CN113202897A - Active and passive vibration damping device based on piezoelectric ceramic and six-degree-of-freedom vibration damping system - Google Patents

Active and passive vibration damping device based on piezoelectric ceramic and six-degree-of-freedom vibration damping system Download PDF

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CN113202897A
CN113202897A CN202110493239.7A CN202110493239A CN113202897A CN 113202897 A CN113202897 A CN 113202897A CN 202110493239 A CN202110493239 A CN 202110493239A CN 113202897 A CN113202897 A CN 113202897A
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vibration damping
wedge
active
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block
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李小清
李嘉辉
张争光
徐振高
陈学东
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Huazhong University of Science and Technology
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/002Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion characterised by the control method or circuitry
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/005Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
    • F16F15/007Piezoelectric elements being placed under pre-constraint, e.g. placed under compression
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/08Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with rubber springs ; with springs made of rubber and metal
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/28Counterweights, i.e. additional weights counterbalancing inertia forces induced by the reciprocating movement of masses in the system, e.g. of pistons attached to an engine crankshaft; Attaching or mounting same
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2222/00Special physical effects, e.g. nature of damping effects
    • F16F2222/08Inertia
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2224/00Materials; Material properties
    • F16F2224/02Materials; Material properties solids
    • F16F2224/0283Materials; Material properties solids piezoelectric; electro- or magnetostrictive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/18Control arrangements

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  • Vibration Prevention Devices (AREA)

Abstract

The invention discloses an active and passive vibration damping device based on piezoelectric ceramics and a six-degree-of-freedom vibration damping system, belonging to the technical field of mechanical dynamics, and comprising a load connector, an active and passive vibration damping mechanism, an intermediate mass block, a speed sensor, a piezoelectric ceramic actuator, a displacement amplification mechanism, a basic platform and a controller; one end of the passive vibration damping mechanism is connected with the load connector, and the other end of the passive vibration damping mechanism is connected with the middle mass block; the lower part of the middle mass block is connected with a displacement amplifying mechanism; the speed sensor collects the motion speed of the middle mass block and feeds back a speed signal to the controller, the controller calculates a voltage signal applied to the piezoelectric ceramic actuator according to the speed signal so as to enable the piezoelectric ceramic actuator to generate deformation displacement in the horizontal direction, and the displacement amplification mechanism converts the horizontal displacement into vertical displacement and drives the middle mass block to realize vibration reduction. The active control system and the passive vibration reduction system are combined, so that the device can effectively inhibit low-frequency resonance, isolate low-frequency vibration and has a good high-frequency vibration reduction effect.

Description

Active and passive vibration damping device based on piezoelectric ceramic and six-degree-of-freedom vibration damping system
Technical Field
The invention belongs to the technical field of mechanical dynamics, and particularly relates to an active and passive vibration damping device based on piezoelectric ceramics and a six-degree-of-freedom vibration damping system.
Background
With the rapid development of the fields of microelectronics, aerospace and the like, the requirements of ultra-precise detection and processing on a very large scale integrated circuit, an ultra-precise numerical control machine tool and the like are higher and higher, and a vibration reduction system is an important part of the fields.
The vibration reduction system mainly comprises active vibration reduction and passive vibration reduction, most of the traditional vibration absorbers such as friction damping devices and spring damping devices are passive vibration reduction devices, and although the traditional vibration absorbers have large damping force and strong bearing capacity, the traditional vibration absorbers do not have real-time controllability and slow response speed. In the whole structure of the vibration damping unit, most of the vibration damping units adopt a combination of a passive vibration damping element and an active vibration damping unit in a certain mode, for example, the air spring is in active and passive hybrid parallel connection with the voice coil motor, the diaphragm spring is in active and passive hybrid series connection with the voice coil motor, and the like, so that the vibration damping effect can be improved.
The air spring needs an additional air source, the voice coil motor consumes more energy, in addition, most of traditional micro-displacement actuators adopt a linear motion conversion mechanism, the precision is relatively low and can only reach micron-sized generally, while the piezoelectric ceramic actuator has the advantages of small volume, large thrust, high displacement resolution, fast frequency response and the like.
Disclosure of Invention
In view of the above defects or improvement requirements of the prior art, the present invention provides an active and passive vibration damping device and a six-degree-of-freedom vibration damping system based on piezoelectric ceramics, and aims to effectively suppress low-frequency resonance and isolate low-frequency vibration by combining an active control system composed of a speed sensor, a piezoelectric ceramic actuator and a displacement amplification mechanism with a passive vibration damping system of a passive vibration damping mechanism, and provide a good high-frequency vibration damping effect.
To achieve the above object, according to one aspect of the present invention, there is provided a piezoelectric ceramic-based active and passive damping device, including a load connector, a passive damping mechanism, an intermediate mass, a speed sensor, an active damping mechanism, a base platform, and a controller;
one end of the passive vibration damping mechanism is connected with the load connector, and the other end of the passive vibration damping mechanism is connected with the intermediate mass block; the speed sensor is embedded in the middle quality block;
the active vibration reduction mechanism comprises a piezoelectric ceramic actuator and a displacement amplification mechanism, and the piezoelectric ceramic actuator and the displacement amplification mechanism are both arranged in a cavity of the base platform and are in contact arrangement; the upper part of the displacement amplification mechanism is connected with the middle mass block;
the speed sensor is used for acquiring the movement speed of the intermediate mass block along the axial direction of the load connector and feeding back a speed signal to the controller; the controller is used for calculating a voltage signal applied to the piezoelectric ceramic actuator according to the speed signal so as to enable the piezoelectric ceramic actuator to generate deformation along the horizontal direction of the load connector; the displacement amplification mechanism is used for converting the deformation displacement of the piezoelectric ceramic actuator in the horizontal direction into the displacement of the piezoelectric ceramic actuator along the axial direction of the load connector, so that the middle mass block is driven to move, and vibration reduction is realized.
Preferably, the displacement amplification mechanism comprises a first wedge-shaped block, a rubber pad and a second wedge-shaped block; the vertical surface of the first wedge-shaped block is abutted against the piezoelectric ceramic actuator, and the rubber pad is fixedly arranged on the wedge-shaped surface of the first wedge-shaped block; the wedge-shaped surface of the second wedge-shaped block is in contact with the rubber pad, the vertical surface of the second wedge-shaped block is abutted against the inner wall surface of the base platform, and the top of the second wedge-shaped block is connected with the middle mass block;
the first wedge-shaped block moves horizontally along the bottom surface of the base platform under the driving of the piezoelectric ceramic actuator, and relative friction force and supporting force are generated between the rubber pad and the wedge-shaped surface of the second wedge-shaped block; and the second wedge-shaped block vertically moves along the inner wall surface of the base platform under the action of resultant force so as to convert the deformation displacement of the piezoelectric ceramic actuator along the horizontal direction into the vertical displacement of the intermediate mass block along the axial direction of the load connector.
Preferably, a vertical limiting piece is arranged at the bottom of the foundation platform, and a groove matched with the limiting piece is formed in the second wedge-shaped block; the limiting piece is used for enabling the second wedge block to move along the axial direction of the load connector.
Preferably, the stop member is a cylindrical stop member and the slot is a cylindrical slot.
Preferably, a metal gasket and a rubber gasket are further arranged between the second wedge-shaped block and the middle mass block, so that the second wedge-shaped block is completely attached to the middle mass block.
Preferably, the wedge angle θ of the first wedge block ranges from 0 ° to 84.29 °.
Preferably, the passive vibration damping mechanism is a rubber block.
According to another aspect of the present invention, there is provided a six degree of freedom vibration damping system comprising an active and passive piezoelectric ceramic based damping device as described above;
still include the load platform, active passive damping device is equipped with six, install respectively in on the load platform.
Preferably, the six active and passive vibration damping devices are respectively arranged on the side surface and the bottom surface of the load platform by taking the center of the load platform as an origin.
Preferably, the six active and passive vibration damping devices are respectively a first vibration damping unit, a second vibration damping unit, a third vibration damping unit, a fourth vibration damping unit, a fifth vibration damping unit and a sixth vibration damping unit;
the first vibration reduction unit is arranged on the side surface of the load platform and is positioned on the X-axis positive half shaft;
the second vibration reduction unit is arranged on the side surface of the load platform and is positioned on the Y-axis negative half shaft;
the third vibration reduction unit is arranged on the side surface of the load platform and is positioned in an area formed by the X-axis negative half shaft and the Y-axis positive half shaft;
the fourth vibration reduction unit, the fifth vibration reduction unit and the sixth vibration reduction unit are respectively arranged on the bottom surface of the load platform, the fourth vibration reduction unit and the fifth vibration reduction unit are respectively positioned on two sides of the Y axis, the connecting line of the fourth vibration reduction unit and the fifth vibration reduction unit is parallel to the connecting line of the X axis, and the sixth vibration reduction unit is positioned on the positive half shaft of the Y axis.
In general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:
1. the active and passive vibration damping device based on piezoelectric ceramics is compounded with the passive vibration damping system of the passive vibration damping mechanism through the active control system formed by the speed sensor, the piezoelectric ceramic actuator and the displacement amplification mechanism, so that the device can effectively inhibit low-frequency resonance, isolate low-frequency vibration and has good high-frequency vibration damping effect.
2. The active and passive vibration damping device based on the piezoelectric ceramics provided by the invention samples the vibration speed of the middle mass block through the speed sensor, and adds the speed feedback control, so that the output force of the piezoelectric ceramic actuator is in direct proportion to the absolute speed of the middle mass block, and the directions are opposite, thereby increasing the absolute damping of the system, and having the characteristics of inhibiting a resonance peak and keeping good high-frequency vibration isolation performance.
3. In the active and passive vibration damping device based on piezoelectric ceramics, the wedge-shaped displacement amplification mechanism adopts the wedge-shaped block to convert the horizontal displacement into the vertical displacement and amplify the displacement in a certain proportion, so as to make up for the defect of insufficient stroke.
4. The passive vibration damping mechanism in the active and passive vibration damping device based on piezoelectric ceramics adopts cylindrical rubber, so that the rigidity of the device can be reduced, the natural frequency of the device can be reduced, and the bandwidth of passive vibration isolation is increased.
5. According to the six-degree-of-freedom vibration reduction system provided by the invention, six vibration reduction units are arranged on the load platform, and each vibration reduction unit has a vibration reduction effect with one degree of freedom, so that vibration reduction in the six-degree-of-freedom direction can be realized.
Drawings
FIG. 1 is a schematic structural diagram of an active and passive vibration damping device based on piezoelectric ceramics according to the present invention;
FIG. 2 is a schematic structural diagram of a displacement amplifying mechanism in the active and passive vibration damping device based on piezoelectric ceramics according to the present invention;
FIG. 3 is a schematic diagram of the analysis of the stress and displacement of a first wedge-shaped block in the active and passive vibration damping device based on piezoelectric ceramics according to the present invention;
FIG. 4 is a schematic view of the analysis of the stress and displacement of the second wedge-shaped block in the active and passive vibration damping device based on piezoelectric ceramics according to the present invention
FIG. 5 is a schematic diagram of active and passive vibration damping of the active and passive vibration damping device based on piezoelectric ceramics according to the present invention;
FIG. 6 is a comparison graph of the transmission rates of passive vibration reduction and active and passive vibration reduction in the active and passive vibration reduction device based on piezoelectric ceramics according to the present invention;
fig. 7 is a schematic structural diagram of the six-degree-of-freedom vibration damping system of the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1 is a basic platform; 2 is a piezoelectric ceramic actuator; 3-1 is a first wedge-shaped block; (ii) a 3-2 is a rubber pad; 3-3 is a second wedge-shaped block; 4-1 is a metal gasket; 4-2 is a rubber gasket; 5 is a middle mass block; 6 is a speed sensor; 7 is a passive vibration damping mechanism; 8 is a load connector; 1a is a first vibration damping unit; 2b is a second damping unit; 3c is a third damping unit; 4d is a fourth damping unit; 5e is a fifth damping unit; 6f is a sixth damping unit; 7g is a load platform.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1, the present invention provides an active and passive vibration damping device based on piezoelectric ceramics, including a load connector 8, a passive vibration damping mechanism 7, an intermediate mass block 5, a speed sensor 6, an active vibration damping mechanism, a base platform 1 and a controller, wherein the active vibration damping mechanism includes a piezoelectric ceramic actuator 2 and a displacement amplification mechanism.
Specifically, the load connector 8 is used for connecting a load, one end of the passive damping mechanism 7 is connected with the load connector 8, and the other end of the passive damping mechanism is connected with the intermediate mass block 5. In a preferred embodiment of the present invention, the passive vibration damping mechanism 7 is a rubber block, which has a simple structure, and can reduce the rigidity of the device and increase the bandwidth of the passive vibration isolation.
The speed sensor 6 is an absolute speed sensor and is used for acquiring the absolute speed of the middle mass block 5.
The piezoelectric ceramic actuator 2 and the displacement amplification mechanism are both arranged in a cavity of the base platform 1 and are arranged in a contact manner, and the upper part of the displacement amplification mechanism is connected to the middle mass block 5. The piezoelectric ceramic actuator 2 provides output force for the active vibration reduction mechanism, and the displacement amplification mechanism can provide gain for the stroke of the piezoelectric ceramic actuator 2 for amplification. The speed sensor 6 samples the speed of the middle mass block 5, and the driver outputs a certain voltage to drive the piezoelectric ceramic actuator 2 after passing through the controller, so that the output force displacement compensation can be performed.
To explain further, as shown in fig. 1, the piezoceramic actuator 2 is horizontally disposed and can only bear axial force and perform axial micro-displacement motion. The displacement amplification mechanism comprises a first wedge-shaped block 3-1, a rubber pad 3-2 and a second wedge-shaped block 3-2, the piezoelectric ceramic actuator 2 extends to push the first wedge-shaped block 3-1, the rubber pad 3-2 is attached to the first wedge-shaped block 3-1, the second wedge-shaped block 3-3 is embedded in the foundation platform 1, the first wedge-shaped block 3-1 pushes the second wedge-shaped block 3-3 to convert the horizontal displacement into the vertical displacement and amplify the displacement, a metal gasket 4-1 and a rubber gasket 4-2 are also arranged between the second wedge-shaped block 3-3 and the middle mass block 5, the metal gasket 4-1 and the rubber gasket 4-2 enable the second wedge-shaped block 3-3 to be better attached to the middle mass block 5. In a preferred embodiment of the present invention, the passive damping mechanism 7 is a rubber block, which can reduce the rigidity of the system, and the load connector 8 is connected with the load.
Referring to fig. 2, the displacement amplification mechanism mainly includes a first wedge-shaped block 3-1 and a second wedge-shaped block 3-3, the piezoceramic actuator 2 is controlled by a voltage to output a force with a certain magnitude and generate a micro displacement, and the force is transmitted to the second wedge-shaped block 3-3 through the first wedge-shaped block 3-1, so that the second wedge-shaped block 3-3 outputs a force with a corresponding magnitude and generates a micro displacement which amplifies a certain proportion.
In the embodiment of the present invention, when the piezoceramic actuator 2 is forced to generate a small displacement x, the first wedge 3-1 acts on the second wedge 3-3 through the contact surface, and the vertical displacement of the second wedge 3-3 is y ═ xtan θ. As shown in FIG. 3, the whole force analysis is performed on the displacement amplification mechanism, wherein the friction factor of the contact surface of the first wedge-shaped block and the base platform is mu1The inclined surface of the first wedge-shaped block is padded with a rubber pad, and the friction factor between the rubber pad and the contact inclined surface of the second wedge-shaped block is mu2
And (3) carrying out stress analysis on the whole wedge-shaped block:
horizontal direction: f ═ FBranch stand+F1 (1)
Vertical direction: fN=(m+M)g+FGo out (2)
As shown in FIG. 4, the first wedge block and the second wedge block are respectively subjected to force analysis, when the piezoceramic actuator has a small displacement, the first wedge block and the second wedge block are pushed to move, and the friction of the contact surfaces is sliding friction.
And (3) analyzing the stress of the first wedge-shaped block:
horizontal direction: f. of2cosθ+f1sinθ+f1=F (3)
Vertical direction: f. of2sinθ+f2=mg+F1cosθ (4)
And (3) analyzing the stress of the second wedge-shaped block:
horizontal direction: f. of2cosθ+F1sinθ=FBranch stand (5)
Vertical direction: (F)Go out+Mg)+f2sinθ=F1cosθ (6)
The above-mentioned relations (1), (2), (3), (4), (5) and (6) can be combined to obtain
Figure BDA0003053267290000071
When the magnitude of theta takes the self-locking angle, the wedge block cannot move no matter how large the thrust F is, and the following relational expression is satisfied:
F1cosθ<Mg+f2sinθ (8)
further, it is possible to obtain:
Figure BDA0003053267290000072
at this time, theta only needs to satisfy:
Figure BDA0003053267290000073
preferably, take μ1=0.4,μ2When the temperature was 0.1, 84.29 DEG was obtained<θ<Self-locking at 90 deg. or not at practical use, so theta should be 0 deg<θ<84.29°。
In a preferred embodiment of the present invention, θ is 73 °. At this time, y is 3.27x, and the micro displacement in the horizontal direction is converted into the vertical displacement by 3.27 times. And the maximum upward force of the load connector is
FGo out=0.18(F-0.4mg)-Mg
Referring to fig. 5, fig. 5 is a schematic diagram of active and passive vibration damping of the active and passive vibration damping device based on piezoelectric ceramics according to the present invention, which is implemented by a conventional passive vibration damping, an active actuator and an internal feedback loop, where the internal feedback loop is implemented by installing a speed sensor 6 on the middle mass block 5 to measure the motion speed thereof, inputting the measured motion speed to a controller to perform active control operation, and finally controlling and driving the output of the piezoelectric ceramic actuator 2.
Modeling the integral structure of the single-degree-of-freedom active vibration reduction unit, mlIs the equivalent mass of the load, klEquivalent stiffness of the load connector and the intermediate mass, clThe equivalent damping of the load connector and the middle mass block mainly comprises a rubber block. m isiIs the mass of the intermediate mass, kaThe equivalent damping is relatively small and can be ignored for the equivalent rigidity from the basic platform to the middle mass block. x is the number ofbAmount of vibration displacement of the base platform, xiIs the amount of vibrational displacement, x, of the intermediate masslIs the amount of vibration displacement of the load connector. F is the output force of the inventive actively controlled piezoceramic actuator,
Figure BDA0003053267290000081
kfis the absolute velocity feedback gain.
The simple dynamics formula of the system when no active control is added:
Figure BDA0003053267290000082
Figure BDA0003053267290000083
transfer function formula:
Figure BDA0003053267290000084
its simple dynamics formula when adding active control:
Figure BDA0003053267290000085
Figure BDA0003053267290000086
transfer function formula:
Figure BDA0003053267290000091
referring to fig. 6, fig. 6 is a graph comparing transmission rates of passive vibration damping and active vibration damping in the active and passive vibration damping device based on piezoelectric ceramics according to the present invention. The absolute damping of the device is increased due to the action of the piezoceramic actuators. The absolute velocity feedback can inhibit the formants, and the high-frequency vibration isolation effect is better.
As the active and passive vibration damping device based on the piezoelectric ceramics can only realize vibration damping in one degree of freedom, in the embodiment of the invention, six vibration damping devices are combined to establish a six-degree-of-freedom vibration damping system to realize six-degree-of-freedom vibration damping of a load platform.
Referring to fig. 7, an embodiment of the invention provides a six-degree-of-freedom vibration damping system, taking the center of the load platform 7g as an origin, and defining XYZ directions as coordinate system directions shown in fig. 7. Six vibration damping devices are arranged on the side and bottom surfaces of the load platform 7g, respectively. The first vibration reduction unit 1a is arranged on the side surface and falls on an X positive half shaft, the second vibration reduction unit 2b is arranged on the side surface and falls on a Y negative half shaft, the third vibration reduction unit 3c is arranged on the side surface and is positioned in the area formed by the X negative half shaft and the Y positive half shaft, the fourth vibration reduction unit 4d, the fifth vibration reduction unit 5e and the sixth vibration reduction unit 6f are arranged on the lower plane of the load platform 7g, the connecting lines of the three positions form a triangle, the fourth vibration reduction unit 4d and the fifth vibration reduction unit 5e are respectively arranged on two sides of the Y shaft, the connecting lines of the fourth vibration reduction unit and the fifth vibration reduction unit are parallel to the connecting line of the X shaft, and the sixth vibration reduction unit 6f falls on the Y positive half shaft. The six-freedom vibration reduction system of the invention realizes vibration reduction in six directions as follows:
translation in the X-axis direction: the vibration of the six-degree-of-freedom vibration damping system in the first direction is actively controlled by the first vibration damping unit 1 a.
Translation in the Y-axis direction: the vibration of the six-degree-of-freedom vibration damping system in the second direction is actively controlled by the second vibration damping unit 2 b.
Translation in the Z-axis direction: the vibration of the six-degree-of-freedom vibration damping system in the third direction is jointly acted by the fourth vibration damping unit 4d, the fifth vibration damping unit 5e and the sixth vibration damping unit 6f, and the motions are the same (the micro-displacement is the same), so that the active vibration damping control in the Z-axis direction can be realized.
Rotation about the X-axis direction: the vibration of the six-degree-of-freedom vibration damping system in the fourth direction is jointly acted by the fourth vibration damping unit 4d, the fifth vibration damping unit 5e and the sixth vibration damping unit 6f, wherein the fourth vibration damping unit 4d and the fifth vibration damping unit 5e (the micro displacement is the same) and the action is different from that of the sixth vibration damping unit 6f, a certain torque can be generated, and active vibration damping control around the X-axis direction can be realized.
Rotation about the Y-axis direction: the vibration of the six-degree-of-freedom vibration damping system in the fifth direction is jointly acted by the fourth vibration damping unit 4d and the fifth vibration damping unit 5e, wherein the fourth vibration damping unit 4d and the fifth vibration damping unit 5e have different actions (different micro-displacements), can generate a certain torque, and can realize active vibration damping control around the Y-axis direction.
Rotation about the Z-axis: the vibration of the six-degree-of-freedom vibration damping system in the sixth direction is acted by the third vibration damping unit 3c, so that moment with a certain magnitude can be generated, and active vibration damping control in the Z-axis direction can be realized.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (10)

1. An active and passive vibration damping device based on piezoelectric ceramics is characterized by comprising a load connector (8), a passive vibration damping mechanism (7), an intermediate mass block (5), a speed sensor (6), an active vibration damping mechanism, a basic platform (1) and a controller;
one end of the passive vibration damping mechanism (7) is connected with the load connector (8), and the other end of the passive vibration damping mechanism is connected with the intermediate mass block (5); the speed sensor (6) is embedded in the middle mass block (5);
the active vibration reduction mechanism comprises a piezoelectric ceramic actuator (2) and a displacement amplification mechanism, wherein the piezoelectric ceramic actuator (2) and the displacement amplification mechanism are arranged in a cavity of the base platform (1) in a contact manner; the upper part of the displacement amplification mechanism is connected with the middle mass block (5);
the speed sensor (6) is used for acquiring the movement speed of the intermediate mass block (5) along the axial direction of the load connector (8) and feeding a speed signal back to the controller; the controller is used for calculating a voltage signal applied to the piezoceramic actuator (2) according to the speed signal so as to enable the piezoceramic actuator (2) to generate deformation along the horizontal direction of the load connector (8); the displacement amplification mechanism is used for converting the deformation displacement of the piezoelectric ceramic actuator (2) in the horizontal direction into the displacement of the piezoelectric ceramic actuator along the axial direction of the load connector (8), so that the middle mass block is driven to move, and vibration reduction is realized.
2. The active and passive vibration damping device based on piezoceramics according to claim 1, characterized in that, the displacement amplification mechanism includes a first wedge block (3-1), a rubber pad (3-2) and a second wedge block (3-3); the vertical surface of the first wedge-shaped block (3-1) is abutted against the piezoelectric ceramic actuator (2), and the rubber pad (3-2) is fixedly arranged on the wedge-shaped surface of the first wedge-shaped block; the wedge-shaped surface of the second wedge-shaped block (3-3) is in contact with the rubber pad (3-2), the vertical surface of the second wedge-shaped block is abutted against the inner wall surface of the base platform (1), and the top of the second wedge-shaped block (3-3) is connected with the middle mass block (5);
the first wedge-shaped block (3-1) is driven by the piezoelectric ceramic actuator (2) to horizontally move along the bottom surface of the base platform (1), and relative friction force and supporting force are generated between the wedge-shaped surfaces of the rubber pad (3-2) and the second wedge-shaped block (3-3); and the second wedge-shaped block (3-3) vertically moves along the inner wall surface of the base platform (1) under the action of resultant force so as to convert the deformation displacement of the piezoelectric ceramic actuator (2) along the horizontal direction into the vertical displacement of the middle mass block (5) along the axial direction of the load connector (8).
3. The active and passive vibration damping device based on piezoceramics according to claim 2, characterized in that, the bottom of basic platform (1) is equipped with vertical locating piece, the second wedge block (3-3) is equipped with the groove that matches with the locating piece; the limiting piece is used for enabling the second wedge block (3-3) to move along the axial direction of the load connector (8).
4. The piezoceramic based active and passive vibration damping device according to claim 3, wherein the limiting member is a cylindrical limiting member and the slot is a cylindrical slot.
5. The active and passive vibration damping device based on piezoceramics according to claim 2 or 4, characterized in that, still be equipped with metal gasket (4-1) and rubber gasket (4-2) between second wedge (3-3) and middle quality piece (5) for make second wedge (3-3) and middle quality piece (5) laminate completely.
6. The active and passive damping device based on piezoceramics according to claim 2, characterized in that the wedge angle θ of first wedge block (3-1) ranges from 0 ° to 84.29 °.
7. The active and passive vibration damping device based on piezoceramics according to claim 2, characterized in that, passive damping mechanism (7) is the rubber block.
8. A six-degree-of-freedom vibration damping system comprising a piezoceramic based active and passive vibration damping device according to any one of claims 1 to 7;
still include the load platform, active passive damping device is equipped with six, install respectively in on the load platform.
9. The six-degree-of-freedom vibration damping system according to claim 8, wherein the six active and passive vibration damping devices are respectively disposed on the side and bottom surfaces of the load platform with the center of the load platform as an origin.
10. The six-degree-of-freedom vibration damping system according to claim 9, wherein the six active and passive vibration damping devices are respectively a first vibration damping unit, a second vibration damping unit, a third vibration damping unit, a fourth vibration damping unit, a fifth vibration damping unit and a sixth vibration damping unit;
the first vibration reduction unit is arranged on the side surface of the load platform and is positioned on the X-axis positive half shaft;
the second vibration reduction unit is arranged on the side surface of the load platform and is positioned on the Y-axis negative half shaft;
the third vibration reduction unit is arranged on the side surface of the load platform and is positioned in an area formed by the X-axis negative half shaft and the Y-axis positive half shaft;
the fourth vibration reduction unit, the fifth vibration reduction unit and the sixth vibration reduction unit are respectively arranged on the bottom surface of the load platform, the fourth vibration reduction unit and the fifth vibration reduction unit are respectively positioned on two sides of the Y axis, the connecting line of the fourth vibration reduction unit and the fifth vibration reduction unit is parallel to the connecting line of the X axis, and the sixth vibration reduction unit is positioned on the positive half shaft of the Y axis.
CN202110493239.7A 2021-05-07 2021-05-07 Active and passive vibration damping device based on piezoelectric ceramic and six-degree-of-freedom vibration damping system Pending CN113202897A (en)

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