CN204748155U - Compound platform of grand little integration of damping shell fragment formula rigidity tunable frequency - Google Patents

Compound platform of grand little integration of damping shell fragment formula rigidity tunable frequency Download PDF

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Publication number
CN204748155U
CN204748155U CN201520393630.XU CN201520393630U CN204748155U CN 204748155 U CN204748155 U CN 204748155U CN 201520393630 U CN201520393630 U CN 201520393630U CN 204748155 U CN204748155 U CN 204748155U
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China
Prior art keywords
platform
grand
shell fragment
outside framework
motion
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Expired - Fee Related
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CN201520393630.XU
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Chinese (zh)
Inventor
王江龙
杨志军
陈新
白有盾
陈新度
高健
贺云波
陈云
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The utility model provides a compound platform of grand little integration of damping shell fragment formula rigidity tunable frequency when grand fine motion drives simultaneously, can realize whole high -speed motion on a large scale, when the motion deviation appearing, micro -displacement is because inertia is little, the zero friction, realize precise displacement output can realizing high frequency motion deviation compensation by individual drive through elastic deformation. Control through compound movement, can realize high -speed accurate motion, installation using -way is unanimous with traditional platform, popularization and application can be facilitated, attach simultaneously damping material on the shell fragment, make micro -displacement have certain damping, can transmit the grand motion of moving the platform but the separation vibration, make micro -displacement also can not produce infinite amplitude at the resonance point, can work on arbitrary frequency band, measure through the motion deviation, little platform dynamic characteristic matees and vibrates the accurate compensation of deviation high frequency, realize compound platform of grand little integration of damping shell fragment formula rigidity tunable frequency high -speed high accuracy motion on arbitrary frequency point.

Description

The grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable
Technical field
The utility model relates to precision movement platform, particularly relates to the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable.
Background technology
Along with the progress of science and technology, the requirement of people to product is more and more higher, impel the requirement on machining accuracy of manufacturer to product also more and more higher, in existing equipment, the stroke of feeding with high precision motion platform is general shorter, and the precision of the common grand sports equipment of Long Distances cannot practical requirement, if adopt special large stroke and high precision sports equipment, the manufacturing cost of product will significantly increase.For above-mentioned present situation, a kind ofly the micromotion phase compound of the grand motion of Long Distances general precision and the little stroke of high accuracy can be realized large stroke and high precision feeding, and there is the favor that multidirectional motion platform is more and more subject to industry.
In first technology: based on the rigidity frequency-adjustable one dimension micromotion platform (utility model application number: 201410214605.0) utility model is a kind of based on prestress membrane of Stress stiffening principle, frequency-adjustable, can according to different operating modes and driving frequency, the intrinsic frequency of micromotion platform can be regulated before work or in the course of work, eliminate flexible hinge enlarger, and adopt voice coil motor to substitute piezoelectric ceramics, by non-contacting driving and displacement measurement, real-time judge load working condition, and according to the change of load working condition, the frequency of dynamic adjustments driving mechanism, the Intelligent Matching of dynamic characteristic can be realized.This mechanism is only limitted to one dimension fine motion, and stroke is shorter, and this mechanism there will be resonance point in working motion process, and its micromotion platform can not be operated in arbitrary frequency point, needs to avoid resonance point by regulating, and defines operating frequency range.The utility model has set up grand dynamic structure and anti-resonance vibration structure, micromotion platform can be operated in arbitrary frequency point and not produce infinite amplitude, without the need to avoiding resonance point, can work on any frequency band, realize the large stroke and high precision of one dimension macro/micromotion and the feeding in any operating frequency simultaneously.
Utility model content
The purpose of this utility model is to propose the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable that can work in arbitrary frequency point, realizes large stroke and high precision and feeding in any operating frequency.
For reaching this object, the utility model by the following technical solutions:
The grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, comprises pedestal, grand dynamic outside framework and micromotion platform;
Described grand dynamic outside framework and described micromotion platform form unified platform, described micromotion platform is arranged on the lower portion of described grand dynamic outside framework, described micromotion platform comprise for place work piece product platform, for supporting and shell fragment group that displacement exports and immutable damping for anti-resonance vibration, described product platform is connected to described grand dynamic outside framework by described shell fragment group; Described immutable damping is arranged at any parts for connecting described product platform and described grand dynamic outside framework;
Described pedestal is provided with guide rail, slide block and U-shaped linear electric motors, described slide block is slidably in described guide rail, described U-shaped linear electric motors comprise stator, grand dynamic outside framework mover, micromotion platform mover and connector, and grand motion and micromotion share same described stator;
Described grand dynamic outside framework is fixedly installed in described slide block, and is connected to described grand dynamic outside framework mover by described connector, controls it slide on described guide rail and realize grand motion by described grand dynamic outside framework mover, described micromotion platform mover and described stator;
Described product platform is fixed on described micromotion platform mover by described connector, and controls its micromotion at described stator by described micromotion platform mover.
Illustrate further, described immutable damping is attached to the surface of described shell fragment group as composite coating.
Illustrate further, described immutable damping is damping paint, and described damping paint is coated on the surface of described shell fragment group.
Illustrate further, described shell fragment group, described product platform and described grand dynamic outside framework are integral type structure.
Illustrate further, the both sides of described product platform are connected with described grand dynamic outside framework inwall by described shell fragment group, and described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform.
Illustrate further, described grand dynamic outside framework and described shell fragment group junction are provided with groove, and make to form thinner deformable elastic component inside described grand dynamic outside framework, described grand dynamic outside framework is provided with the described frequency adjustment mechanism regulating described resilient member deforms degree.
Illustrate further, described frequency adjustment mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
Illustrate further, described micromotion platform also comprises displacement transducer, is located at the end of the direction of feed of described product platform.
Illustrate further, institute's displacement sensors is differential capacitance sensor or photoelectric sensor.
The utility model proposes the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, when grand fine motion drives simultaneously, overall high-speed motion on a large scale can be realized; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, high speed and precision motion can be realized, install and use mode consistent with traditional platform, conveniently apply.The utility model is provided with the immutable damping structure of anti-resonance vibration, micromotion platform can be operated in arbitrary frequency point, without the need to avoiding resonance point, infinite amplitude can not be produced, can work on any frequency band, make the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable realize large stroke and high precision and can work in arbitrary frequency point, improve operating frequency range.
Accompanying drawing explanation
Fig. 1 is the structural representation of an embodiment of the present utility model;
Fig. 2 is the structural representation of an embodiment of the present utility model;
Fig. 3 is the top view of an embodiment of the present utility model;
Fig. 4 is the structural representation of the unified platform of an embodiment of the present utility model.
Wherein: pedestal 1, grand dynamic outside framework 2, micromotion platform 3, product platform 31, shell fragment group 32, guide rail 11, slide block 12, U-shaped linear electric motors 13, stator 131, grand dynamic outside framework mover 132, micromotion platform mover 133, connector 134, groove 33, displacement transducer 34, immutable damping 35, elastic component 21, bolt 221.
Detailed description of the invention
The technical solution of the utility model is further illustrated by detailed description of the invention below in conjunction with accompanying drawing.
As shown in Fig. 1 or Fig. 2 or Fig. 3, the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, comprises pedestal 1, grand dynamic outside framework 2 and micromotion platform 3;
Described grand dynamic outside framework 2 forms unified platform with described micromotion platform 3, described micromotion platform 3 is arranged on the lower portion of described grand dynamic outside framework 2, described micromotion platform 3 comprises for the product platform 31 of place work piece, for supporting and shell fragment group 32 that displacement exports and immutable damping 35 for anti-resonance vibration, described product platform 31 is connected to described grand dynamic outside framework 2 by described shell fragment group 32, and described immutable damping 35 is arranged at any parts for connecting described product platform 31 and described grand dynamic outside framework 2;
Described pedestal 1 is provided with guide rail 11, slide block 12 and U-shaped linear electric motors 13, described slide block 12 is slidably in described guide rail 11, described U-shaped linear electric motors 13 comprise stator 131, grand dynamic outside framework mover 132, micromotion platform mover 133 and connector 134, and grand motion and micromotion share same described stator 131;
Described grand dynamic outside framework 2 is fixedly installed in described slide block 13, and be connected to described grand dynamic outside framework mover 132 by described connector 134, control it by described grand dynamic outside framework mover 132, described micromotion platform mover 133 and described stator 121 and slide on described guide rail 11 and realize grand motion;
Described product platform 31 is fixed on described micromotion platform mover 133 by described connector 134, and controls its micromotion at described stator 131 by described micromotion platform mover 133.
Macro/micromotion is realized based on U-shaped linear electric motors 12, can the range of movement of Long Distances, inertia is little, fast response time, comprising the adjustment of the grand motion Long Distances to grand dynamic outside framework 2, also comprise simultaneously and on micromotion, precision positioning is realized to micromotion platform 3, the grand micro-integrated compound platform of the utility model damping spring plate formula rigidity frequency-adjustable can be realized on a large scale and running fix accurately.
When grand fine motion drives simultaneously, overall high-speed motion on a large scale can be realized; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, high speed and precision motion can be realized, install and use mode consistent with traditional platform, conveniently apply, on shell fragment, set up damping material simultaneously, micromotion platform is made to have certain damping, the motion of macro-moving stage can be transmitted but intercept vibration, make micromotion platform also can not produce infinite amplitude at resonance point, can work on any frequency band, measured by movement warp, microfluidic platform dynamic characteristic coupling and vibration deviation high frequency fine compensation, realize the high-speed, high precision motion in arbitrary frequency point of the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable.
As shown in Figure 4, immutable damping 35 is provided with on any parts connecting described grand dynamic outside framework 2 and described product platform 31, the effect of immutable damping 35 is that when avoiding producing resonance, frequency is infinitely great, what make micromotion platform 3 is operated in optional frequency scope, without the need to avoiding resonance point by regulating, improve operating frequency range.In addition, immutable damping 35 is carrier for connecting described grand dynamic outside framework 2 with any parts of described product platform 31, reduce whole damping spring plate to decline the independent connecting structure of motion platform, reduce the impact that fine motion frequency range reduces because of increasing of syndeton, guarantee maximum operating frequency range.
Illustrate further, described immutable damping 35 is attached to the surface of described shell fragment group 32 as composite coating.As shown in Figure 4, improve the damping of system, easy for installation, structure is simple.
Illustrate further, described immutable damping 35 is damping paint, and described damping paint is coated on the surface of described shell fragment group 32.Damping paint add appropriate filler by macromolecule resin and auxiliary material formulated, be that one can be coated in various metal plate-like structure on the surface, there is the sapecial coating of vibration damping, thermal insulation and certain sealing property.Directly be coated on the surface of shell fragment group 32, easy to process.
Illustrate further, described shell fragment group 32, described product platform 31 and described grand dynamic outside framework 2 are integral type structure.The integrated design of grand dynamic outside framework 2 and micromotion platform 3, compact conformation, is obtained through the mode such as milling, spark machined by whole block material, avoids the rigging error of part, can improve Platform movement precision.
Illustrate further, the both sides of described product platform 31 are connected with described grand dynamic outside framework 2 inwall by described shell fragment group 32, and described shell fragment group 32 is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform 31.The motion of the effective supporting core platform 31 of the shell fragment group 32 be arranged in parallel, under the restraining function of described shell fragment group 32, described product platform 31 is suppressed in the motion of non-direction of feed.
Illustrate further, described grand dynamic outside framework 2 is provided with groove 33 with described shell fragment group 32 junction, make to form thinner deformable elastic component 21 inside described grand dynamic outside framework 2, described grand dynamic outside framework 2 is provided with the described frequency adjustment mechanism regulating described elastic component 21 degree of deformation.The mechanism's intrinsic frequency in above-mentioned micromotion can be changed by the tightness of described frequency adjustment mechanism change shell fragment group 32, thus change the kinetic characteristic of product platform 31.
Illustrate further, described frequency adjustment mechanism is the bolt 221 through described groove 33, and its two ends are connected to the both sides of described groove 33.Described bolt 221 can produce displacement by manual adjustments length direction, changes the degree of deformation of described elastic component 21, and then changes the shell fragment tensile force of shell fragment group 32, realize the dynamic conditioning of the structural natural frequencies to platform.
Illustrate further, described frequency adjustment mechanism also comprises piezoelectric ceramic piece, and described piezoelectric ceramic piece is installed on the outside of described groove 33 by described bolt 221.Described piezoelectric ceramic piece can produce displacement at the length direction of bolt 221 under applied voltage effect, changes the degree of deformation of described elastic component 21, and then changes the shell fragment tensile force of described shell fragment group 32, realize the dynamic conditioning of the structural natural frequencies to platform.
Illustrate further, described micromotion platform 3 also comprises displacement transducer 34, is located at the end of the direction of feed of described product platform 31.For the micrometric displacement of described detection product platform 31.
Illustrate further, institute's displacement sensors 34 is differential capacitance sensor or photoelectric sensor.Differential capacitance sensor mechanical displacement is few, and precision is high, and anti-interference is better, and photoelectric sensor has the advantages such as precision is high, reaction is fast, noncontact, and structure is simple, and volume is little, all can be used as the selection of displacement transducer.
Below know-why of the present utility model is described in conjunction with specific embodiments.These describe just in order to explain principle of the present utility model, and can not be interpreted as the restriction to the utility model protection domain by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other detailed description of the invention of the present utility model, and these modes all will fall within protection domain of the present utility model.

Claims (9)

1. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable, is characterized in that: comprise pedestal, grand dynamic outside framework and micromotion platform;
Described grand dynamic outside framework and described micromotion platform form unified platform, described micromotion platform is arranged on the lower portion of described grand dynamic outside framework, described micromotion platform comprise for place work piece product platform, for supporting and shell fragment group that displacement exports and immutable damping for anti-resonance vibration, described product platform is connected to described grand dynamic outside framework by described shell fragment group; Described immutable damping is arranged at any parts for connecting described product platform and described grand dynamic outside framework;
Described pedestal is provided with guide rail, slide block and U-shaped linear electric motors, described slide block is slidably in described guide rail, described U-shaped linear electric motors comprise stator, grand dynamic outside framework mover, micromotion platform mover and connector, and grand motion and micromotion share same described stator;
Described grand dynamic outside framework is fixedly installed in described slide block, and is connected to described grand dynamic outside framework mover by described connector, controls it slide on described guide rail and realize grand motion by described grand dynamic outside framework mover, described micromotion platform mover and described stator;
Described product platform is fixed on described micromotion platform mover by described connector, and controls its micromotion at described stator by described micromotion platform mover.
2. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1, is characterized in that: described immutable damping is attached to the surface of described shell fragment group as composite coating.
3. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 2, it is characterized in that: described immutable damping is damping paint, described damping paint is coated on the surface of described shell fragment group.
4. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1 and 2, is characterized in that: described shell fragment group, described product platform and described grand dynamic outside framework are integral type structure.
5. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1 and 2, it is characterized in that: the both sides of described product platform are connected with described grand dynamic outside framework inwall by described shell fragment group, described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described product platform.
6. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 4, it is characterized in that: described grand dynamic outside framework and described shell fragment group junction are provided with groove, make to form thinner deformable elastic component inside described grand dynamic outside framework, described grand dynamic outside framework is provided with the frequency adjustment mechanism regulating described resilient member deforms degree.
7. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 6, is characterized in that: described frequency adjustment mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
8. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 1, is characterized in that: described micromotion platform also comprises displacement transducer, is located at the end of the direction of feed of described product platform.
9. the grand micro-integrated compound platform of damping spring plate formula rigidity frequency-adjustable according to claim 8, is characterized in that: institute's displacement sensors is differential capacitance sensor or photoelectric sensor.
CN201520393630.XU 2015-06-08 2015-06-08 Compound platform of grand little integration of damping shell fragment formula rigidity tunable frequency Expired - Fee Related CN204748155U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104889793A (en) * 2015-06-08 2015-09-09 广东工业大学 Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform
CN109648354A (en) * 2018-12-13 2019-04-19 广东工业大学 A kind of the Coupled Rigid-flexible platform and motion platform of intermediate regulations rigidity

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104889793A (en) * 2015-06-08 2015-09-09 广东工业大学 Damping spring sheet type rigidity frequency adjustable macro-micro integrated composite platform
CN109648354A (en) * 2018-12-13 2019-04-19 广东工业大学 A kind of the Coupled Rigid-flexible platform and motion platform of intermediate regulations rigidity
CN109648354B (en) * 2018-12-13 2023-07-25 广东工业大学 Rigid-flexible coupling platform capable of adjusting rigidity in middle and motion platform

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Granted publication date: 20151111

Termination date: 20180608