CN114527298B - A nanoplatform for the fusion of active/passive vibration suppression - Google Patents

Abstract

The invention relates to the field of Mini/Micro LED package detection, in particular to a nano-platform integrating active/passive vibration suppression. The nanometer head includes: a gantry, an output platform, a sliding rod, a first flexible leaf spring, a second flexible leaf spring, a hard spring, a clamping component, a strain gauge, a magnetic lifting component, and a piezoelectric lifting component. components and rangefinder; the nano-head uses a flexible mechanism to connect a large mass, and the output response of the high-frequency displacement component is small, which realizes the stable maintenance of the displacement of the atomic force microscope in the high-frequency range, and the low-frequency relies on piezoelectric The stacking drive uses feedback and feedforward methods to actively adjust the position of the atomic force microscope, which can achieve low-frequency active adjustment and high-frequency passive vibration isolation, while reducing the performance requirements of the controller sensor and the difficulty of algorithm implementation.

Description

A nanoplatform for the fusion of active/passive vibration suppression

technical field

The invention relates to the field of Mini/Micro LED package detection, in particular to a nano-platform integrating active/passive vibration suppression.

Background technique

In the field of chip packaging and testing, especially for mini-led and micro-led chips, after the initial packaging, it is necessary to use an atomic force microscope to measure the physical characteristics of each chip online, and then repair or replace defective chips. Discovery, early treatment, ensure the yield rate of chip packaging from every link, and ultimately improve the efficiency of overall display production.

However, the size of the above-mentioned LED chips are all micron-level, and those chips are to be packaged on a meter-level display panel, and the inspection range of the atomic force microscope is also in the micrometer range, which requires the use of a gantry to hang the atomic force microscope. The bottom motion platform transfers every position of the display panel to the detection range of the atomic force microscope for inspection.

Although the atomic force microscope has extremely high detection accuracy, it also has extremely high requirements for the distance between itself and the detected object (nano level), and such vibration is mainly generated by the motion platform itself, which affects the atomic force microscope itself through the gantry. The distance from the detected object, and the frequency range of vibration noise reaches 500Hz, and the vibration amplitude is as high as 500nm.

The application requirement is to let the atomic force microscope, an object with a mass of about 3kg, keep the distance between the atomic force microscope itself and the measured target stable under the excitation of the above-mentioned displacement vibration transmitted by the gantry. According to the existing technology and existing requirements, such a large The closed-loop control band of the load currently does not exceed 100Hz.

In the prior art, there are mainly the following three technologies for installing the gantry frame and the atomic force microscope:

(1) Use the vertical linear motor platform to connect the gantry and the atomic force microscope, use the Doppler rangefinder to obtain the distance between the atomic force microscope and the display panel, control the linear motor for closed-loop control, and maintain the distance between the atomic force microscope and the display panel is a constant value. This solution is driven by a linear motor, and the driving force is sufficient, but the positioning accuracy of the linear motor itself is 1μm, which is the ultimate, far from meeting the requirements of maintaining the nanometer distance between the gantry and the display panel.

(2) Using piezoelectric stacks and flexible hinges to replace the longitudinal linear motor platform, the fully active closed-loop control of the atomic force microscope is performed, and the distance between the atomic force microscope and the display panel is kept constant. In this scheme, piezoelectric ceramics and a flexible mechanism are used for direct control, which is similar to fast servo (FTS), but the control target of FTS is only one cutting head, and the closed-loop control bandwidth rarely exceeds 100Hz, which is technically difficult. The driving force is large and the response is fast, which may be due to the hysteresis effect of piezoelectric ceramics. As the frequency increases, the hysteresis phenomenon becomes more obvious, so it is difficult to achieve high bandwidth control, that is, it is difficult to ensure the gap between the atomic force microscope and the display panel within the range of 500Hz. distance does not change.

(3) Use a passive vibration isolation device (the principle is the same as that of the vibration isolation table for the test) to connect the gantry and the atomic force microscope. The passive vibration isolation platform used in the modified scheme can only isolate high-frequency vibration, and has limited effect on low-frequency vibration elimination, and it is difficult to cope with the situation that requires micron-level distance adjustment, and passive vibration isolation is essentially a spring, which encounters natural frequencies. The excitation of the component will cause resonance, that is, the output displacement gain will be large.

SUMMARY OF THE INVENTION

In view of the above-mentioned defects, the purpose of the present invention is to propose a nano-platform integrating active/passive vibration suppression, which can actively adjust low frequency and passively isolate high-frequency vibration. stability.

For this purpose, the present invention adopts the following technical solutions:

A nanoplatform integrating active/passive vibration suppression, comprising: a gantry, an output platform, a sliding rod, a first flexible leaf spring, a second flexible leaf spring, a hard spring, a clamping assembly, a strain gauge, Magnetic lift assembly, piezoelectric lifter and range finder; the gantry frame includes a beam and a support arm vertically connected to both ends of the beam; the beam is provided with sliding holes in the vertical direction; the support arm is arranged in the horizontal direction An adjustment cavity is opened in the direction; the adjustment cavity is symmetrically arranged with respect to the extending direction of the sliding hole; a second flexible leaf spring member is arranged in the adjustment cavity, and the lower end of the second flexible leaf spring member passes through the piezoelectric top The lifting piece is fixedly connected with the bottom of the adjustment cavity; the magnetic lifting piece is installed on the top of the sliding hole, and the output platform is horizontally installed just below the sliding hole; the upper end of the sliding rod passes through the sliding hole. The sliding hole is installed in the magnetic lifting assembly; the lower end of the sliding rod is rigidly connected with the output platform in the vertical direction; the top of the output platform and the bottom of the beam pass through the hard Vertical connection of spring parts;

The left and right sides of the output platform are symmetrically provided with the first flexible leaf spring; one side of the first flexible leaf spring is fixedly connected to the output platform, and the first flexible leaf spring is The other side is fixedly connected with the second flexible leaf spring member on the corresponding side; the hard spring member, the first flexible leaf spring member and the second flexible leaf spring member provide vertical support for the output platform. A straight elastic force, and the output platform can slide in the vertical direction under the action of the magnetic lifting assembly and/or the piezoelectric lifting member; the clamping assembly is installed on the beam, the clamp The tightening assembly is used to clamp or loosen the sliding rod, and the strain gauge is arranged on the flexible spring member.

Specifically, the first flexible leaf spring is an S-shaped spring; the second flexible leaf spring includes an elastic plate and a jacking seat; the jacking seat is located in the adjustment cavity, and the jacking The piezoelectric lifting member is arranged between the seat and the bottom of the adjustment cavity, and the piezoelectric lifting member is used to drive the lifting seat to move in the vertical direction; a vertical The side surface is connected with the S-shaped spring member at the corresponding position; the opposite sides of the jacking seat are respectively connected with the two sides of the adjustment cavity through the elastic plate member; the flexibility ratio of the S-shaped spring member is The flexibility of the elastic plate member is large, and the stiffness of the S-shaped spring member is smaller than that of the elastic plate member.

Preferably, there are two hard springs, and they are symmetrically arranged on the left and right sides of the sliding rod; the hard springs are coil springs, and the flexibility of the coil springs is higher than that of the elasticity. The flexibility of the plate member is small, and the stiffness of the coil spring is greater than that of the elastic plate member.

Specifically, the S-shaped spring member and the elastic plate member are made of aviation aluminum; the coil spring is made of iron or steel.

Preferably, the clamping assembly includes a clamping plate, a friction ring and a piezoelectric clamping member; a linear bearing is arranged in the sliding hole; the clamping plate is installed on the bottom of the beam, and the clamping plate is A clamping hole is opened in the extending direction of the sliding hole; a friction ferrule is arranged in the clamping hole, and one side of the friction ferrule is installed in close contact with the driving end of the piezoelectric clamping piece; The electric clamping piece is fixedly installed on the clamping plate; the sliding rod is passed through the friction ferrule, and driven by the piezoelectric clamping piece, the friction ferrule clamps the sliding rod tighten or loosen.

Preferably, the piezoelectric clamping member and the piezoelectric lifting member in the clamping assembly are piezoelectric stacking drivers.

Preferably, the magnetic lifting assembly includes: a permanent magnet and an electromagnetic coil; the radial dimension of the electromagnetic coil is larger than the radial dimension of the permanent magnet; the permanent magnet is annular, and is horizontally sleeved on the sliding rod. The upper end; the electromagnetic coil is fixedly installed on the top of the sliding hole, and is arranged on the outer side of the permanent magnet coaxially with the permanent magnet.

Preferably, the nano-platform further comprises an atomic force microscope, a controller and a range finder; the atomic force microscope is mounted on the bottom of the output platform; the range finder is used to detect the distance between the atomic force microscope and the target to be measured The rangefinder is a capacitance rangefinder or a Doppler rangefinder; the controller, the clamping component, the strain gauge, the magnetic lifting component, the piezoelectric lifting piece and the rangefinder are electrically connected.

Preferably, the controller is equipped with an adjustment control method for controlling the distance between the atomic force microscope and the measured target, and the adjustment control method includes the following contents:

The distance meter detects the distance between the atomic force microscope and the measured target in real time, and obtains the distance parameters;

When the distance parameter exceeds the preset range, the controller controls the magnetic lift assembly and/or the piezoelectric lifter according to the comparison result between the distance parameter and the preset range, so as to realize the control of the distance between the atomic force microscope and the target to be measured. Closed-loop feedback control or closed-loop feedback plus feedforward control, so that the distance parameter can be restored to the preset range;

When the nano-platform resonates, the controller sends a control command to the clamping assembly, so that the clamping assembly clamps and brakes the sliding rod, and when the resonance of the nano-platform is eliminated, the clamping assembly releases the sliding rod.

The beneficial effects of the embodiments of the present invention:

The flexible mechanism with large flexibility composed of the first flexible leaf spring member and the second flexible leaf spring member utilizes the characteristics of small output response of high-frequency displacement components when the flexible mechanism is connected with a large mass (kg level), and realizes the atomic force Stable maintenance of microscope displacement in the high frequency range.

The low frequency is driven by the piezoelectric stack, and by means of feedback and feedforward, the position of the atomic force microscope is actively adjusted when the displacement disturbance occurs or half occurs, so that the closed-loop bandwidth does not need to be too high, and only needs to have the same frequency as the high-frequency passive vibration isolation frequency band. Coincidence is enough, which reduces the performance requirements of the controller sensor and the difficulty of algorithm implementation.

The addition of a clamping component eliminates or reduces the large output displacement change caused by the displacement excitation of the frequency component of the passive vibration isolation component near the resonance point, and improves the performance of maintaining a constant position of the atomic force microscope.

The sliding rod that is rigidly connected with the output platform is connected to the linear bearing, which limits the swing of the output platform and improves the performance of maintaining the constant position of the entire plane of the atomic force microscope.

The innovative technology of low-frequency active control and high-frequency passive vibration reduction enables the stability maintenance performance of the nano-platform to cover a wider frequency range and expand the applicable scenarios of the device.

When the length of the piezoelectric stack begins to change, the electromagnetic force of the magnetic lifting component compensates the start-up lag of the platform caused by the too small deformation force caused by too small stiffness. In the deformed state, when the flexible mechanism is deformed and restored to the equilibrium state, a pair of piezoelectric stacks are used to clamp the sliding rod, and the platform is braked to prevent vibration (excessive displacement), which solves the problem of starting the flexible mechanism with low stiffness. The speed is slow, and it is impossible to have a high-stiffness flexible mechanism to respond quickly.

Description of drawings

1 is a schematic three-dimensional structure diagram of the nanoplatform in an embodiment of the present invention;

Fig. 2 is the front structure schematic diagram of the embodiment shown in Fig. 1;

3 is a schematic front view of the nanoplatform in an application state of an embodiment of the present invention;

FIG. 4 is a schematic diagram of an amplitude-frequency characteristic curve in an application state of the nanoplatform according to an embodiment of the present invention.

Among them: gantry 110, output platform 120, sliding rod 130, linear bearing 131, first flexible leaf spring 140, S-shaped spring 141, second flexible leaf spring 150, elastic plate 151, jacking seat 152, Hard spring member 153 , clamping assembly 160 , clamping plate 161 , friction ring 162 , magnetic lifting assembly 170 , permanent magnet 171 , electromagnetic coil 172 , piezoelectric lifting member 180 , atomic force microscope 210 , motion platform 220 .

Detailed ways

The technical solutions of the present invention are further described below with reference to the accompanying drawings and through specific embodiments.

An embodiment of the present application, as shown in FIG. 1 to FIG. 4 , is a nanoplatform integrating active/passive vibration suppression, which includes: a gantry 110 , an output platform 120 , a sliding rod 130 , and a first flexible leaf spring 140 , the second flexible leaf spring member 150, the hard spring member 153, the clamping assembly 160, the strain gauge, the magnetic lifting assembly 170, the piezoelectric lifting member 180 and the range finder; the gantry 110 includes a beam and a vertical connection and the support arms at both ends of the beam; the beam is provided with sliding holes along the vertical direction; the support arm is provided with adjustment cavities along the horizontal direction; the adjustment cavities are arranged symmetrically with respect to the extending direction of the sliding holes; the A second flexible leaf spring member is arranged in the adjustment cavity, and the lower end of the second flexible leaf spring member is fixedly connected to the bottom of the adjustment cavity through a piezoelectric lifting member 180; the magnetic lifting member is installed in the sliding hole The output platform 120 is horizontally installed directly below the sliding hole; the upper end of the sliding rod 130 passes through the sliding hole and is installed in the magnetic lifting assembly 170; the sliding rod 130 The lower end of the output platform 120 is rigidly connected to the output platform 120 in the vertical direction; the top of the output platform 120 and the bottom of the beam are vertically connected through the hard spring member 153; the left and right sides of the output platform 120 The first flexible leaf spring is arranged symmetrically on the side; one side of the first flexible leaf spring is fixedly connected to the output platform 120 , and the other side of the first flexible leaf spring is connected to the corresponding side. The second flexible leaf spring is fixedly connected; the hard spring 153 , the first flexible leaf spring and the second flexible leaf spring provide the output platform 120 with a vertically upward elastic force, and Under the action of the magnetic lifting assembly 170 and/or the piezoelectric lifting member 180, the output platform 120 can slide in the vertical direction; the clamping assembly 160 is mounted on the beam, and the clamping assembly 160 is used to clamp or loosen the sliding rod 130, and the strain gauge is arranged on the flexible spring member.

The first flexible leaf spring member is an S-shaped spring member 141; the second flexible leaf spring member 150 includes an elastic plate member 151 and a jacking seat 152; the jacking seat 152 is located in the adjustment cavity, the The piezoelectric jacking member 180 is arranged between the jacking seat 152 and the bottom of the adjustment cavity, and the piezoelectric jacking member 180 is used to drive the jacking seat 152 to move in the vertical direction; A vertical side surface of the lift seat 152 is connected with the S-shaped spring member 141 at the corresponding position; the opposite sides of the lift seat 152 are respectively connected with the two sides of the adjustment cavity through the elastic plate member 151 ; The flexibility of the S-shaped spring member is larger than the flexibility of the elastic plate member 151 , and the stiffness of the S-shaped spring member is smaller than that of the elastic plate member 151 .

There are two hard spring members 153, which are symmetrically arranged on the left and right sides of the sliding rod 130; the hard spring members 153 are coil springs, and the flexibility of the coil springs is higher than that of the elasticity. The flexibility of the plate member 151 is small, and the stiffness of the coil spring is greater than that of the elastic plate member 151 .

The stiffness and flexibility can be achieved by changing the material or setting the thickness of the material.

The S-shaped spring member and the elastic plate member 151 are made of aviation aluminum; the coil spring is made of iron or steel; so that the output platform 120 has a stable suspension support structure, and can actively operate at micron and/or Or nanoscale for vertical movement adjustment.

The clamping assembly 160 includes a clamping plate 161, a friction ring 162 and a piezoelectric clamping member; the sliding hole is provided with a linear bearing 131; the clamping plate 161 is installed on the bottom of the beam, and the clamping A clamping hole is formed on the plate 161 facing the extending direction of the sliding hole; a friction ferrule 162 is arranged in the clamping hole, and one side of the friction ferrule 162 is close to the driving end of the piezoelectric clamping member installation; the piezoelectric clamping member is fixedly installed on the clamping plate 161; the sliding rod 130 passes through the friction ring 162, and driven by the piezoelectric clamping member, the friction The ferrule 162 clamps or loosens the slide bar 130 .

The piezoelectric clamping member and the piezoelectric lifting member 180 in the clamping assembly 160 are piezoelectric stacking drivers; the piezoelectric stacking drivers are existing functional components, which can be directly purchased from the market, also referred to as Piezo stack. The working principle of one of the piezoelectric stack drivers can be summarized as follows: the piezoelectric stack is a rod-like structure arranged in a vertical direction, and is formed by stacking a plurality of piezoelectric ceramic sheets. One end of the piezoelectric stack is fixed with the fixing block. When an electrical signal is applied to excite the piezoelectric stack, the piezoelectric stack can be deformed along the length direction, thereby generating an output displacement at the other end of the piezoelectric stack, which can achieve micron or nanometer level. The telescopic drive effect.

The magnetic lifting assembly 170 includes: a permanent magnet 171 and an electromagnetic coil 172; the radial size of the electromagnetic coil 172 is larger than the radial size of the permanent magnet 171; the permanent magnet 171 is annular, and is horizontally sleeved on the The upper end of the sliding rod 130 ; the electromagnetic coil 172 is fixedly installed on the top of the sliding hole, and is disposed on the outer side of the permanent magnet 171 coaxially with the permanent magnet 171 .

The nano-platform further includes an atomic force microscope 210, a controller and a range finder; the atomic force microscope 210 is installed at the bottom of the output platform 120; the range finder is used to detect the distance between the atomic force microscope 210 and the object to be measured. distance; the range finder is a capacitance range finder or a Doppler range finder; the controller, the clamping assembly 160, the strain gauge, the magnetic lift assembly 170, the piezoelectric lifter 180 and the range finder electrical connection.

The controller is equipped with an adjustment control method for controlling the distance between the atomic force microscope 210 and the measured target, and the adjustment control method includes the following contents:

The distance meter detects the distance between the atomic force microscope 210 and the measured target in real time. get the distance parameter;

When the distance parameter exceeds the preset range, the controller controls the magnetic lift assembly 170 and/or the piezoelectric lifter 180 according to the comparison result between the distance parameter and the preset range, so as to realize the adjustment between the atomic force microscope 210 and the object to be measured. Closed-loop feedback control or closed-loop feedback plus feedforward control of the distance, so that the distance parameter can be restored to the preset range;

When the nano-platform resonates, the controller sends a control command to the clamping assembly 160, so that the clamping assembly 160 clamps and brakes the sliding rod 130. When the resonance of the nano-platform is eliminated, the clamping assembly 160 clamps the sliding rod 130. 130 release.

Specifically, in practical applications, the nano-platform is installed above the moving platform 220 for carrying the target to be measured, and the support arms at both ends of the gantry 110 are connected to the frame of the moving platform 220. When the moving platform When the 220 moves, the gantry 110 above the nano-platform will transmit the displacement excitation of the high-frequency component to the atomic force microscope 210, which can be obtained from the amplitude-frequency characteristic curve shown in FIG. Supported by the flexible mechanism composed of the first flexible leaf spring member 140 and the second flexible leaf spring member 150, the displacement amplitude of the output platform 120 is already smaller than the allowable range value (the allowable range value can be set by actual application requirements), the output platform 120 will not reflect the influence of high-frequency component excitation, which ensures that the distance between the atomic force microscope 210 and the object to be measured remains constant under high-frequency displacement excitation.

Under the high-frequency displacement excitation, the distance between the atomic force microscope 210 and the measured target is monitored in real time through a capacitance or Doppler rangefinder, and closed-loop feedback control or closed-loop feedback plus feedforward control is performed to make the closed-loop control bandwidth and high-frequency passive control. If the vibration isolation frequency bands overlap, it is ensured that the distance between the atomic force microscope 210 and the object to be measured remains constant under high frequency displacement excitation within a larger frequency band.

In the low frequency active control frequency band, in order to prevent the displacement response of the resonant frequency component from being excited (as shown at 76.24 μm in FIG. 4 ), a clamping assembly 160 is added to clamp and brake the friction ring 162 on the sliding rod 130 , eliminate or reduce excessive displacement vibration, and because the sliding rod 130 is rigidly connected to the output platform 120, and the linear bearing 131 limits the displacement to only the vertical direction, so by braking the sliding rod 130, that is, The output platform 120 is braked to effectively reduce the excessive displacement change caused by the excitation of the resonance point frequency (resonance point) component.

In addition, since the first flexible leaf spring member 140 and the second flexible leaf spring member 150 directly connected to the output platform 120 form a flexible mechanism, the flexibility is large and the stiffness is low, while the output platform 120 and the suspended atomic force microscope 210 are of high mass, Long-term deformation, the support of the flexible mechanism is easy to exceed the yield limit, so a pair of hard springs 153 are added to offset the gravity of the output platform 120 and the suspended atomic force microscope 210, and the tensile force of the hard springs 153 to the deformation (micron level) It is not sensitive, so it can be considered to provide a constant pulling force to counteract gravity. Also because of the flexible mechanism directly connected to the output platform 120, when the piezoelectric lifter 180 actively controls it, there is a problem of startup lag (phase lag), which is not conducive to the fast response of the active control of the output platform 120. Electromagnetic force is generated between the permanent magnet 171 on the slide bar 130 and the electromagnetic coil 172, and the direction and magnitude of the electromagnetic force are changed by changing the magnitude and direction of the current, so as to reduce the motion platform caused by insufficient deformation force (small stiffness) of the flexible mechanism during startup 220 Startup lag.

Through active control at low frequency and passive vibration isolation at high frequency, the nanoplatform ensures that the distance between the atomic force microscope 210 and the target to be measured is always stable within a set range in a wider frequency band under the excitation of input displacement.

It should be noted that the terminology used herein is for the purpose of describing specific embodiments only, and is not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural as well, furthermore, it is to be understood that when the terms "comprising" and/or "including" are used in this specification, it indicates that There are features, steps, operations, devices, components and/or combinations thereof.

The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the invention unless specifically stated otherwise. Meanwhile, it should be understood that, for the convenience of description, the dimensions of various parts shown in the accompanying drawings are not drawn in an actual proportional relationship. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. In all examples shown and discussed herein, any specific value should be construed as illustrative only and not as limiting. Accordingly, other examples of exemplary embodiments may have different values. It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further discussion in subsequent figures.

In the description of the present invention, it should be understood that the orientations indicated by orientation words such as "front, rear, top, bottom, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" etc. Or the positional relationship is usually based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and these orientation words do not indicate or imply the indicated device or element unless otherwise stated. It must have a specific orientation or be constructed and operated in a specific orientation, so it cannot be construed as a limitation on the protection scope of the present invention; the orientation words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

For ease of description, spatially relative terms, such as "on", "over", "on the surface", "above", etc., may be used herein to describe what is shown in the figures. The spatial positional relationship of one device or feature shown to other devices or features. It should be understood that spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or features would then be oriented "below" or "over" the other devices or features under other devices or constructions". Thus, the exemplary term "above" can encompass both an orientation of "above" and "below." The device may also be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptions used herein interpreted accordingly.

In addition, it should be noted that the use of words such as "first" and "second" to define components is only for the convenience of distinguishing corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood to limit the scope of protection of the present invention.

It should be noted that the terms "first", "second", etc. in the description and claims of the present application and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific sequence or sequence. It is to be understood that data so used may be interchanged under appropriate circumstances so that the embodiments of the application described herein can be practiced in sequences other than those illustrated or described herein.

The technical principle of the present invention has been described above with reference to the specific embodiments. These descriptions are only for explaining the principle of the present invention, and should not be construed as limiting the protection scope of the present invention in any way. Based on the explanations herein, those skilled in the art can think of other specific embodiments of the present invention without creative efforts, and these methods will all fall within the protection scope of the present invention.

Claims (9)

1. An active/passive vibration suppressing fused nano-platform, comprising: the device comprises a portal frame, an output platform, a sliding rod, a first flexible plate spring piece, a second flexible plate spring piece, a hard spring piece, a clamping assembly, a strain gauge, a magnetic lifting assembly, a piezoelectric jacking piece and a distance meter;

the portal frame comprises a cross beam and supporting arms vertically connected with two ends of the cross beam; the cross beam is provided with a sliding hole along the vertical direction; the supporting arm is provided with an adjusting cavity along the horizontal transverse direction; the adjusting cavities are arranged in a left-right symmetrical mode relative to the extending direction of the sliding hole; a second flexible plate spring piece is arranged in the adjusting cavity, and the lower end of the second flexible plate spring piece is fixedly connected with the bottom of the adjusting cavity through a piezoelectric jacking piece;

the magnetic lifting piece is arranged at the top of the sliding hole, and the output platform is horizontally arranged right below the sliding hole; the upper end of the sliding rod penetrates through the sliding hole and is limited and arranged in the magnetic lifting assembly; the lower end of the sliding rod is rigidly connected with the output platform along the vertical direction;

the top of the output platform is vertically connected with the bottom of the cross beam through the hard spring piece;

the left side and the right side of the output platform are symmetrically provided with the first flexible plate spring pieces; one side of the first flexible plate spring part is fixedly connected with the output platform, and the other side of the first flexible plate spring part is fixedly connected with the second flexible plate spring part on the corresponding side;

the hard spring part, the first flexible plate spring part and the second flexible plate spring part provide vertical upward elastic force for the output platform, and the output platform can slide along the vertical direction under the action of the magnetic lifting assembly and/or the piezoelectric jacking part; the clamping assembly is arranged on the cross beam and used for clamping or loosening the sliding rod, and the strain gauge is arranged on the flexible spring piece.

2. The active/passive vibration suppressing fusion nano-platform of claim 1, wherein the first flexible plate spring element is an S-shaped spring element;

the second flexible plate spring element comprises an elastic plate element and a jacking seat; the jacking seat is positioned in the adjusting cavity, the piezoelectric jacking piece is arranged between the jacking seat and the bottom of the adjusting cavity, and the piezoelectric jacking piece is used for driving the jacking seat to move along the vertical direction; one vertical side surface of the jacking seat is connected with the S-shaped spring piece at the corresponding position; two sides opposite to the jacking seat are respectively connected with two sides of the adjusting cavity through the elastic plate;

the S-shaped spring member has a greater compliance than the elastic plate member and a lesser stiffness than the elastic plate member.

3. The active/passive vibration suppression fusion nano platform according to claim 2, wherein two hard spring members are symmetrically arranged on the left side and the right side of the sliding rod; the hard spring part is a spiral spring, the flexibility of the spiral spring is smaller than that of the elastic plate, and the rigidity of the spiral spring is larger than that of the elastic plate.

4. The active/passive vibration suppressing nano platform of claim 3, wherein the S-shaped spring member and the elastic plate member are made of aircraft aluminum; the coil spring is made of iron or steel.

5. The active/passive vibration suppressing fusion nano-platform of claim 1, wherein the clamping assembly comprises a clamping plate, a friction ferrule and a piezoelectric clamp; a linear bearing is arranged in the sliding hole; the clamping plate is arranged at the bottom of the cross beam, and a clamping hole is formed in the extending direction of the clamping plate, which is opposite to the sliding hole; a friction ferrule is arranged in the clamping hole, and one side of the friction ferrule is tightly attached to the driving end of the piezoelectric clamping piece; the piezoelectric clamping piece is fixedly arranged on the clamping plate; the sliding rod penetrates through the friction ferrule, and the friction ferrule clamps or releases the sliding rod under the driving of the piezoelectric clamping piece.

6. The active/passive vibration suppressing fusion nano-platform of claim 5, wherein the piezoelectric clamping member and the piezoelectric jacking member in the clamping assembly are piezoelectric stack actuators.

7. The active/passive vibration suppression fusion nano-platform according to claim 1, wherein the magnetic lifting assembly comprises: a permanent magnet and an electromagnetic coil; the radial dimension of the electromagnetic coil is larger than that of the permanent magnet;

the permanent magnet is annular and is horizontally sleeved at the upper end of the sliding rod;

the electromagnetic coil is fixedly arranged at the top of the sliding hole and is arranged on the outer side of the permanent magnet in a coaxial mode with the permanent magnet.

8. The active/passive vibration suppressing fusion nano-platform of claim 1, further comprising an atomic force microscope, a controller and a range finder; the atomic force microscope is arranged at the bottom of the output platform; the distance measuring instrument is used for detecting the distance between the atomic force microscope and a measured target; the distance meter is a capacitance distance meter or a Doppler distance meter;

the controller, clamping component, foil gage, magnetism promote subassembly, piezoelectricity jacking piece and distancer electric connection.

9. The active/passive vibration-suppressing fusion nano-platform according to claim 8, wherein the controller is provided with a regulation control method for controlling the distance between the atomic force microscope and the measured object, and the regulation control method comprises the following steps:

the distance measuring instrument detects the distance between the atomic force microscope and the measured target in real time to obtain distance parameters;

when the distance parameter exceeds the preset range, the controller controls the magnetic lifting assembly and/or the piezoelectric jacking assembly according to the comparison result of the distance parameter and the preset range, so that the closed-loop feedback control or the closed-loop feedback and feedforward control of the distance between the atomic force microscope and the measured target is realized, and the distance parameter is restored to be within the preset range;

when the nano platform resonates, the controller sends a control instruction to the clamping assembly, so that the clamping assembly clamps and brakes the sliding rod, and after the nano platform resonates and is eliminated, the clamping assembly loosens the sliding rod.

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