CN103963033B - The one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle - Google Patents
The one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle Download PDFInfo
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- CN103963033B CN103963033B CN201410214605.0A CN201410214605A CN103963033B CN 103963033 B CN103963033 B CN 103963033B CN 201410214605 A CN201410214605 A CN 201410214605A CN 103963033 B CN103963033 B CN 103963033B
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Abstract
The present invention relates to by precision one-dimensional motion occasion, can be used for the accurate displacement of general motion in one dimension platform and compensate.Present invention relates particularly to the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle, including motion sub-platform and respective drivers, micromotion working platform, utilize by the thin film group of frequency adjustment mechanism tension adjusting as flexible hinge, it is achieved manually or dynamically adjusting of the frequency of vibration of one-dimensional micromotion platform.The present invention adopts said structure, based on prestress membrane, frequency-adjustable, according to different operating modes and driving frequency, can regulate before work or in work process the natural frequency of micromotion platform.
Description
Technical field
The present invention relates to precision movement platform, can be used for accurate operation and grand micro-composite high speed fine compensation, present invention relates particularly to the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle.
Background technology
In order to realize one-dimensional precise motion, accurate, stable feed mechanism is particularly important, because it is closely related with the quality of product.It addition, complicated freeform optics surface is little due to volume, micro-feed mechanism is proposed strict requirement by high accuracy especially.Fine Feed system is to process the basis of this series products, and it is widely used in fast tool servo feed system, in micro displacement workbench and grand micro-compound platform etc..Traditional one-dimensional micro-feeding device generally adopts fixed frequency to design; material behavior and foozle are proposed high requirement; especially when processing different product; its driving frequency would generally change; the motion platform displacement equations factor making fixed frequency is inconsistent, so that displacement equations distortion.
In first technology 1: rigidity adjustable fast tool servo device (application for a patent for invention 201210055119.X) has invented the adjustable fast tool servo mechanism of a kind of rigidity, the principle of this mechanism is to adopt the flexible hinge being arranged symmetrically with, and eliminates vertical association campaign.Stiffness tuning is by holddown spring forward-mounted, carrys out this change rigidity only by changing spring, it is impossible to continuously adjustabe.
In first technology 2: a kind of fast tool servo mechanism based on flexible hinge thin film invented by a kind of frequency-adjustable fast tool servo feed arrangement (patent application number: 201210250524.7) based on flexible hinge enlarger, frequency Principles of Regulation are the tension force by thin film, it is possible to achieve the continuously adjustabe of frequency and rigidity.But, this mechanism adopts displacement equations mode to have the flexible hinge that stress is concentrated, and affects the service life of mechanism.
Additionally, above-mentioned two invention is when adopting Piezoelectric Ceramic, it is transmit load by contact and it needs to certain pretightning force, causes the asymmetric work of the movement clearance in contact process and flexible hinge.For this, present invention eliminates flexible hinge enlarger, and adopt voice coil motor to substitute piezoelectric ceramics, by non-contacting driving and displacement measurement, real-time judge load working condition, and the change according to load working condition, dynamically regulate the frequency of driving mechanism, it is possible to achieve the Intelligent Matching of dynamic characteristic.
Summary of the invention
It is an object of the invention to propose the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle, based on prestress membrane, frequency-adjustable, adapt to different kinetic characteristic demands.
For reaching this purpose, the present invention by the following technical solutions:
The one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle, it is characterised in that: include frame (1), thin film group (201), motion sub-platform (202), outside framework (203), driver, work platforms (4) and frequency adjustment mechanism (7)；
The both sides of described motion sub-platform (202) are connected with described outside framework (203) inwall by described thin film group (201), thin film in described thin film group (201) is for being arranged in parallel, and the length direction of described thin film is perpendicular to the direction of motion of described motion sub-platform (202)；
Described outside framework (203) is rigidly secured to described frame (1), and described work platforms (4) is rigidly secured to described motion sub-platform (202)；
Described driver includes stator (301) and mover (302), described stator (301) is fixed on described frame (1) or described outside framework (203), and described mover (302) is fixed on described motion sub-platform (202)；
Described outside framework (203) and described thin film group (201) junction are provided with groove (2), making described outside framework (203) inner side form relatively thin deformable elastic component (5), described outside framework (203) is provided with the described frequency adjustment mechanism (7) regulating described elastic component (5) degree of deformation.
Also include micro-displacement sensor (6), be located at the end of the direction of feed of described motion sub-platform (202).
Described micro-displacement sensor (6) is capacitance type sensor.
Described micro-displacement sensor (6) is inductance type transducer.
The non-working surface of described micro-displacement sensor (6) is provided with insulating barrier.
Described thin film group (201), motion sub-platform (202) and outside framework (203) are integral type structure.
Described driver is voice coil motor.
Described driver is piezoelectric ceramic actuator.
Described frequency adjustment mechanism (7) is the bolt through described groove (2), and its two ends are connected to the both sides of described groove (2).
Described frequency adjustment mechanism (7) is the piezoelectric ceramic actuator through described groove (2), and its two ends are connected to the both sides of described groove (2).
The know-why that micromotion platform frequency proposed by the invention regulates is: the natural frequency of the compliant mechanism that prestress membrane is constituted is relevant to the tension force of prestress membrane, carry out the natural frequency of governor motion by regulating the tensile force in prestress membrane, meet the requirement of different operating mode.
Owing to adopting technique scheme, the frequency that the present invention proposes regulates one-dimensional micromotion platform and has the advantage that
1. have employed based on regulate prestress membrane tensile force come changing mechanism natural frequency design, it is possible to the kinetic characteristic of manual or dynamic guiding mechanism, improve and improve the performance of micromotion platform.
2. in one-dimensional micromotion platform proposed by the invention, the stator of the big quality of driver is all fixed in frame, reduces the motional inertia of micromotion platform, is conducive to improving the response speed of micromotion platform.
3. one-dimensional micromotion platform proposed by the invention adopts integral type compliant mechanism to realize one dimension displacement, it does not have pair clearance, it is possible to adapts to height and performs the working environment of frequency.
Accompanying drawing explanation
The axis of no-feathering that Fig. 1 is a kind of example of the present invention measures intention
Fig. 2 is the front view of a kind of example of the present invention
Fig. 3 is the integral structure schematic diagram of the thin film group of the one-dimensional micromotion platform of the present invention, motion sub-platform and outside framework
The axis of no-feathering that Fig. 4 is the another kind of example of the present invention measures intention
Fig. 5 is the front view of the another kind of example of the present invention.
Wherein, frame 1, groove 2, thin film group 201, motion sub-platform 202, outside framework 203, stator 301, mover 302, work platforms 4, elastic component 5, micro-displacement sensor 6, frequency adjustment mechanism 7, piezoelectric ceramic piece 701, outside framework 203.
Detailed description of the invention
Technical scheme is further illustrated below in conjunction with accompanying drawing and by detailed description of the invention.
As shown in Figures 1 and 2, based on the one-dimensional micromotion platform of rigidity frequency-adjustable of Stress stiffening principle, including frame 1, thin film group 201, motion sub-platform 202, outside framework 203, driver, work platforms 4 and frequency adjustment mechanism 7；
The both sides of described motion sub-platform 202 are connected with described outside framework 203 inwall by described thin film group 201, and the thin film in described thin film group 201 is for being arranged in parallel, and the length direction of described thin film is perpendicular to the direction of motion of described motion sub-platform 202；
Described outside framework 203 is rigidly secured to described frame 1, and described work platforms 4 is rigidly secured to described motion sub-platform 202；
Described driver includes stator 301 and mover 302, and described stator 301 is fixed on described frame 1 or described outside framework 203, and described mover 302 is fixed on described motion sub-platform 202, for actuation movement sub-platform 202；
Described outside framework 203 is provided with groove 2 with described thin film group 201 junction, makes to be formed inside described outside framework 203 relatively thin deformable elastic component 5, and described outside framework 203 is provided with the described frequency adjustment mechanism 7 regulating described elastic component 5 degree of deformation.
Motion sub-platform 202 described in described driver drives and connected work platforms 4 produce one-dimensional micro-displacement feeding.Under the restraining function of described thin film group 201, described motion parts is suppressed in the motion of non-direction of feed.
Described work platforms is provided with the functional units such as cutter, produces one dimension displacement, complete corresponding technological action under the driving effect of described driver.
Mechanism's natural frequency that the tightness of described thin film group 201 can change in above-mentioned micromotion is changed, thus changing described work platforms 4 kinetic characteristic by described frequency adjustment mechanism 7.
Also include micro-displacement sensor 6, be located at the end of the direction of feed of described motion sub-platform 202.One-dimensional micro-displacement for described detection work platforms 4.
Described micro-displacement sensor 6 is capacitance type sensor.
Described micro-displacement sensor 6 is inductance type transducer.
The non-working surface of described micro-displacement sensor 6 is provided with insulating barrier, is used for preventing displacement transducer from being disturbed by other metal materials, affects certainty of measurement.
As it is shown on figure 3, described thin film group 201, motion sub-platform 202 and outside framework 203 are integral type structure.Obtained through the mode such as milling, spark machined by whole block material, it is to avoid the rigging error of part, it is possible to improve platform kinematic accuracy.
Described driver is voice coil motor.
Described driver is piezoelectric ceramic actuator.
Described frequency adjustment mechanism 7 is the bolt through described groove 2, and its two ends are connected to the both sides of described groove 2.
Described frequency adjustment mechanism 7 is bolt.The manually adjustable length direction of described bolt produces displacement, changes the degree of deformation of described elastic component 5, and then changes the thin film tensile force of thin film group 201, it is achieved the dynamic adjustment to the structural natural frequencies of platform.
Described frequency adjustment mechanism 7 is the piezoelectric ceramic actuator through described groove 2, and its two ends are connected to the both sides of described groove 2.
As shown in Figure 4, Figure 5, described frequency adjustment mechanism 7 includes bolt and piezoelectric ceramic piece 701.Described piezoelectric ceramic piece 701 can produce displacement at the length direction of bolt under applied voltage effect, changes the degree of deformation of described elastic component 5, and then changes the thin film tensile force of described thin film group 201, it is achieved the dynamic adjustment to the structural natural frequencies of platform.
The know-why of the present invention is described above in association with specific embodiment.These descriptions are intended merely to explanation principles of the invention, and can not be construed to limiting the scope of the invention by any way.Based on explanation herein, those skilled in the art need not pay performing creative labour can associate other detailed description of the invention of the present invention, and these modes fall within protection scope of the present invention.
Claims (10)
1. based on the one-dimensional micromotion platform of rigidity frequency-adjustable of Stress stiffening principle, it is characterised in that: include frame (1), thin film group (201), motion sub-platform (202), outside framework (203), driver, work platforms (4) and frequency adjustment mechanism (7)；
The both sides of described motion sub-platform (202) are connected with described outside framework (203) inwall by described thin film group (201), thin film in described thin film group (201) is for being arranged in parallel, and the length direction of described thin film is perpendicular to the direction of motion of described motion sub-platform (202)；
Described outside framework (203) is rigidly secured to described frame (1), and described work platforms (4) is rigidly secured to described motion sub-platform (202)；
Described driver includes stator (301) and mover (302), described stator (301) is fixed on described frame (1) or described outside framework (203), and described mover (302) is fixed on described motion sub-platform (202)；
Described outside framework (203) and described thin film group (201) junction are provided with groove (2), making described outside framework (203) inner side form relatively thin deformable elastic component (5), described outside framework (203) is provided with the described frequency adjustment mechanism (7) regulating described elastic component (5) degree of deformation.
2. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: also include micro-displacement sensor (6), be located at the end of the direction of feed of described motion sub-platform (202).
3. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 2, it is characterised in that: described micro-displacement sensor (6) is capacitance type sensor.
4. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 2, it is characterised in that: described micro-displacement sensor (6) is inductance type transducer.
5. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 2, it is characterised in that: the non-working surface of described micro-displacement sensor (6) is provided with insulating barrier.
6. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: described thin film group (201), motion sub-platform (202) and outside framework (203) they are integral type structure.
7. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: described driver is voice coil motor.
8. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: described driver is piezoelectric ceramic actuator.
9. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterized in that: described frequency adjustment mechanism (7) is the bolt through described groove (2), and its two ends are connected to the both sides of described groove (2).
10. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterized in that: described frequency adjustment mechanism (7) is the piezoelectric ceramic actuator through described groove (2), and its two ends are connected to the both sides of described groove (2).
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| CN104440343B (en) * | 2014-11-26 | 2017-05-10 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| CN104889793A (en) * | 2015-06-08 | 2015-09-09 | 广东工业大学 | Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform |
| CN104889950A (en) * | 2015-06-08 | 2015-09-09 | 广东工业大学 | Dynamic characteristic adjustable micro-motion platform |
| CN104889792A (en) * | 2015-06-08 | 2015-09-09 | 广东工业大学 | Variable damping type mobile support and tension composite adjusting micro-motion platform |
| CN106002312B (en) * | 2016-06-29 | 2018-01-23 | 广东工业大学 | A kind of single driving Coupled Rigid-flexible precision movement platform and its implementation and application |
| CN106965133B (en) * | 2017-05-11 | 2019-04-23 | 天津大学 | A kind of Three Degree Of Freedom locating platform of stiffness variable |
| CN107492398A (en) * | 2017-09-12 | 2017-12-19 | 苏州迈客荣自动化技术有限公司 | A kind of one-dimensional micro-displacement platform |
| CN109164385B (en) * | 2018-07-26 | 2024-04-12 | 广东工业大学 | Rigidity adjustable coil motor load test platform |
| CN108747534B (en) * | 2018-08-13 | 2024-09-13 | 广州铁路职业技术学院（广州铁路机械学校） | Quick knife servo device with integral flexible hinge and adjustable rigidity |
| CN109531184B (en) * | 2018-12-13 | 2023-10-03 | 广东工业大学 | Rigid-flexible coupling platform with rigidity adjusted on two sides and motion platform |
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Application publication date: 20140806 Assignee: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Assignor: Guangdong University of Technology Contract record no.: 2017440000048 Denomination of invention: One-dimensional micro-positioning platform with adjustable rigidity frequency based on stress rigidization principle Granted publication date: 20160629 License type: Common License Record date: 20170214 |
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Effective date of registration: 20210909 Address after: 528000 room 103a, building 1, No.28, East 1st block, Jiansha Road, Danzao Town, Nanhai District, Foshan City, Guangdong Province (residence declaration) Patentee after: Foshan Huadao Chaojing Technology Co.,Ltd. Address before: 510006 No. 100 West Ring Road, Panyu District University, Guangdong, Guangzhou Patentee before: GUANGDONG University OF TECHNOLOGY |