CN108637714A - A kind of macro micro- bilingual coupling motion platform that five degree of freedom is coordinated - Google Patents
A kind of macro micro- bilingual coupling motion platform that five degree of freedom is coordinated Download PDFInfo
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- CN108637714A CN108637714A CN201810847577.4A CN201810847577A CN108637714A CN 108637714 A CN108637714 A CN 108637714A CN 201810847577 A CN201810847577 A CN 201810847577A CN 108637714 A CN108637714 A CN 108637714A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
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Abstract
The present invention provides a kind of macro micro- bilingual coupling motion platform that five degree of freedom is coordinated, and kinematic accuracy is high.The technical solution for macro micro- bilingual coupling motion platform that a kind of five degree of freedom of the embodiment of the present invention is coordinated includes：Five single-degree-of-freedom driving devices, wherein three surround it is I-shaped, other two along it is I-shaped be symmetrical arranged；It surrounds and is equipped with rotatable parts and moving parts in I-shaped each single free driving device, other two described single-degree-of-freedom driving device is equipped with wedge block, the opposite sliding block that it is slided up and down is equipped on each wedge block, each sliding block is equipped with the side column of its opposite sliding, and moving platform is equipped between two side columns.Switched by the cooperation and macro and micro servo of each driving device, moving platform can realize the macro/micromotion of five degree of freedom.
Description
Technical field
The high-precision and through transport the present embodiments relate to multiple degrees of freedom high speed and precision motion platform field, especially five degree of freedom
A kind of moving platform, and in particular to macro micro- bilingual coupling motion platform that five degree of freedom is coordinated.
Background technology
Now, with industries such as accurate digital control processing, IC manufacturing, MEMS processing and manufacturing, bioengineering
Development with rapid changepl. never-ending changes and improvements, manufacturing industry equipment research and development are extremely urgent.Such as in micro-electronic manufacturing industry, product is in terms of volume
Develop towards the directions such as small, light, thin always, but functionally becomes stronger day by day, diversification.Between solution two such developing direction
Contradictory optimal path is exactly the processing that characteristic size is carried out using finer manufacturing equipment, improves the density of encapsulation.In this way
As soon as to indexs such as the kinematic accuracy of manufacturing equipment, stroke, speed, acceleration, degree of freedom, more stringent requirements are proposed.This
Outside, for example, the fields such as digital control processing, bioengineering to multivariant high speed and precision motion platform also with widespread demand.
It can be seen that the importance of multiple degrees of freedom high speed and precision motion platform and its more urgent research and development requirement.
Motion platform need to break through multiple degrees of freedom, high speed, high acceleration, big stroke motion as the core component of manufacturing equipment
With the important technologies bottleneck such as precision positioning.Requirement of the people for precision movement platform is higher and higher, and traditional motion platform is big
Mostly few free motion platform of serial mechanism form, i.e., mostly is several single axis stage simple superposition, is had more related
Link and moving parts, kinematic error accumulation is serious, is largely difficult to meet multiple degrees of freedom and high-precision simultaneously.
Invention content
The present invention provides a kind of macro micro- bilingual coupling motion platform that five degree of freedom is coordinated, and kinematic accuracy is high.
The technical solution for macro micro- bilingual coupling motion platform that a kind of five degree of freedom of the embodiment of the present invention is coordinated includes：
Five single-degree-of-freedom driving devices, wherein three surround it is I-shaped, other two along it is I-shaped be symmetrical arranged；It surrounds
Rotatable parts and moving parts are equipped in I-shaped each single free driving device, other two described single-degree-of-freedom
Driving device is equipped with wedge block, and the opposite sliding block that it is slided up and down is equipped on each wedge block, is set on each sliding block
There is the side column of its opposite sliding, moving platform is equipped between two side columns.
Preferably, each single-degree-of-freedom driving device includes the linear guide, linear motor and nucleus movement platform, institute
It states linear motor and is built in the linear guide, and the nucleus movement platform is slided along the linear guide.
Preferably, the nucleus movement platform is made of macro movement parts and macro/micromotion part, macro movement parts and described
Macro/micromotion part is embedded in the linear guide.
Preferably, described connecting rod one end is mounted on by torsional spring on the hinge arm.
Preferably, there is a notch, the notch to be equipped with protrusion, be set in the macro movement parts on the macro/micromotion part
There is the extension isometric with the notch, has the empty slot for accommodating the protrusion, the length of the empty slot big on the extension
For placing high steel spring and piezoelectric ceramics in remaining area between the length of the protrusion, the empty slot and the protrusion
Micro-displacement driver.
Preferably, three rotatable parts are respectively perpendicular to the corresponding single-degree-of-freedom driving device, and institute
It states three rotatable parts and is equipped with overarm.
Preferably, two are additionally provided in the overarm along the moving parts that it is slided up and down to be located in the overarm
An axis is respectively provided on two moving parts.
Preferably, the guide rod, described for stretching into guide post on another axis wherein for stretching into guide rod on an axis
The moving platform is set between guide post and two side columns.
Preferably, there is inclined surface on each wedge block, the sliding block be arranged on the inclined surface and perpendicular to
The corresponding single-degree-of-freedom driving device.
Five single-degree-of-freedom driving devices in the present invention are respectively defined as single-degree-of-freedom driving device one, single-degree-of-freedom is driven
Dynamic device two, single-degree-of-freedom driving device three, single-degree-of-freedom driving device four, single-degree-of-freedom driving device five, single-degree-of-freedom are driven
It is I-shaped that dynamic device one, single-degree-of-freedom driving device two and single-degree-of-freedom driving device three constitute one.Pass through each driving device
Cooperation and macro and micro servo switching, moving platform can realize the macro/micromotion of five degree of freedom.When single-degree-of-freedom driving device one,
The nucleus movement platform of single-degree-of-freedom driving device three, single-degree-of-freedom driving device four and single-degree-of-freedom driving device five is slided in the same direction
When dynamic, moving platform realizes X degree of freedom.When the sliding of the nucleus movement platform of single-degree-of-freedom driving device two, moving platform can realize Y
Degree of freedom.When the nucleus movement platform reverse slide of single-degree-of-freedom driving device one and single-degree-of-freedom driving device three, list is certainly
By degree driving device four and single-degree-of-freedom driving device five be also required for it is certain match resultant motion, moving platform can be realized to be revolved about the z axis
Turn, that is, realizes γ degree of freedom.When single-degree-of-freedom driving device four and single-degree-of-freedom driving device five move in the same direction, wedge shape is driven
Block one and wedge block two move in the same direction, and moving platform realizes α degree of freedom；When counter motion, moving platform can be made along Z axis upper and lower translation.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without having to pay creative labor, may be used also for those of ordinary skill in the art
To obtain other attached drawings according to these attached drawings.
Fig. 1 is the overall structure figure for macro micro- bilingual coupling motion platform that a kind of five degree of freedom of the present invention is coordinated；
Fig. 2 is the explosive view for macro micro- bilingual coupling motion platform that a kind of five degree of freedom of the present invention is coordinated；
Fig. 3 is the quick-fried of the single-degree-of-freedom driving device for macro micro- bilingual coupling motion platform that a kind of five degree of freedom of the present invention is coordinated
Fried figure.
Specific implementation mode
The present invention provides a kind of macro micro- bilingual coupling motion platform that five degree of freedom is coordinated, and kinematic accuracy is high.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The present invention is macro micro- bilingual coupling motion platform that a kind of five degree of freedom is coordinated, including five single-degree-of-freedom driving dresses
It sets, wherein three single-degree-of-freedom driving devices surround I-shaped, other two single free driving device is located in above-mentioned three
The both sides of the single-degree-of-freedom driving device of centre in a.
For convenience of description, five single-degree-of-freedom driving devices are respectively defined as single-degree-of-freedom driving device 1, list freely
Spend driving device 22, single-degree-of-freedom driving device 33, single-degree-of-freedom driving device 44, single-degree-of-freedom driving device 55.It is single
Degree of freedom driving device 1, single-degree-of-freedom driving device 22, the composition one of single-degree-of-freedom driving device 33 are I-shaped, single free
Degree driving device 44 and single-degree-of-freedom driving device 55 are located at the both sides of single-degree-of-freedom driving device 22 and are symmetrically set along it
It sets.
As shown in figure 3, any single-degree-of-freedom driving device, flat including the linear guide A1, linear motor A2, nucleus movement
Platform and piezoelectric micro-displacement actuator A6.Wherein pedestals of the linear guide A1 as motion platform of the present invention.Linear motor A2
It is built in the linear guide A1 and is such as glued on the inside of the linear guide A1.Nucleus movement platform is by macro movement parts A3 and macro/micromotion part
A4 is formed, macro movement parts A3 and the embedded the linear guide A1 of macro/micromotion part A4 so that nucleus movement platform is along the linear guide A1
Mobile, the linear guide A1 defines the movement locus of nucleus movement platform.
Since each single-degree-of-freedom driving device includes macro movement parts and macro/micromotion part, each driving device is all made of
The composite drive form of macro micro- common rail is, it can be achieved that the macro instant switching at runtime moved with micromotion.Wherein high-performance linear motor
The macro movement of driving makes mechanism that there is high speed, height to accelerate；The micromotion of Piezoelectric Ceramic can effectively make up transmission link and bring
Error, mutually vibration is inhibited to generate, is obviously improved the positioning accuracy of platform, the final precision realized under high-speed motion environment is raw
At.
Motion platform of the present invention by macro driving and micro-move device totally ten driving source coordinated movements of various economic factors, it can be achieved that five degree of freedom
Arbitrary combination and its macro micro- switching.
In addition, having a notch on macro/micromotion part A4, which is equipped with protrusion, corresponding, macro movement
Part A3 is equipped with the extension isometric with the notch, on extension there is the empty slot for accommodating the protrusion, the length of the empty slot to be more than
The length of protrusion, the remaining area between empty slot and protrusion are interior for placing high steel spring A5 and piezoelectric micro-displacement actuator
A6.High steel spring A5 plays damping actions, reduces platform vibrations, enhances stability, and piezoelectric micro-displacement actuator A6 can be with
Significantly improve the displacement accuracy of motion platform.
Further include that three rotatable parts (are respectively defined as rotatable parts other than including five single-degree-of-freedom driving devices
One 6, rotatable parts 27, rotatable parts 3 8), five moving parts (be respectively defined as moving parts 1, moving parts 2 10,
Moving parts 3 11, moving parts 4 12, moving parts 5 13), a moving platform 14 and one overarm 15.
Above three rotatable parts are corresponded with the single-degree-of-freedom driving device for constituting I-shaped, and rotatable parts
Installation position is perpendicular to corresponding single-degree-of-freedom driving device.Specifically, the setting of rotatable parts 1 drives in single-degree-of-freedom
On device 1, it is assumed that the laterally setting of single-degree-of-freedom driving device 1, then rotatable parts 1 are longitudinally disposed and driven with single-degree-of-freedom
Dynamic device 22 is parallel.Rotatable parts 27 are arranged in single-degree-of-freedom driving device 22, it is assumed that single-degree-of-freedom driving device 22
It is longitudinally disposed, then the laterally setting and flat with single-degree-of-freedom driving device 1 and single-degree-of-freedom driving device 33 of rotatable parts two
Row.Rotatable parts 38 are arranged in single-degree-of-freedom driving device 33, it is assumed that the laterally setting of single-degree-of-freedom driving device 33, then
Rotatable parts 38 are longitudinally disposed and parallel with single-degree-of-freedom driving device 22.
Also each one moving parts of correspondence of above three rotatable parts, i.e. three moving parts can be arranged one by one is constituting I-shaped
On the nucleus movement platform of three single-degree-of-freedom driving devices of shape, three rotatable parts (rotatable parts 1, rotatable parts two
7,8) rotatable parts 3 constitute three groups and turn with three moving parts (moving parts 1, moving parts 2 10, moving parts 3 11)
Dynamic moving movement pair, and respectively with single-degree-of-freedom driving device 1, single-degree-of-freedom driving device 22, single-degree-of-freedom driving device
33 rigid connections.Preferably, above-mentioned moving parts is short straight line guide rail platform.
Single-degree-of-freedom driving device 1, single-degree-of-freedom driving device 22, single-degree-of-freedom driving device 33 and three groups above-mentioned
Rotate pedestal (fixed platform) of the three groups of connectors of moving movement pair composition as support overarm 15.Each single-degree-of-freedom driving dress
It sets and is directly connected to moving platform and fixed platform (pedestal), final kinematic error is without the accumulation of error in serial mechanism, same sports bars
Under part, there will be higher kinematic accuracy.
Macro micro- bilingual coupling motion platform that above-mentioned five degree of freedom is coordinated further include two B2 of one B1 of a pair of of wedge block and wedge block,
Two B4 of one B3 of a pair of of sliding block and sliding block, a pair of one B5 of side column and two B6 of side column, a guide rod B7, a guide post B8, two axis (axis
Two B10 of one B9 and axis).
Other two moving parts 4 12 and the setting of moving parts 5 13 are such as embedded in overarm 15 in overarm 15, mobile
Component 4 12 and moving parts 5 13 can be moved up and down along overarm 15.An axis is equipped on above-mentioned two moving parts, specifically,
One B9 of axis is arranged on moving parts 4 12 and is rigidly connected with it, and axis two B10 settings are on moving parts 5 13 and rigid with it
Property connection.
Guide rod B7 passes through axis one B9, guide post B8 to pass through two B10 of axis.
One B1 of wedge block and two B2 of wedge block is arranged one by one respectively in the I-shaped single-degree-of-freedom driving device of non-composition
On nucleus movement platform, if one B1 of wedge block is arranged in single-degree-of-freedom driving device 44, two B2 of wedge block is arranged in single freedom
It spends in driving device 55.
One B1 of wedge block is fixed on the nucleus movement platform of single-degree-of-freedom driving device 44, one B1 of wedge block and core
Motion platform synchronous slide.Specifically, the macro movement parts and macro/micromotion part of one B1 of wedge block and single-degree-of-freedom driving device 44
Between be gluing.Similarly, two B2 of wedge block is fixed on the nucleus movement platform of single-degree-of-freedom driving device 55, wedge block
Also it is gluing, two B2 of wedge block and core between two B2 and the macro movement parts and macro/micromotion part of single-degree-of-freedom driving device 55
Heart motion platform synchronous slide wedge shape.
One B1 of wedge block and two B2 of wedge block all have an inclined surface, a sliding block are equipped on each inclined surface, sliding block is parallel
In single-degree-of-freedom driving device 22, it is assumed that single-degree-of-freedom driving device 22 is longitudinally disposed, then sliding block is longitudinally disposed, sliding block and its
Corresponding single-degree-of-freedom driving device is perpendicular.In addition, sliding block can be moved up and down relative to the inclined surface.
Specifically, one B3 of sliding block is fixed on one B1 of wedge block and can be moved along the inclined surface of one B1 of wedge block, sliding block one
Be nested with one B5 of side column on B3, one B5 of side column except synchronous with one B3 of sliding block along in addition to one B1 of wedge block is moved synchronously, can also be relative to
Sliding block one B3 slidings, it is assumed that one B3 of sliding block is longitudinally disposed, then one B5 of side column can be relative to one B3 of sliding block longitudinal (along Y-axis) sliding.
Two B4 of sliding block is fixed on two B2 of wedge block and can be moved along the inclined surface of two B2 of wedge block, nested on two B4 of sliding block
There is two B6 of side column, two B6 of side column can also be slided except synchronous with two B4 of sliding block along in addition to two B2 of wedge block is moved relative to two B4 of sliding block,
Assuming that two B4 of sliding block is longitudinally disposed, then two B6 of side column can be relative to two B4 of sliding block longitudinal (along Y-axis) sliding.
It is equipped with moving platform 14 between two B6 of moving platform (14) and one B5 of side column and side column, is alignment constraint with moving platform 14.
Single-degree-of-freedom driving device is arranged symmetrically in the position close to moving platform on pedestal, and position of centre of gravity is good, avoids driver itself
The moment of inertia caused by weight, entire mechanism have preferable isotropism and good Motion trajectory characteristic.Due to dynamic
Platform forms loop with each driving respectively, and mechanism rigidity improves a lot, to higher forces, response speed, hold
Loading capability.
Macro micro- bilingual coupling motion platform that five degree of freedom as described above is coordinated, when single-degree-of-freedom driving device 1, it is single from
It is slided in the same direction by the nucleus movement platform of degree driving device 33, single-degree-of-freedom driving device 44 and single-degree-of-freedom driving device 55
When dynamic, moving platform 14 can realize X degree of freedom.When the nucleus movement platform 2 of single-degree-of-freedom driving device two slides, moving platform 14
Y degree of freedom can be achieved.When the nucleus movement platform of single-degree-of-freedom driving device 1 and single-degree-of-freedom driving device 33 is reversely slided
When dynamic, moving platform can be realized to be rotated about the z axis, that is, realizes γ degree of freedom.When single-degree-of-freedom driving device 44 and single-degree-of-freedom drive
When device 5 moves in the same direction, one B1 of wedge block and two B2 of wedge block is driven to move in the same direction, moving platform 14 realizes α degree of freedom；Reversed fortune
When dynamic, moving platform 14 can be made along Z axis upper and lower translation.
In conclusion by the driving of different single-degree-of-freedom driving device linear motors, moving platform can be allowed to complete five certainly
It is moved by degree, and piezoelectric micro-displacement actuator driving can then significantly improve the displacement accuracy of moving platform.
Macro micro- bilingual coupling motion platform that five degree of freedom of the present invention is coordinated breaks through traditional serial mechanism form, simple in structure
Symmetrically, centroid position is good, has thrust is big, bearing capacity is strong, rigidity is high, dynamic response is good, kinematic accuracy is high, error is small etc.
Advantage can be widely applied to novel lathe development, Spacecraft Rendezvous docking, micro-electronic manufacturing, Medical Instruments and flight simulation etc.
Various fields.
The present invention is described in detail above, for those of ordinary skill in the art, embodiment according to the present invention
Thought, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification should not be understood
For limitation of the present invention.
Claims (9)
1. macro micro- bilingual coupling motion platform that a kind of five degree of freedom is coordinated, which is characterized in that including five single-degree-of-freedom driving dresses
Set, wherein three surround it is I-shaped, other two along it is I-shaped be symmetrical arranged；I-shaped each list is surrounded freely to drive
Rotatable parts and moving parts are equipped on device, other two described single-degree-of-freedom driving device is equipped with wedge block, each
The opposite sliding block that it is slided up and down is equipped on the wedge block, each sliding block is equipped with the side column of its opposite sliding, two institutes
It states and is equipped with moving platform between side column.
2. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 1 is coordinated, which is characterized in that each list
Degree of freedom driving device includes the linear guide, linear motor and nucleus movement platform, and the linear motor is built in described straight
Line guide rail, and the nucleus movement platform is slided along the linear guide.
3. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 2 is coordinated, which is characterized in that the core
Motion platform is made of macro movement parts and macro/micromotion part, and the macro movement parts and the macro/micromotion part are embedded in the straight line
Guide rail.
4. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 3 is coordinated, which is characterized in that the connecting rod
One end is mounted on by torsional spring on the hinge arm.
5. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 4 is coordinated, which is characterized in that described macro micro-
There is a notch, the notch to be equipped with protrusion, the macro movement parts are equipped with the extension isometric with the notch in movement parts
Part has the empty slot for accommodating the protrusion on the extension, and the length of the empty slot is more than the length of the protrusion, the sky
For placing high steel spring and piezoelectric micro-displacement actuator in remaining area between slot and the protrusion.
6. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 1 is coordinated, which is characterized in that described in three
Rotatable parts are respectively perpendicular to the corresponding single-degree-of-freedom driving device, and three rotatable parts are equipped with and hang
Beam.
7. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 6 is coordinated, which is characterized in that the overarm
On be additionally provided with two and can be respectively provided on two moving parts in the overarm along the moving parts that it is slided up and down
A piece axis.
8. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 7 is coordinated, which is characterized in that wherein one
For stretching into guide rod on axis, it is used to stretch into guide post on another axis, is set between the guide rod, the guide post and two side columns
Set the moving platform.
9. macro micro- bilingual coupling motion platform that five degree of freedom according to claim 1 is coordinated, which is characterized in that each described
There is inclined surface, the sliding block to be arranged on the inclined surface and be driven perpendicular to the corresponding single-degree-of-freedom on wedge block
Dynamic device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810847577.4A CN108637714B (en) | 2018-07-27 | 2018-07-27 | Five-degree-of-freedom coordinated macro-micro double-decoupling motion platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810847577.4A CN108637714B (en) | 2018-07-27 | 2018-07-27 | Five-degree-of-freedom coordinated macro-micro double-decoupling motion platform |
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| CN108637714B CN108637714B (en) | 2023-08-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117954375A (en) * | 2024-03-27 | 2024-04-30 | 上海图双精密装备有限公司 | Rotary driving device for double-shaft platform |
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| CN117954375A (en) * | 2024-03-27 | 2024-04-30 | 上海图双精密装备有限公司 | Rotary driving device for double-shaft platform |
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| CN108637714B (en) | 2023-08-22 |
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