CN104084829B - A kind of fast tool servo of two decoupler shafts - Google Patents
A kind of fast tool servo of two decoupler shafts Download PDFInfo
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- CN104084829B CN104084829B CN201410342405.3A CN201410342405A CN104084829B CN 104084829 B CN104084829 B CN 104084829B CN 201410342405 A CN201410342405 A CN 201410342405A CN 104084829 B CN104084829 B CN 104084829B
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- axis
- flexible hinge
- fixing
- matrix
- piezoelectric stack
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
Abstract
The present invention relates to the fast tool servo of a kind of two decoupler shafts, belong to optical surface part and ultraprecise part Machining Technology for Cutting field.Diamond cutter is connected by fixing screw and the tool rest on flexible hinge matrix are fixing, the two ends of X-axis piezoelectric stack are connected with flexible hinge matrix and X-axis drive end respectively, this X-axis piezoelectric stack is connected with this flexible hinge matrix by pretension bolt one, Z axis piezoelectric stack one, Z axis piezoelectric stack two are connected with flexible hinge matrix and Z axis drive end respectively, displacement detecting block is installed after this flexible hinge matrix tool rest, and is connected by fixing screw and this flexible hinge matrix are fixing.Advantage is: novel structure, uses the mode of piezoelectric actuator parallel drive compliant mechanism, decreases the inertia mass of flexure hinge mechanism motion parts, is conducive to increasing the bandwidth of operation of FTS device, improves the working (machining) efficiency of FTS device.
Description
Technical field
The invention belongs to optical surface part and ultraprecise part Machining Technology for Cutting field, relate to a kind of for freedom
Two decoupler shaft fast tool servos of curved surface diamond turning.
Background technology
The not only application in photovoltaic and optical communication product of freeform optics element is increasingly extensive, and all
As the most quite varied in the application in the military field such as infrared detector and Helmet Mounted Display.Additionally, in view of using relatively
Few freeform optics element is achieved with many non-free curved optical devices can realize function, simplifies light
The structure of system and reduce quality and the volume of optical system, this is for realizing the integrated and small-sized of optical system
Change tool to be of great significance.Although freeform optics surface has above-mentioned many excellent properties and purposes, but adds
The complexity of work process and uncertainty seriously restrict its actual application, therefore develop a kind of high-accuracy, high efficiency and one-tenth
This cheap freeform optics surface processing unit (plant) or method seem most important.
At present, diamond turning based on fast tool servo (Fast Tool Servo, hereinafter referred to as FTS)
It is a kind of freeform optics surface processing method that can meet above-mentioned requirements, is also to generally acknowledge at present most have adding of development potentiality
One of work method, and the key point of the method is how to realize the high accuracy of FTS device, multiple degrees of freedom, low coupling
Conjunction, high bandwidth and big stroke.But, current existing most of FTS devices are still mainly with orthoscopic FTS of single shaft
Be main with swing type FTS, it is difficult to meet processing high quality optical free form surface requirement, its reason is: (1) from
Required that cutter can realize the high frequency along multiple kinematic axiss relative to workpiece simultaneously by the course of processing of curved optical device
Move back and forth or swing, but existing single-degree-of-freedom FTS mostly can only be done and move back and forth or reciprocal around Y-axis along Z axis
Swing；(2) in order to ensure that the contact point of blade and finished surface can uniformly move on finished surface, reduce processed
The fluctuation of cutting force in journey, also requires that FTS device is capable of the linear reciprocating motion along X-axis, it is clear that single free
The FTS of degree can not meet above-mentioned requirements.
For existing multiaxis straight line FTS device, although the reciprocating motion along X-axis and Z axis can be provided,
But the high coupling existed and low bandwidth etc. are not enough constrains its application in freeform optics surface is processed.Jilin University
Zou Qing seminar have developed the multiaxis FTS device (publication number: 103357894A, 102615542A) that mechanism is different,
Its structure uses voice coil motor to drive the mode of parallel flexible mechanism, although bigger stroke can be obtained, but with sacrificial
Domestic animal bandwidth of operation is cost, and can not obtain preferable decoupling motion；Additionally, Jilin University's Zhou Xiaoqin problem
Group have developed the multiple fast response servo device for elliptical vibration cutting (publication number: 102078967A,
102371359A and 102059575A etc.), in view of elliptical vibration cutting process is without big stroke and the feature of lower coupling,
Although these devices can obtain higher bandwidth of operation, but the defect of little stroke and high coupling constrains it at optics
Application in free form surface turning.Up to now, it is possible to the high frequency multiaxis FTS device realizing two decoupler shafts is the most little
Being mentioned, the parallel two axle FTS devices that the present invention proposes then disclosure satisfy that and process at freeform optics element
During many performance requirements to FTS device, thus be with a wide range of applications.
Summary of the invention
The present invention proposes the fast tool servo of a kind of two decoupler shafts, has high accuracy and Gao Jun in order to process
The freeform optics surface of even property.
The present invention adopts the technical scheme that: diamond cutter is by fixing screw and the tool rest on flexible hinge matrix
Fixing connecting, flexible hinge matrix is fixed bolt by one group and is fixed with the U-type groove on base and be connected, at this base
Be arranged above cover plate, the front end face of base is provided with front apron, the two ends of X-axis piezoelectric stack respectively with flexibility
Hinge base body is connected with X-axis drive end, and this X-axis piezoelectric stack is by pretension bolt one and this flexible hinge matrix
Connecting, Z axis piezoelectric stack one, Z axis piezoelectric stack two are connected with flexible hinge matrix and Z axis drive end respectively,
And be connected with flexible hinge matrix with pretension bolt two, pretension bolt three respectively；After this flexible hinge matrix tool rest
Face is provided with displacement detecting block, and is connected by fixing screw and this flexible hinge matrix are fixing, and X is to capacitance sensing
One end of device and Z-direction capacitance sensor two contacts side surfaces, other ends with displacement detecting block respectively are each passed through peace
Fill block one and the hole, location of mounting blocks two and fix connect with fixing bolt one and fixing bolt two respectively, these two
Mounting blocks is connected by fixing bolt is fixing with two U-type groove of base respectively.
The each described pretension bolt of the present invention is coaxial with corresponding piezoelectric stack respectively, makes pretension bolt on piezoelectric stack
Produce pretightning force vertically, thus realize the pretension to three piezoelectric stacks.
Flexible hinge matrix of the present invention includes: the X-axis of one group of symmetric parallel guides hinge and is connected with X-axis input,
This X-axis input is connected with diamond tool rest by one group of parallel Z axis decoupling hinge；The Z of one group of symmetric parallel
Spindle guide is connected with Z axis input to hinge, and Z axis input is by one group of parallel X-axis decoupling hinge and diamond
Tool rest is connected.
The present invention utilizes board-type flexible hinge at the upper high poor rigidity of width (Z axis) and thickness direction (Y-axis)
The characteristic of ratio decouples, and the rigidity being respectively provided on width (Z axis) and thickness direction (Y-axis) is kt
And kw, then can obtain following relation according to mechanics of materials relevant knowledge:
Wherein, F is the power applied, and E is the elastic modelling quantity of flexible hinge material, ItFor cross section relative to neutral axis t
The moment of inertia, IwFor the cross section the moment of inertia relative to neutral axis w, t is the thickness of flexible hinge, and w is flexible hinge
Width.
As can be seen from the above equation, in both direction the ratio of rigidity equal to width and thickness ratio square, and greatly
In most cases, the ratio of board-type flexible hinge width and thickness is generally individually smaller than 1/10, then X-axis and Z axis
Motion coupling amount is less than 1%, is also achieved that in FTS device, cutter is at the mobile decoupling of both direction.Additionally,
Condition can also be used coupling quantitative limitation requirement according to difference, rationally determine the ratio of flexible hinge width and thickness
Value, generally can first choose suitable thickness, then ratio and rigidity requirement according to determining determines flexible hinge respectively
Width and length.
Main advantages of the present invention are: novel structure, use the mode of piezoelectric actuator parallel drive compliant mechanism,
Decrease the inertia mass of flexure hinge mechanism motion parts, be conducive to increasing the bandwidth of operation of FTS device, improve
The working (machining) efficiency of FTS device；Utilize board-type flexible hinge in the rigidity of thickness direction much larger than the spy of width
Property, as shown in formula (1), to realize input and the output decoupling of flexure hinge mechanism, improve the motion of FTS device
Precision, reduces mismachining tolerance.
Accompanying drawing explanation
Fig. 1 is the structural representation of the forward sight of the present invention；
Fig. 2 is the structural representation of the backsight of the present invention；
Fig. 3 is the structural representation that the present invention removes base；
Fig. 4 is the structural representation of flexible hinge matrix of the present invention；
Fig. 5 is flexible hinge matrix partial sectional view of the present invention；
Fig. 6 is the structural representation of base of the present invention；
Fig. 7 is board-type flexible hinge cell schematics of the present invention.
Detailed description of the invention
Diamond cutter 5 is connected by fixing screw and the tool rest on flexible hinge matrix 6 are fixing, flexible hinge base
Body 6 fixes by one group that bolt and the U-type groove on base 2 are fixing to be connected, and is arranged above cover plate at this base
1, the front end face of base is provided with front apron 7, the two ends of X-axis piezoelectric stack 801 respectively with flexible hinge matrix 6
Being connected with X-axis drive end 606, this X-axis piezoelectric stack 801 is by pretension bolt 1 and this flexible hinge
Chain matrix connect, Z axis piezoelectric stack 1, Z axis piezoelectric stack 2 803 respectively with flexible hinge matrix 6 and Z
Axle drive end 607 is connected, and respectively with pretension bolt 2 1002, pretension bolt 3 1003 and flexible hinge matrix
Connect；Displacement detecting block 9 is installed after this flexible hinge matrix tool rest, and by fixing screw and this flexible hinge
Chain matrix is fixing to be connected, and X examines with displacement respectively to one end of capacitance sensor 401 and Z-direction capacitance sensor 402
Surveying two contacts side surfaces of block 9, the other end and be each passed through mounting blocks 1, the hole, location of mounting blocks 2 302 is also
With fixing bolt 1, fixing bolt 2 1102 is fixing to be connected, these two mounting blocks respectively by fixing bolt with
Two U-type groove of base are fixing to be connected.
The each pretension bolt of the present invention is coaxial with corresponding piezoelectric stack respectively, makes pretension bolt produce on piezoelectric stack
Pretightning force vertically, thus realize the pretension to three piezoelectric stacks.
Flexible hinge matrix of the present invention includes: the X-axis of one group of symmetric parallel guides hinge 601 and X-axis input 606
Being connected, this X-axis input 606 is connected with diamond tool rest 605 by one group of parallel Z axis decoupling hinge 604；
The Z axis of one group of symmetric parallel guides hinge 603 and is connected with Z axis input 607, and Z axis input 607 is by one
Organize parallel X-axis decoupling hinge 602 to be connected with diamond tool rest 605.
Below according to Fig. 1～Fig. 6, it is further described below:
Diamond cutter 5 is connected by fixing screw is fixing with the tool rest 605 on flexible hinge matrix, and cutter is by three
Piezoelectric stack is driven indirectly by flexible hinge matrix, can drive these three with signal generator or industrial control unit (ICU)
Piezoelectric stack, finally realizes diamond cutter and moves along the high-frequency decoupling of X-axis and Z axis.
Flexible hinge matrix 6 is mainly by the board-type hinge set being mutually perpendicular to layout: X-axis guides hinge 601, X
Decoupler shaft hinge 602, Z axis guide hinge 603, Z axis decoupling hinge 604 is constituted, as shown in Figure 4, Figure 5, and
Board-type hinge is utilized to decouple in the characteristic of width and thickness direction high ratio of rigidity；X-axis piezoelectric stack 801
Indirectly driving diamond cutter 5 by Z axis decoupling hinge 604, two Z axis piezoelectric stacks are then by X-axis solution
Coupling hinge 602 drives diamond cutter 5 indirectly, finally realize apparatus of the present invention input in X-axis and Z-direction and
The decoupling of output；Additionally, two piezoelectric stacks that the Z axis of apparatus of the present invention drives use synchronously driven side
Formula, can solve the cutter that caused by the foozle parasitic error along Y-direction whereby.
Flexible hinge matrix 6 is fixed bolt by one group and is arranged on base 2, and is capable of diamond cutter 5
Fine position in the Y-axis direction completes cutter, and two capacitance displacement sensors are fixed with sensor mounting blocks respectively
On base 2, the displacement of displacement transducer detection can improve FTS as the feedback signal of closed-loop control system
The precision of system servo motion.
Three pretension bolts are threadeded with flexible hinge matrix 6 respectively by screw thread, and available regulation screw thread is even
The degree of tightening connect carries out pretension to three piezoelectric stacks respectively, simultaneously need to ensure pretension bolt and corresponding piezoelectricity
Stack coaxial, make pretension bolt produce pretightning force vertically on piezoelectric stack, thus realize three piezo stack
The pretension of heap.
The present invention utilizes board-type flexible hinge at the upper high poor rigidity of width (Z axis) and thickness direction (Y-axis)
The characteristic of ratio decouples, and the rigidity being respectively provided on width (Z axis) and thickness direction (Y-axis) is kt
And kw, then can obtain following relation according to mechanics of materials relevant knowledge:
Wherein, F is the power applied, and E is the elastic modelling quantity of flexible hinge material, ItFor cross section relative to neutral axis t
The moment of inertia, IwFor the cross section the moment of inertia relative to neutral axis w, t is the thickness of flexible hinge, and w is flexible hinge
Width.
As can be seen from the above equation, in both direction the ratio of rigidity equal to width and thickness ratio square, and greatly
In most cases, the ratio of board-type flexible hinge width and thickness is generally individually smaller than 1/10, then X-axis and Z axis
Motion coupling amount is less than 1%, is also achieved that in FTS device, cutter is at the mobile decoupling of both direction.Additionally,
Condition can also be used coupling quantitative limitation requirement according to difference, rationally determine the ratio of flexible hinge width and thickness
Value, generally can first choose suitable thickness, then ratio and rigidity requirement according to determining determines flexible hinge respectively
Width and length.
Claims (3)
1. the fast tool servo of a decoupler shaft, it is characterised in that: diamond cutter is by fixing
Screw is fixing with the tool rest on flexible hinge matrix to be connected, and flexible hinge matrix fixes bolt and base by one group
On U-type groove fixing connect, at the cover plate that is arranged above of this base, the front end face of base is provided with front
Plate, the two ends of X-axis piezoelectric stack are connected with flexible hinge matrix and X-axis drive end respectively, this X-axis pressure
Electricity is stacked and is connected with this flexible hinge matrix by pretension bolt one, Z axis piezoelectric stack one, Z axis piezoelectric stack
Two are connected with flexible hinge matrix and Z axis drive end respectively, and respectively with pretension bolt two, pretension bolt
Three are connected with flexible hinge matrix；After this flexible hinge matrix tool rest, displacement detecting block is installed, and passes through
Fixing screw is fixing with this flexible hinge matrix to be connected, and X is to capacitance sensor and one end of Z-direction capacitance sensor
Two contacts side surfaces, the other end with displacement detecting block are each passed through mounting blocks one and the location of mounting blocks two respectively
Hole is also fixed connect with fixing bolt one and fixing bolt two respectively, and these two mounting blocks are respectively by fixing spiral shell
Bolt is fixing with two U-type groove of base to be connected.
The fast tool servo of two decoupler shafts the most according to claim 1, it is characterised in that: each
Described pretension bolt is coaxial with corresponding piezoelectric stack respectively, makes pretension bolt produce vertically on piezoelectric stack
Pretightning force, thus realize pretension to three piezoelectric stacks.
The fast tool servo of two decoupler shafts the most according to claim 1 and 2, it is characterised in that:
Described flexible hinge matrix includes: the X-axis of one group of symmetric parallel guides hinge and is connected with X-axis input, should
X-axis input is connected with diamond tool rest by one group of parallel Z axis decoupling hinge；The Z of one group of symmetric parallel
Spindle guide is connected with Z axis input to hinge, and Z axis input is by one group of parallel X-axis decoupling hinge and gold
Hard rock tool rest is connected.
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| CN201410342405.3A CN104084829B (en) | 2014-07-17 | 2014-07-17 | A kind of fast tool servo of two decoupler shafts |
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| CN201410342405.3A CN104084829B (en) | 2014-07-17 | 2014-07-17 | A kind of fast tool servo of two decoupler shafts |
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| CN104084829B true CN104084829B (en) | 2016-08-31 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104101084A (en) * | 2014-08-07 | 2014-10-15 | 广西铂焰红外线科技有限公司 | Direct gas-fired liquid heating device |
| CN106736635B (en) * | 2017-01-12 | 2018-01-12 | 广东工业大学 | A kind of freedom degree parallel connection translation fast tool servo device |
| CN110757250B (en) * | 2019-11-26 | 2024-04-09 | 江苏集萃精凯高端装备技术有限公司 | Ultra-high precision positioning and adjusting device |
| CN111487922B (en) * | 2020-04-07 | 2021-08-03 | 南京理工大学 | Cascade cross-scale cutter servo device and high-frequency control method thereof |
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| CN102069411A (en) * | 2010-11-26 | 2011-05-25 | 吉林大学 | High-precision large-stroke triaxial fast cutter servo device |
| EP2404704A2 (en) * | 2010-07-09 | 2012-01-11 | Haas Schleifmaschinen GmbH | Grinding machine with coolant nozzle adjustable mounted on protection hood |
| CN103021473A (en) * | 2012-12-07 | 2013-04-03 | 山东大学 | Direct drive type motion decoupling high-accuracy servo platform |
| CN103357894A (en) * | 2013-06-26 | 2013-10-23 | 吉林大学 | Long-strake three degree-of-freedom linear type quick cutter servo device |
| CN103400603A (en) * | 2013-07-01 | 2013-11-20 | 清华大学 | Anti-torsion parallel double-drive motion decoupling servo platform |
| CN203973264U (en) * | 2014-07-17 | 2014-12-03 | 吉林大学 | A kind of fast tool servo of two decoupler shafts |
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2014
- 2014-07-17 CN CN201410342405.3A patent/CN104084829B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2404704A2 (en) * | 2010-07-09 | 2012-01-11 | Haas Schleifmaschinen GmbH | Grinding machine with coolant nozzle adjustable mounted on protection hood |
| CN102069411A (en) * | 2010-11-26 | 2011-05-25 | 吉林大学 | High-precision large-stroke triaxial fast cutter servo device |
| CN103021473A (en) * | 2012-12-07 | 2013-04-03 | 山东大学 | Direct drive type motion decoupling high-accuracy servo platform |
| CN103357894A (en) * | 2013-06-26 | 2013-10-23 | 吉林大学 | Long-strake three degree-of-freedom linear type quick cutter servo device |
| CN103400603A (en) * | 2013-07-01 | 2013-11-20 | 清华大学 | Anti-torsion parallel double-drive motion decoupling servo platform |
| CN203973264U (en) * | 2014-07-17 | 2014-12-03 | 吉林大学 | A kind of fast tool servo of two decoupler shafts |
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