CN106312591A - Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive - Google Patents
Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive Download PDFInfo
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 3
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- 238000003754 machining Methods 0.000 description 8
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- 238000005516 engineering process Methods 0.000 description 5
- 238000011160 research Methods 0.000 description 5
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- 229910003460 diamond Inorganic materials 0.000 description 2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Abstract
The invention relates to a three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive and belongs to the field of micro-nano and ultraprecise manufacture and multi-axis motion platform precision control. The three-dimensional oval micro displacement motion platform comprises a base, a right side plate, a left side plate, an upper plate and a fine adjustment device. X-axis and Y-axis piezoelectric stacks are fixed to the upper plate, a Z-axis piezoelectric stack is perpendicular to the other two piezoelectric stacks, signals are input to drive the three piezoelectric stacks to generate high-frequency vibration, and a workpiece on a workpiece base is driven to generate an elliptic motion track in a three-dimensional space. The three-dimensional oval micro displacement motion platform has the advantages of being novel in structure, high in rigidity and good in stationarity, four flexible hinges are in central symmetry distribution, motion accuracy of the micro displacement motion platform is controlled easily, and an oval track of the micro displacement motion platform in the three-dimensional space is controlled easily.
Description
Technical field
The invention belongs to micro-nano and super hot investment casting and multiaxial motion platform precision control field, particularly relate to one
The three-dimensional elliptical micrometric displacement motion platform of three piezoelectricity vertical drive.
Background technology
In recent years, precision and ultra-precision machining technology is increasingly becoming ingredient important in machinery manufacturing industry, its developing water
One of flat important symbol weighing a national manufacturing industry level especially.Precision and ultra-precision machining is with a wide range of applications,
Its Ultraprecision Machining is not only applicable to the milling of various small parts and the machining of mould, microcavity mould and adds
Work, the development of the national economy field such as processing (processing of such as silicon wafer) of electronic devices and components, for national defence, aerospace industry
Middle processing laser fusion reflecting mirror, tactical missile and manned spaceship sphere, aspheric surface heavy parts etc. also have the heaviest
The meaning wanted.
Along with type of drive and the fast development of flexible apparatus, in precision and ultra-precision machining high accuracy, high-resolution
Accurate Fine Feed system becomes one of direction very powerful and exceedingly arrogant in sophisticated industry in recent years and field of scientific study.On the other hand with
Developing rapidly of extensive and super large-scale integration, the demand of Non-optical surfaces increases day by day so that precision Fine Feed
System has obtained swift and violent development.Accurate Fine Feed system is not only widely used in various fine measuring instrument, and can fill
When the actuator in control system.By on accurate ultra lathe install Fine Feed system, including micro-feeding tool holder structure,
Fine Feed work stage etc., it is possible to significantly improve precision and ultra-precision machining precision, the raising for ultra-precision machine tool machining accuracy has
It is of great significance.
Lathe precision Fine Feed system was studied by the most a large amount of experts and scholars in recent years so that accurate Fine Feed
Technical merit is greatly improved.The implementation of Fine Feed has a lot, but be most widely used this year recently is dynamo-electric
Formula, the most again based on piezoelectric formula.So-called piezoelectric formula, it is simply that use the inverse piezoelectricity effect of piezoelectric ceramics
Should (or electrostriction effect), with electric field controls piezoelectric ceramics produce micrometric displacement, this mode simple in construction, easy to control, take
Little with electric current, without running part, there is the advantages such as rigidity is high, frequency response character is good, thus be widely used.It addition, it is flexible
Hinge owing to its volume is little, highly sensitive, mechanical friction and gapless motion become that raising is accurate, Ultra-precision Turning feeding
One importance of precision, has started Fine Feed system and has entered the nano level New Times.
For the lathe Fine Feed system of driving type piezoelectric actuator, Chinese scholars has carried out substantial amounts of research.U.S. 3L tests
This technology was the most successfully applied in superfinishing by (Laurence Livermore Nation Laboratory) as far back as 1975 in room
In close diamond lathe transverse feed mechanism；For improving feeding resolution and the precision of super precision lathe, U.S. 3L examination in 1985
Test room S.R.Patterson and the success of other people cooperation research and development fast servo tool；Nineteen ninety, Japanese Y.Okazaki have studied
A kind of novel micro-feeding tool holder, the micro-feeding tool holder novel structure of his research, functional；Thomas A.Dowrj in 1991
Proposing a kind of quickly knife rest, be used for processing symmetrical centre surface without spin, this knife rest has higher-frequency and rings speed, and knife rest moves
The quality of parts and knife rest rigidity are the principal elements affecting frequency response speed.China has also begun to utilize piezoelectric ceramics to drive the eighties
The research of dynamic Fine Feed technology, within 1987, Nanjing Polytechnical College succeeds in developing a kind of micro-feeding tool holder used in turning machining, make use of machinery knot
The elongation of piezoelectric ceramic actuator is amplified by structure, shortcoming be amplify elongation while can reduce knife rest rigidity and stable
Property；1988, Dalian University of Technology succeeded in developing the micro-feeding tool holder for fine turning lathe axle turn error dynamic compensation；Separately
External patent aspect, patent CN102078967A proposes one mixing three-dimensional elliptical vibrocutting method, utilizes piezoelectric stack to drive
Dynamic diamond point of a knife produces elliptical trajectory at three dimensions, thus cuts workpiece；Patent CN102059575A carries
The three-dimensional elliptical topping machanism gone out, its three-dimensional elliptical movement locus can only be limited in scope in the side of cutter, parameter adjustment, for
The lathe that can mate processing requires higher, and this device does not have universality.
It is therefore seen that, the research using piezoelectric stack driving micro-feeding tool holder in accurate ultra lathe is the most general with invention
Time, corresponding micro-feeding device and motor control are the most ripe.But accurate ultra Machinetool workpiece Fine Feed is transported
The research of moving platform is less, and in the Machinetool workpiece Fine Feed motion platform can looked at present, patent ZL201520919504.3 proposes
A kind of Piezoelectric Driving three-dimensional elliptical Fine Feed motion platform, makes workpiece produce three-dimensional elliptical motion rail under the driving of piezoelectric stack
Mark.Analyze based on above, study and propose the three-dimensional elliptical micrometric displacement motion platform of a kind of three new piezoelectricity vertical drive so that it is
Meet structure the compactest, under conditions of hinge quantity is less, it is possible to significantly improve the precision of micrometric displacement motion platform, this for
Realize micro-nano and control significant with super hot investment casting and multiaxial motion platform precision.
Summary of the invention
The present invention provides the three-dimensional elliptical micrometric displacement motion platform of a kind of three piezoelectricity vertical drive, in super-precision machine tools
On the basis of, given workpiece to be processed three-dimensional elliptical track cuts, it is achieved high accuracy and high-resolution ultra precision cutting
Processing.
The present invention adopts the technical scheme that: right plate, and left plate is fixing with base respectively to be connected, and upper plate is joined by side plate
Connecing hole and right plate, left plate top is fixing to be connected, and described upper plate has the flexible hinge of four centrosymmetry distributions, workpiece base
Seat surrounding is connected with four flexible hinges, and X-axis piezoelectric stack rear end is connected with upper plate X-axis piezoelectric stack fixing hole, front end is with soft
Property hinge contacts, and X-axis micro-displacement sensor is connected with upper plate X-axis micro-displacement sensor fixing hole and is positioned at X-axis piezoelectric stack
Offside, Y-axis piezoelectric stack rear end fixes with upper Y-axis piezoelectric stack that orifice plate is connected, front end contacts with flexible hinge, Y-axis microbit
Displacement sensor is connected with upper plate Y-axis micro-displacement sensor fixing hole and is positioned at Y-axis piezoelectric stack offside, Z axis piezoelectric stack top
Contact with workpiece base bottom, bottom is connected with base by micromatic setting.
Micromatic setting of the present invention is made up of four symmetrical L-type block, wedge type block and fine-tuning nuts, wedge type block with
Z axis piezoelectric stack bottom bevel connects, and fine-tuning nut is threadeded with L-type block and front end and wedge type block apical grafting.
The driving signal of described X-axis piezoelectric stack, Y-axis piezoelectric stack and Z axis piezoelectric stack is as follows:
Through the space coordinate conversion of motion with workpiece pedestal parameter, it is as follows that the coordinates of motion of workpiece generate formula:
Wherein, xct,yct,zctIt it is the cartesian coordinate of workpiece pedestal；A1,A2,A3It is the vibration of three piezoelectric stacks respectively
Amplitude；It is the initial phase of three piezoelectric stacks respectively so that the phase contrast between each initial phase is not 0；ω
It it is frequency of vibration；T is time variable；H is the workpiece centre vertical dimension away from XY axle piezoelectric stack plane；l1,l2It is workpiece respectively
Two catercorner lengths of pedestal.
The present invention uses three orthogonal piezoelectric stacks to be driven from X, Y and Z-direction respectively, drives process mutual
Independent, displacement transfer mode is flexible hinge transmission, four flexible hinge centrosymmetry distributions, it is easy to control micrometric displacement motion flat
Platform elliptical orbit in three dimensions.
The invention have the advantage that
(1) novel structure, rigidity is high, stationarity is good, is coupled by trip bolt between each parts, device entirety has relatively
Good rigidity thus ensure the stability in the course of processing；
(2) in micrometric displacement motion platform, flexible hinge sections uses line cutting and Milling Process, uses flexible hinge one
Formula designs, it is possible to reduce rigging error, and overall structure is the most easily fabricated, hence it is evident that reduce the crosstalk phenomenon between flexible hinge,
The accuracy of workpiece motion s in the course of processing, simultaneously four flexible hinge centrosymmetry distributions can be improved, it is easy to control microbit
The kinematic accuracy of shifting movement platform；
(3) invention increases regulation Z axis height micromatic setting, this apparatus structure is compact, and trim process is simple, can
Tune scope is little, but degree of regulation is high, it is possible to realize the accurate fine setting in the range of piezoelectric stack 0-1cm in the Z-axis direction；
(4) three piezoelectric stacks of the present invention are orthogonal, and respectively three directionally independent drivings, three-dimensional elliptical track is by pressing
Electricity stacks and drives the parameter of signal to adjust, and the most there is not coupling, and the position of space three-dimensional ellipse is not joined by piezoelectricity
Put the restriction of mode, it is possible to arbitrarily adjust；
(5) present invention increases the displacement transducer of X-axis and Y direction, for transient Displacements is fed back to controller, with this
Invention device constitutes closed loop control together, it is possible to realize the tracing control of three-dimensional elliptical micrometric displacement motion platform.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the axonometric drawing of base of the present invention；
Fig. 3 is the axonometric drawing of upper plate of the present invention；
Fig. 4 is the structural representation of micromatic setting of the present invention；
Fig. 5 is workpiece base position simplification figure of the present invention；
Fig. 6 is the different three-dimensional elliptical movement locus that Parameters variation of the present invention is formed；
Fig. 7 is present system control block diagram；
In figure:
Base 1, L-type block connection holes 101, base connection holes 102, right plate 2, left plate 3, upper plate 4, workpiece pedestal 401,
Flexible hinge 402, X-axis piezoelectric stack fixing hole 403a, Y-axis piezoelectric stack fixing hole 403b, side plate connection holes 404, X-axis microbit
Displacement sensor fixing hole 405a, Y-axis micro-displacement sensor fixing hole 405b, workpiece fixing hole 406, X-axis piezoelectric stack 501, Y-axis
Piezoelectric stack 502, Z axis piezoelectric stack 503, X-axis micro-displacement sensor 601, Y-axis micro-displacement sensor 602, micromatic setting 7, L
Type block 701, wedge type block 702, fine-tuning nut 703.
Detailed description of the invention
Right plate 2, left plate 3 is fixing with base 1 respectively to be connected, and upper plate 4 is by side plate connection holes 404 and right plate 2, left
Side plate 3 top is fixing to be connected, and described upper plate 4 has the flexible hinge 402 of four centrosymmetry distributions, workpiece pedestal 401 surrounding
Being connected with four flexible hinges, X-axis piezoelectric stack 501 rear end is connected with upper plate X-axis piezoelectric stack fixing hole 403a, front end is with soft
Property hinge contacts, and X-axis micro-displacement sensor 601 is connected with upper plate X-axis micro-displacement sensor fixing hole 405a and is positioned at X-axis
Piezoelectric stack offside, Y-axis piezoelectric stack 502 rear end is connected with upper Y-axis piezoelectric stack fixing hole 403b plate, front end and flexible hinge
Contacting, Y-axis micro-displacement sensor 602 is connected with upper plate Y-axis micro-displacement sensor fixing hole 405b and is positioned at Y-axis piezo stack
Heap offside, Z axis piezoelectric stack 503 top contacts with bottom workpiece pedestal 401, bottom is connected with base 1 by micromatic setting 7；
Described micromatic setting 7 is made up of four symmetrical L-type blocks 701, wedge type block 702 and fine-tuning nut 703, wedge
Block 702 is connected with Z axis piezoelectric stack 503 bottom bevel, and fine-tuning nut 703 is threadeded with L-type block 701 and front end and wedge
Block 702 apical grafting.
The present invention is arranged on lathe by base 1, and workpiece is fixed on workpiece by workpiece fixing hole 406 with trip bolt
On pedestal, adjusting the position between machine tool and workpiece, given three mutually perpendicular piezoelectric stacks drive signal, drive simultaneously
Start building part produce high frequency three dimensional elliptical trajectory, the driving signal of three piezoelectric stacks is as follows:
Through the space coordinate conversion of motion with workpiece pedestal parameter, as it is shown in figure 5, the coordinates of motion of workpiece generate formula
As follows:
Wherein, xct,yct,zctIt it is the cartesian coordinate of workpiece pedestal；A1,A2,A3It is the vibration of three piezoelectric stacks respectively
Amplitude；It is the phase place of three piezoelectric stacks respectively；ω is frequency of vibration；T is time variable；H is that workpiece centre is away from XY
The vertical dimension of axle piezoelectric stack plane；l1,l2It is two catercorner lengths of workpiece pedestal respectively.
According to (1) (2) two formula, three piezoelectric stacks of active accommodation drive the initial phase of signalMake each
Phase contrast between initial phase is not 0, then three-dimensional Fine Feed motion platform will drive and be positioned at workpiece thereon generation difference
Three-dimensional elliptical movement locus, such as Fig. 6.
Fig. 7 is the three-dimensional elliptical micrometric displacement motion platform system control figure of three piezoelectricity vertical drive, mainly includes
The driving of PMAC multi-axis motion control card, capacitive displacement transducer, piezoelectric stack and power amplifier etc.；
According to Fig. 1-7, the work process of the application present invention is as follows:
(1) apparatus of the present invention are fixed on ultra-precision machine tool, workpiece to be processed are arranged on workpiece pedestal 401 simultaneously,
Adjust the position between machine tool and workpiece, make workpiece to be processed fix by trip bolt；
(2) regulate workpiece to be processed Z axis position by the fine-tuning nut 703 on base plate 1, make Z axis piezoelectric stack and workpiece
Pedestal contacts；
(3) applying control signal to three piezoelectric stacks, workpiece pedestal produces high frequency elliptic motion rail in three dimensions
Mark, generates workpiece to be processed three-dimensional elliptical movement locus；
(4) by high-precision capacitance-type displacement sensor, the transient Displacements of detection flexible hinge 402, and will detect
Transient Displacements feeds back to PMAC multi-axis controller and is modified, simultaneously controller by revised displacement signal through power amplification
Device passes to three piezoelectric stacks again, makes the workpiece to be processed on micromotion platform enter with revised three-dimensional elliptical movement locus
Row motion, until movement locus is stable in the accuracy rating set.
Claims (3)
1. the three-dimensional elliptical micrometric displacement motion platform of a piezoelectricity vertical drive, it is characterised in that: right plate, left plate is respectively
Fixing with base and be connected, upper plate passes through side plate connection holes and right plate, and left plate top is fixing to be connected, and described upper plate has four
The flexible hinge of centrosymmetry distribution, workpiece pedestal surrounding is connected with four flexible hinges, X-axis piezoelectric stack rear end and upper plate X
Axle piezoelectric stack fixing hole connects, front end contacts with flexible hinge, X-axis micro-displacement sensor and upper plate X-axis micro-displacement sensing
Device fixing hole connects and is positioned at X-axis piezoelectric stack offside, and Y-axis piezoelectric stack rear end and upper Y-axis piezoelectric stack fix orifice plate even
Connect, front end contacts with flexible hinge, and Y-axis micro-displacement sensor is connected with upper plate Y-axis micro-displacement sensor fixing hole and is positioned at
Y-axis piezoelectric stack offside, Z axis piezoelectric stack top contacts with workpiece base bottom, bottom is connected with base by micromatic setting.
The three-dimensional elliptical micrometric displacement motion platform of a kind of three piezoelectricity vertical drive the most according to claim 1, its feature exists
In: described micromatic setting is made up of four symmetrical L-type block, wedge type block and fine-tuning nuts, wedge type block and Z axis piezoelectric stack
Bottom bevel connects, and fine-tuning nut is threadeded with L-type block and front end and wedge type block apical grafting.
The three-dimensional elliptical micrometric displacement motion platform of a kind of three piezoelectricity vertical drive the most according to claim 1, its feature exists
In: the driving signal of described X-axis piezoelectric stack, Y-axis piezoelectric stack and Z axis piezoelectric stack is as follows:
Through the space coordinate conversion of motion with workpiece pedestal parameter, it is as follows that the coordinates of motion of workpiece generate formula:
Wherein, xct,yct,zctIt it is the cartesian coordinate of workpiece pedestal；A1,A2,A3It is the vibration amplitude of three piezoelectric stacks respectively；It is the initial phase of three piezoelectric stacks respectively so that the phase contrast between each initial phase is not 0；ω is to shake
Dynamic frequency；T is time variable；H is the workpiece centre vertical dimension away from XY axle piezoelectric stack plane；l1,l2It is workpiece pedestal respectively
Two catercorner lengths.
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| CN109713936A (en) * | 2019-03-20 | 2019-05-03 | 杨晓峰 | Elliptical vibration piezoelectric actuator and its driving method |
| CN112630472A (en) * | 2020-12-02 | 2021-04-09 | 东华大学 | High-precision sample rotating table device based on atomic force microscope |
| CN113028972A (en) * | 2021-02-26 | 2021-06-25 | 哈尔滨芯明天科技有限公司 | Closed-loop control nanometer three-dimensional precision positioning table |
| WO2024032053A1 (en) * | 2022-08-08 | 2024-02-15 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing for highly hard and brittle material |
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