CN207743900U - A kind of novel friction type linear piezoelectric actuator - Google Patents

A kind of novel friction type linear piezoelectric actuator Download PDF

Info

Publication number
CN207743900U
CN207743900U CN201820050261.8U CN201820050261U CN207743900U CN 207743900 U CN207743900 U CN 207743900U CN 201820050261 U CN201820050261 U CN 201820050261U CN 207743900 U CN207743900 U CN 207743900U
Authority
CN
China
Prior art keywords
driver
piezoelectric vibrator
piezoelectric
output shaft
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201820050261.8U
Other languages
Chinese (zh)
Inventor
曾祥莉
吴越
王京春
宋正义
刘庆平
杨志刚
董景石
韦东东
张宝玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Shangyuan Technology Development Co ltd
Original Assignee
Jilin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jilin University filed Critical Jilin University
Priority to CN201820050261.8U priority Critical patent/CN207743900U/en
Application granted granted Critical
Publication of CN207743900U publication Critical patent/CN207743900U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The utility model is related to a kind of novel friction type linear piezoelectric actuators, including:Fixed shell and central shaft, first driver of surrounding that is identical characterized by further comprising structure and being evenly arranged in central shaft, second driver and third driver, when work, fixed shell position is fixed, each piezoelectric vibrator is generated periodically deformation by the effect of the driving voltage of a phase bit in driving unit, reversing for low-angle is generated by the power of Piezoelectric Driving and the frictional force collective effect of output shaft due to foot bearing in driving unit, realize that the material of different coefficients of friction is alternately contacted with output shaft, to make one step-length of output shaft directed movement in a drive cycle, the final directed driven for realizing output shaft.The utility model realizes bi-directional drive, and has the advantages that the service life that simple in structure, maintenance cost is low, the requirement to working face is relatively low and extends piezoelectric ceramics in driver.

Description

A kind of novel friction type linear piezoelectric actuator
Technical field
The utility model belongs to Piezoelectric Driving field, and in particular to a kind of novel friction type linear piezoelectric actuator.
Background technology
The performance of driver directly affects the performance of automation equipment, since piezoelectric drive element has small, response Speed is fast, controllable precision is high, conversion efficiency is high and without superior functions such as electromagnetic interferences, in ultraprecise instrument, Micro-Robot, precision The fields such as positioning and biomedicine are widely used.Piezoelectric Driving is broadly divided into linear drives and rotation drives, and piezoelectricity is straight Line driving mainly has piezoelectric inertia driving and two class of bionical driving, wherein the mainly imitative looper type creeping motion type driving of bionical driving, This driving method needs multiple piezoelectricity clampers to stack, and cost is higher, at the same need the even multistage displacement amplifying mechanism of level-one and Interpreter mechanism is moved, structure is complex;Piezoelectric inertia driving mainly has electric-controlled type with frictionally, and electric-controlled type mainly utilizes non- Symmetrical drive signal realizes driving, therefore control system is complicated.Piezoelectricity friction formula driving simple, drive mechanism with driving structure The advantages that novel and drive signal is simply easily controllable carries out in-depth study to piezoelectricity friction formula driver and is beneficial to piezoelectricity The further promotion and application of driver.
Invention content
It is complex in order to solve current linear piezoelectric actuator structure, mostly with working face rigid contact, to working environment It is required that a kind of high, the problem of control system complexity, it is proposed that novel friction type linear piezoelectric actuator, the driver is by set casing Body, central shaft are identical with structure and are evenly arranged in the first driver, the second driver and third of the surrounding of central shaft Driver forms.Wherein:First driver includes first end side connecting plate, the first piezo-electric drive units, piezoelectric vibrator company Fishplate bar, the second piezo-electric drive units and second end side connecting plate and each component is sequentially connected, the first end side connecting plate and Two end side connecting plates are connect with fixed shell respectively;Wherein described first piezo-electric drive units are by the first piezoelectric vibrator, the second pressure Electric tachometer indicator, the first support leg, the second support leg and third support leg composition, first piezoelectric vibrator are glued by piezoelectric sheet material It is attached on Rectangular Elastic matrix and constitutes, second piezoelectric vibrator is identical with the first piezoelectric vibrator structure and two piezoelectric vibrators It is connected, first support leg one end is vertically connected on the lower surface of the first piezoelectric vibrator and first end side connecting plate connecting pin, The other end is the first foot bearing, and the first foot bearing is compound by the first low friction coefficient materials and the first high coefficient of friction material It forms and outer end face is arc, second support leg one end is arranged vertically on the first piezoelectric vibrator and the connection of the second piezoelectric vibrator The lower surface at end, the other end are the crus secunda bearing being made of the second low friction coefficient materials, and third support leg one end is hung down The straight lower surface for being arranged in the second piezoelectric vibrator and piezoelectric vibrator connecting plate connecting pin, the other end are by third great friction coefficient material The three-leg support that material and third low friction coefficient materials are combined, the third high coefficient of friction material and the first high friction Coefficient material is identical and is arranged in close to the second support leg side, and first low friction coefficient materials, second low rub It is identical with third low friction coefficient materials to wipe coefficient material;Second piezo-electric drive units and the first piezo-electric drive units Structure is identical.
When work, fixed shell position is fixed, in driving unit each piezoelectric vibrator by a phase bit driving voltage Effect, which generates, periodically to be deformed, since foot bearing is common by the power of Piezoelectric Driving and the frictional force of output shaft in driving unit Effect generates the torsion of low-angle, realizes that the material of different coefficients of friction is alternately contacted with output shaft, to drive week at one Make one step-length of output shaft directed movement in phase, the final directed driven for realizing output shaft.The driver forward drive principle is such as Shown in Fig. 4:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 4 (a);When the first driver, second The first piezoelectric vibrator in the piezo-electric drive units of driver and third driver is generated by voltage driving to be become by axial ray When shape, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first of the first foot bearing low to rub The second low friction coefficient materials for wiping coefficient material and crus secunda bearing are contacted with output shaft, the driving to the right that output shaft is subject to Frictional force is equal to frictional force to the left, and output shaft is not subjected to displacement at this time, as shown in Fig. 4 (b);When the first driver, second drive The first piezoelectric vibrator in the piezo-electric drive units of dynamic device and third driver is generated by voltage driving to be deformed far from axis When, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first high friction of the first foot bearing Second low friction coefficient materials of coefficient material and crus secunda bearing are contacted with output shaft, and the driving to the right that output shaft is subject to rubs Power is wiped more than frictional force to the left, the displacement of output shaft generation at this time to the right, as shown in Fig. 4 (c).Therefore, in each driving When first piezoelectric vibrator of unit is driven by alternating voltage, driver realizes forward drive.The driver reverse drive is former Reason is as shown in Figure 5:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 5 (a);When the first driver, The second piezoelectric vibrator in the piezo-electric drive units of second driver and third driver is generated by voltage driving leans on axial ray Deformation when, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes crus secunda bearing second low The third low friction coefficient materials of friction coefficient material and three-leg support are contacted with output shaft, the drive to the left that output shaft is subject to Kinetic force of friction is equal to frictional force to the right, and output shaft is not subjected to displacement at this time, as shown in Fig. 5 (b);When the first driver, second The second piezoelectric vibrator in the piezo-electric drive units of driver and third driver is generated by voltage driving to be become far from axis When shape, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes the second of crus secunda bearing low to rub The third high coefficient of friction material for wiping coefficient material and three-leg support is contacted with output shaft, the driving to the left that output shaft is subject to Frictional force is more than frictional force to the right, and output shaft generates a displacement to the left at this time, as shown in Fig. 5 (c).Therefore, first The second piezoelectric vibrator in the piezo-electric drive units of driver, the second driver and third driver is driven by alternating voltage When, driver realizes reverse drive.
The utility model realizes two-way linear driving, and with simple in structure, maintenance cost is low, the requirement to working face In relatively low and extension driver the advantages of the service life of piezoelectric ceramics.
To achieve the goals above, the present invention uses following technical scheme:
A kind of novel friction type linear piezoelectric actuator of the utility model, the driver is by fixing shell, central shaft and knot Structure is identical and is evenly arranged in the first driver, the second driver and third driver of the surrounding of central shaft composition.Its In:First driver includes first end side connecting plate, the first piezo-electric drive units, piezoelectric vibrator connecting plate, the second piezoelectricity Driving unit and second end side connecting plate and each component is sequentially connected, the first end side connecting plate and second end side connecting plate point It is not connect with fixed shell;Wherein described first piezo-electric drive units are by the first piezoelectric vibrator, the second piezoelectric vibrator, the first support Leg, the second support leg and third support leg composition, first piezoelectric vibrator are pasted onto Rectangular Elastic base by piezoelectric sheet material It being constituted on body, second piezoelectric vibrator is identical with the first piezoelectric vibrator structure and two piezoelectric vibrators are connected, and described first Support leg one end is vertically connected on the lower surface of the first piezoelectric vibrator and first end side connecting plate connecting pin, and the other end is the first foot Bearing, the first foot bearing is combined by the first low friction coefficient materials and the first high coefficient of friction material and outer end face is Arc, second support leg one end are arranged vertically on the lower surface of the first piezoelectric vibrator and the second piezoelectric vibrator connecting pin, separately One end is the crus secunda bearing being made of the second low friction coefficient materials, and third support leg one end is arranged vertically on the second pressure The lower surface of electric tachometer indicator and piezoelectric vibrator connecting plate connecting pin, the other end are by third high coefficient of friction material and third low friction The three-leg support that coefficient material is combined, the third high coefficient of friction material and the complete phase of the first high coefficient of friction material With and be arranged in close to the second support leg side, first low friction coefficient materials, the second low friction coefficient materials and the Three low friction coefficient materials are identical;Second piezo-electric drive units are identical with the first piezo-electric drive units structure.
When work, fixed shell position is fixed, in driving unit each piezoelectric vibrator by a phase bit driving voltage Effect, which generates, periodically to be deformed, since foot bearing is common by the power of Piezoelectric Driving and the frictional force of output shaft in driving unit Effect generates the torsion of low-angle, realizes that the material of different coefficients of friction is alternately contacted with output shaft, to drive week at one Make one step-length of output shaft directed movement in phase, the final directed driven for realizing output shaft.The driver forward drive principle is such as Shown in Fig. 4:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 4 (a);When the first driver, second The first piezoelectric vibrator in the piezo-electric drive units of driver and third driver is generated by voltage driving to be become by axial ray When shape, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first of the first foot bearing low to rub The second low friction coefficient materials for wiping coefficient material and crus secunda bearing are contacted with output shaft, the driving to the right that output shaft is subject to Frictional force is equal to frictional force to the left, and output shaft is not subjected to displacement at this time, as shown in Fig. 4 (b);When the first driver, second drive The first piezoelectric vibrator in the piezo-electric drive units of dynamic device and third driver is generated by voltage driving to be deformed far from axis When, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first high friction of the first foot bearing Second low friction coefficient materials of coefficient material and crus secunda bearing are contacted with output shaft, and the driving to the right that output shaft is subject to rubs Power is wiped more than frictional force to the left, the displacement of output shaft generation at this time to the right, as shown in Fig. 4 (c).Therefore, in each driving When first piezoelectric vibrator of unit is driven by alternating voltage, driver realizes forward drive.The driver reverse drive is former Reason is as shown in Figure 5:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 5 (a);When the first driver, The second piezoelectric vibrator in the piezo-electric drive units of second driver and third driver is generated by voltage driving leans on axial ray Deformation when, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes crus secunda bearing second low The third low friction coefficient materials of friction coefficient material and three-leg support are contacted with output shaft, the drive to the left that output shaft is subject to Kinetic force of friction is equal to frictional force to the right, and output shaft is not subjected to displacement at this time, as shown in Fig. 5 (b);When the first driver, second The second piezoelectric vibrator in the piezo-electric drive units of driver and third driver is generated by voltage driving to be become far from axis When shape, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes the second of crus secunda bearing low to rub The third high coefficient of friction material for wiping coefficient material and three-leg support is contacted with output shaft, the driving to the left that output shaft is subject to Frictional force is more than frictional force to the right, and output shaft generates a displacement to the left at this time, as shown in Fig. 5 (c).Therefore, first The second piezoelectric vibrator in the piezo-electric drive units of driver, the second driver and third driver is driven by alternating voltage When, driver realizes reverse drive.
The utility model realizes two-way linear driving, and with simple in structure, maintenance cost is low, the requirement to working face In relatively low and extension driver the advantages of the service life of piezoelectric ceramics.
Description of the drawings
Fig. 1 is a kind of novel friction type linear piezoelectric actuator three dimensional structure diagram of the utility model.
Fig. 2 is a kind of novel friction type linear piezoelectric actuator left view figure structure schematic representation of the utility model.
Fig. 3 is a kind of novel friction type linear piezoelectric actuator piezo-electric drive units structural schematic diagram of the utility model.
Fig. 4 is a kind of novel friction type linear piezoelectric actuator forward drive process schematic of the utility model.
Fig. 5 is a kind of novel friction type linear piezoelectric actuator reverse drive process schematic of the utility model.
Specific implementation mode
Referring to Fig.1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, a kind of novel friction type linear piezoelectric actuator of the utility model are by solid Fixed shell 1, central shaft 2, the first driver 3, the second driver 4 and third driver 5 form, wherein:
First driver 3 includes first end side connecting plate 31, the first piezo-electric drive units 32, piezoelectric vibrator connecting plate 33, the second piezo-electric drive units 34 and second end side connecting plate 35 and each component is sequentially connected, the first end side connecting plate 31 It is connect respectively with fixed shell 1 with second end side connecting plate 35;Wherein first piezo-electric drive units 32 are shaken by the first piezoelectricity Sub 321, second piezoelectric vibrator 322, the first support leg 323, the second support leg 324 and third support leg 325 form, and described first Piezoelectric vibrator 321 is pasted onto on Rectangular Elastic matrix by piezoelectric sheet material and is constituted, and second piezoelectric vibrator 322 and first is pressed 321 structure of electric tachometer indicator is identical and two piezoelectric vibrators are connected, and described first support leg, 323 one end is vertically connected on the first piezoelectricity The lower surface of oscillator 321 and 31 connecting pin of first end side connecting plate, the other end are the first foot bearing 3231, the first foot bearing 3231 be combined by the first low friction coefficient materials 32311 and the first high coefficient of friction material 32312 and outer end face be arc, Described second support leg, 324 one end is arranged vertically on the following table of 322 connecting pin of the first piezoelectric vibrator 321 and the second piezoelectric vibrator Face, the other end are the crus secunda bearing 3241 being made of the second low friction coefficient materials, and described 325 one end of third support leg is vertical It is arranged in the lower surface of 33 connecting pin of the second piezoelectric vibrator 322 and the first piezoelectric vibrator connecting plate, the other end is to be rubbed by third height The three-leg support 3251 that coefficient material 32511 and third low friction coefficient materials 32512 are combined is wiped, the third height rubs Wiping coefficient material 32511 is identical with the first high coefficient of friction material 32312 and is arranged in close to the second support leg 324 1 Side, first low friction coefficient materials 32311, the second low friction coefficient materials and third low friction coefficient materials 32512 are complete It is exactly the same;Second piezo-electric drive units 34 are identical with 32 structure of the first piezo-electric drive units.
When work, fixed shell position is fixed, in driving unit each piezoelectric vibrator by a phase bit driving voltage Effect, which generates, periodically to be deformed, since foot bearing is common by the power of Piezoelectric Driving and the frictional force of output shaft in driving unit Effect generates the torsion of low-angle, realizes that the material of different coefficients of friction is alternately contacted with output shaft, to drive week at one Make one step-length of output shaft directed movement in phase, the final directed driven for realizing output shaft.The driver forward drive principle is such as Shown in Fig. 4:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 4 (a);When the first driver, second The first piezoelectric vibrator in the piezo-electric drive units of driver and third driver is generated by voltage driving to be become by axial ray When shape, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first of the first foot bearing low to rub The second low friction coefficient materials for wiping coefficient material and crus secunda bearing are contacted with output shaft, the driving to the right that output shaft is subject to Frictional force is equal to frictional force to the left, and output shaft is not subjected to displacement at this time, as shown in Fig. 4 (b);When the first driver, second drive The first piezoelectric vibrator in the piezo-electric drive units of dynamic device and third driver is generated by voltage driving to be deformed far from axis When, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first high friction of the first foot bearing Second low friction coefficient materials of coefficient material and crus secunda bearing are contacted with output shaft, and the driving to the right that output shaft is subject to rubs Power is wiped more than frictional force to the left, the displacement of output shaft generation at this time to the right, as shown in Fig. 4 (c).Therefore, in each driving When first piezoelectric vibrator of unit is driven by alternating voltage, driver realizes forward drive.The driver reverse drive is former Reason is as shown in Figure 5:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 5 (a);When the first driver, The second piezoelectric vibrator in the piezo-electric drive units of second driver and third driver is generated by voltage driving leans on axial ray Deformation when, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes crus secunda bearing second low The third low friction coefficient materials of friction coefficient material and three-leg support are contacted with output shaft, the drive to the left that output shaft is subject to Kinetic force of friction is equal to frictional force to the right, and output shaft is not subjected to displacement at this time, as shown in Fig. 5 (b);When the first driver, second The second piezoelectric vibrator in the piezo-electric drive units of driver and third driver is generated by voltage driving to be become far from axis When shape, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes the second of crus secunda bearing low to rub The third high coefficient of friction material for wiping coefficient material and three-leg support is contacted with output shaft, the driving to the left that output shaft is subject to Frictional force is more than frictional force to the right, and output shaft generates a displacement to the left at this time, as shown in Fig. 5 (c).Therefore, first The second piezoelectric vibrator in the piezo-electric drive units of driver, the second driver and third driver is driven by alternating voltage When, driver realizes reverse drive.
The utility model realizes two-way linear driving, and with simple in structure, maintenance cost is low, the requirement to working face In relatively low and extension driver the advantages of the service life of piezoelectric ceramics.

Claims (1)

1. a kind of novel friction type linear piezoelectric actuator, including:Fixed shell (1) and central shaft (2), it is characterised in that also wrap Include structure it is identical and be evenly arranged in the surrounding of central shaft the first driver (3), the second driver (4) and third driving Device (5);First driver (3) includes first end side connecting plate (31), the first piezo-electric drive units (32), piezoelectric vibrator company Fishplate bar (33), the second piezo-electric drive units (34) and second end side connecting plate (35) and each component is sequentially connected, the first end Side connecting plate (31) and second end side connecting plate (35) are connect with fixed shell (1) respectively;The wherein described first Piezoelectric Driving list First (32) by the first piezoelectric vibrator (321), the second piezoelectric vibrator (322), the first support leg (323), the second support leg (324) and Third support leg (325) forms, and first piezoelectric vibrator (321) is pasted onto structure on Rectangular Elastic matrix by piezoelectric sheet material At second piezoelectric vibrator (322) is identical with the first piezoelectric vibrator (321) structure and two piezoelectric vibrators are connected, described First support leg (323) one end is vertically connected under the first piezoelectric vibrator (321) and first end side connecting plate (31) connecting pin Surface, the other end are the first foot bearing (3231), and the first foot bearing (3231) is by the first low friction coefficient materials (32311) It is combined with the first high coefficient of friction material (32312) and outer end face is arc, described second support leg (324) one end is vertical It is arranged in the lower surface of the first piezoelectric vibrator (321) and the second piezoelectric vibrator (322) connecting pin, the other end is by the second low friction The crus secunda bearing (3241) that coefficient material is constituted, described third support leg (325) one end is arranged vertically on the second piezoelectric vibrator (322) with the lower surface of first piezoelectric vibrator connecting plate (33) connecting pin, the other end is by third high coefficient of friction material (32511) and the three-leg support (3251) that is combined of third low friction coefficient materials (32512), third height friction system Number material (32511) is identical with the first high coefficient of friction material (32312) and is arranged in close to the second support leg (324) Side, first low friction coefficient materials (32311), the second low friction coefficient materials and third low friction coefficient materials (32512) identical;Second piezo-electric drive units (34) are identical with the first piezo-electric drive units (32) structure.
CN201820050261.8U 2018-01-12 2018-01-12 A kind of novel friction type linear piezoelectric actuator Withdrawn - After Issue CN207743900U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820050261.8U CN207743900U (en) 2018-01-12 2018-01-12 A kind of novel friction type linear piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820050261.8U CN207743900U (en) 2018-01-12 2018-01-12 A kind of novel friction type linear piezoelectric actuator

Publications (1)

Publication Number Publication Date
CN207743900U true CN207743900U (en) 2018-08-17

Family

ID=63121665

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820050261.8U Withdrawn - After Issue CN207743900U (en) 2018-01-12 2018-01-12 A kind of novel friction type linear piezoelectric actuator

Country Status (1)

Country Link
CN (1) CN207743900U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108063564A (en) * 2018-01-12 2018-05-22 吉林大学 A kind of novel friction type linear piezoelectric actuator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108063564A (en) * 2018-01-12 2018-05-22 吉林大学 A kind of novel friction type linear piezoelectric actuator
CN108063564B (en) * 2018-01-12 2023-12-01 吉林大学 Novel friction type linear piezoelectric driver

Similar Documents

Publication Publication Date Title
CN1027667C (en) Piezoelectric actuator
CN105871248B (en) A kind of directional driver with compound foot bearing
CN103701358B (en) Balance weight type variable contact force piezoelectric motor
CN105846714B (en) A kind of step piezoelectric motor
CN109889085A (en) The ultraprecise three-freedom planar motion platform and its motivational techniques of Piezoelectric Driving
CN103001532A (en) Surface-mounted longitudinal and torsion modal compound ultrasonic motor
CN207743900U (en) A kind of novel friction type linear piezoelectric actuator
CN207801783U (en) A kind of novel soft piezoelectric actuator
CN108712103B (en) Impact type piezoelectric rotary motor
CN207743899U (en) A kind of bidirectional drive with compound foot bearing
CN105827147B (en) A kind of inertial piezoelectric motor
CN108063564A (en) A kind of novel friction type linear piezoelectric actuator
CN105846719B (en) A kind of mutative damp piezoelectric actuator
CN205666773U (en) Variable damping piezo -actuator
CN207801784U (en) A kind of branched two-way piezoelectric rotary driver of support
CN106059377B (en) A kind of step piezoelectric driver
CN104124891A (en) Piezoelectric vibrator and precise displacement platform comprising same
CN205666764U (en) Step -by -step piezo -actuator
CN207801782U (en) A kind of multiple pressure electric tachometer indicator bidirectional rotation driver
CN207743897U (en) A kind of two-way piezoelectric actuator
CN207766157U (en) A kind of branched two-way piezoelectric actuator of support
CN207743898U (en) A kind of multiple pressure electric tachometer indicator bidirectional drive
CN205666768U (en) Piezoelectric motor with half falcate elastomer
CN205666765U (en) Directional driver with compound foot support
CN108063563A (en) A kind of two-way piezoelectric actuator

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20201104

Address after: Room 704a-1, Huigu building, 1357 Jinhu Road, high tech Zone, Changchun City, Jilin Province

Patentee after: CHANGCHUN SHANGYUAN TECHNOLOGY DEVELOPMENT Co.,Ltd.

Address before: 130012 Changchun Qianjin Street, Jilin, No. 2699

Patentee before: Jilin University

TR01 Transfer of patent right
AV01 Patent right actively abandoned

Granted publication date: 20180817

Effective date of abandoning: 20231201

AV01 Patent right actively abandoned

Granted publication date: 20180817

Effective date of abandoning: 20231201

AV01 Patent right actively abandoned
AV01 Patent right actively abandoned