CN108389603A - A kind of double composite and flexible parallelogram lindages - Google Patents
A kind of double composite and flexible parallelogram lindages Download PDFInfo
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- CN108389603A CN108389603A CN201810288164.7A CN201810288164A CN108389603A CN 108389603 A CN108389603 A CN 108389603A CN 201810288164 A CN201810288164 A CN 201810288164A CN 108389603 A CN108389603 A CN 108389603A
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- support members
- flexible
- voice coil
- flexible support
- coil motor
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention discloses a kind of double composite and flexible parallelogram lindages, include the outer framework being made of upper frame and lower frame, and flexible support members are equipped between upper frame and lower frame.Flexible support members are divided into two groups of inside group flexible support members and outside group flexible support members.It is connected with outside group flexible support members by holder in the voice coil motor stator of the voice coil motor as driving source that is internally provided with of outer framework, voice coil motor, the voice coil motor mover of voice coil motor is connected with inside group flexible support members.The present invention by two groups of flexible support members series systems by improving the effective linear route range of compliant mechanism, the parasitic displacement that single flexible unit generates is eliminated by parallel way, using voice coil motor electric current and line of force sexual intercourse, it can realize that big stroke, high-precision, the single-degree-of-freedom without parasitic displacement move along a straight line by conventional control mode.
Description
Technical field
It is specifically a kind of based on the double multiple of voice coil motor driving the present invention relates to the micro-nano positioning device of machinery field
Close flexible parallelogram lindage.
Background technology
Superhigh precision location technology is the key that precision manufactureing.And with the development of modern manufacturing industry, part is processed
Size requires and the positioning accuracy request of precision instrument has reached Nano grade, therefore realizes that micro-nano positioning is to push now
For the key of development of manufacturing.In addition to being applied to the fields such as precision manufactureing, accurate measurement, it is micro-nano be located in semiconductor manufacturing with
Assembly, biomedicine, nano impression, optical fiber align, data storage and reading and various precision optical instruments etc. have
It is widely applied.And flexible hinge is to realize micro-nano location tasks with the micro-nano locating platform that high performance motor is constituted
A kind of effective means has also obtained extensive research：Early sixties, National Bureau of Standards successfully have developed stroke be 0~
50 μm of one-dimensional micromotion platform, displacement driver are piezoelectric ceramics, and executing agency is flexible hinge, are mainly used in space flight neck
Domain.2005, South Korea Gwang-Ju et al. design using voice coil motor as displacement driver, flexible hinge be executing agency one
Micromotion mechanism is tieed up, positioning accuracy can reach 0.5nm, but its stroke only has ± 10 μm.2008, Singapore scholar Teo
Et al. propose single-degree-of-freedom nanometer positioning device, using voice coil motor as displacement driver, using double-flexibility parallel four-bar structure
Displacement guiding mechanism as voice coil motor.
But existing micro-nano positioning device is difficult to reach Nano grade in positioning accuracy and meets big stroke again
Needs, and not only the motor also used with it related to the structure of flexible hinge is closely related for the performance of positioning device：Piezoelectricity
Ceramic brake device is to realize a kind of device of nanometer positioning, but its stroke can only achieve hundreds of microns；Magnetic levitation technology can
Nanometer positioning is realized in larger stroke, but its efficiency is very sensitive for load variation；Traditional voice coil motor response is fast,
Stroke is long, but its force constant is smaller, can only achieve 10N/A.In practical application, lack for high thrust, big stroke, high-performance
Flexible support structure needed for motor.
Invention content
The present invention is directed to state of the art, and provides a kind of double composite and flexible parallelogram lindages, is based on voice coil motor
Driving, realizes the big linear route and high position precision of flexible support structure.
Technical solution is used by the present invention solves above-mentioned technical problem：A kind of double composite and flexible parallelogram lindages,
Include the outer framework being made of upper frame and lower frame, flexible support members are equipped between upper frame and lower frame.Flexible support
Component is divided into two groups of inside group flexible support members and outside group flexible support members.In being internally provided with as driving for outer framework
The voice coil motor stator of the voice coil motor in source, voice coil motor is connected by holder with outside group flexible support members, voice coil electricity
The voice coil motor mover of machine is connected with inside group flexible support members.
The quantity of above-mentioned flexible support members is even number set.And flexible support members are divided into two parts, are symmetrically distributed in
At two opposition sides of outer framework, and each flexible support members parallel connection arrangement in every part.
The inside group flexible support members of above-mentioned each section and the quantity of outside group flexible support members are even number.
Above-mentioned each flexible support members include two flexible supporting units.Each flexible supporting unit includes a rectangle
Armed lever and two Performance of Right-Angle Flexure Hinge being in series by rectangle armed lever.
Above-mentioned outside group flexible support members connect two flexible supporting units by stator connecting piece, make corresponding one
Parallel-connection structure is formed to flexible supporting unit.Inside group flexible support members connect two flexible support lists by mover connector
Member makes corresponding a pair of of flexible supporting unit form parallel-connection structure.
The voice coil motor mover of above-mentioned voice coil motor connects inside by mover connector and organizes flexible support members.
Above-mentioned holder includes left side brackets and right side holder, and left side brackets and right side holder pass through stator connecting piece respectively
It is connected with corresponding outside group flexible support members.
Above-mentioned left side brackets and right side holder connect and compose rigid entirety by bolt and voice coil motor lower plate, and prop up
Support outer framework.
Above-mentioned upper frame and lower frame are rectangular frame structure symmetrical above and below, and voice coil motor stator and voice coil motor are dynamic
Son is compact to be mounted on inside rectangular frame structure, and voice coil motor stator uses Halbach structure.
Above-mentioned flexible support members are the integral structure that linear incision mode is process.
Compared with prior art, the present invention is effective by the way that two groups of flexible support members series systems are improved compliant mechanism
Linear route range, be twice of common double parallel flexibility four-bar mechanism；Single flexible unit is eliminated by parallel way
The parasitic displacement of generation, and constitute compact-sized, the simple positioning device of control with voice coil motor assembling；Utilize voice coil electricity
Electromechanics stream and line of force sexual intercourse can realize big stroke, high-precision, the list without parasitic displacement freely by conventional control mode
Degree linear motion.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the embodiment of the present invention.
Fig. 2 is the front view of Fig. 1.
Fig. 3 is the dimensional structure diagram of the parallelogram lindage part in Fig. 1.
Specific implementation mode
Below by way of specific embodiment and attached drawing, double composite and flexible parallelogram lindages to the present invention and its corresponding drive
Dynamic device is further elaborated, but embodiments of the present invention are not limited to that.
Fig. 1 to Fig. 3 show the structural schematic diagram of the present invention.
Reference numeral therein is：Outside group flexible support members 11,12,13,14, inside group flexible support members 21,
22,23,24, Performance of Right-Angle Flexure Hinge 111, rectangle armed lever 112, stator connecting piece 311,312,313,314, mover connector 321,
322, lower frame 41, upper frame 42, left side brackets 51,53, right side holder 52,54, voice coil motor lower plate 61, on voice coil motor
Bottom plate 62, voice coil motor stator 63, voice coil motor mover 64.
The present invention double composite and flexible parallelogram lindages, it can be achieved that in plane one degree of freedom linear motion.It is double multiple
It includes the outer framework being made of upper frame 42 and lower frame 41 to close flexible parallelogram lindage, between upper frame 42 and lower frame 41
Equipped with flexible support members 11,12,13,14,21,22,23,24.Flexible support members 11,12,13,14,21,22,23,24 points
For inside group flexible support members 21,22,23,24 and outside group flexible support members 11,12,13,14 two groups.
It is Halbach structure sound used in the present embodiment in the voice coil motor as driving source that is internally provided with of outer framework
Enclose motor.Voice coil motor has response fast in the present invention, and thrust is big, feature simple in structure, includes mainly under voice coil motor
Bottom plate 61, voice coil motor upper plate 62, voice coil motor stator 63 and voice coil motor mover 64.
The voice coil motor stator 63 of voice coil motor is connected by holder with outside group flexible support members 11,12,13,14
It connects, the voice coil motor mover 64 of voice coil motor is connected with inside group flexible support members 21,22,23,24.
The quantity of flexible support members 11,12,13,14,21,22,23,24 is even number set.And flexible support members 11,
12,13,14,21,22,23,24 are divided into two parts, are symmetrically distributed at two opposition sides of outer framework, and each in every part
A flexible support members parallel connection arrangement.
The inside group flexible support members 21,22,23,24 and outside group flexible support members 11 of each section, 12,13,
14 quantity is even number.
Each flexible support members 11,12,13,14,21,22,23,24 include two flexible supporting units.It is each flexible
Support unit includes a rectangle armed lever 112 and two Performance of Right-Angle Flexure Hinge 111 being in series by rectangle armed lever 112.
Outside group flexible support members 11,12,13,14 are soft by the connection of stator connecting piece 311,312,313,314 two
Property support unit, so that corresponding a pair of of flexible supporting unit is formed parallel-connection structure.Inside group flexible support members 21,22,23,24
Two flexible supporting units are connected by mover connector 321,322, corresponding a pair of of flexible supporting unit is made to be formed and be coupled
Structure.
The voice coil motor mover 64 of voice coil motor connects inside by mover connector 321,322 and organizes flexible support members
21、22、23、24。
In the present invention, holder includes left side brackets 51,53 and right side holder 52,54, left side brackets 51,53 and right side branch
Frame 52,54 passes through stator connecting piece 311,312,313,314 and corresponding outside group flexible support members 11,12,13,14 respectively
It is connected.
Left side brackets 51,53 and right side holder 52,54 are connected and composed rigid whole by bolt and voice coil motor lower plate 61
Body, to realize effect that is fixed, supporting entire compliant mechanism.
Upper frame 42 and lower frame 41 are rectangular frame structure symmetrical above and below, and voice coil motor stator 63 and voice coil motor are dynamic
Son 64 is compact to be mounted on inside rectangular frame structure, and voice coil motor stator 63 uses Halbach structure.Upper frame 42 and lower frame
Frame 41 is connected by eight flexible support members 11,12,13,14,21,22,23,24, and as the secondary platform of mechanism
Flexible support members 11,12,13,14,21,22,23,24 are made to form parallel relationship.The frame knot of upper frame 42 and lower frame 41
Structure is that driving device voice coil motor has reserved installation space, improves entire mechanism compactedness.
Outside group flexible support members 11,12,13,14 make corresponding one by stator connecting piece 311,312,313,314
Parallel-connection structure is formed to flexible supporting unit, to eliminate the parasitic displacement of single flexible support unit generation.Each outside group
Flexible support members 11,12,13,14 form parallel-connection structure by outer framework, same each inside group flexible support members 21,
22,23,24 parallel-connection structure is also formed by outer framework, and makes above-mentioned two by the i.e. upper frame 42 of secondary platform and lower frame 41
Group parallel-connection structure formation is connected in series with, and is 2 times of former single parallel-connection structure stroke to improve entire mechanism effective travel.
Double composite and flexible parallelogram lindages of the present invention have such as compared to traditional bearing, the transmission mechanisms such as guide rail
Lower advantage：1. there is the compliant mechanism gapless, friction free feature to reduce the physical factor for influencing device work, effectively
Ground improves its positioning accuracy；2. the displacement of the compliant mechanism stress and generation is linear relationship, control difficulty is reduced；3. should
Mechanism structure is simple, easy to process, and wire cutting mode can be used manufactures and be integrated.
The present invention improves effective linear stroke range of double composite and flexible parallelogram lindages by two groups of series systems,
The parasitic displacement that single flexible unit generates is eliminated by parallel way, and compact-sized, control letter is assembled into voice coil motor
Single positioning device；Using voice coil motor electric current and line of force sexual intercourse, big stroke, height can be realized by conventional control mode
Precision, the single-degree-of-freedom linear motion without parasitic displacement.
Above example only expresses a kind of preferred embodiment of the present invention, comes for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.
Claims (10)
1. a kind of double composite and flexible parallelogram lindages, it is characterized in that：Include being made of upper frame (42) and lower frame (41)
Outer framework, between the upper frame (42) and lower frame (41) be equipped with flexible support members (11,12,13,14,21,22,23,
24)；The flexible support members (11,12,13,14,21,22,23,24) be divided into inside group flexible support members (21,22,23,
And two groups of outside group flexible support members (11,12,13,14) 24)；It is internally provided with the sound as driving source in the outer framework
Enclose motor, the voice coil motor stator (63) of the voice coil motor by holder and the outside group flexible support members (11,
12,13,14) it is connected, the voice coil motor mover (64) of the voice coil motor and the inside group flexible support members (21,
22,23,24) it is connected.
2. double composite and flexible parallelogram lindages according to claim 1, it is characterised in that：The flexible support members
The quantity of (11,12,13,14,21,22,23,24) be even number set, and flexible support members (11,12,13,14,21,22,23,
24) it is divided into two parts, is symmetrically distributed at two opposition sides of outer framework, and each flexible support members are parallel in every part
Parallel arrangement.
3. double composite and flexible parallelogram lindages according to claim 2, it is characterised in that：The inside group of each section is soft
Property support component (21,22,23,24) and the quantity of outside group flexible support members (11,12,13,14) are even number.
4. double composite and flexible parallelogram lindages according to claim 1, it is characterised in that：Each flexible support members
(11,12,13,14,21,22,23,24) include two flexible supporting units；Each flexible supporting unit includes a rectangular arm
Bar (112) and two Performance of Right-Angle Flexure Hinge (111) being in series by rectangle armed lever (112).
5. double composite and flexible parallelogram lindages according to claim 4, it is characterised in that：The outside group flexibility branch
Support component (11,12,13,14) connects two flexible supporting units by stator connecting piece (311,312,313,314), makes correspondence
A pair of of flexible supporting unit formed parallel-connection structure；The inside group flexible support members (21,22,23,24) pass through mover
Connector (321,322) connects two flexible supporting units, and corresponding a pair of of flexible supporting unit is made to form parallel-connection structure.
6. double composite and flexible parallelogram lindages according to claim 5, it is characterised in that：The voice coil of the voice coil motor
Electric mover (64) passes through mover connector (321,322) the connection inside group flexible support members (21,22,23,24).
7. double composite and flexible parallelogram lindages according to claim 6, it is characterised in that：The holder includes left side
Holder (51,53) and right side holder (52,54), the left side brackets (51,53) and right side holder (52,54) pass through stator respectively
Connector (311,312,313,314) is connected with corresponding outside group flexible support members (11,12,13,14).
8. double composite and flexible parallelogram lindages according to claim 7, it is characterised in that：The left side brackets (51,
53) and right side holder (52,54) connects and composes rigid entirety by bolt and voice coil motor lower plate (61), and supports described
Outer framework.
9. double composite and flexible parallelogram lindages according to claim 1, it is characterised in that：The upper frame (42) and under
Frame (41) is rectangular frame structure symmetrical above and below, the voice coil motor stator (63) and voice coil motor mover (64) compact peace
Mounted in the inside of rectangular frame structure, and the voice coil motor stator (63) uses Halbach structure.
10. double composite and flexible parallelogram lindages according to claim 1, it is characterised in that：The flexible support members
(11,12,13,14,21,22,23,24) integral structure being process for linear incision mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810288164.7A CN108389603B (en) | 2018-04-03 | 2018-04-03 | Double-composite flexible parallel four-bar mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810288164.7A CN108389603B (en) | 2018-04-03 | 2018-04-03 | Double-composite flexible parallel four-bar mechanism |
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| CN108389603A true CN108389603A (en) | 2018-08-10 |
| CN108389603B CN108389603B (en) | 2023-09-01 |
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| CN201810288164.7A Active CN108389603B (en) | 2018-04-03 | 2018-04-03 | Double-composite flexible parallel four-bar mechanism |
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