CN109877628B - Large-stroke cutter servo device based on hybrid drive and control method thereof - Google Patents
Large-stroke cutter servo device based on hybrid drive and control method thereof Download PDFInfo
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Abstract
The invention discloses a large-stroke cutter servo device based on hybrid drive and a control method thereof, comprising a piezoelectric driving device, a Lorentz force driving device, a substrate, a flexible guide mechanism, a cutter loading platform and a displacement sensor, wherein the piezoelectric driving device and the Lorentz force driving device are arranged on the substrate, the Lorentz force driving device is connected with the rear end of the piezoelectric driving device, the cutter loading platform is fixed at the front end of the piezoelectric driving device, the piezoelectric driving device is connected with the substrate through the flexible guide mechanisms on two sides of the piezoelectric driving device, the displacement sensor is used for measuring the displacement of the cutter, the control method comprises voice coil motor open-loop control and piezoelectric driving closed-loop compensation control.
Description
Technical Field
The invention belongs to the technical field of servo control, and particularly relates to a large-stroke cutter servo device based on hybrid driving and a control method thereof.
Background
Complex optical surfaces are widely used in different fields due to a plurality of excellent characteristics, and the increase of the surface complexity of the element presents higher challenges to the manufacturing technology of the element, while the single point diamond cutting technology based on Fast Tool Servo (FTS) is considered as a manufacturing technology with great development prospect of the complex optical element.
In more than 30 years of development, FTS technology has evolved over the long term. In order to obtain different working performances, the driving modes of the FTS-based single-point diamond cutting technology mainly comprise piezoelectric driving, lorentz force driving, maxwell method stress driving and the like; the motion guide mechanism of the device adopts a flexible mechanism, an air-float guide rail and the like. The Lorentz force driving is combined with a flexible mechanism or an air floatation guide rail to be mainly used for realizing a large-stroke FTS, and the low driving force density of the Lorentz force driving is slower in response speed, so that high-bandwidth and rapid tracking of the track is difficult to realize. The piezoelectric drive and Maxwell method stress drive are generally combined with a flexible mechanism to realize high-bandwidth and low-stroke motion, and are suitable for cutting and generating the surface of the micro-nano functional structure. Limited by the driving principle, piezoelectric driving and maxwell's stress are generally difficult to directly achieve large-stroke motion. Therefore, regardless of the driving or motion guiding mode, there is inevitably a physical contradiction between the motion stroke and the response speed.
Disclosure of Invention
Aiming at the defects, the invention aims to provide a large-stroke cutter servo device based on hybrid driving and a control method thereof, and the large-stroke and sub-nanometer resolution cutter positioning motion is realized by using a Lorentz force and piezoelectric hybrid driving flexible guide mechanism.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
the utility model provides a large stroke cutter servo device based on hybrid drive, includes piezoelectric drive device, lorentz force drive device, base member, flexible guiding mechanism, dress sword platform and displacement sensor, piezoelectric drive device and lorentz force drive device set up in on the base member, lorentz force drive device connect in piezoelectric drive device's rear end, dress sword platform is fixed in piezoelectric drive device's front end, piezoelectric drive device through its both sides flexible guiding mechanism with the base member is connected, dress sword platform is used for installing the cutter, displacement sensor is used for measuring the displacement of cutter.
Further, the lorentz force drive means is a voice coil motor.
Further, the voice coil motor comprises a permanent magnet, a coil, a stator core and a rotor, wherein the stator core is fixedly connected with a base body, the rotor is sleeved outside the stator core, the coil is wound on the outer surface of the rotor, and the permanent magnet is arranged outside the coil.
Further, the piezoelectric driving device comprises a piezoelectric driver and a bridge type flexible mechanism, the piezoelectric driver is placed inside the bridge type flexible mechanism and is preloaded by a bolt, the tool loading platform is fixed at one output end of the bridge type flexible mechanism, and the flexible guiding mechanisms are located at two sides of the input and output ends of the bridge type flexible mechanism.
Further, the piezoelectric driving device is of an axisymmetric structure and is integrally connected with the rotor.
Further, the flexible guiding mechanism comprises four flexible hinges, and two sides of the piezoelectric driving device are respectively connected with the base body through two flexible hinges.
Further, the sensor comprises a sensor base body, and the displacement sensor is fixed on the sensor base body.
The control method of the mixed-drive-based large-stroke tool servo device comprises the open-loop control of a Voice Coil Motor (VCM) and the closed-loop compensation control of a piezoelectric drive (PEA),
the control process of the voice coil motor open-loop control comprises the following steps:
step 1.1, according to the structure of the voice coil motor, solving a dynamics equation of the voice coil motor driving device:
wherein M is p Equivalent motion mass driven by the PEA driving device relative to the Lorentz force; m is M V Equivalent motion mass driven by the VCM driving device relative to the Lorentz force; c V Equivalent damping coefficient for the VCM driving device;an input stiffness for the VCM driver; y (t) is the tool displacement in the time domain; f (F) L (t) is the driving force of the large-stroke tool servo in the time domain;
step 1.2, laplace transformation is carried out on the dynamics equation to obtain a transfer function of the voice coil motor so as to determine the order of the voice coil motor,
wherein P is V (s) is an actual model of the VCM driving device; y(s) is the tool displacement in the frequency domain; v (V) m (s) is the voltage applied across the VCM in the frequency domain; n is the number of turns of the coil; b is the magnetic field intensity acting on the coil gap; l is the effective acting length of each turn of coil; l (L) m Equivalent inductance of the driving coil; r is R m The equivalent resistance of the driving coil; k (K) mvs Is a counter electromagnetic force constant; t(s) is the driving force of the large-stroke cutter servo device in the frequency domain; s is a complex variable corresponding to the variable t in the time domain;
step 1.3, the inverse of the nominal model obtained by the input signal R(s) of the servo device and the open loop control system identificationThe degree of freedom of introduction is greater than or equal to->A low-pass filter Q(s) of the degree of freedom of (1),
wherein: τ f ＝(2πf c ) -1 ,f c Cut-off frequency for low pass filter;
step 1.4, theActing on the voice coil motor driving coil to realize track open-loop tracking;
the control process of the piezoelectric driving closed-loop compensation comprises the following steps:
step 2.1, obtaining the difference between the input voltage signals R(s) and Y(s) of the servo device as a motion error E(s) of the closed loop compensation system,
step 2.2, inputting the motion error E(s) into the controller C(s) and calculating to obtain an actual model P of the PEA driving device taking into account the influence of the external disturbance d(s) P (s) and output to a piezoelectric driver to realize tracking compensation of the piezoelectric driver to the system motion, wherein:
ρ k is a weight coefficient; epsilon > 0 is the controller parameter (epsilon is the parameter of the controller C(s), epsilon can be preset as a constant when designing the actual controller parameter to obtain the optimal weight coefficient ρ k Taking a given phase angle margin, amplitude margin and cut-off frequency as constraint conditions, and taking low-frequency high-gain as a design target to reduce steady-state tracking error of a system and enhance disturbance rejection capability;
K＝K a R P (R a +R P ) -t (7)
τ＝R a R P C P (R a +R P ) -1 (8)
P P (s) is an actual model of the PEA drive; x(s) is the output displacement of the PEA driving device; v (V) c (s) is the voltage applied to the PEA in the frequency domain; n is n P The number of layers is the piezoelectric stack; d, d 33 Is a piezoelectric constant (piezoelectric ceramic piezoelectric constant d) 33 ＝4.6×10 -10 )；k P Is PEA stiffness; a is that P Is the amplification ratio; k (K) a The amplification factor of the piezoelectric power amplifier; r is R P Equivalent resistance to PEA; r is R a Equivalent resistance of the piezoelectric power amplifier; c (C) P Equivalent capacitance for PEA;M B equivalent motion mass of the bridge type flexible mechanism; c B The damping coefficient of the bridge type flexible mechanism;is the input stiffness of the piezoelectric drive.
Compared with the prior art, the invention has the remarkable advantages that:
(1) The invention has the advantages of large Lorentz force driving stroke and piezoelectric driving high frequency response and sub-nanometer motion resolution, realizes the rapid and ultra-precise tracking of the motion trail of the cutter by the response speed of the high frequency response piezoelectric compensation system, and can greatly expand the cutting capability of the FTS system; (2) The piezoelectric driving device is of an axisymmetric structure, and can effectively counteract disturbance of piezoelectric driving inertia force on a rotor of the voice coil motor, so that dynamic decoupling of the piezoelectric and voice coil motor driving system is realized; (3) The control method of the large-stroke cutter servo device based on hybrid driving is characterized in that under the drive of closed-loop driving voltage, piezoelectric is correspondingly moved and drives the cutter loading platform to linearly move under the guiding and amplifying actions of the bridge type flexible mechanism, the piezoelectric driving linear movement is superposed with the linear movement of the voice coil motor, the open-loop movement error of the voice coil motor can be compensated, a piezoelectric driving voltage signal is obtained through calculation of a system error, and the piezoelectric driving system can simultaneously compensate the system movement error caused by external disturbance.
Drawings
Fig. 1 is a schematic diagram of the overall structure of a large-stroke tool servo device based on hybrid driving.
Fig. 2 is a transverse cross-sectional view of a portion of the structure of fig. 1.
Fig. 3 is an enlarged view of the relevant structure of the piezoelectric driving device in fig. 1.
Fig. 4 is a control block diagram of a control method of a large-stroke tool servo based on hybrid driving according to the present invention.
Detailed Description
The invention will be further described with reference to the drawings.
Referring to fig. 1-2, a large-stroke cutter servo device based on hybrid driving comprises a piezoelectric driving device, a lorentz force driving device, a base body 3, a flexible guiding mechanism 7, a cutter loading platform 8 and a displacement sensor 4, wherein the piezoelectric driving device and the lorentz force driving device are arranged on the base body 3, the lorentz force driving device is connected to the rear end of the piezoelectric driving device, the cutter loading platform 8 is fixed to the front end of the piezoelectric driving device, the piezoelectric driving device is connected with the base body 3 through the flexible guiding mechanisms 7 on two sides of the piezoelectric driving device, the cutter loading platform 8 is used for installing a cutter, the cutter is required to be installed according to requirements in actual use, and the displacement sensor 4 is used for measuring the displacement of the cutter.
Further, the lorentz force driving means is a voice coil motor 2.
Further, referring to fig. 2, the voice coil motor 2 includes a permanent magnet 11, a coil 12, a stator core 13 and a mover 14, the stator core 13 is fixedly connected with the base 3, the mover 14 is sleeved outside the stator core 13, the coil 12 is wound on the outer surface of the mover 14, and the permanent magnet 11 is disposed outside the coil 12.
Further, with reference to fig. 3, the piezoelectric driving device includes a piezoelectric driver 5 and a bridge type flexible mechanism 9, the piezoelectric driver 5 is placed inside the bridge type flexible mechanism 9 and is pre-tightened by a bolt, the knife loading platform 8 is fixed at one output end of the bridge type flexible mechanism 9, and the flexible guiding mechanisms 7 are located at two sides of the input and output ends of the bridge type flexible mechanism 9.
Further, with reference to fig. 2-3, the piezoelectric driving device has an axisymmetric structure and is integrally connected with the mover 14.
Further, the flexible guiding mechanism 7 includes four flexible hinges 1, and two sides of the piezoelectric driving device are respectively connected with the base 3 through two flexible hinges 1.
Further, in combination with fig. 1, the sensor body 6 is further included, and the displacement sensor 4 is fixed to the sensor body 6.
Referring to fig. 4, according to the control method of the above-described hybrid-drive-based large stroke tool servo, the control method includes the Voice Coil Motor (VCM) open-loop control and the piezo-electric drive (PEA) closed-loop compensation control,
the control process of the voice coil motor open-loop control comprises the following steps:
step 1.1, according to the structure of the voice coil motor, solving a dynamics equation of the voice coil motor driving device:
wherein M is p Equivalent motion mass driven by the PEA driving device relative to the Lorentz force; m is M V Equivalent motion mass driven by the VCM driving device relative to the Lorentz force; c V Equivalent damping coefficient for the VCM driving device;an input stiffness for the VCM driver; y (t) is the tool displacement in the time domain; f (F) L (t) is the driving force of the large-stroke tool servo in the time domain;
step 1.2, laplace transformation is carried out on the dynamics equation to obtain a transfer function of the voice coil motor so as to determine the order of the voice coil motor,
wherein P is V (s) is an actual model of the VCM driving device; y(s) is the tool displacement in the frequency domain; v (V) m (s) is the voltage applied across the VCM in the frequency domain; n is the number of turns of the coil; b is the magnetic field intensity acting on the coil gap; l is the effective acting length of each turn of coil; l (L) m Equivalent inductance of the driving coil; r is R m The equivalent resistance of the driving coil; k (K) mvs Is a counter electromagnetic force constant; t(s) is the driving force of the large-stroke cutter servo device in the frequency domain; s is a complex variable corresponding to the variable t in the time domain;
step 13, the inverse of the nominal model obtained by the identification of the input signal R(s) of the servo device and the open loop control systemThe degree of freedom of introduction is greater than or equal to->A low-pass filter Q(s) of the degree of freedom of (1),
wherein: τ f ＝(2πf c ) -1 ,f c Cut-off frequency for low pass filter;
step 1.4, theActing on the voice coil motor driving coil to realize track open-loop tracking;
the control process of the piezoelectric driving closed-loop compensation comprises the following steps:
step 2.1, obtaining the difference between the input voltage signals R(s) and Y(s) of the servo device as a motion error E(s) of the closed loop compensation system,
step 2.2, inputting the motion error E(s) into the controller C(s) and calculating to obtain an actual model P of the PEA driving device taking into account the influence of the external disturbance d(s) P (s) and output to a piezoelectric driver to realize tracking compensation of the piezoelectric driver to the system motion, wherein:
ρ k is a weight coefficient; epsilon > 0 is the controller parameter (epsilon is the parameter of the controller C(s), epsilon can be preset as a constant when designing the actual controller parameter to obtain the optimal weight coefficient ρ k With given phase angle margin, amplitude margin and cut-off frequency as constraint conditions and low-frequency high-gain as design aimMarked to reduce system steady state tracking errors and enhance immunity;
K＝K a R P (R a +R P ) -1 (7)
τ＝R a R P C P (R a +R P ) -1 (8)
P P (s) is an actual model of the PEA drive; x(s) is the output displacement of the PEA driving device; v (V) c (s) is the voltage applied to the PEA in the frequency domain; n is n P The number of layers is the piezoelectric stack; d, d 33 Is a piezoelectric constant (piezoelectric ceramic piezoelectric constant d) 33 ＝4.6×10 -10 )；k P Is PEA stiffness; a is that P Is the amplification ratio; k (K) a The amplification factor of the piezoelectric power amplifier; r is R P Equivalent resistance to PEA; r is R a Equivalent resistance of the piezoelectric power amplifier; c (C) P Equivalent capacitance for PEA; m is M B Equivalent motion mass of the bridge type flexible mechanism; c B The damping coefficient of the bridge type flexible mechanism;is the input stiffness of the piezoelectric drive.
The working process of the invention can be divided into three working modes:
mode 1: the piezoelectric driver 5 is not provided with a driving voltage signal, that is, the piezoelectric driving device does not work, only a control signal is provided for the voice coil motor 2, the driving coil 12 drives the rotor 14 to do linear motion (namely, move up and down in the figure 2) under the action of the flexible guiding mechanism 7 of the voice coil motor 2 under the driving of open loop control voltage, so that the motion with large stroke and low frequency response can be realized, and the piezoelectric driving device is suitable for application occasions with low requirements on tracking precision but high requirements on stroke.
Mode 2: the voice coil motor 2 is not provided with a control signal, namely the Lorentz force driving device does not work, only the piezoelectric driver 5 is provided with a driving voltage signal, the knife loading platform 8 is driven to do linear motion under the guiding and amplifying actions of the bridge type flexible mechanism 9, small-stroke high-frequency response motion can be realized, and the voice coil motor is suitable for application occasions with high requirements on tracking precision and low requirements on stroke.
Mode 3: the driving coil 12 drives the rotor 14 to do linear motion under the action of the voice coil motor flexible guide mechanism 7 under the driving of open loop control voltage, the piezoelectric driving device is fixedly connected to the rotor 14 in series, the piezoelectric driver 5 does corresponding motion under the driving of closed loop driving voltage and drives the knife loading platform 8 to do linear motion under the guiding and amplifying actions of the bridge flexible mechanism 9, and the piezoelectric driving linear motion is superposed on the voice coil motor linear motion and compensates the open loop motion error of the voice coil motor. Because the piezoelectric driving voltage signal is obtained by calculating the system error in the adopted control strategy, the piezoelectric driving system can simultaneously compensate the system motion error caused by external disturbance, and the piezoelectric driving system is suitable for application occasions with large travel and high tracking precision requirements.
The foregoing has outlined and described the basic principles, features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. The device comprises a piezoelectric driving device, a Lorentz force driving device, a base body (3), a flexible guide mechanism (7), a cutter loading platform (8) and a displacement sensor (4), wherein the piezoelectric driving device and the Lorentz force driving device are arranged on the base body (3), the Lorentz force driving device is connected to the rear end of the piezoelectric driving device, the cutter loading platform (8) is fixed to the front end of the piezoelectric driving device, the piezoelectric driving device is connected with the base body (3) through flexible guide mechanisms (7) on two sides of the piezoelectric driving device, the cutter loading platform (8) is used for installing a cutter, the displacement sensor (4) is used for measuring the displacement of the cutter, and the Lorentz force driving device is a voice coil motor (2);
it is characterized in that the control method comprises Voice Coil Motor (VCM) open-loop control and piezoelectric driving (PEA) closed-loop compensation control,
the control process of the voice coil motor open-loop control comprises the following steps:
step 1.1, according to the structure of the voice coil motor, solving a dynamics equation of the voice coil motor driving device:
wherein M is p Equivalent motion mass driven by the PEA driving device relative to the Lorentz force; m is M V Equivalent motion mass driven by the VCM driving device relative to the Lorentz force; c V Equivalent damping coefficient for the VCM driving device;an input stiffness for the VCM driver; y (t) is the tool displacement in the time domain; f (F) L (t) is the driving force of the large-stroke tool servo in the time domain;
step 1.2, laplace transformation is carried out on the dynamics equation to obtain a transfer function of the voice coil motor so as to determine the order of the voice coil motor,
wherein P is V (s) is an actual model of the VCM driving device; y(s) is the tool displacement in the frequency domain; v (V) m (s) is the voltage applied across the VCM in the frequency domain; n is the number of turns of the coil; b is a magnet acting on the coil gapA field strength; l is the effective acting length of each turn of coil; l (L) m Equivalent inductance of the driving coil; r is R m The equivalent resistance of the driving coil; k (K) mvs Is a counter electromagnetic force constant; t(s) is the driving force of the large-stroke cutter servo device in the frequency domain; s is a complex variable corresponding to the variable t in the time domain;
step 1.3, the inverse of the nominal model obtained by the input signal R(s) of the servo device and the open loop control system identificationThe degree of freedom of introduction is greater than or equal to->A low-pass filter Q(s) of the degree of freedom of (1),
wherein: τ f ＝(2πf c ) -1 ，f c Cut-off frequency for low pass filter;
step 1.4, theActing on the voice coil motor driving coil to realize track open-loop tracking;
the control process of the piezoelectric driving closed-loop compensation comprises the following steps:
step 2.1, obtaining the difference between the input voltage signals R(s) and Y(s) of the servo device as a motion error E(s) of the closed loop compensation system,
step 2.2, inputting the motion error E(s) into the controller C(s) and calculating to obtain an actual model P of the PEA driving device taking into account the influence of the external disturbance d(s) P (s) and output to a piezoelectric driver to realize tracking compensation of the piezoelectric driver to the system motion, wherein:
ρ k is a weight coefficient; epsilon > 0 is the controller parameter;
K＝K a R P (R a +R P ) -1 (7)
τ＝R a R P C P (R a +R P ) -1 (8)
P P (s) is an actual model of the PEA drive; x(s) is the output displacement of the PEA driving device; v (V) c (s) is the voltage applied to the PEA in the frequency domain; n is n P The number of layers is the piezoelectric stack; d, d 33 Is 4.6X10 of piezoelectric constant -10 ；k P Is PEA stiffness; a is that P Is the amplification ratio; k (K) a The amplification factor of the piezoelectric power amplifier; r is R P Equivalent resistance to PEA; r is R a Equivalent resistance of the piezoelectric power amplifier; c (C) P Equivalent capacitance for PEA; m is M B Equivalent motion mass of the bridge type flexible mechanism; c B The damping coefficient of the bridge type flexible mechanism;is the input stiffness of the piezoelectric drive.
2. The control method of the large-stroke cutter servo device based on the hybrid driving according to claim 1, wherein the voice coil motor (2) comprises a permanent magnet (11), a coil (12), a stator core (13) and a rotor (14), the stator core (13) is fixedly connected with the base body (3), the rotor (14) is sleeved outside the stator core (13), the coil (12) is wound on the outer surface of the rotor (14), and the permanent magnet (11) is arranged outside the coil (12).
3. The control method of the large-stroke cutter servo device based on the mixed driving according to claim 2, wherein the piezoelectric driving device comprises a piezoelectric driver (5) and a bridge type flexible mechanism (9), the piezoelectric driver (5) is placed inside the bridge type flexible mechanism (9) and is pre-tensioned by bolts, the cutter loading platform (8) is fixed at one output end of the bridge type flexible mechanism (9), and the flexible guiding mechanisms (7) are positioned at two sides of the input and output ends of the bridge type flexible mechanism (9).
4. A control method of a large-stroke tool servo based on hybrid driving according to claim 3, characterized in that the piezoelectric driving means is of axisymmetric structure and is integrally connected with the mover (14).
5. The control method of a large-stroke tool servo based on hybrid drive according to any one of claims 1 to 4, characterized in that the flexible guiding mechanism (7) comprises four flexible hinges (1), the two sides of the piezoelectric drive being connected to the base body (3) by two flexible hinges (1), respectively.
6. The control method of a hybrid drive based large stroke tool servo as claimed in claim 5 further comprising a sensor base (6), wherein the displacement sensor (4) is fixed to the sensor base (6).
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| CN111487922B (en) * | 2020-04-07 | 2021-08-03 | 南京理工大学 | Cascade cross-scale cutter servo device and high-frequency control method thereof |
| CN111571280B (en) * | 2020-04-28 | 2022-04-19 | 南京理工大学 | Novel hybrid drive triaxial quick cutter servo device |
| CN111791079B (en) * | 2020-05-22 | 2021-08-31 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
| CN112276639A (en) * | 2020-10-22 | 2021-01-29 | 山东大学深圳研究院 | Macro-micro double-drive type large-stroke high-precision fast cutter servo device |
| CN112965343A (en) * | 2021-02-08 | 2021-06-15 | 上海度宁科技有限公司 | Workpiece table structure, photoetching system comprising same and exposure method thereof |
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