JP2007083332A - Cut-off device and cutter holder for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cut-off device and a cutter holder used for the cut-off device which can high-accurately cut off a workpiece having a large cut resistance such as a ceramic green sheet while preventing blade from being bent even if it is a very thin flat blade like cutting blade, and has good productivity and improves defect rate by preventing crack. <P>SOLUTION: The cutting-off operation is performed by giving a lateral high-speed micro vibration to a cutting blade 20 with a piezoelectric element in cooperation with a descending movement of a cutter holder while a flat blade-like cutting blade 20 is mounted to the elevating/lowering cutter holder 10, a blade plate mounting block is connected to a fixing block of the cutter holder so as to be micro vibrated in the lateral direction, a laminated type piezoelectric element is internally installed to the cutter holder, one side surface of the piezoelectric element is joined to the vertical wall of the fixing block, and the other side surface is joined to the vertical wall of the blade plate mounting block respectively. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a cutting device and a cutter holder for a cutting device used therefor, and more specifically, used for cutting (full cut) or cutting to a required depth (half cut) such as a ceramic green sheet or a laminate thereof. In particular, the present invention relates to a cutting device and a cutter holder that perform a cutting operation while applying a slight vibration in the lateral direction simultaneously with a lowering operation of the cutting blade.

Conventionally, a ceramic green sheet or a laminate thereof is cut into a lattice by a cutting device having a flat blade-like cutting blade in a manufacturing process of an inductor, a capacitor, an integrated circuit package, and the like to produce a chip (cerachip). However, a cutting device disclosed in Japanese Patent Application Laid-Open No. 6-8195 (Patent Document 1) is known as a conventional device that imparts a slight lateral vibration to the cutting blade during the cutting operation.
Patent Document 1 discloses a cutting device for cutting a multilayer ceramic capacitor multilayer body into chips, in which a vibration block 3 is disposed in a cutter holder 2 sandwiching a cutting blade 1, and a piezoelectric actuator 6 is disposed in the vibration block 3. The piezoelectric actuator 6 applies lateral vibration to the cutting blade 1 through the vibration block 3 and the cutter holder 2 at the time of cutting, thereby causing a failure that cannot cope with the cutting resistance, that is, cutting blade bending. Preventing is described. Specifically, the vibration block 3 is supported by a lower end of a movable plate 4 corresponding to a ram capable of moving up and down so as to be slidable in the horizontal direction, and a cutting blade having a thickness of about 0.2 mm is provided below the vibration block 3. 1 is mounted, and a piezoelectric actuator 6 is provided as an external attachment to the side of the vibration block 3, and the tip of the piezoelectric actuator 6 is in contact with the vibration block 3. A voltage is applied to the piezoelectric actuator 6 from an AC power source so as to give a vibration having an amplitude of about +1 mm to the cutting blade 1 (both symbols are the same as those in the same document).

JP-A-6-8195

It is assumed that the conventional apparatus can solve the problem described in Patent Document 1 as long as the material of the ceramic grease sheet and the thickness of the cutting blade (about 0.2 mm) at the time of filing are taken into consideration.
However, in recent cutting of ceramic green sheets, the laminate has become a material with high cutting resistance due to the improvement of the composition of the green sheets, and the chip size is reduced, that is, the vertical and horizontal dimensions are 0.6 mm × 0.3 mm. Further, along with the demand for cutting a very small chip of 0.4 mm × 0.2 mm, the cutting blade is made extremely thin, for example, the maximum blade thickness of the blade edge portion is about 25 μm to 50 μm (the thickness of the shank portion is It is necessary to use a cutting blade of about 0.4 mm to 1 mm). For this reason, it has been found that the use of the above-mentioned conventional apparatus cannot always prevent the cutting blade from being bent, and in the cutting process of the chip that requires strict dimensional accuracy, it is possible to meet the demand for high cutting accuracy. There was a bug that could not be done.
In other words, in order to cope with an increase in the cutting resistance of ceramic green sheets and the ultra-thinning of the cutting blade, the vibration output mode (waveform, amplitude, frequency, etc.) is controlled so that the cutting blade has a large frequency (frequency). It is necessary to apply vibration. However, in the above-mentioned conventional apparatus, the vibration actuator has an external structure, and the vibration block is an essential component. Therefore, the vibration drive structure that applies vibration to the cutting blade is large and heavy. It is thought that the main factor is that it is not possible to apply high-speed fine vibration with a large frequency. In addition, there is a problem that the entire apparatus is enlarged due to the enlargement of the vibration drive structure.

  On the other hand, in the cutting process of the ceramic green sheet, a number of cutting operations (full cut or half cut) are repeated on one sheet, thereby cutting the sheet into a grid and taking a lot of minute chips. And then fired. For this reason, chip cracks caused by cracks in the cutting process greatly affect the yield, but if the cracks flow sideways as the chips are miniaturized as described above, chip dimensional defects and performance defects will occur. Therefore, in order to ensure a high yield, it is required to prevent the occurrence of cracks in each cutting operation. However, in the above-described conventional apparatus, no particular consideration is given to the prevention of such cracks.

In view of the above-described conventional circumstances, the present invention reduces the size and weight of a vibration driving structure that imparts vibrations, thereby cutting a cutting object (hereinafter referred to as a workpiece) such as a recent ceramic green sheet or a laminate thereof. In this way, even with flexible or brittle workpieces with high cutting resistance, an ultra-thin flat blade-like cutting blade can be used to perform cutting processing that prevents the cutting blade from bending, and has excellent cutting accuracy. An object is to provide a cutting device.
In addition, the vibration output mode is appropriately controlled according to the composition of the workpiece such as a ceramic green sheet and the cutting edge shape of the cutting blade is improved, so that the cutting pressure exerted on the workpiece by the cutting blade is reduced. An object of the present invention is to prevent the occurrence of cracks in each cutting operation, increase the yield, and improve the productivity.
A further object of the present invention is to provide a versatile and practical cutter holder that is reduced in size even when a vibration drive source is provided.

  Such a cutting apparatus and cutter holder of the present invention employs a laminated piezoelectric element as a vibration oscillation source and directly joins the piezoelectric element to a blade plate mounting block to which a cutting blade is attached. It is characterized by adopting a direct drive system that applies a high-speed fine vibration in the lateral direction to the cutting blade. Specifically, it is as follows.

The cutting device of the present invention is a cutting device in which a flat blade-like cutting blade is attached to a cutter holder that moves up and down following a ram that can move up and down, and a blade plate mounting block is laterally attached to a fixed block of the cutter holder. Constructed to allow fine vibrations, a stacked piezoelectric element is installed horizontally in the cutter holder, one side of the piezoelectric element is joined to the vertical wall of the fixed block, and the other side is joined to the vertical wall of the blade plate mounting block Thus, in cooperation with the lowering operation of the cutter holder, the piezoelectric element causes the cutting blade to perform a cutting operation while applying lateral high-speed fine vibrations (Claim 1).
According to the present invention, it is the same as the conventional apparatus that the cutting resistance of the workpiece is reduced by applying a slight lateral vibration to the cutting blade when the cutter holder is lowered, but the blade plate mounting block for mounting the cutting blade. Since only the movable part is movable in the lateral direction, the movable part is remarkably lightened and the cutting blade can be vibrated at high speed, and the cutting blade bends even when an ultra-thin cutting blade is used. The workpiece can be cut without any problems. Further, by controlling the output of the piezoelectric element, it is possible to appropriately select the frequency and amplitude according to the blade thickness.
In the present invention, cutting includes both full cut and half cut.

As a specific configuration in which the laminated piezoelectric element is installed, the blade plate mounting block is connected to a lower part of the fixed block fixed to the ram via an elastic displacement portion that can be slightly displaced in the lateral direction, and fixed. The multilayer piezoelectric element is disposed between a fixed vertical wall of the block and a movable vertical wall of the blade plate mounting block (Claim 2), and more preferably, the multilayer piezoelectric element Is arranged at a substantially central portion of the cutter holder, and the elastic displacement portions are respectively formed on both sides thereof (claim 3).
As a result, only the blade plate mounting block can be vibrated in the lateral direction by the elastic displacement portion, and the stacked piezoelectric element is accommodated compactly between the fixed block and the blade plate mounting block. In addition, although the amplitude (elongation amount) of the laminated piezoelectric element increases according to the laminated length, it protects the piezoelectric element that is vulnerable to the required cutting blade amplitude (stroke) and lateral stress. In consideration of the above, it is only necessary to select one piezoelectric element or two or more piezoelectric elements connected in series.

Further, in order to increase the cutting accuracy, it is important to perform a cutting operation while slightly vibrating with a predetermined amplitude set by the cutting blade. For this purpose, a sensor for detecting the amplitude of the cutting blade, specifically, The cutter holder is provided with a sensor for detecting the amount of displacement of the blade plate mounting block (claim 4). As the sensor, any of a magnetostrictive sensor, a piezoelectric sensor, a capacitance sensor and the like can be employed.
If the displacement of the blade plate mounting block deviates from the set value range by the sensor, it may be corrected / corrected by controlling the output of the laminated piezoelectric element. To stop the cutting device. According to this, it is possible to increase the yield of cutting products (chips and the like) and to protect the cutting blade and the cutter holder from damage.

In each of the above-mentioned claims, the cutting blade is optional as the shape of the blade edge (blade edge), such as using a conventional straight blade, but in consideration of giving a slight lateral vibration to the cutting blade, the cutting blade In order to improve the performance, the cutting blade employs a corrugated cutting blade (wave blade) in which the blade tip portion is continuously formed with a fine and smooth convex blade and a concave blade.
In that case, the shape of the smooth convex blade and the concave blade is preferably a sine curve, and fine means that the pitch between the convex blades and the concave blade is the same, and the pitch between the convex blades is about 1 mm. Hereinafter, it is about 0.5 mm, for example, and the height of the convex blade (height from the bottom of the concave blade to the top of the convex blade) is about 30 to 60 μm, for example about 50 μm.
According to it, since the cutting force increases when the convex blade bites into the workpiece with the combined vector with the vertical feed direction at the time of the fine vibration in the lateral direction of the cutting blade, the wear of the cutting edge portion due to side slip like a straight blade is small, Moreover, it is not necessary to increase the cutting pressure associated with the lowering operation of the cutter holder more than necessary, and the convex and concave blades have a fine and smooth waveform. Therefore, the generation of cracks during cutting is suppressed.

It is preferable that the corrugated cutting blade is not provided with a uniform height of the convex blade, but is provided with a step difference in height. Specifically, the cutting edge portion has a high convex blade having a height difference in the blade tip position and It is good to make it the waveform continuously made by the low convex blade and the concave blade of fixed depth interposed between them.
In that case, the blade height of the low convex blade is about 1/2 of the blade height of the high convex blade. For example, when the blade height of the high convex blade is 50 μm in the above example, the low convex blade is 25 μm. .
Thereby, since the cutting pressure exerted on the workpiece at the time of cutting is dispersed by the two high and low convex blades, the generation of cracks can be prevented more reliably.

Further, the cutter holder of the present invention is formed in a substantially rectangular shape as a whole by connecting the fixed block and the blade plate mounting block vertically together via an elastic displacement portion that can be slightly displaced in the lateral direction, and between the blocks. An element storage space is provided in the stack, and a laminated piezoelectric element is attached to the blade plate mounting block so that it can be slightly expanded and contracted in the lateral direction. A flat blade-shaped cutting blade is attached to and detached from the blade plate mounting block. It is configured to be clamped and fixed as possible (claim 7).
More specifically, the elastic displacement portions are formed on both sides of the element accommodating space, and the vertical wall of the fixed block is arranged downward on one side in the element accommodating space, and the blade plate on the other side facing it. The vertical wall of the mounting block is disposed upward, the stacked piezoelectric elements are horizontally disposed between the vertical walls, and the respective end surfaces are joined to the vertical walls.
According to this, an independent holder structure in which the laminated piezoelectric element and the blade plate mounting block, which are the vibration drive source of the cutting blade, are assembled in a compact manner and excellent in functionality and handling, and the cutting blade can be replaced by external setup. can get.

According to the first aspect of the present invention, since the movable part that slightly vibrates the cutting blade in the lateral direction is made only by the blade plate mounting block, the weight is reduced. Moreover, since a laminated piezoelectric element is used, the frequency and amplitude of the cutting blade can be appropriately selected according to the blade thickness and the workpiece. Therefore, it is possible to obtain a cutting device with high cutting accuracy that can cut the workpiece into a required dimension.
According to the second and third aspects of the present invention, it is possible to compactly install the laminated piezoelectric element, which is a driving source of the cutting blade, in the cutter holder, and to provide a cutting device that is miniaturized as a whole. be able to.
According to the fourth aspect of the present invention, whether or not the cutting operation is proper is monitored by detecting the amount of displacement of the blade plate mounting block, thereby preventing the occurrence of defective products and improving the productivity of the cutting device. be able to.

  Further, according to claim 5, by improving the cutting edge portion of the cutting blade, it is possible to suppress the occurrence of cracks in the workpiece during cutting, and according to claim 6, it is possible to more reliably prevent the occurrence of cracks. Compared with the conventional apparatus, the yield can be remarkably increased and the productivity can be improved.

  And according to Claims 7 and 8, it is detachable from the cutting device, can be set up for replacement and maintenance of the cutting blade and the laminated piezoelectric element, and is compact and functional. A cutter holder with excellent handleability can be provided.

An embodiment of the present invention will be described with reference to the drawings about a cutting device using a laminate of ceramic green sheets as a workpiece. FIG. 1 is a perspective view showing an outline of the cutting device A, FIG. Shows the same side view.
In FIG. 1, a rotary table 1 is disposed on a machine base (not shown), and Y-axis guide rails 2 and 2 extending in the front-rear direction are disposed on both sides thereof. A leg 3a is provided on the Y-axis guide rails 2 and 2. , 3a is slidable and the portal support body 3 is mounted. The support body 3 is provided with Z-axis guide rails 4, 4 extending in the vertical direction on the front surface, and is provided with a cutter ram 5 whose back can be slid along the Z-axis guide rails 4, 4. The cutter holder 10 is detachably attached to the cutting device A.

The turntable 1 is installed so as to be rotatable at a predetermined angle (90 degrees) by a drive source (not shown), and a suction table 6 having a vacuum hole on the surface is integrally attached to the upper surface. It is a work table which mounts and hold | maintains the workpiece | work W to cut | disconnect.
The support machine 3 is provided with a servo motor M1 that is a drive source above the center of the cutter ram 5, and a lift shaft 7 driven by the servo motor M1 is connected to the cutter ram 5 to connect the cutter ram 5 to the cutter ram 5. The servo motor M2, which is a drive source, is installed on the machine base at the lower back of the support machine body 3, and the Y drive shaft 8 driven by the servo motor M2 is connected to the support machine body 3. The cutter ram 5 can be reciprocated in the Y-axis direction (front-rear direction).
The cutter holder 10 is detachably attached with a flat blade-like cutting blade 11 in the lower half portion, and the cutting blade 11 is arranged so as to be positioned immediately above the suction table 6 of the rotary table 1.

Therefore, the cutting blade 20 attached to the cutter holder 10 moves up and down on the suction table 6 following the cutter ram 5 moved up and down by the servo motor M1, and cuts the workpiece W and moves once when the workpiece is lowered. Each time, the cutting operation is repeated while moving by a predetermined dimension in the Y-axis direction by the servo motor M2, and the same cutting operation is performed after the turntable 1 is rotated 90 degrees to cut the workpiece W into a lattice shape.
In the cutting apparatus A, the case where the servo motors M1 and M2 are used as drive sources has been described. However, the present invention is not limited to this, and other drive methods such as a linear motor, an air cylinder, and a hydraulic servo motor are employed. In addition, the specific structure and movement method of the support machine body 3, in particular, the rotary table 1 may be moved in the Y axis direction instead of moving the support machine body 3 in the Y axis direction. Of course.

Next, the details of the cutter holder 10 will be described with reference to FIGS.
The cutter holder 10 is made of metal, such as aluminum or stainless steel, or duralumin or titanium, and has a substantially rectangular shape as a whole, but is connected via spring-like parts (elastic displacement parts) 11 and 11 that are bent and deformed. Further, the upper half fixing block 10a and the lower half blade plate mounting block 10b are divided into two parts.
Specifically, the cutter holder 10 forms a substantially rectangular cavity extending over both blocks at the center of both blocks 10a and 10b to form an element accommodating space 12, and spring portions 11 and 11 are formed on both sides thereof. Each of the spring portions 11 is formed by cutting out and forming a plurality of ribs (three on each side) connected to both blocks, and the upper and lower ends of the ribs are thin spring portions 11a. When a force is applied, the blade plate mounting block 10b is slightly displaced in the lateral direction due to the bending of the spring portion 11a. Specifically, the spring plate portions 11 and 11 are slightly displaced by being slightly swung.
The left and right sides of both blocks 10a and 10b are also spaced apart via gaps 13 and 13, but protective pieces 14 having wear resistance such as nylon and duracon are provided on the left and right sides of fixed block 10a. It is inserted and the bottom surface is brought into contact with the upper surface of the blade plate mounting block 10b. This protective piece 14 prevents an excessive load from being applied to the spring portion 11a and prevents the spring portion 11 from buckling. A presser screw 14a is attached to the upper surface of the protective piece 14 to support the protective piece 14 and adjust the pressing to the blade plate mounting block 10b.

The blade plate mounting block 10b is formed such that the lower half front surface is cut out over the entire width to form the mounting surface 15, and the cutting blade 20 is mounted on the mounting surface 15. The cutting blade 20 is attached by pushing the upper end surface 20a of the cutting blade 20 to the step 15a provided at the upper end portion of the mounting surface 15 with the eccentric bolt 16 and pressing it against the front surface. The cutting blade 20 is clamped and fixed by the mounting surface 15 and the holding plate 17 by tightening with the bolt 18. The holding plate 17 is prevented from dropping by the protrusion 17a provided on the upper end thereof engaging with a groove 15b formed in the blade plate mounting block 10b (see FIG. 3B).
The eccentric bolt 16 can be operated from the window hole 19 opened in the presser plate 17, and even after the presser plate 17 is attached, the bolt 18 is loosened and the eccentric bolt 16 is operated to move the cutting blade 20 to the step 15a. It can be in close contact with.

In addition, the blade plate mounting block 10b and the presser plate 17 are provided with heaters 21a and 21b extending substantially over the entire width so as to heat the cutting blade 20.
The cutting blade 20 is made of a cemented carbide such as tungsten carbide-cobalt, and more preferably has a hard coating layer formed on the surface. As an example of preferable blade dimensions, a shank portion having a thickness of 0.4 to 1 mm, a blade edge portion having a maximum blade thickness of 25 to 50 μm, a blade edge angle of 15 to 20 degrees, and a blade span of 20 to 25 cm is used. In cases other than these dimensions, the blade plate mounting block 10b is prepared in large and small sizes.
In addition, the said cutting blade 20 has illustrated the case where the blade edge | tip part is a flat straight blade over the full length.

The back surface of the cutter holder 10 is pressed against the lower half of the cutter ram 5, and the fixed block 10a is fixed to the cutter ram 5 with several bolts 22 and is detachably assembled (see FIG. 3). ).
Therefore, in the cutter holder 10, the blade plate mounting block 10b can be slightly vibrated in the lateral direction by an elastic displacement in which the spring portions 11 and 11 are bent and deformed.
The spring part 11 has a blade member mounting block 10b in a lateral direction with respect to the fixed block 10a, for example, a spring member separate from the cutter holder 10 is interposed between the upper and lower blocks 10a and 10b. The shape and structure are not limited as long as they are elastically coupled so as to be capable of fine vibration.

The cutter holder 10 has two stacked piezoelectric elements 23a and 23b connected in series in the element accommodating space 12.
Specifically, a downward vertical wall 24 extending integrally from the fixed block 10a is formed at one side end (left end in the figure) of the element accommodating space 12, and from the blade plate mounting block 10b at the other side end (right end in the figure). An upward vertical wall 25 extending integrally is formed, and a receiving plate 24a serving as a substantially H-shaped buffer structure is integrally formed between the vertical wall 24 and the vertical wall 25. A receiving plate 25a having a substantially H-shaped buffer structure is formed integrally with the wall, and laminated piezoelectric elements 23a and 23b are disposed between the receiving plates 24a and 25a.
Each of the vertical walls 24 and 25 constitutes the left and right side walls of the element housing space 12, and the outer surfaces of the vertical walls 24 and 25 are substantially inclined surfaces and face each other with a minute gap therebetween. Thus, auxiliary walls 26 and 27 extending integrally from the other blocks 10b and 10a are formed. That is, the auxiliary wall 26 of the blade plate mounting block 10 b protrudes upward on the outer side of the vertical wall 24, and the auxiliary wall 27 of the fixed block 10 a protrudes downward on the outer side of the vertical wall 25. A magnetostrictive sensor 28 that detects the amount of displacement of the gap is provided at a position where the vertical wall 24 and the auxiliary wall 26 face each other through the minute gap, and the vertical wall 25 and the auxiliary wall 27 face each other.

The piezoelectric elements 23a and 23b are, for example, a laminated type in which piezoelectric materials mainly composed of PZT (lead zirconate titanate) and internal electrodes are alternately stacked, and a lamination direction (longitudinal direction) is applied by applying a voltage. Therefore, a displacement that slightly vibrates in the lateral direction is obtained as a vibration oscillation source. In the present invention, the displacement is provided in the narrow cutter holder 10 toward the vertical wall 25 of the blade plate mounting block 10b. A rectangular parallelepiped is used so that output is concentrated.
The piezoelectric elements 23a and 23b are fixed to the receiving space 24a of the fixing block 10a and the receiving surface 25b of the blade plate mounting block 10b by bonding or the like in order to attach the piezoelectric elements 23a and 23b to the element accommodating space 12, respectively. A buffer material 29 is bonded and interposed between 23b (see FIG. 5).

The buffer material 29 is an H-shaped board formed of a non-magnetic material such as aluminum, duralumin, or reinforced plastic material, and buffers bending stress applied to the piezoelectric elements 23a and 23b by bending of a groove formed at the center thereof. Further, as is apparent from FIG. 5, the cushioning material 29 is disposed in a state where its direction is shifted by 90 degrees with respect to the receiving plates 24a and 25a, which are also H-shaped, that is, the groove portions are disposed 90 degrees differently. A phase difference is provided in the direction. Thus, the lateral stress applied to the piezoelectric elements 23a and 23b during the slight vibration of the blade plate mounting block 10b is buffered, and the lateral displacement (lateral twist) caused by the piezoelectric elements 23a and 23b being displaced in the same direction is prevented. To do.
Fine grooves 30 are formed on the surfaces of the receiving plates 24a and 25a and the buffer material 29, that is, the surfaces to which the piezoelectric elements 23a and 23b are joined (see FIG. 5). Accordingly, when the piezoelectric elements 23a and 23b are bonded to the receiving plates 24a and 25a and the buffer material 29, excess adhesive is discharged from the groove 30 and is securely bonded thereto.

When the piezoelectric elements 23a and 23b are expanded and contracted, the vertical wall 24 at one end is the fixed side. Therefore, the vertical wall 25 which is the movable side is pushed to move the blade plate mounting block 10b by repeating the forward and backward reciprocating operation. Slightly vibrate in the lateral direction (right direction in FIG. 2).
Since the piezoelectric elements 23a and 23b have a weak restoring force on the contraction side after expansion in the expansion / contraction operation, the elastic restoring force remains in the spring part 11 of the cutter holder 10, that is, the piezoelectric elements 23a and 23b are compressed. The applied pressure state is accommodated in the element accommodating space 12.
Specifically, as shown in FIGS. 2 and 6, an engagement hole 31 having a stepped portion 31a is opened on one side portion (right side in FIG. 2) of the blade plate mounting block 10b, and on the right side surface of the fixed block 10a. The holding plate 32 is bolted and detachably attached. A support pin 32a inserted into the engaging hole 31 is provided below the holding plate 32, and a pressurizing spring (disc spring) 33 is provided on the pin 32a. The pressing plate 32 is fixed in a state in which the pressure spring 33 is attached to be extendable and the inner end of the pressurizing spring 33 is pressed against the step portion 31 a of the engagement hole 31. Accordingly, the spring portion 11 is pressed by the elastic force of the pressurizing spring 33 through the blade plate mounting block 10b, so that the piezoelectric elements 23a and 23b are compressed.

The magnetostrictive sensor 28 detects the amount of displacement of the gap between the vertical wall 24 and the auxiliary wall 26, which is elastically displaced with the operation of the piezoelectric elements 23a and 23b, and between the vertical wall 25 and the auxiliary wall 27. Detecting the amount of displacement of the spring part 11, that is, detecting the amplitude of the blade plate mounting block 10b at the time of slight vibration, as a result, detecting the amplitude of a laminated piezoelectric element to be described later. Thus, when the two piezoelectric elements 23a and 23b are detected to be inoperable, a measure for preventing damage can be taken instantaneously.
The magnetostrictive sensor 28 is not particularly limited to the attachment position as long as it can detect the amount of lateral displacement of the spring part 11, and in place of the magnetostrictive sensor, a capacitance sensor or the like can be used. It is possible to use a kind of sensor, and it is not always necessary to provide the magnetostrictive sensor 28 on both sides, and only one of them may be used.

Thus, in the cutting device A, when the cutter holder 10 is lowered on the suction table 6 together with the cutter ram 5 by the servo motor M1, and the cutting blade 20 contacts the workpiece W, the stacked piezoelectric elements 23a, 23b Since the cutting blade 20 is vibrated at a high speed with a set amplitude of several μm to several tens of μm in the horizontal direction by the operation, the cutting operation is performed by cooperation of the lowering operation of the cutter holder 10 and the fine vibration of the cutting blade 20. In the cutting operation, for example, high-speed fine vibrations in the inaudible region of 8 KHz to 15 KHz or more can be generated, and the optimum frequency and amplitude can be freely set while avoiding excessive amplitude due to resonance and annoying sound range. .
Specifically, when the cutter holder 10 is lowered at a fixed or variable feed amount set in the servo motor M1, the cutting blade 20 cuts the workpiece W while being finely vibrated at a high speed in the lateral direction, and the cutter holder 10 is raised. Then, after the cutter ram 5 is fixedly fed in the Y-axis direction by the servo motor M2, the cutting operation is repeated while the cutter holder 10 is lowered again, and the cutting operation is repeated until the end in the Y-axis direction. The workpiece W is cut into a lattice shape by repeating the same cutting operation as described above in a state in which is rotated 90 degrees to produce a minute chip (for example, vertical and horizontal dimensions 0.4 mm × 0.2 mm).

Therefore, according to the cutting apparatus A, heat is generated by frictional heat generated by applying fine vibration to the cutting blade 20, and the composition particles and binder of the work W are easily moved to reduce the cutting resistance of a highly brittle material. In addition, the cutting blade 20 is vibrated at a high speed by the reduced-weight blade plate mounting block 10b, so that the blade bending during the cutting operation does not occur and the dimensional accuracy of the minute tip can be increased and the blade bending can be achieved. In addition, the generation of cracks associated with the cutting blade can be suppressed, and at the same time, the load applied to the cutting blade is reduced by the high-speed fine vibration, so that the wear of the cutting blade can be reduced.
In addition to applying fine vibration to the cutting blade 20, the workpiece W is heated via the cutting blade 20 by the heaters 21a and 21b provided on the blade plate mounting block 10b and the holding plate 17, so that the workpiece W Cutting resistance is further reduced to improve cutting performance.

  And according to the said cutter holder 10, it is a compact holder structure which incorporates the lamination type piezoelectric elements 23a and 23b.

FIG. 7 is a block diagram illustrating a drive system for the laminated piezoelectric elements 23a and 23b. In FIG. 7, reference numeral 34 denotes an output control device wired to the piezoelectric elements 23a and 23b, and 35 denotes the magnetostrictive sensor 28. It is a wired amplitude detection circuit.
The output control device 34 controls an output signal (waveform / frequency / amplitude) applied with a drive voltage to slightly extend and contract the piezoelectric elements 23a and 23b, and any of the modes illustrated in FIG. Although it can be used, when cutting a work made of a brittle material having flexibility such as a ceramic green sheet, the waveform of FIG. 5B or the top of the waveform of FIG. It is preferable to use it with changes such as. Since the frequency imparts high-speed fine vibration to the cutting blade, the frequency is preferably in an inaudible region of 8 to 15 KHz or more, and the amplitude (vibration stroke of the cutting blade) is 50 with respect to the downward feed of 10 μm of the servo motor M1. ˜150 μm, preferably 100 μm.

The amplitude detection circuit 35 is a circuit for detecting the amplitude of the piezoelectric elements 23a and 23b by the magnetostrictive sensor 28 as the amount of displacement of the gap between the vertical wall 24 and the auxiliary wall 26 and between the vertical wall 25 and the auxiliary wall 27. The detected value is fed back to the output control device 34. The output control device 34 compares the detection data fed back from the magnetostrictive sensor 28 with setting data input in advance, and determines whether or not the comparison value is within an allowable range.
If the comparison value is within the allowable range, the cutting operation is continued. However, if the comparison value is out of the allowable range, that is, if the amplitude of the piezoelectric elements 23a and 23b is excessive or excessive, an alarm signal is output. Then, the alarm lamp or the like is turned on, or the cutter ram 5 is raised together with the alarm lamp or the like, and then the cutting device A is stopped. Thereby, since the cutting operation is interrupted, the generation of defective products can be prevented in advance, the yield can be improved, and the cutting blade 20 can be prevented from being damaged. It goes without saying that the detection data may be automatically corrected to the setting data by changing the output signal in the output control device 34 instead of stopping the cutting device A.

Next, another embodiment in which the cutting blade 20 is a straight blade will be described.
9 and 10 show the corrugated cutting blade 40.
The cutting blade 40 is a wave blade in which the blade edge portion 40a is continuously formed by a fine and smooth convex blade 41 and a concave blade. The continuous shape of the convex blade 41 and the concave blade 42 is not a pointed saw blade or a triangular blade, but is a shape that draws a smooth sine curve as shown in FIG. Each of the blade surfaces of the (part) and the recess (valley) is R-shaped. Illustrating specific cutting edge dimensions of the cutting blade 40, the pitch P1 between the blades is 0.5 mm, and the blade height H1 is 50 μm.
If the cutting operation is performed using the cutting blade 40, the R-shaped convex blade 41 slides on the workpiece W surface when the cutting blade 40 vibrates in the lateral direction, but it does not simply slide on the workpiece W surface. Therefore, the workpiece W is cut with a small amount of wear and moderate bite, and since the R-shaped convex blade 41 and the R-shaped concave blade 42 are also vertically fed by the cutting blade, no local cutting pressure is applied to the workpiece W. Therefore, the occurrence of cracks in the workpiece W during cutting can be suppressed.

11 to 13 show a cutting blade 50 obtained by further improving the cutting blade 40.
The cutting blade 50 is a corrugated cutting blade in which the blade edge portion 50a is continuously formed by a fine and smooth R-shaped convex blade and an R-shaped concave blade. The blades 51a and the low convex blades 51b are arranged in two stages, and they are arranged every other one, and the depth of the concave blades 52 formed between them is constant. As an example of specific cutting edge dimensions of the cutting blade 50, the pitch P2 between the blades is 0.5 mm, the blade height H2 of the convex blade 51a is 50 μm, and the blade height H3 of the convex blade 51b is 25 μm.
Further, as the convex blades 51a and 51b are arranged in two steps, the blade thickness of both the convex blades 51a and 51b changes, that is, as shown in FIGS. 12A and 12B and FIG. 14, the low convex blade 51b. The blade thickness becomes thinner than that of the convex blade 51a. Then, the relationship between the blade thicknesses of the convex blades 51a, 51b and the concave blade 52 is T2>T3> T4 when the blade thicknesses are T2, T3, T4 (for the sake of convenience, the maximum thickness portion is shown) ( (See FIG. 14).

An example of the step 1 stroke (one reciprocating motion of fine vibration) of the cutting operation using the cutting blade 50 is as shown in FIG. 15. As is known, the convex blade 51a and the convex blade 51b are moved with respect to the workpiece W. Therefore, the cutting pressure applied to the workpiece W is distributed at two locations. Therefore, since the cutting pressure can be reduced as compared with the case of the cutting blade 40, the occurrence of cracks in the workpiece W can be more reliably prevented. The fact that the cutting pressure can be reduced, in other words, can increase the vertical feed speed of the cutting blade 50, so that the cutting workability can be improved.
In addition, as described above, the blade thickness T3 of the low convex blade 51b is thinner than the convex blade 51a, so that not only the cutting angle is reduced and the cause of cracking is further reduced, but also the viscosity is like a ceramic green sheet. Even in the case of a workpiece including a binder or the like, only the convex blade 51a corresponding to half of the entire convex blade contacts with the cutting side surface of the workpiece at the time of the fine vibration in the lateral direction, and adhesion with the workpiece W as the entire cutting blade. The cutting property can be improved because the property is reduced.

In the above embodiment, the case where the workpiece to be cut is a ceramic green sheet has been described. However, the cutting apparatus of the present invention is a cutting object having high hardness, high toughness or brittleness, and high cutting resistance. If it is, it can apply without being limited to a ceramic green sheet.
Further, in the above-described embodiment, the case where two stacked piezoelectric elements that are vibration driving sources are connected in series has been described. However, one piezoelectric element having substantially the same length is provided internally. It is also possible to connect three or more.
In the above embodiment, the cutter holder has been described as being assembled to a cutting device that performs a cutting operation when the cutter ram is lowered, but the cutting device that performs the cutting operation when the cutter ram is raised, that is, the workpiece is cut from the lower surface. It can be applied to cutting devices that perform (full cut, half cut), and can also be applied to a cutting device that cuts workpieces from the top and bottom by combining two cutter holders. Can be reliably controlled, and there is no possibility of defective products due to chipping in the division after firing.

It is a perspective view which shows the outline | summary of this invention cutting device. It is a front view which can partly cut away a cutting device. FIG. 3A is a partially cutaway side view of FIG. 2, and FIG. 3B is a partially enlarged view of the partially cutout. It is a perspective view which can cut out part of this invention cutter holder. It is a perspective view which shows the attachment state of a lamination type piezoelectric element. It is the front view which can partly notch which expanded the one side (right side) part of the cutter holder. It is a block diagram which shows the drive system of a lamination type piezoelectric element. It is an illustration of the output waveform applied to a piezoelectric element. It is a front view which shows other embodiment of a cutting blade. FIG. 10 is an enlarged view of a portion X in FIG. 9. It is further another embodiment of a cutting blade, Comprising: It is an enlarged view of the principal part (similar to X part of FIG. 9). 11A is a bottom view of FIG. 11, and FIG. 11A is a cross-sectional view taken along the line (A)-(A) in FIG. 11, and FIG. 11B is a cross-sectional view taken along the line (B)-(B); ) Is a sectional view taken along the line (C)-(C), and (D) is a bottom view taken along the line (D)-(D). 11 is a side end view of FIG. 11, (E) is an end view taken along line (E)-(E) in FIG. 11, (F) is an end view taken along line (F)-(F), G) is an end view taken along line (G)-(G). FIG. 12 is a cross-sectional view (hatching omitted) taken along line (G)-(G) in FIG. 11. It is cutting operation explanatory drawing in the case of using the cutting blade of FIG.

Explanation of symbols

A: Cutting device W: Workpiece 5: Cutter ram 10: Cutter holder 10a: Fixed block 10b: Blade plate mounting block 11: Spring part (elastic displacement part) 11a: Spring part 12: Element accommodating space 15: Mounting surface 17: Holding plate 20: Cutting blades 23a, 23b: Multilayer piezoelectric element 25: Vertical wall 27: Vertical wall 28: Magnetostrictive sensor 33: Pressurizing spring 40: Cutting blade 40a: Cutting edge portion 41: Convex blade 42: Concave blade 50: Cutting Blade 50a: Cutting edge 51a: High convex blade 51b: Low convex blade 52: Concave blade

Claims (8)

  In a cutting device in which a flat blade-like cutting blade is attached to a cutter holder that moves up and down following a ram that can be moved up and down, and a blade plate mounting block is configured to be capable of fine vibration in the lateral direction on a fixed block of the cutter holder. A laminated piezoelectric element is installed horizontally in the cutter holder, one side of the piezoelectric element is joined to the vertical wall of the fixed block, and the other side is joined to the vertical wall of the blade plate mounting block. A cutting apparatus characterized in that the cutting operation is performed while applying a high-speed fine vibration in a lateral direction to the cutting blade by the piezoelectric element in cooperation with the lowering operation.   The blade plate mounting block is connected to the lower portion of the fixed block fixed to the ram via an elastic displacement portion that can be slightly displaced in the lateral direction, and the fixed side vertical wall of the fixed block and the movable side of the blade plate mounting block The cutting apparatus according to claim 1, wherein the laminated piezoelectric element is disposed between the vertical wall and the vertical wall.   3. The cutting apparatus according to claim 2, wherein the laminated piezoelectric element is disposed at a substantially central portion of the cutter holder, and the elastic displacement portions are formed on both sides thereof.   The cutting apparatus according to claim 1, wherein a sensor for detecting a displacement amount of the blade plate mounting block is provided in the cutter holder.   2. The cutting apparatus according to claim 1, wherein the cutting blade is a corrugated cutting blade in which a blade edge portion is continuously formed by a fine and smooth convex blade and a concave blade.   The said blade edge | tip part is a waveform made continuous by the high convex blade and low convex blade which have a height difference in a blade-tip position, and the concave blade of constant depth interposed between them. Cutting device.   By connecting the fixed block and the blade plate mounting block vertically together via an elastic displacement part that can be finely displaced in the lateral direction, it is configured in a generally rectangular shape as a whole, and an element accommodating space is provided between the two blocks. A laminated piezoelectric element is attached so that it can be slightly expanded and contracted laterally in a pressurized state, and a flat blade-like cutting blade is detachably clamped and fixed to the blade plate mounting block by the block and a holding plate. Cutter holder for cutting device. The elastic displacement portions are respectively formed on both sides of the element receiving space, and the vertical wall of the fixed block is arranged downward on one side and the vertical wall of the blade plate mounting block on the other side facing the element receiving space. 8. The cutter holder for a cutting apparatus according to claim 7, wherein the cutter holder is disposed upward, and the stacked piezoelectric elements are horizontally disposed between both vertical walls, and each end face is joined to each vertical wall.

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