CN209986616U - Large-stroke cutter servo device based on hybrid drive - Google Patents
Large-stroke cutter servo device based on hybrid drive Download PDFInfo
- Publication number
- CN209986616U CN209986616U CN201920410748.7U CN201920410748U CN209986616U CN 209986616 U CN209986616 U CN 209986616U CN 201920410748 U CN201920410748 U CN 201920410748U CN 209986616 U CN209986616 U CN 209986616U
- Authority
- CN
- China
- Prior art keywords
- drive
- drive arrangement
- piezoelectric
- flexible
- cutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
The utility model discloses a big stroke cutter servo device based on hybrid drive, including piezoelectric drive arrangement, lorentz force drive arrangement, base member, flexible guiding mechanism, dress sword platform and displacement sensor, piezoelectric drive arrangement and lorentz force drive arrangement set up on the base member, and lorentz force drive arrangement connects in piezoelectric drive arrangement's rear end, and dress sword platform is fixed in piezoelectric drive arrangement's front end, and piezoelectric drive arrangement is connected with the base member through the flexible guiding mechanism of its both sides, and displacement sensor is used for measuring the displacement of cutter, the utility model discloses have the big stroke advantage of lorentz force drive and piezoelectric drive high frequency response, sub-nanometer motion resolution ratio advantage concurrently to high frequency response piezoelectricity compensating system response rate realizes quick, the ultra-precise tracking of cutter movement track, can greatly extend FTS system cutting ability.
Description
Technical Field
The utility model belongs to the technical field of servo control, in particular to big stroke cutter servo device based on hybrid drive.
Background
While complex optical surfaces have been widely used in different fields due to their excellent characteristics, the increase in surface complexity of such elements poses higher challenges to the manufacturing technology, and the single-point diamond cutting technology based on Fast Tool Servo (FTS) is considered to be a promising manufacturing technology for such complex optical elements.
In more than 30 years of development, FTS technology has grown significantly. In order to obtain different working performances, the driving modes of the FTS-based single-point diamond cutting technology are mainly piezoelectric driving, Lorentz force driving, Maxwell method stress driving and the like; the motion guide mechanism generally adopts a flexible mechanism, an air-float guide rail and other modes. The Lorentz force drive is combined with a flexible mechanism or an air-float guide rail to be mainly used for realizing the large-stroke FTS, and the low driving force density of the Lorentz force drive makes the response speed slower, so that the high-bandwidth and quick tracking of the track is difficult to realize. The piezoelectric drive and the Maxwell method stress drive are generally combined with a flexible mechanism to realize high-bandwidth and low-stroke motion, and are suitable for cutting and creating the surface of a micro-nano functional structure. The piezoelectric drive and the Maxwell method stress are generally difficult to directly realize large-stroke motion due to the limitation of a drive principle. Therefore, no matter what driving or motion guiding method is adopted, the physical contradiction between the motion stroke and the response speed is inevitable.
SUMMERY OF THE UTILITY MODEL
To the defect that exists, the utility model aims to provide a big stroke cutter servo device based on hybrid drive to lorentz power realizes big stroke and sub-nanometer resolution ratio cutter positioning motion with the flexible guiding mechanism of piezoelectricity hybrid drive.
In order to realize the purpose, the utility model discloses a technical scheme as follows:
the utility model provides a big stroke cutter servo based on hybrid drive, includes piezoelectric drive device, lorentz force drive arrangement, base member, flexible guiding mechanism, dress sword platform and displacement sensor, piezoelectric drive device and lorentz force drive arrangement set up in on the base member, lorentz force drive arrangement connect in piezoelectric drive device's rear end, dress sword platform is fixed in piezoelectric drive device's front end, piezoelectric drive device through the flexible guiding mechanism of its both sides with the base member is connected, dress sword platform is used for the installation cutter, displacement sensor is used for measuring the displacement of cutter.
Further, the lorentz force driving means is a voice coil motor.
Further, voice coil motor includes permanent magnet, coil, stator core and active cell, stator core and base member fixed connection, the active cell cover is located stator core's outside, the coil winding is at the surface of active cell, the permanent magnet set up in the outside of coil.
Furthermore, the piezoelectric driving device comprises a piezoelectric driver and a bridge-type flexible mechanism, the piezoelectric driver is placed inside the bridge-type flexible mechanism and is pre-tightened by a bolt, the knife installing platform is fixed at one output end of the bridge-type flexible mechanism, and the flexible guide mechanisms are positioned on two sides of the input end and the output end of the bridge-type flexible mechanism.
Furthermore, the piezoelectric driving device is of an axisymmetric structure and is integrally connected with the rotor.
Furthermore, the flexible guide mechanism comprises four flexible hinges, and two sides of the piezoelectric driving device are respectively connected with the base body through the two flexible hinges.
Further, the displacement sensor also comprises a sensor base body, and the displacement sensor is fixed on the sensor base body.
Compared with the prior art, the utility model, it is showing the advantage and lies in:
(1) the utility model has the advantages of Lorentz force driving large stroke and piezoelectric driving high-frequency response and sub-nanometer motion resolution, realizes the quick and ultra-precise tracking of the motion trail of the cutter by the response speed of the high-frequency response piezoelectric compensation system, and can greatly expand the cutting capability of the FTS system; (2) the piezoelectric driving device is of an axisymmetric structure, and can effectively offset the disturbance of piezoelectric driving inertia force on a rotor of the voice coil motor, so that the dynamic decoupling of a piezoelectric and voice coil motor driving system is realized; (3) the utility model discloses large stroke cutter servo device's control method based on hybrid drive is under closed loop driving voltage drive, and corresponding motion is done to piezoelectricity and drive dress sword platform and be linear motion under bridge type flexible mechanism direction, amplification, and this piezoelectric drive linear motion superposes voice coil motor's linear motion, can compensate voice coil motor open loop motion error to system error calculates and obtains piezoelectric drive voltage signal, and piezoelectric drive system can compensate the system motion error that outside disturbance brought simultaneously.
Drawings
Fig. 1 is the overall structure schematic diagram of the hybrid-drive-based large-stroke tool servo device of the present invention.
Fig. 2 is a transverse cross-sectional view of a portion of the structure of fig. 1.
Fig. 3 is an enlarged view of the structure of the piezoelectric actuator in fig. 1.
Fig. 4 is a control block diagram of the control method of the hybrid-drive-based large-stroke tool servo device of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
With reference to fig. 1-2, a hybrid drive-based large-stroke tool servo device includes a piezoelectric drive device, a lorentz force drive device, a base 3, a flexible guide mechanism 7, a tool mounting platform 8, and a displacement sensor 4, where the piezoelectric drive device and the lorentz force drive device are disposed on the base 3, the lorentz force drive device is connected to the rear end of the piezoelectric drive device, the tool mounting platform 8 is fixed to the front end of the piezoelectric drive device, the piezoelectric drive device is connected to the base 3 through the flexible guide mechanisms 7 on both sides of the piezoelectric drive device, the tool mounting platform 8 is used for mounting a tool, a required tool is mounted as required in actual use, and the displacement sensor 4 is used for measuring the displacement of the tool.
Further, the lorentz force driving means is a voice coil motor 2.
Further, with reference to fig. 2, the voice coil motor 2 includes a permanent magnet 11, a coil 12, a stator core 13 and a mover 14, the stator core 13 is fixedly connected to the base 3, the mover 14 is sleeved on the outside of the stator core 13, the coil 12 is wound on the outer surface of the mover 14, and the permanent magnet 11 is disposed on the outside of the coil 12.
Further, referring to fig. 3, the piezoelectric driving device includes a piezoelectric driver 5 and a bridge-type flexible mechanism 9, the piezoelectric driver 5 is placed inside the bridge-type flexible mechanism 9 and is pre-tightened by a bolt, the knife mounting platform 8 is fixed at an output end of the bridge-type flexible mechanism 9, and the flexible guiding mechanisms 7 are located at two sides of an input end and an output end of the bridge-type flexible mechanism 9.
Further, referring to fig. 2-3, the piezoelectric driving device has an axisymmetric structure and is integrally connected to the mover 14.
Further, the flexible guide mechanism 7 includes four flexible hinges 1, and two sides of the piezoelectric driving device are respectively connected with the base body 3 through two flexible hinges 1.
Further, referring to fig. 1, the displacement sensor further includes a sensor base 6, and the displacement sensor 4 is fixed on the sensor base 6.
With reference to fig. 4, the control method of the hybrid drive-based large-stroke tool servo device includes Voice Coil Motor (VCM) open-loop control and piezoelectric drive (PEA) closed-loop compensation control,
the control process of the voice coil motor open-loop control comprises the following steps:
step 1.1, solving a dynamic equation of the voice coil motor driving device according to the structure of the voice coil motor:
wherein M ispEquivalent moving mass driven by the PEA driving device relative to Lorentz force; mVFor VCM driving meansLorentz force driven equivalent moving masses; c. CVIs the equivalent damping coefficient of the VCM driving device;input stiffness for the VCM drive; y (t) is the tool displacement in the time domain; fL(t) is the driving force of the large-stroke tool servo device in the time domain;
step 1.2, Laplace transformation is carried out on the dynamic equation to obtain a transfer function of the voice coil motor so as to determine the order of the voice coil motor,
wherein, PV(s) is an actual model of the VCM driving apparatus; y(s) is the tool displacement in the frequency domain; vm(s) is the voltage applied to the VCM in the frequency domain; n is the number of turns of the coil; b is the magnetic field intensity acting on the coil gap; l is the effective acting length of each coil turn; l ismIs a drive coil equivalent inductance; rmIs a drive coil equivalent resistance; kmvsIs a constant of back electromagnetic force; t(s) is the driving force of the large-stroke cutter servo device in the frequency domain; s is a complex variable corresponding to the variable t in the time domain;
step 1.3, inverse of the nominal model obtained by the input signal R(s) of the servo device and the open-loop control system identification
Degree of freedom of introduction of not less than
The low-pass filter q(s) of degree of freedom of (a),
wherein：τf＝(2πfc)-1,fcCut-off frequency of the low-pass filter;
step 1.4, mixing
Acting on the voice coil motor driving coil to realize track open loop tracking;
the control process of the piezoelectric drive closed-loop compensation comprises the following steps:
step 2.1, obtaining the difference between the input voltage signals R(s) and Y(s) of the servo device as the motion error E(s) of the closed loop compensation system,
step 2.2, inputting the motion error E(s) into the controller C(s) and calculating to obtain the actual model P of the PEA driving device by considering the influence of the external interference d(s)P(s) and outputting to the piezoelectric actuator, to realize the tracking compensation of the system motion by the piezoelectric actuator, wherein:
ρkis a weight coefficient; epsilon>0 is the parameter of the controller parameter (epsilon is the parameter of the controller C (s)), when the actual controller parameter is designed, epsilon can be preset to a certain constant to obtain the optimal weight coefficient rhokTaking a given phase angle margin, an amplitude margin and a cut-off frequency as constraint conditions, and taking low-frequency high gain as a design target to reduce the steady-state tracking error of the system and enhance the anti-interference capability);
K＝KaRP(Ra+RP)-1(7)
τ＝RaRPCP(Ra+RP)-1(8)
PP(s) is the actual model of the PEA drive; x(s) is the output displacement of the PEA driving device; vc(s) is the voltage applied to the PEA in the frequency domain; n isPThe number of piezoelectric stacking layers;d33is the piezoelectric constant (piezoelectric ceramic piezoelectric constant d)33＝4.6×10-10)；kPPEA stiffness; a. thePIs the magnification ratio; kaThe amplification factor of the piezoelectric power amplifier; rPEquivalent resistance of PEA; raIs the equivalent resistance of the piezoelectric power amplifier; cPEquivalent capacitance of PEA; mBEquivalent moving mass of the bridge type flexible mechanism; c. CBThe damping coefficient of the bridge type flexible mechanism;
is the input stiffness of the piezoelectric drive.
The utility model discloses a working process can divide into three kinds of mode:
mode 1: the driving coil 12 is driven by the open-loop control voltage to drive the rotor 14 to make linear motion (i.e. move up and down in fig. 2) under the action of the flexible guide mechanism 7 of the voice coil motor 2, so that the large-stroke low-frequency-response motion can be realized.
Mode 2: the voice coil motor 2 is not provided with a control signal, namely the Lorentz force driving device does not work, only the piezoelectric driver 5 is provided with a driving voltage signal, and the knife mounting platform 8 is driven to do linear motion under the guiding and amplifying action of the bridge type flexible mechanism 9, so that the small-stroke high-frequency-response motion can be realized, and the device is suitable for application occasions with higher requirements on tracking precision but low requirements on stroke.
Mode 3: the driving coil 12 drives the rotor 14 to do linear motion under the drive of open-loop control voltage under the action of the voice coil motor flexible guide mechanism 7, the piezoelectric driving device is fixed on the rotor 14 in series, under the drive of closed-loop driving voltage, the piezoelectric driver 5 does corresponding motion and drives the cutter mounting platform 8 to do linear motion under the guide and amplification action of the bridge type flexible mechanism 9, and the piezoelectric driving linear motion is superposed on the linear motion of the voice coil motor and compensates the open-loop motion error of the voice coil motor. Because the piezoelectric driving voltage signal is obtained by calculating the system error in the adopted control strategy, the piezoelectric driving system can simultaneously compensate the system motion error caused by external disturbance, and is suitable for application occasions with large stroke and high tracking precision requirement.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (7)
1. The utility model provides a big stroke cutter servo device based on hybrid drive, its characterized in that, includes piezoelectricity drive arrangement, lorentz power drive arrangement, base member (3), flexible guiding mechanism (7), dress sword platform (8) and displacement sensor (4), piezoelectricity drive arrangement and lorentz power drive arrangement set up in on base member (3), lorentz power drive arrangement connect in piezoelectricity drive arrangement's rear end, dress sword platform (8) are fixed in piezoelectricity drive arrangement's front end, piezoelectricity drive arrangement through flexible guiding mechanism (7) of its both sides with base member (3) are connected, dress sword platform (8) are used for installing the cutter, displacement sensor (4) are used for measuring the displacement of cutter.
2. Hybrid drive based large stroke tool servo according to claim 1, characterized in that the lorentz force drive is a voice coil motor (2).
3. The hybrid-drive-based large-stroke tool servo device is characterized in that the voice coil motor (2) comprises a permanent magnet (11), a coil (12), a stator core (13) and a rotor (14), the stator core (13) is fixedly connected with the base body (3), the rotor (14) is sleeved outside the stator core (13), the coil (12) is wound on the outer surface of the rotor (14), and the permanent magnet (11) is arranged outside the coil (12).
4. The hybrid drive-based large-stroke tool servo device according to claim 3, wherein the piezoelectric drive device comprises a piezoelectric driver (5) and a bridge-type flexible mechanism (9), the piezoelectric driver (5) is placed inside the bridge-type flexible mechanism (9) and is pre-tightened by a bolt, the tool mounting platform (8) is fixed at one output end of the bridge-type flexible mechanism (9), and the flexible guide mechanisms (7) are positioned at two sides of the input end and the output end of the bridge-type flexible mechanism (9).
5. Hybrid drive based large stroke tool servo according to claim 4, wherein the piezoelectric drive is of an axisymmetric construction and is integrally connected with the mover (14).
6. Hybrid drive based large stroke tool servo according to any of claims 1 to 5, wherein the flexible guiding mechanism (7) comprises four flexible hinges (1), and both sides of the piezoelectric drive are connected to the base body (3) by two flexible hinges (1), respectively.
7. Hybrid drive based large stroke tool servo according to claim 6, further comprising a sensor base (6), wherein the displacement sensor (4) is fixed to the sensor base (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920410748.7U CN209986616U (en) | 2019-03-29 | 2019-03-29 | Large-stroke cutter servo device based on hybrid drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920410748.7U CN209986616U (en) | 2019-03-29 | 2019-03-29 | Large-stroke cutter servo device based on hybrid drive |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209986616U true CN209986616U (en) | 2020-01-24 |
Family
ID=69290469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920410748.7U Active CN209986616U (en) | 2019-03-29 | 2019-03-29 | Large-stroke cutter servo device based on hybrid drive |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209986616U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109877628A (en) * | 2019-03-29 | 2019-06-14 | 南京理工大学 | A kind of big stroke cutter servo device and its control method based on combination drive |
-
2019
- 2019-03-29 CN CN201920410748.7U patent/CN209986616U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109877628A (en) * | 2019-03-29 | 2019-06-14 | 南京理工大学 | A kind of big stroke cutter servo device and its control method based on combination drive |
| CN109877628B (en) * | 2019-03-29 | 2023-09-26 | 南京理工大学 | Large-stroke cutter servo device based on hybrid drive and control method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109877628B (en) | Large-stroke cutter servo device based on hybrid drive and control method thereof | |
| CN103267210B (en) | Six-freedom-degree parallel pointing platform | |
| US7772947B2 (en) | Variable reluctance fast positioning system and methods | |
| Lu et al. | Ultrafast tool servos for diamond turning | |
| US7616084B2 (en) | Variable reluctance fast positioning system and methods | |
| CN102710214B (en) | Nonlinear interference control method and control system for permanent magnet linear synchronous motor | |
| CN102360734B (en) | Intelligent wedged smoothly adjustable reactor | |
| CN1054689A (en) | The electric driver that is used for the composite type transducer | |
| CN209986616U (en) | Large-stroke cutter servo device based on hybrid drive | |
| CN103019046B (en) | Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control | |
| Zhang et al. | Design and analysis of a high acceleration rotary-linear voice coil motor | |
| CN101795105B (en) | Suspension rotor equivalent disturbance current compensation control device for bearing-free permanent magnet synchronous motor | |
| CN109795278B (en) | Multi-mode coordination switching control method for vehicle hybrid suspension actuator | |
| CN112202374B (en) | Voice coil motor micro-positioning platform, and motion control method, device and system | |
| CN105202325A (en) | Long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform | |
| CN110941181B (en) | Rigid-flexible coupling motion platform control method for piezoelectric ceramic connection | |
| CN106230339A (en) | A kind of linear electric motors big travel displacement precision precision control method | |
| CN102790474B (en) | Method for detecting initial position of planar motor | |
| CN107907992A (en) | The fast steering mirror actuation mechanism and start method of direct stress electromagnetic drive | |
| WO2024113604A1 (en) | Direct-drive transmission system and control method | |
| CN109378995B (en) | High-frequency resonance piezoelectric inertia driving linear displacement platform | |
| US11831256B2 (en) | Short-travel nanoscale motion stage and method for measuring thermally-related hysteresis data | |
| CN109687759A (en) | A kind of driving method and circuit of piezoelectric ultrasonic motor step motion | |
| CN110112970A (en) | A kind of permanent magnetism vernier linear motor method for control speed and system | |
| Yu et al. | Design of coaxial integrated macro–micro composite actuator with long-stroke and high-precision |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |