CN105834763A - Air floatation guide rail platform with loading compensation function - Google Patents
Air floatation guide rail platform with loading compensation function Download PDFInfo
- Publication number
- CN105834763A CN105834763A CN201610362437.9A CN201610362437A CN105834763A CN 105834763 A CN105834763 A CN 105834763A CN 201610362437 A CN201610362437 A CN 201610362437A CN 105834763 A CN105834763 A CN 105834763A
- Authority
- CN
- China
- Prior art keywords
- air
- hole
- shaft sleeve
- guide rail
- suspension shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
- B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/04—Special measures taken in connection with the properties of the fluid
- F15B21/041—Removal or measurement of solid or liquid contamination, e.g. filtering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/08—Servomotor systems incorporating electrically operated control means
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Engineering & Computer Science (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses an air floatation guide rail platform with a loading compensation function. The study on high-precision guide rails becomes hot. An air nozzle installation hole is formed in the hole wall of an air floatation shaft sleeve installation hole of each air floatation block in the air floatation guide rail platform, and an air flotation shaft sleeve is arranged in each air floatation shaft sleeve installation hole. A linear displacement sensor is arranged in each sensor installation hole of the air floatation block. An air nozzle is arranged in each air nozzle installation hole, wherein an air supply module supplies air to the air nozzles. A loading table is fixed to the air floatation blocks of all the air floatation modules, and a drive module drives the loading table. Guide rail installation holes of the air floatation shaft sleeves are in clearance fit with guide rails. A plurality of annular grooves are formed in the outer circumferential face of each air floatation shaft sleeve. The bottom of each annular groove is provided with a ventilation hole set. Each ventilation hole set comprises multiple ventilation holes which are distributed along the circumference with equal angles and are distributed not evenly. A small-hole flow regulator is arranged in each ventilation hole. The side portions of the annular grooves communicate with one another and communicate with the air nozzle installation holes of the air floatation blocks. By means of the air floatation guide rail platform, height signals of the air floatation modules can be obtained in real time, real-time compensation is conducted on the height of the loading table, and the machining precision is improved.
Description
Technical field
The invention belongs to super-precision machine tools field, relate to a kind of air-float guide rail platform, be specifically related to
Loading is had to compensate the air-float guide rail platform of function.
Background technology
Along with national defense industry and the fast development of aerospace industry, countries in the world especially developed country is to machinery
Process particularly precise and ultraprecise machining and propose requirements at the higher level.Guide rail is as machining tool in high precision
Core component becomes the research contents of hot topic especially.In all kinds of guide rails, air-float guide rail is high-precision by it
The features such as degree, low friction and cleaning have obtained paying close attention to widely.But, want to obtain higher air supporting and lead
Rail kinematic accuracy, except adopting a series of measures (as used high accuracy axle sleeve, good dynamic balancing and excellent
Change structure etc.) reach outside high-precision scheme, another scheme both economical, effective is on-line monitoring
The kinematic accuracy of air-float guide rail platform, and by accurately controlling the gas pressure intensity of air supply system input to monitoring
Result implements online compensation, and then realizes loading gravity compensation and improve air-float guide rail platform kinematic accuracy
Function.
Summary of the invention
It is an object of the invention to for the deficiencies in the prior art, it is provided that a kind of gas with loading compensation function
Floating guide rail platform, is integrated in one guide rail, air suspension shaft sleeve and Linear displacement transducer, forms a tackling
There is the high accuracy air-float guide rail plateform system of real-time detection function, air-float guide rail platform can be carried out loading weight
Force compensating, improves the precision of air-float guide rail platform.
The present invention includes supplying module, driving module, base, guide rail, valve, object stage and n gas
Floating module, n >=4；Described guide rail is fixed on base；Described air supporting module is by air suspension shaft sleeve, O
RunddichtringO, orifice restriction device, the gentle floating block of Linear displacement transducer form；The center of air supporting block is offered
Have air suspension shaft sleeve installing hole and sensor mounting hole, the hole wall of air suspension shaft sleeve installing hole to offer valve to install
Hole, the hole wall of sensor mounting hole offers wire guide；In air suspension shaft sleeve installing hole, air suspension shaft sleeve is set；Institute
The two ends stating air suspension shaft sleeve are mounted on O RunddichtringO with air supporting block two ends；Arrange in sensor mounting hole
Linear displacement transducer, power line and the data wire of Linear displacement transducer pass from wire guide；Linear position
The detection faces of displacement sensor is parallel with the upper surface of base；Place in the valve installing hole of each air supporting module
One valve, supply module supplies to each valve；Object stage and the air supporting block top of all air supporting modules
All it is connected by screw, drives module by screw pair or tape handler driving objective table.
The guide rails assembling hole that described air suspension shaft sleeve center is offered coordinates with guide clearance；Outside air suspension shaft sleeve
Disc offers axially disposed multiple cannelures；Each annular groove bottom offers passage group；Ventilation
Kong Zuwei the most angularly but the most uniform multiple passages, the passage that air suspension shaft sleeve is positioned at bottom is many
In superposed passage；The inner of passage connects with the guide rails assembling hole of air suspension shaft sleeve；Each logical
One orifice restriction device is set in pore；The sidepiece of all cannelures communicates, and pacifies with the valve of air supporting block
The connection of dress hole.
Described supply module includes that air compressor, pneumatic filter, oil mist separator and n are accurate
Air relief valve；The delivery outlet of air compressor connects with the input port of pneumatic filter, pneumatic filter defeated
Outlet connects with the input port of oil mist separator, the delivery outlet of oil mist separator and n precise pressure-reducing valve
Input port all connects；The outer end of the delivery outlet of each precise pressure-reducing valve and a valve connects.
Described orifice restriction device offers gas collection hole, decompression hole and pressure stable hole；The outer end of gas collection hole and gas
Floating axle puts the passage outer end connection of correspondence；The two ends of decompression hole respectively with the inner and the voltage stabilizing of gas collection hole
The outer end connection in hole；Passage the inner connection that the inner of pressure stable hole is corresponding with on air suspension shaft sleeve.
The periphery of described guide rail, the guide rails assembling hole hole wall of air suspension shaft sleeve, the upper surface of base, loading
The bottom surface of platform and the upper and lower surface of air supporting block are Ultra-precision Turning face.
The invention have the benefit that
1, guide rail, air suspension shaft sleeve and Linear displacement transducer are integrated in one by the present invention, are formed a set of
Having the high accuracy air-float guide rail plateform system of real-time detection function, it can obtain air supporting module height in real time
Signal, and the object stage height of air-float guide rail platform is carried out Real-time Feedback and compensation, improve adding of lathe
Work precision.
2, the air suspension shaft sleeve circumference of the present invention has the most uniform passage and coordinates with guide clearance, uneven
Cloth passage is equipped with orifice restriction device, the height of platform can be controlled by changing the pressure of input gas
Degree；Compact conformation, easy for installation, accuracy of detection is high.
3, the cannelure of the present invention ensure that the atmospheric pressure of input orifice restriction device is equal and stable.
Accompanying drawing explanation
Fig. 1 is the overall structure axonometric chart of the present invention；
Fig. 2 is the flow chart supplying module in the present invention；
Fig. 3 is the explosive view of air supporting module in the present invention；
Fig. 4-1 is the schematic diagram of air supporting block in the present invention；
Fig. 4-2 is the A-A sectional view of Fig. 4-1；
Fig. 5 is the structural perspective of air suspension shaft sleeve in the present invention；
Fig. 6 is the sectional view of aperture reducer in the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings and embodiment the invention will be further described.
As it is shown in figure 1, there is loading compensate the air-float guide rail platform of function, including supply module, driving
Module, base 1, guide rail 2, valve 3, object stage 4 and n air supporting module 5, n >=4；Guide rail 2 is fixed
On base 1.
As in figure 2 it is shown, supply module includes air compressor 6, pneumatic filter 7, oil mist separator 8 and
N precise pressure-reducing valve 9；The delivery outlet of air compressor 6 connects with the input port of pneumatic filter 7, gas
The delivery outlet of filter 7 connects with the input port of oil mist separator 8, and the delivery outlet of oil mist separator 8 is individual with n
The input port of precise pressure-reducing valve 9 all connects；Outside the delivery outlet of each precise pressure-reducing valve 9 and a valve 3
End connects.
As shown in Fig. 3,4-1 and 4-2, air supporting module 5 is by air suspension shaft sleeve 5-1, O RunddichtringO 5-2, little
Hole reducer 5-3, Linear displacement transducer 5-4 gentle floating block 5-5 form；The center of air supporting block 5-5 is offered
Have air suspension shaft sleeve installing hole and sensor mounting hole B, the hole wall of air suspension shaft sleeve installing hole to offer valve to install
Hole A, the hole wall of sensor mounting hole B offers wire guide C；In air suspension shaft sleeve installing hole, air suspension shaft sleeve is set
5-1；The two ends of air suspension shaft sleeve 5-1 and air supporting block 5-5 two ends are mounted on O RunddichtringO 5-2；Sensor
Linear displacement transducer 5-4, the power line of Linear displacement transducer 5-4 and data wire are set in installing hole B
Pass from wire guide C；Detection faces D of Linear displacement transducer 5-4 is parallel with the upper surface 1-1 of base 1.
Placing a valve 3 in the valve installing hole A of each air supporting module 5, supply module gives each by valve 3
Air supporting module 5 supplies；Object stage 4 is all connected by screw with the air supporting block 5-5 top of all air supporting modules,
Drive module by screw pair or tape handler driving objective table 4.
As it is shown in figure 5, the guide rails assembling hole J that offers of air suspension shaft sleeve 5-1 center and guide rail 2 matched in clearance；Gas
The periphery of floating axle set 5-1 offers axially disposed multiple cannelure I；Open bottom each cannelure I
If passage group；Passage group is the most angularly but the most uniform multiple passage H, air suspension shaft sleeve
5-1 is positioned at the passage of bottom more than superposed passage；The inner of passage and air suspension shaft sleeve
Guide rails assembling hole connects；One orifice restriction device 5-3 is set in each passage H；All cannelure I's
Sidepiece communicates, and connects with the valve installing hole A of air supporting block 5-5.
As shown in Figure 6, orifice restriction device 5-3 offers gas collection hole E, decompression hole F and pressure stable hole G；Gas collection
The passage outer end connection that the outer end of hole E is corresponding with on air suspension shaft sleeve 5-1；The two ends of decompression hole F respectively with
The inner of gas collection hole E connects with the outer end of pressure stable hole G；The inner of pressure stable hole G is corresponding with on air suspension shaft sleeve 5-1
Passage the inner connection.
The periphery of guide rail 2, the guide rails assembling hole J hole wall of air suspension shaft sleeve 5-1, the upper surface 1-1 of base 1,
The bottom surface of object stage 4 and the upper and lower surface of air supporting block 5-5 are Ultra-precision Turning face.
This has loading and compensates the operation principle of air-float guide rail platform of function:
Gases at high pressure are entered in cannelure I by valve 3；Gases at high pressure in cannelure I branch to respectively
In the gas collection hole E of individual orifice restriction device 5-3, it is sprayed onto after the F supercharging of intensified hole and pressure stable hole G voltage stabilizing and leads
Rail 2, with the J gap, guide rails assembling hole of air suspension shaft sleeve 5-1, forms the pressure air film with bearing value,
Thus realize the air suspension shaft sleeve 5-1 radial support to object stage 4；The passage H symmetry of passage group sets
Put the vertical neutral surface (crossing the face at air suspension shaft sleeve 5-1 center on vertical direction) two at air suspension shaft sleeve 5-1
Side so that air supporting block 5-5 both sides force in radial mutually balances；The passage H edge of each passage group
Circumference is angularly distributed but bottom is more than top, therefore can be by changing the gas pressure that supply module provides
Change by force the distance between air supporting module 5 and base upper surface 1-1；In Linear displacement transducer 5-4
Being placed in air supporting block 5-5, its detection faces D is parallel with the upper surface 1-1 of base 1, and then can be real-time
Detect the distance of air supporting block 5-5 and base upper surface, can be by changing single essence after obtaining detection signal
The gas pressure intensity of close air relief valve 9 individually regulates the height of each air supporting block 5-5, thus reaches gravity and mend
The purpose repaid, also can improve the precision of air floating platform.
Above content is pertaining only to the instantiation of the present invention, and other platform similar to the principle of the invention all exists
In the protection domain of this patent.
Claims (4)
1. have loading compensate function air-float guide rail platform, including supply module, drive module, base,
Guide rail, valve, object stage and n air supporting module, n >=4, it is characterised in that: described guide rail is fixed on
On base；Described air supporting module is passed by air suspension shaft sleeve, O RunddichtringO, orifice restriction device, linear displacement
The gentle floating block of sensor forms；The center of air supporting block offers air suspension shaft sleeve installing hole and sensor mounting hole,
The hole wall of air suspension shaft sleeve installing hole offers valve installing hole, and the hole wall of sensor mounting hole offers wire guide；
In air suspension shaft sleeve installing hole, air suspension shaft sleeve is set；The two ends of described air suspension shaft sleeve are respectively mounted with air supporting block two ends
There is O RunddichtringO；Linear displacement transducer is set in sensor mounting hole, the power supply of Linear displacement transducer
Line and data wire pass from wire guide；The detection faces of Linear displacement transducer is parallel with the upper surface of base；
Placing a valve in the valve installing hole of each air supporting module, supply module supplies to each valve；Carry
Thing platform is all connected by screw with the air supporting block top of all air supporting modules, drives module to pass through feed screw nut
Pair or tape handler driving objective table；
The guide rails assembling hole that described air suspension shaft sleeve center is offered coordinates with guide clearance；Outside air suspension shaft sleeve
Disc offers axially disposed multiple cannelures；Each annular groove bottom offers passage group；Ventilation
Kong Zuwei the most angularly but the most uniform multiple passages, the passage that air suspension shaft sleeve is positioned at bottom is many
In superposed passage；The inner of passage connects with the guide rails assembling hole of air suspension shaft sleeve；Each logical
One orifice restriction device is set in pore；The sidepiece of all cannelures communicates, and pacifies with the valve of air supporting block
The connection of dress hole.
The air-float guide rail platform with loading compensation function the most according to claim 1, its feature exists
In: described supply module includes that air compressor, pneumatic filter, oil mist separator and n precision subtract
Pressure valve；The delivery outlet of air compressor connects with the input port of pneumatic filter, the output of pneumatic filter
Mouth connects with the input port of oil mist separator, the delivery outlet of oil mist separator and the input of n precise pressure-reducing valve
Mouth all connects；The outer end of the delivery outlet of each precise pressure-reducing valve and a valve connects.
The air-float guide rail platform with loading compensation function the most according to claim 1, its feature exists
In: described orifice restriction device offers gas collection hole, decompression hole and pressure stable hole；The outer end of gas collection hole and gas
Floating axle puts the passage outer end connection of correspondence；The two ends of decompression hole respectively with the inner and the voltage stabilizing of gas collection hole
The outer end connection in hole；Passage the inner connection that the inner of pressure stable hole is corresponding with on air suspension shaft sleeve.
The air-float guide rail platform with loading compensation function the most according to claim 1, its feature exists
In: the periphery of described guide rail, the guide rails assembling hole hole wall of air suspension shaft sleeve, the upper surface of base, loading
The bottom surface of platform and the upper and lower surface of air supporting block are Ultra-precision Turning face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610362437.9A CN105834763B (en) | 2016-05-26 | 2016-05-26 | Air-float guide rail platform with loading compensation function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610362437.9A CN105834763B (en) | 2016-05-26 | 2016-05-26 | Air-float guide rail platform with loading compensation function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105834763A true CN105834763A (en) | 2016-08-10 |
| CN105834763B CN105834763B (en) | 2017-12-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201610362437.9A Active CN105834763B (en) | 2016-05-26 | 2016-05-26 | Air-float guide rail platform with loading compensation function |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106736612A (en) * | 2016-12-14 | 2017-05-31 | 西安交通大学 | A kind of ring-like pneumato-static slideway of precision lead screw drive-type |
| CN110849308A (en) * | 2019-11-27 | 2020-02-28 | 哈尔滨工业大学 | High-precision granite air-float guide rail |
| CN116608208A (en) * | 2023-06-21 | 2023-08-18 | 苏州速易德工业装备系统有限公司 | High-precision air-float guide rail |
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| JPS5313272A (en) * | 1976-07-23 | 1978-02-06 | Hitachi Ltd | Precision planar moving plate |
| CN201954205U (en) * | 2011-01-05 | 2011-08-31 | 河南科技大学 | Precision air-flotation worktable |
| CN102189413A (en) * | 2011-04-12 | 2011-09-21 | 华中科技大学 | Ultra-precise workbench |
| CN202266588U (en) * | 2011-09-01 | 2012-06-06 | 张瑞杰 | Rectangular air-flotation guide rail |
| CN104190959A (en) * | 2014-08-27 | 2014-12-10 | 杭州电子科技大学 | Air static pressure spindle with rotary error monitoring function |
| CN205764953U (en) * | 2016-05-26 | 2016-12-07 | 杭州电子科技大学 | A kind of air-float guide rail platform with loading compensation function |
-
2016
- 2016-05-26 CN CN201610362437.9A patent/CN105834763B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313272A (en) * | 1976-07-23 | 1978-02-06 | Hitachi Ltd | Precision planar moving plate |
| CN201954205U (en) * | 2011-01-05 | 2011-08-31 | 河南科技大学 | Precision air-flotation worktable |
| CN102189413A (en) * | 2011-04-12 | 2011-09-21 | 华中科技大学 | Ultra-precise workbench |
| CN202266588U (en) * | 2011-09-01 | 2012-06-06 | 张瑞杰 | Rectangular air-flotation guide rail |
| CN104190959A (en) * | 2014-08-27 | 2014-12-10 | 杭州电子科技大学 | Air static pressure spindle with rotary error monitoring function |
| CN205764953U (en) * | 2016-05-26 | 2016-12-07 | 杭州电子科技大学 | A kind of air-float guide rail platform with loading compensation function |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106736612A (en) * | 2016-12-14 | 2017-05-31 | 西安交通大学 | A kind of ring-like pneumato-static slideway of precision lead screw drive-type |
| CN106736612B (en) * | 2016-12-14 | 2018-12-07 | 西安交通大学 | A kind of ring-like pneumato-static slideway of precision lead screw drive-type |
| CN110849308A (en) * | 2019-11-27 | 2020-02-28 | 哈尔滨工业大学 | High-precision granite air-float guide rail |
| CN116608208A (en) * | 2023-06-21 | 2023-08-18 | 苏州速易德工业装备系统有限公司 | High-precision air-float guide rail |
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| Publication number | Publication date |
|---|---|
| CN105834763B (en) | 2017-12-22 |
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