JPH02241378A - Ultrasonic wave linear motor - Google Patents
Ultrasonic wave linear motorInfo
- Publication number
- JPH02241378A JPH02241378A JP1061763A JP6176389A JPH02241378A JP H02241378 A JPH02241378 A JP H02241378A JP 1061763 A JP1061763 A JP 1061763A JP 6176389 A JP6176389 A JP 6176389A JP H02241378 A JPH02241378 A JP H02241378A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- linear motor
- piezoelectric
- vibration
- ultrasonic linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002783 friction material Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract description 11
- 238000005452 bending Methods 0.000 description 19
- 230000005540 biological transmission Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、圧電セラミックなどの圧電体により励振した
弾性振動を駆動力とする超音波リニアモータに関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an ultrasonic linear motor whose driving force is elastic vibration excited by a piezoelectric material such as a piezoelectric ceramic.
従来の技術
近年、圧電セラミック等の圧電体により構成した振動体
に弾性振動を励振し、これを駆動力とした超音波リニア
モータが注目されている。BACKGROUND OF THE INVENTION In recent years, ultrasonic linear motors have attracted attention in which elastic vibrations are excited in a vibrating body made of a piezoelectric material such as a piezoelectric ceramic, and this vibration is used as a driving force.
以下、図面を参照しながら超音波リニアモータの従来技
術について説明を行う。Hereinafter, the conventional technology of ultrasonic linear motors will be explained with reference to the drawings.
第７図は超音波リニアモータの概観図であり、円板膨圧
電体１および２を、円筒形の弾性体３および４で挟んで
固定することにより振動体５を構成している。圧電体１
および２に、振動体５の共振周波数近傍の交流電界を印
加すれば、同図中の矢印で示されるように、振動体５は
縦振動モードで上下方向に振動する。FIG. 7 is a general view of an ultrasonic linear motor, in which a vibrating body 5 is constructed by sandwiching and fixing disk expansion piezoelectric bodies 1 and 2 between cylindrical elastic bodies 3 and 4. Piezoelectric body 1
When an alternating current electric field near the resonant frequency of the vibrating body 5 is applied to the vibrating body 5 and 2, the vibrating body 5 vibrates vertically in a longitudinal vibration mode, as shown by the arrow in the figure.
振動体５の振動面から見た機械インピーダンスは、ホー
ン６によりインピーダンス変換されて、伝送棒７の撓み
振動に対する機械インピーダンスに整合される。ホーン
６の先端は伝送棒７の一端に近い一部に音響的に結合さ
れる。従って、振動体５の上下振動は、ホーン６により
効率良く伝送棒７に伝えられ伝送棒７は挟み振動する。The mechanical impedance seen from the vibration surface of the vibrating body 5 is impedance-converted by the horn 6, and matched to the mechanical impedance for the bending vibration of the transmission rod 7. The tip of the horn 6 is acoustically coupled to a portion of the transmission rod 7 near one end. Therefore, the vertical vibration of the vibrating body 5 is efficiently transmitted to the transmission rod 7 by the horn 6, and the transmission rod 7 vibrates in a pinched manner.
この撓み振動は、伝送棒７の一端から他端に向かって進
行する。This bending vibration progresses from one end of the transmission rod 7 to the other end.
伝送棒７の他端に近い一部では、一端と同様にホーン８
の先端が音響的に結合されている。円板形圧電体９およ
び１０を、円筒形の弾性体１１および１２で挟んで固定
することにより、振動体５と全く同じ構成の振動体１３
を構成している。ホーン８には、この振動体１３が接続
されている。In a part near the other end of the transmission rod 7, the horn 8 is connected as in the one end.
The tips of the two are acoustically coupled. By sandwiching and fixing the disk-shaped piezoelectric bodies 9 and 10 between the cylindrical elastic bodies 11 and 12, a vibrating body 13 having exactly the same configuration as the vibrating body 5 is created.
It consists of This vibrating body 13 is connected to the horn 8.
従って、伝送棒の一端から他端に向かって進行してきた
撓み振動は、ホーン８により振動体１３に伝えられ、振
動体１３の上下振動に変換される。Therefore, the bending vibration that has progressed from one end of the transmission rod toward the other end is transmitted to the vibrating body 13 by the horn 8, and is converted into vertical vibration of the vibrating body 13.
圧電体９および１０には、インピーダンス整合した負荷
Ｒが接続され、上記の上下振動は負荷Ｒによって消費さ
れる。故に、伝送棒７には撓み振動が進行波としてのみ
存在する。A load R with impedance matching is connected to the piezoelectric bodies 9 and 10, and the above-mentioned vertical vibration is consumed by the load R. Therefore, the bending vibration exists in the transmission rod 7 only as a traveling wave.
１４は移動体であり、伝送棒７を進行する撓み振動によ
り駆動され、進行波の進行方向とは逆の方向に運動する
。上の説明では、移動体１４の進行方向は一方向として
いるが、駆動端を逆にすれば、逆の方向にも進行する。A moving body 14 is driven by the bending vibration traveling through the transmission rod 7, and moves in a direction opposite to the traveling direction of the traveling wave. In the above description, the moving direction of the moving body 14 is assumed to be one direction, but if the driving end is reversed, the moving body 14 also moves in the opposite direction.
第８図は、撓みの弾性進行波が移動体を駆動する原理を
示している。伝送棒７の撓み振動により、伝送棒７の表
面の点（例えば点Ａ）は、縦方向Ｗ・横方向Ｕの楕円軌
跡を描（。この楕円軌跡の頂点での速度は、波の進行方
向とは反対である。伝送棒７の上に移動体１４を加圧設
置すれば、移動体１４は波の頂点近傍でのみ伝送棒７に
接触する。FIG. 8 shows the principle by which a traveling elastic wave of deflection drives a moving body. Due to the bending vibration of the transmission rod 7, a point on the surface of the transmission rod 7 (for example, point A) draws an elliptical locus in the vertical direction W and the horizontal direction U (the velocity at the apex of this elliptical trajectory is This is the opposite.If the movable body 14 is installed under pressure on the transmission rod 7, the movable body 14 will come into contact with the transmission rod 7 only near the top of the wave.
従って、伝送棒７と移動体１４との摩擦力と、楕円軌跡
の横方向の速度によって、波の進行方向と逆の方向に移
動体１４が駆動される。また、同図中の１５は、上記楕
円軌跡の横方向成分を、効率良く取り出すための耐磨耗
性の摩擦材である。Therefore, the movable body 14 is driven in the direction opposite to the direction in which the waves travel due to the frictional force between the transmission rod 7 and the movable body 14 and the speed in the lateral direction of the elliptical trajectory. Further, 15 in the figure is a wear-resistant friction material for efficiently extracting the lateral component of the elliptical locus.
発明が解決しようとする課題
以上、説明した従来の超音波リニアモータは、ランジュ
バン構造の振動体を縦振動モードで励振し、上記振動体
の振動面の振動をホーンによって伝送棒に撓み振動を励
振しているため、振動面とホーン、ホーンと伝送棒との
間の機械インピーダンスの整合を正確にとらねばならな
い。現実には、このことは非常に困難であり、幾分かの
損失を生じる。Problems to be Solved by the Invention As described above, the conventional ultrasonic linear motor described above excites a vibrating body with a Langevin structure in a longitudinal vibration mode, and uses a horn to transmit vibrations on the vibration surface of the vibrating body to a transmission rod to excite bending vibrations. Therefore, it is necessary to accurately match the mechanical impedance between the vibration surface and the horn, and between the horn and the transmission rod. In reality, this is very difficult and results in some losses.
また、伝送棒に進行波のみを励振するために、一方から
入力した振動エネルギーは、他方で完全に消失しなれけ
ばならない。Furthermore, in order to excite only traveling waves in the transmission rod, the vibration energy input from one side must completely disappear from the other side.
加えて、比較的小さな移動体を移動するためにも、振動
体と伝送棒を振動させなければならない。In addition, in order to move a relatively small moving body, the vibrating body and transmission rod must be vibrated.
従って、効率が低い、寸法が大きくなるという課題があ
った。Therefore, there were problems of low efficiency and large dimensions.
課題を解決するための手段
正方形断面を有する弾性体角柱の少なくとも隣合う２つ
の長方形側面に圧電体を接着して振動体を構成し、上記
圧電体に電圧を印加して上記振動体にお互いに振動面が
直交する両端自由の２次の撓み振動を励振し、上記振動
体の中央部近傍に設置された穴を介して上記振動体を支
持Φ固定し、振動の腹の位置から機械出力を取り出す超
音波リニアモータにおいて、上記振動体の支持・固定用
穴の大きさを上記正方形断面の７０％よりも小さクシ、
上記穴を上記長方形側面に直角に直交して設ける。Means for Solving the Problem A vibrating body is constructed by bonding a piezoelectric body to at least two adjacent rectangular side surfaces of an elastic prism having a square cross section, and a voltage is applied to the piezoelectric body to cause the vibrating body to mutually Excite a second-order bending vibration free at both ends with the vibration planes perpendicular to each other, support and fix the vibrating body through a hole installed near the center of the vibrating body, and output mechanical output from the antinode position of the vibration. In the ultrasonic linear motor to be taken out, the size of the hole for supporting and fixing the vibrating body is smaller than 70% of the square cross section,
The hole is provided perpendicularly to the rectangular side surface.
作用
振動体の支持・固定用穴の大きさが正方形断面の７０％
よりも小さすることにより、２次の撓み振動を効率よく
励振し、上記穴を上記長方形側面に直角に直交して開け
ることにより、お互いに振動面が直交する両端自由の２
次の撓み振動に対する上記穴の影響を同じにして、２つ
の撓み振動の共振周波数をほぼ一致させる。The size of the hole for supporting and fixing the working vibrating body is 70% of the square cross section.
By making the hole smaller than , secondary flexural vibration can be efficiently excited, and by opening the hole perpendicularly to the side surface of the rectangle, two free ends with vibration planes orthogonal to each other can be created.
The influence of the hole on the next bending vibration is made the same, so that the resonance frequencies of the two bending vibrations are almost matched.
実施例
以下、図面に従って本発明の実施例について詳細な説明
を行う。EXAMPLES Hereinafter, examples of the present invention will be described in detail with reference to the drawings.
第１図は、本発明の１実施例の超音波リニアモ−タの概
観図である。同図において、１０１と１０２は正方形断
面をぢする弾性体角柱の少なくとも隣合う２つの長方形
測面に圧電体を接着して構成された振動体であり、中央
部の支持穴に支持棒１０４を通して、加圧用バネ１０５
と加圧調整ネジ１０６とにより、レール１０３を両端近
傍で挟み込んで加圧接触して設置される。FIG. 1 is a schematic diagram of an ultrasonic linear motor according to an embodiment of the present invention. In the figure, 101 and 102 are vibrating bodies constructed by bonding piezoelectric bodies to at least two adjacent rectangular surfaces of an elastic prism with a square cross section, and a support rod 104 is passed through a support hole in the center. , pressure spring 105
The rail 103 is placed in pressure contact with the rail 103 by sandwiching the rail 103 near both ends with the pressure adjustment screw 106 and the pressure adjustment screw 106 .
上記圧電体に振動体の共振周波数近傍の電圧を印加する
と、第２図に示すように、振動体は両端自由の２次の撓
み振動モードで振動する。第１図に示すように、圧電体
は角棒の直交する長方形測面に接着されているので、第
２図に示す挟み振動に直交する面内でも、同様に両端自
由の２次の撓み振動モードを励振することができる。従
って、２つの撓み振動を励振するための駆動電圧の位相
を制御すれば（例えば位相差９０度）、同図の矢印で示
される振動の腹の位置近傍では比較的大きな楕円軌跡が
得られる。故に、この位置近傍から機械出力を取り出す
ことができる。第１図は振動体の両端から出力を取り出
しており、振動体はレール１０３に沿って矢印の２つの
方向に移動する。When a voltage near the resonant frequency of the vibrating body is applied to the piezoelectric body, the vibrating body vibrates in a second-order bending vibration mode with both ends free, as shown in FIG. As shown in Figure 1, the piezoelectric body is bonded to the perpendicular rectangular surface of the square bar, so even in the plane orthogonal to the pinch vibration shown in Figure 2, secondary flexural vibration with both ends free is generated. modes can be excited. Therefore, if the phases of the drive voltages for exciting the two bending vibrations are controlled (for example, with a phase difference of 90 degrees), a relatively large elliptical locus can be obtained near the antinode of the vibrations indicated by the arrows in the figure. Therefore, mechanical output can be extracted from near this position. In FIG. 1, output is taken out from both ends of the vibrating body, and the vibrating body moves along the rail 103 in two directions indicated by arrows.
（１）第３図（ａ）は、本発明の実施例の振動体の構造
である。１０７は正方形断面を有する弾性体角柱であり
、隣合う４つの長方形側面に圧電体として圧電セラミッ
クを接着して振動体を構成している。見えている長方形
側面には圧電セラミック１０８ａと１０８ ｂｌ そ
れの反対面には圧電セラミック１０８ｃと１０８ ｄｌ
また見えているもう１つの長方形側面には圧電セラ
ミック１０９ａと１０９ ｂ、 それの反対面には圧
電セラミック１０９ｃと１０９ｄが接着されている。こ
こで、圧電セラミック内の正負の符号は分極の方向であ
る。１１０ａと１１０ｂは機械出力端で、弾性体角柱１
０７の両端を円柱状に加工している。この部分でレール
１０３を挟み込んで加圧接触することに上り、第１図に
示すように機械出力を取り出す。そして、１１１ａと１
１１ｂは支持φ固定用の支持穴で、その大きさが弾性体
角柱１０７の正方形断面の一辺の７０％よりも小さくし
てあり、長方形側面に直角にお互いに直交して開けてい
る。(1) FIG. 3(a) shows the structure of a vibrating body according to an embodiment of the present invention. Reference numeral 107 is an elastic prism having a square cross section, and a vibrating body is constructed by bonding piezoelectric ceramic as a piezoelectric body to four adjacent rectangular side surfaces. On the visible side of the rectangle are piezoelectric ceramics 108a and 108bl, and on the opposite side are piezoelectric ceramics 108c and 108dl.
Piezoelectric ceramics 109a and 109b are bonded to the other visible rectangular side surface, and piezoelectric ceramics 109c and 109d are bonded to the opposite surface. Here, the positive and negative signs within the piezoelectric ceramic indicate the direction of polarization. 110a and 110b are mechanical output ends, and the elastic prism 1
Both ends of 07 are processed into a cylindrical shape. At this portion, the rail 103 is sandwiched and pressed into contact, and mechanical output is extracted as shown in FIG. And 111a and 1
Reference numeral 11b denotes support holes for fixing the support φ, the size of which is smaller than 70% of one side of the square cross section of the elastic prism 107, and are opened at right angles to each other on the rectangular side surfaces.
そして、同図（ｂ）は矢印の方向からみた振動体の側面
図である。FIG. 2B is a side view of the vibrating body viewed from the direction of the arrow.
第４図に支持穴１１１ａと１１１ｂの大きさを変えたと
きの振動体のアドミッタンスの周波数特性の変化を示し
ている。実線は支持穴１１１ａと１１１ｂの大きさが弾
性体角柱１０７の正方形断面の一辺の７０％よりも小さ
い時の振動体のアドミッタンスの周波数特性であり、点
線は支持穴１１１ａと１１１ｂの大きさが弾性体角柱１
０７の正方形断面の一辺の７０％よりも大きい時の振動
体のアドミッタンスの周波数特性である。同図より、支
持穴１１１ａと１１１ｂの大きさが弾性体角柱１０７の
正方形断面の一辺の７０％よりも小さい時の方が、効率
良く２次の撓み振動を励振できることがわかる。FIG. 4 shows changes in the frequency characteristics of the admittance of the vibrating body when the sizes of the support holes 111a and 111b are changed. The solid line is the frequency characteristic of the admittance of the vibrating body when the size of the support holes 111a and 111b is smaller than 70% of one side of the square cross section of the elastic prism 107, and the dotted line is the frequency characteristic of the admittance of the vibrating body when the size of the support holes 111a and 111b is smaller than 70% of one side of the square cross section of the elastic prism 107. body prism 1
07 is the frequency characteristic of the admittance of the vibrating body when it is larger than 70% of one side of the square cross section. From the figure, it can be seen that when the size of the support holes 111a and 111b is smaller than 70% of one side of the square cross section of the elastic prism 107, the secondary bending vibration can be excited more efficiently.
振動体の支持固定のためだけなら支持穴は１つで良いが
、その場合には支持穴の開いている方向と、それに直角
の方向の２次の挟み振動との共振周波数が異なってしま
う。はぼ同振幅の駆動電圧の位相差を制御することによ
り楕円軌跡を得るためには、２つの撓み振動の共振周波
数がほぼ揃っていなければならない。もし揃っていなけ
れば、同電圧で駆動した時２つの撓み振動の振幅が大き
く異なり、偏平な楕円軌跡しか得られず、効率の悪い超
音波リニアモータしかできない。そこで、支持穴１１１
ａと１１１ｂを長方形側面に直角に直交して開けること
により、お互いに振動面が直交する両端自由の２次の撓
み振動に対する上記支持穴の影響を同じにして、２つの
撓み振動の共振周波数をほぼ一致させることにより、効
率の良い超音波リニアモータを実現できる。If it is only for supporting and fixing the vibrating body, one support hole is sufficient, but in that case, the resonant frequency of the direction in which the support hole is opened and the second-order pinch vibration in the direction perpendicular thereto will be different. In order to obtain an elliptical locus by controlling the phase difference between driving voltages having approximately the same amplitude, the resonance frequencies of the two bending vibrations must be approximately the same. If they are not aligned, the amplitudes of the two bending vibrations will be greatly different when driven with the same voltage, and only a flat elliptical trajectory will be obtained, resulting in an inefficient ultrasonic linear motor. Therefore, the support hole 111
By opening holes a and 111b perpendicularly to the rectangular sides, the influence of the support holes on the second-order bending vibration with both ends free, whose vibration planes are orthogonal to each other, is made the same, and the resonance frequency of the two bending vibrations is reduced. By nearly matching them, an efficient ultrasonic linear motor can be realized.
（２）第５図は、別の超音波リニアモータの実施例の断
面図である。振動体ｂ１１６と振動体ｄ１１３は、その
両端近傍において円形状の溝１１４が作られており、溝
１１４の底にはそれぞれ耐摩耗性の摩擦材ａ １１５Ｎ
摩擦材ｂ１１６、摩擦材ｃ １１７、摩擦材ｄ１１
８が構成されている。(2) FIG. 5 is a sectional view of another embodiment of an ultrasonic linear motor. Circular grooves 114 are formed near both ends of the vibrating body b116 and the vibrating body d113, and wear-resistant friction material a 115N is provided at the bottom of each groove 114.
Friction material b116, friction material c 117, friction material d11
8 are made up.
振動体ｂ１１６と振動体ｄ１１３は、その中央部の支持
穴を介して支持棒により、摩擦材ａ１１５、摩擦材ｂ１
１６、摩擦材ｃ１１７、摩擦材ａｔｔ８を介してレール
１２２と１２３に加圧接触して設置されている。加圧は
加圧用バネ１２０と調整ネジ１２１により行われる。２
つの振動体に撓み振動を励振すれば、振動体はレール１
２２と１２３に沿って移動する。The vibrating body b116 and the vibrating body d113 are connected to the friction material a115 and the friction material b1 by a support rod through a support hole in the center thereof.
16, the friction material c117 is installed in pressure contact with the rails 122 and 123 via the friction material att8. Pressurization is performed by a pressure spring 120 and an adjustment screw 121. 2
If we excite bending vibration in two vibrating bodies, the vibrating body will move to rail 1.
22 and 123.
レール１２２と１２３の長さが長い時は、レール上に表
面精度を出して耐摩耗性の摩擦材を設置することは困難
である。しかし、振動体の方に摩擦材を設置すれば、少
量の摩擦材で済み、しかも摩擦材の表面精度が出しやす
いので、効率の良い超音波リニアモータの実現が可能で
ある。When the lengths of the rails 122 and 123 are long, it is difficult to install a wear-resistant friction material on the rails with surface precision. However, if a friction material is placed on the vibrating body, only a small amount of friction material is required, and the surface precision of the friction material can be easily achieved, making it possible to realize an efficient ultrasonic linear motor.
（３）第６図は、振動体の側面図であり、両端に機械出
力取出用の円柱部を設けた正方形断面を有する弾性体角
柱の隣合う２つの長方形側面に圧電体ｅ１２４と圧電体
ｆ１２５とを接着して振動体１２６を構成している。圧
電体ｅ１２４と圧電体ｆ１２５の幅は弾性体角柱の正方
形断面の幅より小さくしている。圧電体ｅ１２４と圧電
体ｆ１２５の幅が弾性体角柱の正方形断面の幅と同じ時
は、圧電体ｅ１２４と圧電体ｆ１２５の間に圧電体と弾
性体角柱を接着するための接着剤が流れ込み振動損失を
大きくする。また、圧電体ｅ１２４と圧電体ｆ１２５の
幅が弾性体角柱の正方形断面の幅より大きい時は、弾性
体角柱からはみでた圧電体が振動体１２６の負荷となり
撓み振動の励振の効率が低下する。圧電体ｅ１２４と圧
電体ｆ１２５の幅が弾性体角柱の正方形断面の幅より小
さい時には、２次の挟み振動が効率良く励振することが
できる。(3) Fig. 6 is a side view of the vibrating body, in which a piezoelectric body e124 and a piezoelectric body f125 are formed on two adjacent rectangular sides of an elastic prism having a square cross section with columnar parts for extracting mechanical output at both ends. The vibrating body 126 is configured by bonding the two together. The widths of the piezoelectric body e124 and the piezoelectric body f125 are made smaller than the width of the square cross section of the elastic prism. When the width of the piezoelectric body e124 and the piezoelectric body f125 is the same as the width of the square cross section of the elastic body prism, the adhesive for bonding the piezoelectric body and the elastic body prism flows between the piezoelectric body e124 and the piezoelectric body f125, resulting in vibration loss. Make it bigger. Further, when the width of the piezoelectric body e124 and the piezoelectric body f125 is larger than the width of the square cross section of the elastic prism, the piezoelectric body protruding from the elastic prism becomes a load on the vibrating body 126, reducing the efficiency of excitation of bending vibration. When the width of the piezoelectric body e124 and the piezoelectric body f125 is smaller than the width of the square cross section of the elastic prism, secondary pinch vibration can be efficiently excited.
発明の効果
本発明によれば、簡単な構造で寸法の小さな、重さの軽
い、しかも効率の高い超音波リニアモータを提供できる
。Effects of the Invention According to the present invention, an ultrasonic linear motor having a simple structure, small size, light weight, and high efficiency can be provided.
第１図は本発明の１実施例の超音波リニアモータの概観
斜視図、第２図は振動体に励振される２次の挟み振動の
変位分布図、第３図（ａ）は振動体の概観図と（ｂ）は
側面図、第４図は振動体のアドミッタンスの周波数特性
図、第５図は本発明の別の実施例の超音波リニアモータ
の断面図、第６図は振動体の側面図、第７図は従来の超
音波リニアモータの概観図、第８図は超音波リニアモー
タの駆動原理を示す説明図である。
１０１・・・・・・振動体Ａ、１０２・・・・・・振動
体Ｂ１１０３・・・・・・レール、１０４・・・・・・
支持棒、１０５・・・・・・加圧用バネ、
１０６・・・・・・加圧調整ネジ、
１０７・・・・・・弾性体角柱、
１０８ａｓ ｂｌＣ，ｄ・・・・・・圧電セラミック
、１０９ａ１ ｂｌＣｌ ｄ・・・・・・圧電セラミッ
ク、１１０ａ１ ｂ・・・・・・機械出力端、１１１ａ
１ ｂ・・・・・・支持穴、
１１２・・・・・・振動体Ｃ，１１３・・・・・・振動
体Ｄ１１１４・・・・・・溝、
１１５・・・・・・摩擦材ａ、１１８・・・・・・摩擦
材ｂ１１１７・・・・・・摩擦材ｃ１１１８・・・・・
・摩擦材ｄ１１１９・・・・・・支持棒、１２０・・・
・・・加圧用バネ、１２１・・・・・・調整ネジ、
１２２、１２３・・ｔ・・・レール、
１２４・・・・・・圧電体ｅ１１２５・・・・・・圧電
体ｆ１１２６・・・・・・振動体。
代理人の氏名 弁理士 粟野重孝 はか１名蕩
図
支ン１奉
第
図
第
図
周液数
第
図
１２１胡Ｐ堅ネン
第
図
第
因
第 ７ 図
（ａ−）
ｌＺ４瓜電４ｅFig. 1 is an overview perspective view of an ultrasonic linear motor according to an embodiment of the present invention, Fig. 2 is a displacement distribution diagram of secondary pinch vibration excited in the vibrating body, and Fig. 3 (a) is a diagram of the displacement of the vibrating body. 4 is a frequency characteristic diagram of the admittance of the vibrating body, FIG. 5 is a sectional view of an ultrasonic linear motor according to another embodiment of the present invention, and FIG. 6 is a side view of the vibrating body. A side view, FIG. 7 is a general view of a conventional ultrasonic linear motor, and FIG. 8 is an explanatory diagram showing the driving principle of the ultrasonic linear motor. 101... Vibrating body A, 102... Vibrating body B1103... Rail, 104...
Support rod, 105... Pressure spring, 106... Pressure adjustment screw, 107... Elastic body prism, 108 as blC, d... Piezoelectric ceramic, 109a1 blCl d...Piezoelectric ceramic, 110a1 b...Mechanical output end, 111a
1 b... Support hole, 112... Vibrating body C, 113... Vibrating body D1114... Groove, 115... Friction material a , 118...Friction material b1117...Friction material c1118...
・Friction material d1119...Support rod, 120...
...Pressure spring, 121...Adjustment screw, 122, 123...T...Rail, 124...Piezoelectric body e1125...Piezoelectric body f1126... ...Vibrating body. Name of agent Patent attorney Shigetaka Awano Haka 1 name
Claims (3)
合う２つの長方形側面に圧電体を接着して振動体を構成
し、上記圧電体に電圧を印加して上記振動体にお互いに
振動面が直交する両端自由の２次の撓み振動を励振し、
上記振動体の中央部近傍に設置された穴を介して上記振
動体を支持・固定し、振動の腹の位置から機械出力を取
り出す超音波リニアモータにおいて、上記支持・固定用
穴の大きさが上記正方形断面の一辺の７０％よりも小さ
く、上記穴が上記長方形側面に直角に直交して開けられ
ていることを特徴とする超音波リニアモータ。(1) A vibrating body is constructed by bonding a piezoelectric body to at least two adjacent rectangular side surfaces of an elastic prism having a square cross section, and a voltage is applied to the piezoelectric body so that the vibrating planes of the vibrating body are perpendicular to each other. Excite second-order flexural vibration with both ends free,
In an ultrasonic linear motor that supports and fixes the vibrating body through a hole installed near the center of the vibrating body and extracts mechanical output from the antinode position of the vibration, the size of the supporting and fixing hole is An ultrasonic linear motor characterized in that the hole is smaller than 70% of one side of the square cross section and is opened perpendicularly to the side surface of the rectangle.
置し、上記摩擦材を介して機械出力を取り出すことを特
徴とする請求項１記載の超音波リニアモータ。(2) The ultrasonic linear motor according to claim 1, characterized in that a friction material is installed at a location of the vibrating body from which mechanical output is extracted, and the mechanical output is extracted through the friction material.
上記長方形側面の幅よりも小さいことを特徴とする請求
項１記載の超音波リニアモータ。(3) The width of the piezoelectric material bonded to the rectangular side of the vibrating body is
The ultrasonic linear motor according to claim 1, characterized in that the width is smaller than the width of the rectangular side surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1061763A JPH0787710B2 (en) | 1989-03-14 | 1989-03-14 | Ultrasonic linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1061763A JPH0787710B2 (en) | 1989-03-14 | 1989-03-14 | Ultrasonic linear motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02241378A true JPH02241378A (en) | 1990-09-26 |
| JPH0787710B2 JPH0787710B2 (en) | 1995-09-20 |
Family
ID=13180501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1061763A Expired - Lifetime JPH0787710B2 (en) | 1989-03-14 | 1989-03-14 | Ultrasonic linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0787710B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007068350A (en) * | 2005-09-01 | 2007-03-15 | Tokyo Institute Of Technology | Driving/guiding apparatus |
| JP2008245510A (en) * | 2007-02-28 | 2008-10-09 | Casio Comput Co Ltd | Piezoelectric actuator, camera instrument and stage device for movement |
| CN103995541A (en) * | 2014-04-16 | 2014-08-20 | 广东工业大学 | Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor |
| CN111176149A (en) * | 2019-04-23 | 2020-05-19 | 河海大学常州校区 | IPMC flexible micro-driving system based on Lelo triangular section |
-
1989
- 1989-03-14 JP JP1061763A patent/JPH0787710B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007068350A (en) * | 2005-09-01 | 2007-03-15 | Tokyo Institute Of Technology | Driving/guiding apparatus |
| JP2008245510A (en) * | 2007-02-28 | 2008-10-09 | Casio Comput Co Ltd | Piezoelectric actuator, camera instrument and stage device for movement |
| CN103995541A (en) * | 2014-04-16 | 2014-08-20 | 广东工业大学 | Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor |
| CN111176149A (en) * | 2019-04-23 | 2020-05-19 | 河海大学常州校区 | IPMC flexible micro-driving system based on Lelo triangular section |
| CN111176149B (en) * | 2019-04-23 | 2023-06-02 | 河海大学常州校区 | IPMC flexible micro-driving system based on Lerlo triangle section |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0787710B2 (en) | 1995-09-20 |
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