CN107023605B - Based on magnetostriction with helical structure quartz cycloid recombination mechanism every micro- vibrating device - Google Patents
Based on magnetostriction with helical structure quartz cycloid recombination mechanism every micro- vibrating device Download PDFInfo
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- CN107023605B CN107023605B CN201710418170.5A CN201710418170A CN107023605B CN 107023605 B CN107023605 B CN 107023605B CN 201710418170 A CN201710418170 A CN 201710418170A CN 107023605 B CN107023605 B CN 107023605B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/002—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion characterised by the control method or circuitry
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
- F16F7/1005—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass
- F16F7/1011—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass by electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
- F16F7/1022—Vibration-dampers; Shock-absorbers using inertia effect the linear oscillation movement being converted into a rotational movement of the inertia member, e.g. using a pivoted mass
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- Electromagnetism (AREA)
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- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
The present invention is based on belonging to every micro- technical field of shaking every micro- vibrating device for magnetostriction and helical structure quartz cycloid recombination mechanism；The device is put by the first order, second level pendulum and actuator form；First order pendulum is made of external support structure, the first quartz fibre, the first test quality and upper connector；Second level pendulum is made of the first test quality, upper connector, compound pendulum wire, the second test quality and lower connector；Actuator is made of compound pendulum wire and driving device；The compound pendulum wire includes the second quartz fibre and the giant magnetostrictive material coating coated in the second quartz fibre surface, it includes upper magnetizer, permanent magnet, driving coil, skeleton and lower magnetizer that second quartz fibre surface etch, which has the spiral grooves of rectangular cross-section, driving device,；The present invention can not only realize the technical purpose of active vibration isolation, and with simplified, highly integrated, the highly sensitive technical advantage of system, while improve the sensitivity to the vibrating effect and actuator of low-frequency vibration.
Description
Technical field
The invention belongs to every micro- technical field of shaking.
Technical background
In ultra precise measurement instrument field, such as scanning probe microscopy (SPM), atomic force microscope (AFM), holographic interference
Instrument and confocal microscope etc. have high measurement sensitivity, the precision scientific instrument of repeatability and uncertainty of measurement, in each field
In demand it is very big, but in the natural environment even the small vibration of amplitude-frequency can all interfere such precision instrument measurement spirit
Sensitivity, repeatability and uncertainty, i.e., with the increasingly raising of accuracy of instrument, the vibration noise of external environment is to accuracy of instrument
Influence it is increasing, inhibit ultralow frequency vibration interference signal in terms of, every micro- technology of shaking have become limitation accuracy of instrument into
The bottleneck that one step is promoted.If the dry systems in big science engineering, such as gravitational wave detection, dark matter detection, high-intensity magnetic field and pulse
Star is required to a good low vibration environment-guarantee at research etc..Its main difficulty is that measured signal is shaken relative to environment
Moving noise seems exceptionally weak, therefore the shadow of very high requirement, especially ground vibration is proposed to the isolation of ambient vibration
It rings.If lacking ultra-low frequency isolation system, the useful signal that gravitational wave detection instrument is received will be buried in noise,
Earth pulse noise must be effectively isolated.Ultralow frequency (0.1Hz or less) becomes the research in the above field every micro- technology of shaking
Hot and difficult issue.
With ultraprecise instrument the inhibition of ambient vibration noise is required it is higher and higher, single pendulum as it is simplest it is horizontal every
Vibrating system, the anti-vibration performance of system can be increased by increasing pendulum length L, but since the suspension wire of single pendulum has certain quality, one
Determine under tension, if by lateral disturbance, just to will produce so-called string mould resonance.String mould, which resonates, limits the length of single pendulum.To make
It has better anti-vibration performance (Tunable inverse pendulum vibration isolation in low frequency
System. U.S. Patent Publication No.：US7543791B2).Single pendulum and spring are bonded inverted pendulum and put component by this method, symmetrically
It is distributed in the both sides of rectangular vibration-isolating platform, simple in structure, reliable operation, need not consuming extra power, to improve its vibration isolation
Can, this method has problems in that：Only with passive vibration isolation system, it is difficult to further increase low frequency vibration isolation performance.
In gravitational wave detection, single pendulum is laser interference gravitational wave as simplest horizontal vibrating isolation system
(LIGO) indispensable part in.To make it that there is better anti-vibration performance in terms of ultralow frequency (0.1Hz or less), the U.S.
Advanced LIGO projects use the compound pendulum vibrating isolation system of level Four, referring to document (Advanced ligo [J] .Classical
and quantum gravity)；The VIRGO (brachium is the laser interferometer gravitational wave of 3km) of Italy has developed 9
The compound pendulum vibrating isolation system SA (Super-Attenuator) of grade, referring to document (First results on the electronic
cooling of the Pisa seismic noise super-attenuator for gravitational wave
detection)、(First results from the Pisa seis-mic noise super-attenuator for
low frequency gravitational wave detection).Above method is connected by using multistage single pendulum and master
The principle of dynamic vibration isolation, further improves low frequency vibration isolation performance.However, these methods there is problems：The first, actuator
With sensor device in the suspension pendulum first order and the test quality of second level single pendulum, it is difficult to its bottom test quality (by every
Shake element) quickly and effectively buffering vibration isolation is carried out, and due to installing multiple sensors and actuator, constructional device is complicated, to preliminary
Installation and debugging dependence is very strong.Some low frequencies such as sensor the second, is placed in test quality, while thermal noise can be introduced to make an uproar
Sound.
National University of Defense technology Liu Ji prolong et al. be prepared in optical fiber surface using magnetron sputtering technique it is in homogeneous thickness
TbDyFe giant magnetostrictive thin films.Using Mach-Zender interferometer to TbDyFe giant magnetostrictive thin films/fibre optical sensor
Magnetic detection performance has carried out experiment test.Wuhan University of Technology wears Yutang et al., also devises a kind of micro- based on femtosecond laser
The fibre optic magnetic field sensor of processing.Micro-structure is etched on single mode optical fiber covering using femtosecond laser, then uses magnetron sputtering skill
Art sputters one layer of magnetostrictive thin film in working position.Theirs in optical fiber surface etching micro-structure the experimental results showed that can reduce
The cross-sectional area of optical fiber improves optical fiber axial direction telescopicing performance, increases film attachment surface product, improves the optical fiber under magnetic fields
The sensitivity of measurement.However, above technical scheme only has application in technical field of optical fiber sensing.
In conclusion active control, improves level of integrated system and sensitivity, and it is ability to improve low-frequency vibration vibration isolating effect
Domain key technical problem urgently to be resolved hurrily.
Invention content
In view of the above-mentioned problems, the invention discloses a kind of based on magnetostriction and helical structure quartz cycloid recombination mechanism
Every micro- vibrating device, core includes two-stage pendulum structure, integrates the compound pendulum wire of perception vibration and compensation vibration, for changing multiple
The actuator of pendulum wire magnetic field environment is closed, and has the structure of spiral grooves in quartz fibre surface etch, under structure of the invention, no
It can only realize the technical purpose of active vibration isolation, and with simplified, highly integrated, the highly sensitive technical advantage of system, together
When improve sensitivity to the vibrating effect and actuator of low-frequency vibration.
The object of the present invention is achieved like this：
Based on magnetostriction with helical structure quartz cycloid recombination mechanism every micro- vibrating device, by first order pendulum, the second level
Pendulum and actuator composition；
The first order pendulum is made of external support structure, the first quartz fibre, the first test quality and upper connector；It is external
It is connected by the first quartz fibre between support construction and upper connector, upper connector is symmetrically distributed in the two of the first test quality
Side；
The second level pendulum is by the first test quality, upper connector, compound pendulum wire, the second test quality and lower connector structure
At；Second test quality is used as by vibration isolation element, is connected by compound pendulum wire between upper connector and lower connector, lower connector
It is symmetrically distributed in the both sides of the second test quality；
The actuator is made of compound pendulum wire and driving device；The compound pendulum wire includes the second quartz fibre and is coated in
The giant magnetostrictive material coating on the second quartz fibre surface, the second quartz fibre surface etch have the spiral goove of rectangular cross-section
Slot, the groove is identical as backbone length along the length of the second quartz fibre direction, and the giant magnetostrictive material coating applies
Apply the region that spiral grooves are etched in the second quartz fibre；Compound pendulum wire passes to vibration signal for perceiving extraneous vibration
Controller；Driving device includes upper magnetizer, permanent magnet, driving coil, skeleton and lower magnetizer；Skeleton is intermediate with logical
Hole, section are the structure of I-shaped, and upper magnetizer is located at the top of skeleton, and lower magnetizer is located at skeleton bottom, and driving coil is embedding
It is sleeved on the outer shroud of skeleton, the electric current that is passed through of driving coil is adjusted according to the vibration signal that controller obtains, and is compound pendulum wire
Driving magnetic field is provided, permanent magnet be nested in magnetizer, driving coil, skeleton and lower magnetizer outer shroud, carry for compound pendulum wire
For bias magnetic field；
The first order is put and second level pendulum series connection, shares the first test quality and upper connector；Compound pendulum wire is from driving device
Center passes through.
It is above-mentioned quartzy every micro- vibrating device, described first with helical structure quartz cycloid recombination mechanism based on magnetostriction
Silk shares four, and each upper connector is connect by two first quartz fibres with external support structure, and the first test quality passes through
First quartz fibre hangs on the lower section of external support structure.
It is above-mentioned based on magnetostriction and helical structure quartz cycloid recombination mechanism every micro- vibrating device, the compound pendulum wire
Four are shared, each lower connector is connect by two compound pendulum wires with upper connector, and the second test quality is used as by vibration isolation member
Part hangs on the lower section of the first test quality by compound pendulum wire.
Above based on magnetostriction and helical structure quartz cycloid recombination mechanism every micro- vibrating device, shake for reducing the external world
The dynamic interference to system.
It is a kind of above based on magnetostriction and helical structure quartz cycloid recombination mechanism every being realized on micro- vibrating device
Every micro- method of slight, compound pendulum wire perceives extraneous vibration, vibration signal is passed to controller, controller is according to collected vibration
Signal, active control driving coil are passed through electric current, change the driving magnetic field of compound pendulum wire, utilize the super of giant magnetostrictive material
Magnetostrictive effect makes compound pendulum wire generate a strain opposite with extraneous vibration direction, to reduce extraneous vibration to being
The interference of system.
Advantageous effect：
The first, in compound pendulum wire, due to being provided with giant magnetostrictive material coating in the second quartz fibre periphery, using super
The ultra-magnetic telescopic effect of magnetostriction materials, i.e., the changed effect of size under magnetic fields make compound pendulum wire collection sense
Know vibration and compensation vibration, in the external world there are when vibration interference, by changing the electric current that is passed through of driving coil, changes super
Magnetic field residing for magnetostriction materials coating, and then keep giant magnetostrictive material coating generation one opposite with extraneous vibration direction
Strain, compensation extraneous vibration realize the technical purpose of active vibration isolation to reduce interference of the extraneous vibration to system.
The second, the present invention is based on magnetostriction and helical structure quartz cycloid recombination mechanisms every in micro- vibrating device, by
In integrating, perception is vibrated and the compound pendulum wire of compensation vibration is only including the second quartz fibre and coated in the second quartz fibre periphery
Giant magnetostrictive material coating, it is achieved that system it is simplified, collection from sensing with actively activate it is highly integrated.
Third, the present invention is based on magnetostriction and helical structure quartz cycloid recombination mechanisms every in micro- vibrating device, by
Be not directly installed in the first test quality and the second test quality in sensor and actuator, thus can solve sensor and
Actuator is mounted under this traditional structure of test quality the problem of introducing low-frequency noise, by reducing noise source so that this hair
It is bright that there is better vibration isolating effect for low-frequency vibration.
4th, other three inventions that the present invention declares on the same day with this seminar《Based on ultra-magnetic telescopic and quartzy cycloid
Recombination mechanism every micro- vibrating device》、《Based on piezoelectric ceramics with quartzy cycloid recombination mechanism every micro- vibrating device》With《Based on super magnetic
It causes flexible and quartz cycloid Compound cooling mechanism every micro- vibrating device》It compares, increase has spiral shell in the second quartz fibre surface etch
The technical characteristic of groove is revolved, which can be such that the diameter of the second quartz fibre reduces, to increase magnetostriction materials
Plated film area so that the lower tensile deformation for generating bigger of compound pendulum wire same magnetic field effect, therefore with actuator can be improved
The advantageous effect of sensitivity.
Description of the drawings：
Fig. 1 is with helical structure quartz cycloid recombination mechanism the present invention is based on magnetostriction every micro- vibrating device structural representation
Figure.
Fig. 2 is the structural schematic diagram of compound pendulum wire.
Fig. 3 is the structural schematic diagram of actuator.
In figure：1 external support structure, 2 first quartz fibres, 3 first test qualities, 4 upper connectors, 5 compound pendulum wires, 51
Two quartz fibres, 52 giant magnetostrictive material coatings, 6 second test qualities, 7 times connectors, 8 driving devices, magnetizer, 82 on 81
Permanent magnet, 83 driving coils, 84 skeletons, 85 times magnetizers.
Specific implementation mode
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
Specific embodiment one
The present embodiment is with helical structure quartz cycloid recombination mechanism based on magnetostriction every micro- vibrating device embodiment.
The present embodiment based on magnetostriction and helical structure quartz cycloid recombination mechanism every micro- vibrating device, structural representation
Figure every micro- vibrating device first order pendulum, second level pendulum and actuator as shown in Figure 1, should be made of；
The first order pendulum is made of external support structure 1, the first quartz fibre 2, the first test quality 3 and upper connector 4；
It is connected by the first quartz fibre 2 between external support structure 1 and upper connector 4, upper connector 4 is symmetrically distributed in the first test matter
The both sides of amount 3；
The second level pendulum is by the first test quality 3, upper connector 4, compound pendulum wire 5, the second test quality 6 and lower connection
Part 7 is constituted；Second test quality 6 is connected between upper connector 4 and lower connector 7 by compound pendulum wire 5 as by vibration isolation element
It connects, lower connector 7 is symmetrically distributed in the both sides of the second test quality 6；
The actuator is made of compound pendulum wire 5 and driving device 8 as shown in Figure 2, as shown in Figure 3；The compound pendulum
Silk 5 includes the second quartz fibre 51 and the giant magnetostrictive material coating 52 coated in 51 surface of the second quartz fibre, second stone
51 surface etch of mil has the spiral grooves of rectangular cross-section, length and bone of the groove along 51 direction of the second quartz fibre
84 length of frame is identical, and the giant magnetostrictive material coating 52 is etched with the region of spiral grooves coated in the second quartz fibre 51；
Vibration signal is passed to controller by compound pendulum wire 5 for perceiving extraneous vibration；Driving device 8 includes upper magnetizer 81, permanent magnetism
Body 82, driving coil 83, skeleton 84 and lower magnetizer 85；It is the structure of I-shaped that skeleton 84 has through-hole, section for centre,
Upper magnetizer 81 is located at 84 top of skeleton, and lower magnetizer 85 is located at 84 bottom of skeleton, and driving coil 83 is nested in the outer of skeleton 84
The electric current that is passed through of ring, driving coil 83 is adjusted according to the vibration signal that controller obtains, and driving magnetic is provided for compound pendulum wire 5
, permanent magnet 82 be nested in magnetizer 81, driving coil 83, skeleton 84 and lower magnetizer 85 outer shroud, carry for compound pendulum wire 5
For bias magnetic field；
The first order is put and second level pendulum series connection, shares the first test quality 3 and upper connector 4；Compound pendulum wire 5 is filled from driving
8 centers are set to pass through.
In the present embodiment, first quartz fibre 2 shares four, and each upper connector 4 passes through two first quartz
Silk 2 is connect with external support structure 1, and the first test quality 3 hangs on the lower section of external support structure 1 by the first quartz fibre 2；
The compound pendulum wire 5 shares four, and each lower connector 7 is connect by two compound pendulum wires 5 with upper connector 4, and second surveys
Quality 6 is tried as by vibration isolation element, the lower section of the first test quality 3 is hung on by compound pendulum wire 5.
Specific embodiment two
The present embodiment is that the purposes every micro- vibrating device based on magnetostriction and helical structure quartz cycloid recombination mechanism is real
Apply example.
In specific embodiment one based on magnetostriction and helical structure quartz cycloid recombination mechanism every micro- vibrating device, use
In interference of the reduction extraneous vibration to system.
Specific embodiment three
The present embodiment is with helical structure quartz cycloid recombination mechanism based on magnetostriction every micro- method of slight embodiment.
The present embodiment based on magnetostriction and helical structure quartz cycloid recombination mechanism every micro- method of slight, specific real
The realizing every on micro- vibrating device based on magnetostriction and helical structure quartz cycloid recombination mechanism described in example one is applied, this method
Principle is：Compound pendulum wire 5 perceives extraneous vibration, vibration signal is passed to controller, controller is believed according to collected vibration
Number, active control driving coil 83 is passed through electric current, changes the driving magnetic field of compound pendulum wire 5, utilizes giant magnetostrictive material
Ultra-magnetic telescopic effect makes compound pendulum wire 5 generate a strain opposite with extraneous vibration direction, to reduce extraneous vibration pair
The interference of system.
Claims (5)
1. based on magnetostriction with helical structure quartz cycloid recombination mechanism every micro- vibrating device, which is characterized in that by the first order
Pendulum, second level pendulum and actuator composition；
The first order pendulum is by external support structure (1), the first quartz fibre (2), the first test quality (3) and upper connector (4)
It constitutes；It is connect by the first quartz fibre (2) between external support structure (1) and upper connector (4), upper connector (4) symmetrically divides
Both sides of the cloth in the first test quality (3)；
Second level pendulum by the first test quality (3), upper connector (4), compound pendulum wire (5), the second test quality (6) and under
Connector (7) is constituted；Second test quality (6) passes through as by vibration isolation element between upper connector (4) and lower connector (7)
Compound pendulum wire (5) connection, lower connector (7) are symmetrically distributed in the both sides of the second test quality (6)；
The actuator is made of compound pendulum wire (5) and driving device (8)；The compound pendulum wire (5) includes the second quartz fibre
(51) and coated in the second quartz fibre (51) surface giant magnetostrictive material coating (52), the second quartz fibre (51) surface
The spiral grooves of rectangular cross-section are etched with, the groove is long along the length and skeleton (84) of the second quartz fibre (51) direction
Spend identical, the giant magnetostrictive material coating (52) is etched with the regions of spiral grooves coated in the second quartz fibre (51)；It is multiple
Pendulum wire (5) is closed for perceiving extraneous vibration, vibration signal is passed into controller；Driving device (8) include upper magnetizer (81),
Permanent magnet (82), driving coil (83), skeleton (84) and lower magnetizer (85)；Skeleton (84) is intermediate there is through-hole, section to be
The structure of I-shaped, upper magnetizer (81) are located at the top of skeleton (84), and lower magnetizer (85) is located at skeleton (84) bottom, drive
Coil (83) is nested in the outer shroud of skeleton (84), driving coil (83) be passed through vibration signal that electric current is obtained according to controller into
Row adjustment provides driving magnetic field for compound pendulum wire (5), and permanent magnet (82) is nested in magnetizer (81), driving coil (83), bone
The outer shroud of frame (84) and lower magnetizer (85) provides bias magnetic field for compound pendulum wire (5)；
The first order is put and second level pendulum series connection, shares the first test quality (3) and upper connector (4)；Compound pendulum wire (5) is from driving
Device (8) center passes through.
2. it is according to claim 1 based on magnetostriction and helical structure quartz cycloid recombination mechanism every micro- vibrating device,
It is characterized in that, first quartz fibre (2) shares four, each upper connector (4) by two first quartz fibres (2) with
External support structure (1) connects, and the first test quality (3) is hung on by the first quartz fibre (2) under external support structure (1)
Side.
3. it is according to claim 1 based on magnetostriction and helical structure quartz cycloid recombination mechanism every micro- vibrating device,
It is characterized in that, the compound pendulum wire (5) shares four, connector (7) is each descended to pass through two compound pendulum wires (5) and upper company
Fitting (4) connects, and the second test quality (6) hangs on the first test quality as by vibration isolation element by compound pendulum wire (5)
(3) lower section.
4. a kind of shaking every micro- based on magnetostriction and helical structure quartz cycloid recombination mechanism as claimed in claim 1,2 or 3
Device, which is characterized in that should be every micro- vibrating device for reducing interference of the extraneous vibration to system.
5. a kind of in the shaking every micro- based on magnetostriction and helical structure quartz cycloid recombination mechanism of claim 1,2 or 3
Realized on device every micro- method of slight, which is characterized in that compound pendulum wire (5) perceives extraneous vibration, and vibration signal is passed to control
Device processed, controller are passed through electric current, change compound pendulum wire according to collected vibration signal, active control driving coil (83)
(5) driving magnetic field makes compound pendulum wire (5) generate one and the external world using the ultra-magnetic telescopic effect of giant magnetostrictive material
The opposite strain of direction of vibration, to reduce interference of the extraneous vibration to system.
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| CN113565912B (en) * | 2021-06-22 | 2023-07-11 | 东风汽车集团股份有限公司 | Dynamic vibration absorbing structure and method with self-adaptive and rapid-adjustable resonant frequency |
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| US5660255A (en) * | 1994-04-04 | 1997-08-26 | Applied Power, Inc. | Stiff actuator active vibration isolation system |
| US20030168295A1 (en) * | 2002-02-12 | 2003-09-11 | Zhixiu Han | Active vibration isolation system |
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|---|---|---|---|---|
| CN1724892A (en) * | 2005-05-20 | 2006-01-25 | 上海微电子装备有限公司 | Precision vibration damping and locating device |
| US7543791B2 (en) * | 2005-10-19 | 2009-06-09 | Brown University | Tunable inverse pendulum vibration isolation system |
| EP1845281A1 (en) * | 2006-04-11 | 2007-10-17 | Integrated Dynamics Engineering GmbH | Active vibration isolating system |
| CN101718327A (en) * | 2009-11-26 | 2010-06-02 | 重庆师范大学 | Precise vibration isolation system |
| CN103104653A (en) * | 2012-12-19 | 2013-05-15 | 哈尔滨工业大学 | Magnetic levitation vibration isolation platform based on air spring aero position standard and auto-collimation measurement |
| CN203838353U (en) * | 2014-05-21 | 2014-09-17 | 哈尔滨工程大学 | Two-dimensional compound-pendulum tilting low-frequency vibration-isolation device based on capacitive sensing |
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