CN201069660Y - Micro step sliding table - Google Patents
Micro step sliding table Download PDFInfo
- Publication number
- CN201069660Y CN201069660Y CNU2007200400724U CN200720040072U CN201069660Y CN 201069660 Y CN201069660 Y CN 201069660Y CN U2007200400724 U CNU2007200400724 U CN U2007200400724U CN 200720040072 U CN200720040072 U CN 200720040072U CN 201069660 Y CN201069660 Y CN 201069660Y
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- China
- Prior art keywords
- slide block
- micro
- pair
- stepping
- push rod
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- Expired - Fee Related
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Abstract
The utility model is related to a microstep slipway, which belongs to a microstep driving and positioning device for ultra-precise processing and measuring equipment. The utility model comprises a slipway stand; a slide block, which can be arranged on the slipway stand in a sliding way; a microstep actuating unit, which is positioned inside the slipway stand, is fixed under the slide block and is provided with an electromagnetic combiner thereon; a voice coil motor, which is fixed with the slipway stand and is arranged with a push rod thereon corresponding to the electromagnetic combiner; a precise grating ruler, which is positioned at the later side of the slipway stand to measure the position of the slide block. The utility model has the advantages that: the utility model can realize the fast forward and fast backward at the starting and the finishing stage of precise positioning; make the precise positioning of the slide block to reach micron-level; with the help of the electromagnetic combiner, the utility model can realize the combination and disconnection between the push rod of the voice coil motor and the microstep actuating unit; a damping element is adhered to the junction surface between the electromagnetic combiner and the push rod, so as to reduce the impact on the microstep actuating unit during the fast driving of the push rod of the voice coil motor; and a pair of clampers adopts quadrangular structure with reliable clamping.
Description
Technical field
The utility model relates to a kind of micro-stepping and advances slide unit, and the micro-stepping that belongs in ultraprecise processing and the measuring equipment advances to drive and locating device, can be widely used in accurate manufacturing equipment and the scientific instrument.
Background technology
At present, in the drive unit of precisely locating platform, except traditional worm drive pair, begun to adopt the precision driver that constitutes based on piezoelectric ceramics.This driver adopts reptile formula principle mostly, by the action sequence of external circuit control piezoelectric ceramic actuator and former and later two clampers, to realize the action of creeping of Inchworm type.But because the piezoelectric pile that piezoelectric ceramic piece constitutes has only micron order in the driving distance of external voltage effect, and the frequency of operation of driving voltage again can not be too high, and therefore when the big stroke of needs drove, speed can be very slow.And in many Precision Machining and measuring equipment, often require step actuator to enter fast, and also wanting to carry out the ultraprecise micro-stepping simultaneously enters the location, and after work was finished, requiring again can fast return.
Summary of the invention
The purpose of this utility model is will provide a kind of can satisfy fast feed and fast return requirement, can satisfy the micro-stepping of micron order positioning accuracy request simultaneously again and advance slide unit.
The purpose of this utility model reaches like this, and slide unit is advanced in a kind of micro-stepping, and it comprises a carriage saddle 1; One slide block 10 places on the carriage saddle 1 slidably; Actuating unit is advanced in one micro-stepping, is positioned at carriage saddle 1 and is fixed on the below of slide block 10, and an electromagnetic combination device 7 is installed on it; One voice coil motor 2, fixing with carriage saddle 1, a push rod 3 is installed on it, push rod 3 is corresponding with electromagnetic combination device 7; One precise grating chi 4 is located at the sidepiece of carriage saddle 1, is used to measure the position of slide block 10.
Micro-stepping described in the utility model is advanced actuating unit and is comprised stacked piezoelectric ceramic actuator 16, a pair of first, second clamper 6,14 and a pair of first, second electromagnet 18,12, described a pair of first, second electromagnet 18,12 lay respectively at a pair of first, second clamper 6, in 14, described a pair of first, second clamper 6,14 are positioned at the left and right sides of stacked piezoelectric ceramic actuator 16, its cross sectional shape is a parallelogram, the front and back end of parallelogram extend respectively a pair of be used for matching with carriage saddle 1 two side first, second friction block 5,13, one end of described stacked piezoelectric ceramic actuator 16 is fixed on the bottom of slide block 10, and the other end is outstanding solid on the cramp bar 17 that is positioned at below the slide block 10 by sliding sleeve 15.
The utility model is equipped with a pair of orienting lug 19 in the both sides of described slide block 10, slide block 10 is a moving sets by structure between the guide pass of a pair of orienting lug 19 and carriage saddle 1.
One end of stacked piezoelectric ceramic actuator 16 described in the utility model is fixed on the bottom of slide block 10 by take-up housing 8.
Have additional damping element on the utility model faying face that both combine at described electromagnetic combination device 7 and push rod 3.
The utility model is because after adopting said structure, one of advantage that has, owing to actuating unit is advanced in micro-stepping and voice coil motor combines, thereby can bring into play the bearing accuracy height of voice coil motor, the characteristics that acceleration is fast, load capacity is strong, at energy F.F. of the starting and ending stage of precision positioning and rewind down; Two, after the micro-stepping of adopting stacked piezoelectric ceramic actuator and a pair of clamper to constitute advances actuating unit, make the bearing accuracy of slide block reach micron order; Three, the end that advances actuating unit in micro-stepping is equipped with the electromagnetic type colligator, determine the energising and the off-position of electromagnetic combination device by the control signal of outside, with this come in conjunction with or disconnect the push rod of voice coil motor and micro-stepping and advance mechanical relationship between the actuating unit; Four, on electromagnetic combination device and faying face that push rod combines, mount damping element, the impact of actuating unit is advanced in micro-stepping when reducing the push rod fast driving of voice coil motor; Five, a pair of clamper adopts the quadrilateral structure form, can realize compressing to the carriage saddle two side, and carry out clamp by the stiction that snap-in force produces, because quadrilateral structure has the power enlarging function, thereby the driving force that can effectively solenoid be produced is delivered on the two side.
Description of drawings
Accompanying drawing is an example structure sketch of the present utility model.
Among the figure: 1. carriage saddle, 2. voice coil motor, 3. push rod, 4. the precise grating chi, 5. first friction block, 6. first clamper, 7. electromagnetic combination device, 8, take-up housing, 9. screw, 10. slide block, 11. sliding eyes, 12. second electromagnet, 13. second friction blocks, 14. second clampers, 15. sliding sleeves, 16. stacked piezoelectric ceramic actuators, 17. cramp bars, 18. first electromagnet, 19. orienting lugs, 20. are adjusted screws.
Embodiment
By following description, will be expressly understood technical spirit of the present utility model more, and make advantage of the present utility model and effect more become bright and clear, yet, should not look embodiment and be restriction technical solutions of the utility model.
See also accompanying drawing, slide block 10 described in the utility model places on the carriage saddle 1 slidably, and a pair of orienting lug 19 is installed in its both sides, by between the guide pass of a pair of orienting lug 19 and carriage saddle 1 cooperate and structure is a moving sets.Simultaneously on the inclined-plane of slide block 10 both sides, respectively open two screw holes (seeing accompanying drawing), in screw hole, install and adjust screw 20, adjust screw 20 and be convenient to the position of orienting lug 19 is adjusted.Can the needed various parts of installment work on plane on the slide block 10, as mechanical arm, precision instrument etc.Precise grating chi 4 also is installed on the sidewall of carriage saddle 1, can carries out precision measurement to the movement position of slide block 10, and feed back to control system, by control system actuating unit adjustment is advanced in micro-stepping, thereby obtain accurate localization.Voice coil motor 2 is located on the carriage saddle 1, one push rod 3 is installed on it,, promotes by the push rod 3 of voice coil motor 2 that actuating unit is advanced in micro-steppings and slide block 10 carries out fast moving in when beginning motion, behind end-of-job, voice coil motor 2 drives slide block 3 and micro-stepping again and advances actuating unit and return fast.
Please continue referring to accompanying drawing, micro-stepping described in the utility model is advanced actuating unit and is responsible for ultraprecise feed motion, and it mainly comprises stacked piezoelectric ceramic actuator 16, a pair of first, second clamper 6,14 and a pair of first, second electromagnet 18,12.Wherein a pair of first, second electromagnet 18,12 lays respectively in a pair of first, second clamper 6,14, a pair of first, second clamper 6,14 is positioned at the left and right sides of stacked piezoelectric ceramic actuator 16, its cross sectional shape is a parallelogram, and the front and back end of parallelogram extends a pair of first, second friction block 5,13 that is used for matching with carriage saddle 1 two side respectively.Because clamper is a parallel-crank mechanism, under the action of a magnetic field of electromagnet inwardly during adhesive, it is protruding that quadrangular mechanism promotes a pair of friction block, thereby fit tightly and compress with carriage saddle 1 sidewall, and the stiction that produces by snap-in force carries out clamp simultaneously.Because quadrangular mechanism has the power enlarging function, thereby the driving force that can effectively solenoid be produced is delivered on the two side.A pair of first, second clamper 6,14 of the left and right sides can be by separately a pair of first, second friction block 5,13 respectively separately and carriage saddle 1 two side compress, also can compress simultaneously.Coordination between the driving action of the stacked piezoelectric ceramic actuator 16 of pressuring action combined pressure by clamper, can make micro-stepping advance actuating unit moves forward or backward according to certain micro-step-length, the action of creeping of its course of action and a kind of common insect looper is similar, and the order in the one-period in its action is as shown in table 1:
Table 1 advances the sequence of movement of actuating unit for micro-stepping
| The step preface | First clamper 6 | Stacked piezoelectric ceramic actuator 16 | Second clamper 14 |
| 1 | Clamp | Shrink | Loosen |
| 2 | Clamp | Elongation | Loosen |
| 3 | Clamp | Elongation | Clamp |
| 4 | Loosen | Shrink | Clamp |
| 5 | Clamp | Shrink | Clamp |
Please further referring to accompanying drawing, the below that actuating unit is installed in slide block 10 is entered in micro-stepping described in the utility model, because micro-stepping is advanced actuating unit and need be extended under the inverse piezoelectric effect of stacked piezoelectric ceramic actuator 16 and shorten, thus can only be to fix an end, and the other end keeps free.In the present embodiment, its left end is fixed on the bottom of slide block 10 by screw 9 by take-up housing 8, right-hand member then is suspended on the cramp bar 17 of slide block 10 belows by the sliding eye 11 on the square sliding sleeve 15, so when stacked piezoelectric ceramic actuator 16 extends forward, slide block 10 does not move, but when stacked piezoelectric ceramic actuator 16 shrinks under opposite electric field driven, just drive slide block 10 and move forward by being fixedly connected of left end.
Because it is to rely on the micro-deformation of the inverse piezoelectric effect generation of stacked piezoelectric ceramic actuator 16 to move forward that actuating unit is advanced in micro-stepping, thereby displacement is very little, the time that is consumed when big stroke is worked is longer, in order to solve the contradiction between ultraprecise stepping and the fast moving, actuating unit is advanced in the micro-stepping that the utility model constitutes stacked piezoelectric ceramic actuator 16 and voice coil motor 2 combines, bring into play the bearing accuracy height of voice coil motor 2, the characteristics that acceleration is fast, load capacity is strong, play the function of F.F. and rewind down in the starting and ending stage of precision positioning.
Initial period in work needs fast slide block 10 to be moved to assigned address, at this moment a pair of first of actuating unit is advanced in micro-stepping, second clamper 6,14 unclamp simultaneously, and under the effect of the push rod 3 of voice coil motor 2 fast moving forward, the position of slide block 10 feeds back in the control system by precise grating chi 4 in the moving process, when slide block 10 is about to arrive assigned address, send deceleration instruction by control system to voice coil motor 2, the clamper that actuating unit is advanced in micro-stepping simultaneously begins to compress and produce friction force, slide block 10 advances state and carries out ultraprecise and add man-hour when need forward micro-stepping to from F.F., voice coil motor 2 shuts down under the instruction of control system, micro-stepping is simultaneously advanced actuating unit and is moved forward according to the sequence of movement shown in the table 1, and feeds back current displacement by precise grating chi 4 to control system.When the ultraprecise process finishing, when needing slide block 10 to return fast, control system is sent instruction according to the position data of precise grating chi 4 feedbacks to voice coil motor 2, the push rod 3 of voice coil motor 2 is pressed close to the electromagnetic combination device 7 that actuating unit is advanced in micro-stepping after moving forward the distance of appointment, electromagnetic combination device 7 is switched under the instruction of control system and is produced electromagnetic attraction, the push rod 3 that makes micro-stepping advance actuating unit and voice coil motor 2 combines, owing to mount damping element on the faying face that both combine at electromagnetic combination device 7 and push rod 3, the impact of during with push rod 3 fast driving of reduction voice coil motor 2 actuating unit is advanced in micro-stepping.After this, the 3 pulling micro-steppings of the push rod of voice coil motor 2 are advanced actuating unit and are return fast backward, thereby realize the function of F.F., rewind down.
Claims (5)
1. slide unit is advanced in a micro-stepping, it is characterized in that it comprises a carriage saddle (1); One slide block (10) places on the carriage saddle (1) slidably; Actuating unit is advanced in one micro-stepping, is positioned at carriage saddle (1) and is fixed on the below of slide block (10), and an electromagnetic combination device (7) is installed on it; One voice coil motor (2), fixing with carriage saddle (1), a push rod (3) is installed on it, push rod (3) is corresponding with electromagnetic combination device (7); One precise grating chi (4) is located at the sidepiece of carriage saddle (1), is used to measure the position of slide block (10).
2. slide unit is advanced in micro-stepping according to claim 1, it is characterized in that described micro-stepping advances actuating unit and comprise stacked piezoelectric ceramic actuator (16), a pair of first, second clamper (6,14) and a pair of first, second electromagnet (18,12), described a pair of first, second electromagnet (18,12) lay respectively at a pair of first, second clamper (6,14) in, described a pair of first, second clamper (6,14) be positioned at the left and right sides of stacked piezoelectric ceramic actuator (16), its cross sectional shape is a parallelogram, the front and back end of parallelogram extend respectively a pair of be used for matching with carriage saddle (1) two side first, second friction block (5,13), one end of described stacked piezoelectric ceramic actuator (16) is fixed on the bottom of slide block (10), and the other end is outstanding solid on the cramp bar (17) that is positioned at slide block (10) below by sliding sleeve (15).
3. slide unit is advanced in micro-stepping according to claim 1, it is characterized in that being equipped with in the both sides of described slide block (10) a pair of orienting lug (19), and slide block (10) is a moving sets by structure between the guide pass of a pair of orienting lug (19) and carriage saddle (1).
4. slide unit is advanced in micro-stepping according to claim 2, it is characterized in that an end of described stacked piezoelectric ceramic actuator (16) is fixed on the bottom of slide block (10) by take-up housing (8).
5. slide unit is advanced in micro-stepping according to claim 1, it is characterized in that having additional damping element on both combine at described electromagnetic combination device (7) and push rod (3) the faying face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200400724U CN201069660Y (en) | 2007-06-21 | 2007-06-21 | Micro step sliding table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200400724U CN201069660Y (en) | 2007-06-21 | 2007-06-21 | Micro step sliding table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201069660Y true CN201069660Y (en) | 2008-06-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200400724U Expired - Fee Related CN201069660Y (en) | 2007-06-21 | 2007-06-21 | Micro step sliding table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201069660Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103995541A (en) * | 2014-04-16 | 2014-08-20 | 广东工业大学 | Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor |
| CN111966042A (en) * | 2020-08-27 | 2020-11-20 | 国家机床质量监督检验中心 | Quantitative test system and method for immunity of numerical control system |
-
2007
- 2007-06-21 CN CNU2007200400724U patent/CN201069660Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103995541A (en) * | 2014-04-16 | 2014-08-20 | 广东工业大学 | Piezoelectric ceramics based on-line compensation apparatus for linearity of linear motor |
| CN103995541B (en) * | 2014-04-16 | 2016-03-16 | 广东工业大学 | A kind of based on the online compensation device of piezoelectric ceramics to linear electric motors linearity |
| CN111966042A (en) * | 2020-08-27 | 2020-11-20 | 国家机床质量监督检验中心 | Quantitative test system and method for immunity of numerical control system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080604 Termination date: 20150621 |
|
| EXPY | Termination of patent right or utility model |