CN203973264U - A kind of fast tool servo of two decoupler shafts - Google Patents

A kind of fast tool servo of two decoupler shafts Download PDF

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Publication number
CN203973264U
CN203973264U CN201420397286.7U CN201420397286U CN203973264U CN 203973264 U CN203973264 U CN 203973264U CN 201420397286 U CN201420397286 U CN 201420397286U CN 203973264 U CN203973264 U CN 203973264U
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China
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axis
flexible hinge
piezoelectric stack
matrix
hinge matrix
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CN201420397286.7U
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Chinese (zh)
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周晓勤
王荣奇
闫贺亮
王俊
刘志伟
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Jilin University
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Jilin University
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Abstract

The utility model relates to a kind of fast tool servo of two decoupler shafts, belongs to optical surface part and ultraprecise part Machining Technology for Cutting field.Diamond cutter is fixedly connected with the tool rest on flexible hinge matrix by hold-down screw, the two ends of X-axis piezoelectric stack are connected with X-axis drive end with flexible hinge matrix respectively, this X-axis piezoelectric stack is connected with this flexible hinge matrix by pretension bolt one, Z axis piezoelectric stack one, Z axis piezoelectric stack two are connected with Z axis drive end with flexible hinge matrix respectively, after this flexible hinge matrix tool rest, displacement detecting piece is installed, and is fixedly connected with this flexible hinge matrix by hold-down screw.Advantage is: novel structure, adopt the mode of piezoelectric actuator parallel drive compliant mechanism, and reduce the inertia mass of flexure hinge mechanism motion parts, be conducive to increase the bandwidth of operation of FTS device, improve the working (machining) efficiency of FTS device.

Description

A kind of fast tool servo of two decoupler shafts
Technical field
The utility model belongs to optical surface part and ultraprecise part Machining Technology for Cutting field, relates to a kind of two decoupler shaft fast tool servos for free form surface diamond turning.
Background technology
The freeform optics element not only application in photovoltaic and optical communication product is increasingly extensive, and also very extensive in the application such as in the military field such as infrared detector and Helmet Mounted Display.In addition, can practical function in view of using less freeform optics element just can obtain many non-freeform optics elements, quality and the volume of simplifying structure and the reduction optical system of optical system, this is of great significance for realizing the integrated of optical system and miniaturization tool.Although freeform optics surface has above-mentioned many excellent properties and purposes, but the complexity of process and uncertain serious its practical application of restriction, therefore develop a kind of high-accuracy, high efficiency and freeform optics surface processing unit (plant) or method with low cost seems most important.
At present, based on fast tool servo (Fast Tool Servo, hereinafter to be referred as FTS) diamond turning be a kind of freeform optics surface processing method that can meet above-mentioned requirements, also be to generally acknowledge and have one of processing method of development potentiality most at present, and the key point of the method is how to realize high accuracy, multiple degrees of freedom, low coupling, high bandwidth and the large stroke of FTS device.But, at present existing most of FTS devices are still mainly taking the orthoscopic FTS of single shaft and swing type FTS as main, be difficult to meet the requirement of processing high quality optical free form surface, its reason is: the process of (1) freeform optics element requires cutter can realize along the high-frequency reciprocating of multiple kinematic axis simultaneously and move or swing with respect to workpiece, but existing single-degree-of-freedom FTS can only do mostly along Z axis reciprocating motion or around Y-axis reciprocally swinging; (2) for the contact point that ensures blade and finished surface can evenly move on finished surface, reduce the fluctuation of cutting force in process, also require FTS device can realize the linear reciprocating motion along X-axis, obviously the FTS of single-degree-of-freedom can not meet above-mentioned requirements.
For existing multiaxis straight line FTS device, although can provide along the reciprocating motion of X-axis and Z axis, the deficiency such as height coupling and low bandwidth existing has restricted its application in freeform optics surface processing.Zou Qing seminar of Jilin University has developed machine-processed different multiaxis FTS device (publication number: 103357894A, 102615542A), its structure adopts voice coil motor to drive the mode of parallel flexible mechanism, although can obtain larger stroke, but to sacrifice bandwidth of operation as cost, and can not obtain desirable decoupling motion; In addition, Zhou Xiaoqin seminar of Jilin University has developed the multiple fast response servo device (publication number: 102078967A, 102371359A and 102059575A etc.) for elliptical vibration cutting, in view of elliptical vibration working angles is without the feature of large stroke and low coupling, although these devices can obtain higher bandwidth of operation, the defect of little stroke and high coupling has restricted its application in freeform optics surface turning.Up to now, the high frequency multiaxis FTS device that can realize two decoupler shafts is also seldom mentioned, the parallel diaxon FTS device the utility model proposes can meet the many performance requirements to FTS device in freeform optics element process, thereby is with a wide range of applications.
Summary of the invention
The utility model proposes a kind of fast tool servo of two decoupler shafts, there is the freeform optics surface of high accuracy and high uniformity in order to processing.
The technical scheme that the utility model is taked is: diamond cutter is fixedly connected with the tool rest on flexible hinge matrix by hold-down screw, flexible hinge matrix is fixedly connected with the U-shaped groove on base by one group of set bolt, cover plate is installed above this base, the front end face of base is provided with front apron, the two ends of X-axis piezoelectric stack are connected with X-axis drive end with flexible hinge matrix respectively, this X-axis piezoelectric stack is connected with this flexible hinge matrix by pretension bolt one, Z axis piezoelectric stack one, Z axis piezoelectric stack two is connected with Z axis drive end with flexible hinge matrix respectively, and use respectively pretension bolt two, pretension bolt three is connected with flexible hinge matrix, displacement detecting piece is installed after this flexible hinge matrix tool rest, and be fixedly connected with this flexible hinge matrix by hold-down screw, X to one end of capacitance sensor and Z-direction capacitance sensor respectively with two contacts side surfaces of displacement detecting piece, the other end and respectively through mounting blocks one, the locating hole of mounting blocks two is also used set bolt one, set bolt two is fixedly connected with, and these two mounting blocks are fixedly connected with two U-shaped grooves of base by set bolt respectively.
The each pretension bolt of the utility model is coaxial with corresponding piezoelectric stack respectively, makes pretension bolt on piezoelectric stack, produce pretightning force vertically, thereby realizes the pretension to three piezoelectric stacks.
The utility model flexible hinge matrix comprises: one group of symmetrical X-axis in parallel guiding hinge is connected with X-axis input, and this X-axis input is connected with diamond tool rest by one group of parallel Z axis decoupling zero hinge; One group of symmetrical Z axis in parallel guiding hinge is connected with Z axis input, and Z axis input is connected with diamond tool rest by one group of parallel X-axis decoupling zero hinge.
The utility model utilizes board-type flexible hinge to carry out decoupling zero in the characteristic of width (Z axis) and the upper high poor rigidity ratio of thickness direction (Y-axis), and the rigidity being located at respectively on width (Z axis) and thickness direction (Y-axis) is k tand k w, can obtain following relation according to mechanics of materials relevant knowledge:
k t k w = F / EI t F / EI w = wt 3 w 3 t = ( t w ) 2 - - - ( 1 )
Wherein, F is the power applying, and E is the elastic modelling quantity of flexible hinge material, I tfor cross section is with respect to the moment of inertia of neutral axis t, I wfor cross section is with respect to the moment of inertia of neutral axis w, the thickness that t is flexible hinge, the width that w is flexible hinge.
As can be seen from the above equation, on both direction the ratio of rigidity equal width and thickness ratio square, and in most of the cases, the ratio of board-type flexible hinge width and thickness is generally all less than 1/10, the sports coupling amount of X-axis and Z axis is less than 1%, has also just realized in FTS device cutter at the mobile decoupling of both direction.In addition, can also be according to different service conditions to coupling quantitative limitation requirement, rationally determine the ratio of flexible hinge width and thickness, conventionally can first choose suitable thickness, then determine respectively width and the length of flexible hinge according to definite ratio and rigidity requirement.
Major advantage of the present utility model is: novel structure, adopt the mode of piezoelectric actuator parallel drive compliant mechanism, reduce the inertia mass of flexure hinge mechanism motion parts, be conducive to increase the bandwidth of operation of FTS device, improved the working (machining) efficiency of FTS device; Utilize board-type flexible hinge in the rigidity of thickness direction the characteristic much larger than width, as shown in formula (1), to realize the input and output decoupling zero of flexure hinge mechanism, improve the kinematic accuracy of FTS device, reduce mismachining tolerance.
Brief description of the drawings
Fig. 1 is the structural representation of forward sight of the present utility model;
Fig. 2 is the structural representation of backsight of the present utility model;
Fig. 3 is the structural representation that the utility model is removed base;
Fig. 4 is the structural representation of the utility model flexible hinge matrix;
Fig. 5 is the utility model flexible hinge matrix partial sectional view;
Fig. 6 is the structural representation of the utility model base;
Fig. 7 is the utility model board-type flexible hinge cell schematics.
Detailed description of the invention
Diamond cutter 5 is fixedly connected with the tool rest on flexible hinge matrix 6 by hold-down screw, flexible hinge matrix 6 is fixedly connected with the U-shaped groove on base 2 by one group of set bolt, cover plate 1 is installed above this base, the front end face of base is provided with front apron 7, the two ends of X-axis piezoelectric stack 801 are connected with X-axis drive end 606 with flexible hinge matrix 6 respectively, this X-axis piezoelectric stack 801 is connected with this flexible hinge matrix by pretension bolt 1, Z axis piezoelectric stack 1, Z axis piezoelectric stack 2 803 is connected with Z axis drive end 607 with flexible hinge matrix 6 respectively, and use respectively pretension bolt 2 1002, pretension bolt 3 1003 is connected with flexible hinge matrix, displacement detecting piece 9 is installed after this flexible hinge matrix tool rest, and be fixedly connected with this flexible hinge matrix by hold-down screw, X to one end of capacitance sensor 401 and Z-direction capacitance sensor 402 respectively with two contacts side surfaces of displacement detecting piece 9, the other end and respectively through mounting blocks 1, the locating hole of mounting blocks 2 302 is also used set bolt 1, set bolt 2 1102 is fixedly connected with, and these two mounting blocks are fixedly connected with two U-shaped grooves of base by set bolt respectively.
The each pretension bolt of the utility model is coaxial with corresponding piezoelectric stack respectively, makes pretension bolt on piezoelectric stack, produce pretightning force vertically, thereby realizes the pretension to three piezoelectric stacks.
The utility model flexible hinge matrix comprises: one group of symmetrical X-axis in parallel guiding hinge 601 is connected with X-axis input 606, and this X-axis input 606 is connected with diamond tool rest 605 by one group of parallel Z axis decoupling zero hinge 604; One group of symmetrical Z axis in parallel guiding hinge 603 is connected with Z axis input 607, and Z axis input 607 is connected with diamond tool rest 605 by one group of parallel X-axis decoupling zero hinge 602.
According to Fig. 1~Fig. 6, further illustrate as follows below:
Diamond cutter 5 is fixedly connected with the tool rest 605 on flexible hinge matrix by hold-down screw, cutter is driven by flexible hinge matrix indirectly by three piezoelectric stacks, can drive this three piezoelectric stacks with signal generator or industrial control unit (ICU), finally realize diamond cutter and move along the high-frequency decoupling of X-axis and Z axis.
Flexible hinge matrix 6 is mainly by mutual vertically arranged board-type hinge set: X-axis guiding hinge 601, X-axis decoupling zero hinge 602, Z axis guiding hinge 603, Z axis decoupling zero hinge 604 form, as shown in Figure 4, Figure 5, and utilize board-type hinge to carry out decoupling zero in the characteristic of width and the high ratio of rigidity of thickness direction; X-axis piezoelectric stack 801 drives diamond cutter 5 indirectly by Z axis decoupling zero hinge 604, two Z axis piezoelectric stacks drive diamond cutter 5 indirectly by X-axis decoupling zero hinge 602, finally realize the decoupling zero of the utility model device in X-axis and Z-direction input and output; In addition, what two piezoelectric stacks that the Z axis of the utility model device drives adopted is synchronously driven mode, can solve whereby the cutter that caused by the foozle parasitic error along Y-direction.
Flexible hinge matrix 6 is arranged on base 2 by one group of set bolt, and can realize the fine position of diamond cutter 5 in Y direction and complete tool setting, two capacitance displacement sensors are fixed on base 2 with installation of sensors piece respectively, the displacement that displacement transducer detects can be served as the feedback signal of closed-loop control system, improves the precision of FTS system servo motion.
Three pretension bolts are threaded with flexible hinge matrix 6 respectively by screw thread, and the degree of tightening that can utilize adjusting to be threaded is carried out pretension to three piezoelectric stacks respectively, need to ensure that pretension bolt is coaxial with corresponding piezoelectric stack simultaneously, make pretension bolt on piezoelectric stack, produce pretightning force vertically, thereby realize the pretension to three piezoelectric stacks.
The utility model utilizes board-type flexible hinge to carry out decoupling zero in the characteristic of width (Z axis) and the upper high poor rigidity ratio of thickness direction (Y-axis), and the rigidity being located at respectively on width (Z axis) and thickness direction (Y-axis) is k tand k w, can obtain following relation according to mechanics of materials relevant knowledge:
k t k w = F / EI t F / EI w = wt 3 w 3 t = ( t w ) 2 - - - ( 1 )
Wherein, F is the power applying, and E is the elastic modelling quantity of flexible hinge material, I tfor cross section is with respect to the moment of inertia of neutral axis t, I wfor cross section is with respect to the moment of inertia of neutral axis w, the thickness that t is flexible hinge, the width that w is flexible hinge.
As can be seen from the above equation, on both direction the ratio of rigidity equal width and thickness ratio square, and in most of the cases, the ratio of board-type flexible hinge width and thickness is generally all less than 1/10, the sports coupling amount of X-axis and Z axis is less than 1%, has also just realized in FTS device cutter at the mobile decoupling of both direction.In addition, can also be according to different service conditions to coupling quantitative limitation requirement, rationally determine the ratio of flexible hinge width and thickness, conventionally can first choose suitable thickness, then determine respectively width and the length of flexible hinge according to definite ratio and rigidity requirement.

Claims (3)

1. the fast tool servo of a decoupler shaft, it is characterized in that: diamond cutter is fixedly connected with the tool rest on flexible hinge matrix by hold-down screw, flexible hinge matrix is fixedly connected with the U-shaped groove on base by one group of set bolt, cover plate is installed above this base, the front end face of base is provided with front apron, the two ends of X-axis piezoelectric stack are connected with X-axis drive end with flexible hinge matrix respectively, this X-axis piezoelectric stack is connected with this flexible hinge matrix by pretension bolt one, Z axis piezoelectric stack one, Z axis piezoelectric stack two is connected with Z axis drive end with flexible hinge matrix respectively, and use respectively pretension bolt two, pretension bolt three is connected with flexible hinge matrix, displacement detecting piece is installed after this flexible hinge matrix tool rest, and be fixedly connected with this flexible hinge matrix by hold-down screw, X to one end of capacitance sensor and Z-direction capacitance sensor respectively with two contacts side surfaces of displacement detecting piece, the other end and respectively through mounting blocks one, the locating hole of mounting blocks two is also used set bolt one, set bolt two is fixedly connected with, and these two mounting blocks are fixedly connected with two U-shaped grooves of base by set bolt respectively.
2. the fast tool servo of two decoupler shafts according to claim 1, it is characterized in that: described each pretension bolt is coaxial with corresponding piezoelectric stack respectively, make pretension bolt on piezoelectric stack, produce pretightning force vertically, thereby realize the pretension to three piezoelectric stacks.
3. the fast tool servo of two decoupler shafts according to claim 1 and 2, it is characterized in that: described flexible hinge matrix comprises: one group of symmetrical X-axis in parallel guiding hinge is connected with X-axis input, and this X-axis input is connected with diamond tool rest by one group of parallel Z axis decoupling zero hinge; One group of symmetrical Z axis in parallel guiding hinge is connected with Z axis input, and Z axis input is connected with diamond tool rest by one group of parallel X-axis decoupling zero hinge.
CN201420397286.7U 2014-07-17 2014-07-17 A kind of fast tool servo of two decoupler shafts Withdrawn - After Issue CN203973264U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104084829A (en) * 2014-07-17 2014-10-08 吉林大学 Quick cutter servo device with two decoupled shafts
CN106736635A (en) * 2017-01-12 2017-05-31 广东工业大学 A kind of freedom degree parallel connection translation fast tool servo device
CN106945444A (en) * 2017-03-17 2017-07-14 广东工业大学 A kind of sharp knife of full closed loop control is micro- to engrave device
CN107283174A (en) * 2016-04-12 2017-10-24 浙江科技学院 A kind of linear fast tool servo device of two degrees of freedom based on air-float guide rail
CN111487922A (en) * 2020-04-07 2020-08-04 南京理工大学 Cascade cross-scale cutter servo device and high-frequency control method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104084829A (en) * 2014-07-17 2014-10-08 吉林大学 Quick cutter servo device with two decoupled shafts
CN104084829B (en) * 2014-07-17 2016-08-31 吉林大学 A kind of fast tool servo of two decoupler shafts
CN107283174A (en) * 2016-04-12 2017-10-24 浙江科技学院 A kind of linear fast tool servo device of two degrees of freedom based on air-float guide rail
CN106736635A (en) * 2017-01-12 2017-05-31 广东工业大学 A kind of freedom degree parallel connection translation fast tool servo device
CN106736635B (en) * 2017-01-12 2018-01-12 广东工业大学 A kind of freedom degree parallel connection translation fast tool servo device
CN106945444A (en) * 2017-03-17 2017-07-14 广东工业大学 A kind of sharp knife of full closed loop control is micro- to engrave device
CN106945444B (en) * 2017-03-17 2020-02-21 广东工业大学 Full-closed-loop-controlled fast knife micro engraving device
CN111487922A (en) * 2020-04-07 2020-08-04 南京理工大学 Cascade cross-scale cutter servo device and high-frequency control method thereof

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AV01 Patent right actively abandoned

Granted publication date: 20141203

Effective date of abandoning: 20160831

C25 Abandonment of patent right or utility model to avoid double patenting