CN206036114U - Main passive integration subtracts isolation mounting suitable for large amplitude and broadband - Google Patents

Main passive integration subtracts isolation mounting suitable for large amplitude and broadband Download PDF

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Publication number
CN206036114U
CN206036114U CN201621068821.XU CN201621068821U CN206036114U CN 206036114 U CN206036114 U CN 206036114U CN 201621068821 U CN201621068821 U CN 201621068821U CN 206036114 U CN206036114 U CN 206036114U
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China
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elastic displacement
composite elastic
large amplitude
amplifying mechanism
displacement amplifying
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CN201621068821.XU
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Chinese (zh)
Inventor
凌明祥
刘谦
李思忠
黎启胜
郑星
曹军义
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General Engineering Research Institute China Academy of Engineering Physics
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General Engineering Research Institute China Academy of Engineering Physics
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Abstract

The utility model discloses a main passive integration subtracts isolation mounting suitable for large amplitude and broadband, including compound elastic displacement mechanism of amplification, install piezoelectric ceramic actuator, vibrating controller, power amplifier and sensor in compound elastic displacement mechanism of amplification, compound elastic displacement mechanism of amplification is the hexagon structure, including minor face and four long limits that length equals that two relative just length equal, four length of branch edges of compound elastic displacement mechanism of amplification all are provided with the damping layer, the compound elastic displacement mechanism of amplification wherein a set of two adjacent length of branch limit point of intersect is fixed by the rigidity upper end of vibration isolation test piece for being used for supporting, and the sensor is installed on by the vibration isolation test piece, and sensor, vibrating controller, power amplifier and piezoelectric ceramic actuator electricity in proper order connect. The utility model discloses damping layer and compound elastic displacement mechanism of amplification and piezoelectric ceramic actuator's initiative vibration isolation cooperation, the owner than large amplitude and broadband who the realizes precision instrument and equipment damping that unifies passively.

Description

It is a kind of to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization
Technical field
The utility model belongs to vibration control field, more particularly to one kind is applied to large amplitude and wide band master passive Body subtracts isolation mounting.
Background technology
From civilian industry to national defence, many instrument and equipments (such as litho machine, lathe, instrument and meter, aerospace system, Armament systems, astronomical telescope, build a bridge, historical relic etc.) requirement to vibration environment is more and more harsher, it is necessary to these instrument Device equipment carries out isolating technique or vibration damping is processed.In numerous applications, academia and industrial quarters are to precision instrument and equipment Micro-vibration is controlled or is controlled consumption more and more stronger.
The application of vibration damping and vibration isolation is very broad, and the vibration isolation technique feature in different application field and method divergence are larger. Sum up, currently known vibration isolating method mainly there are three types:It is former by increasing damping material and spring in original structure The passive vibration isolation of part;System damping and stiffness parameters are changed by the method for controlling so realize half active of vibration suppression every Shake;The Vibration Active Control of vibration suppression is realized by energy injection and certain vibration control strategy.Set for precision instrument The vibration suppression of standby (such as precision optical system, spacecraft shooting is first-class), is characterized in that vibration amplitude is relatively small, frequency model Width, as little as 0.01Hz is enclosed, and vibration control required precision is higher, conventional passive vibration isolation technology is limited to that low-frequency effect is poor, body Product and weight is big waits not enough, it is difficult to directly apply to precision instrument and equipment subtracts vibration isolation.
At present, the executing agency in common Vibration Active Control is generally piezoelectric actuator, magnetic telescopic driver, gas Dynamic/hydraulic unit driver or electromagnetic driver etc..Wherein piezoelectric actuator utilizes inverse piezoelectric effect principle, applies on piezo-electric crystal Alternating electric field, piezo-electric crystal will produce the mechanical strain of alternation in one direction, realize vibration output, excellent due to which Performance, for example:Excitation principle is simple, High power output, resolving power can reach nanometer scale, becomes the fine choosing of precision vibration control Select.But the output displacement very little of piezoelectric actuator, general only tens microns, it is impossible to be directly used in the larger field of vibration amplitude Close.
Utility model content
The purpose of this utility model is that in order to solve the above problems the vibration damping cause for precision instrument and equipment is steady, and One kind is provided and subtracts isolation mounting suitable for large amplitude and wide band active-passive integratedization.
The utility model is achieved through the following technical solutions above-mentioned purpose:
It is a kind of to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, including composite elastic displacement equations Mechanism, the piezoelectric ceramic actuator in the composite elastic displacement amplifying mechanism, vibrating controller, power amplifier and Sensor;
The composite elastic displacement amplifying mechanism is hexagonal structure, and the composite elastic displacement amplifying mechanism includes two The long side of relative and the minor face of equal length and four equal lengths, the two ends of the piezoelectric ceramic actuator are multiple with described respectively Two minor faces for closing elastic displacement enlarger are rigidly connected;
Damping layer is provided with four long sides of the composite elastic displacement amplifying mechanism;
Two adjacent long side intersection points of the composite elastic displacement amplifying mechanism one of which be for support it is fixed by every Shake the rigid upper end of test specimen, and two adjacent long side intersection points of the composite elastic displacement amplifying mechanism another set are under rigidity End;
The sensor is arranged on described by vibration isolation test specimen, and the signal output part of the sensor passes through holding wire and institute State the signal input part electrical connection of vibrating controller, the letter of the signal output part of the vibrating controller and the power amplifier The electrical connection of number input, the signal output part of the power amplifier pass through piezoelectric ceramics power supply line and the Piezoelectric Ceramic Device is electrically connected.
Preferably, four long sides of the composite elastic displacement amplifying mechanism adopt many of identical in a thickness direction The laminated construction of flexible arm composition, is provided with the damping layer between flexible arm described in adjacent two layers.
Preferably, the piezoelectric ceramic actuator is stacked piezoceramic structures or encapsulation piezoceramic structures.
Preferably, the sensor is displacement transducer, acceleration transducer or force snesor.
Preferably, the damping layer is rubber damping layer or polymer damping layer.
Preferably, the rigid upper end and the rigid bottom are provided with screwed hole.
Preferably, the damping layer is embedded into institute using the structural damping form of free damping material or damping-constraining material State in composite elastic displacement amplifying mechanism.
The beneficial effects of the utility model are:
The utility model is capable of achieving the large magnitude of precision instrument and equipment and wide band active-passive integratedization vibration damping, damping Layer is embedded in composite elastic displacement amplifying mechanism, coordinates with the active vibration isolation of piezoelectric ceramic actuator, realizes wide-band vibration Control, the output displacement of piezoelectric ceramic actuator is also amplified by composite elastic displacement amplifying mechanism in addition, is ensured that larger The vibration output of amplitude, with the value promoted the use of.
Description of the drawings
Fig. 1 is structure principle chart of the present utility model;
Fig. 2 is the structural representation of composite elastic displacement amplifying mechanism described in the utility model;
In figure:1- piezoelectric ceramic actuators, 2- composite elastic displacement amplifying mechanisms, 3- damping layers, 4- flexible arms, 5- are flexible Arm, 6- screwed holes, 7- rigidity upper end, 8- rigidity bottom, 9- piezoelectric ceramics power supply lines, 10- is by vibration isolation test specimen, 11- sensings Device, 12- holding wires, 13- vibrating controllers, 14- power amplifiers.
Specific embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings:
As depicted in figs. 1 and 2, the utility model include composite elastic displacement amplifying mechanism 2, installed in composite elastic displacement Piezoelectric ceramic actuator 1, vibrating controller 13, power amplifier 14 and sensor 11 in enlarger 2, Piezoelectric Ceramic Device 1 can be stacked piezoceramic structures or encapsulation piezoceramic structures, and sensor 11 is displacement transducer, acceleration sensing Device or force snesor.
Piezoelectric ceramic actuator 1 is used for producing the vibration signal contrary with vibration interference.Composite elastic displacement amplifying mechanism 2 Function mainly have three:For amplifying the output displacement and fixed piezoelectric ceramic actuator 1 of piezoelectric ceramic actuator 1;For Support and fixed by vibration isolation test specimen 10;For loading damping layer 3.
Composite elastic displacement amplifying mechanism 2 is the improved elastic mechanism on the basis of known rhombus compliant mechanism, For hexagonal structure, composite elastic displacement amplifying mechanism 2 includes two relative and the minor face of equal length and four equal lengths Long side, the two ends of piezoelectric ceramic actuator 1 are rigidly connected with two minor faces of composite elastic displacement amplifying mechanism 2 respectively, multiple Damping layer 3 is provided with four long sides for closing elastic displacement enlarger 2.
Two adjacent long side intersection points of 2 one of which of composite elastic displacement amplifying mechanism are fixed by vibration isolation examination for supporting The rigid upper end 7 of part 10, two adjacent long side intersection points of 2 another set of composite elastic displacement amplifying mechanism are rigid bottom 8, rigid upper end 7 is provided with screwed hole 6 with rigid bottom 8, is precision instrument and equipment by vibration isolation test specimen 10, by vibration isolation Test specimen 10 is connected at the screwed hole 6 of rigid upper end 7, rigid bottom 8 by screwed hole 6 thereon be rigidly connected to containing In the substrate of vibration source.
, on by vibration isolation test specimen 10, the signal output part of sensor 11 is by holding wire 12 and vibration control for sensor 11 The signal input part electrical connection of device processed 13, the signal output part of vibrating controller 13 and the signal input part electricity of power amplifier 14 Connection, the signal output part of power amplifier 14 are electrically connected with piezoelectric ceramic actuator 1 by piezoelectric ceramics power supply line 9.
Four long sides of composite elastic displacement amplifying mechanism 2 are in a thickness direction using many flexible arm compositions of identical Laminated construction (be typically chosen two to three layers, accompanying drawing in this patent has embodied two-layer, and two flexible arm labels are respectively 4 and 5), there is a determining deviation in stack interlayer, and gap middle setting has a damping layer 3, and lamination spacing is according to output displacement size and solid There is frequency size to select.
According to index requests such as vibration amplitude and frequencies, four long side flexible beams of composite elastic displacement amplifying mechanism 2 with The junction of rigid upper end 7, and four long sides and the junction of rigid bottom 8, can arrange flexible hinge, and these are soft Property hinge can be known circular flexible hinge, oval compliant mechanism or straight circular flexible hinge.
Damping layer 3 is rubber damping layer 3 or polymer damping layer 3.Damping layer 3 adopts free damping material or constraint resistance The structural damping form of damping material is embedded in composite elastic displacement amplifying mechanism 2.
The structural damping form of free damping material is damping material directly by way of irrigating or pasting with public affairs 3 version of vector free axis method known is pasted in the flexible beam gap of composite elastic displacement amplifying mechanism 2;Damping material also may be used Directly to paste composite elastic displacement equations machine by perfusion or by way of pasting with 3 version of known vector free axis method The outward flange of 2 flexible beam of structure or inward flange.
The structural damping form of damping-constraining material is damping material and hard piece (for steel disc, aluminium flake or copper sheet) group In the flexible beam gap that composite elastic displacement amplifying mechanism 2 is pasted into 3 structure of known restriction damping layer;Damping material also may be used Composite elastic displacement equations machine is pasted with 3 structure of restriction damping layer known to hard piece (for steel disc, aluminium flake or copper sheet) composition The outward flange of 2 flexible beam of structure or inward flange.
Shock absorption principle of the present utility model is as follows:
Damping layer 3 and composite elastic position when there is vibration interference in the external world, in one side composite elastic displacement amplifying mechanism 2 The structural damping for moving the composition of enlarger 2 attenuates partial vibration energy, and especially the vibrational energy attenuating of medium-high frequency is more It is good;On the other hand, sensor 11 senses the vibration signal being delivered to by vibration isolation test specimen 10, is passed to by holding wire 12 and is shaken Movement controller 13, the drive signal access power amplifier 14 exported by certain vibration control strategy, vibrating controller 13, 14 output signal of power amplifier is used for driving piezoelectric ceramic actuator 1 to move, and produces the vibration contrary with vibration source signal defeated Go out, and then realize the isolation and decay of vibration.
Preferred embodiment of the present utility model is these are only, it is not to limit the utility model, all in this practicality Any modification, equivalent and improvement for being made within new spirit and principle etc., should be included in guarantor of the present utility model In the range of shield.

Claims (7)

1. it is a kind of to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, including composite elastic displacement equations machine Structure and the piezoelectric ceramic actuator in the composite elastic displacement amplifying mechanism, it is characterised in that:Also include vibration control Device processed, power amplifier and sensor;
The composite elastic displacement amplifying mechanism is hexagonal structure, the composite elastic displacement amplifying mechanism include two it is relative And the long side of the minor face of equal length and four equal lengths, the two ends of the piezoelectric ceramic actuator respectively with the compound bullet Two minor faces of property displacement amplifying mechanism are rigidly connected;
Damping layer is provided with four long sides of the composite elastic displacement amplifying mechanism;
Two adjacent long side intersection points of the composite elastic displacement amplifying mechanism one of which are fixed by vibration isolation examination for supporting The rigid upper end of part, two adjacent long side intersection points of the composite elastic displacement amplifying mechanism another set are rigid lower end Portion;
The sensor is arranged on described by vibration isolation test specimen, and the signal output part of the sensor is shaken with described by holding wire The signal input part electrical connection of movement controller, the signal output part of the vibrating controller are defeated with the signal of the power amplifier Enter end electrical connection, the signal output part of the power amplifier is by piezoelectric ceramics power supply line and piezoelectric ceramic actuator electricity Connection.
2. it is according to claim 1 to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature It is:Four long sides of the composite elastic displacement amplifying mechanism are in a thickness direction using many flexible arm compositions of identical Laminated construction, the damping layer is provided with described in adjacent two layers between flexible arm.
3. it is according to claim 1 to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature It is:The piezoelectric ceramic actuator is stacked piezoceramic structures or encapsulation piezoceramic structures.
4. it is according to claim 1 to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature It is:The sensor is displacement transducer, acceleration transducer or force snesor.
5. it is according to claim 1 to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature It is:The damping layer is rubber damping layer or polymer damping layer.
6. it is according to claim 1 to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature It is:The rigid upper end and the rigid bottom are provided with screwed hole.
7. it is according to claim 1 to subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature It is:The damping layer is embedded into the composite elastic using the structural damping form of free damping material or damping-constraining material In displacement amplifying mechanism.
CN201621068821.XU 2016-09-21 2016-09-21 Main passive integration subtracts isolation mounting suitable for large amplitude and broadband Withdrawn - After Issue CN206036114U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106286693A (en) * 2016-09-21 2017-01-04 中国工程物理研究院总体工程研究所 One is applicable to big amplitude and wide band active-passive integratedization subtracts isolation mounting
CN112088260A (en) * 2018-05-15 2020-12-15 三菱电机株式会社 Vibration damping device and elevator device
CN113202897A (en) * 2021-05-07 2021-08-03 华中科技大学 Active and passive vibration damping device based on piezoelectric ceramic and six-degree-of-freedom vibration damping system
CN114810928A (en) * 2022-05-20 2022-07-29 浙江理工大学 Hexagonal geometric amplification type magnetic suspension low-frequency vibration isolation structure

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106286693A (en) * 2016-09-21 2017-01-04 中国工程物理研究院总体工程研究所 One is applicable to big amplitude and wide band active-passive integratedization subtracts isolation mounting
CN106286693B (en) * 2016-09-21 2018-01-16 中国工程物理研究院总体工程研究所 One kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting
CN112088260A (en) * 2018-05-15 2020-12-15 三菱电机株式会社 Vibration damping device and elevator device
CN112088260B (en) * 2018-05-15 2022-04-15 三菱电机株式会社 Vibration damping device and elevator device
CN113202897A (en) * 2021-05-07 2021-08-03 华中科技大学 Active and passive vibration damping device based on piezoelectric ceramic and six-degree-of-freedom vibration damping system
CN114810928A (en) * 2022-05-20 2022-07-29 浙江理工大学 Hexagonal geometric amplification type magnetic suspension low-frequency vibration isolation structure

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Granted publication date: 20170322

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