CN103995541A - Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor - Google Patents

Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor Download PDF

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Publication number
CN103995541A
CN103995541A CN201410152409.5A CN201410152409A CN103995541A CN 103995541 A CN103995541 A CN 103995541A CN 201410152409 A CN201410152409 A CN 201410152409A CN 103995541 A CN103995541 A CN 103995541A
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China
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electric motors
linear electric
piezoelectric ceramics
worktable
linearity
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CN201410152409.5A
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CN103995541B (en
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陈新
韦青海
王晗
陈新度
刘强
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The invention discloses a piezoelectric ceramics based on-line compensation apparatus for the linearity of a linear motor. A linear motor guide rail is installed on a linear motor pedestal, two linear motor limiting baffle plates are respectively installed at the two ends of the linear motor guide rail; a linear motor slide block is installed on the linear motor guide rail and slides on the linear motor guide rail, a piezoelectric ceramic block is installed on the linear motor slide block, and a linear motor workbench is installed on the piezoelectric ceramic block; and a laser sensor is installed on one end surface of the linear motor workbench and receives a laser beam emitted by a laser emitter, the laser emitter is installed on the linear motor limiting baffle plate which is disposed at the same side of the laser sensor, and the laser emitter is installed at a position where when the linear motor workbench loses its linearity in a vertical direction, the laser beam emitted by the laser emitter can irradiate the laser sensor. By using the apparatus provided by the invention, the linearity of the linear motor can be detected in real time in the vertical direction and compensated in an online mode, the linearity and reliability of the linear motor during working are improved, the response speed is rapid, and the precision is high.

Description

A kind of based on piezoelectric ceramics the online compensation device to linear electric motors linearity
Technical field
The present invention be a kind of based on piezoelectric ceramics the online compensation device to linear electric motors linearity, belong to the renovation technique of the online compensation device to linear electric motors linearity based on piezoelectric ceramics.
background technology
Line slideway is widely used in various lathes and every field, along with the development of high-accuracy technology, testing requirement for linearity is more and more higher, and constantly releases novel high-precision Linearity surveying method and device, such as the brake detecting device of lifting straight line elevator line slideway linearity.Method for detection of linearity is a lot, such as laser detection method, displacement transducer method etc., has two piccolo line methods, least square method, Minimum Area containment method for the assessment method of guide rail linearity.At present domestic but not high to the measuring accuracy of linearity.
Considerable correlation technique also just rests under the detection to linearity and the state that quits work linearity is revised.But give directions motor in working order under, because the reasons such as load will inevitably cause the loss of linear electric motors linearity.For solving this technological difficulties, invention one herein,, can realize its linearity is detected and online compensation in real time linear electric motors linearity online compensation device based on piezoelectric ceramics under linear electric motors duty.
Summary of the invention
The object of the invention is to consider the problems referred to above and a kind of linear electric motors linearity at work and online compensation device to linear electric motors linearity based on piezoelectric ceramics of reliability of improving is provided.Response speed of the present invention is rapid, and precision is high.
Technical scheme of the present invention is: of the present invention based on piezoelectric ceramics the online compensation device to linear electric motors linearity, include linear electric motors pedestal, linear electric motors guide rail, linear electric motors slide block, piezoelectric ceramics block, linear electric motors worktable, laser inductor, generating laser, linear electric motors postive stop baffle, wherein linear electric motors guide rails assembling is on linear electric motors pedestal, two linear electric motors postive stop baffles are arranged on respectively the two ends of linear electric motors guide rail, linear electric motors slide block is arranged on linear electric motors guide rail, and slide on linear electric motors guide rail, piezoelectric ceramics block is arranged on linear electric motors slide block, linear electric motors worktable is arranged on piezoelectric ceramics block, laser inductor is arranged on an end face of linear electric motors worktable, the laser beam signal sending in order to receive generating laser, generating laser is arranged on the linear electric motors postive stop baffle with laser inductor homonymy, and the installation site of generating laser is in the time that linear electric motors worktable loses linearity in vertical direction, and the laser beam that generating laser sends can be irradiated on laser inductor.
The present invention is compared with other prior aries, and tool has the following advantages:
1) the present invention, for linear electric motors provide a kind of online linearity compensation system, has improved linear electric motors linearity and reliability at work.
2) linearity of the real-time detection of straight lines motor of laser for the present invention, have the advantages that precision is high, and the height of direct-detection linear electric motors worktable, compensate and comprised that linear electric motors guide rail, slide block, piezoelectric ceramics, worktable generation deformation cause the loss of vertical direction linearity, ensure that linear electric motors worktable moves all the time on sustained height, greatly improved linear electric motors linearity in vertical direction.
3) the present invention uses piezoelectric ceramics to do initiatively compensating device, has the advantages that response speed is rapid, precision is high.
The present invention is online compensation device, and the directly compensation to linear electric motors linearity is at work used Closed loop Control, has the value of very high practicality.The present invention is that a kind of design is ingenious, function admirable, the convenient and practical online compensation device to linear electric motors linearity based on piezoelectric ceramics.
Brief description of the drawings
Fig. 1 is stereographic map of the present invention;
Fig. 2 is the stereographic map of another angle of the present invention;
Fig. 3 is front elevation of the present invention;
Fig. 4 is the schematic diagram of linear electric motors slide block of the present invention and piezoelectric ceramics block and the assembling of linear electric motors worktable.
In figure: 1---linear electric motors pedestal, 2---linear electric motors guide rail, 3---linear electric motors slide block, 4---piezoelectric ceramics block, 5---linear electric motors worktable, 6---laser inductor, 7---generating laser, 8---linear electric motors postive stop baffle, 9---laser beam, 10---linear electric motors table positions post, 11---piezoelectric ceramics block pilot hole, 12---linear electric motors slide block pilot hole.
Embodiment
Embodiment:
Structural representation of the present invention as shown in Figure 1,2,3, 4, of the present invention based on piezoelectric ceramics the online compensation device to linear electric motors linearity, include linear electric motors pedestal 1, linear electric motors guide rail 2, linear electric motors slide block 3, piezoelectric ceramics block 4, linear electric motors worktable 5, laser inductor 6, generating laser 7, linear electric motors postive stop baffle 8, wherein linear electric motors guide rail 2 is arranged on linear electric motors pedestal 1, improves rigidity and the working environment of linear electric motors; Two linear electric motors postive stop baffles 8 are arranged on respectively the two ends of linear electric motors guide rail 2, ensure the security of linear electric motors stroke, and provide installation site for laser generator 7, linear electric motors slide block 3 is arranged on linear electric motors guide rail 2, and slide on linear electric motors guide rail 2, on it, have four linear electric motors slide block pilot holes 12, to install and coordinate with linear electric motors and linear electric motors worktable, while ensureing its work, the height of linear electric motors worktable can be adjusted smoothly.
Piezoelectric ceramics block 4 is arranged on linear electric motors slide block 3, linear electric motors worktable 5 is arranged on piezoelectric ceramics block 4, according to its power connection whether described piezoelectric ceramics block is arranged between linear electric motors slide block and linear electric motors worktable,, adjust the height of linear electric motors worktable.Laser inductor 6 is arranged on an end face of linear electric motors worktable 5, in order to receive the signal of the laser beam 9 that generating laser 7 sends, the width of laser inductor 6 is enough wide, guarantee that it can normally receive laser beam 9, ensure the linear electric motors accuracy of the compensation of linearity in vertical direction, to avoid linear electric motors on yaw direction, signal to be impacted, with real-time detection of straight lines motor linearity in vertical direction, and this signal is outputed to the power control of piezoelectric ceramics block 4, with the work of controlling piezoelectric ceramics block 4 whether.
Generating laser 7 is arranged on the linear electric motors postive stop baffle 8 with laser inductor 6 homonymies, and the installation site of generating laser 7 is in the time that linear electric motors worktable 5 loses linearity in vertical direction, the laser beam 9 that generating laser 7 sends can be irradiated on laser inductor 6, the accuracy of assurance device to the compensation of linear electric motors vertical direction linearity, the rigidity requirement of linear electric motors postive stop baffle 8 that generating laser 7 is housed is higher, ensure the accuracy to the compensation of linearity in linear electric motors vertical direction, guarantee that it is not because the factors such as extraneous vibration impact laser signal, the laser beam that generating laser 7 is launched is beaten below laser inductor 6 just, in the time that a little deformation occurring, linear electric motors (are subject to load, linear electric motors only can produce downward bending), linear electric motors worktable will move down, be that laser inductor 6 also moves down thereupon, laser inductor 6 is subject to the irradiation of laser beam, piezoelectric ceramics work, ensure the linear electric motors compensation of linearity in vertical direction.Described linear electric motors guide rails assembling is on linear electric motors pedestal, and it can strengthen bending resistance and the effectiveness in vibration suppression of linear electric motors guide rail, improves the reliability of linear electric motors work.
On above-mentioned piezoelectric ceramics block 4, be processed with at least two piezoelectric ceramics block pilot holes 11, on linear electric motors worktable 5, be processed with at least two corresponding linear electric motors table positions posts 10, linear electric motors worktable 5 is arranged on four corresponding piezoelectric ceramics block pilot holes 11 set on piezoelectric ceramics block 4 and is realized and locating by linear electric motors table positions post 10; Or on linear electric motors worktable 5, be processed with at least two pilot holes, and on piezoelectric ceramics block 4, being processed with at least two corresponding reference columns, linear electric motors worktable 5 is arranged on four corresponding reference columns set on piezoelectric ceramics block 4 and is realized and locating by pilot hole.
In the present embodiment, on above-mentioned piezoelectric ceramics block 4, be processed with four piezoelectric ceramics block pilot holes 11, on linear electric motors worktable 5, be processed with four corresponding linear electric motors table positions posts 10, linear electric motors worktable 5 is arranged on four corresponding piezoelectric ceramics block pilot holes 11 set on piezoelectric ceramics block 4 and is realized and locating by linear electric motors table positions post 10; Or on linear electric motors worktable 5, be processed with four pilot holes, and on piezoelectric ceramics block 4, being processed with four corresponding reference columns, linear electric motors worktable 5 is arranged on four corresponding reference columns set on piezoelectric ceramics block 4 and is realized and locating by pilot hole.In the time that piezoelectric ceramics block 4 is worked, ensure that linear electric motors worktable raises in vertical direction smoothly, and ensured that it can not cause unnecessary loss to the linearity of linear electric motors in other degree of freedom directions.
On above-mentioned linear electric motors slide block 3, be also provided with at least two linear electric motors slide block pilot holes 12, the position of the piezoelectric ceramics block pilot hole 11 that the set linear electric motors slide block pilot hole 12 of linear electric motors slide block 3 is provided with piezoelectric ceramics block 4 is corresponding, and linear electric motors worktable 5 is inserted on piezoelectric ceramics block pilot hole 11 set on the set linear electric motors slide block pilot hole 12 of linear electric motors slide block 3 and piezoelectric ceramics block 4 and realized and locating by set linear electric motors table positions post 10; The piezoelectric ceramics block pilot hole 11 that the linear electric motors slide block pilot hole 12 that the set linear electric motors table positions post 10 of linear electric motors worktable 5 is set with linear electric motors slide block 3 and piezoelectric ceramics block 4 are provided with is convenient to triangular installation and is coordinated.Ensure in the time that piezoelectric ceramics block 4 is worked, ensure that linear electric motors worktable 5 energy in the vertical directions are movable smoothly, and can not cause it in other degree of freedom directions, linear electric motors linearity to be caused to unnecessary loss.
In the present embodiment, the set reference column 10 of above-mentioned linear electric motors worktable 5 is integrated and makes with linear electric motors worktable 5.Above-mentioned linear electric motors guide rail 2 is arranged on linear electric motors pedestal 1 by two linear electric motors postive stop baffles 8, wherein two linear electric motors postive stop baffles 8 are arranged on the two ends of linear electric motors pedestal 1, and the two ends of linear electric motors guide rail 2 are bearing in respectively on two linear electric motors postive stop baffles 8.
One of the present invention to linear electric motors linearity online compensation device, is utilized redundancy and robotization thought based on piezoelectric ceramics, realizes the linear electric motors on-line automatic compensation of linearity in vertical direction.
?principle of work of the present invention is as follows: under linear electric motors duty, in the time that linear electric motors worktable is subject to load, cause linear electric motors worktable itself, piezoelectric ceramics block, linear electric motors slide block and linear electric motors guide rail generation deformation, be that linear electric motors are bent downwardly, linear electric motors worktable moves down (linear electric motors lose linearity in vertical direction), the laser inductor that is arranged on linear electric motors worktable end face receives the laser signal that the generating laser that is arranged on linear electric motors postive stop baffle is launched immediately, laser inductor is triggered, the power turn-on of piezoelectric ceramics block will be received, due to the inverse piezoelectric effect of piezoelectric ceramics, piezoelectric ceramics work (its in the vertical direction extends), by linear electric motors worktable jack-up, until linear electric motors worktable returns to original height, laser inductor departs from the irradiation of laser beam, piezoelectric ceramics block quits work, so circulation, linear electric motors linearity is in vertical direction compensated, ensure linear electric motors linearity in vertical direction.
In the time that connection piezoelectric ceramics block power supply is switched on, piezoelectric ceramics produces inverse piezoelectric effect, obtains its piezoelectric effect equation by the first law of thermodynamics:
Wherein for stress vector; for stain vector; dfor the electric displacement vector of piezoelectric ceramics; ebefore electric field for piezoelectric ceramics, spend vector; for being the elastic stiffness constant matrix in zero situation in electric field intensity, efor piezoelectric stress constant matrix, specific inductive capacity matrix when answering vanishing.

Claims (6)

  1. One kind based on piezoelectric ceramics the online compensation device to linear electric motors linearity, it is characterized in that including linear electric motors pedestal (1), linear electric motors guide rail (2), linear electric motors slide block (3), piezoelectric ceramics block (4), linear electric motors worktable (5), laser inductor (6), generating laser (7), linear electric motors postive stop baffle (8), wherein linear electric motors guide rail (2) is arranged on linear electric motors pedestal (1), two linear electric motors postive stop baffles (8) are arranged on respectively the two ends of linear electric motors guide rail (2), linear electric motors slide block (3) is arranged on linear electric motors guide rail (2), and in the upper slip of linear electric motors guide rail (2), piezoelectric ceramics block (4) is arranged on linear electric motors slide block (3), linear electric motors worktable (5) is arranged on piezoelectric ceramics block (4), laser inductor (6) is arranged on an end face of linear electric motors worktable (5), laser beam (9) signal sending in order to receive generating laser (7), generating laser (7) is arranged on the linear electric motors postive stop baffle (8) with laser inductor (6) homonymy, and the installation site of generating laser (7) is in the time that linear electric motors worktable (5) loses linearity in vertical direction, and the laser beam (9) that generating laser (7) sends can be irradiated on laser inductor (6).
  2. According to claim 1 based on piezoelectric ceramics the online compensation device to linear electric motors linearity, it is characterized in that being processed with on above-mentioned piezoelectric ceramics block (4) at least two piezoelectric ceramics block pilot holes (11), on linear electric motors worktable (5), be processed with at least two corresponding linear electric motors table positions posts (10), linear electric motors worktable (5) is arranged on the upper location of realizing of the upper set corresponding piezoelectric ceramics block pilot hole (11) of piezoelectric ceramics block (4) by linear electric motors table positions post (10); Or be processed with at least two pilot holes on linear electric motors worktable (5), on piezoelectric ceramics block (4), be processed with at least two corresponding reference columns, linear electric motors worktable (5) is arranged on the upper set corresponding reference column of piezoelectric ceramics block (4) and is realized location by pilot hole.
  3. According to claim 2 based on piezoelectric ceramics the online compensation device to linear electric motors linearity, it is characterized in that being processed with on above-mentioned piezoelectric ceramics block (4) four piezoelectric ceramics block pilot holes (11), on linear electric motors worktable (5), be processed with four corresponding linear electric motors table positions posts (10), linear electric motors worktable (5) is arranged on the upper location of realizing of upper set four the corresponding piezoelectric ceramics block pilot holes (11) of piezoelectric ceramics block (4) by linear electric motors table positions post (10); Or on linear electric motors worktable (5), be processed with four pilot holes, on piezoelectric ceramics block (4), be processed with four corresponding reference columns, linear electric motors worktable (5) is arranged on upper four the set corresponding reference columns of piezoelectric ceramics block (4) and is realized location by pilot hole.
  4. According to claim 3 based on piezoelectric ceramics the online compensation device to linear electric motors linearity, it is characterized in that being also provided with on above-mentioned linear electric motors slide block (3) at least two linear electric motors slide block pilot holes (12), the position of the piezoelectric ceramics block pilot hole (11) that the set linear electric motors slide block pilot hole (12) of linear electric motors slide block (3) is provided with piezoelectric ceramics block (4) is corresponding, linear electric motors worktable (5) inserts the set linear electric motors slide block pilot hole (12) of linear electric motors slide blocks (3) and the upper location of realizing of the upper set piezoelectric ceramics block pilot hole (11) of piezoelectric ceramics block (4) by set linear electric motors table positions post (10), the piezoelectric ceramics block pilot hole (11) that the linear electric motors slide block pilot hole (12) that the set reference column (12) of linear electric motors worktable (5) is set with linear electric motors slide block (3) and piezoelectric ceramics block (4) are provided with is realized installing and is coordinated.
  5. 5. according to the online compensation device to linear electric motors linearity based on piezoelectric ceramics described in claim 2 to 4 any one, it is characterized in that the set linear electric motors table positions post (10) of above-mentioned linear electric motors worktable (5) and linear electric motors worktable (5) are integrated to make.
  6. According to claim 5 based on piezoelectric ceramics the online compensation device to linear electric motors linearity, it is characterized in that above-mentioned linear electric motors guide rail (2) is arranged on linear electric motors pedestal (1) by two linear electric motors postive stop baffles (8), wherein two linear electric motors postive stop baffles (8) are arranged on the two ends of linear electric motors pedestal (1), and the two ends of linear electric motors guide rail (2) are bearing in respectively on two linear electric motors postive stop baffles (8).
CN201410152409.5A 2014-04-16 2014-04-16 A kind of based on the online compensation device of piezoelectric ceramics to linear electric motors linearity Active CN103995541B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113587883A (en) * 2021-07-27 2021-11-02 联想新视界(江苏)设备服务有限公司 Elevator main rail installation detection device

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JPH02241378A (en) * 1989-03-14 1990-09-26 Matsushita Electric Ind Co Ltd Ultrasonic wave linear motor
CN201069660Y (en) * 2007-06-21 2008-06-04 常熟理工学院 Micro step sliding table
CN103219049A (en) * 2013-03-04 2013-07-24 东莞华中科技大学制造工程研究院 Precise positioning one-dimensional platform
CN103318839A (en) * 2013-03-01 2013-09-25 广东工业大学 Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method
CN203245845U (en) * 2013-04-28 2013-10-23 合肥工业大学 Large stroke two-dimensional nanometer work table system with angle compensation function
CN103604028A (en) * 2013-11-25 2014-02-26 东莞华中科技大学制造工程研究院 Superspeed precision positioning tandem one-dimensional platform
CN203773367U (en) * 2014-04-16 2014-08-13 广东工业大学 Online linear motor linearity compensation device based on piezoelectric ceramic

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02241378A (en) * 1989-03-14 1990-09-26 Matsushita Electric Ind Co Ltd Ultrasonic wave linear motor
CN201069660Y (en) * 2007-06-21 2008-06-04 常熟理工学院 Micro step sliding table
CN103318839A (en) * 2013-03-01 2013-09-25 广东工业大学 Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method
CN103219049A (en) * 2013-03-04 2013-07-24 东莞华中科技大学制造工程研究院 Precise positioning one-dimensional platform
CN203245845U (en) * 2013-04-28 2013-10-23 合肥工业大学 Large stroke two-dimensional nanometer work table system with angle compensation function
CN103604028A (en) * 2013-11-25 2014-02-26 东莞华中科技大学制造工程研究院 Superspeed precision positioning tandem one-dimensional platform
CN203773367U (en) * 2014-04-16 2014-08-13 广东工业大学 Online linear motor linearity compensation device based on piezoelectric ceramic

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113587883A (en) * 2021-07-27 2021-11-02 联想新视界(江苏)设备服务有限公司 Elevator main rail installation detection device
CN113587883B (en) * 2021-07-27 2023-05-23 联想新视界(江苏)设备服务有限公司 Elevator main rail installation detection device

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