CN110181327A - A kind of fast tool servo device with dynamic force balanced function - Google Patents

A kind of fast tool servo device with dynamic force balanced function Download PDF

Info

Publication number
CN110181327A
CN110181327A CN201910555039.2A CN201910555039A CN110181327A CN 110181327 A CN110181327 A CN 110181327A CN 201910555039 A CN201910555039 A CN 201910555039A CN 110181327 A CN110181327 A CN 110181327A
Authority
CN
China
Prior art keywords
dynamic force
servo device
fast tool
tool servo
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910555039.2A
Other languages
Chinese (zh)
Inventor
滕翔宇
霍德鸿
丁辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Jijingkai High-End Equipment Technology Co Ltd
Original Assignee
Jiangsu Jijingkai High-End Equipment Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Jijingkai High-End Equipment Technology Co Ltd filed Critical Jiangsu Jijingkai High-End Equipment Technology Co Ltd
Priority to CN201910555039.2A priority Critical patent/CN110181327A/en
Publication of CN110181327A publication Critical patent/CN110181327A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0032Arrangements for preventing or isolating vibrations in parts of the machine
    • B23Q11/0035Arrangements for preventing or isolating vibrations in parts of the machine by adding or adjusting a mass, e.g. counterweights

Abstract

The present invention relates to a kind of fast tool servo devices with dynamic force balanced function, including the pedestal being set on lathe, the electric machine assembly being set on pedestal, the first guide assembly being arranged on electric machine assembly and the cutter being arranged on the first guide assembly, connector is fixed on the pedestal, the electric machine assembly is fixed on the side of connector, and the balanced component that dynamic force is generated for balance motor component movement is provided in the other side of the connector.The present invention realizes the balance for the dynamic force that motion parts generate in working condition in fast tool servo device, can effectively improve the machining accuracy of optics non-rotational symmetric curved surface;The balanced component structure of dynamic force is simple simultaneously, it is easy for installation, design space has greatly been saved, has kept the fast tool servo device volume that joined dynamic force balanced component more compact, to reduce assembly difficulty of the fast tool servo device in the lathe confined space, improve efficiency.

Description

A kind of fast tool servo device with dynamic force balanced function
Technical field
The invention belongs to the technical fields such as ultra-precise cutting and optical precision component turnery processing, are related to a kind of with dynamic The fast tool servo device of state balancing function.
Background technique
Optics non-rotational symmetric curved surface refers to the freeform optics surface of no rotationally symmetrical axis, has symmetrical optics with tradition Element is compared, and complicated free form surface is combined into optical system by optics non-rotational symmetric curved surface elements, not only can very big journey The negative effect in light transmittance process, such as astigmatism, distortion and coma are eliminated on degree, moreover it is possible to the effective loss for reducing luminous energy. Brilliant optical property is widely used it in aviation exploration, aerospace and national defence, in industrial circle It is widely used, such as the fields such as automobile manufacture, opticianry eyeglass, digital camera.In order to keep optics non-rotational symmetric bent Face element part realizes efficient mass production under the premise of guaranteeing high-precision, the ultraprecise Buddha's warrior attendant based on fast tool servo Stone turnery processing is acknowledged as most suitably used processing method.
For fluctuating the processing of big free form surface, the sharp knife based on piezoelectric ceramics and compliant mechanism being primarily present at present Servomechanism installation is not able to satisfy its processing request because of the feature that its servo stroke is small.So being based on voice coil motor and air-bearing Big stroke, high frequency sound, the fast tool servo device contributed greatly comes into being.But it is being based on voice coil motor and air-bearing sharp knife In servomechanism installation, the quality of motion parts has very big mention with the fast tool servo device based on piezoelectric ceramics and compliant mechanism Height, so it is caused to generate the dynamic force for being difficult to ignore during the work time.Dynamic force can travel on machine body to produce Raw additional vibration, the freeform optics surface element high to required precision is for, and the additional vibratory of generation is to can generate can not The influence ignored.
Based on above-mentioned defect, Improvement is carried out for existing design defect, one kind is novel to be had to found The fast tool servo device of dynamic force balanced function makes its industry application value get a promotion
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of fast tool servo device with dynamic force balanced function, it Dynamic force can be offset and travel to the vibration generated on machine body.
The technical scheme adopted by the invention to solve the technical problem is that: a kind of sharp knife with dynamic force balanced function is watched Clothes are set, including the pedestal being set on lathe, the electric machine assembly being set on pedestal, first leading of being arranged on electric machine assembly Rail assembly and the cutter being arranged on the first guide assembly are fixed with connector, the motor group on the pedestal Part is fixed on the side of connector, is provided in the other side of the connector and generates dynamic for balance motor component movement The balanced component of power.
Further specifically, the balanced component includes the mechanical amplification Piezoelectric Ceramic being arranged on connector Device, the second guide assembly being set on the base, be connected to mechanical amplification piezoelectric ceramic actuator and the second guide assembly it Between connecting plate and the clump weight that is arranged on connecting plate.
Further specifically, the connecting plate includes the level board being fixed on the second guide assembly, is fixed on machinery The reinforcing rib that formula is amplified the vertical plate on piezoelectric ceramic actuator and is arranged between level board and vertical plate.
Further specifically, second guide assembly includes the guide rail being fixed on pedestal and is set on guide rail Sliding block, the connecting plate is fixed on sliding block.
Further specifically, first guide assembly is air-float guide rail.
Further specifically, the air-float guide rail includes that the air bearing orbit determination being fixed on the base and setting are fixed in air bearing Air bearing dynamic rail on rail, offers through-hole on the air bearing orbit determination, and the air bearing dynamic rail is inserted into through-hole;Described The appearance of air bearing orbit determination is inward-facing to offer throttle orifice, and the throttle orifice is connected to through-hole.
Further specifically, the throttle orifice has several and is evenly distributed on air bearing orbit determination.
Further specifically, the throttle orifice shares 5 rows and is evenly distributed on air bearing orbit determination, throttling described in every row Hole has 3.
Further specifically, the electric machine assembly includes voice coil motor and the connection that voice coil motor head is arranged in Block, the air bearing dynamic rail are fixed on link block.
It is described further specifically, the voice coil motor includes stator and the mover coil that stator interior is arranged in Stator pass through the clamping bench that is set on the base and fix, the stator is fixed with connector.
It is generated in working condition the beneficial effects of the present invention are: the present invention realizes motion parts in fast tool servo device Dynamic force balance, can effectively improve the machining accuracy of optics non-rotational symmetric curved surface;The balance group of dynamic force simultaneously Part structure is simple, easy for installation, has greatly saved design space, makes the fast tool servo device that joined dynamic force balanced component Volume is more compact, to reduce assembly difficulty of the fast tool servo device in the lathe confined space, improves efficiency.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention;
Fig. 2 is the schematic cross-sectional view of Fig. 1.
In figure: 1, pedestal;2, connector;3, electric machine assembly;4, the first guide assembly;5, balanced component;31, stator;32, Rotor coil;33, link block;34, clamping bench;41, air bearing orbit determination;42, air bearing dynamic rail;43, throttle orifice;44, gas distribution channels; 51, mechanically amplify piezoelectric ceramic actuator;52, guide rail;53, sliding block;54, clump weight;55, vertical plate;56, level board;57, Reinforcing rib.
Specific embodiment
The present invention is explained in detail with reference to the accompanying drawing.
A kind of fast tool servo device with dynamic force balanced function as shown in Figures 1 and 2, including being set on lathe Pedestal 1, the electric machine assembly 3 being set on pedestal 1, the first guide assembly 4 being arranged on electric machine assembly 3 and setting are first Cutter on guide assembly 4, is fixed with connector 2 on the pedestal 1, and the electric machine assembly 3 is fixed on connector 2 Side is provided in the other side of the connector 2 and moves the balanced component 5 for generating dynamic force for balance motor component 3. Electric machine assembly 3 moves so that the cutter on the first guide assembly 4 is moved, and processing of the cutter to workpiece is realized, due to motor The dynamic force that the movement of component 3 generates is balanced dynamic force by the way that balanced component 5 is arranged in the other side of connector 2, real Now stable output.
Balanced component 5 includes mechanical amplification piezoelectric ceramic actuator 51, the second guide assembly, connecting plate and clump weight 54, the mechanical piezoelectric ceramic actuator 51 that amplifies is fixed by screws on connector 2, for receiving the dynamic force for being transmitted through and, Second guide assembly is made of the guide rail 52 that is fixed on pedestal 1 and the sliding block 53 being arranged on guide rail 52, and sliding block 53 can be Free to slide on guide rail 52, the direction that guide rail 52 is arranged is that the direction of generation dynamic force is i.e. consistent with the direction of motion of cutter, even Fishplate bar is for connecting mechanical amplification piezoelectric ceramic actuator 51 and sliding block 53, and connecting plate is by a level board 56 and vertical plate 55 compositions, and be connected and fixed between level board 56 and vertical plate 55 by reinforcing rib 57, reinforcing rib 57 is triangular in shape, reinforcing rib 57 can according to need be designed as it is multiple, and need in the present case the middle part of level board 56 by screw install clump weight 54, So reinforcing rib 57 is set as 2, it is located at the two sides of connecting plate;The purpose of reinforcing rib 57 is to prevent from mechanically amplifying piezoelectricity Faint deformation is generated during the driving of ceramic driver 51, influences to be driven effect.
First guide assembly 4 is air-float guide rail, dynamic including air bearing orbit determination 41 and the air bearing being arranged on air bearing orbit determination 41 Rail 42;It is in half arc at the top of air bearing orbit determination 41, bottom is fixed on pedestal 1, and a through-hole is opened up on air bearing orbit determination 41, this is logical Hole is rounded and extends to other end, while 41 top of the axis of the through-hole and air bearing orbit determination from an end face of air bearing orbit determination 41 The axis of half arc is identical;Air bearing dynamic rail 42 is rounded and is inserted into through-hole, between being between air bearing dynamic rail 42 and air bearing orbit determination 41 Gap cooperation guarantees that air bearing dynamic rail 42 can in axial direction move in through-hole, and cutter is fixed in air bearing dynamic rail 42;It is fixed in air bearing The appearance of rail 41 is inward-facing to offer throttle orifice 43, and throttle orifice 43 is connected to through-hole, and connector is installed on throttle orifice 43, connection Tracheae is connected on head;At work, high pressure gas is sprayed into throttle orifice 43 by tracheae, high pressure gas passes through throttle orifice 43 enter in through-hole, since, there are gap, high pressure gas enters gap back wall around gas between air bearing orbit determination 41 and air bearing dynamic rail 42 42 surrounding of floating rail forms one layer of air film, so that without directly contacting between air bearing orbit determination 41 and air bearing dynamic rail 42, when sliding rubs Power guarantees that air bearing dynamic rail 42 has smooth sliding effect close to zero, while also ensuring that fast tool servo device can do essence Close straight reciprocating motion.The number of throttle orifice 43 is multiple and is evenly distributed on the outer surface of air bearing orbit determination 42, main mesh Be make gas film behavior and stablize it is lasting keep, realize the stationarity that air bearing dynamic rail 42 moves;In the present case, in air bearing orbit determination 41 Outer surface on 5 cribbing discharge orifices 43 are set, every row has 3 throttle orifices 43, and the axle center of throttle orifice 43 is located at the radial direction of through-hole On direction, meanwhile, gas distribution channels 44 are horizontally arranged in 41 bottom of air bearing orbit determination, are set up perpendicular to gas distribution channels 44 several Gas distribution channels 44 are connected to by throttle orifice 43, throttle orifice 43 with through-hole, and the axis setting through-hole of throttle orifice 43 in the radial direction, passes through Gas distribution channels 44 and throttle orifice 43 realize that high pressure gas enters from via bottoms.The form of above-mentioned throttle orifice 43 includes of different sizes Throttle orifice, ring restrictor, slit throttling, porous restriction, capillary-compensated etc., can there is one kind to be also possible to a variety of combinations Mode carry out.
Electric machine assembly 3 includes voice coil motor and the link block 33 that voice coil motor head is arranged in, and air bearing dynamic rail 42 is fixed On link block 33;Voice coil motor includes stator 31 and the mover coil being arranged in inside stator 31 32, the stator 31 Fixed by the clamping bench 34 being arranged on pedestal 1, the stator 31 and connector 2 is fixed;The form of clamping bench 34 has more Kind, it can be fixed, can also be fixed by left and right semi-circular features by upper and lower semi-circular features;In the present case, it uses The mode of left and right semi-circular features is fixed, and left semicircle component and right semi-circle feature bottom are fixed on pedestal 1, voice coil motor The setting of stator 31 fixes left semicircle component and right semi-circle component between left semicircle component and right semi-circle component, and through screw The stator 31 of voice coil motor is held in connection tightly;The direction of motion and voice coil motor mover line of mechanical amplification piezoelectric ceramic actuator 51 The direction of motion coaxial arrangement of circle 32, air bearing dynamic rail 42, for eliminating error torque.
The dynamic force generated in the operating condition is F=mA ω2Sin ω t, wherein F is dynamic force, and A is maximum functional row Journey, m are motion parts quality, and ω is angular speed, and t is the time.Assuming that motion parts quality be m=1kg, angular velocity omega= 140rad/s, maximum functional stroke A=5mm, thus can be calculated, dynamic force F=98N, frequency 22.28Hz.
The dynamic force generated in the operating condition by the way that fast tool servo device is calculated, then by adjusting clump weight 54 Weight keeps the quality of motion parts in the balanced component 5 of dynamic force equal with the quality of motion parts in fast tool servo system, after And counterweight part is driven to do on the second guide assembly and fast tool servo by the mechanical amplification piezoelectric ceramic actuator 51 of control The synchronization of device part but contrary reciprocating linear motion generate and the big but contrary dynamics such as fast tool servo device Power, to achieve the purpose that eliminate the dynamic force that fast tool servo device generates.
To promote the movement travel in dynamic force balanced system, this case selects mechanical amplification piezoelectric ceramic actuator 51 to make For driving element, although Common piezoelectricity ceramic driver has many advantages, such as high frequency sound, high position precision, its deflection is very It is small, 1 ‰ generally are, so that it cannot the characteristics of meeting the big stroke of the fast tool servo device based on voice coil motor.Mechanically Lever displacement equations principle is utilized in amplification piezoelectric ceramic actuator 51, realizes displacement equations, to meet based on voice coil electricity The movement for doing the big stroke of high frequency of the fast tool servo device of machine.
To sum up, the present invention realizes the flat of the dynamic force that motion parts generate in working condition in fast tool servo device Weighing apparatus, can effectively improve the machining accuracy of optics non-rotational symmetric curved surface;5 structure of balanced component of dynamic force is simple simultaneously, It is easy for installation, design space has greatly been saved, has stepped up the fast tool servo device volume that joined dynamic force balanced component 5 more It gathers, to reduce assembly difficulty of the fast tool servo device in the lathe confined space, improves efficiency.
It is emphasized that: the above is only presently preferred embodiments of the present invention, not make in any form to the present invention Limitation, any simple modification, equivalent change and modification to the above embodiments according to the technical essence of the invention, All of which are still within the scope of the technical scheme of the invention.

Claims (10)

1. a kind of fast tool servo device with dynamic force balanced function, including be set on lathe pedestal (1), be set to bottom The first guide assembly (4) and setting of electric machine assembly (3), setting on electric machine assembly (3) on seat (1) is in the first guide rail group Cutter on part (4), which is characterized in that be fixed with connector (2) on the pedestal (1), the electric machine assembly (3) is solid It is scheduled on the side of connector (2), is provided in the other side of the connector (2) and moves production for balance motor component (4) The balanced component (5) of raw dynamic force.
2. the fast tool servo device according to claim 1 with dynamic force balanced function, which is characterized in that described is flat Weighing apparatus component (5) includes the mechanical amplification piezoelectric ceramic actuator (51) being arranged on connector (2), is arranged on pedestal (1) The second guide assembly, the connecting plate that is connected between mechanical amplification piezoelectric ceramic actuator (51) and the second guide assembly with And the clump weight (54) on connecting plate is set.
3. the fast tool servo device according to claim 2 with dynamic force balanced function, which is characterized in that the company Fishplate bar includes the level board (56) being fixed on the second guide assembly, is fixed on mechanical amplification piezoelectric ceramic actuator (51) Vertical plate (55) and reinforcing rib (57) between level board (56) and vertical plate (55) is set.
4. the fast tool servo device according to claim 2 with dynamic force balanced function, which is characterized in that described Two guide assemblies include the guide rail (52) being fixed on pedestal (1) and the sliding block (53) being set on guide rail (52), described Connecting plate is fixed on sliding block (53).
5. the fast tool servo device according to claim 1 with dynamic force balanced function, which is characterized in that described One guide assembly (4) is air-float guide rail.
6. the fast tool servo device according to claim 5 with dynamic force balanced function, which is characterized in that the gas Floating guide rail includes the air bearing dynamic rail of the air bearing orbit determination (41) being fixed on pedestal (1) and setting on air bearing orbit determination (41) (42), through-hole is offered on the air bearing orbit determination (41), the air bearing dynamic rail (42) is inserted into through-hole;In the gas The appearance of floating fixed rail (41) is inward-facing to be offered throttle orifice (43), and the throttle orifice (43) is connected to through-hole.
7. the fast tool servo device according to claim 6 with dynamic force balanced function, which is characterized in that the section Discharge orifice (43) has several and is evenly distributed on air bearing orbit determination (41).
8. the fast tool servo device according to claim 6 with dynamic force balanced function, which is characterized in that the section Discharge orifice (43) shares 5 rows and is evenly distributed on air bearing orbit determination (41), and throttle orifice described in every row (43) has 3.
9. the fast tool servo device according to claim 6 with dynamic force balanced function, which is characterized in that the electricity Thermomechanical components (3) include voice coil motor and the link block (33) that voice coil motor head is arranged in, and the air bearing dynamic rail (42) is solid It is scheduled on link block (33).
10. the fast tool servo device according to claim 9 with dynamic force balanced function, which is characterized in that described Voice coil motor includes the mover coil (32) of stator (31) and setting in stator (31) inside, and the stator (31) is by setting The clamping bench (34) set on pedestal (1) is fixed, and the stator (31) and connector (2) are fixed.
CN201910555039.2A 2019-06-25 2019-06-25 A kind of fast tool servo device with dynamic force balanced function Pending CN110181327A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910555039.2A CN110181327A (en) 2019-06-25 2019-06-25 A kind of fast tool servo device with dynamic force balanced function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910555039.2A CN110181327A (en) 2019-06-25 2019-06-25 A kind of fast tool servo device with dynamic force balanced function

Publications (1)

Publication Number Publication Date
CN110181327A true CN110181327A (en) 2019-08-30

Family

ID=67723260

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910555039.2A Pending CN110181327A (en) 2019-06-25 2019-06-25 A kind of fast tool servo device with dynamic force balanced function

Country Status (1)

Country Link
CN (1) CN110181327A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112276639A (en) * 2020-10-22 2021-01-29 山东大学深圳研究院 Macro-micro double-drive type large-stroke high-precision fast cutter servo device
CN113399747A (en) * 2021-06-28 2021-09-17 江苏集萃精凯高端装备技术有限公司 Regular hexahedron reflector single-point diamond machine tool and machining method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0516058A (en) * 1991-07-08 1993-01-26 Sony Corp Rotary grinding machine
CN101681986A (en) * 2007-03-14 2010-03-24 锡德雷特技术公司 Fine positioning system using an inertial motor based on a mechanical amplifier
CN102554633A (en) * 2011-11-23 2012-07-11 中国人民解放军国防科学技术大学 Long-stroke high-frequency-response quick cutter servo device
CN103023374A (en) * 2012-12-28 2013-04-03 东南大学 Inertia type piezoelectric linear motor
CN106736845A (en) * 2016-11-22 2017-05-31 江苏工大金凯高端装备制造有限公司 A kind of big stroke fast tool servo mechanism
CN109440186A (en) * 2018-12-17 2019-03-08 浙江晶盛机电股份有限公司 A kind of single crystal growing furnace lifting head dynamic dynamic balancer
CN210121787U (en) * 2019-06-25 2020-03-03 江苏集萃精凯高端装备技术有限公司 Fast knife servo device with dynamic force balance function

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0516058A (en) * 1991-07-08 1993-01-26 Sony Corp Rotary grinding machine
CN101681986A (en) * 2007-03-14 2010-03-24 锡德雷特技术公司 Fine positioning system using an inertial motor based on a mechanical amplifier
CN102554633A (en) * 2011-11-23 2012-07-11 中国人民解放军国防科学技术大学 Long-stroke high-frequency-response quick cutter servo device
CN103023374A (en) * 2012-12-28 2013-04-03 东南大学 Inertia type piezoelectric linear motor
CN106736845A (en) * 2016-11-22 2017-05-31 江苏工大金凯高端装备制造有限公司 A kind of big stroke fast tool servo mechanism
CN109440186A (en) * 2018-12-17 2019-03-08 浙江晶盛机电股份有限公司 A kind of single crystal growing furnace lifting head dynamic dynamic balancer
CN210121787U (en) * 2019-06-25 2020-03-03 江苏集萃精凯高端装备技术有限公司 Fast knife servo device with dynamic force balance function

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112276639A (en) * 2020-10-22 2021-01-29 山东大学深圳研究院 Macro-micro double-drive type large-stroke high-precision fast cutter servo device
CN113399747A (en) * 2021-06-28 2021-09-17 江苏集萃精凯高端装备技术有限公司 Regular hexahedron reflector single-point diamond machine tool and machining method thereof

Similar Documents

Publication Publication Date Title
Zhu et al. Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining
CN104440344B (en) Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor
CN105179480B (en) A kind of gas suspension device of active control orifice inlet port air pressure
CN101241314B (en) 6 freedom degrees precision positioning station capable of compensating Z-direction position
CN106026763B (en) Piezoelectric ceramic drive three-freedom-degree angle adjusting device and method
CN103309009B (en) Be applied to the piezoceramics linear motor focus control of optical system
CN101972856B (en) Non-resonant three-dimensional elliptical diamond fly-cutting optical free curved surface method and special device
US8097989B2 (en) Reciprocating linear actuator
CN110181327A (en) A kind of fast tool servo device with dynamic force balanced function
CN106736845A (en) A kind of big stroke fast tool servo mechanism
CN105252285A (en) Piezoelectric-driven three-dimensional elliptic micro-feed motion platform
CN102069201B (en) Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning
CN104400763B (en) Gas lubrication and frictional damping combined type high rigidity high stability two-dimension adjustment workbench
CN108262629A (en) A kind of large stroke and high precision two-freedom fast tool servo
CN206200568U (en) A kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive
CN104362890B (en) Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement
CN107367223A (en) The inductance sensor calibration method and device of capacitance sensor bit shift compensation
CN106312591A (en) Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive
Liu et al. Long-stroke fast tool servo and a tool setting method for freeform optics fabrication
CN210121787U (en) Fast knife servo device with dynamic force balance function
CN207953316U (en) A kind of large stroke and high precision two-freedom fast tool servo
CN103062284A (en) Zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling
CN110439958B (en) Planar two-degree-of-freedom micro-disturbance flexible active vibration isolation device and method
CN205166404U (en) Three -dimensional oval little feed movement platform of piezoelectricity drive
CN104084829A (en) Quick cutter servo device with two decoupled shafts

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination