CN208713982U - A kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving - Google Patents

A kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving Download PDF

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CN208713982U
CN208713982U CN201821204731.8U CN201821204731U CN208713982U CN 208713982 U CN208713982 U CN 208713982U CN 201821204731 U CN201821204731 U CN 201821204731U CN 208713982 U CN208713982 U CN 208713982U
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degree
freedom
platform
macro
parts
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高健
张金迪
张揽宇
刘亚超
钟永彬
陈新
王佳印
谭令威
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The utility model provides a kind of macro micro- parallel robot platform of six degree of freedom of coplanar driving, there is higher kinematic accuracy.A kind of technical solution of the macro micro- parallel robot platform of six degree of freedom of coplanar driving of the utility model embodiment includes: four single-degree-of-freedom driving devices in cross-shaped symmetrical distribution, each single-degree-of-freedom driving device includes slidable nucleus movement platform, the moving parts of synchronous movement is equipped on each nucleus movement platform, the opposite sliding block that it is slided up and down is equipped on each moving parts, the rotatable parts of its opposite sliding are equipped on each sliding block, motion profile of the motion profile of the rotatable parts perpendicular to the corresponding nucleus movement platform, for placing moving platform between four rotatable parts.

Description

A kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving
Technical field
The utility model embodiment is related to multi-degree-of-freedom motion platform technical field, and in particular to the six of a kind of coplanar driving The macro micro- parallel robot platform of freedom degree.
Background technique
The industries such as numerical control processing, IC manufacturing, MEMS processing and manufacturing are widely used multiple degrees of freedom Motion platform, developing a kind of has the characteristics that multiple degrees of freedom, positioning accuracy are higher, structure is simple and thrust is larger precision is fixed Bit platform is extremely urgent.
Traditional multi-degree-of-freedom motion platform is mostly several single axis stage simple superposition, has more related link and fortune Dynamic component, kinematic error accumulation are serious.
Utility model content
The utility model provides a kind of macro micro- parallel robot platform of six degree of freedom of coplanar driving, there is higher movement essence Degree.
A kind of technical solution packet of the macro micro- parallel robot platform of six degree of freedom of coplanar driving of the utility model embodiment It includes:
Four single-degree-of-freedom driving devices in cross-shaped symmetrical distribution, each single-degree-of-freedom driving device includes can The nucleus movement platform of sliding is equipped with the moving parts of synchronous movement, each shifting on each nucleus movement platform It is equipped with the opposite sliding block that it is slided up and down on dynamic component, the rotatable parts of its opposite sliding, institute are equipped on each sliding block State motion profile of the motion profile of rotatable parts perpendicular to the corresponding nucleus movement platform, four rotation sections For placing moving platform between part.
Preferably, in the technical solution of the macro micro- parallel robot platform of the six degree of freedom of above-mentioned coplanar driving,
Each single-degree-of-freedom driving device further includes linear guide, linear motor, and the linear motor is built in institute Linear guide is stated, and the nucleus movement platform is slided along the linear guide.
Preferably, in the technical solution of the macro micro- parallel robot platform of the six degree of freedom of above-mentioned coplanar driving, the core Heart motion platform is made of macro movement parts and macro/micromotion part, and the macro movement parts and the macro/micromotion part are embedded in described straight Line guide rail.
Preferably, described macro in the technical solution of the macro micro- parallel robot platform of the six degree of freedom of above-mentioned coplanar driving There is a notch, the notch is equipped with protrusion, and the macro movement parts are equipped with and the notch is isometric prolongs on micromotion part Part is stretched, there is the empty slot for accommodating the protrusion, the length of the empty slot is greater than the length of the protrusion, described on the extension For placing high steel spring and piezoelectric micro-displacement actuator in remaining area between empty slot and the protrusion.
Preferably, in the technical solution of the macro micro- parallel robot platform of the six degree of freedom of above-mentioned coplanar driving, Mei Yisuo Stating moving parts includes wedge block, and the wedge block has an inclined surface, and the sliding block is slided up and down along the inclined surface.
Preferably, in the technical solution of the macro micro- parallel robot platform of the six degree of freedom of above-mentioned coplanar driving, the wedge Shape block is installed on the nucleus movement platform.
Preferably, in the technical solution of the macro micro- parallel robot platform of the six degree of freedom of above-mentioned coplanar driving, the cunning Block is perpendicular to the corresponding single-degree-of-freedom driving device.
Beneficial effect by adopting the above technical scheme is:
Four single-degree-of-freedom driving device two transversely arranged, and two longitudinal arrangements surround a cross.Two are laterally arranged Nucleus movement platform in the single-degree-of-freedom driving device of column can transverse shifting, the single-degree-of-freedom driving device of two longitudinal arrangements On nucleus movement platform it is longitudinally movable.The corresponding moving parts synchronizing moving of each nucleus movement platform.In addition to moving Outside dynamic component and nucleus movement platform synchronizing moving, sliding block is additionally provided on each moving parts, sliding block is relative on moving parts Lower movement is additionally provided with the rotatable parts relative to its movement on sliding block, and the motion profile of rotatable parts is perpendicular to corresponding institute State the motion profile of nucleus movement platform.When two opposite single-degree-of-freedom driving devices slidings, moving platform realizes oneself of X or Y By spending, when four sliding blocks slide simultaneously, moving platform realizes Z freedom degree, and when two opposite sliding block slidings, moving platform realizes α Or β freedom degree, the dynamic flat achievable γ freedom degree when four rotatable parts slide simultaneously.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is a kind of overall structure figure of the macro micro- parallel robot platform of six degree of freedom of coplanar driving of the utility model;
Fig. 2 is a kind of explosive view of the macro micro- parallel robot platform of six degree of freedom of coplanar driving of the utility model.
Specific embodiment
The utility model provides a kind of macro micro- parallel robot platform of six degree of freedom of coplanar driving, there is higher movement essence Degree.
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
A kind of technical solution of the macro micro- parallel robot platform of six degree of freedom of coplanar driving of the utility model includes four In the single-degree-of-freedom driving device that cross-shaped symmetrical is distributed, each single-degree-of-freedom driving device includes slidable core fortune Moving platform is equipped with the moving parts of synchronous movement on each nucleus movement platform, is all provided on each moving parts There is the opposite sliding block that it is slided up and down, the rotatable parts of its opposite sliding are equipped on each sliding block, the rotatable parts Motion profile perpendicular to the corresponding nucleus movement platform motion profile, for putting between four rotatable parts Set moving platform.
As described above, four single-degree-of-freedom driving device two transversely arranged, two longitudinal arrangements surround a cross. Nucleus movement platform in two transversely arranged single-degree-of-freedom driving devices can transverse shifting, two longitudinal arrangements it is single freely The nucleus movement platform spent in driving device is longitudinally movable.The corresponding moving parts of each nucleus movement platform is synchronous to be moved It is dynamic.Other than moving parts and nucleus movement platform synchronizing moving, sliding block is additionally provided on each moving parts, sliding block is relative to shifting Dynamic component moves up and down, and the rotatable parts relative to its movement is additionally provided on sliding block, for one of them, when nucleus movement platform When transverse shifting, then rotatable parts horizontally vertically move along sliding block.
Each single-degree-of-freedom driving device includes that linear guide, linear motor, nucleus movement platform and piezoelectric ceramics are micro- Displacement driver.Wherein pedestal of the linear guide as the utility model motion platform.Linear motor is built in linear guide It is such as glued on the inside of linear guide.Nucleus movement platform is made of macro movement parts and macro/micromotion part, macro movement parts and macro micro- fortune Moving part is embedded in linear guide, so that nucleus movement platform is moved along linear guide, which defines that nucleus movement is flat The motion profile of platform.
In addition, having a notch on macro/micromotion part, which is equipped with protrusion, corresponding, macro movement parts It is equipped with the extension isometric with the notch, there is the empty slot for accommodating the protrusion on extension, the length of the empty slot is greater than protrusion Length, for placing high steel spring and piezoelectric micro-displacement actuator in remaining area between empty slot and protrusion.Gao Gang Spring plays damping action, reduces platform vibration, enhances stability, and piezoelectric micro-displacement actuator can significantly improve movement The displacement accuracy of platform.
Each moving parts includes wedge block, and wedge block has an inclined surface, has along inclined direction on the inclined surface Extended guide rail, sliding block is embedded on guide rail, to realize that sliding block can be moved up and down relative to moving parts.Further, Guide rail also is provided on sliding block, which moves perpendicular to single-degree-of-freedom driving device corresponding thereto, rotatable parts along the guide rail Dynamic, nucleus movement platform is moved along single-degree-of-freedom driving device, thus realize the motion profiles of rotatable parts perpendicular to its The motion profile of the corresponding nucleus movement platform.
Below with reference to the macro micro- parallel manipulator of six degree of freedom of Fig. 1 and Fig. 2 coplanar driving a kind of to the utility model embodiment The expansion of people's platform is described in detail.
The utility model is a kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving, including four single-degree-of-freedoms Driving device (can be respectively defined as single-degree-of-freedom driving device one, single-degree-of-freedom driving device two, single-degree-of-freedom driving device Three, single-degree-of-freedom driving device four), four moving parts (moving parts one, moving parts two, moving parts three, moving parts Four), four rotatable parts (rotatable parts 1, rotatable parts 2 10, rotatable parts 3 11, rotatable parts 4 14), one it is dynamic flat Platform 13.
By taking moving parts one as an example, moving parts one includes one B5 of one B1 of wedge block and sliding block, and one B1 of wedge block has one Inclined surface, one B5 of sliding block are moved up and down along inclined surface.One B1 of wedge block is arranged in single-degree-of-freedom driving device one, wedge block one It is glued constraint between B1 and the macro movement parts A3 and macro/micromotion part A4 of single-degree-of-freedom driving device one, one B1 of wedge block can With one synchronous slide of single-degree-of-freedom driving device.It should be noted that wedge block and macro movement parts and being not connected with.Because of macro micro- fortune There are spring and piezoelectric ceramics between moving part and macro movement parts, so certain position can be generated between macro/micromotion part and macro movement parts It moves.
Moving parts two includes two B6 of two B2 of wedge block and sliding block, and two B2 of wedge block has an inclined surface, two edge B6 of sliding block Inclined surface moves up and down.Two B2 of wedge block is arranged in single-degree-of-freedom driving device two, and two B2 of wedge block and single-degree-of-freedom drive It is glued constraint between the macro movement parts and macro/micromotion part of device two, two B2 of wedge block can be with single-degree-of-freedom driving device two Synchronous slide.
Moving parts three includes three B7 of three B3 of wedge block and sliding block, and three B3 of wedge block has an inclined surface, three edge B7 of sliding block Inclined surface moves up and down.Three B3 of wedge block is arranged in single-degree-of-freedom driving device three, and three B3 of wedge block and single-degree-of-freedom drive It is glued constraint between the macro movement parts and macro/micromotion part of device three, three B3 of wedge block can be with single-degree-of-freedom driving device three Synchronous slide.It should be noted that it is thorough for not being between the macro movement parts and macro/micromotion part of each single-degree-of-freedom driving device Bottom is fixed, and has relative movement between the two.
Moving parts four includes four B8 of four B4 of wedge block and sliding block, and four B4 of wedge block has an inclined surface, four edge B8 of sliding block Inclined surface moves up and down.Four B4 of wedge block is arranged in single-degree-of-freedom driving device four, and four B4 of wedge block and single-degree-of-freedom drive It is glued constraint between the macro movement parts and macro/micromotion part of device four, four B4 of wedge block can be with single-degree-of-freedom driving device four Synchronous slide.
Rotatable parts 1 are arranged on one B5 of sliding block and can slide along one B5 of sliding block, and moving parts one is arranged in single freedom It spends in driving device one.
Rotatable parts 2 10 are arranged on two B6 of sliding block and can slide along two B6 of sliding block, and moving parts two is arranged in single freedom It spends in driving device two.
Rotatable parts 3 11 are arranged on three B7 of sliding block and can slide along three B7 of sliding block, and moving parts three is arranged in single freedom It spends in driving device three.
Rotatable parts 4 12 are arranged on four B8 of sliding block and can slide along four B8 of sliding block, and moving parts four is arranged in single freedom It spends in driving device four.
Rotatable parts are corresponded with moving parts respectively, constitute four groups of rotation moving movements it is secondary and respectively with single-degree-of-freedom Driving device rigid connection.Four groups of connectors of four single-degree-of-freedom driving devices and rotation moving movement pair composition are as support The pedestal of moving platform 13.By taking one of single-degree-of-freedom driving device one as an example, including linear guide A1, linear motor A2, core Heart motion platform, piezoelectric micro-displacement actuator A6.Wherein pedestal of the linear guide A1 fixed constraint as motion platform, directly Line motor A2 is glued on the inside of linear guide A1;Nucleus movement platform is made of macro movement parts A3 and macro/micromotion part A4, straight line Simultaneously high steel bomb is added in macro movement parts A3 and macro/micromotion part A4 contact center groove in guide rail A1 and macro movement parts A3 alignment constraint Spring A5 and piezoelectric micro-displacement actuator A6, high steel spring A5 play damping action, reduce platform vibration, enhance stability, and Piezoelectric micro-displacement actuator A6 can significantly improve the displacement accuracy of motion platform.
The macro micro- parallel robot platform of the six degree of freedom of above-mentioned coplanar driving, when single-degree-of-freedom driving device two and list are free When degree driving device four is slided in the same direction, moving platform 13 can realize X freedom degree;When single-degree-of-freedom driving device one and single-degree-of-freedom are driven When dynamic device three slides, moving platform 13 realizes Y freedom degree;When one B5 of sliding block, two B6 of sliding block, three B7 of sliding block and four B8 of sliding block simultaneously When sliding, moving platform 13 can realize Z freedom degree;When one B5 of sliding block and three B7 of sliding block is slided, moving platform 13 can realize β freedom Degree;When two B6 of sliding block sliding block and four B8 of sliding block is slided, moving platform 13 can realize α freedom degree;When rotatable parts 1, rotation Moving platform 13 can realize γ freedom degree when component 2 10, rotatable parts 3 11 and rotatable parts 4 14 slide simultaneously.In conclusion By the driving of different single-degree-of-freedom driving device linear motors, moving platform can be allowed to complete six degree of freedom, and piezoelectric ceramics is micro- Displacement driver drives the displacement accuracy that can then significantly improve moving platform.
The utility model is described in detail above, it is practical new according to this for those of ordinary skill in the art The thought of type embodiment, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification It should not be construed as a limitation of the present invention.

Claims (7)

1. a kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving, which is characterized in that including four in cross pair Claim the single-degree-of-freedom driving device of distribution, each single-degree-of-freedom driving device includes slidable nucleus movement platform, respectively It is equipped with the moving parts of synchronous movement on the nucleus movement platform, is equipped with relatively thereon on each moving parts The sliding block of lower slider, rotatable parts of its opposite sliding are equipped on each sliding block, and the motion profile of the rotatable parts hangs down Directly for placing moving platform between the motion profile of the corresponding nucleus movement platform, four rotatable parts.
2. the macro micro- parallel robot platform of the six degree of freedom of coplanar driving according to claim 1, which is characterized in that each The single-degree-of-freedom driving device further includes linear guide, linear motor, and the linear motor is built in the linear guide, and The nucleus movement platform is slided along the linear guide.
3. the macro micro- parallel robot platform of the six degree of freedom of coplanar driving according to claim 2, which is characterized in that described Nucleus movement platform is made of macro movement parts and macro/micromotion part, described in the macro movement parts and the macro/micromotion part are embedded in Linear guide.
4. the macro micro- parallel robot platform of the six degree of freedom of coplanar driving according to claim 3, which is characterized in that described There is a notch, the notch is equipped with protrusion, and the macro movement parts are equipped with isometric with the notch on macro/micromotion part Extension has the empty slot for accommodating the protrusion, length of the length greater than the protrusion of the empty slot, institute on the extension It states in the remaining area between empty slot and the protrusion for placing high steel spring and piezoelectric micro-displacement actuator.
5. the macro micro- parallel robot platform of the six degree of freedom of coplanar driving according to claim 1, which is characterized in that each The moving parts includes wedge block, and the wedge block has an inclined surface, and the sliding block is slided up and down along the inclined surface.
6. the macro micro- parallel robot platform of the six degree of freedom of coplanar driving according to claim 5, which is characterized in that described Wedge block is installed on the nucleus movement platform.
7. the macro micro- parallel robot platform of the six degree of freedom of coplanar driving according to claim 1, which is characterized in that described Sliding block is perpendicular to the corresponding single-degree-of-freedom driving device.
CN201821204731.8U 2018-07-27 2018-07-27 A kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving Active CN208713982U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108638043A (en) * 2018-07-27 2018-10-12 广东工业大学 A kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108638043A (en) * 2018-07-27 2018-10-12 广东工业大学 A kind of macro micro- parallel robot platform of the six degree of freedom of coplanar driving
CN108638043B (en) * 2018-07-27 2023-08-22 广东工业大学 Coplanar-driven six-degree-of-freedom macro-micro parallel robot platform

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