CN108063564A - A kind of novel friction type linear piezoelectric actuator - Google Patents
A kind of novel friction type linear piezoelectric actuator Download PDFInfo
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- CN108063564A CN108063564A CN201810029509.7A CN201810029509A CN108063564A CN 108063564 A CN108063564 A CN 108063564A CN 201810029509 A CN201810029509 A CN 201810029509A CN 108063564 A CN108063564 A CN 108063564A
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- 239000000463 material Substances 0.000 claims abstract description 59
- 210000002414 leg Anatomy 0.000 claims description 28
- 210000001699 lower leg Anatomy 0.000 claims description 28
- 239000002783 friction material Substances 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 description 13
- 230000003068 static effect Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 208000032365 Electromagnetic interference Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
- H02N2/007—Materials
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention relates to a kind of novel friction type linear piezoelectric actuator, including:Fixed shell and central shaft, first driver of surrounding that is identical characterized by further comprising structure and being evenly arranged in central shaft, second driver and the 3rd driver, during work, fixed shell position is fixed, each piezoelectric vibrator is subject to the effect of the driving voltage of a phase bit to generate periodically deformation in driving unit, since foot bearing is subject to the power of Piezoelectric Driving and the frictional force collective effect of output shaft to generate reversing for low-angle in driving unit, realize that the material of different coefficients of friction is alternately contacted with output shaft, so as to make one step-length of output shaft directed movement in a drive cycle, the final directed driven for realizing output shaft.The present invention realizes bi-directional drive, and has the advantages that the service life that simple in structure, maintenance cost is low, the requirement to working face is relatively low and extends piezoelectric ceramics in driver.
Description
Technical field
The invention belongs to Piezoelectric Driving fields, and in particular to a kind of novel friction type linear piezoelectric actuator.
Background technology
The performance of driver directly affects the performance of automation equipment, since piezoelectric drive element has small, response
Speed is fast, controllable precision is high, conversion efficiency is high and without superior functions such as electromagnetic interferences, in ultraprecise instrument, Micro-Robot, precision
The fields such as positioning and biomedicine are widely used.Piezoelectric Driving is broadly divided into linear drives and rotation driving, and piezoelectricity is straight
Line driving mainly has piezoelectric inertia driving and bionical two class of driving, wherein the mainly imitative looper type creeping motion type driving of bionical driving,
This driving method needs multiple piezoelectricity clampers to stack, and cost is higher, at the same need the even multistage displacement amplifying mechanism of level-one and
Interpreter mechanism is moved, structure is complex;Piezoelectric inertia driving mainly has electric-controlled type with frictionally, and electric-controlled type is mainly using non-
Symmetrical drive signal realizes driving, therefore control system is complicated.The driving of piezoelectricity friction formula has that driving structure is simple, drive mechanism
The advantages that novel and drive signal is simply easily controllable carries out in-depth study to piezoelectricity friction formula driver and is beneficial to piezoelectricity
The further promotion and application of driver.
The content of the invention
It is complex in order to solve current linear piezoelectric actuator structure, mostly with working face rigid contact, to working environment
It is required that high, the problem of control system is complicated, it is proposed that a kind of novel friction type linear piezoelectric actuator, the driver is by set casing
Body, central shaft are identical with structure and are evenly arranged in the first driver of the surrounding of central shaft, the second driver and the 3rd
Driver forms.Wherein:First driver includes first end side connecting plate, the first piezo-electric drive units, piezoelectric vibrator and connects
Fishplate bar, the second piezo-electric drive units and second end side connecting plate and each component is sequentially connected, the first end side connecting plate and
Two end connecting plates are connected respectively with fixed shell;Wherein described first piezo-electric drive units are by the first piezoelectric vibrator, the second pressure
Electric tachometer indicator, the first support leg, the second support leg and the 3rd support leg composition, first piezoelectric vibrator are glued by piezoelectric sheet material
It is attached on Rectangular Elastic matrix and forms, second piezoelectric vibrator is identical with the first piezoelectric vibrator structure and two piezoelectric vibrators
It is connected, described first support leg one end is vertically connected on the lower surface of the first piezoelectric vibrator and first end side connecting plate connecting pin,
The other end is the first foot bearing, and the first foot bearing is compound by the first low friction coefficient materials and the first high coefficient of friction material
It forms and outer end face is arc, described second support leg one end is arranged vertically on the first piezoelectric vibrator and the connection of the second piezoelectric vibrator
The lower surface at end, the other end are the crus secunda bearing being made of the second low friction coefficient materials, and described 3rd support leg one end is hung down
The straight lower surface for being arranged in the second piezoelectric vibrator and piezoelectric vibrator connecting plate connecting pin, the other end are by the 3rd great friction coefficient material
The three-leg support that material and the 3rd low friction coefficient materials are combined, the 3rd high coefficient of friction material and the first high friction
Coefficient material is identical and is arranged in close to the second support leg one side, and first low friction coefficient materials, second low rub
It wipes coefficient material and the 3rd low friction coefficient materials is identical;Second piezo-electric drive units and the first piezo-electric drive units
Structure is identical.
During work, fixed shell position is fixed, and each piezoelectric vibrator is subject to the driving voltage of a phase bit in driving unit
Effect generates periodically deformation, in driving unit due to foot bearing be subject to Piezoelectric Driving power and output shaft frictional force it is common
Effect generates the torsion of low-angle, realizes that the material of different coefficients of friction is alternately contacted with output shaft, so as to a driving week
Make one step-length of output shaft directed movement in phase, the final directed driven for realizing output shaft.The driver forward drive principle is such as
Shown in Fig. 4:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 4 (a);When the first driver, second
The first piezoelectric vibrator in the piezo-electric drive units of driver and the 3rd driver is generated be subject to voltage driving to be become by axial ray
During shape, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first of the first foot bearing low to rub
The second low friction coefficient materials for wiping coefficient material and crus secunda bearing are contacted with output shaft, the driving to the right that output shaft is subject to
Frictional force is equal to frictional force to the left, and output shaft is not subjected to displacement at this time, as shown in Fig. 4 (b);When the first driver, second drive
The first piezoelectric vibrator in the piezo-electric drive units of dynamic device and the 3rd driver is generated be subject to voltage driving to be deformed away from axis
When, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first high friction of the first foot bearing
Second low friction coefficient materials of coefficient material and crus secunda bearing are contacted with output shaft, and the driving to the right that output shaft is subject to rubs
Power is wiped more than frictional force to the left, the displacement of output shaft generation at this time to the right, as shown in Fig. 4 (c).Therefore, in each driving
When first piezoelectric vibrator of unit is subject to the alternating voltage to drive, driver realizes forward drive.The driver reverse drive is former
Reason is as shown in Figure 5:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 5 (a);When the first driver,
The second piezoelectric vibrator in the piezo-electric drive units of second driver and the 3rd driver is subject to voltage driving to generate by axial ray
Deformation when, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes crus secunda bearing second low
3rd low friction coefficient materials of friction coefficient material and three-leg support are contacted with output shaft, the drive to the left that output shaft is subject to
Kinetic force of friction is equal to frictional force to the right, and output shaft is not subjected to displacement at this time, as shown in Fig. 5 (b);When the first driver, second
The second piezoelectric vibrator in the piezo-electric drive units of driver and the 3rd driver is generated be subject to voltage driving to be become away from axis
During shape, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes the second of crus secunda bearing low to rub
The 3rd high coefficient of friction material for wiping coefficient material and three-leg support is contacted with output shaft, the driving to the left that output shaft is subject to
Frictional force is more than frictional force to the right, and output shaft generates a displacement to the left at this time, as shown in Fig. 5 (c).Therefore, first
The second piezoelectric vibrator in the piezo-electric drive units of driver, the second driver and the 3rd driver is subject to alternating voltage to drive
When, driver realizes reverse drive.
The present invention realize two-way linear driving, and with it is simple in structure, maintenance cost is low, the requirement to working face is relatively low
The advantages of with the service life of piezoelectric ceramics in driver is extended.
To achieve these goals, the present invention uses following technical scheme:
A kind of novel friction type linear piezoelectric actuator of the present invention, the driver are complete by fixed shell, central shaft and structure
The first driver, the second driver and the 3rd driver composition of surrounding that is exactly the same and being evenly arranged in central shaft.Wherein:Institute
Stating the first driver includes first end side connecting plate, the first piezo-electric drive units, piezoelectric vibrator connecting plate, the second Piezoelectric Driving list
Member is sequentially connected with second end side connecting plate and each component, and the first end side connecting plate and second end side connecting plate are respectively with consolidating
Fixed shell connects;Wherein described first piezo-electric drive units are by the first piezoelectric vibrator, the second piezoelectric vibrator, the first support leg,
Two support legs and the 3rd support leg composition, first piezoelectric vibrator are pasted onto structure on Rectangular Elastic matrix by piezoelectric sheet material
Into second piezoelectric vibrator is identical with the first piezoelectric vibrator structure and two piezoelectric vibrators are connected, first support leg
One end is vertically connected on the lower surface of the first piezoelectric vibrator and first end side connecting plate connecting pin, and the other end is the first foot bearing,
The first foot bearing is combined by the first low friction coefficient materials and the first high coefficient of friction material and outer end face is arc,
Described second support leg one end is arranged vertically on the lower surface of the first piezoelectric vibrator and the second piezoelectric vibrator connecting pin, and the other end is
The crus secunda bearing being made of the second low friction coefficient materials, described 3rd support leg one end are arranged vertically on the second piezoelectric vibrator
With the lower surface of piezoelectric vibrator connecting plate connecting pin, the other end is by the 3rd high coefficient of friction material and the 3rd low-friction coefficient material
Expect the three-leg support being combined, the 3rd high coefficient of friction material is identical and equal with the first high coefficient of friction material
It is disposed adjacent to the second support leg one side, first low friction coefficient materials, the second low friction coefficient materials and the 3rd low rub
It is identical to wipe coefficient material;Second piezo-electric drive units are identical with the first piezo-electric drive units structure.
During work, fixed shell position is fixed, and each piezoelectric vibrator is subject to the driving voltage of a phase bit in driving unit
Effect generates periodically deformation, in driving unit due to foot bearing be subject to Piezoelectric Driving power and output shaft frictional force it is common
Effect generates the torsion of low-angle, realizes that the material of different coefficients of friction is alternately contacted with output shaft, so as to a driving week
Make one step-length of output shaft directed movement in phase, the final directed driven for realizing output shaft.The driver forward drive principle is such as
Shown in Fig. 4:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 4 (a);When the first driver, second
The first piezoelectric vibrator in the piezo-electric drive units of driver and the 3rd driver is generated be subject to voltage driving to be become by axial ray
During shape, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first of the first foot bearing low to rub
The second low friction coefficient materials for wiping coefficient material and crus secunda bearing are contacted with output shaft, the driving to the right that output shaft is subject to
Frictional force is equal to frictional force to the left, and output shaft is not subjected to displacement at this time, as shown in Fig. 4 (b);When the first driver, second drive
The first piezoelectric vibrator in the piezo-electric drive units of dynamic device and the 3rd driver is generated be subject to voltage driving to be deformed away from axis
When, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first high friction of the first foot bearing
Second low friction coefficient materials of coefficient material and crus secunda bearing are contacted with output shaft, and the driving to the right that output shaft is subject to rubs
Power is wiped more than frictional force to the left, the displacement of output shaft generation at this time to the right, as shown in Fig. 4 (c).Therefore, in each driving
When first piezoelectric vibrator of unit is subject to the alternating voltage to drive, driver realizes forward drive.The driver reverse drive is former
Reason is as shown in Figure 5:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 5 (a);When the first driver,
The second piezoelectric vibrator in the piezo-electric drive units of second driver and the 3rd driver is subject to voltage driving to generate by axial ray
Deformation when, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes crus secunda bearing second low
3rd low friction coefficient materials of friction coefficient material and three-leg support are contacted with output shaft, the drive to the left that output shaft is subject to
Kinetic force of friction is equal to frictional force to the right, and output shaft is not subjected to displacement at this time, as shown in Fig. 5 (b);When the first driver, second
The second piezoelectric vibrator in the piezo-electric drive units of driver and the 3rd driver is generated be subject to voltage driving to be become away from axis
During shape, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes the second of crus secunda bearing low to rub
The 3rd high coefficient of friction material for wiping coefficient material and three-leg support is contacted with output shaft, the driving to the left that output shaft is subject to
Frictional force is more than frictional force to the right, and output shaft generates a displacement to the left at this time, as shown in Fig. 5 (c).Therefore, first
The second piezoelectric vibrator in the piezo-electric drive units of driver, the second driver and the 3rd driver is subject to alternating voltage to drive
When, driver realizes reverse drive.
The present invention realize two-way linear driving, and with it is simple in structure, maintenance cost is low, the requirement to working face is relatively low
The advantages of with the service life of piezoelectric ceramics in driver is extended.
Description of the drawings
Fig. 1 is a kind of novel friction type linear piezoelectric actuator three dimensional structure diagram of the present invention.
Fig. 2 is a kind of novel friction type linear piezoelectric actuator left view figure structure schematic representation of the present invention.
Fig. 3 is a kind of novel friction type linear piezoelectric actuator piezo-electric drive units structure diagram of the present invention.
Fig. 4 is a kind of novel friction type linear piezoelectric actuator forward drive process schematic of the present invention.
Fig. 5 is a kind of novel friction type linear piezoelectric actuator reverse drive process schematic of the present invention.
Specific embodiment
With reference to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, a kind of novel friction type linear piezoelectric actuator of the present invention is by set casing
Body 1, central shaft 2, the first driver 3, the second driver 4 and the 3rd driver 5 form, wherein:
First driver 3 includes first end side connecting plate 31, the first piezo-electric drive units 32, piezoelectric vibrator connecting plate
33rd, the second piezo-electric drive units 34 and second end side connecting plate 35 and each component is sequentially connected, the first end side connecting plate 31
It is connected respectively with fixed shell 1 with second end side connecting plate 35;Wherein described first piezo-electric drive units 32 are shaken by the first piezoelectricity
Sub 321, second piezoelectric vibrator 322, the first support leg 323, the second support leg 324 and the 3rd support leg 325 form, and described first
Piezoelectric vibrator 321 is pasted onto on Rectangular Elastic matrix by piezoelectric sheet material and formed, and second piezoelectric vibrator 322 and first is pressed
321 structure of electric tachometer indicator is identical and two piezoelectric vibrators are connected, and described first support leg, 323 one end is vertically connected on the first piezoelectricity
The lower surface of oscillator 321 and 31 connecting pin of first end side connecting plate, the other end are the first foot bearing 3231, the first foot bearing
3231 be combined by the first low friction coefficient materials 32311 and the first high coefficient of friction material 32312 and outer end face be arc,
Described second support leg, 324 one end is arranged vertically on the following table of 322 connecting pin of the first piezoelectric vibrator 321 and the second piezoelectric vibrator
Face, the other end are the crus secunda bearing 3241 being made of the second low friction coefficient materials, and described 3rd support leg, 325 one end is vertical
The lower surface of 33 connecting pin of the second piezoelectric vibrator 322 and the first piezoelectric vibrator connecting plate is arranged in, the other end is to be rubbed by the 3rd height
The three-leg support 3251 that 32511 and the 3rd low friction coefficient materials 32512 of coefficient material are combined is wiped, the 3rd height rubs
It is identical with the first high coefficient of friction material 32312 and be arranged in close second support leg 324 1 to wipe coefficient material 32511
Side, first low friction coefficient materials 32311, the second low friction coefficient materials and the 3rd low friction coefficient materials 32512 are complete
It is exactly the same;Second piezo-electric drive units 34 are identical with 32 structure of the first piezo-electric drive units.
During work, fixed shell position is fixed, and each piezoelectric vibrator is subject to the driving voltage of a phase bit in driving unit
Effect generates periodically deformation, in driving unit due to foot bearing be subject to Piezoelectric Driving power and output shaft frictional force it is common
Effect generates the torsion of low-angle, realizes that the material of different coefficients of friction is alternately contacted with output shaft, so as to a driving week
Make one step-length of output shaft directed movement in phase, the final directed driven for realizing output shaft.The driver forward drive principle is such as
Shown in Fig. 4:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 4 (a);When the first driver, second
The first piezoelectric vibrator in the piezo-electric drive units of driver and the 3rd driver is generated be subject to voltage driving to be become by axial ray
During shape, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first of the first foot bearing low to rub
The second low friction coefficient materials for wiping coefficient material and crus secunda bearing are contacted with output shaft, the driving to the right that output shaft is subject to
Frictional force is equal to frictional force to the left, and output shaft is not subjected to displacement at this time, as shown in Fig. 4 (b);When the first driver, second drive
The first piezoelectric vibrator in the piezo-electric drive units of dynamic device and the 3rd driver is generated be subject to voltage driving to be deformed away from axis
When, the first foot bearing and crus secunda bearing of each driving unit, which generate low-angle torsion, causes the first high friction of the first foot bearing
Second low friction coefficient materials of coefficient material and crus secunda bearing are contacted with output shaft, and the driving to the right that output shaft is subject to rubs
Power is wiped more than frictional force to the left, the displacement of output shaft generation at this time to the right, as shown in Fig. 4 (c).Therefore, in each driving
When first piezoelectric vibrator of unit is subject to the alternating voltage to drive, driver realizes forward drive.The driver reverse drive is former
Reason is as shown in Figure 5:It does not deform when piezoelectric vibrator is not powered on, output shaft is static, as shown in Fig. 5 (a);When the first driver,
The second piezoelectric vibrator in the piezo-electric drive units of second driver and the 3rd driver is subject to voltage driving to generate by axial ray
Deformation when, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes crus secunda bearing second low
3rd low friction coefficient materials of friction coefficient material and three-leg support are contacted with output shaft, the drive to the left that output shaft is subject to
Kinetic force of friction is equal to frictional force to the right, and output shaft is not subjected to displacement at this time, as shown in Fig. 5 (b);When the first driver, second
The second piezoelectric vibrator in the piezo-electric drive units of driver and the 3rd driver is generated be subject to voltage driving to be become away from axis
During shape, the crus secunda bearing and three-leg support of each driving unit, which generate low-angle torsion, causes the second of crus secunda bearing low to rub
The 3rd high coefficient of friction material for wiping coefficient material and three-leg support is contacted with output shaft, the driving to the left that output shaft is subject to
Frictional force is more than frictional force to the right, and output shaft generates a displacement to the left at this time, as shown in Fig. 5 (c).Therefore, first
The second piezoelectric vibrator in the piezo-electric drive units of driver, the second driver and the 3rd driver is subject to alternating voltage to drive
When, driver realizes reverse drive.
The present invention realize two-way linear driving, and with it is simple in structure, maintenance cost is low, the requirement to working face is relatively low
The advantages of with the service life of piezoelectric ceramics in driver is extended.
Claims (1)
1. a kind of novel friction type linear piezoelectric actuator includes:Fixed shell (1) and central shaft (2), it is characterised in that also wrap
Include structure it is identical and be evenly arranged in the first driver (3) of the surrounding of central shaft, the second driver (4) and the 3rd driving
Device (5);First driver (3) includes first end side connecting plate (31), the first piezo-electric drive units (32), piezoelectric vibrator and connects
Fishplate bar (33), the second piezo-electric drive units (34) and second end side connecting plate (35) and each component is sequentially connected, the first end
Side connecting plate (31) and second end side connecting plate (35) are connected respectively with fixed shell (1);Wherein described first Piezoelectric Driving list
First (32) by the first piezoelectric vibrator (321), the second piezoelectric vibrator (322), the first support leg (323), the second support leg (324) and
3rd support leg (325) forms, and first piezoelectric vibrator (321) is pasted onto structure on Rectangular Elastic matrix by piezoelectric sheet material
Into second piezoelectric vibrator (322) is identical with the first piezoelectric vibrator (321) structure and two piezoelectric vibrators are connected, described
First support leg (323) one end is vertically connected under the first piezoelectric vibrator (321) and first end side connecting plate (31) connecting pin
Surface, the other end are the first foot bearing (3231), and the first foot bearing (3231) is by the first low friction coefficient materials (32311)
It is combined with the first high coefficient of friction material (32312) and outer end face is arc, described second support leg (324) one end is vertical
The lower surface of the first piezoelectric vibrator (321) and the second piezoelectric vibrator (322) connecting pin is arranged in, the other end is by the second low friction
The crus secunda bearing (3241) that coefficient material is formed, described 3rd support leg (325) one end is arranged vertically on the second piezoelectric vibrator
(322) with the lower surface of first piezoelectric vibrator connecting plate (33) connecting pin, the other end is by the 3rd high coefficient of friction material
(32511) and the three-leg support (3251) that is combined of the 3rd low friction coefficient materials (32512), the described 3rd high friction system
Number material (32511) is identical with the first high coefficient of friction material (32312) and is arranged in close to the second support leg (324)
One side, first low friction coefficient materials (32311), the second low friction coefficient materials and the 3rd low friction coefficient materials
(32512) it is identical;Second piezo-electric drive units (34) are identical with the first piezo-electric drive units (32) structure.
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CN109104119A (en) * | 2018-09-12 | 2018-12-28 | 吉林大学 | A kind of inertial rotation driver with compound foot support |
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CN109104119A (en) * | 2018-09-12 | 2018-12-28 | 吉林大学 | A kind of inertial rotation driver with compound foot support |
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