CN1724892A - Precision vibration damping and locating device - Google Patents
Precision vibration damping and locating device Download PDFInfo
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- CN1724892A CN1724892A CN 200510026019 CN200510026019A CN1724892A CN 1724892 A CN1724892 A CN 1724892A CN 200510026019 CN200510026019 CN 200510026019 CN 200510026019 A CN200510026019 A CN 200510026019A CN 1724892 A CN1724892 A CN 1724892A
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Abstract
The invention relates to an effectively damping multi-freedom locating device with the passive control as the principal and the active control as the auxiliary, used to realize accurate horizontal and height location, and comprising passive damping component and active damping component, where the passive damping component is of a cavity structure able to have a certain horizontal and vertical moving range and is connected through the cavity-supported piston mechanism to a damped platform for isolating or attenuating the vibrating source in a wider frequency band by a large margin; an active control component joins the damped vibrating components, and is composed of vibration sensor, signal processor, data collector, operation policy maker, electric machine driver, and two linear electric machines in the vertical and horizontal directions, so as to make accuracy location. The invention has compact structure, high reliability, high repeated locating accuracy, strong adaptability, small device deformation, moving stability and meets the strict requirements of the precision devices, such as photo-etcher, etc. at normal temperature.
Description
Technical field
The present invention relates to vibration damping and positioning device, particularly a kind of is the effective vibration damping and the multi-freedom degree positioning device of assisting based on passive, ACTIVE CONTROL, is used for the accurate location of realization level, height.
Background technique
In semiconductor industry, Mechatronic Systems need realize the positioning accuracy request of microcosmic (micron order or nanometer), and the interference of each side such as environment that all are extraneous and earth shock all can not be out in the cold.Therefore, must realize that the worktable/equipment of production function is placed in the vibrating isolation system that is not subjected to external interference with being used to.This vibrating isolation system is the power of environmental disturbances inhibition ability to external world, is that can semiconductor equipment and other high-precision equipment realize its function and the key of effectively working.Present damping technology can be divided into two big classes usually:
The one, passive vibration insulating system, as utilize elements such as material such as big damping, viscoelasticity and spring to carry out vibration isolation and handle, this method is simple, do not have advantages such as energy consumption, good reliability, obtained using widely.But in some accurate machinery, its effectiveness in vibration suppression is difficult to reach requirement or not suitable, and as the semiconductor equipment of precision, worktable and ground generally need be rigidly connected and can't isolate.
The 2nd, the active damping system, as utilize actuator or intelligent mechanism to carry out ACTIVE CONTROL, though this method can effectively decay to specific interference, but general smaller bandwidth, and energy consumption arranged, improved cost, greatly reduced reliability, and speed of response and adaptability all are difficult to reach higher requirement.
Summary of the invention
The purpose of this invention is to provide a kind of precision vibration damping and positioning device, solve the single active damping system of original use or the technological deficiency of passive vibration insulating system, realized effective vibration damping and multi-freedom degree location.
For achieving the above object, technological scheme of the present invention is:
A kind of precision vibration damping and positioning device, it is characterized in that: it comprises that passive damping part and active damping power unit form jointly, wherein, passive damping part is a kind of horizontal stroke, vertically all can has the cavity of certain range of movement to construct, the piston type mechanism that supports by this cavity is connected to by on the platform of vibration damping, and vibration source is carried out by a relatively large margin isolation or decay on broad frequency band; There are being the ACTIVE CONTROL parts to be connected by between damping means and the passive damping part, these ACTIVE CONTROL parts are by vibration transducer, signal processor, data acquisition unit, computing decision-making device, motor driver, and two linear electric motor compositions on level and the Vertical direction, accurately locate.
Filled media in this cavity is liquid or gas, needs the cavity sealing, and by solenoid valve realization ACTIVE CONTROL the low-frequency resonance frequency of system is controlled.
Filled media in this cavity is rubber or sponge or metal-rubber.
This cylinder body has a mobile piston, connects by sealing film or elasticity dish spring.
The section of sealing film is semicircle or triangle or V-arrangement or folding shape or M shape or S shape or MV combination shape or corrugated.
This piston has connecting rod, and connecting rod is connected to vibration reduction platform to being formed support reaction by the object of vibration damping/vibration isolation.
Be connected with sealing film or elasticity dish spring between this piston and the connecting rod.
The section of sealing film is semicircle or triangle or V-arrangement or folding shape or M shape or S shape or MV combination shape or corrugated.
Make feedback by the velocity transducer of level and vertical direction and form damping force; By the linear electric motor of vertical direction and the linear electric motor of substantially horizontal, by the position transducer of substantially horizontal, the position signal that the position transducer of vertical direction obtains feeds back, and obtains response force fast, carries out accurate position compensation.
This level and position transducer vertical direction are contactless vortex sensors.
Can be achieved as follows technique effect by the foregoing invention scheme:
1, the present invention can realize vibration isolation, vibration damping when system is interfered constantly by predefined target, and carries out multi-freedom degree closed loop moving controls such as translation, lifting, rotation, realizes being located by the exact position of vibration reduction platform.
2, compact structure of the present invention, reliability height, the repetitive positioning accuracy height, adaptability is strong, the device amount of deformation is little, motion steadily, can satisfy the strict demand of precision equipments such as lithography machine at normal temperatures, realize simultaneously when lithographic equipment promptly exposes in working order, the decay of Gan Raoing and isolation and the location positioning of carrying out precision are controlled to external world; When promptly overhauling, off working state realizes the locking of mechanism.
Description of drawings
Fig. 1 is the structural system schematic diagram of apparatus of the present invention.
Fig. 2 is the schematic cross-section of the used various sealing films of apparatus of the present invention.
Fig. 3 is this precision apparatus and control system layout relationship schematic representation.
Fig. 4 is the annexation intention that this precision vibration damping apparatus system is implemented.
Fig. 5 is the skeleton diagram of all system implementations of this precision vibration damping.
Fig. 6 is the system diagram that implement in the loop of this precision vibration damping device gas/liquid dynamic Control.
Fig. 7 is the system diagram of the electrical equipment control loop embodiment of this precision vibration damping device.
Embodiment
Provide a preferred embodiment below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1: whole vibration damping equipment comprises that passive damping part and active damping power unit form jointly, wherein passive damping part mainly is a kind of cavity structure, laterally vertically all certain range of movement can be arranged, cavity 8 can fill 7 by gas, rubber, metal-rubber or liquid.Medium as filling is liquid or gas, needs cavity 8 sealings, and by solenoid valve 14 realization ACTIVE CONTROL the low-frequency resonance frequency of system is controlled.Be connected on the vibration reduction platform 13 by the piston type mechanisms of filling carrier supported by these, at first vibration source carried out by a relatively large margin isolation or decay on broad frequency band; There are being the ACTIVE CONTROL parts to be connected by between damping means and the passive damping part, by vibration transducer (absolute velocity sensor 2, level sensor 9, vertical position sensor 10), signal processor, data acquisition unit, computing decision-making device, motor driver, and two linear electric motor on level and the Vertical direction (vertically linear electric motor 3 and horizontal linear motor 4) are formed, accurately locate, so that isolated by vibration damping object and external interference, or after interference is attenuated rapidly, still make system keep high-precision location positioning.
Wherein, cavity 8 has a mobile piston 6, connect by sealing film or elasticity dish spring 5, as shown in Figure 2, the section of sealing film 5 can be a different shape, semicircle (2a), triangle or V-arrangement (2b), folding property or M (2c), s type (2d), various combinations such as MV (2e) and multiple corrugated form (2f) etc. can produce the structure of plastic deformation.
This piston 6 is supported by packing 7 and has connecting rod 11, and this connecting rod 11 is connected to vibration reduction platform 13, carries out passive vibration isolation to being formed anti-bearing pressure by the object 1 of vibration damping/vibration isolation.Be connected with sealing film or elasticity dish spring 5 between this piston 6 and the connecting rod 11, the section of sealing film is semicircle or triangle or V-arrangement or folding shape or M shape or S shape or MV combination shape or corrugated.When using liquid or gas to fill, can adopt active valve 14 to carry out the adjusting of cushion effect, to reach optimal control.In the horizontal direction, piston rod is carried out forming small size simple harmonic motion by damping material 12 flexible support, form cushion effect and carry out the vibration isolation of substantially horizontal.Make feedback by the velocity transducer 2 of level and vertical direction and form damping force; By the linear electric motor 3 of vertical direction and the linear electric motor 4 of substantially horizontal, the position signal that obtains by level sensor 9, vertical position sensor 10 feeds back, and obtains response force fast, carries out accurate position compensation.
The electrical equipment of system is formed and comprised: gas/liquid power controller and control valve, linear electric motor, sensor (as position transducer, velocity transducer, temperature transducer), preamplifier, connection cable and joint, driver amplifier are servo integrated circuit board etc.
The feedback control circuit of Mechatronic Systems comprises two parts, the one, and gas/liquid dynamic Control loop; The 2nd, the electrical equipment control loop, as shown in Figure 4.First loop mainly is to drive gas-liquid/power loop, realize the motion of vertical direction, three main feedback loops have been comprised, be position feedback loop, pressure feedback loop and obtain pseudo-pressure circuit by the speed differential, additionally inject and realize shake control with external signal, mainly be for the state of creeping appears in final controlling element, as shown in Figure 5.In second electrical equipment feedback loop, final controlling element is linear electric motor, not only to carry out the control of vertical direction, but also to carry out the control of substantially horizontal, in this loop, position feedback loop, inertia damping feedback loop, noise filtering loop and jitter compensation and the feedforward compensation of moving element when motion vertical, substantially horizontal have been comprised, as shown in Figure 7.
Being preferred embodiment of the present invention only in sum, is not to be used for limiting practical range of the present invention.Be that all equivalences of doing according to the content of the present patent application claim change and modification, all should be technology category of the present invention.
Claims (10)
1, a kind of precision vibration damping and positioning device, it is characterized in that: it comprises that passive damping part and active damping power unit form jointly, wherein, passive damping part is a kind of horizontal stroke, vertically all can has the cavity of certain range of movement to construct, the piston type mechanism that supports by this cavity is connected to by on the platform of vibration damping, and vibration source is carried out by a relatively large margin isolation or decay on broad frequency band; There are being the ACTIVE CONTROL parts to be connected by between damping means and the passive damping part, these ACTIVE CONTROL parts are by vibration transducer, signal processor, data acquisition unit, computing decision-making device, motor driver, and two linear electric motor compositions on level and the Vertical direction, accurately locate.
2, precision vibration damping according to claim 1 and positioning device is characterized in that: the filled media in this cavity is liquid or gas, needs the cavity sealing, and by solenoid valve realization ACTIVE CONTROL the low-frequency resonance frequency of system is controlled.
3, precision vibration damping according to claim 1 and positioning device is characterized in that: the filled media in the cavity is rubber or sponge or metal-rubber.
4, according to claim 1 or 2 or 3 described precision vibration damping and positioning devices, it is characterized in that: this cylinder body has a mobile piston, connects by sealing film or elasticity dish spring.
5, according to claim 1 or 2 or 3 described precision vibration damping and positioning devices, it is characterized in that: the section of sealing film is semicircle or triangle or V-arrangement or folding shape or M shape or S shape or MV combination shape or corrugated.
6, according to claim 1 or 2 or 3 described precision vibration damping and positioning devices, it is characterized in that: this piston has connecting rod, and connecting rod is connected to vibration reduction platform to being formed support reaction by the object of vibration damping/vibration isolation.
7, precision vibration damping according to claim 6 and positioning device is characterized in that: be connected with sealing film or elasticity dish spring between this piston and the connecting rod.
8, precision vibration damping according to claim 7 and positioning device is characterized in that: the section of sealing film is semicircle or triangle or V-arrangement or folding shape or M shape or S shape or MV combination shape or corrugated.
9, according to claim 1 or 2 or 3 described precision vibration damping and positioning devices, it is characterized in that: make feedback by the velocity transducer of level and vertical direction and form damping force; By the linear electric motor of vertical direction and the linear electric motor of substantially horizontal, by the position transducer of substantially horizontal, the position signal that the position transducer of vertical direction obtains feeds back, and obtains response force fast, carries out accurate position compensation.
10, precision vibration damping according to claim 9 and positioning device is characterized in that: this level and position transducer vertical direction are contactless vortex sensors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510026019 CN1724892A (en) | 2005-05-20 | 2005-05-20 | Precision vibration damping and locating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510026019 CN1724892A (en) | 2005-05-20 | 2005-05-20 | Precision vibration damping and locating device |
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| CN1724892A true CN1724892A (en) | 2006-01-25 |
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| CN 200510026019 Pending CN1724892A (en) | 2005-05-20 | 2005-05-20 | Precision vibration damping and locating device |
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| CN100461365C (en) * | 2006-06-12 | 2009-02-11 | 上海微电子装备有限公司 | High precision silicon slice bench and uses thereof |
| CN100504106C (en) * | 2007-09-17 | 2009-06-24 | 上海微电子装备有限公司 | Cylinder piston vibration damping device |
| CN102109350A (en) * | 2010-11-29 | 2011-06-29 | 北京航空航天大学 | Damping method for forced vibration of inertially stabilized platform |
| CN102162500A (en) * | 2011-03-11 | 2011-08-24 | 华中科技大学 | Precision active vibration absorption device |
| CN102207240A (en) * | 2010-03-31 | 2011-10-05 | 上海微电子装备有限公司 | Precise motion platform with vibration dampers |
| CN102230508A (en) * | 2011-03-29 | 2011-11-02 | 华中科技大学 | Load gravity center-adaptive active vibration absorber and vibration absorbing system formed by same |
| CN102494859A (en) * | 2011-11-15 | 2012-06-13 | 上海卫星工程研究所 | Fixed frequency calibration test method of spacecraft vibration |
| CN101230887B (en) * | 2007-01-24 | 2012-07-04 | 上海乐金广电电子有限公司 | Method for compensation of vibration of horizontal stage electric machine |
| CN102537196A (en) * | 2010-12-24 | 2012-07-04 | 上海微电子装备有限公司 | Active vibration damping system as well as vibration damping unit and absolute displacement measuring device thereof |
| CN102776898A (en) * | 2012-08-03 | 2012-11-14 | 中国联合工程公司 | Vibration-proof structure of independent foundation and construction method thereof |
| CN102979850A (en) * | 2011-09-07 | 2013-03-20 | 纬创资通股份有限公司 | Method for preparing vibration isolation system and electronic device thereof |
| CN103226361A (en) * | 2013-04-28 | 2013-07-31 | 上海宏力半导体制造有限公司 | Method and structure of controlling Z direction of optical platform with active vibration isolation system |
| CN103629298A (en) * | 2013-12-01 | 2014-03-12 | 国网河南省电力公司安阳供电公司 | Vibration reduction method and device for large-and-middle-scale motors |
| CN103671691A (en) * | 2012-09-07 | 2014-03-26 | 沙郎斯基股份公司 | Brush making machine and method used for reducing vibration |
| CN105403154A (en) * | 2015-12-21 | 2016-03-16 | 中国科学院长春光学精密机械与物理研究所 | Support apparatus capable of realizing active surface shape control of optical element |
| CN106989133A (en) * | 2017-06-06 | 2017-07-28 | 哈尔滨工业大学 | Based on piezoelectric ceramics with quartzy cycloid recombination mechanism every micro- vibrating device |
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| CN107044505A (en) * | 2017-06-06 | 2017-08-15 | 哈尔滨工业大学 | Based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device |
| CN107084224A (en) * | 2017-06-06 | 2017-08-22 | 哈尔滨工业大学 | Based on the quartzy cycloid recombination mechanism of magnetostriction and straight groove structure every micro- vibrating device |
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| CN108121166A (en) * | 2016-11-30 | 2018-06-05 | 上海微电子装备（集团）股份有限公司 | A kind of active vibration absorber and micropositioner |
| CN108376000A (en) * | 2018-01-11 | 2018-08-07 | 中国机械工业集团有限公司 | A kind of distributed wireless pressure feedback offset-type air supporting vibration control system |
| CN108789423A (en) * | 2017-04-28 | 2018-11-13 | 上海微电子装备（集团）股份有限公司 | Film magazine transfer robot |
| CN110868007A (en) * | 2019-11-27 | 2020-03-06 | 大连佳峰自动化股份有限公司 | Damping mechanism of linear motor |
| CN112228494A (en) * | 2020-09-24 | 2021-01-15 | 中国科学院微电子研究所 | Active damping system and scanning electron microscope with same |
| CN113220047A (en) * | 2021-05-07 | 2021-08-06 | 上海御微半导体技术有限公司 | Vibration damping device, semiconductor processing equipment and vibration damping method |
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-
2005
- 2005-05-20 CN CN 200510026019 patent/CN1724892A/en active Pending
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| CN100461365C (en) * | 2006-06-12 | 2009-02-11 | 上海微电子装备有限公司 | High precision silicon slice bench and uses thereof |
| CN101230887B (en) * | 2007-01-24 | 2012-07-04 | 上海乐金广电电子有限公司 | Method for compensation of vibration of horizontal stage electric machine |
| CN100504106C (en) * | 2007-09-17 | 2009-06-24 | 上海微电子装备有限公司 | Cylinder piston vibration damping device |
| CN102207240A (en) * | 2010-03-31 | 2011-10-05 | 上海微电子装备有限公司 | Precise motion platform with vibration dampers |
| CN102109350A (en) * | 2010-11-29 | 2011-06-29 | 北京航空航天大学 | Damping method for forced vibration of inertially stabilized platform |
| CN102537196A (en) * | 2010-12-24 | 2012-07-04 | 上海微电子装备有限公司 | Active vibration damping system as well as vibration damping unit and absolute displacement measuring device thereof |
| CN102162500A (en) * | 2011-03-11 | 2011-08-24 | 华中科技大学 | Precision active vibration absorption device |
| CN102162500B (en) * | 2011-03-11 | 2012-05-23 | 华中科技大学 | Precision active vibration absorption device |
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| CN102494859A (en) * | 2011-11-15 | 2012-06-13 | 上海卫星工程研究所 | Fixed frequency calibration test method of spacecraft vibration |
| CN102776898A (en) * | 2012-08-03 | 2012-11-14 | 中国联合工程公司 | Vibration-proof structure of independent foundation and construction method thereof |
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| CN107165979A (en) * | 2017-06-06 | 2017-09-15 | 哈尔滨工业大学 | Based on ultra-magnetic telescopic with quartzy cycloid recombination mechanism every micro- vibrating device |
| CN107023605B (en) * | 2017-06-06 | 2018-08-17 | 哈尔滨工业大学 | Based on magnetostriction with helical structure quartz cycloid recombination mechanism every micro- vibrating device |
| CN107165979B (en) * | 2017-06-06 | 2018-09-14 | 哈尔滨工业大学 | Based on ultra-magnetic telescopic with quartzy cycloid recombination mechanism every micro- vibrating device |
| CN106989133B (en) * | 2017-06-06 | 2018-10-23 | 哈尔滨工业大学 | Based on piezoelectric ceramics with quartzy cycloid recombination mechanism every micro- vibrating device |
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| CN107044505A (en) * | 2017-06-06 | 2017-08-15 | 哈尔滨工业大学 | Based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device |
| CN108376000A (en) * | 2018-01-11 | 2018-08-07 | 中国机械工业集团有限公司 | A kind of distributed wireless pressure feedback offset-type air supporting vibration control system |
| CN110868007A (en) * | 2019-11-27 | 2020-03-06 | 大连佳峰自动化股份有限公司 | Damping mechanism of linear motor |
| CN112228494A (en) * | 2020-09-24 | 2021-01-15 | 中国科学院微电子研究所 | Active damping system and scanning electron microscope with same |
| CN113220047A (en) * | 2021-05-07 | 2021-08-06 | 上海御微半导体技术有限公司 | Vibration damping device, semiconductor processing equipment and vibration damping method |
| CN113220047B (en) * | 2021-05-07 | 2022-02-11 | 上海御微半导体技术有限公司 | Vibration damping device, semiconductor processing equipment and vibration damping method |
| CN113531029A (en) * | 2021-07-12 | 2021-10-22 | 江苏科技大学 | Vibration damping cylinder stirring type base vibration attenuation device |
| CN113531029B (en) * | 2021-07-12 | 2021-12-21 | 江苏科技大学 | Vibration damping cylinder stirring type base vibration attenuation device |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
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