CN103557412B - Bipolar two-dimensional Grazing condition high-precision servo platform - Google Patents
Bipolar two-dimensional Grazing condition high-precision servo platform Download PDFInfo
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- CN103557412B CN103557412B CN201310545708.0A CN201310545708A CN103557412B CN 103557412 B CN103557412 B CN 103557412B CN 201310545708 A CN201310545708 A CN 201310545708A CN 103557412 B CN103557412 B CN 103557412B
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Abstract
The invention discloses a kind of bipolar two-dimensional Grazing condition high-precision servo platform, comprise pedestal, macro-moving stage, first, second voice coil motor, micromotion platform, first, second piezoelectric bimorph, first, second displacement transducer and the controller be connected with described voice coil motor, piezoelectric bimorph and displacement transducer.The present invention adopts Grazing condition structure, by macro-moving stage and micromotion platform in series, grand moving all adopts parallel-connection structure with micromotion platform, respectively by voice coil motor and piezoelectric bimorph Direct driver, relies on the grand dynamic and micromotion platform guide rail drive motion based on flexible hinge structure, do not need assembling, gapless, without friction, does not need lubrication, at guarantee mobile decoupling with while improving bearing capacity, realize Long Distances, high speed and high-precision motion.First, second displacement transducer is measured the displacement signal of servo platform X and Y-direction respectively and is fed back to controller, realizes the full closed loop control of servo platform.
Description
Technical field
The present invention relates to a kind of two-dimentional elaborate servo platform, particularly a kind of based on voice coil motor and piezoelectric bimorph double drive, the Grazing condition high-precision servo platform of Long Distances motion in two-dimensional space can be realized.
Background technique
At present, in recent years, along with continuous progress that is scientific and technical and industrial technology, the field develop rapidlys such as micro-electronic manufacturing, ultraprecise machine-building, micro robot operation, precision measuremnt optical instrument and biomedical operation, the significance of high-accuracy kinetic control system becomes increasingly conspicuous, in the urgent need to location and the operation system of Long Distances (cm level), high speed (m/s level) and highi degree of accuracy (submicron order and nanometer).Therefore, the status of the ultraprecise motion servo platform of Long Distances becomes increasingly conspicuous, to the favor of the extremely domestic and international researcher of its research.
Conventional two-dimensional translation highi degree of accuracy mini positioning platform many employings cascaded structure, by two one dimensions moving platform longitudinal stack together or with series connection mode the moving platform of a direction is nested in the platform of another one direction, realize two dimensional motion, such second platform is as the load of first platform, add the inertia of moving element, limit speed and the acceleration of whole system.Existing parallel-connection structure two-dimensional micromotion stage is many only adopts the driver that electric rotating machine+ball screw, linear electric motor or voice coil motor etc. are single, although the range of movement of Long Distances can be realized, but its positioning precision only can reach micron or submicron order, and speed of response is lower.Although adopt the locating platform of the microdrives such as piezoelectric constant can reach nanometer location, its stroke is little, generally can only reach tens to hundreds of micron; Although the locating platform that employing servomotor, piezoelectricity looper drive can realize the motion of Long Distances, its movement velocity is too low.Therefore, for realizing nanometer-level ultra-precise motion and the positioning action of Long Distances, the grand micro-dual-positioning mode of many employings, namely on the basis of grand dynamic locating platform, the micromotion platform of superposition or nested Piezoelectric Ceramic.
Chinese patent CN1731081A proposes the plane positioning system of the large travel high-speed nano-precision that a kind of macro/micro drives, this navigation system adopts voice coil motor as grand driver, micromotion platform on macro-moving stage installs piezoelectric constant as microdrive, the positioning error of high frequency dynamic compensating system, and ensure that system realizes nano level positioning precision while realizing Centimeter Level range of movement by the full closed-loop position control of system.But the macro-moving stage of this platform adopts cascaded structure, and adopts linear motion guide as guide mechanism, make platform there is larger frictional force, limit the raising of locating platform speed and precision simultaneously; Its micromotion platform adopts piezoelectric ceramic actuator Direct driver, produces larger active force to macro-moving stage, makes to there are coupled motions between grand, microfluidic platform.
Chinese patent CN102490021A proposes a kind of grand/micro-Two-dimensional Position moving stage, this platform adopts cascaded structure, macro-moving stage is by micrometer Direct driver, micro-displacement platform adopts " ten " font layout, driven by the hydraulic driver based on resiliently deformable be fixed on micromotion platform, it drives resolution generally can reach 10nm, thus can realize the submicron order precise motion of stroke at 10-20mm.But the macro-moving stage of this platform adopts guide rail as guide mechanism, makes platform frictional force, and uses the micrometer of manual tune as driver, use inconvenience, and be of limited application; Although hydraulic driver has, rigidity is large, the linearity good, without hysteresis and the strong advantage of antijamming capability, its resolution is lower, cannot realize nano level precise motion, and there are coupled motions between grand, microfluidic platform.
Chinese patent CN102543217A proposes a kind of macro and micro servo two dimension integral type mini positioning platform, this platform is by adopting grand micro-bipolar platform of parallel-connection structure and full compliant structure in series, macro-moving stage, by voice coil motor Direct driver, can provide the positioning precision of Long Distances range of movement and submicron order; Micromotion platform is driven by displacement amplifying mechanism by piezoelectric constant, reduces the active force to macro-moving stage, decreases the sports coupling between micromotion platform and macro-moving stage, and system accuracy is brought up to nanometer.But this platform is the coupled motions reducing micromotion platform and macro-moving stage, its micromotion platform adopts bridge-type enlarger, although by amplifying output displacement, reduce ouput force, thus reduce the active force of micromotion platform to macro-moving stage, but the stress of flexible hinge also increases thereupon, easily cause the fatigue ruption of hinge.
Summary of the invention
The object of the invention is for overcoming the technical deficiency existed in the two-dimensional stage of existing macro-micro dual-drive, a kind of bipolar two-dimensional Grazing condition high-precision servo platform is provided, it has compact structure, mobile decoupling, precision is high, stroke is large and the advantage such as fast response time, can be widely used in precision positioning and tracking field.
For achieving the above object, the present invention adopts following technical proposals:
A kind of bipolar two-dimensional Grazing condition high-precision servo platform, it comprises pedestal, macro-moving stage, first, second voice coil motor, micromotion platform, first, second piezoelectric bimorph, first, second displacement transducer and the controller be connected with described voice coil motor, piezoelectric bimorph and displacement transducer; Described pedestal, macro-moving stage and micromotion platform are interconnective integral structure, are formed by one piece of sheet fabrication; Described macro-moving stage is driven by first, second voice coil motor; Described micromotion platform is embedded in macro-moving stage, together moves with macro-moving stage, and micromotion platform is by first, second piezoelectric bimorph Direct driver be attached on micromotion platform guide rail.
Described macro-moving stage comprises grand dynamic output stage and some macro-moving stage guide rails be arranged in parallel.
Described macro-moving stage guide rail adopts Grazing condition structure, is composed in parallel by the identical first, second, third, fourth macro-moving stage guide rail of structure, relies on the resiliently deformable of material by the Movement transmit of voice coil motor to grand dynamic output stage.
Described first, second, third, fourth macro-moving stage guide rail is connected with four sides of grand dynamic output stage respectively, and is symmetrically distributed in the surrounding of grand dynamic output stage.
Described first macro-moving stage guide rail is made up of first, second flexible hinge, one end of first macro-moving stage guide rail is connected with the first voice coil motor by the first connecting plate, the other end is connected with grand dynamic output stage by the flexible board reed of the first flexible hinge, in addition, the second flexible hinge is connected with pedestal by flexible board reed; Described second macro-moving stage guide rail is made up of the 3rd, the 4th flexible hinge, and wherein the 3rd flexible hinge is connected with grand dynamic output stage by flexible board reed, and the 4th flexible hinge is connected with pedestal by flexible board reed; Described 3rd macro-moving stage guide rail is made up of the 5th, the 6th flexible hinge, 3rd macro-moving stage guide rail one end is connected with the second voice coil motor by the second connecting plate, the other end is connected with grand dynamic output stage by the flexible board reed of the 5th flexible hinge, in addition, the 6th flexible hinge is connected with pedestal by flexible board reed; Described 4th macro-moving stage guide rail is made up of the 7th, the 8th flexible hinge, and wherein the 7th flexible hinge is connected with grand dynamic output stage by flexible board reed, and the 8th flexible hinge is connected with pedestal by flexible board reed.
Described first, second, third, fourth, the 5th, the 6th, the 7th, the 8th flexible hinge is two parallel leaf spring type structure, in order to realize the range of movement of Long Distances.
Described first voice coil motor and the second voice coil motor all adopt the structure of outside permanent magnetism, inner electromagnetism, and permanent magnet is as mover, and electromagnet portion, as stator, has gap between described stator and mover.
Described first voice coil motor is vertical with the second voice coil motor to be arranged, the first described voice coil motor mover is connected with the first flexible hinge by the first connecting plate, second voice coil motor mover is connected with the 5th flexible hinge by the second connecting plate, and described first voice coil motor stator and the second voice coil motor stator are all fixed by screws on pedestal.
The Movement transmit of the first voice coil motor is given grand dynamic output stage by described first flexible hinge, promotion macro-moving stage and the micromotion platform be embedded in macro-moving stage complete the motion in X-direction, and the second, the 4th flexible hinge be simultaneously connected with pedestal and the 5th, the 7th flexible hinge being distributed in Y-direction constrain macro-moving stage coupled motions in the Y direction; The Movement transmit of the second voice coil motor is given grand dynamic output stage by described 5th flexible hinge, promotion macro-moving stage and the micromotion platform be embedded in macro-moving stage complete the motion in Y-direction, the the 6th, the 8th flexible hinge be simultaneously connected with pedestal and the first, the 3rd flexible hinge being distributed in X-direction constrain macro-moving stage coupled motions in the X direction, thus achieve the mobile decoupling of macro-moving stage on XY direction.
Described micromotion platform is embedded in grand dynamic output stage central authorities, and adopt parallel-connection structure, micromotion platform comprises fine motion output stage and is attached thereto the micromotion platform guide rail connect.
Described micromotion platform guide rail is the compound parallel four-bar guide mechanism of eight groups of flexible hinge compositions, symplex structure is formed by double connecting rod, wherein, one end of first, second, third, fourth group of described micromotion platform flexible hinge is hinged with pedestal respectively, the other end is hinged with the 5th, the 6th, the 7th, the 8th group of micromotion platform flexible hinge respectively, and the other end of the 5th, the 6th, the 7th, the 8th group of micromotion platform flexible hinge be hinged on four sides of fine motion output stage respectively.
First, second, third, fourth, the 5th, the 6th, the 7th, the 8th group of micromotion platform flexible hinge of described micromotion platform guide rail is lobate flexible hinge, and each group micromotion platform flexible hinge is by two lobate flexible hinge compositions.
Described first piezoelectric bimorph totally four, be attached on four lobate flexible hinges of the first, the 3rd group of micromotion platform flexible hinge respectively, the second described piezoelectric bimorph totally four, is attached on four lobate flexible hinges of the second, the 4th group of micromotion platform flexible hinge respectively.
During described first piezoelectric bimorph energising, produce bending deflection, thus drive first, 3rd group of micromotion platform flexible hinge produces resiliently deformable, by the 5th, 7th group of micromotion platform flexible hinge drives fine motion output stage to move in X direction, simultaneously symmetrical go up in the Y direction second, 4th group of micromotion platform flexible hinge and the 6th, 8th group of flexible hinge constrains micromotion platform coupled motions in the Y direction, when the second described piezoelectric bimorph is energized, produce bending deflection, thus drive second, 4th group of micromotion platform flexible hinge produces resiliently deformable, by the 6th, 8th group of micromotion platform flexible hinge drives fine motion output stage to move along Y-direction, simultaneously symmetrical in the X direction first, 3rd group of micromotion platform flexible hinge and the 5th, 7th group of flexible hinge constrains micromotion platform coupled motions in the X direction, thus realize the mobile decoupling of micromotion platform on XY direction.
First, second displacement transducer described is laser displacement sensor, is made up of, is respectively used to measure the displacement signal of fine motion output stage in XY both direction sensor probe and measurement plate two-part.
The sensor probe of first, second displacement sensor described is all bolted on pedestal.
The measurement plate of first, second displacement sensor described is arranged vertically on fine motion output stage, and relative with first, second sensor probe respectively, and keeps measuring distance.
Described controller comprises data acquisition module, main control computer, D/A modular converter, voice coil motor driver and piezoelectric bimorph driver, described data acquisition module is with first, second displacement sensor is connected, described voice coil motor driver and first, second voice coil motor is connected, described piezoelectric bimorph driver is respectively with first, second piezoelectric bimorph is connected, described main control computer communicates with D/A modular converter with data acquisition module, D/A modular converter is connected with piezoelectric bimorph driver with voice coil motor driver, described first, the displacement signal of fine motion output stage is passed to main control computer by data acquisition module by second displacement sensor, main control computer is by D/A modular converter outputting analog signal, via described voice coil motor driver and piezoelectric bimorph driver, control first respectively, second voice coil motor and first, the output of the second piezoelectric bimorph, the position of adjustment fine motion output stage and motion, form closed-loop structure, reach required location and tracking accuracy.
In view of some problems that the locating platform proposed in existing market and in previous patent exists, therefore the high-precision servo platform designing a kind of new macro-micro dual-drive is necessary, the advantage such as high in maintenance locating platform precision, speed is fast, stroke is large and while not increasing locating platform control algorithm difficulty, reduce the sports coupling of grand microfluidic platform as far as possible, and from electromechanical integration angle, creation and optimization is carried out to micromotion platform.
Ultraprecise servo platform provided by the invention adopts integral structure, by macro-moving stage and micromotion platform in series, macro-moving stage and micromotion platform all adopt parallel-connection structure and Grazing condition structure, macro-moving stage is by voice coil motor Direct driver, micromotion platform is by piezoelectric bimorph Direct driver, rely on the grand dynamic and micromotion platform guide rail drive motion based on flexible hinge structure, do not need assembling, gapless, without friction, do not need lubrication, at guarantee mobile decoupling with while improving bearing capacity, Long Distances (cm level) can not only be realized, the motion of highi degree of accuracy (nm level), and the coupled motions effectively reduced between micromotion platform and macro-moving stage, first, second displacement sensor is measured the displacement signal of servo platform X and Y-direction respectively and is fed back to controller, realize the full closed loop control of servo platform.The present invention has compact structure, mobile decoupling, precision is high, stroke is large and the advantage such as fast response time, can be widely used in precision positioning and tracking field.
Compare with conventional art, advantage of the present invention is as follows:
1, in Novel Bipolar provided by the invention two dimension Grazing condition high-precision servo platform, macro-moving stage and micromotion platform all adopt parallel-connection structure and symmetrical configuration on XY direction, ensure that dynamics is identical in both direction, and have that rigidity is high, movement inertia is low, bearing capacity is high, precision is high, without the advantage such as cumulative error, compact structure.
2, in Novel Bipolar provided by the invention two dimension Grazing condition high-precision servo platform macro-moving stage by voice coil motor Direct driver, decrease the error that medium tache transmission brings, the positioning precision of the submicron order of Long Distances can be realized, and driving force is large, can obtain larger acceleration of motion and speed.
3, Novel Bipolar two dimension Grazing condition high-precision servo platform provided by the invention adopts the voice coil motor of outside permanent magnetism, inner electromagnetism, and its ouput force and input current have good linear relationship, are easy to control.
4, Novel Bipolar two dimension Grazing condition high-precision servo platform provided by the invention adopts Grazing condition structure as decoupling mechanism and guide mechanism, relies on the resiliently deformable drive motion of flexible hinge, does not need assembling, gapless, without friction, do not need lubrication, be easy to realize hi-Fix.
5, in Novel Bipolar provided by the invention two dimension Grazing condition high-precision servo platform micromotion platform by piezoelectric bimorph Direct driver, reduce the active force of micromotion platform to macro-moving stage, effectively reduce the sports coupling of micromotion platform and macro-moving stage, and nano level precision positioning can be realized.
6, in Novel Bipolar two dimension Grazing condition high-precision servo platform provided by the invention, micromotion platform adopts compound parallelogram lindage as decoupling zero and guide mechanism, by double connecting rod stroke symplex structure, thus effectively eliminate the generation that between centers exports the parasitic displacement such as displacement, cumulative error and moving platform rotation of coupling, ensure that moving platform two-degree of freedom translation, add the rigidity of structure, bearing capacity simultaneously.
Accompanying drawing explanation
Fig. 1 is the perspective view of embodiment;
Fig. 2 is the plane structure schematic diagram of embodiment;
Fig. 3 is the two parallel leaf spring type flexible hinge structure schematic diagram (the 5th flexible hinge 28 is example) of embodiment;
Fig. 4 is the micromotion platform structure enlarged diagram of embodiment;
Fig. 5 is the compound parallel four-bar guiding principle figure (for the motion of micromotion platform X-direction) of embodiment;
Fig. 6 is the controller module schematic diagram of embodiment;
In figure: 1 pedestal, 2 the 6th groups of micromotion platform flexible hinges, 3 the 3rd groups of micromotion platform flexible hinges, 4 the 3rd flexible hinges, 5 the 4th flexible hinges, 6 first sensor probes, 7 the 7th groups of micromotion platform flexible hinges, 8 second piezoelectric bimorphs, 9 first measure plate, 10 the 4th groups of micromotion platform flexible hinges, 11 second sensor probes, 12 the 7th flexible hinges, 13 the 8th flexible hinges, 14 second measure plate, 15 fine motion output stages, 16 first piezoelectric bimorphs, 17 first groups of micromotion platform flexible hinges, 18 first connecting plates, 19 first voice coil motor movers, 20 first voice coil motor stators, 21 first flexible hinges, 22 grand dynamic output stages, 23 second flexible hinges, 24 the 5th groups of micromotion platform flexible hinges, 25 second connecting plates, 26 second voice coil motor stators, 27 second voice coil motor movers, 28 the 5th flexible hinges, 29 second groups of micromotion platform flexible hinges, 30 the 6th flexible hinges, 31 the 8th groups of micromotion platform flexible hinges, 28-1 first connecting rod, 28-2 second connecting rod, the parallel leaf spring type flexible hinge of 28-3 first, the parallel leaf spring type flexible hinge of 28-4 second.
Embodiment
For making the object of the embodiment of the present invention, technological scheme and advantage clearly, below in conjunction with the accompanying drawing of the embodiment of the present invention, and taking into account on the basis considering the factors such as platform structure optimization, manufacturing process, clear, complete description is carried out to the technological scheme in the embodiment of the present invention.Certainly, it is exemplary for crossing the embodiment be described with reference to the drawings, and is intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
Fig. 1 is the perspective view of one embodiment of the invention, be can clearly be seen that by figure, and the present invention's entirety adopts cascaded structure, is embedded in macro-moving stage central authorities forms by micromotion platform.
Macro-moving stage adopts parallel-connection structure, is made up of, by the first voice coil motor and the second voice coil motor Direct driver macro-moving stage guide rail and grand dynamic output stage 22.Macro-moving stage guide rail adopts Grazing condition structure, first of grand dynamic output stage 22 4 sides is hinged on by symmetry, second, 3rd, 4th macro-moving stage guide rail composition, first, second, 3rd, 4th macro-moving stage guide rail is respectively by the first flexible hinge 21 and the second flexible hinge 23, 3rd flexible hinge 4 and the 4th flexible hinge 5, 5th flexible hinge 28 and the 6th flexible hinge 30, 7th flexible hinge 12 and the 8th flexible hinge 13 form, rely on the resiliently deformable of flexible hinge, macro-moving stage guide rail by the Movement transmit of voice coil motor to macro-moving stage, thus promotion macro-moving stage and the micromotion platform inlayed within it complete the grand dynamic of Long Distances submicron order precision.
Micromotion platform adopts parallel-connection structure equally, is made up of fine motion output stage 15 and micromotion platform guide rail, by the first piezoelectric bimorph 16 and the second piezoelectric bimorph 8 Direct driver.Micromotion platform guide rail adopts compound parallel four-bar guide mechanism, by with the hinged first group of micromotion platform flexible hinge 17 of grand dynamic output stage, second group of micromotion platform flexible hinge 29, 3rd group of micromotion platform flexible hinge 3, 4th group of micromotion platform flexible hinge 10 and the 5th group of micromotion platform flexible hinge 24 be hinged on fine motion output stage 15 4 sides, 6th group of micromotion platform flexible hinge 2, 7th group of micromotion platform flexible hinge 7, 8th group of micromotion platform flexible hinge 31 is hinged formation, rely on the resiliently deformable of these eight groups of micromotion platform flexible hinges, micromotion platform guide rail changes the bending deflection of piezoelectric bimorph the fine motion of fine motion output stage 15 nano-precision into.
Servo platform X and Y-direction are equipped with laser displacement sensor, laser displacement sensor is by measuring plate and sensor probe two-part are formed, first measurement plate 9 and the second measurement plate 14 are vertically fixed on fine motion output stage 15, first sensor probe 6 and the second sensor probe 11 measure plate 9 and second respectively, and to measure plate 14 relative and keep measuring distance with first, first sensor probe 6 and the second sensor probe 11 are fixed by screws on pedestal 1, by the motion feedback of fine motion output stage 14 to controller (not shown), realize the full closed loop control of servo platform, ensure its kinematic accuracy.
Fig. 2 is the plane structure schematic diagram of one embodiment of the invention, be can clearly be seen that structure and the motion principle of the macro-moving stage that voice coil motor drives by figure.
First voice coil motor adopts the structure of outside mover, internal stator, first voice coil motor stator 20 is hot-wire coil, be fixed by screws on pedestal 1, first voice coil motor mover 19 is permanent-magnet structure, connected with the first flexible hinge 21 by the first connecting plate 18, first flexible hinge 21 is hinged on grand dynamic output stage 22, and meanwhile, the first flexible hinge 21 connects with the second flexible hinge 23 be hinged on pedestal 1.3rd flexible hinge 4 is identical with the second flexible hinge 23 with the first flexible hinge 21 with the structure of the 4th flexible hinge 5, and the 3rd flexible hinge 4 is hinged on grand dynamic output stage 22, is connected with the 4th flexible hinge 5 be hinged on pedestal 1 simultaneously.Second voice coil motor adopts the structure of outside mover, internal stator equally, second voice coil motor stator 26 is hot-wire coil, be fixed by screws on pedestal 1, second voice coil motor mover 27 is permanent-magnet structure, connected with the 5th flexible hinge 28 by the second connecting plate 25,5th flexible hinge 28 is hinged on grand dynamic output stage 22, and meanwhile, the 5th flexible hinge 28 connects with the 6th flexible hinge 30 be hinged on pedestal 1.7th flexible hinge 12 is identical with the 6th flexible hinge 30 with the 5th flexible hinge 28 with the structure of the 8th flexible hinge 13, and the 7th flexible hinge 12 is hinged on grand dynamic output stage 22, is connected with the 8th flexible hinge 13 be hinged on pedestal 1 simultaneously.
Above-mentioned first flexible hinge 21, second flexible hinge 23, the 3rd flexible hinge 4, the 4th flexible hinge 5, the 5th flexible hinge 28, the 6th flexible hinge 30, the 7th flexible hinge 12 and the 8th flexible hinge 13 all adopt two parallel leaf spring type structure, in order to realize the range of movement of Long Distances.When the first voice coil motor energising work, first voice coil motor mover 19 promotes grand dynamic output stage 22 by the first flexible hinge 21 and the micromotion platform inlayed therein moves in X direction, meanwhile, the second flexible hinge 23, the 4th flexible hinge 4, the 5th flexible hinge 28 and the 7th flexible hinge 12 limit macro-moving stage coupled motions in the Y direction.When the second voice coil motor energising work, second voice coil motor mover 27 promotes grand dynamic output stage 22 by the 5th flexible hinge 28 and the micromotion platform inlayed therein moves along Y-direction, simultaneously, 6th flexible hinge 30, the 8th flexible hinge 13, first flexible hinge 21 and the 3rd flexible hinge 4 limit macro-moving stage coupled motions in the X direction, thus achieve the mobile decoupling of macro-moving stage on XY direction.
Fig. 3 is the two parallel leaf spring type flexible hinge structure schematic diagram (for the 5th group of flexible hinge 28) of one embodiment of the invention, and two parallel leaf spring type flexible hinge (the 5th group of flexible hinge 28) is by first connecting rod 28-1, second connecting rod 28-2, the first parallel leaf spring type flexible hinge 28-3 and the second parallel leaf spring type flexible hinge 28-4 is hinged forms.Above-mentioned first parallel leaf spring type flexible hinge 28-3 is two the leaf spring type flexible hinges be parallel to each other, and forms parallelogram sturcutre with the second connecting rod 28-2 be hinged with it and fine motion output stage 15; Above-mentioned second parallel leaf spring type flexible hinge 28-4 is two the leaf spring type flexible hinges be parallel to each other, and forms parallelogram sturcutre with the first connecting rod 28-1 be hinged with it and second connecting rod 28-2.Two parallelogram sturcutre series connection, the two parallel leaf spring type flexible hinge structure of composition, wherein second connecting rod 28-2 can move, thus can realize the range of movement of Long Distances.
Fig. 4 is the micromotion platform structure enlarged diagram of one embodiment of the invention, be can clearly be seen that structure and the motion principle of the micromotion platform that piezoelectric bimorph drives by figure.
Micromotion platform guide rail is the compound parallel four-bar guide mechanism be made up of eight groups of micromotion platform flexible hinges, first group of micromotion platform flexible hinge 17 one end and grand dynamic output stage 22 hinged, the other end and the 5th group of micromotion platform flexible hinge 24 hinged, the 5th group of micromotion platform flexible hinge 24 is hinged on fine motion output stage 15 simultaneously; Second group of micromotion platform flexible hinge 29 one end and grand dynamic output stage 22 hinged, the other end and the 6th group of micromotion platform flexible hinge 2 hinged, the 6th group of micromotion platform flexible hinge 2 is hinged on fine motion output stage 15 simultaneously; 3rd group of micromotion platform flexible hinge 3 one end and grand dynamic output stage 23 hinged, the other end and the 7th group of micromotion platform flexible hinge 7 hinged, the 7th group of micromotion platform flexible hinge 7 is hinged on fine motion output stage 15 simultaneously; 4th group of micromotion platform flexible hinge 10 one end and grand dynamic output stage 23 hinged, the other end and the 8th group of micromotion platform flexible hinge 31 hinged, and the 8th group of micromotion platform flexible hinge 31 is hinged on fine motion output stage 15 simultaneously.Above-mentioned micromotion platform flexible hinge of often organizing forms by two flexible hinges, and is lobate flexible hinge.First piezoelectric bimorph 16 totally four, be attached on four lobate flexible hinges of first group of micromotion platform flexible hinge 17 and the 3rd group of micromotion platform flexible hinge 3 respectively, second piezoelectric bimorph 8 totally four, is attached on four lobate flexible hinges of second group of micromotion platform flexible hinge 29 and the 4th group of micromotion platform flexible hinge 10 respectively.
Fig. 5 is the compound parallel four-bar guide mechanism schematic diagram (for the motion of micromotion platform X-direction) of one embodiment of the invention, is cut with scissors form by above-mentioned eight groups of micromotion platform flexible hinges.Above-mentioned eight groups of micromotion platform flexible hinges evenly and be symmetrically distributed in four sides of micromotion platform output stage 15 and form parallelogram sturcutre, connection in each moving direction of micromotion platform two parallelogram sturcutre formation compound parallel with one another parallel four-bar guide mechanisms, while realizing micromotion platform Movement transmit, ensure the mobile decoupling of micromotion platform.When the first piezoelectric bimorph 16 is energized work, produce bending deflection, first group of micromotion platform flexible hinge 17 and the 3rd group of micromotion platform flexible hinge 3 is driven to produce resiliently deformable, promote fine motion output stage 15 fine motion in X direction by the 5th group of micromotion platform flexible hinge 24 being hinged with it and the 7th group of micromotion platform flexible hinge 7, distribute the 6th group of micromotion platform flexible hinge 2 in the Y direction and the 8th group of micromotion platform flexible hinge 31 limit fine motion output stage 15 coupled motions in the Y direction simultaneously.When the second piezoelectric bimorph 8 is energized work, produce bending deflection, second group of micromotion platform flexible hinge 29 and the 4th group of micromotion platform flexible hinge 10 is driven to produce resiliently deformable, fine motion output stage 15 is promoted along Y-direction fine motion by the 6th group of micromotion platform flexible hinge 2 being hinged with it and the 8th group of micromotion platform flexible hinge 31, simultaneously distribute the 5th group of micromotion platform flexible hinge 24 in the X direction and the 7th group of micromotion platform flexible hinge 7 limits fine motion output stage 15 coupled motions in the X direction, thus achieve the mobile decoupling of micromotion platform on XY direction.
Fig. 6 is the controller module schematic diagram of one embodiment of the invention, controller is by main control computer, data acquisition module, D/A modular converter, voice coil motor driver and piezoelectric bimorph driver composition, data acquisition module is with first, second laser displacement sensor connects, the displacement signal of fine motion output stage 15 is passed to main control computer, main control computer converts analog output signal to through D/A modular converter, through the output of voice coil motor driver and piezoelectric bimorph driver control voice coil motor and piezoelectric bimorph, the position of adjustment fine motion output stage and motion, form closed-loop structure, reach required location and tracking accuracy.
By reference to the accompanying drawings the specific embodiment of the present invention is described although above-mentioned; but not limiting the scope of the invention; one of ordinary skill in the art should be understood that; on the basis of technological scheme of the present invention, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection scope of the present invention.
Claims (8)
1. a bipolar two-dimensional Grazing condition high-precision servo platform, comprise pedestal, macro-moving stage, first, second voice coil motor, micromotion platform, first, second piezoelectric bimorph, first, second displacement transducer and the controller be connected with described voice coil motor, piezoelectric bimorph and displacement transducer; Described pedestal, macro-moving stage and micromotion platform are interconnective integral structure, are formed by one piece of sheet fabrication; Described macro-moving stage is driven by first, second voice coil motor; Described micromotion platform is embedded in macro-moving stage, together moves with macro-moving stage, and micromotion platform is by first, second piezoelectric bimorph Direct driver be attached on micromotion platform guide rail; Described micromotion platform is embedded in grand dynamic output stage central authorities, and micromotion platform comprises fine motion output stage and is attached thereto the multiple micromotion platform guide rails be arranged in parallel connect; It is characterized in that:
Described micromotion platform guide rail is the compound parallel four-bar guide mechanism of eight groups of flexible hinge compositions, wherein, described first, second, one end of third and fourth group of micromotion platform flexible hinge is hinged with pedestal respectively, the other end is respectively with the 5th, 6th, 7th and the 8th group of micromotion platform flexible hinge is hinged, and the 5th, 6th, 7th, the other end of the 8th group of micromotion platform flexible hinge be hinged on four sides of fine motion output stage respectively, described first, second, 3rd, 4th, 5th, 6th, 7th and the 8th group of micromotion platform flexible hinge is lobate flexible hinge, and each group micromotion platform flexible hinge is by two lobate flexible hinge compositions.
2. bipolar two-dimensional Grazing condition high-precision servo platform as claimed in claim 1, is characterized in that: described macro-moving stage comprises grand dynamic output stage and some macro-moving stage guide rails be arranged in parallel.
3. bipolar two-dimensional Grazing condition high-precision servo platform as claimed in claim 2, it is characterized in that: described macro-moving stage guide rail adopts Grazing condition structure, comprise structure identical first in parallel, second, 3rd, 4th macro-moving stage guide rail, described first, second, 3rd, 4th macro-moving stage guide rail is articulated with on four sides of grand dynamic output stage respectively, first, second, 3rd, 4th macro-moving stage guide rail includes two flexible hinges, one end of two flexible hinges is hinged on grand dynamic output stage and pedestal respectively, and each flexible hinge all adopts two parallel leaf spring type structure, in order to realize stroke motion scope and mobile decoupling,
Described first macro-moving stage guide rail is made up of first, second flexible hinge, described second macro-moving stage guide rail is made up of the 3rd, the 4th flexible hinge, described 3rd macro-moving stage guide rail is made up of the 5th, the 6th flexible hinge, and described 4th macro-moving stage guide rail is made up of the 7th, the 8th flexible hinge.
4. bipolar two-dimensional Grazing condition high-precision servo platform as claimed in claim 3, it is characterized in that: the first described voice coil motor and the second voice coil motor all adopt the structure of outside permanent magnetism, inner electromagnetism, and permanent magnet is as mover, electromagnet portion is as stator, first voice coil motor stator and the second voice coil motor stator are vertically fixed on pedestal respectively, the first described voice coil motor mover is connected with the first flexible hinge by the first connecting plate, and the second voice coil motor mover is connected with the 5th flexible hinge by the second connecting plate.
5. bipolar two-dimensional Grazing condition high-precision servo platform as claimed in claim 1, is characterized in that: described first piezoelectric bimorph four, be attached on four lobate flexible hinges of the first, the 3rd group of micromotion platform flexible hinge respectively totally; The second described piezoelectric bimorph totally four, is attached on four lobate flexible hinges of the second, the 4th group of micromotion platform flexible hinge respectively.
6. bipolar two-dimensional Grazing condition high-precision servo platform as claimed in claim 1, it is characterized in that: first, second displacement transducer described is all for by sensor probe with measure plate laser displacement sensor dimerous, and first, second displacement transducer is respectively used to measure the displacement signal of fine motion output stage in XY both direction.
7. bipolar two-dimensional Grazing condition high-precision servo platform as claimed in claim 6, it is characterized in that: the measurement plate of first, second displacement transducer described is all arranged vertically on fine motion output stage, the sensor probe of first, second displacement transducer described is bolted on pedestal, and relative with the measurement plate of first, second displacement transducer respectively, and keep measuring distance.
8. bipolar two-dimensional Grazing condition high-precision servo platform as claimed in claim 1, it is characterized in that: described controller comprises main control computer, data acquisition module, D/A modular converter, voice coil motor driver and piezoelectric bimorph driver, data acquisition module is with first, second displacement sensor connects, the displacement signal of fine motion output stage is passed to main control computer, main control computer converts analog signal output to through D/A modular converter, through the output of voice coil motor described in voice coil motor driver and piezoelectric bimorph driver control and piezoelectric bimorph, the position of adjustment fine motion output stage and motion, form closed-loop structure, reach required kinematic accuracy.
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