CN202021347U - Ultrahigh precision gas static pressure bearing main shaft system - Google Patents

Ultrahigh precision gas static pressure bearing main shaft system Download PDF

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Publication number
CN202021347U
CN202021347U CN2011201251193U CN201120125119U CN202021347U CN 202021347 U CN202021347 U CN 202021347U CN 2011201251193 U CN2011201251193 U CN 2011201251193U CN 201120125119 U CN201120125119 U CN 201120125119U CN 202021347 U CN202021347 U CN 202021347U
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China
Prior art keywords
spindle box
main spindle
thrust
static pressure
main
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Expired - Fee Related
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CN2011201251193U
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Chinese (zh)
Inventor
杜建军
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Shenzhen Graduate School Harbin Institute of Technology
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Shenzhen Graduate School Harbin Institute of Technology
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Priority to CN2011201251193U priority Critical patent/CN202021347U/en
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Abstract

An ultrahigh precision gas static pressure bearing main shaft system comprises a rotating shaft (1), a headstock (2) and a headstock end cover (3), wherein the rotating shaft (1) is mounted inside the headstock (2), is supported by a gas static pressure bearing, and rotates relative to the headstock (2); and the gas static pressure bearing is integrated in the headstock (2) and integrated with the headstock, so as to achieve the simplest structure. A thrust boss (28) is arranged in the headstock (2) so as to be connected with the headstock end cover (3) and form the axial gas film clearance of a thrust bearing. A vacuum annular groove (25) is formed on the inner surface (2a) of the main pore space of the headstock (2) and positioned between two air vents (24), a vacuum opening (29) is formed on the headstock (2) and forms a communicated vacuum gas path together with a radial hole (13) and a center hole (11) on the rotating shaft (1), and when a vacuum chuck is mounted on the end surface of the rotating shaft, the adsorbing work can be performed.

Description

Superhigh precision gas static pressure bearing axis system
Technical field
The present invention relates to a kind of machine-tool spindle system, especially superhigh precision gas static pressure bearing axis system.
Background technology
In super-precision machine tools, axis system is the core component of lathe, and its precision directly influences the machining accuracy of part.Gas static pressure bearing is owing to have very high rotating accuracy, and temperature rise thermal deformation errors very little, that cause is very little when rotating at a high speed, therefore is widely used in the axis system of ultra-precision machine tool.In the design of ultra-precision machine tool axis system, should follow principle simple in structure, that parts are few, assembly performance good, dimensional stability is good, thereby make axis system reach high rotating accuracy and stability.Gas static pressure bearing commonly used is divided into two types according to the planform of rotating shaft: T type and H type, and the former is applicable to high-precision field, the latter is applicable to the field that the diagonal angle rigidity requirement is higher.Chinese patent CN101229590A discloses a kind of ultraprecise gas static pressure electricity main shaft, adopt the rotating shaft of H type exactly, have bigger angular rigidity, but the gap adjustment of its thrust bearing is relatively more difficult, and extra high required precision and requirement for dynamic balance are formed, are difficult for reaching to rotating shaft by a plurality of parts; This gas static pressure bearing need an axle be that support or main spindle box support in addition, needs to consider sealing between gas static pressure bearing and main spindle box.Fig. 1 shows a kind of ultraprecise gas static pressure bearing axis system of routine, adopt the rotating shaft of T type exactly, comprise rotating shaft 100, gas static pressure bearing 200, main spindle box 300, thrust gasket ring 400, thrust plate 500, utilize screw 600 (or other connected mode) that gas static pressure bearing 200, thrust gasket ring 400 and thrust plate 500 are connected firmly on main spindle box 300, rotating shaft 100 is suspended in the gas bearing structure of gas static pressure bearing 200 and thrust plate 500 formations by gases at high pressure, and rotates with respect to main spindle box; Simultaneously operated by rotary motion has cannelure 202 to the throttle orifice air feed between gas static pressure bearing 200 and main spindle box 300, so need to increase potted component 201 to prevent high pressure gas leakage between the outer surface of gas static pressure bearing and main spindle box endoporus.For ultraprecise equipment, parts are few, assembling simply just can reach very high precision and precision stability, and therefore conventional ultraprecise gas static pressure bearing axis system structure shown in Figure 2 seems complicated.Chinese patent CN2810824Y discloses a kind of ultraprecise high-speed air bearing electric chief axis, also adopt T type main shaft, but its structure is more complicated, and the axiality of front and back bearings is difficult to guarantee.Also there is similar problem in the disclosed ultraprecise gas static pressure bearing of Chinese patent CN101780547A axis system.
Summary of the invention
The purpose of this invention is to provide a kind of simple in structure, parts are few, structural stability good, the gas static pressure bearing axis system of superhigh precision, be used for solving existing ultra-precision machine tool axis system complex structure, parts many, to some problems of matching requirements height and precision stability difference.
The technical scheme that technical solution problem of the present invention is taked is: a kind of superhigh precision gas static pressure bearing axis system, it comprises rotating shaft, main spindle box, main spindle box end cap, wherein this rotating shaft is the T type and relies on the gas static pressure bearing supporting, be used in this main spindle box, rotating, it is interior, integrated with main spindle box that gas static pressure bearing is integrated in main spindle box, and its advantage is to realize that Compact Design and employed number of components can be minimum.
The gas static pressure bearing of indication comprises axial gas static pressure bearing in this specification, and this axial gas static pressure bearing can serve as thrust bearing.
In technical scheme of the present invention, structural element with gas static pressure bearing, comprise journal bearing surface and radially flow controller, thrust shaft bearing surface and axially flow controller, the thrust gasket ring that is used to form axial air film gap and necessary gas flow, all be integrated on the main spindle box, thereby realized compact and stable structure characteristics, specified as follows.
Be provided with the main aperture chamber in the main spindle box, the inner surface in main aperture chamber is cylindrical, it can be used as journal bearing surface through Precision Machining, can be used for installing rotating shaft in it, this rotating shaft has and main aperture inner cavity surface cylindrical periphery in opposite directions, drives this rotating shaft and rotates with respect to main spindle box thereby an end face of this rotating shaft can connect motor or other actuating unit.On the main aperture inner cavity surface, offer two air discharge ducts, these two air discharge ducts are divided into two parts with journal bearing surface, be divided into two bearings of journals in other words, these two air discharge ducts are responsible for receiving two bearing of journals corresponding site effluent airs, and by corresponding grate flow channel this gas are disposed to the main spindle box outside.
The main spindle box of this specification, its profile can be roughly polyhedron-shaped, also can be roughly cylindrical shape.
Main spindle box is provided with the thrust boss, this thrust boss have one with the perpendicular Flange Plane of the axis of main aperture inner cavity surface.The function of thrust boss is similar with the thrust pad ring function of the gas static pressure bearing of routine, the air film gap that is used to connect the main spindle box end cap and forms thrust bearing.
Main spindle box also is provided with a plane perpendicular with the axis of main aperture inner cavity surface, and this plane can be used as a thrust surface of thrust bearing through Precision Machining.This main spindle box also comprises the main spindle box end cap, and a transverse plane of this end cap can be used as another thrust surface of thrust bearing through Precision Machining.These two thrust surfaces have constituted enclosed gas static pressure thrust bearing.
Main aperture inner cavity surface in the main spindle box is provided with radially flow controller, and gases at high pressure enter the gap between the periphery of main aperture inner cavity surface and rotating shaft through flow controller radially, form journal gas film, can bear radial load.
In main spindle box with the perpendicular thrust surface of the axis of main aperture inner cavity surface on, be provided with axial flow controller; On the thrust surface of main spindle box end cap, also be provided with axial flow controller.The axial flow controller of gases at high pressure warp enters the gap between these two thrust surfaces and the rotating shaft thrust button, forms the thrust air film, can bear axial load.
The radially flow controller of indication and axial flow controller can be the orifice restriction device in this specification, also can be slit flow controller, porous matter flow controller.
In main spindle box, be provided with air inlet and corresponding gas flow, gases at high pressure can be transported to each radially flow controller and axially flow controller; Be provided with the runner of exhaust simultaneously, gas can be discharged main spindle box.
More than these technical characterstics main spindle box and gas static pressure bearing can be become one, thereby reduced amount of parts, also simplified the assembling link, thereby reached compact conformation, assemble simple purpose.
Gas static pressure bearing axis system of the present invention can also comprise vacuum port and corresponding gas flow, and this gas flow is used to connect vacuum port and vacuum cup.Under the acting in conjunction of vacuum port and gas flow, vacuum cup can adsorb workpiece.Workpiece in this specification can need the parts of clamping for other.
Major advantage of the present invention is: amount of parts is few, simple in structure, can realize the rotating accuracy of superelevation, manufacture level according to present parts, can reach the rotating accuracy of 0.02 μ m, and has the advantage that assembling is simple, precision stability is good, can be used on the ultra-precision machine tool of multiple form processing, include but not limited to super precision lathe, ultraprecise milling machine and ultraprecise grinding machine etc.
Description of drawings
Fig. 1 shows the cutaway view of conventional ultraprecise gas static pressure bearing axis system.
Fig. 2 A shows the outside drawing of implementing superhigh precision gas static pressure bearing axis system of the present invention;
Fig. 2 B shows the cutaway view of implementing superhigh precision gas static pressure bearing axis system of the present invention;
The specific embodiment
The specific embodiment one, Fig. 2 A and Fig. 2 B show superhigh precision gas static pressure bearing axis system of the present invention, it comprises rotating shaft 1, main spindle box 2 and main spindle box end cap 3, rotating shaft 1 is installed in the main spindle box 2, the dependence gas static pressure bearing supports and rotates with respect to main spindle box 2, this gas static pressure bearing is integrated in main spindle box 2 and interior and integrated with main spindle box, thereby realizes the simplest configuration.
Be provided with the main aperture chamber in the main spindle box 2, this main aperture inner cavity surface 2a is cylindrical and can be used for the journal bearing surface of gas static pressure bearing, and the axis of this main aperture inner cavity surface 2a is 12, and the respective cylindrical periphery 1a of this main aperture inner cavity surface 2a and rotating shaft 1 in opposite directions.Two air discharge ducts 24 and corresponding grate flow channel 24a can be set on main aperture inner cavity surface 2a, this two air discharge ducts 24 are divided into two parts with journal bearing surface, be divided into two bearings of journals in other words, these two air discharge ducts 24 are responsible for receiving two bearing of journals corresponding site effluent airs, and by grate flow channel 24a this gas are disposed to main spindle box 2 outsides.Main aperture inner cavity surface 2a is provided with radially flow controller 21a and 21b, radially supplies with gases at high pressure in the gap of flow controller between main aperture inner cavity surface 2a and rotating shaft periphery 1a by these, forms journal gas film.Radially the outlet of flow controller 21a and 21b all evenly distributes along the circumferencial direction of main aperture inner cavity surface 2a, and the radially flow controller that is distributed on the circumference of main aperture inner cavity surface 2a constitutes a series, perhaps is called a row.Axis 12 directions at main aperture inner cavity surface 2a are provided with 4 altogether and arrange radially flow controller, wherein two arrange the throttling summation that flow controller 21a radially constitutes a bearing of journals, and two arrange the throttling summation that flow controller 21b radially constitutes another bearing of journals.
Main spindle box 2 is provided with thrust boss 28, this thrust boss 28 have one with a perpendicular Flange Plane 2c of the axis 12 of main aperture inner cavity surface 2a.The effect of this thrust boss 28 is equivalent to the thrust gasket ring of conventional gas static-pressure shafting, the air film gap that is used to connect main spindle box end cap 3 and forms thrust bearing.The structure that this thrust boss 28 and main spindle box 2 are integrated, purpose is to reduce number of components and parts and improve precision and dimensional stability.
Be provided with a thrust surface 2b in the main spindle box 2, this thrust surface is plane and perpendicular with the axis 12 of main aperture inner cavity surface 2a; Main spindle box end cap 3 is provided with another thrust surface 3a, and this thrust surface 3a also is the plane and fits with the Flange Plane 2c of thrust boss 28, and adopts screw 4 that main spindle box end cap 3 and main spindle box 2 are coupled together.Thrust surface 2b and rotating shaft thrust card 1e in opposite directions, thrust surface 3a and rotating shaft thrust card 1d are in opposite directions.Thrust surface 2b is provided with axial flow controller 27, the outlet of this flow controller 27 is evenly distributed on the circumference around the axis 12 of main aperture inner cavity surface 2a, and the supply of the gap between thrust surface 2b and rotating shaft thrust card 1e gases at high pressure, form a thrust air film; Thrust surface 3a is provided with axial flow controller 31, the outlet of this flow controller 31 also is evenly distributed on the circumference around the axis 12 of main aperture inner cavity surface 2a, and the supply of the space between thrust surface 3a and rotating shaft thrust card 1d gases at high pressure, form another thrust air film.These two thrust air films can bear two-way load vertically, constitute the enclosed thrust bearing.
Radial gas runner 22a and axial gas runner 22b are set in the main spindle box 2, are provided with axial gas runner 32a, radial gas runner 32b and axial gas runner 32c in the main spindle box end cap 3.Because radially flow controller and axial flow controller all evenly distribute around the axis 12 of main aperture inner cavity surface 2a, so these radial gas runners and axial gas runner also evenly distribute around the axis 12 of main aperture inner cavity surface 2a.For these radial gas runners that are positioned at same shaft section and axial gas runner and radially flow controller 21a and 21b, axially for the flow controller 27 and 31, gas can circulate each other.Be provided with seal cover board 33 in the main spindle box end cap 3, sealing cover plate 33 and main spindle box end cap 3 have formed the axis 12 ringwise gas flows 34 around main aperture inner cavity surface 2a jointly, axial gas runner 32c in this gas flow 34 and the disalignment cross section is interconnected, and therefore all radial gas runners and axial gas runner in the disalignment cross section is interconnected.Be provided with air inlet 26 in the main spindle box 2, air inlet 26 can be connected with any gas flow, and gases at high pressure are after air inlet 26 enters main spindle box, and the gas flow through being interconnected arrives all radially flow controllers and axial flow controller is given the gas static pressure bearing air feed.Main spindle box 2 and main spindle box end cap 3 are provided with seal 23, prevent the high pressure gas leakage in the gas flow.
Rotating shaft has two end face 1b and 1c.An end face of rotating shaft is used to connect motor or other actuating unit, rotates with respect to main spindle box thereby drive rotating shaft; Another end face of rotating shaft is used to connect vacuum cup, adsorbs workpiece on vacuum cup.In two end faces of rotating shaft one of them connects motor, another connects vacuum cup, if for example end face 1b connects motor, then end face 1c connects vacuum cup; If end face 1c connects motor, then end face 1b connects vacuum cup.
Main spindle box 2 is provided with vacuum port 29, and it is used to connect vavuum pump.The main aperture inner cavity surface 2a of main spindle box 2 is provided with vacuum cannelure 25, and this vacuum cannelure 25 is between two air discharge ducts 24.Offer radial hole 13 and axial hole 11 in rotating shaft 1, radial hole 13 and axial hole 11 are interconnected, and radial hole 13 is positioned at the position relative with vacuum cannelure 25, and centre bore 11 is communicated with the end face of the connection vacuum cup of rotating shafts 1.Radial hole 13 in vacuum port 29, vacuum cannelure 25 and the rotating shaft 1 and the centre bore 11 common vacuum air-channel passages that are communicated with that form, when the end face of rotating shaft 1 is equipped with vacuum cup and workpiece, gas in this passage can be connected the vavuum pump of vacuum port 29 and take away endlessly, make the gas pressure in this passage maintain the degree of hanging down certain numerical value than main spindle box 2 outer air pressure, thereby make workpiece be attracted to the vacuum cup surface, realize the clamping of workpiece.The centre bore 11 of rotating shaft 1 can be for being communicated with the through hole of two end faces, also can be for only being communicated with the blind hole of the end face that vacuum cup is installed.The length of the radial hole of offering in the rotating shaft 1 13 can equal the diameter of rotating shaft, also can equal the radius of rotating shaft.
The specific embodiment two, in conjunction with Fig. 2 B explanation present embodiment, in the present embodiment, the radially flow controller 21a that is offered on the main aperture inner cavity surface 2a of main spindle box 2 is arranged as a row along the direction of axis 12.
The specific embodiment three, in conjunction with Fig. 2 B explanation present embodiment, in the present embodiment, the radially flow controller 21b that is offered on the main aperture inner cavity surface 2a of main spindle box 2 is arranged as a row along the direction of axis 12.

Claims (2)

1. superhigh precision gas static pressure bearing axis system, comprising rotating shaft (1), main spindle box (2) and main spindle box end cap (3), its shaft (1) is installed in the main spindle box (2), the dependence gas static pressure bearing supports and rotates with respect to main spindle box (2), this gas static pressure bearing be integrated in the main spindle box (2) and with main spindle box (2) one, it is characterized in that: main spindle box (2) offers columniform main aperture chamber, this main aperture inner cavity surface (2a) is a journal bearing surface, the main aperture inner cavity surface (2a) of main spindle box (2) offers two air discharge ducts (24), main spindle box (2) is provided with the thrust boss (28) as the thrust gasket ring, this thrust boss (28) and main spindle box (2) one, described main spindle box (2) also is provided with and the perpendicular thrust surface (2b) of the axis (12) of main aperture inner cavity surface (2a), a transverse plane of described main spindle box end cap (3) is as another thrust surface (3a) of thrust bearing, main aperture inner cavity surface (2a) in the main spindle box (2) is provided with radially flow controller (21a, 21b), thrust surface (2b) is provided with axial flow controller (27); On the thrust surface (3a) of main spindle box end cap (3), also be provided with axial flow controller (31).
2. superhigh precision gas static pressure bearing axis system according to claim 1, it is characterized in that, rotating shaft (1) is provided with radial hole (13) and centre bore (11), the main aperture inner cavity surface (2a) of main spindle box (2) offers vacuum cannelure (25), this vacuum cannelure (25) is positioned between two air discharge ducts (24), main spindle box is provided with vacuum port (29), the vacuum air-channel passage that this vacuum cannelure (25) is communicated with the radial hole (13) and the common formation of centre bore (11) of this vacuum port (29) and rotating shaft (1).
CN2011201251193U 2011-04-26 2011-04-26 Ultrahigh precision gas static pressure bearing main shaft system Expired - Fee Related CN202021347U (en)

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CN2011201251193U CN202021347U (en) 2011-04-26 2011-04-26 Ultrahigh precision gas static pressure bearing main shaft system

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Application Number Priority Date Filing Date Title
CN2011201251193U CN202021347U (en) 2011-04-26 2011-04-26 Ultrahigh precision gas static pressure bearing main shaft system

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102513553A (en) * 2011-12-07 2012-06-27 燕山大学 High-speed spindle with tapered hole capable of being automatically locked
CN105436528A (en) * 2014-09-15 2016-03-30 北京海普瑞森科技发展有限公司 Vertical aero-static spindle
CN106546360A (en) * 2016-10-25 2017-03-29 华中科技大学 A kind of pressurized air thrust bearing air film surface pressure distribution measurement method and device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102513553A (en) * 2011-12-07 2012-06-27 燕山大学 High-speed spindle with tapered hole capable of being automatically locked
CN105436528A (en) * 2014-09-15 2016-03-30 北京海普瑞森科技发展有限公司 Vertical aero-static spindle
CN106546360A (en) * 2016-10-25 2017-03-29 华中科技大学 A kind of pressurized air thrust bearing air film surface pressure distribution measurement method and device
CN106546360B (en) * 2016-10-25 2019-01-18 华中科技大学 A kind of pressurized air thrust bearing air film surface pressure distribution measurement method and device

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Granted publication date: 20111102

Termination date: 20120426