CN202448118U - Two-translation long-stroke parallel precise location platform - Google Patents
Two-translation long-stroke parallel precise location platform Download PDFInfo
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- CN202448118U CN202448118U CN2012200268986U CN201220026898U CN202448118U CN 202448118 U CN202448118 U CN 202448118U CN 2012200268986 U CN2012200268986 U CN 2012200268986U CN 201220026898 U CN201220026898 U CN 201220026898U CN 202448118 U CN202448118 U CN 202448118U
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- 235000014676 Phragmites communis Nutrition 0.000 claims description 13
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- 230000033001 locomotion Effects 0.000 description 8
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Abstract
The utility model provides a two-translation long-stroke parallel precise location platform, comprising a controller, a base, a bilayer compliant mechanism plate, an output platform, two voice coil motors, and two displacement sensors, wherein the bilayer compliant mechanism plate is fixed on the base and is fixed by clapboard between the two layers, the output platform is arranged on the center of an upper-layer compliant mechanism plate, the two voice coil motors are connected with controller signals and are respectively connected with the bilayer compliant mechanism plate, and the two displacement sensors are connected with the control signals and the base. The two-translation long-stroke parallel precise location platform disclosed by the utility model is directly driven by voice coil motors, and saves a middle transmission loop; the voice coil motor has the advantages of large stroke, infinite resolution, no hysteresis, quick response, high acceleration, high speed, small volume, good force characteristic, convenience to control and the like in theory, a laser displacement sensor provides terminal position feedback, the structure symmetry is excellent, and thus the large stroke, high speed and high precision of a system can be greatly ensured.
Description
Technical field
The utility model relates to precisely locating platform, particularly a kind of long stroke precisely locating platform of realizing along X, Y direction.Be suitable for precision positioning engineering fields such as integrated circuit encapsulation, MEMS manufacturing, Laser Processing, biomedicine, microoperation, little assembling.
Background technology
Fields such as integrated circuit encapsulation at present,, MEMS manufacturing, Laser Processing, microoperation, little assembling to big stroke, at a high speed, the increasing demand of high-accuracy position system is urgent.Therefore, various Precision Position Location Systems and device are developed and develop.The two-degree of freedom translation locating platform of current extensive use adopts traditional servo drive chains such as ball-screw; Because transmission link in the middle of existing; Make and have movement clearance between the motion of mechanism pair; The inertia of moving component is big, causes response time, positioning accuracy, speed and the acceleration of system to be difficult to reach the precision positioning requirement.Though adopt the mini positioning platform of piezoelectric ceramics, ultra mangneto driver can reach the nanoscale location, its stroke is little, generally can only reach tens to the hundreds of micron; Though adopt the locating platform of servo motor, piezoelectricity creeping motion type motor can reach big stroke, its movement velocity is too low.
Existing plane two translation navigation systems; Adopt the linear motion guide decoupling mechanism (patent No. 200510010286.2; 200620072502.6, application number 201010150708.7) or air supporting decoupling mechanism (patent No. 2006100114876.7, application number 200910027992.6).The former makes platform have relatively large frictional force, has limited the raising of locating platform speed and precision; Latter's complex structure, and rigidity and bearing capacity are low.
The utility model content
In view of this, be necessary to overcome the shortcomings such as backlass, frictional force and insufficient rigidity in the transmission that has plane two translation locating platforms now, proposed a kind of Precision Position Location System simple in structure to the problem of mentioning in the background technology.The design feature of this device is to adopt parallel institution and novel full compliance structure.This locating platform has advantages such as compact conformation, mobile decoupling, processing and manufacturing be easy.The utility model be suitable for the required big stroke in precision positioning engineering fields such as integrated circuit encapsulation, MEMS manufacturing, Laser Processing, biomedicine, microoperation, little assembling, at a high speed, two translation locating platforms of hi-Fix.
The purpose of the utility model realizes through following technical scheme:
The long stroke parallel precise of a kind of two translations locating platform; It is characterized in that: comprise controller, pedestal, be fixed in the two-layer compliant mechanism plate of fixing through dividing plate on the pedestal, two voice coil motors that are arranged at the output stage of the central authorities of upper strata compliant mechanism plate, are connected with said controller signals and are connected with said two-layer compliant mechanism plate respectively therebetween, and two displacement transducers that are connected and are connected with said pedestal with said controller signals.
Every layer of compliant mechanism plate comprises two splits that laterally arrange, and each split is formed by three composite plate reed-type flexible hinges that are arranged side by side; These three flexible hinges comprise four U type flexible board reeds respectively, and wherein, the flexible board reed opening of flexible hinge that is positioned at two ends is relative, and the opening of the flexible board reed of the flexible hinge in the middle of being positioned at is towards said output stage; A fixing connecting rod that connects the opening two ends of flexible board reed on the flexible hinge of the centre of each split.
Be provided with four pads between the bottom of said two-layer compliant mechanism plate and the pedestal.
The mover of two voice coil motors connects two-layer compliant mechanism plate through connector respectively, and the stator of the voice coil motor that is connected with lower floor compliant mechanism plate is connected with pedestal through an electric machine support, is used to drive lower floor's compliant mechanism plate; Another voice coil motor that is connected with upper strata compliant mechanism plate is connected with pedestal with a backing plate that is arranged at the electric machine support bottom through an electric machine support, is used to drive upper strata compliant mechanism plate.
Each displacement transducer links to each other with pedestal through a location-plate, and the probe of said two displacement transducers is relative with two adjacent side of the dividing plate between the said two-layer compliant mechanism plate respectively, and keeps measuring distance.
Said controller comprises the computer that is provided with USB or RS232 serial ports, the D/A digital to analog converter that is connected with this computer and two voice coil motor driver that are connected with D/A digital to analog converter signal, and these two voice coil motor driver are connected with said two voice coil motors respectively.
Said displacement transducer is a laser displacement sensor.
With compared with techniques, the advantage of the utility model is:
The utility model adopts parallel-connection structure, and driver part is all placed on the base, has reduced motion of mechanism inertia, has improved system stiffness and bearing capacity, has improved the dynamic characteristic of system, has shortened the motion link simultaneously, has reduced system's cumulative errors.
The utility model adopts novel compliance structure to transmit guide rail as decoupling mechanism and displacement, have no gap, do not have rub, exempt to lubricate, do not generate heat, advantages such as high accuracy, high stability, compact conformation.
The utility model adopts the identical submissive plate of double-decker to be assembled into parallel institution, two-layer can disposable line cutting processing, reduce cost.
The utility model adopts voice coil motor directly to drive; Saved middle transmission link; Since the voice coil motor stroke have greatly and in theory unlimited resolution ratio, no hysteresis, fast-response, high acceleration, at a high speed, characteristics such as volume is little, force characteristic good, control is convenient; Laser displacement sensor provides the terminal position feedback, adds good structural symmetry, can guarantee the big stroke and the high-speed, high precision of system preferably.
In sum, the advantage of the utility model can be summarized as:
The full compliance of the parallel-connection decoupling of the utility model mechanism: have parallel institution advantage, compliance mechanism advantage, decoupling mechanism advantage; Double-deck compact parallel institution: compact conformation, and double-layer structure is identical, can disposable line cutting processing, reduce cost.
Description of drawings
Fig. 1 is the perspective view of the utility model embodiment;
Fig. 2 is the controller module structural representation of the utility model embodiment.
The specific embodiment
As shown in Figure 1, the long stroke parallel precise of the two translations locating platform of present embodiment comprises controller (not shown), pedestal 2, is fixed in two-layer compliant mechanism plate on the pedestal 2, output stage 1, two voice coil motors 6 and two displacement transducers 10.
Said two-layer compliant mechanism plate quadrature is provided with, and is fixed with the dividing plate (not shown) between two-layer; Every layer of compliant mechanism plate comprises two splits that laterally arrange 3, and each split 3 is formed by three composite plate reed-type flexible hinges that are arranged side by side 31; These three flexible hinges 31 comprise four U type flexible board reeds 17 respectively, and wherein, flexible board reed 17 openings of flexible hinge 31 that are positioned at two ends are relative, and the opening of the flexible board reed 17 of the flexible hinge 31 in the middle of being positioned at is towards the platform middle part; A fixing connecting rod 4 that connects the opening two ends of flexible board reed 17 is used to eliminate the flexural deformation of four flexible board reeds 17 on the flexible hinge 31 of the centre of each split 3; Output stage 1 is arranged at the central authorities of upper strata compliant mechanism plate, its with pedestal 2 through said two-layer compliant mechanism plate and be arranged at compliant mechanism plate bottom and pedestal 2 between four pad (not shown)s be connected; The mover of two voice coil motors 6 connects two-layer compliant mechanism plate through connector 7 respectively, and the stator of the voice coil motor 6 that is connected with lower floor compliant mechanism plate is connected with pedestal 2 through an electric machine support 8, in order to driving lower floor compliant mechanism plate; Another voice coil motor 6 that is connected with upper strata compliant mechanism plate is connected with pedestal 2 with a backing plate 9 that is arranged at electric machine support 8 bottoms through an electric machine support 8, in order to drive upper strata compliant mechanism plate; Each displacement transducer 10 links to each other with pedestal 2 through a location-plate 11; Two adjacent side of said mechanism plate dividing plate are used as measurement target; The probe of two displacement transducers 10 is relative with two adjacent side of this mechanism's plate dividing plate respectively, and keeps certain measuring distance; Said controller is connected with two voice coil motors 6 and two displacement transducers 10; Two displacement transducers 10 feed back to controller with the positional information of output stage 1; Form closed loop feedback; Said controller just can be adjusted the position and the motion of output stage 1 through the output of two voice coil motors 6 of control, reaches the location and the precision that need.Said displacement transducer 10 is a laser displacement sensor.
Controller is made up of computer and serial ports thereof, the D/A digital to analog converter that is connected with computer and two voice coil motor driver being connected with the D/A digital to analog converter jointly, and two voice coil motor driver are connected with said two voice coil motors 6 respectively.Said computer is gathered the digital output of said displacement transducer 10 through USB or RS232 serial ports; Two displacement transducers 10 feed back to computer with the positional information of output stage 1 through USB or RS232 serial ports; Form closed loop feedback, said computer adopts certain control algolithm (for example pid control algorithm) to control the output of two voice coil motors 6 again via voice coil motor driver through D/A digital to analog converter output analog voltage signal.
The above embodiment has only expressed several kinds of embodiments of the utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to the protection domain of the utility model.Therefore, the protection domain of the utility model patent should be as the criterion with accompanying claims.
Claims (8)
1. the long stroke parallel precise of translation locating platform; It is characterized in that: comprise controller, pedestal, be fixed in the two-layer compliant mechanism plate of fixing through dividing plate on the pedestal, two voice coil motors that are arranged at the output stage of the central authorities of upper strata compliant mechanism plate, are connected with said controller signals and are connected with said two-layer compliant mechanism plate respectively therebetween, and two displacement transducers that are connected and are connected with said pedestal with said controller signals.
2. locating platform according to claim 1 is characterized in that, every layer of compliant mechanism plate comprises two splits that laterally arrange, and each split is formed by three composite plate reed-type flexible hinges that are arranged side by side; These three flexible hinges comprise four U type flexible board reeds respectively, and wherein, the flexible board reed opening of flexible hinge that is positioned at two ends is relative, and the opening of the flexible board reed of the flexible hinge in the middle of being positioned at is towards said output stage; A fixing connecting rod that connects the opening two ends of said U type flexible board reed on the flexible hinge of the centre of each split.
3. locating platform according to claim 1 is characterized in that, is provided with four pads between the bottom of said two-layer compliant mechanism plate and the pedestal.
4. locating platform according to claim 1; It is characterized in that; The mover of said two voice coil motors connects two-layer compliant mechanism plate through connector respectively; The stator of the voice coil motor that is connected with lower floor compliant mechanism plate is connected with pedestal through an electric machine support, is used to drive lower floor's compliant mechanism plate; Another voice coil motor that is connected with upper strata compliant mechanism plate is connected with pedestal with a backing plate that is arranged at the electric machine support bottom through an electric machine support, is used to drive upper strata compliant mechanism plate.
5. locating platform according to claim 1 is characterized in that, said each displacement transducer links to each other with pedestal through a location-plate.
6. locating platform according to claim 1 is characterized in that, the probe of said two displacement transducers is relative with two adjacent side of the dividing plate between the said two-layer compliant mechanism plate respectively, and keeps measuring distance.
7. locating platform according to claim 1; It is characterized in that; Said controller comprises the computer that is provided with USB or RS232 serial ports, the D/A digital to analog converter that is connected with this computer and two voice coil motor driver that are connected with D/A digital to analog converter signal, and these two voice coil motor driver are connected with said two voice coil motors respectively.
8. locating platform according to claim 1 is characterized in that: said displacement transducer is a laser displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200268986U CN202448118U (en) | 2012-01-20 | 2012-01-20 | Two-translation long-stroke parallel precise location platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200268986U CN202448118U (en) | 2012-01-20 | 2012-01-20 | Two-translation long-stroke parallel precise location platform |
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| CN202448118U true CN202448118U (en) | 2012-09-26 |
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| CN2012200268986U Expired - Lifetime CN202448118U (en) | 2012-01-20 | 2012-01-20 | Two-translation long-stroke parallel precise location platform |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103507451A (en) * | 2013-10-23 | 2014-01-15 | 厦门理工学院 | Micro contact printing device based on voice coil motors and work process thereof |
| CN106125774A (en) * | 2016-08-31 | 2016-11-16 | 华南理工大学 | Biaxial synchronous motion control device based on laser displacement sensor feedback and method |
| CN107450177A (en) * | 2017-04-24 | 2017-12-08 | 西安应用光学研究所 | A kind of high accuracy surely takes aim at the hinged fast mirror system of Universal flexible in system |
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN110045383A (en) * | 2016-11-30 | 2019-07-23 | 中国人民解放军陆军炮兵防空兵学院 | A kind of laser Active denial system |
| CN110905909A (en) * | 2019-12-10 | 2020-03-24 | 中国科学院宁波材料技术与工程研究所 | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof |
| CN113464780A (en) * | 2021-05-25 | 2021-10-01 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
-
2012
- 2012-01-20 CN CN2012200268986U patent/CN202448118U/en not_active Expired - Lifetime
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103507451B (en) * | 2013-10-23 | 2015-09-02 | 厦门理工学院 | A kind of micro-contact printing device based on voice coil motor and workflow thereof |
| CN103507451A (en) * | 2013-10-23 | 2014-01-15 | 厦门理工学院 | Micro contact printing device based on voice coil motors and work process thereof |
| CN106125774A (en) * | 2016-08-31 | 2016-11-16 | 华南理工大学 | Biaxial synchronous motion control device based on laser displacement sensor feedback and method |
| CN106125774B (en) * | 2016-08-31 | 2023-09-26 | 华南理工大学 | Double-shaft synchronous motion control device and method based on laser displacement sensor feedback |
| CN110045383B (en) * | 2016-11-30 | 2023-03-14 | 中国人民解放军陆军炮兵防空兵学院 | Laser active rejection system |
| CN110045383A (en) * | 2016-11-30 | 2019-07-23 | 中国人民解放军陆军炮兵防空兵学院 | A kind of laser Active denial system |
| CN107450177A (en) * | 2017-04-24 | 2017-12-08 | 西安应用光学研究所 | A kind of high accuracy surely takes aim at the hinged fast mirror system of Universal flexible in system |
| CN107450177B (en) * | 2017-04-24 | 2019-10-22 | 西安应用光学研究所 | A kind of high-precision surely takes aim at the hinged fast mirror system of Universal flexible in system |
| CN108389603B (en) * | 2018-04-03 | 2023-09-01 | 中国科学院宁波材料技术与工程研究所 | Double-composite flexible parallel four-bar mechanism |
| CN108389603A (en) * | 2018-04-03 | 2018-08-10 | 中国科学院宁波材料技术与工程研究所 | A kind of double composite and flexible parallelogram lindages |
| CN110905909A (en) * | 2019-12-10 | 2020-03-24 | 中国科学院宁波材料技术与工程研究所 | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof |
| CN110905909B (en) * | 2019-12-10 | 2023-09-12 | 中国科学院宁波材料技术与工程研究所 | Planar three-degree-of-freedom precision positioning platform, and use method and control method thereof |
| CN113464780A (en) * | 2021-05-25 | 2021-10-01 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
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Granted publication date: 20120926 |
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