CN103963033B - The one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle - Google Patents

The one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle Download PDF

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CN103963033B
CN103963033B CN201410214605.0A CN201410214605A CN103963033B CN 103963033 B CN103963033 B CN 103963033B CN 201410214605 A CN201410214605 A CN 201410214605A CN 103963033 B CN103963033 B CN 103963033B
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platform
frequency
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motion
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CN103963033A (en
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杨志军
白有盾
陈新
高健
杨海东
王梦
汤晖
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Foshan Huadao Chaojing Technology Co ltd
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Guangdong University of Technology
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Abstract

本发明涉及用精密一维运动场合,可用于通用一维运动平台的精密位移补偿。本发明具体涉及基于应力刚化原理的刚度频率可调一维微动平台,包括运动子平台及对应驱动器、微动工作平台,利用通过频率调节机构调节张紧力的薄膜组作为柔性铰链,实现一维微动平台的振动频率的手动或动态调整。本发明采用上述结构,基于预应力膜,频率可调,能根据不同的工况和驱动频率,可在工作前或工作过程中调节微动平台的固有频率。

The invention relates to a precise one-dimensional motion occasion and can be used for precise displacement compensation of a general one-dimensional motion platform. The invention specifically relates to a one-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress stiffening, including a motion sub-platform, a corresponding driver, and a micro-motion working platform, and uses a film group that adjusts tension through a frequency adjustment mechanism as a flexible hinge to realize Manual or dynamic adjustment of vibration frequency of one-dimensional micro-motion platform. The present invention adopts the above-mentioned structure, is based on the prestressed film, and has adjustable frequency, and can adjust the natural frequency of the micro-motion platform before or during work according to different working conditions and driving frequencies.

Description

基于应力刚化原理的刚度频率可调一维微动平台Stiffness Frequency Adjustable One-dimensional Micro-motion Platform Based on Stress Stiffening Principle

技术领域technical field

本发明涉及精密运动平台,可用于精密操作和宏微复合高速精密补偿,本发明具体涉及基于应力刚化原理的刚度频率可调一维微动平台。The invention relates to a precision motion platform, which can be used for precision operation and macro-micro composite high-speed precision compensation. The invention specifically relates to a one-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress rigidification.

背景技术Background technique

为了实现一维精密运动,精确、稳定的进给机构显得尤为重要,因为它与产品的质量密切相关。另外,复杂光学自由曲面由于体积小,高精度更是对微进给机构提出了严格的要求。微进给系统是加工此类产品的基础,其广泛应用于快刀伺服进给系统,微动工作台和宏微复合平台等中。传统的一维微进给装置通常采用固定频率设计,对材料特性和制造误差提出了极高的要求,尤其在加工不同产品时,其驱动频率通常会变化,使得固定频率的运动平台位移放大因子不一致,从而使得位移放大失真。In order to realize one-dimensional precision movement, accurate and stable feed mechanism is particularly important, because it is closely related to the quality of the product. In addition, due to the small size and high precision of the complex optical free-form surface, strict requirements are placed on the micro-feed mechanism. The micro-feed system is the basis for processing such products, and it is widely used in fast-tool servo feed systems, micro-motion worktables, and macro-micro composite platforms. The traditional one-dimensional micro-feeding device usually adopts a fixed frequency design, which puts forward extremely high requirements on material characteristics and manufacturing errors. Especially when processing different products, its driving frequency usually changes, so that the displacement amplification factor of the fixed frequency motion platform Inconsistent, which makes the displacement amplification distortion.

在先技术1:刚度可调节的快刀伺服器(发明专利申请号201210055119.X)发明了一种刚度可调的快刀伺服机构,该机构的原理是采用对称布置的柔性铰链,消除垂向伴生运动。刚度调节是通过安装在前面的压紧弹簧,只能通过更换弹簧来该改变刚度,不能连续可调。Prior Technology 1: Fast Knife Servo with Adjustable Stiffness (Patent Application No. 201210055119.X) invented a fast knife servo mechanism with adjustable stiffness. The principle of this mechanism is to use symmetrically arranged flexible hinges to eliminate vertical accompanying motion . The stiffness adjustment is through the compression spring installed in the front, the stiffness can only be changed by replacing the spring, and cannot be continuously adjusted.

在先技术2:一种基于柔性铰链放大机构的频率可调快刀伺服进给装置(发明申请号:201210250524.7)发明了一种基于柔性铰链薄膜的快刀伺服机构,频率调节原理是通过薄膜的张力,可以实现频率和刚度的连续可调。但是,该机构采用位移放大方式存在有应力集中的柔性铰链,影响机构的使用寿命。Prior art 2: A frequency-adjustable fast-knife servo feed device based on a flexible hinge amplifying mechanism (invention application number: 201210250524.7) invented a fast-knife servo mechanism based on a flexible hinge film. The principle of frequency adjustment is through the tension of the film. Continuously adjustable frequency and stiffness can be realized. However, the mechanism adopts a displacement amplification method and there is a flexible hinge with stress concentration, which affects the service life of the mechanism.

此外,上述两个发明在采用压电陶瓷驱动时,是通过接触来传递载荷,并需要一定的预紧力,造成了接触过程中的运动间隙和柔性铰链的非对称工作。为此,本发明取消了柔性铰链放大机构,并采用音圈电机替代压电陶瓷,通过非接触的驱动和位移测量,实时判断载荷工况,并根据载荷工况的变化,动态调节驱动机构的频率,可以实现动态特性的智能匹配。In addition, when the above two inventions are driven by piezoelectric ceramics, the load is transmitted through contact, and a certain pre-tightening force is required, resulting in a movement gap during the contact process and asymmetric work of the flexible hinge. For this reason, the present invention cancels the flexible hinge amplifying mechanism, and uses a voice coil motor to replace the piezoelectric ceramics. Through non-contact driving and displacement measurement, the load condition can be judged in real time, and the driving mechanism can be dynamically adjusted according to the change of the load condition. Frequency, intelligent matching of dynamic characteristics can be realized.

发明内容Contents of the invention

本发明的目的在于提出基于应力刚化原理的刚度频率可调一维微动平台,基于预应力膜,频率可调,适应不同的运动特性需求。The purpose of the present invention is to propose a one-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress stiffening. Based on the prestressed film, the frequency can be adjusted to meet the requirements of different motion characteristics.

为达此目的,本发明采用以下技术方案:For reaching this purpose, the present invention adopts following technical scheme:

基于应力刚化原理的刚度频率可调一维微动平台,其特征在于:包括机架(1)、薄膜组(201)、运动子平台(202)、外框架(203)、驱动器、工作平台(4)和频率调节机构(7);A one-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress stiffening, characterized in that it includes a frame (1), a film group (201), a motion sub-platform (202), an outer frame (203), a driver, and a working platform (4) and frequency adjustment mechanism (7);

所述运动子平台(202)的两侧通过所述薄膜组(201)与所述外框架(203)内壁连接,所述薄膜组(201)内的薄膜为平行布置,且所述薄膜的长度方向垂直于所述运动子平台(202)的运动方向;Both sides of the moving sub-platform (202) are connected with the inner wall of the outer frame (203) through the film group (201), the films in the film group (201) are arranged in parallel, and the length of the film is The direction is perpendicular to the moving direction of the moving sub-platform (202);

所述外框架(203)刚性固定于所述机架(1),所述工作平台(4)刚性固定于所述运动子平台(202);The outer frame (203) is rigidly fixed to the frame (1), and the working platform (4) is rigidly fixed to the moving sub-platform (202);

所述驱动器包括有定子(301)和动子(302),所述的定子(301)固定于所述机架(1)或者所述外框架(203),所述动子(302)固定在所述运动子平台(202)上;The driver includes a stator (301) and a mover (302), the stator (301) is fixed on the frame (1) or the outer frame (203), and the mover (302) is fixed on on the sports sub-platform (202);

所述外框架(203)与所述薄膜组(201)连接处设有槽(2),使所述外框架(203)内侧形成较薄的可变形的弹性件(5),所述外框架(203)设有调节所述弹性件(5)变形度的所述频率调节机构(7)。A groove (2) is provided at the joint between the outer frame (203) and the film group (201), so that a thinner deformable elastic member (5) is formed inside the outer frame (203), and the outer frame (203) The frequency adjustment mechanism (7) for adjusting the degree of deformation of the elastic member (5) is provided.

还包括微位移传感器(6),设于所述运动子平台(202)的进给方向的端部。It also includes a micro-displacement sensor (6), which is arranged at the end of the moving sub-platform (202) in the feeding direction.

所述微位移传感器(6)为电容式传感器。The micro-displacement sensor (6) is a capacitive sensor.

所述微位移传感器(6)为电感式传感器。The micro-displacement sensor (6) is an inductive sensor.

所述微位移传感器(6)的非工作面设置有绝缘层。The non-working surface of the micro-displacement sensor (6) is provided with an insulating layer.

所述薄膜组(201)、运动子平台(202)和外框架(203)为一体式结构。The film group (201), the moving sub-platform (202) and the outer frame (203) are of an integrated structure.

所述驱动器为音圈电机。The driver is a voice coil motor.

所述驱动器为压电陶瓷驱动器。The driver is a piezoelectric ceramic driver.

所述频率调节机构(7)为穿过所述槽(2)的螺栓,其两端分别连接于所述槽(2)的两侧。The frequency adjusting mechanism (7) is a bolt passing through the slot (2), and its two ends are respectively connected to both sides of the slot (2).

所述频率调节机构(7)为穿过所述槽(2)的压电陶瓷驱动器,其两端分别连接于所述槽(2)的两侧。The frequency adjustment mechanism (7) is a piezoelectric ceramic driver passing through the slot (2), and its two ends are respectively connected to both sides of the slot (2).

本发明所提出的微动平台频率调节的技术原理为:预应力膜所构成的柔顺机构的固有频率与预应力膜的张力相关,通过调节预应力膜内的张紧力来调节机构的固有频率,满足不同工况的要求。The technical principle of the frequency adjustment of the micro-motion platform proposed by the present invention is: the natural frequency of the compliant mechanism composed of the prestressed film is related to the tension of the prestressed film, and the natural frequency of the mechanism is adjusted by adjusting the tension in the prestressed film , to meet the requirements of different working conditions.

由于采用上述技术方案,本发明提出的频率调节一维微动平台具有以下优点:Due to the adoption of the above technical solution, the frequency-adjusted one-dimensional micro-motion platform proposed by the present invention has the following advantages:

1.采用了基于调节预应力膜张紧力来改变机构固有频率的的设计方案,可以手动或动态的调整机构的运动特性,改善并提高微动平台的性能。1. A design scheme based on adjusting the tension of the prestressed membrane to change the natural frequency of the mechanism is adopted, which can manually or dynamically adjust the motion characteristics of the mechanism, and improve the performance of the micro-motion platform.

2.本发明所提出的一维微动平台中驱动器的大质量的定子都固定在机架上,减小了微动平台的运动惯性,有利于提高微动平台的响应速度。2. The large-mass stators of the driver in the one-dimensional micro-motion platform proposed by the present invention are all fixed on the frame, which reduces the motion inertia of the micro-motion platform and is conducive to improving the response speed of the micro-motion platform.

3.本发明所提出的一维微动平台采用一体式柔顺机构来实现一维位移,没有运动副间隙,可以适应高执行频率的工作环境。3. The one-dimensional micro-movement platform proposed by the present invention adopts an integrated compliant mechanism to realize one-dimensional displacement, without gaps between motion pairs, and can adapt to the working environment with high execution frequency.

附图说明Description of drawings

图1是本发明一种实例的结构轴测示意图Fig. 1 is a structural axonometric schematic view of an example of the present invention

图2是本发明的一种实例的正视图Fig. 2 is the front view of a kind of example of the present invention

图3是本发明的一维微动平台的薄膜组、运动子平台和外框架的一体式结构示意图Fig. 3 is a schematic view of the integrated structure of the film group, the motion sub-platform and the outer frame of the one-dimensional micro-motion platform of the present invention

图4是本发明的另一种实例的结构轴测示意图Fig. 4 is the structural axonometric schematic diagram of another kind of example of the present invention

图5是本发明的另一种实例的正视图。Fig. 5 is a front view of another example of the present invention.

其中,机架1,槽2,薄膜组201,运动子平台202,外框架203,定子301,动子302,工作平台4,弹性件5,微位移传感器6,频率调节机构7,压电陶瓷片701,外框架203。Among them, frame 1, slot 2, film group 201, motion sub-platform 202, outer frame 203, stator 301, mover 302, working platform 4, elastic member 5, micro-displacement sensor 6, frequency adjustment mechanism 7, piezoelectric ceramics Sheet 701, outer frame 203.

具体实施方式detailed description

下面结合附图并通过具体实施方式来进一步说明本发明的技术方案。The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

如图1及图2所示,基于应力刚化原理的刚度频率可调一维微动平台,包括机架1、薄膜组201、运动子平台202、外框架203、驱动器、工作平台4和频率调节机构7;As shown in Figures 1 and 2, the one-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress stiffening includes a frame 1, a film group 201, a motion sub-platform 202, an outer frame 203, a driver, a working platform 4 and a frequency Adjustment mechanism 7;

所述运动子平台202的两侧通过所述薄膜组201与所述外框架203内壁连接,所述薄膜组201内的薄膜为平行布置,且所述薄膜的长度方向垂直于所述运动子平台202的运动方向;Both sides of the moving sub-platform 202 are connected to the inner wall of the outer frame 203 through the film group 201, the films in the film group 201 are arranged in parallel, and the length direction of the films is perpendicular to the moving sub-platform 202 movement direction;

所述外框架203刚性固定于所述机架1,所述工作平台4刚性固定于所述运动子平台202;The outer frame 203 is rigidly fixed to the frame 1, and the working platform 4 is rigidly fixed to the moving sub-platform 202;

所述驱动器包括有定子301和动子302,所述的定子301固定于所述机架1或者所述外框架203,所述动子302固定在所述运动子平台202上,用来驱动运动子平台202;The driver includes a stator 301 and a mover 302, the stator 301 is fixed on the frame 1 or the outer frame 203, and the mover 302 is fixed on the moving sub-platform 202 for driving movement sub-platform 202;

所述外框架203与所述薄膜组201连接处设有槽2,使所述外框架203内侧形成较薄的可变形的弹性件5,所述外框架203设有调节所述弹性件5变形度的所述频率调节机构7。The connection between the outer frame 203 and the film group 201 is provided with a groove 2, so that the inner side of the outer frame 203 forms a thinner deformable elastic member 5, and the outer frame 203 is provided to adjust the deformation of the elastic member 5 Degree of the frequency adjustment mechanism 7.

所述驱动器驱动所述运动子平台202及与其连接的工作平台4产生一维微位移进给。在所述薄膜组201的牵制作用下,所述运动部分在非进给方向的运动被抑制。The driver drives the moving sub-platform 202 and the working platform 4 connected thereto to generate one-dimensional micro-displacement feeding. Under the restraining effect of the film group 201, the movement of the moving part in the non-feeding direction is restrained.

所述工作平台安装有刀具等功能组件,在所述驱动器的驱动作用下产生一维位移,完成相应的工艺动作。The working platform is equipped with functional components such as knives, which generate one-dimensional displacement under the driving action of the driver to complete the corresponding process action.

通过所述频率调节机构7改变所述薄膜组201的松紧程度可以改变上述微运动中的机构固有频率,从而改变所述工作平台4运动特性。Changing the degree of tightness of the membrane group 201 through the frequency adjustment mechanism 7 can change the natural frequency of the mechanism in the above-mentioned micro-motion, thereby changing the motion characteristics of the working platform 4 .

还包括微位移传感器6,设于所述运动子平台202的进给方向的端部。用于所述检测工作平台4的一维微位移。It also includes a micro-displacement sensor 6 arranged at the end of the moving sub-platform 202 in the feeding direction. It is used for detecting the one-dimensional micro-displacement of the working platform 4 .

所述微位移传感器6为电容式传感器。The micro-displacement sensor 6 is a capacitive sensor.

所述微位移传感器6为电感式传感器。The micro displacement sensor 6 is an inductive sensor.

所述微位移传感器6的非工作面设置有绝缘层,用于防止位移传感器被其他金属材料干扰,影响测量精度。The non-working surface of the micro-displacement sensor 6 is provided with an insulating layer, which is used to prevent the displacement sensor from being interfered by other metal materials and affecting the measurement accuracy.

如图3所示,所述薄膜组201、运动子平台202和外框架203为一体式结构。由整块材料经过铣削、电火花加工等方式获取,避免了零件的装配误差,可以提高平台运动精度。As shown in FIG. 3 , the membrane group 201 , the moving sub-platform 202 and the outer frame 203 are in an integrated structure. The entire material is obtained by milling, EDM, etc., which avoids the assembly error of the parts and improves the movement accuracy of the platform.

所述驱动器为音圈电机。The driver is a voice coil motor.

所述驱动器为压电陶瓷驱动器。The driver is a piezoelectric ceramic driver.

所述频率调节机构7为穿过所述槽2的螺栓,其两端分别连接于所述槽2的两侧。The frequency adjusting mechanism 7 is a bolt passing through the slot 2 , and its two ends are respectively connected to both sides of the slot 2 .

所述频率调节机构7为螺栓。所述螺栓可手动调节长度方向产生位移,改变所述弹性件5的变形度,进而改变薄膜组201的薄膜张紧力,实现对平台的结构固有频率的动态调整。The frequency adjustment mechanism 7 is a bolt. The bolts can be manually adjusted to generate displacement in the length direction, changing the degree of deformation of the elastic member 5, and further changing the film tension of the film group 201, so as to realize the dynamic adjustment of the structural natural frequency of the platform.

所述频率调节机构7为穿过所述槽2的压电陶瓷驱动器,其两端分别连接于所述槽2的两侧。The frequency adjustment mechanism 7 is a piezoelectric ceramic driver passing through the slot 2 , and its two ends are respectively connected to both sides of the slot 2 .

如图4、图5所示,所述频率调节机构7包括螺栓和压电陶瓷片701。所述压电陶瓷片701在外加电压作用下可在螺栓的长度方向产生位移,改变所述弹性件5的变形度,进而改变所述薄膜组201的薄膜张紧力,实现对平台的结构固有频率的动态调整。As shown in FIG. 4 and FIG. 5 , the frequency adjustment mechanism 7 includes bolts and piezoelectric ceramic sheets 701 . The piezoelectric ceramic sheet 701 can generate displacement in the length direction of the bolt under the action of the applied voltage, changing the degree of deformation of the elastic member 5, and then changing the film tension of the film group 201, so as to realize the inherent structural stability of the platform. Dynamic adjustment of frequency.

以上结合具体实施例描述了本发明的技术原理。这些描述只是为了解释本发明的原理,而不能以任何方式解释为对本发明保护范围的限制。基于此处的解释,本领域的技术人员不需要付出创造性的劳动即可联想到本发明的其它具体实施方式,这些方式都将落入本发明的保护范围之内。The above describes the technical principles of the present invention in conjunction with specific embodiments. These descriptions are only for explaining the principles of the present invention, and cannot be construed as limiting the protection scope of the present invention in any way. Based on the explanations herein, those skilled in the art can think of other specific implementation modes of the present invention without creative efforts, and these modes will all fall within the protection scope of the present invention.

Claims (10)

1. based on the one-dimensional micromotion platform of rigidity frequency-adjustable of Stress stiffening principle, it is characterised in that: include frame (1), thin film group (201), motion sub-platform (202), outside framework (203), driver, work platforms (4) and frequency adjustment mechanism (7);
The both sides of described motion sub-platform (202) are connected with described outside framework (203) inwall by described thin film group (201), thin film in described thin film group (201) is for being arranged in parallel, and the length direction of described thin film is perpendicular to the direction of motion of described motion sub-platform (202);
Described outside framework (203) is rigidly secured to described frame (1), and described work platforms (4) is rigidly secured to described motion sub-platform (202);
Described driver includes stator (301) and mover (302), described stator (301) is fixed on described frame (1) or described outside framework (203), and described mover (302) is fixed on described motion sub-platform (202);
Described outside framework (203) and described thin film group (201) junction are provided with groove (2), making described outside framework (203) inner side form relatively thin deformable elastic component (5), described outside framework (203) is provided with the described frequency adjustment mechanism (7) regulating described elastic component (5) degree of deformation.
2. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: also include micro-displacement sensor (6), be located at the end of the direction of feed of described motion sub-platform (202).
3. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 2, it is characterised in that: described micro-displacement sensor (6) is capacitance type sensor.
4. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 2, it is characterised in that: described micro-displacement sensor (6) is inductance type transducer.
5. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 2, it is characterised in that: the non-working surface of described micro-displacement sensor (6) is provided with insulating barrier.
6. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: described thin film group (201), motion sub-platform (202) and outside framework (203) they are integral type structure.
7. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: described driver is voice coil motor.
8. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterised in that: described driver is piezoelectric ceramic actuator.
9. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterized in that: described frequency adjustment mechanism (7) is the bolt through described groove (2), and its two ends are connected to the both sides of described groove (2).
10. the one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle according to claim 1, it is characterized in that: described frequency adjustment mechanism (7) is the piezoelectric ceramic actuator through described groove (2), and its two ends are connected to the both sides of described groove (2).
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