoelectric actuator compensation voice coil motor, eliminate the vibration in motion process of voice coil motor simultaneously by the buffer shock-absorbing platform, final realize highly quickening, at a high speed, the motion in one dimension of locating of long stroke and ultraprecise.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of an embodiment of a kind of precision positioning one-dimensional platform of the present invention;
Fig. 2 is the structure for amplifying synoptic diagram of an embodiment motion of a kind of precision positioning one-dimensional platform of the present invention;
Fig. 3 is the structure for amplifying synoptic diagram of an embodiment vibration-damped table of a kind of precision positioning one-dimensional platform of the present invention;
Fig. 4 is the structure for amplifying synoptic diagram of an embodiment upper bed-plate of a kind of precision positioning one-dimensional platform of the present invention;
Fig. 5 is the structure for amplifying synoptic diagram of an embodiment lower bottom base of a kind of precision positioning one-dimensional platform of the present invention;
Fig. 6 is the structure for amplifying synoptic diagram of an embodiment locating platform of a kind of precision positioning one-dimensional platform of the present invention;
Among the figure: 1 motion; 11 voice coil motors; 12 links; 13 piezoelectric actuators; 2 locating platforms; 21 platform links; 22 location-plates; 23 first motion measurement grating chis; 24 second motion measurement grating chis; 25 platform bases; 3 buffer shock-absorbing platforms; 31 upper bed-plates; 311 slide blocks; 312 buffer shock-absorbing blocks; 32 lower bottom bases; 321 guide rails; 322 mounting holes; 323 guide rods; 324 guide rod blocks; 325 guide rods lock; 326 springs; 327 spring stop pieces; 4 marble bases.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that is obtained under the creative work prerequisite.
According to Fig. 1～preferred embodiment shown in Figure 6, a kind of precision positioning one-dimensional platform, the buffer shock-absorbing platform 3 that comprises motion 1, the locating platform 2 that is connected with motion 1, is connected up and down with motion 1, the marble base 4 that is connected with locating platform 2 with buffer shock-absorbing platform 3, motion 1 comprises motor, be arranged at the link 12 on the motor and be arranged at piezoelectric actuator 13 on the link 12, and locating platform 2 is connected with piezoelectric actuator 13.In the present invention, the preferred marble base 4 of base, but be not limited to marble base 4, the base of materials such as grouan is all within protection scope of the present invention.
The preferred voice coil motor 11 of motor in the present embodiment; advantages such as it has on long stroke motion at a high speed, high acceleration; but it is not limited to voice coil motor; direct current generator with exchange the 4V motor all within protection domain of the present invention; piezoelectric actuator 13 preferred piezoelectric ceramic actuators; piezoelectric actuator 13 strokes are in nanometer (nm) rank, and it can be implemented in the fine setting on the locating platform 2 for the nano-scale motion.
The effect that proposes buffer shock-absorbing platform 3 in the present invention is the vibration that causes when eliminating owing to voice coil motor 11 motions; buffer shock-absorbing platform 3 comprises upper bed-plate 31; the lower bottom base 32 that is connected with upper bed-plate 31; upper bed-plate 31 is provided with slide block 311; upper bed-plate 31 middle parts are provided with buffer shock-absorbing block 312; in the present embodiment; upper bed-plate 31 transversely is symmetrically arranged with two groups of slide blocks 311; every group of slide block comprises two first slide blocks; the quantity of first slide block can be 1; 3; 4 or other quantity; all within protection scope of the present invention, still the advantage of two first slide blocks is conveniently to install and be beneficial to the balance of guide rail.
The course of work of buffer shock-absorbing platform 3 is that motion 1 motion drives 3 motions of buffer shock-absorbing platform, guide rail 321 on the lower bottom base 32 is along slide block movement, spring 326 is stretched or compressed simultaneously, when arriving the ultimate range of spring 326 stretchings or compression, beginning is motion round about, thereby can eliminate the vibration that brings because of motion 1 motion.
Locating platform 2 comprises the platform link 21 that is connected with motion 1, the location-plate 22 that is connected with platform link 21, be arranged at the platform base 25 of location-plate 22 bottoms, be arranged at the motion measurement grating chi of platform base 25 both sides, location-plate 22 is connected by positioning guide rail (not shown) with platform base 25, positioning guide rail makes location-plate 22 can do rectilinear motion on platform base, in the present embodiment, motion measurement grating chi has macroscopic motion to measure grating chi 23 and microscopic motion is measured grating chi 24, location-plate 22 resulting position signallings fed back when grand moving motion measurement grating chi 23 recorded voice coil motor 11 drivings, thereby realized high the acceleration, at a high speed, the function of long stroke and micron-sized precision location; Location-plate 22 resulting position signallings fed back when fine motion motion measurement grating chi 24 recorded piezoelectric actuator 13 drivings, compensated the error that voice coil motor 12 produces, thereby compensated the nanometer positioning of whole one-dimensional platform.
The course of work of the present invention is: motion 1 motion drives location-plate 22 motions, and motion measurement grating chi feeds back by the position signalling of 22 pairs of motions 1 of location-plate, thereby realizes the precision positioning campaign of whole one-dimensional platform.
The present invention couples together with piezoelectric actuator 13 voice coil motor 11 and forms motion 1 by link 12, motion 1 and locating platform 2 are fastenedly connected, and motion 1 is fastenedly connected with buffer shock-absorbing platform 3, when voice coil motor 11 is realized high acceleration, high speed and long stroke, error by piezoelectric actuator 13 compensation voice coil motors 11, eliminate the vibration of voice coil motor 11 in motion process by buffer shock-absorbing platform 3 simultaneously, final realize highly quickening, at a high speed, the motion in one dimension of locating of long stroke and ultraprecise.
The above only is preferred embodiment of the present invention, and is in order to restriction the present invention, within the spirit and principles in the present invention not all, any modification of being done, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. precision positioning one-dimensional platform, it is characterized in that: comprise motion, the locating platform that is connected with described motion, described motion comprises motor, be arranged at the link on the described motor and be arranged at piezoelectric actuator on the described link, and described locating platform is connected with described piezoelectric actuator.
2. precision positioning one-dimensional platform as claimed in claim 1 is characterized in that: described motor is a voice coil motor.
3. precision positioning one-dimensional platform as claimed in claim 1 is characterized in that: described piezoelectric actuator is a piezoelectric ceramic actuator.
4. precision positioning one-dimensional platform as claimed in claim 1 is characterized in that: also comprise the buffer shock-absorbing platform that is connected up and down with described motion, described buffer shock-absorbing platform comprises upper bed-plate, the lower bottom base that is connected with described upper bed-plate.
5. precision positioning one-dimensional platform as claimed in claim 4 is characterized in that: described buffer shock-absorbing platform and described locating platform are arranged on the marble base.
6. precision positioning one-dimensional platform as claimed in claim 4 is characterized in that: described upper bed-plate is provided with slide block, and described upper bed-plate middle part is provided with the buffer shock-absorbing block.
7. precision positioning one-dimensional platform as claimed in claim 6 is characterized in that: described lower bottom base is provided with the guide rail that matches with described slide block, and described lower bottom base middle part is provided with snubber assembly and holds the mounting hole of described buffer shock-absorbing block.
8. precision positioning one-dimensional platform as claimed in claim 7 is characterized in that: described snubber assembly comprises guide rod, the guide rod block that is connected with described guide rod one end, the guide rod lock that is connected with the described guide rod other end, the elastic component that is set in described guide rod outside.
9. precision positioning one-dimensional platform as claimed in claim 8 is characterized in that: described elastic component is a spring.
10. precision positioning one-dimensional platform as claimed in claim 1 is characterized in that: described locating platform comprises the platform link that is connected with described piezoelectric actuator, the location-plate, the platform base that is arranged at described location-plate bottom that are connected with described platform link, the motion measurement grating chi that is arranged at described platform base both sides.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310068434.0A CN103219049B (en) | 2013-03-04 | 2013-03-04 | Precise positioning one-dimensional platform |
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| CN201310068434.0A CN103219049B (en) | 2013-03-04 | 2013-03-04 | Precise positioning one-dimensional platform |
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| CN103219049A true CN103219049A (en) | 2013-07-24 |
| CN103219049B CN103219049B (en) | 2015-04-29 |
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| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
| CN103995541A (en) * | 2014-04-16 | 2014-08-20 | 广东工业大学 | Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor |
| CN104019332A (en) * | 2014-05-30 | 2014-09-03 | 西安交通大学 | Super-long-stroke high-acceleration high-precision-positioning one-dimensional platform |
| CN104299654A (en) * | 2014-09-30 | 2015-01-21 | 苏州天准精密技术有限公司 | Fast parallelism adjusting mechanism and adjusting method thereof |
| CN104299654B (en) * | 2014-09-30 | 2017-01-04 | 苏州天准科技股份有限公司 | A kind of fast and parallel governor motion and control method thereof |
| CN113189482A (en) * | 2021-04-22 | 2021-07-30 | 深圳市泰道精密机电有限公司 | Voice coil motor detection equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN103995541A (en) * | 2014-04-16 | 2014-08-20 | 广东工业大学 | Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor |
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| CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
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| CN104299654B (en) * | 2014-09-30 | 2017-01-04 | 苏州天准科技股份有限公司 | A kind of fast and parallel governor motion and control method thereof |
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| CN113189482B (en) * | 2021-04-22 | 2022-12-02 | 深圳市泰道精密机电有限公司 | Voice coil motor detection equipment |
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Address after: 523000 nine hi tech Road, Songshan Lake hi tech Industrial Development Zone, Guangdong, Dongguan, 1 Patentee after: GUANGDONG HUST INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE Address before: Science and technology Songshan Lake Science and Technology Industrial Park in Guangdong province Dongguan City nine road 523808 No. 1 Patentee before: DG-HUST Manufacturing Engineering Institute |
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