CN106286693B - One kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting - Google Patents
One kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting Download PDFInfo
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- CN106286693B CN106286693B CN201610838961.9A CN201610838961A CN106286693B CN 106286693 B CN106286693 B CN 106286693B CN 201610838961 A CN201610838961 A CN 201610838961A CN 106286693 B CN106286693 B CN 106286693B
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- composite elastic
- amplifying mechanism
- elastic displacement
- displacement amplifying
- wide band
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- 238000002955 isolation Methods 0.000 title claims abstract description 33
- 238000006073 displacement reaction Methods 0.000 claims abstract description 54
- 238000013016 damping Methods 0.000 claims abstract description 48
- 239000002131 composite material Substances 0.000 claims abstract description 45
- 230000007246 mechanism Effects 0.000 claims abstract description 45
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 3
- 238000005538 encapsulation Methods 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 7
- 230000001629 suppression Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000011217 control strategy Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
- F16F15/007—Piezoelectric elements being placed under pre-constraint, e.g. placed under compression
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2224/00—Materials; Material properties
- F16F2224/02—Materials; Material properties solids
- F16F2224/025—Elastomers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2224/00—Materials; Material properties
- F16F2224/02—Materials; Material properties solids
- F16F2224/0283—Materials; Material properties solids piezoelectric; electro- or magnetostrictive
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
It is applied to large amplitude the invention discloses one kind and wide band active-passive integratedization subtracts isolation mounting, including composite elastic displacement amplifying mechanism, the piezoelectric ceramic actuator in composite elastic displacement amplifying mechanism, vibrating controller, power amplifier and sensor；Composite elastic displacement amplifying mechanism is hexagonal structure, including two relative and long sides of the short side of equal length and four equal lengths；Damping layer is provided with four long sides of composite elastic displacement amplifying mechanism；Two adjacent long side intersection points of composite elastic displacement amplifying mechanism one of which are for supporting the fixed rigid upper end by vibration isolation test specimen, sensor is arranged on by vibration isolation test specimen, and sensor, vibrating controller, power amplifier and piezoelectric ceramic actuator are sequentially connected electrically.Damping layer and the active vibration isolation of composite elastic displacement amplifying mechanism and piezoelectric ceramic actuator coordinate in the present invention, realize the large magnitude of precision instrument and equipment and wide band active-passive integratedization vibration damping.
Description
Technical field
The invention belongs to vibration control field, more particularly to one kind to be applied to large amplitude and wide band active-passive integratedization
Subtract isolation mounting.
Background technology
From civilian industry to national defence, many instrument and equipments (such as litho machine, lathe, instrument and meter, aerospace system,
Armament systems, astronomical telescope, building a bridge, historical relic etc.) requirement to vibration environment is more and more harsher, it is necessary to these instrument
Device equipment carries out isolating technique or vibration damping processing.In numerous application fields, academia and industrial quarters are to precision instrument and equipment
Micro-vibration is controlled or controlled consumption more and more stronger.
The application field of vibration damping and vibration isolation is very broad, and the vibration isolation technique feature and method divergence in different application field are larger.
Sum up, currently known vibration isolating method mainly there are three types：It is former by increasing damping material and spring in original structure
The passive vibration isolation of part；System damping and stiffness parameters are changed by the method for control and then realize half active of vibration suppression every
Shake；The Vibration Active Control of vibration suppression is realized by energy injection and certain vibration control strategy.Set for precision instrument
The vibration suppression of standby (such as the shooting of precision optical system, spacecraft is first-class), is characterized in that vibration amplitude is relatively small, frequency model
Width, as little as 0.01Hz are enclosed, and vibration control required precision is higher, conventional passive vibration isolation technology is limited to that low-frequency effect is poor, body
The deficiencies of product and weight are big, it is difficult to which directly apply to precision instrument and equipment subtracts vibration isolation.
At present, the executing agency in common Vibration Active Control is generally piezoelectric actuator, magnetic telescopic driver, gas
Dynamic/hydraulic unit driver or electromagnetic driver etc..Wherein piezoelectric actuator utilizes inverse piezoelectric effect principle, applies on piezo-electric crystal
Alternating electric field, piezo-electric crystal will produce the mechanical strain of alternation in one direction, vibration output be realized, because its is excellent
Performance, such as：Excitation principle is simple, High power output, resolving power can reach nanometer scale, turns into precision vibration and is in control choosing
Select.But the output displacement very little of piezoelectric actuator, general only tens microns, it is impossible to be directly used in the larger field of vibration amplitude
Close.
The content of the invention
The purpose of the present invention is that to solve the above problems, and is caused surely for the vibration damping of precision instrument and equipment, and is provided
One kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting.
The present invention is achieved through the following technical solutions above-mentioned purpose：
One kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting, including composite elastic displacement equations
Mechanism, the piezoelectric ceramic actuator in the composite elastic displacement amplifying mechanism, vibrating controller, power amplifier and
Sensor；
The composite elastic displacement amplifying mechanism is hexagonal structure, and the composite elastic displacement amplifying mechanism includes two
The relative and long side of the short side of equal length and four equal lengths, the both ends of the piezoelectric ceramic actuator respectively with it is described multiple
Two short sides for closing elastic displacement enlarger are rigidly connected；
Damping layer is provided with four long sides of the composite elastic displacement amplifying mechanism；
Two adjacent long side intersection points of the composite elastic displacement amplifying mechanism one of which be for support it is fixed by every
Shake the rigid upper end of test specimen, and two adjacent long side intersection points of the composite elastic displacement amplifying mechanism another set are under rigidity
End；
The sensor be arranged on it is described by vibration isolation test specimen, the signal output part of the sensor passes through signal wire and institute
State the signal input part electrical connection of vibrating controller, the letter of the signal output part of the vibrating controller and the power amplifier
The electrical connection of number input, the signal output part of the power amplifier pass through piezoelectric ceramics power supply line and the Piezoelectric Ceramic
Device electrically connects.
Preferably, four long sides of the composite elastic displacement amplifying mechanism use more of identical in a thickness direction
The laminated construction of flexible arm composition, is provided with the damping layer between flexible arm described in adjacent two layers.
Preferably, the piezoelectric ceramic actuator is stacked piezoceramic structures or encapsulation piezoceramic structures.
Preferably, the sensor is displacement transducer, acceleration transducer or force snesor.
Preferably, the damping layer is rubber damping layer or polymer damping layer.
Preferably, the rigid upper end and the rigid bottom are provided with screwed hole.
Preferably, the damping layer is embedded into institute using the structural damping form of free damping material or damping-constraining material
State in composite elastic displacement amplifying mechanism.
The beneficial effects of the present invention are：
The large magnitude and wide band active-passive integratedization vibration damping, damping layer of the achievable precision instrument and equipment of the present invention are embedding
Enter into composite elastic displacement amplifying mechanism, coordinate with the active vibration isolation of piezoelectric ceramic actuator, realize wide-band vibration control,
In addition composite elastic displacement amplifying mechanism also amplifies the output displacement of piezoelectric ceramic actuator, ensures that large magnitude
Vibration output, has the value promoted the use of.
Brief description of the drawings
Fig. 1 is the structure principle chart of the present invention；
Fig. 2 is the structural representation of composite elastic displacement amplifying mechanism of the present invention；
In figure：1- piezoelectric ceramic actuators, 2- composite elastic displacement amplifying mechanisms, 3- damping layers, 4- flexible arms, 5- are flexible
Arm, 6- screwed holes, 7- rigidity upper end, 8- rigidity bottom, 9- piezoelectric ceramics power supply lines, 10- is by vibration isolation test specimen, 11- sensings
Device, 12- signal wires, 13- vibrating controllers, 14- power amplifiers.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings：
As depicted in figs. 1 and 2, the present invention includes composite elastic displacement amplifying mechanism 2, installed in composite elastic displacement equations
Piezoelectric ceramic actuator 1, vibrating controller 13, power amplifier 14 and sensor 11 in mechanism 2, piezoelectric ceramic actuator 1
Can be stacked piezoceramic structures or encapsulation piezoceramic structures, sensor 11 is displacement transducer, acceleration transducer
Or force snesor.
Piezoelectric ceramic actuator 1 is used to produce the vibration signal opposite with vibration interference.Composite elastic displacement amplifying mechanism 2
Function mainly have three：For the output displacement for amplifying piezoelectric ceramic actuator 1 and fixed piezoelectric ceramic actuator 1；For
Support and fixed by vibration isolation test specimen 10；For loading damping layer 3.
Composite elastic displacement amplifying mechanism 2 is the improved elastic mechanism on the basis of known rhombus compliant mechanism,
For hexagonal structure, composite elastic displacement amplifying mechanism 2 includes two relative and the short side of equal length and four equal lengths
Long side, two short sides of the both ends of piezoelectric ceramic actuator 1 respectively with composite elastic displacement amplifying mechanism 2 are rigidly connected, multiple
Close and be provided with damping layer 3 in four long sides of elastic displacement enlarger 2.
Two adjacent long side intersection points of the one of which of composite elastic displacement amplifying mechanism 2 are to be tried for supporting to fix by vibration isolation
The rigid upper end 7 of part 10, two adjacent long side intersection points of the another set of composite elastic displacement amplifying mechanism 2 are rigid bottom
8, rigid upper end 7 and rigid bottom 8 are provided with screwed hole 6, are precision instrument and equipment by vibration isolation test specimen 10, by vibration isolation
Test specimen 10 is connected at the screwed hole 6 of rigid upper end 7, rigid bottom 8 by screwed hole 6 thereon be rigidly connected to containing
In the substrate of vibration source.
Sensor 11 is arranged on by vibration isolation test specimen 10, and the signal output part of sensor 11 is controlled by signal wire 12 and vibration
The signal input part electrical connection of device 13 processed, the signal output part of vibrating controller 13 and the signal input part electricity of power amplifier 14
Connection, the signal output part of power amplifier 14 are electrically connected by piezoelectric ceramics power supply line 9 with piezoelectric ceramic actuator 1.
Four long sides of composite elastic displacement amplifying mechanism 2 are in a thickness direction using more flexible arm compositions of identical
Laminated construction (be typically chosen two to three layers, accompanying drawing in this patent has embodied two layers, and two flexible arm labels are respectively
4 and 5), there is a determining deviation in stack interlayer, be provided with damping layer 3 among gap, and lamination spacing is according to output displacement size and solid
There is the selection of frequency size.
According to index requests such as vibration amplitude and frequencies, four long side flexible beams of composite elastic displacement amplifying mechanism 2 with
The junction of rigid upper end 7, and four long sides and the junction of rigid bottom 8, can set flexible hinge, these are soft
Property hinge can be known circular flexible hinge, oval compliant mechanism or straight circular flexible hinge.
Damping layer 3 is rubber damping layer 3 or polymer damping layer 3.Damping layer 3 is using free damping material or constraint resistance
The structural damping form of damping material is embedded into composite elastic displacement amplifying mechanism 2.
The structural damping form of free damping material be by damping material directly by way of irrigating or pasting with public affairs
The structure type of vector free axis method 3 known is pasted in the flexible beam gap of composite elastic displacement amplifying mechanism 2；Damping material also may be used
Composite elastic displacement equations machine is pasted with the known structure type of vector free axis method 3 in a manner of directly by irrigating or pasting
The outward flange of the flexible beam of structure 2 or inward flange.
The structural damping form of damping-constraining material is by damping material and hard piece (for steel disc, aluminium flake or copper sheet) group
In the flexible beam gap for pasting composite elastic displacement amplifying mechanism 2 into the known structure of restriction damping layer 3；Damping material also may be used
With hard piece (for steel disc, aluminium flake or copper sheet) composition known to the structure of restriction damping layer 3 paste composite elastic displacement equations machine
The outward flange of the flexible beam of structure 2 or inward flange.
The shock absorption principle of the present invention is as follows：
When there is vibration interference in the external world, damping layer 3 and composite elastic position in one side composite elastic displacement amplifying mechanism 2
Move the structural damping that enlarger 2 forms and attenuate the vibrational energy attenuating of partial vibration energy, especially medium-high frequency more
It is good；On the other hand, sensor 11 senses the vibration signal being delivered to by vibration isolation test specimen 10, is passed to and shaken by signal wire 12
Movement controller 13, the drive signal access power amplifier 14 exported by certain vibration control strategy, vibrating controller 13,
The output signal of power amplifier 14 is used to drive piezoelectric ceramic actuator 1 to move, and it is defeated to produce the vibration opposite with vibration source signal
Go out, and then realize the isolation and decay of vibration.
These are only presently preferred embodiments of the present invention, be not intended to limit the invention, it is all the present invention spirit and
All any modification, equivalent and improvement made within principle etc., should be included within the scope of the present invention.
Claims (7)
1. one kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting, including composite elastic displacement equations machine
Structure and the piezoelectric ceramic actuator in the composite elastic displacement amplifying mechanism, it is characterised in that：Also include vibration control
Device, power amplifier and sensor processed；
The composite elastic displacement amplifying mechanism is hexagonal structure, and the composite elastic displacement amplifying mechanism includes two relatively
And the long side of the short side of equal length and four equal lengths, the both ends of the piezoelectric ceramic actuator respectively with the compound bullet
Two short sides of property displacement amplifying mechanism are rigidly connected；
Damping layer is provided with four long sides of the composite elastic displacement amplifying mechanism；
Two adjacent long side intersection points of the composite elastic displacement amplifying mechanism one of which are to be tried for supporting to fix by vibration isolation
The rigid upper end of part, two adjacent long side intersection points of the composite elastic displacement amplifying mechanism another set are rigid lower end
Portion；
The sensor be arranged on it is described by vibration isolation test specimen, the signal output part of the sensor is shaken by signal wire with described
The signal input part electrical connection of movement controller, the signal of the signal output part of the vibrating controller and the power amplifier are defeated
Enter end electrical connection, the signal output part of the power amplifier passes through piezoelectric ceramics power supply line and piezoelectric ceramic actuator electricity
Connection.
2. according to claim 1 subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature
It is：Four long sides of the composite elastic displacement amplifying mechanism are in a thickness direction using more flexible arm compositions of identical
Laminated construction, be provided with the damping layer between flexible arm described in adjacent two layers.
3. according to claim 1 subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature
It is：The piezoelectric ceramic actuator is stacked piezoceramic structures or encapsulation piezoceramic structures.
4. according to claim 1 subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature
It is：The sensor is displacement transducer, acceleration transducer or force snesor.
5. according to claim 1 subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature
It is：The damping layer is rubber damping layer or polymer damping layer.
6. according to claim 1 subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature
It is：The rigid upper end and the rigid bottom are provided with screwed hole.
7. according to claim 1 subtract isolation mounting suitable for large amplitude and wide band active-passive integratedization, its feature
It is：The damping layer is embedded into the composite elastic using the structural damping form of free damping material or damping-constraining material
In displacement amplifying mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610838961.9A CN106286693B (en) | 2016-09-21 | 2016-09-21 | One kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting |
Applications Claiming Priority (1)
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|---|---|---|---|
| CN201610838961.9A CN106286693B (en) | 2016-09-21 | 2016-09-21 | One kind is applied to large amplitude and wide band active-passive integratedization subtracts isolation mounting |
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| CN106286693A CN106286693A (en) | 2017-01-04 |
| CN106286693B true CN106286693B (en) | 2018-01-16 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107023605A (en) * | 2017-06-06 | 2017-08-08 | 哈尔滨工业大学 | Based on the quartzy cycloid recombination mechanism of magnetostriction and helical structure every micro- vibrating device |
| CN109058367A (en) * | 2018-07-30 | 2018-12-21 | 中国舰船研究设计中心 | Bearing support structure with vibration-damping function |
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| CN107084224B (en) * | 2017-06-06 | 2018-09-11 | 哈尔滨工业大学 | Based on magnetostriction with straight groove structure quartz cycloid recombination mechanism every micro- vibrating device |
| CN106989133B (en) * | 2017-06-06 | 2018-10-23 | 哈尔滨工业大学 | Based on piezoelectric ceramics with quartzy cycloid recombination mechanism every micro- vibrating device |
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| CN112610647B (en) * | 2020-11-10 | 2022-06-07 | 武汉第二船舶设计研究所(中国船舶重工集团公司第七一九研究所) | Structure coupling intelligent orthogonal active and passive combined metamaterial vibration isolation method |
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2016
- 2016-09-21 CN CN201610838961.9A patent/CN106286693B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6154000A (en) * | 1994-09-07 | 2000-11-28 | Omnitek Research & Development, Inc. | Apparatus for providing a controlled deflection and/or actuator apparatus |
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| CN107023605A (en) * | 2017-06-06 | 2017-08-08 | 哈尔滨工业大学 | Based on the quartzy cycloid recombination mechanism of magnetostriction and helical structure every micro- vibrating device |
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| CN109058367A (en) * | 2018-07-30 | 2018-12-21 | 中国舰船研究设计中心 | Bearing support structure with vibration-damping function |
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| Publication number | Publication date |
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| CN106286693A (en) | 2017-01-04 |
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