CN114527298B - Active/passive vibration suppression fusion nano platform - Google Patents
Active/passive vibration suppression fusion nano platform Download PDFInfo
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- CN114527298B CN114527298B CN202210152767.0A CN202210152767A CN114527298B CN 114527298 B CN114527298 B CN 114527298B CN 202210152767 A CN202210152767 A CN 202210152767A CN 114527298 B CN114527298 B CN 114527298B
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Abstract
The invention relates to the field of Mini/Micro LED packaging detection, in particular to an active/passive vibration suppression integrated nano platform. The nanometer cloud platform includes: the device comprises a portal frame, an output platform, a sliding rod, a first flexible plate spring piece, a second flexible plate spring piece, a hard spring piece, a clamping assembly, a strain gauge, a magnetic lifting assembly, a piezoelectric jacking piece and a distance meter; the nano holder utilizes the characteristic that the output response of high-frequency displacement components is small under the condition that a flexible mechanism is connected with large mass, realizes the stable maintenance of the displacement of the atomic force microscope in a high-frequency range, and the low frequency is driven by the piezoelectric stack, and the position of the atomic force microscope is actively adjusted by means of feedback and feedforward, so that the performance requirements and the algorithm realization difficulty of a controller sensor are reduced while the low-frequency active adjustment and the high-frequency passive vibration isolation are realized.
Description
Technical Field
The invention relates to the field of Mini/Micro LED packaging detection, in particular to an active/passive vibration suppression integrated nano platform.
Background
In the field of chip packaging detection, especially mini-led and micro-led chips, after primary packaging, an atomic force microscope is required to be used for carrying out online measurement on physical characteristics of each chip, and then bad chips are repaired or replaced, so that early discovery and early treatment are achieved, the yield of chip packaging is ensured from each link, and finally the production efficiency of the whole display screen is improved.
However, the led chips are all in the micrometer range, and those chips are to be packaged on a meter-level display panel, and the inspection range of the atomic force microscope is also in the micrometer range, which requires that a gantry is used to suspend the atomic force microscope, and each position of the display panel is transferred to the detection range of the atomic force microscope to be detected in cooperation with the bottom motion platform.
Although the atomic force microscope has extremely high detection precision, the atomic force microscope has extremely high requirements (nanometer level) on the distance between the atomic force microscope and a detected object, the vibration of the level is mainly generated by the motion platform, the distance between the atomic force microscope and the detected object is influenced by the portal frame, the frequency range of vibration noise reaches 500Hz, and the vibration amplitude reaches 500 nm.
The application requirement is that the object with the mass of about 3kg of the atomic force microscope is subjected to the displacement vibration excitation transmitted by the portal frame, the distance between the atomic force microscope and the measured object is kept stable, and according to the prior art and the prior requirement, the closed-loop control band with the large load does not exceed 100Hz at present.
The prior art mainly comprises the following three techniques for installing a portal frame and an atomic force microscope:
(1) the method comprises the steps of connecting a portal frame and an atomic force microscope by using a longitudinal linear motor platform, obtaining the distance between the atomic force microscope and a display panel by using a Doppler distance meter, controlling a linear motor to perform closed-loop control, and keeping the distance between the atomic force microscope and the display panel to be a constant value. In the scheme, the linear motor is used for driving, the driving force is enough, but the positioning accuracy of the linear motor is extremely high when the positioning accuracy is 1 mu m, and the requirement for keeping the distance between a portal frame and a display panel at a nanometer level is far from being met.
(2) The piezoelectric stack and the flexible hinge are used for replacing a longitudinal linear motor platform, full-active closed-loop control is carried out on the atomic force microscope, and the distance between the atomic force microscope and the display panel is kept to be a constant value. The scheme uses piezoelectric ceramics and a flexible mechanism for direct control, and is similar to a fast servo (FTS), but the control target of the FTS is only one cutting tool bit, the bandwidth of closed-loop control is rarely over 100Hz, the technical difficulty exists, the piezoelectric ceramics has large driving force and quick response, and the hysteresis phenomenon is more obvious possibly because of the hysteresis effect of the piezoelectric ceramics along with the increase of frequency, so that the high-bandwidth control is difficult to achieve, namely, the distance between an atomic force microscope and a display panel is difficult to ensure to be unchanged within the range of 500 Hz.
(3) A passive vibration isolation device (the principle is the same as that of a vibration isolation table for testing) is used for connecting the portal frame and the atomic force microscope. The passive vibration isolation platform used in the scheme can only isolate high-frequency vibration, has limited effect on eliminating low-frequency vibration, is difficult to deal with the condition of needing micron-sized distance adjustment, is essentially a spring, can generate resonance when encountering the excitation of natural frequency components, and has large output displacement gain.
Disclosure of Invention
In view of the above-mentioned drawbacks, the present invention provides a nano platform with active/passive vibration suppression and fusion, which can perform active low-frequency adjustment and passive high-frequency vibration isolation, and is a self-stabilized nano platform with a wide frequency band, thereby ensuring the stability of an atomic force microscope.
In order to achieve the purpose, the invention adopts the following technical scheme:
an active/passive vibration suppressing fused nano-platform, comprising: the device comprises a portal frame, an output platform, a sliding rod, a first flexible plate spring piece, a second flexible plate spring piece, a hard spring piece, a clamping assembly, a strain gauge, a magnetic lifting assembly, a piezoelectric lifting piece and a distance meter; the portal frame comprises a cross beam and supporting arms vertically connected with two ends of the cross beam; the cross beam is provided with a sliding hole along the vertical direction; the supporting arm is provided with an adjusting cavity along the horizontal transverse direction; the adjusting cavities are arranged in a left-right symmetrical mode in relation to the extending direction of the sliding hole; a second flexible plate spring piece is arranged in the adjusting cavity, and the lower end of the second flexible plate spring piece is fixedly connected with the bottom of the adjusting cavity through a piezoelectric jacking piece; the magnetic lifting piece is arranged at the top of the sliding hole, and the output platform is horizontally arranged right below the sliding hole; the upper end of the sliding rod penetrates through the sliding hole and is installed in the magnetic lifting assembly in a limiting mode; the lower end of the sliding rod is rigidly connected with the output platform along the vertical direction; the top of the output platform is vertically connected with the bottom of the cross beam through the hard spring piece;
the left side and the right side of the output platform are symmetrically provided with the first flexible plate spring pieces; one side of the first flexible plate spring part is fixedly connected with the output platform, and the other side of the first flexible plate spring part is fixedly connected with the second flexible plate spring part on the corresponding side; the hard spring part, the first flexible plate spring part and the second flexible plate spring part provide vertical upward elastic force for the output platform, and the output platform can slide along the vertical direction under the action of the magnetic lifting assembly and/or the piezoelectric jacking part; the clamping assembly is arranged on the cross beam and used for clamping or loosening the sliding rod, and the strain gauge is arranged on the flexible spring piece.
Specifically, the first flexible plate spring element is an S-shaped spring element; the second flexible plate spring element comprises an elastic plate element and a jacking seat; the jacking seat is positioned in the adjusting cavity, the piezoelectric jacking piece is arranged between the jacking seat and the bottom of the adjusting cavity, and the piezoelectric jacking piece is used for driving the jacking seat to move along the vertical direction; one vertical side surface of the jacking seat is connected with the S-shaped spring piece at the corresponding position; two sides opposite to the jacking seat are respectively connected with two sides of the adjusting cavity through the elastic plate; the S-shaped spring member has a greater compliance than the elastic plate member and a lesser stiffness than the elastic plate member.
Preferably, two hard spring pieces are arranged on the left side and the right side of the sliding rod symmetrically; the hard spring part is a spiral spring, the flexibility of the spiral spring is smaller than that of the elastic plate, and the rigidity of the spiral spring is larger than that of the elastic plate.
Specifically, the S-shaped spring member and the elastic plate member are made of aircraft aluminum; the coil spring is made of iron or steel.
Preferably, the clamping assembly comprises a clamping plate, a friction collar and a piezoelectric clamp; a linear bearing is arranged in the sliding hole; the clamping plate is arranged at the bottom of the cross beam, and a clamping hole is formed in the extending direction of the clamping plate, which is opposite to the sliding hole; a friction ferrule is arranged in the clamping hole, and one side of the friction ferrule is tightly attached to the driving end of the piezoelectric clamping piece; the piezoelectric clamping piece is fixedly arranged on the clamping plate; the sliding rod penetrates through the friction ferrule, and the friction ferrule clamps or loosens the sliding rod under the driving of the piezoelectric clamping piece.
Preferably, the piezoelectric clamping piece and the piezoelectric jacking piece in the clamping assembly are piezoelectric stack drivers.
Preferably, the magnetic lifting assembly comprises: a permanent magnet and an electromagnetic coil; the radial dimension of the electromagnetic coil is larger than that of the permanent magnet; the permanent magnet is annular and horizontally sleeved at the upper end of the sliding rod; the electromagnetic coil is fixedly arranged at the top of the sliding hole and is arranged on the outer side of the permanent magnet in a coaxial manner with the permanent magnet.
Preferably, the nano-platform further comprises an atomic force microscope, a controller and a range finder; the atomic force microscope is arranged at the bottom of the output platform; the distance meter is used for detecting the distance between the atomic force microscope and a measured target; the distance meter is a capacitance distance meter or a Doppler distance meter; the controller, the clamping component, the strain gauge, the magnetic lifting component, the piezoelectric lifting component and the range finder are electrically connected.
Preferably, the controller is provided with an adjusting and controlling method for controlling the distance between the atomic force microscope and the measured object, and the adjusting and controlling method comprises the following steps:
the distance measuring instrument detects the distance between the atomic force microscope and the measured target in real time to obtain distance parameters;
when the distance parameter exceeds the preset range, the controller controls the magnetic lifting assembly and/or the piezoelectric jacking assembly according to the comparison result of the distance parameter and the preset range, so that the closed-loop feedback control or the closed-loop feedback and feedforward control of the distance between the atomic force microscope and the measured target is realized, and the distance parameter is restored to be within the preset range;
when the nano platform resonates, the controller sends a control instruction to the clamping assembly, so that the clamping assembly clamps and brakes the sliding rod, and after the nano platform resonates and is eliminated, the clamping assembly loosens the sliding rod.
The embodiment of the invention has the following beneficial effects:
the high-flexibility flexible mechanism composed of the first flexible plate spring part and the second flexible plate spring part realizes the stable maintenance of the displacement of the atomic force microscope in a high-frequency range by utilizing the characteristic that the output response of a high-frequency displacement component is small under the condition that the flexible mechanism is connected with a large mass (kg grade).
The low frequency is driven by the piezoelectric stack, and the position of the atomic force microscope is actively adjusted by means of feedback and feedforward when displacement disturbance occurs or is half of the displacement disturbance, so that the closed-loop bandwidth is not too high and only needs to be overlapped with a high-frequency passive vibration isolation frequency band, and the performance requirement and the algorithm implementation difficulty of a controller sensor are reduced.
The clamping assembly is additionally arranged, so that the large-amplitude output displacement change caused by the displacement excitation of the frequency component of the passive vibration isolation component near the resonance point is eliminated or reduced, and the performance of maintaining the position of the atomic force microscope to be constant is improved.
The slide rod rigidly connected with the output platform is connected into the linear bearing, so that the swing of the output platform is limited, and the performance of maintaining the constant position of the whole plane of the atomic force microscope is improved.
The innovative technologies of low-frequency active control and high-frequency passive vibration reduction enable the stability maintaining performance of the nano platform to cover a wider frequency range, and expand the applicable scenes of the device.
When the length of the piezoelectric stack begins to change, the electromagnetic force for the magnetic lifting assembly is used for compensating the condition of delayed platform starting caused by too small deformation force due to too small rigidity, after the length of the piezoelectric stack changes, the deformation state is detected in real time through the strain gauge, when the flexible mechanism deforms and returns to a balanced state, the pair of piezoelectric stacks are used for clamping the slide bar, the platform is braked, vibration (excessive displacement) is prevented, and the contradiction that the low-rigidity flexible mechanism is slow in starting speed and cannot have rapid response of the high-rigidity flexible mechanism is solved.
Drawings
FIG. 1 is a schematic perspective view of the nano-platform according to an embodiment of the present invention;
FIG. 2 is a schematic front view of the embodiment of FIG. 1;
FIG. 3 is a schematic diagram of a front view of the nano-platform in an application state according to an embodiment of the present invention;
fig. 4 is a schematic diagram of the amplitude-frequency characteristic curve of the nano platform in an application state in an embodiment of the present invention.
Wherein: the device comprises a portal frame 110, an output platform 120, a sliding rod 130, a linear bearing 131, a first flexible plate spring part 140, an S-shaped spring part 141, a second flexible plate spring part 150, an elastic plate part 151, a jacking seat 152, a hard spring part 153, a clamping assembly 160, a clamping plate 161, a friction ferrule 162, a magnetic lifting assembly 170, a permanent magnet 171, an electromagnetic coil 172, a piezoelectric jacking part 180, an atomic force microscope 210 and a motion platform 220.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In one embodiment of the present application, as shown in fig. 1 to 4, an active/passive vibration suppressing fusion nano-platform includes: the device comprises a portal frame 110, an output platform 120, a slide bar 130, a first flexible plate spring element 140, a second flexible plate spring element 150, a hard spring element 153, a clamping assembly 160, a strain gauge, a magnetic lifting assembly 170, a piezoelectric jacking element 180 and a distance meter; the portal frame 110 comprises a cross beam and support arms vertically connected with two ends of the cross beam; the cross beam is provided with a sliding hole along the vertical direction; the supporting arm is provided with an adjusting cavity along the horizontal transverse direction; the adjusting cavities are arranged in a left-right symmetrical mode relative to the extending direction of the sliding hole; a second flexible plate spring piece is arranged in the adjusting cavity, and the lower end of the second flexible plate spring piece is fixedly connected with the bottom of the adjusting cavity through a piezoelectric jacking piece 180; the magnetic lifting piece is arranged at the top of the sliding hole, and the output platform 120 is horizontally arranged right below the sliding hole; the upper end of the slide bar 130 passes through the slide hole and is limited and arranged in the magnetic lifting component 170; the lower end of the sliding rod 130 is rigidly connected with the output platform 120 along the vertical direction; the top of the output platform 120 is vertically connected with the bottom of the cross beam through the hard spring piece 153; the first flexible plate spring members are symmetrically arranged on the left side and the right side of the output platform 120; one side of the first flexible plate spring part is fixedly connected with the output platform 120, and the other side of the first flexible plate spring part is fixedly connected with the second flexible plate spring part on the corresponding side; the hard spring element 153, the first flexible plate spring element and the second flexible plate spring element provide a vertical upward elastic force for the output platform 120, and the output platform 120 can slide in a vertical direction under the action of the magnetic lifting assembly 170 and/or the piezoelectric jacking element 180; the clamping assembly 160 is mounted to the cross beam, the clamping assembly 160 is used for clamping or unclamping the slide bar 130, and the strain gauge is disposed on the flexible spring member.
The first flexible plate spring element is an S-shaped spring element 141; the second flexible plate spring member 150 comprises an elastic plate member 151 and a jacking seat 152; the jacking seat 152 is positioned in the adjusting cavity, the piezoelectric jacking piece 180 is arranged between the jacking seat 152 and the bottom of the adjusting cavity, and the piezoelectric jacking piece 180 is used for driving the jacking seat 152 to move along the vertical direction; a vertical side surface of the jacking seat 152 is connected with the S-shaped spring member 141 at a corresponding position; two sides of the jacking seat 152 opposite to each other are respectively connected with two sides of the adjusting cavity through the elastic plate 151; the S-shaped spring member has a greater compliance than that of the elastic plate member 151 and a lower rigidity than that of the elastic plate member 151.
Two hard spring pieces 153 are symmetrically arranged on the left side and the right side of the sliding rod 130; the hard spring member 153 is a coil spring, and the compliance of the coil spring is smaller than that of the elastic plate member 151, and the stiffness of the coil spring is larger than that of the elastic plate member 151.
The stiffness and compliance can be dimensioned by changing the material or by setting the material thickness.
The S-shaped spring member and the elastic plate member 151 are made of aircraft aluminum; the coil spring is made of iron or steel; so that the output platform 120 has a stable suspended support structure and can actively perform a moving adjustment in the vertical direction at the micrometer and/or nanometer level.
The clamp assembly 160 includes a clamp plate 161, a friction collar 162, and a piezoelectric clamp; a linear bearing 131 is arranged in the sliding hole; the clamping plate 161 is arranged at the bottom of the cross beam, and a clamping hole is formed in the extending direction of the clamping plate 161, which is opposite to the sliding hole; a friction ferrule 162 is arranged in the clamping hole, and one side of the friction ferrule 162 is tightly attached to the driving end of the piezoelectric clamping piece; the piezoelectric clamp is fixedly mounted to the clamping plate 161; the slide bar 130 is arranged in the friction ferrule 162 in a penetrating way, and the friction ferrule 162 clamps or releases the slide bar 130 under the driving of the piezoelectric clamping piece.
The piezoelectric clamping piece and piezoelectric jacking piece 180 in the clamping assembly 160 are piezoelectric stack drivers; the piezoelectric stack driver is an existing functional component and can be purchased and obtained directly from the market, and is also called as a piezoelectric stack. The operating principle of one piezoelectric stack driver can be summarized as that the piezoelectric stack is a rod-shaped structure arranged along the vertical direction and is formed by stacking a plurality of piezoelectric ceramic sheets. One end of the piezoelectric stack is fixed with the fixed block, and when an electric signal is applied to excite the piezoelectric stack, the piezoelectric stack can deform along the length direction, so that output displacement is generated at the other end of the piezoelectric stack, and the micron-level or nanometer-level telescopic driving effect can be realized.
The magnetic lifting assembly 170 includes: a permanent magnet 171 and an electromagnetic coil 172; the radial dimension of the electromagnetic coil 172 is larger than that of the permanent magnet 171; the permanent magnet 171 is annular and horizontally sleeved at the upper end of the sliding rod 130; the electromagnetic coil 172 is fixedly installed on the top of the sliding hole, and is disposed outside the permanent magnet 171 coaxially with the permanent magnet 171.
The nano platform further comprises an atomic force microscope 210, a controller and a range finder; the atomic force microscope 210 is mounted at the bottom of the output platform 120; the distance meter is used for detecting the distance between the atomic force microscope 210 and a measured target; the distance meter is a capacitance distance meter or a Doppler distance meter; the controller, the clamping assembly 160, the strain gauge, the magnetic lifting assembly 170, the piezoelectric jacking piece 180 and the range finder are electrically connected.
The controller is provided with an adjusting and controlling method for controlling the distance between the atomic force microscope 210 and the measured object, and the adjusting and controlling method comprises the following steps:
the rangefinder detects the distance between the atomic force microscope 210 and the target being measured in real time. Obtaining a distance parameter;
when the distance parameter exceeds the preset range, the controller controls the magnetic lifting assembly 170 and/or the piezoelectric jacking piece 180 according to the comparison result of the distance parameter and the preset range, so that the closed-loop feedback control or the closed-loop feedback and feedforward control of the distance between the atomic force microscope 210 and the measured target is realized, and the distance parameter is restored to be within the preset range;
when the nano platform resonates, the controller sends a control command to the clamping assembly 160, so that the clamping assembly 160 clamps and brakes the sliding rod 130, and when the nano platform resonates and is eliminated, the clamping assembly 160 releases the sliding rod 130.
In particular, in practical applications, the nano platform is installed above the motion platform 220 for bearing the measured object, the supporting arms at the two ends of the gantry 110 are connected with the frame of the moving platform 220, when the motion stage 220 moves, the gantry 110 above the nano-stage transmits displacement excitation of high frequency components to the afm 210, which can be obtained from the amplitude-frequency characteristic curve shown in fig. 4, because the two sides of the output platform 120 are supported by the flexible mechanism formed by the first flexible plate spring element 140 and the second flexible plate spring element 150, the displacement amplitude of the output platform 120 is already smaller than the allowable range (the allowable range can be set by practical application requirements), the output platform 120 does not exhibit the influence of high-frequency component excitation, and the distance between the atomic force microscope 210 and the measured object is kept constant under the high-frequency band displacement excitation.
Under the high-frequency displacement excitation, the distance between the atomic force microscope 210 and the measured target is monitored in real time through a capacitance or Doppler distance meter, closed-loop feedback control or closed-loop feedback plus feedforward control is carried out, the closed-loop control bandwidth is enabled to be overlapped with the high-frequency passive vibration isolation frequency band, and the distance between the atomic force microscope 210 and the measured target under the high-frequency displacement excitation is guaranteed to be constant in a large frequency band.
In the low-frequency active control frequency band, in order to prevent the displacement response (shown at 76.24 μm in fig. 4) of the excited resonance frequency component, a clamping assembly 160 is added to clamp and brake the place where the loop 162 is rubbed on the sliding rod 130, so as to eliminate or reduce the excessive displacement vibration, and because the sliding rod 130 is rigidly connected with the output platform 120 and the displacement is limited only in the vertical direction by the linear bearing 131, the excessive displacement change caused by the excitation of the resonance point frequency (resonance point) component is effectively reduced by braking the sliding rod 130, i.e. the output platform 120.
In addition, since the first flexible plate spring element 140 and the second flexible plate spring element 150 directly connected to the output platform 120 form a flexible mechanism with high flexibility and low rigidity, and the output platform 120 and the suspended atomic force microscope 210 have high mass and are deformed for a long time, and the flexible mechanism is easy to exceed the yield limit, a pair of hard spring elements 153 is added to counteract the gravity of the output platform 120 and the suspended atomic force microscope 210, and the tension of the hard spring elements 153 is not sensitive to the deformation (in micron order), so that a constant tension force is considered to be provided to counteract the gravity. Similarly, because the flexible mechanism directly connected to the output platform 120 has a problem of start delay (phase delay) when the piezoelectric jacking member 180 actively controls the output platform 120, which is not favorable for fast response of the active control of the output platform 120, an electromagnetic force is generated between the permanent magnet 171 sleeved on the sliding rod 130 and the electromagnetic coil 172, and the direction and magnitude of the electromagnetic force are changed by changing the magnitude and direction of the current, so that the start delay of the motion platform 220 caused by insufficient deformation force (small rigidity) of the flexible mechanism is reduced during start.
The nano platform ensures that the distance between the atomic force microscope 210 and the measured target is always stabilized within a set range under the excitation of input displacement in a wider frequency band through low-frequency active control and high-frequency passive vibration isolation.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the directions or positional relationships shown in the drawings, and are for convenience of description and simplicity of description only, and in the case of not making a reverse description, these directional terms do not indicate and imply that the device or element referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …", "above … …", "above … …, on a surface", "above", and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.
The technical principle of the present invention is described above in connection with specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without inventive effort, which would fall within the scope of the present invention.
Claims (9)
1. An active/passive vibration suppressing fused nano-platform, comprising: the device comprises a portal frame, an output platform, a sliding rod, a first flexible plate spring piece, a second flexible plate spring piece, a hard spring piece, a clamping assembly, a strain gauge, a magnetic lifting assembly, a piezoelectric jacking piece and a distance meter;
the portal frame comprises a cross beam and supporting arms vertically connected with two ends of the cross beam; the cross beam is provided with a sliding hole along the vertical direction; the supporting arm is provided with an adjusting cavity along the horizontal transverse direction; the adjusting cavities are arranged in a left-right symmetrical mode relative to the extending direction of the sliding hole; a second flexible plate spring piece is arranged in the adjusting cavity, and the lower end of the second flexible plate spring piece is fixedly connected with the bottom of the adjusting cavity through a piezoelectric jacking piece;
the magnetic lifting piece is arranged at the top of the sliding hole, and the output platform is horizontally arranged right below the sliding hole; the upper end of the sliding rod penetrates through the sliding hole and is limited and arranged in the magnetic lifting assembly; the lower end of the sliding rod is rigidly connected with the output platform along the vertical direction;
the top of the output platform is vertically connected with the bottom of the cross beam through the hard spring piece;
the left side and the right side of the output platform are symmetrically provided with the first flexible plate spring pieces; one side of the first flexible plate spring part is fixedly connected with the output platform, and the other side of the first flexible plate spring part is fixedly connected with the second flexible plate spring part on the corresponding side;
the hard spring part, the first flexible plate spring part and the second flexible plate spring part provide vertical upward elastic force for the output platform, and the output platform can slide along the vertical direction under the action of the magnetic lifting assembly and/or the piezoelectric jacking part; the clamping assembly is arranged on the cross beam and used for clamping or loosening the sliding rod, and the strain gauge is arranged on the flexible spring piece.
2. The active/passive vibration suppressing fusion nano-platform of claim 1, wherein the first flexible plate spring element is an S-shaped spring element;
the second flexible plate spring element comprises an elastic plate element and a jacking seat; the jacking seat is positioned in the adjusting cavity, the piezoelectric jacking piece is arranged between the jacking seat and the bottom of the adjusting cavity, and the piezoelectric jacking piece is used for driving the jacking seat to move along the vertical direction; one vertical side surface of the jacking seat is connected with the S-shaped spring piece at the corresponding position; two sides opposite to the jacking seat are respectively connected with two sides of the adjusting cavity through the elastic plate;
the S-shaped spring member has a greater compliance than the elastic plate member and a lesser stiffness than the elastic plate member.
3. The active/passive vibration suppression fusion nano platform according to claim 2, wherein two hard spring members are symmetrically arranged on the left side and the right side of the sliding rod; the hard spring part is a spiral spring, the flexibility of the spiral spring is smaller than that of the elastic plate, and the rigidity of the spiral spring is larger than that of the elastic plate.
4. The active/passive vibration suppressing nano platform of claim 3, wherein the S-shaped spring member and the elastic plate member are made of aircraft aluminum; the coil spring is made of iron or steel.
5. The active/passive vibration suppressing fusion nano-platform of claim 1, wherein the clamping assembly comprises a clamping plate, a friction ferrule and a piezoelectric clamp; a linear bearing is arranged in the sliding hole; the clamping plate is arranged at the bottom of the cross beam, and a clamping hole is formed in the extending direction of the clamping plate, which is opposite to the sliding hole; a friction ferrule is arranged in the clamping hole, and one side of the friction ferrule is tightly attached to the driving end of the piezoelectric clamping piece; the piezoelectric clamping piece is fixedly arranged on the clamping plate; the sliding rod penetrates through the friction ferrule, and the friction ferrule clamps or releases the sliding rod under the driving of the piezoelectric clamping piece.
6. The active/passive vibration suppressing fusion nano-platform of claim 5, wherein the piezoelectric clamping member and the piezoelectric jacking member in the clamping assembly are piezoelectric stack actuators.
7. The active/passive vibration suppression fusion nano-platform according to claim 1, wherein the magnetic lifting assembly comprises: a permanent magnet and an electromagnetic coil; the radial dimension of the electromagnetic coil is larger than that of the permanent magnet;
the permanent magnet is annular and is horizontally sleeved at the upper end of the sliding rod;
the electromagnetic coil is fixedly arranged at the top of the sliding hole and is arranged on the outer side of the permanent magnet in a coaxial mode with the permanent magnet.
8. The active/passive vibration suppressing fusion nano-platform of claim 1, further comprising an atomic force microscope, a controller and a range finder; the atomic force microscope is arranged at the bottom of the output platform; the distance measuring instrument is used for detecting the distance between the atomic force microscope and a measured target; the distance meter is a capacitance distance meter or a Doppler distance meter;
the controller, clamping component, foil gage, magnetism promote subassembly, piezoelectricity jacking piece and distancer electric connection.
9. The active/passive vibration-suppressing fusion nano-platform according to claim 8, wherein the controller is provided with a regulation control method for controlling the distance between the atomic force microscope and the measured object, and the regulation control method comprises the following steps:
the distance measuring instrument detects the distance between the atomic force microscope and the measured target in real time to obtain distance parameters;
when the distance parameter exceeds the preset range, the controller controls the magnetic lifting assembly and/or the piezoelectric jacking assembly according to the comparison result of the distance parameter and the preset range, so that the closed-loop feedback control or the closed-loop feedback and feedforward control of the distance between the atomic force microscope and the measured target is realized, and the distance parameter is restored to be within the preset range;
when the nano platform resonates, the controller sends a control instruction to the clamping assembly, so that the clamping assembly clamps and brakes the sliding rod, and after the nano platform resonates and is eliminated, the clamping assembly loosens the sliding rod.
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