CN112630472A - High-precision sample rotating table device based on atomic force microscope - Google Patents
High-precision sample rotating table device based on atomic force microscope Download PDFInfo
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- CN112630472A CN112630472A CN202011400940.1A CN202011400940A CN112630472A CN 112630472 A CN112630472 A CN 112630472A CN 202011400940 A CN202011400940 A CN 202011400940A CN 112630472 A CN112630472 A CN 112630472A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
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Abstract
The invention relates to a high-precision sample rotating table device based on an atomic force microscope, which comprises a rotating table main body, a sample mounting seat and a magnetic suction base, wherein the sample mounting seat is positioned on the rotating table main body; the rotating table main body is fixed on an atomic force microscope scanner platform through the magnetic suction base; the rotating table main body comprises a sample table, a magnetic rotary encoder and 2 elliptical piezoelectric resonant motors, a plastic ring is fixed on the side face of the sample table, the top ends of the elliptical piezoelectric resonant motors are tightly contacted with the plastic ring, the 2 elliptical piezoelectric resonant motors are oppositely arranged, one is used for pushing the plastic ring to move, and the other is used for pulling the plastic ring to move in the opposite direction; the magnetic disc of the magnetic rotary encoder is arranged on the sample table. The device is suitable for providing high-precision angle rotation for the sample under the conditions that the atomic force microscope is limited in size space and weight, and widens the application occasion and research range of the atomic force microscope.
Description
Technical Field
The invention belongs to the field of nano science and technology, relates to a high-precision sample rotating platform device based on an atomic force microscope, and particularly relates to a high-precision sample rotating platform device based on an atomic force microscope, which is suitable for anisotropic quantitative mechanical testing and analysis of crystals.
Background
The atomic force microscope has the working principle that a probe is fixed at the free end of a micro-cantilever, when the probe scans the surface of a sample, the micro-cantilever generates slight deformation (bending and torsion) due to the interaction force between atoms generated between a needle point and the surface of the sample, the slight deformation is used as the measurement of the force between the needle point and the sample, laser is reflected to a photoelectric detector by utilizing the back surface of the cantilever, the micro-deformation of the micro-cantilever is measured, and the appearance and the corresponding mechanical property of the surface of the sample are obtained after signal processing is carried out by a computer.
Due to the small crystal size, bulk materials have the same physical properties in macroscopically different directions, but the individual crystals of many crystalline materials are anisotropic, differing in lattice direction, lattice length, and period of atomic arrangement, resulting in different physical properties being exhibited in different directions.
At present, commercial atomic force microscope almost can not accomplish the rotation of accurate angle from the objective table of taking, need to realize that accurate angle rotates and generally is by the relevant rotary device of user development, and most current rotary device is mostly manual rotary device. When an atomic force microscope is used for testing different crystal orientations of a crystal material, the sample stage can only be controlled by piezoelectric ceramics to perform morphology scanning along different crystal orientation directions, but when mechanical property research is involved, due to the fact that the relative positions of the motion direction and the cantilever are different, the stress states of the needle point and the micro-cantilever are different, the normal bending and lateral torsion of the micro-cantilever are coupled, the calibration of the normal coefficient and the lateral coefficient is more difficult, larger errors are brought to quantitative mechanical test results, particularly, when a lateral force experiment is performed, the motion direction can only be perpendicular to the cantilever direction, and therefore testing under different crystal orientations can only be achieved by rotating a sample.
In view of the above situation, there is an urgent need to develop a sample rotation platform, which can change the crystal direction by rotating the sample rotation platform when performing the anisotropic experiment test of the crystal material, and simultaneously ensure that the relative positions of the micro-cantilevers are the same when testing different crystal directions, thereby eliminating the error of the normal bending and lateral torsional coupling on the experiment measurement.
Disclosure of Invention
The present invention is directed to solve the above problems of the prior art and to provide a high-precision sample rotation stage device based on an atomic force microscope. The device can provide an additional high-precision angular rotation degree of freedom for the sample under the condition that the size and the quality are strictly limited, and can realize precise small-angle rotation.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the high-precision sample rotating table device based on the atomic force microscope comprises a rotating table main body, a sample mounting seat and a magnetic suction base, wherein the sample mounting seat is positioned on the rotating table main body;
the rotating table main body is fixed on an atomic force microscope scanner platform through the magnetic suction base, and assembly and disassembly are not needed;
the rotating platform main body comprises a sample platform, a sample platform fixing bearing, a magnetic rotary encoder and 2 elliptical piezoelectric resonant motors (namely Elliptec piezoelectric resonant motors, wherein piezoelectric elements of the elliptical piezoelectric resonant motors are connected to an aluminum resonator in a pressing mode, the motion track of the top end of each elliptical piezoelectric resonant motor is elliptical, the motion path is half of the elliptical path, the top end of each motor pushes the sample platform to rotate, the top end of each elliptical motor is equivalent to a crank with an elliptical path, different elliptical paths can be obtained by changing the length and other parameters of the crank, and the elliptical path can realize intermittent motion), the sample mounting seat is arranged on the sample platform, the sample platform fixing bearing is positioned below the sample platform, and the inner ring of the sample platform fixing bearing is rigidly connected with the sample platform; a plastic ring (also can be a rubber ring and the like) is fixed on the side surface of the sample table, 2 elliptical piezoelectric resonance motors are oppositely arranged on two radial sides of the plastic ring, the top ends of the elliptical piezoelectric resonance motors are tightly contacted with the plastic ring, one elliptical piezoelectric resonance motor is used for pushing the plastic ring to move, the other elliptical piezoelectric resonance motor is used for pulling the plastic ring to move in the opposite direction, the sample table is pushed to rotate in a form of resultant moment, so that the rotation of a sample is realized, the position of the sample table is fixed by the resultant moment generated when the elliptical piezoelectric resonance motors are static, and the self-locking of the sample table can be realized; the magnetic disc of the magnetic rotary encoder is arranged on the sample table to rotate along with the sample table.
As a preferred technical scheme:
the high-precision sample rotating platform device based on the atomic force microscope as described above, the rotating platform main body further comprises a printed circuit board (PCB, the function of which is to provide mechanical support for fixing various electronic devices such as an integrated circuit, wiring and connection of the electronic devices, electrical insulation and assembly); the elliptical piezoelectric resonance motor, the outer ring of the sample table fixing bearing and the sensor of the magnetic rotary encoder are all fixedly mounted on the printed circuit board, and the sample table and the plastic ring can integrally rotate relative to the printed circuit board. The magnetic rotary encoder is used for detecting the rotation angle and depends on three main components, namely a magnetic disc, a sensor and an adjusting circuit, the magnetic disc is arranged on a sample table to rotate along with the sample table, the sensor is arranged on a PCB (printed circuit board) below the magnetic disc, and the adjusting circuit is also manufactured on the PCB.
The high-precision sample rotating platform device based on the atomic force microscope as described above, the sample mounting base comprises a magnetization screw thread and an iron sheet for placing a sample, the sample platform is provided with a screw hole (preferably, the screw hole is arranged at the central position of the sample platform), the iron sheet is fixed in the screw hole on the sample platform through the magnetization screw thread, and the sample is fixed on the iron sheet, thereby not only facilitating quick replacement and fixation, but also providing convenience for adjusting the coaxiality of the target crystal rotation center and the sample platform rotation center.
According to the high-precision sample rotating platform device based on the atomic force microscope, the sample and the iron sheet are connected into a whole through the silver paste or the double-sided adhesive tape.
As mentioned above, the sample stage, the sample mounting base and the sample stage fixing bearing are kept to rotate integrally when rotating, the coaxiality is particularly important, the coaxiality of the sample stage rotating central shaft, the sample stage fixing bearing rotating central shaft and the sample mounting base rotating central shaft is less than or equal to 0.019 degrees, but the coaxiality between the target crystal rotating center and the sample stage rotating center can be determined only by observing through a microscope, so that the sample is fixed by using a magnetic absorption method to provide convenience for adjusting the sample, the target crystal is observed under a high-power microscope, the target crystal is still in a view field after rotating, the sample stage rotating center and the sample rotating center are in the same view field, the higher the coaxiality is, the smaller the target crystal is deviated when rotating, experiments under different crystal directions can be completed more efficiently when testing, and if the coaxiality is too low, the larger the target crystal is displaced during rotation, the more time it takes to find the target crystal.
The high-precision sample rotating platform device based on the atomic force microscope has the height less than or equal to 30mm and the mass less than or equal to 150 g.
As above based on atomic force microscope's high accuracy sample revolving stage device, the base is inhaled including magnet, the aluminum alloy bottom plate that has the counter bore and the hexagon socket head cap screw that is used for fixed magnet that has the counter bore to the magnetism, and the revolving stage main part passes through threaded connection to be fixed at the aluminum alloy bottom plate upper surface, and the counter bore magnet passes through threaded connection to be fixed at the aluminum alloy bottom plate lower surface.
The high-precision sample rotating platform device based on the atomic force microscope further comprises a control interface board, a strip control line and a USB connecting line, wherein the control interface board is connected to the printed circuit board through the strip control line by a control line port to control the elliptical piezoelectric resonance motor, and the USB connecting line connects the rotating platform main body to a computer through a USB port on the control interface board to realize power supply and corner control of the rotating platform main body.
The principle of the invention is as follows:
the atomic force microscope senses the appearance and the force of a sample through a cantilever which is very sensitive to the force, the cantilever needs to be calibrated and calibrated during a quantitative force experiment, the calibrated cantilever needs to keep the scanning direction unchanged during the test, tests in different crystal directions need to be carried out during the test of the anisotropy experiment of a crystal material, if the sample is controlled to scan in different directions through piezoelectric ceramics, the relative positions of the cantilever and the scanning direction are different, the stress and the deformation of the cantilever are different, and finally, the difference of the normal coefficient and the lateral coefficient of the cantilever in different directions is caused, so that a larger error is brought to the measurement result; the high-precision sample rotating platform device provided by the invention can accurately rotate a sample, so that the change of the relative angle between the crystal direction of a crystal material and the scanning direction of the cantilever is realized, the anisotropy test of the crystal material is realized, the normal coefficient and the lateral coefficient are ensured to be unchanged because the cantilever is always kept consistent with the scanning direction during calibration during the test, and the experimental measurement error caused by the change of the calibration coefficient due to the normal bending and the lateral torsional coupling is effectively eliminated.
The conventional circular motor is fixed due to the crank, a friction wheel needs to be additionally manufactured when intermittent motion is realized, different friction wheels need to be customized when the rotation angles are different, the top motion track can be changed to meet different rotation angle requirements by selecting the elliptical piezoelectric resonance motor without any change, and the elliptical piezoelectric resonance motor is equivalent to a changed crank, so that different elliptical tracks can be obtained, and the elliptical track can be driven to realize intermittent motion. Although one elliptical piezoelectric resonant motor can realize the corner turning function, the positioning can be realized only by the friction between the top end of the elliptical piezoelectric resonant motor and the plastic ring, the self-locking of the sample table cannot be realized, the self-locking of the sample table can be realized by two elliptical piezoelectric resonant motors, and the stability is good. The invention selects 2 elliptical piezoelectric resonant motors to drive the sample stage, which not only can realize the rotation at any angle within 360 degrees, the Bidirectional precision of the rotation angle is less than or equal to 0.4 degrees, and the Bidirectional repetition rate is less than or equal to 0.05 degrees (the Bidirectional precision refers to the maximum deviation from the accurate value, the Bidirectional repetition rate refers to the maximum difference when the sample stage moves to the same position clockwise and anticlockwise, the two parameters are obtained by actual test, the two data are ensured by using feedback adjustment, when the sample stage moves to a new position, the actual position is detected to exceed the precision requirement, the compensation is carried out by an iterative algorithm, then the position of the sample stage is adjusted until the detected position and the actual position stop within the precision range), but also the driving mode is that the rotation is pushed by friction, and the accurate intermittent rotation and positioning can be realized.
Has the advantages that:
the invention uses an elliptical piezoelectric resonance motor to drive a rotating platform to rotate by friction transmission, sets a required rotating angle through a software interface, realizes the accurate small-angle rotation of a sample platform, generates a resultant moment when the motor is static, fixes the position of the sample platform, and realizes the positioning and self-locking of the sample platform; the sample rotating platform can set a rotating angle (the minimum increment is 0.002 degrees) according to the experiment requirement, namely the relative angle between the crystal direction of the sample and the atomic force microscope probe is changed, the relative position of a cantilever can be ensured to be unchanged during the experiment, and the influence of normal bending and lateral torsional coupling on the experiment measurement is eliminated; the sample rotating platform is suitable for a relatively limited sample placing space of an atomic force microscope, provides an extra high-precision rotation freedom degree for a sample under the condition of strict limitation of size and weight, and has a positioning function; when the sample is rotated, the relative angle is directly input in a software interface without manually adjusting the angle, so that the efficiency is further improved, and the utilization rate of the atomic force microscope is improved; the sample rotating platform can enrich the functions of the atomic force microscope on the premise of not influencing the normal work of the atomic force microscope, and broadens the application range and the research range.
Drawings
FIG. 1 is a three-dimensional side view of a high-precision sample rotation stage based on an atomic force microscope according to the present invention;
FIG. 2 is a three-dimensional top view of the high-precision sample rotation stage based on an atomic force microscope according to the present invention;
FIG. 3 is a three-dimensional exploded view of a high-precision sample rotating stage based on an atomic force microscope according to the present invention;
FIG. 4 is a diagram of a turntable control assembly according to the present invention;
FIG. 5 is a three-dimensional view of a sample mount of the present invention;
FIG. 6 is a three-dimensional view of the magnetic base of the present invention;
FIG. 7 is a three-dimensional view of the present invention assembled with an MFP3D atomic force microscope;
FIG. 8 is a two-dimensional schematic view of the present invention assembled with an MFP3D atomic force microscope;
FIG. 9 is a drawing of MFP3D AFM scanner stage dimensions;
FIG. 10 is a diagram of the ELLO software control interface when the sample rotation stage is not attached;
FIG. 11 is a diagram of the ELLO software control interface upon successful attachment of the sample carousel;
FIG. 12 is an optical photograph and AFM topography of a graphene sample at different angles during actual use of the present invention;
the device comprises a sample 1, a sample 2, an iron sheet 3, a magnetized thread 4, a sample table 5, a plastic ring 6, an elliptical piezoelectric resonance motor 7, a printed circuit board 8, a sample table fixed bearing 9, an aluminum alloy bottom plate 10, a magnet with a countersunk hole 11, a USB port on a control interface board 12, a control line port 13, a control interface board 14, a strip control line 15, a USB connecting line 16, an atomic force microscope leg 17, a probe clamp 18, an atomic force microscope scanner stainless steel platform 19, a USB port connected with a motor 20, a connection control button 21, a turntable real-time angle and homing button 22, a relative angle increment setting button 22 and a sensor of a magnetic rotary encoder 23.
Detailed Description
The invention will be further illustrated with reference to specific embodiments. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and such equivalents may fall within the scope of the present invention as defined in the appended claims.
In the description of the present invention, it is to be understood that the terms "center", "inside", "outside", "upper", "lower", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that the terms "mounted" and "connected" are to be construed broadly and may include, for example, a fixed connection, a detachable connection, or an integral connection unless expressly stated or limited otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
A high-precision sample rotating platform device based on an atomic force microscope is shown in figures 1, 2 and 3, has a height of less than or equal to 30mm and a mass of less than or equal to 150g, and comprises a rotating platform main body, a sample mounting seat positioned on the rotating platform main body and a magnetic suction base used for fixing the rotating platform main body;
the rotating table main body is fixed on an atomic force microscope scanner platform through a magnetic base;
as shown in fig. 4, the rotating platform main body comprises a sample stage 4, a magnetic rotary encoder, 2 elliptical piezoelectric resonant motors 6, a sample stage fixed bearing 8, a printed circuit board 7, a control interface board 13, a strip control line 14 and a USB connecting line 15;
a plastic ring 5 is fixed on the side face of the bottom of the sample table 4, 2 elliptical piezoelectric resonance motors are oppositely arranged on two radial sides of the plastic ring, the top end of the elliptical piezoelectric resonance motor 6 is tightly contacted with the plastic ring 5, one elliptical piezoelectric resonance motor is used for pushing the plastic ring 5 to move, and the other elliptical piezoelectric resonance motor is used for pulling the plastic ring 5 to move in the opposite direction; the magnetic disc of the magnetic rotary encoder is arranged on the sample table 4;
the sample table fixing bearing 8 is positioned below the sample table 4, and the inner ring of the sample table fixing bearing 8 is rigidly connected with the sample table 4;
the elliptical piezoelectric resonance motor 6, the outer ring of the sample stage fixed bearing 8 and the sensor 23 of the magnetic rotary encoder are all fixedly arranged on the printed circuit board 7, and the sample stage 4 and the plastic ring 5 can integrally rotate relative to the printed circuit board 7;
the control interface board 13 is connected to the printed circuit board 7 by a control line port 12 through a strip control line 14 to control the elliptical piezoelectric resonance motor 6, the USB connecting line 15 connects the rotating table main body to a computer through a USB port 11 on the control interface board 13 to realize power supply and corner control of the rotating table main body, the two-way precision of the corner is less than or equal to 0.4 degrees, and the two-way repetition rate is less than or equal to 0.05 degrees; the sensor 23 of the magnetic rotary encoder arranged on the printed circuit board 7 simultaneously detects the rotation angle of the sample table 4 in real time;
as shown in fig. 5, the sample mounting seat comprises a magnetized thread 3 and an iron sheet 2 for placing a sample 1, a threaded hole is formed in a sample table 4, and the iron sheet 2 is fixed in the threaded hole on the sample table 4 through the magnetized thread 3; the sample 1 and the iron sheet 2 are connected into a whole through silver paste or double-sided adhesive tape;
the coaxiality of the rotating central shaft of the sample mounting seat, the rotating central shaft of the sample table 4 and the rotating central shaft of the sample table fixing bearing 8 is less than or equal to 0.019 degrees;
as shown in fig. 6, the magnetic base comprises a magnet 10 with a countersunk hole, an aluminum alloy bottom plate 9 and a hexagon socket head cap screw for fixing the magnet 10 with the countersunk hole, the rotary table main body is fixed on the upper surface of the aluminum alloy bottom plate 9 through threaded connection, and the countersunk magnet is fixed on the lower surface of the aluminum alloy bottom plate 9 through threaded connection.
The invention selects MFP3D (Asylun Research) atomic force microscope manufactured by Oxford instruments (Oxford), the concrete shape and size of a stainless steel platform of the model atomic force microscope scanner are shown in figure 9, the middle of the platform is a through hole with the diameter of 40mm, the length and width of the through hole are 82mm and 56mm respectively, the height of the through hole can be increased by an atomic force microscope lengthening leg to reach at least 40mm height space, the space between atomic force microscope legs 16 is considered, the surface of the stainless steel platform of the scanner does not have any installation threaded hole, and the connection mode of the whole sample rotating platform and the stainless steel platform of the scanner is selected to be a magnetic attraction mode.
The specific using process is as follows:
by adopting a magnetic absorption method, the sample 1 and the iron sheet 2 are connected and fixed on the sample table 4 through a double-sided adhesive tape, and the position of the sample 1 is adjusted under a high power microscope, so that the rotation center line of the target crystal, the rotation center line of the rotation table and the center line of a fixed bearing of the sample table have higher coaxiality, and the sample 1 is ensured to be still in a view field after the rotation of the rotation table each time;
as shown in fig. 7, 8, 9, a high precision sample rotation stage based on an atomic force microscope was mounted on a MFP3D atomic force microscope scanner stainless steel platform 18 with sample 1 under probe clamp 17; the control interface board 13 is connected to the printed circuit board 7 through a control line port 12 through a strip-shaped control line 14 to control the elliptical piezoelectric resonance motor 6, and the USB connecting line 15 is used for connecting the main body of the rotating platform to a computer through a USB port 11 on the control interface board to realize power supply and corner control of the rotating platform; the sensor 23 of the magnetic rotary encoder mounted on the printed circuit board 7 simultaneously detects the rotation angle of the sample stage 4;
turning on control software ELLO (Elliptec software), wherein the control interface board 13 normally works only when a green light is normally on, as shown in FIG. 10, a software control interface diagram when a sample rotary table is not connected is obtained, a USB port 19 connected with a motor is selected, a connection control button 20 icon is clicked, after the connection is successful, as shown in FIG. 11, the connection control button 20 icon on the software control interface is converted into Disconnect by Connect, and a reset button for displaying a real-time angle and a one-key zero return position (Home) of the sample table 4 is displayed on the interface; the real-time angle of the sample table shows the absolute angle of the sample table; the relative angle increment button 22 is used for setting the angle of each step of rotation (namely, the relative angle between the crystal direction of the sample 1 and the probe of the atomic force microscope is changed), the relative position of a cantilever can be ensured to be unchanged during an experiment, the influence of normal bending and lateral torsional coupling on the measurement of the experiment is eliminated, the sample table 4 rotates by a corresponding angle after the Move is clicked, and the real-time angle of the sample table 4 and the return button display the real-time sample table angle; when in use, the reset is started from 0 degree, and the use angle ranges from-360 degrees to 360 degrees (the rotating direction of the sample table is observed when in initial use, whether the rotating direction of the sample table is consistent with the set angle or not is determined, and the positive and negative of the rotating direction are set according to the rotating direction); when quitting, clicking the connection control button 20 until the icon is converted from Disconnect to Connect;
for example, fig. 12 shows a topography of a sample (e.g., graphene) on a sample rotation stage at different angles and corresponding optical photographs, it can be observed that cantilevers at different angles always maintain the same position, the scanning directions of test experiment cantilevers at different angles also maintain the same, the rotation angle of the sample is changed in the whole test process, and the stress and deformation of the cantilevers are maintained the same in the test process, thereby eliminating measurement errors caused by normal bending and lateral torsional coupling of the cantilevers during different angle experiments.
The high-precision sample rotating platform device based on the atomic force microscope realizes the positioning and self-locking of the sample platform, eliminates the influence of normal bending and lateral torsional coupling on experimental measurement, improves the efficiency, improves the utilization rate of the atomic force microscope, enriches the functions of the atomic force microscope on the premise of not influencing the normal work of the atomic force microscope, and widens the application range and the research range.
It should be noted that the above design of the MFP3D AFM is for the purpose of clearly illustrating the operation principle of the apparatus of the present invention, and is not intended to limit the scope of application of the present invention, and the apparatus of the present invention can be applied to other models of AFM as well, only part of the parts need to be modified in size.
Claims (8)
1. High accuracy sample revolving stage device based on atomic force microscope, its characterized in that: the sample fixing device comprises a rotating table main body, a sample mounting seat and a magnetic suction base, wherein the sample mounting seat is positioned on the rotating table main body;
the rotating table main body is fixed on an atomic force microscope scanner platform through the magnetic suction base;
the rotating table main body comprises a sample table, a sample table fixed bearing, a magnetic rotary encoder and 2 elliptical piezoelectric resonant motors, a sample mounting seat is positioned on the sample table, the sample table fixed bearing is positioned below the sample table, and an inner ring of the sample table fixed bearing is rigidly connected with the sample table; a plastic ring is fixed on the side surface of the sample table, 2 elliptical piezoelectric resonance motors are oppositely arranged on two radial sides of the plastic ring, the top end of each elliptical piezoelectric resonance motor is in close contact with the plastic ring, one elliptical piezoelectric resonance motor is used for pushing the plastic ring to move, and the other elliptical piezoelectric resonance motor is used for pulling the plastic ring to move in the opposite direction; the magnetic disc of the magnetic rotary encoder is arranged on the sample table.
2. The atomic force microscope-based high precision sample rotation stage apparatus according to claim 1, wherein the rotation stage body further comprises a printed circuit board; the elliptical piezoelectric resonance motor, the outer ring of the sample table fixing bearing and the sensor of the magnetic rotary encoder are all fixedly mounted on the printed circuit board, and the sample table and the plastic ring can integrally rotate relative to the printed circuit board.
3. The atomic force microscope-based high-precision sample rotating platform device according to claim 2, wherein the sample mounting base comprises a magnetized thread and an iron sheet for placing a sample, the sample platform is provided with a threaded hole, and the iron sheet is fixed in the threaded hole on the sample platform through the magnetized thread.
4. The atomic force microscope-based high-precision sample rotating platform device according to claim 3, wherein the sample and the iron sheet are connected into a whole through silver paste or double-sided adhesive tape.
5. The atomic force microscope-based high-precision sample rotating table device according to claim 4, wherein the coaxiality of the sample table rotating central axis, the sample table fixed bearing rotating central axis and the sample mounting base rotating central axis is less than or equal to 0.019 °.
6. The atomic force microscope-based high-precision sample rotation stage device according to claim 5, wherein the atomic force microscope-based high-precision sample rotation stage device has a height of 30mm or less and a mass of 150g or less.
7. The atomic force microscope-based high-precision sample rotating platform device according to claim 1, wherein the magnetic base comprises a magnet with a countersunk hole, an aluminum alloy base plate and a hexagon socket head cap screw for fixing the magnet with the countersunk hole, the rotating platform body is fixed on the upper surface of the aluminum alloy base plate through a threaded connection, and the magnet with the countersunk hole is fixed on the lower surface of the aluminum alloy base plate through a threaded connection.
8. The afm-based high-precision sample rotation stage apparatus according to claim 2, wherein the rotation stage main body further includes a control interface board, a strip control line and a USB connection line, the control interface board is connected to the printed circuit board through the strip control line via a control line port to control the elliptical piezoelectric resonance motor, and the USB connection line connects the rotation stage main body to a computer through a USB port on the control interface board to realize power supply and rotation angle control of the rotation stage main body.
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| CN114527298A (en) * | 2022-02-18 | 2022-05-24 | 广东工业大学 | Active/passive vibration suppression fusion nano platform |
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