CN110370229A - Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism - Google Patents

Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism Download PDF

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Publication number
CN110370229A
CN110370229A CN201910629868.0A CN201910629868A CN110370229A CN 110370229 A CN110370229 A CN 110370229A CN 201910629868 A CN201910629868 A CN 201910629868A CN 110370229 A CN110370229 A CN 110370229A
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China
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parallel institution
macro
platform
driving
dynamic
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CN201910629868.0A
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Chinese (zh)
Inventor
张清华
卢清华
陈为林
张云志
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Foshan University
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Foshan University
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Priority to CN201910629868.0A priority Critical patent/CN110370229A/en
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Abstract

The invention discloses a kind of novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism, macro dynamic parallel institution including workbench and setting on the table, the macro dynamic parallel institution includes macro dynamic parallel institution moving platform and the macro dynamic driving mechanism for driving macro dynamic parallel institution moving platform to do plane motion on the table and turn about the Z axis;It further include fine motion parallel institution, the fine motion parallel institution is embedded in inside macro dynamic parallel institution moving platform;The fine motion parallel institution includes micromotion platform, the fine motion driving mechanism for driving micromotion platform to do plane motion in macro dynamic parallel institution moving platform and turn about the Z axis.The rigging error of entire platform can be effectively reduced in novel macro micro- combination platform of the invention, mitigates and loads, and makes the overall structure of novel macro micro- combination platform more compact, it can be achieved that more free, big strokes, the high acceleration of high speed and nano grade positioning precision.

Description

Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism
Technical field
The present invention relates to a kind of locating platforms, and in particular to a kind of based on rigid parallel institution and compliant parallel mechanism Novel macro micro- combination platform.
Background technique
Precisely locating platform is in scanning probe microscopy Sample Scan platform, nano-imprint lithography, micro-nano operation, MEMS essence Many fields such as close electronic manufacture, Precision Machining, micrometering amount are widely used.Current technology development results in the need for big stroke, high-precision The use occasion for spending precision positioning is more and more.The accuracy limitations of big stroke driving and the kind of drive such as precision lead screw transmission In microstage;And nano-precision locating platform (using piezoelectric ceramic actuator as representative), although having nanoscale positioning accurate Degree, but usually only tens microns of stroke.In order to realize that expanding mechanism positioning stroke extension combines high-resolution mesh Mark, the method for macro micro- combination parallel institution precision positioning are suggested.Many domestic and international leading companies and research institution develop compared with The precisely locating platform of big stroke, but it is confined to single-degree-of-freedom and the precision positioning of plane two degrees of freedom mostly, and dry with laser Interferometer is expensive as platform closed loop feedback detecting instrument.
Macro micro- combination parallel institution is to consist of two parts: one is in parallel macro dynamic with the big stroke that ground is reference substance Mechanism realizes large-scale mobile and positioning the macro dynamic platform of system;Another is high by the realization being attached on macro dynamic platform The parallel microrobotics mechanism of positioning accuracy, the former completes big stroke and coarse positioning task, and the latter then carries out small school in a small range Just and fine positioning, to take into account big stroke and high-precision.It comprises the concrete steps that reach large range nanometer grade positioning by macro (i.e. macro movement position error enters micro- positioning stroke after the macro positioning of dynamic parallel institution moving platform track reference position signal completion Range), it needs to carry out nanoscale positioning with micromotion platform.
Existing precisely locating platform, such as the application for a patent for invention that application publication number is CN107942933A disclose " a kind of macro micro- compound positioning system of the planar three freedom of visual servo and method ", the planar three freedom is macro micro- compound The large range nanometer grade precision positioning function of planar three freedom (two translations, one rotation) may be implemented in positioning system.
However the above-mentioned macro micro- compound positioning system of planar three freedom has the disadvantage that
1, the 3-RRR fine motion parallel institution in the macro micro- compound positioning system of the planar three freedom is to be superposed On the moving platform of the macro dynamic parallel institution of 3-RRR, on the one hand, will increase the load of the macro dynamic parallel institution of 3-RRR in this way, no But energy consumption is high, but also increases motional inertia, influences precision;On the other hand, moving platform and 3-RRR fine motion parallel institution overlapping Height is higher together, and dynamic parallel institution macro to 3-RRR generates tilting moment when moving platform fast moves, and influences macro dynamic parallel connection The precision and working life of mechanism.
2, it is mounted on due to the 3-RRR fine motion parallel institution on the moving platform of the macro dynamic parallel institution of the 3-RRR, and It is then mounted on by locating module on the micromotion platform of the 3-RRR fine motion parallel institution, it is macro dynamic that this not only results in 3-RRR There are rigging errors between parallel institution and 3-RRR fine motion parallel institution, and also result in 3-RRR fine motion parallel institution with By there is also rigging errors between locating module, two rigging errors are superimposed, to form accumulated error, and then drop The positioning accuracy of the low macro micro- compound positioning system of the planar three freedom, since 3-RRR fine motion parallel institution has nanoscale Positioning accuracy, above-mentioned Automatic manual transmission error is very big to the location precision.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide one kind based on rigid parallel institution and it is submissive simultaneously Novel macro micro- combination platform of online structure, the assembly that entire platform can be effectively reduced in novel macro micro- combination platform miss Difference mitigates load, and the overall structure of novel macro micro- combination platform is more compact.
The technical solution that the present invention solves above-mentioned technical problem is:
A kind of novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism, including workbench and Macro dynamic parallel institution on the table is set, wherein
The macro dynamic parallel institution includes macro dynamic parallel institution moving platform and for driving macro dynamic parallel institution moving platform The macro dynamic driving mechanism doing plane motion on the table and turning about the Z axis;
It further include the fine motion parallel institution being embedded in the macro dynamic parallel institution moving platform, the fine motion parallel institution It is contained in inside macro dynamic parallel institution moving platform;The fine motion parallel institution includes micromotion platform, for driving micromotion platform pacifying The fine motion driving mechanism doing plane motion in tankage and turning about the Z axis.
Preferably, the fine motion parallel institution is structure as a whole with the macro dynamic parallel institution moving platform, by macro dynamic Directly processing is formed on parallel institution moving platform.
Preferably, the macro dynamic parallel institution moving platform is positive triangular structure;The macro dynamic driving mechanism is three groups, And it is rotatablely connected respectively with three vertex of the macro dynamic parallel institution moving platform;Phase in three groups of macro dynamic driving mechanisms Angle between adjacent two groups of macro dynamic driving mechanisms is 120 degree.
Preferably, the macro dynamic driving mechanism include setting driving motor on the workbench, drive connecting rod and Passive connecting rod, wherein wherein one end of the drive connecting rod is connect with the main shaft of the driving motor by rotational structure, separately One end is connect with wherein one end of the passive connecting rod by rotational structure, the other end of the passive connecting rod and described macro dynamic Parallel institution moving platform is connected by rotational structure;The rotational structure is made of rotation axis and bearing, wherein described turn The axis direction of moving axis is vertical with the table top of the workbench.
Preferably, the driving motor is voice coil motor, response is fast, high-efficient, thrust is big because of it, mechanical characteristic it is good with And equal excellent performances easy to control, it is very suitable to high speed, high acceleration, high accuracy positioning driving.
Preferably, the bearing is active magnetic bearings, which realizes the complete of stator and rotor using magnetic levitation technology Separation, have many advantages, such as without friction, without abrasion, without lubricating, although there are gap between stator, rotor, due to the inspection carried Control system, it can be achieved that rotor suspension is precisely controlled, while can offset piezoelectric ceramics driving counter-force and macro motivation structure it is dynamic The inertia force of platform, has broad application prospects in terms of High-speed precision positioning.
Preferably, the fine motion driving mechanism include by submissive hinged three full symmetric flexible branches with And drive the flexible drive mechanism of flexible branch movement, wherein each flexibility branch includes the first link block, the second link block And third link block, wherein first link block is connect with the flexible drive mechanism, the middle part of first link block It is connect between second link block by flexible hinge;Pacified by flexible hinge wherein one end of second link block On the macro dynamic parallel institution moving platform, the other end is connected by wherein one end of flexible hinge and the third link block It connects;The other end of the third link block is connect by flexible hinge with the micromotion platform.
Preferably, the micromotion platform is positive triangular structure, each vertex of the micromotion platform respectively with a flexibility Branch chain link;The flexible drive mechanism is three groups, the two adjacent groups flexible drive mechanism in three groups of flexible drive mechanisms Between angle be 120 degree;Every group of flexible drive mechanism is for driving one group of flexibility branch movement.
Preferably, it is provided in the middle part of the micromotion platform for installing by the mounting hole of locating module.
Preferably, the flexible drive mechanism includes stack piezoelectric ceramic piece, the stack piezoelectric ceramic piece and institute The first link block is stated to be structure as a whole.
The working principle of novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism of the invention It is:
When work, it will be mounted on the micromotion platform of the fine motion parallel institution by locating module first.Then, described Macro dynamic driving mechanism drives macro dynamic parallel institution moving platform movement, to drive fine motion parallel institution and be mounted on fine motion simultaneously Being moved on the table by locating module on the micromotion platform of online structure, after moving to designated position, the macro dynamic driving Mechanism stop motion begins through fine motion parallel institution and carries out micro-positioning regulators to the position by locating module, specifically adjusted Journey are as follows: the fine motion driving mechanism drives micromotion platform to do plane motion in macro dynamic parallel institution moving platform, while or successively Micromotion platform is driven to make rotating motion about the z axis by fine motion driving mechanism, so that described arrived by locating module precise motion On station to be processed, to complete manufacturing procedure.
In above-mentioned adjustment process, due to fine motion parallel institution inlay be arranged in the macro dynamic parallel institution it is macro it is dynamic simultaneously On online structure moving platform, the fine motion parallel institution is in macro dynamic parallel institution moving platform, in this way, in compared with the existing technology Planar three freedom macro micro- compound positioning system the 3-RRR fine motion parallel institution is superimposed upon the macro dynamic parallel connection of the 3-RRR The load of mode on the moving platform of mechanism, the macro dynamic driving mechanism in the present invention is smaller, reduces energy consumption, not only makes described Faster by the movement velocity of locating module, so that it is smaller by the inertia of locating module during the motion, thus favorably In the raising positioning accuracy by locating module.Also, fine motion parallel institution, which is inlayed, to be arranged in the macro dynamic parallel institution It is interior, do not increase the height of macro dynamic parallel institution moving platform, to macro dynamic parallel institution when macro dynamic parallel institution moving platform fast moves There is no tilting moment, eliminates influence of the factor to the precision and working life of macro dynamic parallel institution.
The present invention have compared with prior art it is below the utility model has the advantages that
1, it is inlayed due to the fine motion parallel institution in the present invention and the macro dynamic parallel institution of the macro dynamic parallel institution is set On moving platform, the fine motion parallel institution is contained in macro dynamic parallel institution moving platform, in this way, in compared with the existing technology The 3-RRR fine motion parallel institution is superimposed upon the macro dynamic parallel machine of the 3-RRR by the macro micro- compound positioning system of planar three freedom Mode on the moving platform of structure, the present invention in macro dynamic driving mechanism load it is smaller, energy consumption is lower, not only makes the quilt The movement velocity of locating module faster, so that smaller by the inertia of locating module during the motion, effectively improves The mechanical property of entire mechanism, to be conducive to improve the positioning accuracy by locating module.
2, fine motion parallel institution, which is inlayed, is arranged in the macro dynamic parallel institution, does not increase macro dynamic parallel institution moving platform Height, there is no tilting moment to macro dynamic parallel institution when macro dynamic parallel institution moving platform fast moves, eliminate the factor to macro The influence of the precision and working life of dynamic parallel institution.
3, it is inlayed and is arranged in macro dynamic parallel institution moving platform due to fine motion parallel institution, fine motion parallel institution is moved with macro Parallel institution moving platform is attached without increasing additional mechanical connecting structure, thus eliminate because assembling bring error, Improve positioning accuracy.
4, novel macro micro- combination platform of the invention based on rigid parallel institution and compliant parallel mechanism is in IC manufacture Device encapsulation in chip photoetching and encapsulation, MEMS manufacture and assembling, micro-nano 3D printing technique, biological cell characteristic present and Operation, cell infusion extract, high-speed & precise progressive die and high-velocity scanning detection, fluid control (such as dispenser, precision valve) and Micro-vibration inhibits precision engineerings such as (such as laser fusion facilities) and robot field to release with extensive market application prospect.
5, it is inlayed due to the fine motion parallel institution in the present invention and the macro dynamic parallel institution of the macro dynamic parallel institution is set On moving platform, macro dynamic parallel institution moving platform and fine motion parallel institution set are integral, so that novel macro micro- combination of the invention The structure of platform is more compact, and production cost also accordingly reduces.
6, compared to traditional locating platform, positioning the time it takes of novel macro micro- combination platform of the invention is more It is few, it is more efficient.In addition, the positioning accuracy of novel macro micro- combination platform of the invention is also higher.
Detailed description of the invention
Fig. 1 and Fig. 2 is novel macro micro- combination platform of the invention based on rigid parallel institution and compliant parallel mechanism The structural schematic diagram of specific embodiment, wherein Fig. 1 is schematic perspective view, and Fig. 2 is attached view.
Fig. 3 is the schematic perspective view of macro dynamic parallel institution moving platform and fine motion parallel institution.
Fig. 4 is the top view of macro dynamic parallel institution moving platform and fine motion parallel institution.
Specific embodiment
Present invention will now be described in further detail with reference to the embodiments and the accompanying drawings, but embodiments of the present invention are not It is limited to this.
Referring to figures 1-4, novel macro micro- combination platform of the invention based on rigid parallel institution and compliant parallel mechanism Including workbench 1 and the macro dynamic parallel institution being arranged on workbench 1, wherein
The macro dynamic parallel institution includes macro dynamic parallel institution moving platform 2 and puts down for driving macro dynamic parallel institution to move The macro dynamic driving mechanism that platform 2 does plane motion and turned about the Z axis on workbench 1;
Novel macro micro- combination platform further includes inlaying the fine motion being arranged in the macro dynamic parallel institution moving platform 2 Parallel institution, the fine motion parallel institution are contained in the inside of macro dynamic parallel institution moving platform 2;The fine motion parallel institution includes Micromotion platform 4, for driving micromotion platform 4 to do plane motion in macro dynamic parallel institution moving platform 2 and turn about the Z axis micro- Dynamic driving mechanism.
Referring to figures 1-4, the fine motion parallel institution is structure as a whole with the macro dynamic parallel institution moving platform 2, passes through Directly processing is formed on macro dynamic parallel institution moving platform 2.In this way, by institute while processing macro moves parallel institution moving platform 2 Fine motion parallel institution to be stated to process, processing efficiency not only can be improved in this, but also can save processing cost, while So that the structure of novel macro micro- combination platform of the invention is more compact.
Referring to figures 1-4, the macro dynamic parallel institution moving platform 2 is positive triangular structure, and the macro dynamic driving mechanism is Three groups, and be rotatablely connected respectively with three vertex of the macro dynamic parallel institution moving platform 2;Three groups of macro dynamic driving mechanisms In the macro dynamic driving mechanism of two adjacent groups between angle be 120 degree.
Referring to figures 1-4, the macro dynamic driving mechanism includes the driving motor 5 being arranged on the workbench 1 and master Dynamic connecting rod 6 and passive connecting rod 7, wherein the main shaft of wherein one end of the drive connecting rod 6 and the driving motor 5 passes through rotation Structure 10 connects, and the other end is connect with wherein one end of the passive connecting rod 7 by rotational structure 10, the passive connecting rod 7 The other end is connect with the macro dynamic parallel institution moving platform 2 by rotational structure 10;The rotational structure 10 by rotation axis and Bearing is constituted, wherein the axis direction of the rotation axis is vertical with the table top of the workbench 1.It is driven by driving motor 5 Drive connecting rod 6 rotates, so that it is flat to drive passive connecting rod 7 and the macro dynamic parallel institution being rotatablely connected with the passive connecting rod 7 to move Platform 2 does plane motion or is turned about the Z axis on the table top of workbench 1, reaches designated position by locating module to drive, with This facilitates fine motion parallel institution to carry out micro-positioning regulators to by locating module.And since the macro dynamic driving mechanism is three groups, and three The macro dynamic driving mechanism of group is rotatablely connected with three vertex of the macro dynamic parallel institution moving platform 2 respectively, therefore, passes through control The rotational angle of the driving motor 5 of three groups of macro dynamic driving mechanisms, and pass through the mutual cooperation of three groups of macro dynamic driving mechanisms, thus Macro dynamic parallel institution moving platform 2 is driven to do plane motion on the table top of workbench 1 and turn about the Z axis.
Referring to figures 1-4, the driving motor 5 is voice coil motor.The voice coil motor is fast, high-efficient with response, pushes away Power is big, mechanical characteristic is good and the excellent performances such as easy to control, is very suitable to high speed, high acceleration, high accuracy positioning driving.
Referring to figures 1-4, the bearing is active magnetic bearings.By using active magnetic bearings, can effectively absorb macro Dynamic parallel institution moving platform 2 vibrates caused by quickly moving, moreover it is possible to from main regulation positioning accuracy.And due to the active magnetic Mechanical Contact is not present in bearing, and rotor can achieve very high running speed, therefore with mechanical wear is small, low energy consumption, noise It is small, the service life is long, without lubrication, without oily pollution the advantages that.Due to being attached using active magnetic bearings, it can effectively alleviate height Macro dynamic parallel institution moving platform caused by speed, high acceleration moves bring inertia impact, so as to rapidly make macro motivation Structure is static, to improve the location efficiency of novel macro micro- combination platform of the invention.
Referring to figures 1-4, the fine motion driving mechanism includes by submissive hinged three full symmetric flexible branch Chain and the flexible drive mechanism for driving flexible branch movement, wherein each flexibility branch connects including the first link block, second Connect block 8 and third link block 9, wherein first link block is connect with the flexible drive mechanism, first link block Middle part connect with second link block 8 by flexible hinge;Wherein one end of second link block 8 passes through flexible hinge Chain is mounted on the macro dynamic parallel institution moving platform 2, and the other end passes through flexible hinge and the third link block 9 wherein One end connection;The other end of the third link block 9 is connect by flexible hinge with the micromotion platform 4.Pass through flexible drive Mechanism drives the movement of the first link block, to drive the second link block 8 and third link block 9 and connect with third link block 9 The micromotion platform 4 connect moves, and by the cooperation between three groups of fine motion driving mechanisms, micromotion platform 4 can be realized in mounting groove Planar movement and turn about the Z axis, to carry out micro-positioning regulators to by locating module, and then improve by the positioning of locating module Precision.
Referring to figures 1-4, the micromotion platform 4 is positive triangular structure, each vertex of the micromotion platform 4 respectively with One flexible branch chain link;The flexible drive mechanism is three groups, and the two adjacent groups in three groups of flexible drive mechanisms are flexible Angle between driving mechanism is 120 degree;Every group of flexible drive mechanism is for driving one group of flexibility branch movement.
Referring to figures 1-4, the middle part of the micromotion platform 4 is provided with for installing by the mounting hole of locating module.In this way Can be convenient will be mounted on micromotion platform 4 by locating module.
Referring to figures 1-4, the flexible drive mechanism uses stack piezoelectric ceramic piece 3, the piezoelectric ceramic piece 3 with First link block is structure as a whole.By powering to piezoelectric ceramic piece 3, to drive piezoelectric ceramic piece 3 to move, in turn Compliant mechanism and the micromotion platform 4 connecting with the compliant mechanism is driven to move.And it is described stack formula piezoelectric ceramic piece 3 because The advantages that it is responded fastly, and high resolution, driving force are big, small in size, is the ideal driver of compliant mechanism.
Referring to figures 1-4, novel macro micro- combination platform of the invention based on rigid parallel institution and compliant parallel mechanism Working principle be:
When work, it will be mounted on the micromotion platform 4 of the fine motion parallel institution by locating module first.Then, described Macro dynamic driving mechanism drives macro dynamic parallel institution moving platform 2 to move, to drive fine motion parallel institution and be mounted on fine motion simultaneously Being moved on workbench 1 by locating module on the micromotion platform 4 of online structure, after moving to designated position, the macro dynamic drive Motivation structure stop motion begins through fine motion parallel institution and carries out micro-positioning regulators to the position by locating module, specific to adjust Process are as follows: the fine motion driving mechanism drives micromotion platform 4 to do plane motion in mounting groove, while or successively passing through fine motion Driving mechanism drives micromotion platform 4 to make rotating motion about the z axis so that it is described by locating module precise motion to be processed On station, to complete manufacturing procedure.
In above-mentioned adjustment process, due to fine motion parallel institution inlay be arranged in the macro dynamic parallel institution it is macro it is dynamic simultaneously On online structure moving platform 2, the fine motion parallel institution is contained in macro dynamic parallel institution moving platform 2, in this way, relative to existing It is macro that the 3-RRR fine motion parallel institution is superimposed upon the 3-RRR by the macro micro- compound positioning system of planar three freedom in technology The mode on the moving platform of parallel institution is moved, the load of the macro dynamic driving mechanism in the present invention is smaller, reduces energy consumption, not only makes Obtain the movement velocity by locating module faster, so that it is smaller by the inertia of locating module during the motion, from And be conducive to improve the positioning accuracy by locating module.Also, fine motion parallel institution, which is inlayed, to be arranged in the macro dynamic parallel connection In mechanism, do not increase the height of macro dynamic parallel institution moving platform 2, is moved simultaneously when macro dynamic parallel institution moving platform 2 fast moves to macro Online structure does not have tilting moment, eliminates influence of the factor to the precision and working life of macro dynamic parallel institution.
Above-mentioned is the preferable embodiment of the present invention, but embodiments of the present invention are not limited by the foregoing content, His any change made without departing from the spirit and principles of the present invention, modification, substitution, block close, are simplified, should be Equivalent substitute mode, is included within the scope of the present invention.

Claims (10)

1. a kind of novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism, including workbench and setting Macro dynamic parallel institution on the table, wherein
The macro dynamic parallel institution includes macro dynamic parallel institution moving platform and for driving macro dynamic parallel institution moving platform in work Make the macro dynamic driving mechanism doing plane motion on platform and turning about the Z axis;It is characterized in that,
It further include inlaying the fine motion parallel institution being arranged in the macro dynamic parallel institution moving platform, in the fine motion parallel institution Inside macro dynamic parallel institution moving platform;The fine motion parallel institution includes micromotion platform, for driving micromotion platform installing The fine motion driving mechanism doing plane motion in slot and turning about the Z axis.
2. novel macro micro- combination platform according to claim 1 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the fine motion parallel institution is structure as a whole with the macro dynamic parallel institution moving platform, by macro dynamic parallel machine Directly processing is formed on structure moving platform.
3. novel macro micro- combination platform according to claim 1 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the macro dynamic parallel institution moving platform is positive triangular structure;The macro dynamic driving mechanism be three groups, and respectively with Three vertex of the macro dynamic parallel institution moving platform are rotatablely connected;Two adjacent groups in three groups of macro dynamic driving mechanisms are macro dynamic Angle between driving mechanism is 120 degree.
4. novel macro micro- combination platform according to claim 3 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the macro dynamic driving mechanism includes setting driving motor on the workbench, drive connecting rod and passively connects Bar, wherein wherein one end of the drive connecting rod is connect with the main shaft of the driving motor by rotational structure, the other end and institute The wherein one end for stating passive connecting rod is connected by rotational structure, and the other end of the passive connecting rod and the macro dynamic parallel institution are dynamic Platform is connected by rotational structure;The rotational structure is made of rotation axis and bearing, wherein the axis side of the rotation axis To vertical with the table top of the workbench.
5. novel macro micro- combination platform according to claim 4 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the driving motor is voice coil motor.
6. novel macro micro- combination platform according to claim 4 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the bearing is active magnetic bearings.
7. novel macro micro- combination platform according to claim 1 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the fine motion driving mechanism includes soft by submissive hinged three full symmetric flexible branches and driving Property branch movement flexible drive mechanism, wherein each flexibility branch includes that the first link block, the second link block and third connect Connect block, wherein first link block is connect with the flexible drive mechanism, and the middle part of first link block and described second connects It connects and is connected between block by flexible hinge;Wherein one end of second link block by flexible hinge be mounted on it is described it is macro it is dynamic simultaneously On online structure moving platform, the other end is connect by flexible hinge with wherein one end of the third link block;The third connection The other end of block is connect by flexible hinge with the micromotion platform.
8. novel macro micro- combination platform according to claim 7 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the micromotion platform is positive triangular structure, and each vertex of the micromotion platform connects with a flexible branch respectively It connects;The flexible drive mechanism is three groups, between the two adjacent groups flexible drive mechanism in three groups of flexible drive mechanisms Angle is 120 degree;Every group of flexible drive mechanism is for driving one group of flexibility branch movement.
9. novel macro micro- combination platform according to claim 1 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, is provided in the middle part of the micromotion platform for installing by the mounting hole of locating module.
10. novel macro micro- combination platform according to claim 8 based on rigid parallel institution and compliant parallel mechanism, It is characterized in that, the flexible drive mechanism includes stack piezoelectric ceramic piece, the stack piezoelectric ceramic piece and described first Link block is structure as a whole.
CN201910629868.0A 2019-07-12 2019-07-12 Novel macro micro- combination platform based on rigid parallel institution and compliant parallel mechanism Pending CN110370229A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110910947A (en) * 2019-12-13 2020-03-24 宁波大学 Single-layer double-station four-degree-of-freedom compliant micromanipulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110910947A (en) * 2019-12-13 2020-03-24 宁波大学 Single-layer double-station four-degree-of-freedom compliant micromanipulator

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