CN204700851U - Damping spring plate formula rigidity frequency-adjustable micromotion platform - Google Patents
Damping spring plate formula rigidity frequency-adjustable micromotion platform Download PDFInfo
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- CN204700851U CN204700851U CN201520392879.9U CN201520392879U CN204700851U CN 204700851 U CN204700851 U CN 204700851U CN 201520392879 U CN201520392879 U CN 201520392879U CN 204700851 U CN204700851 U CN 204700851U
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- shell fragment
- micromotion platform
- damping
- outside framework
- spring plate
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Abstract
Damping spring plate formula rigidity frequency-adjustable micromotion platform, comprises pedestal, shell fragment group, outside framework, driver, workbench, tensile force adjusting mechanism and micro-displacement sensor; Described pedestal is fixed on base plate, and described shell fragment is mounted on the both sides of described micro displacement workbench, and the length direction of described shell fragment is perpendicular to the direction of motion of described micro displacement workbench, and is fixed in described pedestal by described micro displacement workbench; Described micro displacement workbench is provided with displacement transducer in direction of feed, for displacement Precision measurement; On shell fragment, set up damping material simultaneously, make micromotion platform have certain damping, make micromotion platform also can not produce infinite amplitude at resonance point; By the rigidity and the intrinsic frequency that regulate the tensile force of shell fragment to carry out governor motion, meet the requirement of different operating mode, and by arranging damper, realize micromotion platform amplitude when resonance zone still controlled.
Description
Technical field
The utility model is novel relates to precision movement platform, can be used for accurate operation and grand micro-composite high speed fine compensation, and the utility model is specifically related to damping spring plate formula rigidity frequency-adjustable micromotion platform.
Background technology
In order to realize precise motion, accurate, stable feed mechanism seems particularly important, because the quality of it and product is closely related.In addition, complicated freeform optics surface due to volume little, high accuracy proposes strict requirement to micro-feed mechanism especially.Fine Feed system is the basis of this series products of processing, and it is widely used in fast tool servo feed system, in micro displacement workbench and grand micro-compound platform etc.Traditional micro-feeding device adopts fixed frequency to design usually; propose high requirement to material behavior and foozle, especially when processing different product, its driving frequency can change usually; make the motion platform displacement equations factor of fixed frequency inconsistent, thus make displacement equations distortion.
In first technology 1: the fast tool servo mechanism that a kind of rigidity of rigidity adjustable fast tool servo device (utility application 201210055119.X) utility model is adjustable, the principle of this mechanism adopts the flexible hinge be arranged symmetrically with, and eliminates vertical association campaign.Stiffness tuning is the holddown spring by being arranged on above, can only carry out this change rigidity by changing spring, can not continuously adjustabe.
In first technology 2: (the utility model application number: 201210250524.7) a kind of fast tool servo mechanism based on flexible hinge shell fragment of utility model of a kind of frequency-adjustable fast tool servo feed arrangement based on flexible hinge enlarger, frequency adjustment principle is the tension force by shell fragment, can realize the continuously adjustabe of frequency and rigidity.But this mechanism adopts displacement equations mode to have the concentrated flexible hinge of stress, affects the service life of mechanism.
In first technology 3: based on the rigidity frequency-adjustable one dimension micromotion platform (utility model application number: 201410214605.0) utility model is a kind of based on prestress membrane of Stress stiffening principle, frequency-adjustable, can according to different operating modes and driving frequency, the intrinsic frequency of micromotion platform can be regulated before work or in the course of work, eliminate flexible hinge enlarger, and adopt voice coil motor to substitute piezoelectric ceramics, by non-contacting driving and displacement measurement, real-time judge load working condition, and according to the change of load working condition, the frequency of dynamic adjustments driving mechanism, the Intelligent Matching of dynamic characteristic can be realized.Although solve above-mentioned two problems, this mechanism there will be resonance point in working motion process, and its micromotion platform can not be operated in arbitrary frequency point, needs to avoid resonance point by regulating, and defines operating frequency range.The utility model has set up the structure of anti-resonance vibration, micromotion platform can be operated in arbitrary frequency point and not produce infinite amplitude, without the need to avoiding resonance point, can work on any frequency band.
Utility model content
The purpose of this utility model is to propose a kind of damping spring plate formula rigidity frequency-adjustable micromotion platform that can work in arbitrary frequency point, makes micromotion platform also can not produce infinite amplitude at resonance point, improves operating frequency range.
For reaching this object, the utility model by the following technical solutions:
Damping spring plate formula rigidity frequency-adjustable micromotion platform, comprises frame, shell fragment group, outside framework, driver, workbench, tensile force adjusting mechanism, micro-displacement sensor and immutable damping;
The both sides of described fortune workbench are connected with described outside framework inwall by described shell fragment group, and the shell fragment in described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described workbench;
Described outside framework is rigidly secured to described frame;
Described driver includes stator and mover, and described stator is fixed on described frame or described outside framework, and described mover is fixed on described workbench;
Described outside framework and described shell fragment group junction are provided with groove, make to form thinner deformable elastic component inside described outside framework, and described outside framework is provided with the described tensile force adjusting mechanism regulating described resilient member deforms degree;
Described immutable damping is arranged at any parts for connecting described outside framework and described workbench.
Preferably, described immutable damping is arranged at the surface of described shell fragment group.
Preferably, described immutable damping is damping paint, and described damping paint is coated on the surface of described shell fragment group.
Preferably, also comprise micro-displacement sensor, be located at the end of the direction of feed of described motion sub-platform.
Preferably, described micro-displacement sensor is the non-contact displacement transducers such as capacitance type sensor, inductance type transducer or grating scale.
Preferably, described shell fragment group, motion sub-platform and outside framework are integral type structure.
Preferably, described tensile force adjusting mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
Preferably, described tensile force adjusting mechanism is that the linear movement direction of described piezoelectric ceramic actuator is the predeformation direction of described shell fragment group through the connecting rod of described groove with for regulating pretightning force dynamic piezoelectric ceramic actuator.
The know-why of the micromotion platform frequency adjustment that the utility model proposes for: the intrinsic frequency of the compliant mechanism that prestress membrane is formed is relevant to the tension force of prestress membrane, by the intrinsic frequency regulating the tensile force in prestress membrane to carry out governor motion, meet the requirement of different operating mode, shell fragment sets up damping material, micromotion platform is made to have certain damping, making micromotion platform also can not produce infinite amplitude at resonance point, can work in arbitrary frequency point, avoiding resonance point without the need to regulating.
Accompanying drawing explanation
Fig. 1 is the front view of a kind of example of the present utility model;
Fig. 2 is the integral structure schematic diagram of the shell fragment group of micromotion platform of the present utility model, motion sub-platform and outside framework.
Wherein, frame 1, groove 2, shell fragment group 201, motion sub-platform 202, outside framework 203, stator 301, mover 302, workbench 4, elastic component 5, micro-displacement sensor 6, tensile force adjusting mechanism 7, immutable damping 8, outside framework 203.
Detailed description of the invention
The technical solution of the utility model is further illustrated by detailed description of the invention below in conjunction with accompanying drawing.
Damping spring plate formula rigidity frequency-adjustable micromotion platform, comprises frame 1, shell fragment group 201, outside framework 203, driver, workbench 4, tensile force adjusting mechanism 7, micro-displacement sensor 6 and immutable damping 8;
The both sides of described workbench 4 are connected with described outside framework 203 inwall by described shell fragment group 201, and the shell fragment in described shell fragment group 201 is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described workbench 4;
Described outside framework 203 is rigidly secured to described frame 1;
Described driver includes stator 301 and mover 302, and described stator 301 is fixed on described frame 1 or described outside framework 203, and described mover 302 is fixed on described workbench 4;
Described outside framework 203 is provided with groove 2 with described shell fragment group 201 junction, and make to form thinner deformable elastic component 5 inside described outside framework 203, described outside framework 203 is provided with the described tensile force adjusting mechanism 7 regulating described elastic component 5 degree of deformation;
Described immutable damping 8 is arranged at any parts for connecting described outside framework 203 and described workbench 4.
As shown in Figure 1, motion sub-platform 202 described in described driver drives and connected workbench 4 produce micrometric displacement feeding.Under the restraining function of described shell fragment group 201, described motion parts is suppressed in the motion of non-direction of feed, described workbench 4 is provided with the functional units such as cutter, displacement is produced under the driving effect of described driver, complete corresponding technological action, and mechanism's intrinsic frequency that can be changed by the tightness that described tensile force adjusting mechanism 7 changes described shell fragment group 201 in above-mentioned micromotion, thus change described workbench 4 kinetic characteristic.
Immutable damping 8 is provided with on any parts connecting described outside framework 203 and described workbench 4, the effect of immutable damping 8 is that when avoiding producing resonance, frequency is infinitely great, make micromotion platform also can not produce infinite amplitude at resonance point, can in any frequency range, without the need to avoiding resonance point by regulating, improve operating frequency range.Immutable damping 8 is carrier for connecting described outside framework 203 with any parts of described workbench 4, reduce the independent connecting structure of whole damping spring plate formula rigidity frequency-adjustable micromotion platform, reduce the impact that fine motion frequency range reduces because of increasing of syndeton, guarantee maximum operating frequency range.
Preferably, described immutable damping 8 is arranged at the surface of described shell fragment group 201.As shown in Figure 1, easy for installation, structure is simple.
Preferably, described immutable damping 8 is damping paint, and described damping paint is coated on the surface of described shell fragment group 201.Damping paint add appropriate filler by macromolecule resin and auxiliary material formulated, be that one can be coated in various metal plate-like structure on the surface, there is the sapecial coating of vibration damping, thermal insulation and certain sealing property.Directly be coated on the surface of shell fragment group 201, easy to process.
Preferably, also comprise micro-displacement sensor 6, be located at the end of the direction of feed of described motion sub-platform 202.As shown in Figure 1, for the micrometric displacement of described testing platform 4.
Preferably, described micro-displacement sensor 6 is the non-contact displacement transducers such as capacitance type sensor, inductance type transducer or grating scale.
Preferably, described shell fragment group 201, motion sub-platform 202 and outside framework 203 is integral type structure.As shown in Figure 2, obtained through the mode such as milling, spark machined by whole block material, avoid the rigging error of part, Platform movement precision can be improved.
Preferably, described tensile force adjusting mechanism 7 is the bolt through described groove 2, and its two ends are connected to the both sides of described groove 2.As shown in Figure 1, described bolt can produce displacement by manual adjustments length direction, changes the degree of deformation of described elastic component 5, and then changes the shell fragment tensile force of shell fragment group 201, realize the dynamic conditioning of the structural natural frequencies to platform.
Preferably, described tensile force adjusting mechanism 7 is through the connecting rod of described groove 2 with for regulating the dynamic piezoelectric ceramic actuator of pretightning force, and the linear movement direction of described piezoelectric ceramic actuator is the predeformation direction of described shell fragment group., its two ends are connected to the both sides of described groove 2.As shown in Figure 1, described tensile force adjusting mechanism 7 comprises connecting rod and piezoelectric ceramic actuator.Described piezoelectric ceramic actuator can produce displacement at the length direction of connecting rod under applied voltage effect, changes the degree of deformation of described elastic component 5, and then changes the shell fragment tensile force of described shell fragment group 201, realize the dynamic conditioning of the structural natural frequencies to platform.
Below know-why of the present utility model is described in conjunction with specific embodiments.These describe just in order to explain principle of the present utility model, and can not be interpreted as the restriction to the utility model protection domain by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other detailed description of the invention of the present utility model, and these modes all will fall within protection domain of the present utility model.
Claims (8)
1. damping spring plate formula rigidity frequency-adjustable micromotion platform, is characterized in that: comprise frame, shell fragment group, outside framework, driver, workbench, tensile force adjusting mechanism, micro-displacement sensor and immutable damping;
The both sides of described workbench are connected with described outside framework inwall by described shell fragment group, and the shell fragment in described shell fragment group is for being arranged in parallel, and the length direction of described shell fragment is perpendicular to the direction of motion of described workbench;
Described outside framework is rigidly secured to described frame;
Described driver includes stator and mover, and described stator is fixed on described frame or described outside framework, and described mover is fixed on described workbench;
Described outside framework and described shell fragment group junction are provided with groove, make to form thinner deformable elastic component inside described outside framework, and described outside framework is provided with the described tensile force adjusting mechanism regulating described resilient member deforms degree;
Described immutable damping is arranged at any parts for connecting described outside framework and described workbench.
2. damping spring plate formula rigidity frequency-adjustable micromotion platform according to claim 1, is characterized in that: described immutable damping is arranged at the surface of described shell fragment group.
3. damping spring plate formula rigidity frequency-adjustable micromotion platform according to claim 2, it is characterized in that: described immutable damping is damping paint, described damping paint is coated on the surface of described shell fragment group.
4. damping spring plate formula rigidity frequency-adjustable micromotion platform according to claim 1, is characterized in that: also comprise micro-displacement sensor, is located at the end of the direction of feed of described motion sub-platform.
5. damping spring plate formula rigidity frequency-adjustable micromotion platform according to claim 4, is characterized in that: described micro-displacement sensor is the non-contact displacement transducers such as capacitance type sensor, inductance type transducer or grating scale.
6. damping spring plate formula rigidity frequency-adjustable micromotion platform according to claim 1 and 2, is characterized in that: described shell fragment group, motion sub-platform and outside framework are integral type structure.
7. damping spring plate formula rigidity frequency-adjustable micromotion platform according to claim 1, is characterized in that: described tensile force adjusting mechanism is the bolt through described groove, and its two ends are connected to the both sides of described groove.
8. damping spring plate formula rigidity frequency-adjustable micromotion platform according to claim 1, it is characterized in that: described tensile force adjusting mechanism is that the linear movement direction of described piezoelectric ceramic actuator is the predeformation direction of described shell fragment group through the connecting rod of described groove with for regulating pretightning force dynamic piezoelectric ceramic actuator.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520392879.9U CN204700851U (en) | 2015-06-08 | 2015-06-08 | Damping spring plate formula rigidity frequency-adjustable micromotion platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520392879.9U CN204700851U (en) | 2015-06-08 | 2015-06-08 | Damping spring plate formula rigidity frequency-adjustable micromotion platform |
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| CN204700851U true CN204700851U (en) | 2015-10-14 |
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| CN201520392879.9U Expired - Fee Related CN204700851U (en) | 2015-06-08 | 2015-06-08 | Damping spring plate formula rigidity frequency-adjustable micromotion platform |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107906315A (en) * | 2017-12-19 | 2018-04-13 | 山东大学 | A kind of micro-displacement motion platform of dynamic frequency real-time, tunable |
| CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
-
2015
- 2015-06-08 CN CN201520392879.9U patent/CN204700851U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107906315A (en) * | 2017-12-19 | 2018-04-13 | 山东大学 | A kind of micro-displacement motion platform of dynamic frequency real-time, tunable |
| CN107906315B (en) * | 2017-12-19 | 2020-02-14 | 山东大学 | Micro-displacement motion platform with real-time adjustable dynamic frequency |
| CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151014 Termination date: 20180608 |
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| CF01 | Termination of patent right due to non-payment of annual fee |