CN109877628A - A kind of big stroke cutter servo device and its control method based on combination drive - Google Patents
A kind of big stroke cutter servo device and its control method based on combination drive Download PDFInfo
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Abstract
A kind of big stroke cutter servo device and its control method based on combination drive of disclosure of the invention, including Piexoelectric actuator, Lorentz force driving device, matrix, flexible guiding mechanism, fill knife platform and displacement sensor, Piexoelectric actuator and Lorentz force driving device are set on matrix, Lorentz force driving device is connected to the rear end of Piexoelectric actuator, dress knife platform is fixed on the front end of Piexoelectric actuator, Piexoelectric actuator is connect by the flexible guiding mechanism of its two sides with matrix, displacement sensor is used to measure the displacement of the cutter, the control method includes voice coil motor opened loop control and the control of Piezoelectric Driving closed loop compensation, the present invention has both Lorentz force and drives big stroke advantage and Piezoelectric Driving high frequency sound, sub-nanometer Motion Resolution rate advantage, with the high frequency sound piezoelectricity compensation system speed of response, realize cutting tool path The tracking of quick, ultraprecise, can greatly expand FTS system cutting power.
Description
Technical field
The invention belongs to technical field of servo control, in particular to a kind of big stroke Tool Servo dress based on combination drive
It sets and its control method.
Background technique
Complex optical surfaces with many excellent characteristics in different field due to being widely used, and the class component
The increase of surface complexity proposes higher challenge to its manufacturing technology, and is based on fast tool servo (Fast tool
Servo, hereinafter referred to as FTS) single point diamond cutting technology be considered as the great development prospect of such complicated optics
Manufacturing technology.
In the development in more than 30 years, FTS technology achieves significant progress.To obtain different working performances, it is based on FTS
Single point diamond cutting technology driving method mainly have Piezoelectric Driving, Lorentz force driving and Maxwell's normal stress drive
It moves；And its movement guide mechanism then generallys use the modes such as compliant mechanism and air-float guide rail.Wherein, Lorentz force driving combines
Compliant mechanism or air-float guide rail, which are mainly used in, realizes big stroke FTS, and its low driving force density then makes response speed slower,
It is difficult to realize the high bandwidth of track, quickly tracks.Piezoelectric Driving and Maxwell's normal stress drive then general with compliant mechanism
Be used to realize high bandwidth and low stroke motion, be suitable for micro-nano functional structure surface cutting wound at.Driving principle is limited to,
Piezoelectric Driving and Maxwell's normal stress are generally difficult to be directly realized by big stroke motion.Therefore, regardless of using which kind of driving or fortune
Action-oriented mode, inevitably there is the physics contradictions between movement travel and response speed.
Summary of the invention
For above-mentioned defect, the purpose of the present invention is to provide a kind of, and the big stroke cutter based on combination drive is watched
Clothes are set and its control method, realize that big stroke and sub-nanometer are differentiated with Lorentz force and piezoelectricity combination drive flexible guiding mechanism
The movement of rate cutter positioning.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of big stroke cutter servo device based on combination drive, including Piexoelectric actuator, Lorentz force driving dress
It sets, matrix, flexible guiding mechanism, fill knife platform and displacement sensor, the Piexoelectric actuator and Lorentz force driving device
It is set in described matrix, the Lorentz force driving device is connected to the rear end of the Piexoelectric actuator, and the dress knife is flat
Platform is fixed on the front end of Piexoelectric actuator, and the Piexoelectric actuator passes through the flexible guiding mechanism and described matrix of its two sides
Connection, the dress knife platform are used to measure the displacement of the cutter for installing cutter, institute's displacement sensors.
Further, the Lorentz force driving device is voice coil motor.
Further, the voice coil motor includes permanent magnet, coil, stator core and mover, the stator core and base
Body is fixedly connected, and the mover is sheathed on the outside of the stator core, and the coil is wrapped in the outer surface of mover, it is described forever
Magnet is set to the outside of the coil.
Further, Piexoelectric actuator includes piezoelectric actuator and bridge type flexible mechanism, and the piezoelectric actuator is placed
In-house in bridge type flexible and pre-tightened by bolt, the dress knife platform is fixed on an output of bridge type flexible mechanism
End, the flexible guiding mechanism are located at the two sides of bridge type flexible mechanism input/output terminal.
Further, the Piexoelectric actuator be axially symmetric structure and with the mover integrally connected.
Further, the flexible guiding mechanism includes four flexible hinges, and the two sides of the Piexoelectric actuator are distinguished
It is connect by two flexible hinges with described matrix.
It further, further include sensor base, institute's displacement sensors are fixed in the sensor base.
According to the control method of the big stroke cutter servo device described above based on combination drive, the control method
It is controlled including voice coil motor (VCM) opened loop control and Piezoelectric Driving (PEA) closed loop compensation,
The control process of the voice coil motor opened loop control includes:
Step 1.1, the kinetics equation of voice coil motor driving device is acquired according to the structure of voice coil motor:
Wherein, MpEquivalent movement quality for PEA driving device with respect to Lorentz force driving；MVIt is opposite for VCM driving device
The equivalent movement quality of Lorentz force driving；cVFor the Equivalent damping coefficient of VCM driving device；For the defeated of VCM driving device
Enter rigidity；Y (t) is the tool displacement in time domain；FLIt (t) is the driving force of stroke cutter servo device big in time domain；
Step 1.2, to the kinetics equation carry out Laplace convert to obtain voice coil motor transmission function so that it is determined that
The order of voice coil motor,
Wherein, PVIt (s) is the realistic model of VCM driving device；Y (s) is the tool displacement in frequency domain；Vm(s) in frequency domain
The voltage being applied on VCM；N is coil turn；B is the magnetic field strength for acting on coil clearance；L is every circle coil useful effect
Length；LmFor driving coil equivalent inductance；RmFor driving coil equivalent resistance；KmvsFor anti-electromagnetism force constant；T (s) is in frequency domain
The driving force of big stroke cutter servo device；S is complex variable, corresponding to the variable t in time domain；
Step 1.3, the inverse of the nominal plant model obtained is recognized with the input signal R (s) of servomechanism installation and open-loop control systemFreedom degree is introduced to be more than or equal toFreedom degree low-pass filter Q (s),
Wherein: τf=(2 π fc)-1,fcFor low pass filter cutoff frequency；
Step 1.4, willThe voice coil motor driving coil is acted on, realizes track open-loop tracking；
The control process of the Piezoelectric Driving closed loop compensation includes:
Step 2.1, the difference of the input voltage signal R (s) and Y (s) of servomechanism installation are obtained as closed loop compensation system motion
Error E (s),
Step 2.2, which is input to the influence meter in controller C (s) and considering external disturbance d (s)
Calculate the realistic model P for obtaining PEA driving deviceP(s), and it is output in piezoelectric actuator, realizes Piezoelectric Driving to system motion
Tracing compensation, in which:
ρkFor weight coefficient；ε > 0 is that (ε is the parameter of controller C (s) to controller parameter, practical controller parameter design
When, ε can be preset as a certain constant, to obtain optimal weights coefficient ρk, with given Phase margin, magnitude margin and cutoff frequency
For constraint condition, systematic steady state tracking error is reduced as design object using low frequency high-gain and enhances Ability of Resisting Disturbance)；
K=KaRP(Ra+RP)-t (7)
τ=RaRPCP(Ra+RP)-1 (8)
PPIt (s) is the realistic model of PEA driving device；X (s) is PEA driving device output displacement；VcIt (s) is to be applied in frequency domain
The voltage being added on PEA；nPFor the piezo-electric stack number of plies；d33For piezoelectric constant (piezoelectric ceramics piezoelectric constant d33=4.6 × 10-10)；
kPFor PEA rigidity；APFor amplification ratio；KaFor the amplification coefficient of piezoelectric power amplifier；RPFor the equivalent resistance of PEA；RaFor piezoelectricity
The equivalent resistance of power amplifier；CPFor the equivalent capacity of PEA；MBFor the equivalent movement quality of bridge type flexible mechanism；cBFor bridge-type
The damped coefficient of compliant mechanism；For the input rigidity of Piexoelectric actuator.
Compared with prior art, the present invention its remarkable advantage is:
(1) present invention has both Lorentz force and drives big stroke advantage and Piezoelectric Driving high frequency sound, sub-nanometer Motion Resolution rate
Advantage is realized the quick of cutting tool path, ultraprecise tracking, can greatly be opened up with the high frequency sound piezoelectricity compensation system speed of response
Open up FTS system cutting power；(2) Piexoelectric actuator is axially symmetric structure, can effectively offset Piezoelectric Driving inertia force to voice coil
The disturbance of electric mover, to realize the Dynamics Decoupled of piezoelectricity and voice coil motor drive systems；(3) the present invention is based on combined drives
For the control method of dynamic big stroke cutter servo device under the driving of close-loop driven voltage, piezoelectricity does corresponding sports and soft in bridge-type
Property mechanism guiding, driving dress knife platform moves in a straight line under amplification, Piezoelectric Driving linear motion superposition voice coil motor
Linear motion, can compensate for voice coil motor open loop kinematic error, is calculated with systematic error and obtains voltage for piezoelectric actuation signal, piezoelectricity
Drive system can compensate system motion error brought by external disturbance simultaneously.
Detailed description of the invention
Fig. 1 is that the present invention is based on the overall structure diagrams of the big stroke cutter servo device of combination drive.
Fig. 2 is the transverse sectional view of part-structure in Fig. 1.
Fig. 3 is Piexoelectric actuator dependency structure enlarged drawing in Fig. 1.
Fig. 4 is that the present invention is based on the control block diagrams of the control method of the big stroke cutter servo device of combination drive.
Specific embodiment
With reference to the accompanying drawings of the specification, the present invention is further illustrated.
In conjunction with Fig. 1-2, a kind of big stroke cutter servo device based on combination drive, including Piexoelectric actuator, long-range navigation
Hereby force driving device, matrix 3, flexible guiding mechanism 7, dress knife platform 8 and displacement sensor 4, the Piexoelectric actuator and Lip river
Hereby force driving device is set in described matrix 3 for human relations, and the Lorentz force driving device is connected to the Piexoelectric actuator
Rear end, the dress knife platform 8 are fixed on the front end of Piexoelectric actuator, and the Piexoelectric actuator is led by the flexibility of its two sides
It is connect to mechanism 7 with described matrix 3, the dress knife platform 8 is for installing cutter, in actual use as needed needed for installation
Cutter, institute's displacement sensors 4 are used to measure the displacement of the cutter.
Further, the Lorentz force driving device is voice coil motor 2.
Further, in conjunction with Fig. 2, the voice coil motor 2 includes permanent magnet 11, coil 12, stator core 13 and mover 14,
The stator core 13 is fixedly connected with matrix 3, and the mover 14 is sheathed on the outside of the stator core 13, the coil 12
It is wrapped in the outer surface of mover 14, the permanent magnet 11 is set to the outside of the coil 12.
Further, in conjunction with Fig. 3, Piexoelectric actuator includes piezoelectric actuator 5 and bridge type flexible mechanism 9, the piezoelectricity
Driver 5 is placed in 9 inside of bridge type flexible mechanism and is pre-tightened by bolt, and the dress knife platform 8 is fixed on bridge type flexible machine
One output end of structure 9, the flexible guiding mechanism 7 are located at the two sides of 9 input/output terminal of bridge type flexible mechanism.
Further, in conjunction with Fig. 2-3, the Piexoelectric actuator is axially symmetric structure and integrally connects with the mover 14
It connects.
Further, the flexible guiding mechanism 7 includes four flexible hinges 1, the two sides point of the Piexoelectric actuator
Not Tong Guo two flexible hinges 1 connect with described matrix 3.
It further, further include sensor base 6 in conjunction with Fig. 1, institute's displacement sensors 4 are fixed on the sensor base
On body 6.
It is described according to the control method of the big stroke cutter servo device described above based on combination drive in conjunction with Fig. 4
Control method includes that voice coil motor (VCM) opened loop control and Piezoelectric Driving (PEA) closed loop compensation control,
The control process of the voice coil motor opened loop control includes:
Step 1.1, the kinetics equation of voice coil motor driving device is acquired according to the structure of voice coil motor:
Wherein, MpEquivalent movement quality for PEA driving device with respect to Lorentz force driving；MVIt is opposite for VCM driving device
The equivalent movement quality of Lorentz force driving；cVFor the Equivalent damping coefficient of VCM driving device；For the defeated of VCM driving device
Enter rigidity；Y (t) is the tool displacement in time domain；FLIt (t) is the driving force of stroke cutter servo device big in time domain；
Step 1.2, to the kinetics equation carry out Laplace convert to obtain voice coil motor transmission function so that it is determined that
The order of voice coil motor,
Wherein, PVIt (s) is the realistic model of VCM driving device；Y (s) is the tool displacement in frequency domain；Vm(s) in frequency domain
The voltage being applied on VCM；N is coil turn；B is the magnetic field strength for acting on coil clearance；L is every circle coil useful effect
Length；LmFor driving coil equivalent inductance；RmFor driving coil equivalent resistance；KmvsFor anti-electromagnetism force constant；T (s) is in frequency domain
The driving force of big stroke cutter servo device；S is complex variable, corresponding to the variable t in time domain；
Step 1.3, the inverse of the nominal plant model obtained is recognized with the input signal R (s) of servomechanism installation and open-loop control systemFreedom degree is introduced to be more than or equal toFreedom degree low-pass filter Q (s),
Wherein: τf=(2 π fc)-1,fcFor low pass filter cutoff frequency；
Step 1.4, willThe voice coil motor driving coil is acted on, realizes track open-loop tracking；
The control process of the Piezoelectric Driving closed loop compensation includes:
Step 2.1, the difference of the input voltage signal R (s) and Y (s) of servomechanism installation are obtained as closed loop compensation system motion
Error E (s),
Step 2.2, which is input to the influence meter in controller C (s) and considering external disturbance d (s)
Calculate the realistic model P for obtaining PEA driving deviceP(s), and it is output in piezoelectric actuator, realizes Piezoelectric Driving to system motion
Tracing compensation, in which:
ρkFor weight coefficient；ε > 0 is that (ε is the parameter of controller C (s) to controller parameter, practical controller parameter design
When, ε can be preset as a certain constant, to obtain optimal weights coefficient ρk, with given Phase margin, magnitude margin and cutoff frequency
For constraint condition, systematic steady state tracking error is reduced as design object using low frequency high-gain and enhances Ability of Resisting Disturbance)；
K=KaRP(Ra+RP)-1 (7)
τ=RaRPCP(Ra+RP)-1 (8)
PPIt (s) is the realistic model of PEA driving device；X (s) is PEA driving device output displacement；VcIt (s) is to be applied in frequency domain
The voltage being added on PEA；nPFor the piezo-electric stack number of plies；d33For piezoelectric constant (piezoelectric ceramics piezoelectric constant d33=4.6 × 10-10)；
kPFor PEA rigidity；APFor amplification ratio；KaFor the amplification coefficient of piezoelectric power amplifier；RPFor the equivalent resistance of PEA；RaFor piezoelectricity
The equivalent resistance of power amplifier；CPFor the equivalent capacity of PEA；MBFor the equivalent movement quality of bridge type flexible mechanism；cBFor bridge-type
The damped coefficient of compliant mechanism；For the input rigidity of Piexoelectric actuator.
The course of work of the invention can be divided into three kinds of operating modes:
Mode 1: not providing drive voltage signal to piezoelectric actuator 5, that is, Piexoelectric actuator does not work, and only gives voice coil
Motor 2 provides control signal, and driving coil 12 drives mover 14 in 2 flexible guiding of voice coil motor under the driving of opened loop control voltage
Mechanism 7 moves in a straight line (the up and down direction movement i.e. in Fig. 2) under acting on, the movement that big stroke low frequency is rung may be implemented, fit
For of less demanding to tracking accuracy but to the higher application of range demands.
Mode 2: control signal is not provided to voice coil motor 2, that is, Lorentz force driving device does not work, is only driven to piezoelectricity
Dynamic device 5 provides drive voltage signal, and driving dress knife platform 8 moves in a straight line under the guiding of bridge type flexible mechanism 9, amplification,
The movement that small distance high frequency sound may be implemented, suitable for applied field more demanding to tracking accuracy but not high to range demands
It closes.
Mode 3: driving coil 12 drives mover 14 in voice coil motor flexible guiding mechanism 7 under the driving of opened loop control voltage
It being moved in a straight line under effect, Piexoelectric actuator series connection is fixed on mover 14, under the driving of close-loop driven voltage, Piezoelectric Driving
Device 5 does corresponding sports and driving dress knife platform 8 moves in a straight line under the guiding of bridge type flexible mechanism 9, amplification, which drives
Dynamic linear motion is superimposed on voice coil motor linear motion, and compensates voice coil motor open loop kinematic error.By using control
It is calculated in strategy with systematic error and obtains voltage for piezoelectric actuation signal, piezo driven systems can compensate simultaneously external disturbance and be brought
System motion error, be suitable for big stroke and the demanding application of tracking accuracy.
Basic principles and main features and advantage of the invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, and the above embodiments and description only describe originals of the invention
Reason, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes and improvements
It all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appended claims and its equivalent circle
It is fixed.
Claims (8)
1. a kind of big stroke cutter servo device based on combination drive, which is characterized in that including Piexoelectric actuator, Lorentz
Force driving device, matrix (3), flexible guiding mechanism (7), dress knife platform (8) and displacement sensor (4), the Piezoelectric Driving dress
It sets and is set on described matrix (3) with Lorentz force driving device, the Lorentz force driving device is connected to the piezoelectricity and drives
The rear end of dynamic device, dress knife platform (8) are fixed on the front end of Piexoelectric actuator, the Piexoelectric actuator by its two
The flexible guiding mechanism (7) of side is connect with described matrix (3), and the dress knife platform (8) is for installing cutter, the displacement sensing
Device (4) is used to measure the displacement of the cutter.
2. the big stroke cutter servo device according to claim 1 based on combination drive, which is characterized in that the long-range navigation
Hereby force driving device is voice coil motor (2).
3. the big stroke cutter servo device according to claim 2 based on combination drive, which is characterized in that the voice coil
Motor (2) includes permanent magnet (11), coil (12), stator core (13) and mover (14), the stator core (13) and matrix
(3) it is fixedly connected, the mover (14) is sheathed on the outside of the stator core (13), and the coil (12) is wrapped in mover
(14) outer surface, the permanent magnet (11) are set to the outside of the coil (12).
4. the big stroke cutter servo device according to claim 3 based on combination drive, which is characterized in that Piezoelectric Driving
Device includes piezoelectric actuator (5) and bridge type flexible mechanism (9), and the piezoelectric actuator (5) is placed in bridge type flexible mechanism (9)
Inside is simultaneously pre-tightened by bolt, and dress knife platform (8) is fixed on an output end of bridge type flexible mechanism (9), described soft
Property guiding mechanism (7) is located at the two sides of bridge type flexible mechanism (9) input/output terminal.
5. the big stroke cutter servo device according to claim 4 based on combination drive, which is characterized in that the piezoelectricity
Driving device be axially symmetric structure and with the mover (14) integrally connected.
6. the big stroke cutter servo device according to claim 1-5 based on combination drive, which is characterized in that
The flexible guiding mechanism (7) includes four flexible hinges (1), and the two sides of the Piexoelectric actuator pass through two flexibilities respectively
Hinge (1) is connect with described matrix (3).
7. the big stroke cutter servo device according to claim 6 based on combination drive, which is characterized in that further include passing
Sensor matrix (6), institute's displacement sensors (4) are fixed on the sensor base (6).
8. according to the control method of the described in any item big stroke cutter servo devices based on combination drive of claim 2-7,
It is characterized in that, the control method includes that voice coil motor (VCM) opened loop control and Piezoelectric Driving (PEA) closed loop compensation control,
The control process of the voice coil motor opened loop control includes:
Step 1.1, the kinetics equation of voice coil motor driving device is acquired according to the structure of voice coil motor:
Wherein, MpEquivalent movement quality for PEA driving device with respect to Lorentz force driving；MVIt is VCM driving device with respect to long-range navigation
The hereby equivalent movement quality of power drive；cVFor the Equivalent damping coefficient of VCM driving device；Input for VCM driving device is rigid
Degree；Y (t) is the tool displacement in time domain；FLIt (t) is the driving force of stroke cutter servo device big in time domain；
Step 1.2, Laplace is carried out to the kinetics equation and converts to obtain the transmission function of voice coil motor so that it is determined that voice coil
The order of motor,
Wherein, PVIt (s) is the realistic model of VCM driving device；Y (s) is the tool displacement in frequency domain；VmIt (s) is application in frequency domain
Voltage on VCM；N is coil turn；B is the magnetic field strength for acting on coil clearance；L is that every circle coil useful effect is long
Degree；LmFor driving coil equivalent inductance；RmFor driving coil equivalent resistance；KmvsFor anti-electromagnetism force constant；T (s) is big in frequency domain
The driving force of stroke cutter servo device；S is complex variable, corresponding to the variable t in time domain；
Step 1.3, the inverse of the nominal plant model obtained is recognized with the input signal R (s) of servomechanism installation and open-loop control system
Freedom degree is introduced to be more than or equal toFreedom degree low-pass filter Q (s),
Wherein: τf=(2 π fc)-1, fcFor low pass filter cutoff frequency；
Step 1.4, willThe voice coil motor driving coil is acted on, realizes track open-loop tracking；
The control process of the Piezoelectric Driving closed loop compensation includes:
Step 2.1, the difference of the input voltage signal R (s) and Y (s) of servomechanism installation are obtained as closed loop compensation system motion error E
(s),
Step 2.2, which is input to and in controller C (s) and considers that the influence calculating of external disturbance d (s) obtains
Obtain the realistic model P of PEA driving deviceP(s), and it is output in piezoelectric actuator, realizes tracking of the Piezoelectric Driving to system motion
Compensation, in which:
pkFor weight coefficient；ε > 0 is controller parameter；
K=KaRP(Ra+RP)-1 (7)
τ=RaRPCP(Ra+RP)-1 (8)
PPIt (s) is the realistic model of PEA driving device；X (s) is PEA driving device output displacement；VcIt (s) is to be applied in frequency domain
Voltage on PEA；nPFor the piezo-electric stack number of plies；d33For piezoelectric constant 4.6 × 10-10；kPFor PEA rigidity；APFor amplification ratio；KaFor
The amplification coefficient of piezoelectric power amplifier；RPFor the equivalent resistance of PEA；RaFor the equivalent resistance of piezoelectric power amplifier；CPFor
The equivalent capacity of PEA；MBFor the equivalent movement quality of bridge type flexible mechanism；cBFor the damped coefficient of bridge type flexible mechanism；For
The input rigidity of Piexoelectric actuator.
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|---|---|---|---|---|
| CN111487922A (en) * | 2020-04-07 | 2020-08-04 | 南京理工大学 | Cascade cross-scale cutter servo device and high-frequency control method thereof |
| CN111571280A (en) * | 2020-04-28 | 2020-08-25 | 南京理工大学 | Novel hybrid drive triaxial quick cutter servo device |
| CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
| CN112276639A (en) * | 2020-10-22 | 2021-01-29 | 山东大学深圳研究院 | Macro-micro double-drive type large-stroke high-precision fast cutter servo device |
| CN112965343A (en) * | 2021-02-08 | 2021-06-15 | 上海度宁科技有限公司 | Workpiece table structure, photoetching system comprising same and exposure method thereof |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1491189A1 (en) * | 1987-06-29 | 1991-10-15 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Motion system of srectrometer |
| JPH0631576A (en) * | 1992-07-22 | 1994-02-08 | Toyoda Mach Works Ltd | Tool slide device |
| US20060044698A1 (en) * | 2004-08-26 | 2006-03-02 | Toshiki Hirano | Disk drive with rotary piezoelectric microactuator |
| US7079338B1 (en) * | 2005-06-03 | 2006-07-18 | Hitachi Global Storagetechnologies Netherlands B.V. | Dual-stage actuator disk drive with method for secondary-actuator failure detection and recovery while track-following |
| JP2007083332A (en) * | 2005-09-21 | 2007-04-05 | Ｎｅｘｔ Ｉ＆Ｄ株式会社 | Cut-off device and cutter holder for the same |
| CN103116314A (en) * | 2013-02-05 | 2013-05-22 | 中国人民解放军国防科学技术大学 | Method of correction on amplitude attenuation and phase delay of fast tool servo system |
| CN204148525U (en) * | 2014-09-25 | 2015-02-11 | 吉林大学 | A kind of diaxon stand alone type high frequency Long Distances fast tool servo |
| CN106975961A (en) * | 2017-05-19 | 2017-07-25 | 广东工业大学 | A kind of long stroke fast tool servo |
| CN107282948A (en) * | 2016-04-12 | 2017-10-24 | 浙江科技学院 | A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting |
| CN108871972A (en) * | 2018-07-11 | 2018-11-23 | 合肥工业大学 | Flexible hinge micro structures bend testing apparatus with large range high precision |
| CN209986616U (en) * | 2019-03-29 | 2020-01-24 | 南京理工大学 | Large-stroke cutter servo device based on hybrid drive |
-
2019
- 2019-03-29 CN CN201910245885.4A patent/CN109877628B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1491189A1 (en) * | 1987-06-29 | 1991-10-15 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Motion system of srectrometer |
| JPH0631576A (en) * | 1992-07-22 | 1994-02-08 | Toyoda Mach Works Ltd | Tool slide device |
| US20060044698A1 (en) * | 2004-08-26 | 2006-03-02 | Toshiki Hirano | Disk drive with rotary piezoelectric microactuator |
| US7079338B1 (en) * | 2005-06-03 | 2006-07-18 | Hitachi Global Storagetechnologies Netherlands B.V. | Dual-stage actuator disk drive with method for secondary-actuator failure detection and recovery while track-following |
| JP2007083332A (en) * | 2005-09-21 | 2007-04-05 | Ｎｅｘｔ Ｉ＆Ｄ株式会社 | Cut-off device and cutter holder for the same |
| CN103116314A (en) * | 2013-02-05 | 2013-05-22 | 中国人民解放军国防科学技术大学 | Method of correction on amplitude attenuation and phase delay of fast tool servo system |
| CN204148525U (en) * | 2014-09-25 | 2015-02-11 | 吉林大学 | A kind of diaxon stand alone type high frequency Long Distances fast tool servo |
| CN107282948A (en) * | 2016-04-12 | 2017-10-24 | 浙江科技学院 | A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting |
| CN106975961A (en) * | 2017-05-19 | 2017-07-25 | 广东工业大学 | A kind of long stroke fast tool servo |
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