JP2006198758A - Ultrasonic vibration table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a working table for fixing and holding a workpiece on a machining apparatus, which working table can improve the machining speed and machining accuracy by applying an approximately uniform ultrasonic vibration to the whole of the working table. <P>SOLUTION: A flange 12 of a supporting member 9 connected to the end portion of a rear mass 4 of a bolt tightening Langevin type ultrasonic vibrator 2 is positioned at the central portion of the bolt tightening Langevin type ultrasonic vibrator 2. The flange 12 of the supporting member 9 is fixed to a base stand. The table 11 is connected to the bolt tightening Langevin type ultrasonic vibrator 2 by means of the female screws provided on the front mass 3 of the bolt tightening Langevin type ultrasonic vibrator 2 and titanium bolts. Further, silicone grease is thinly applied between the table 11 and the front mass 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention is an ultrasonic wave used for cutting, grinding and polishing of difficult-to-cut materials such as glass, ceramic, silicone, titanium, and hard metal, and general metal materials, organic materials, inorganic materials and composite materials thereof. The present invention relates to a vibration table.

  In general, it is very difficult to cut and grind brittle materials with high hardness such as glass, ceramic, silicone, titanium, and super hard metal. Has been done. In such ultrasonic cutting, since cutting resistance is reduced, the frictional heat of the cutting tool is reduced, the thermal distortion of the processed surface is reduced, the life of the cutting tool is extended, and the machining accuracy is improved. Ultrasonic cutting is described in detail in “Ultrasonic Handbook” (Maruzen Co., Ltd., published in 1999), pages 679-684.

In addition, it is well known that vibration is applied to a table for fixing a workpiece, and this is propagated to the workpiece to perform vibration cutting. For example, the ultrasonic vibration table disclosed in Japanese Patent Laid-Open No. 2002-355726 shown in FIG. 10 is a table device that can fix a workpiece to be processed by being attached to a bed of a machine tool, and the schematic configuration thereof is as follows. is there.
First, there is an ultrasonic vibrator that generates vibration. There is an aluminum transmission horn for amplifying the ultrasonic vibration and transmitting it to the vibration table. The surface of the transmission horn in contact with the ultrasonic transducer has the same diameter as that of the ultrasonic transducer, but the diameter is smaller at the upper part than the outer flange. Then, the outer flange is fastened and fixed to the inner flange of the casing by a bolt member with a rubber plate interposed therebetween.
In addition, a guide member that protrudes downward from the lower portion of the vibration table and is inserted into a guide recess formed on the outside of the casing and guides in the vertical direction while restricting the lateral movement of the vibration table is provided.

  As another method, Japanese Patent Laid-Open No. 2003-220530 shown in the plan view of FIG. 11 and the side view of FIG. 12 discloses three bolted Langevin types on the lower surface of the table 11 that holds and holds the workpiece (workpiece). A vibration table having a configuration in which the ultrasonic transducer 2 is fixed and the lower surface of the table 11 is connected to a main body case is disclosed. Then, by applying ultrasonic vibration to the workpiece temporarily fixed on the upper surface of the disk-shaped table 11 by these bolted Langevin type ultrasonic transducers 2, the workpiece formed from a hard and brittle material is obtained. It is said that ultra-small diameter drilling and grooving are easy.

However, in ultrasonic cutting, when the tool becomes large, it is very difficult to give uniform ultrasonic vibration to the processed portion of the tool that comes into contact with the workpiece.
In addition, when the tool is downsized, the device for applying ultrasonic vibration must be downsized. The smaller the ultrasonic vibration device is, the smaller the vibration energy given to the tool. For this reason, when a tool is small, there exists a fault that an ultrasonic cutting capability will become small.

On the other hand, the ultrasonic vibration table can be vibrated regardless of the shape of the tool. However, the ultrasonic vibration table disclosed in Japanese Patent Application Laid-Open No. 2002-355726 shown in FIG. 10 has a smaller ultrasonic radiation surface area than one table as shown in FIG. The entire table has the disadvantage that uniform vibration displacement cannot be obtained. The one-dot chain line in FIG. 13 indicates the center line of the table when not vibrating. The two-dot chain line indicates the amplitude width when the table is vibrating.

  Further, although the vibration displacement of the ultrasonic vibrator is amplified by the transmission horn, the amplitude amount of ultrasonic vibration of the table of 15 KHz or more may be 10 microns or less. In such a case, a transmission horn for amplification is unnecessary. Further, there is a problem that the vibration of the ultrasonic vibration table is greatly influenced by the weight of the table or the work in inverse proportion to the amplification degree of the vibration displacement.

  Further, since the table that vibrates and the casing that should not vibrate are connected through the guide member, the vibration of the table is suppressed, and the vibration leaks to the casing or the base. For this reason, since the table has the same vibration displacement, more power must be input, which causes a problem of heat generation. Further, there is a problem that unnecessary vibration is transmitted to the processing apparatus to which the ultrasonic vibration table is attached, and the performance of the processing apparatus is deteriorated.

  The ultrasonic vibration table of Japanese Patent Application Laid-Open No. 2003-220530 shown in FIG. 11 and FIG. 12 has an outer peripheral part of the lower surface of the table connected to the main body case. Similarly, since the table that vibrates and the main body case that should not vibrate are fixed, the vibration of the table is suppressed, and the vibration leaks to the main body case or the base. For this reason, since the table has the same vibration displacement, more power must be input, which causes a problem of heat generation. Further, there is a problem that unnecessary vibration is transmitted to the processing apparatus to which the ultrasonic vibration table is attached, and the performance of the processing apparatus is deteriorated.

  In addition, three bolted Langevin type ultrasonic transducers are fixed only to the table. Since there is only one power supply, an AC voltage having the same frequency is applied to the three bolted Langevin type ultrasonic transducers. As a result, as shown in FIG. 14, the fixing part to the main body case becomes a node and the central part of the table becomes the vibration belly, so that it becomes almost the same as the vibration mode of the drum. In addition, a dashed-dotted line shows the centerline of the table when not vibrating. The two-dot chain line indicates the amplitude width when the table is vibrating. Therefore, since a large difference in vibration displacement appears in the table, there is a problem that the ultrasonic processing effect cannot be exhibited depending on the location.

  Furthermore, in this configuration, if the weight of an object placed on a bolted Langevin type ultrasonic vibrator such as a table or a work that is a mechanical load increases, the table or the work becomes a node of vibration and is opposite to the table side. The surface of the bolted Langevin type ultrasonic transducer becomes close to the vibration antinode. That is, there is a problem that the amplitude amount of the table varies greatly depending on the weight of the table or the workpiece.

  Also, in an ultrasonic vibration table having a plurality of ultrasonic vibrators, the natural frequency of each ultrasonic vibrator is different, so that it is not possible to apply an AC power source with an optimum frequency to each ultrasonic vibrator. There is also a problem of driving with low efficiency.

Further, in an ultrasonic vibration table having a plurality of ultrasonic vibrators, an AC voltage having a single frequency is applied, so that the table is in a vibration mode in which the central portion is greatly displaced. That is, there is a problem with the vibration displacement distribution.
An object of the present invention is to provide an ultrasonic vibration table that solves the above-mentioned problems.

  The present invention relates to a table apparatus that fixes and holds a workpiece to be processed by being attached to a machine tool, and includes an ultrasonic vibration table apparatus that includes one or more bolted Langevin type ultrasonic vibrators and applies ultrasonic vibrations to the table. The front mass of the bolted Langevin type ultrasonic transducer is connected to the table, and the support part for supporting the bolted Langevin type ultrasonic transducer is the end of the rear mass of the bolted Langevin type ultrasonic transducer. And an ultrasonic vibration table device connected to the.

  In the present invention, the support component connected to the end of the rear mass of the bolted Langevin type ultrasonic transducer is connected to the base table at a position near the center of the bolted Langevin type ultrasonic transducer. It is in the sonic vibration table device.

  The present invention is also an ultrasonic vibration table device having a plurality of bolt-clamped Langevin type ultrasonic transducers and the same number of ultrasonic oscillation circuits as the bolt-clamped Langevin type ultrasonic transducers.

  The present invention also resides in an ultrasonic vibration table device that adjusts the magnitude of an alternating voltage applied to each bolted Langevin type ultrasonic transducer.

  The present invention is also the ultrasonic vibration table device in which the ultrasonic oscillation circuit applies an AC voltage substantially equal to the resonance frequency of each bolted Langevin type ultrasonic transducer.

  Since the ultrasonic vibration table of the present invention can excite substantially uniform ultrasonic vibration on the table surface, the ultrasonic vibration of almost uniform magnitude can be obtained regardless of the location of the work held and fixed on this surface. Is propagated. As a result, it is possible to improve the processing speed of the work that is held and fixed, the processing of difficult-to-process materials, and the processing accuracy without being substantially affected by the position and size of the work that is held and fixed on the table. Become.

  The present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view of an ultrasonic vibration table 1 having a first configuration according to the present invention, and FIG. 2 is a side sectional view taken along line AA of FIG.

The bolted Langevin type ultrasonic transducer 2 is described in detail in “Ultrasonic Engineering” (Maruzon Co., Ltd., Corona, 1993), pages 12-22.
FIG. 16 shows a plan view of a general bolted Langevin type ultrasonic transducer 2 taken along the line AA in FIG. A piezoelectric ceramic 5 is disposed on both sides of the electrode plate 6, a front mass 3 and a rear mass 4 are disposed on the outside thereof, and a vibrator in which these are tightened and integrated with a bolt 7 and a nut 8 is a bolted Langevin type ultrasonic vibrator. 2 is called. The output-side front mass 3 is provided with a connecting screw. This bolted Langevin type ultrasonic vibrator 2 generates a standing wave in the range including the metal block (front mass and rear mass) through the mechanical joint surface caused by the application of an alternating electric field of a certain frequency to the piezoelectric ceramic. Cause mechanical resonance.

The ultrasonic vibration table 1 shown in FIGS. 1 and 2 also uses a bolted Langevin type ultrasonic transducer 2. The configuration is as follows. The front mass 3 is made of an aluminum alloy, has a cylindrical shape, has a diameter of 30 mm, and a length of 40 mm. Further, a female screw for joining the table 11 is provided on the ultrasonic radiation surface of the front mass 3. Furthermore, a female screw is also provided on the surface of the front mass 3 opposite to the ultrasonic radiation surface.
The piezoelectric ceramic 5 is a PZT-based material and has a ring shape with an outer diameter of 30 mmφ, an inner diameter of 12 mmφ, and a thickness of 7.5 mm. The electrode plate between the two piezoelectric ceramics 5 is made of phosphor bronze. The shape is an outer diameter of 30 mmφ, an inner diameter of 12 mmφ, and a thickness of 0.25 mm. In order to simplify the drawing, the electrode plate is not shown. The rear mass 4 is also made of an aluminum alloy, has a diameter of 30 mm, a length of 40 mm, and has a 12 mm through hole in the center. Further, there is a support part 9 made of stainless steel SUS303 for supporting the bolted Langevin type ultrasonic transducer 2 and for attaching to the base table 10. The shape of the support component 9 is cylindrical.
Further, a bolt 7 and a nut 8 having a diameter of 10 mm for fastening and integrating them are made of stainless steel.

  The flange 12 of the support component 9 of the bolted Langevin type ultrasonic transducer 2 integrated by tightening with the bolt 7 and the nut 8 is located at the center of the bolted Langevin type ultrasonic transducer 2. This position is a vibration node of the bolted Langevin type ultrasonic transducer 2, and the flange 12 is also a vibration node. Therefore, it is possible to prevent the vibration of the bolted Langevin type ultrasonic transducer 2 from being propagated to other parts by joining the flange 12 to the base table 10 with a bolt (not shown).

Since the support component 9 supports the end portion of the rear mass 4 to fix the bolted Langevin type ultrasonic transducer 2, the bolted Langevin type is attached to the end portion of the rear mass 4, which is unloaded in the conventional method. Since a load due to the weight of the ultrasonic vibrator is applied, no-load operation is not possible even if there is no table 11, a work or a fixture to which the work is attached.
If the bolted Langevin type ultrasonic transducer 2 is operated without load, the bolted Langevin type ultrasonic transducer 2 or the ultrasonic oscillation circuit may be damaged.

  The table 11 is made of an aluminum alloy. The table 11 is joined to the bolted Langevin type ultrasonic transducer 2 by a female screw and a titanium bolt provided on the front mass 3 of the bolted Langevin type ultrasonic transducer 2. Further, a thin film of silicon grease is applied between the table 11 and the front mass 3. With this silicon grease, the ultrasonic vibration of the bolted Langevin type ultrasonic vibrator 2 can be transmitted to the table 11 so that the loss can be ignored.

Next, an operation example of the ultrasonic vibration table 1 will be described. 3 is a plan view showing only the table 11, the fixing device 13, the fixing plate 14, and the work 15 of the ultrasonic vibration table 1 shown in FIGS. 1 and 2, and FIG. 4 is a side view thereof. Except for this, illustration is omitted for the convenience of the drawings.
The ultrasonic vibration table 1 is attached to the dicer. Then, it is temporarily joined with a wax to a carbon fixing plate 14 for fixing a ceramic workpiece 15 to be cut. The carbon plate is cut together with the workpiece, but is used so as not to damage the member located below it. Further, the carbon fixing plate 14 to which the work 15 is attached is joined to the fixing device 13 by vacuum. The fixing device 15 is joined to the table 11 with screws 7. In order to hold and fix a fixing plate or a fixing device including a workpiece on the table, adhesion with wax, fixing to the table with screws, etc., magnetic fixing, electrostatic fixing, freezing fixing, etc. There is a way.

  Next, an AC voltage of about 20 Khz is applied from the ultrasonic oscillation circuit 16 to the bolted Langevin type ultrasonic transducer 2. As a result, the bolted Langevin type ultrasonic vibrator 2 vibrates ultrasonically.

  Next, the ultrasonic oscillation circuit 16 will be described with reference to FIG. The ultrasonic oscillation circuit 16 applies a sinusoidal voltage capable of adjusting the magnitude of the frequency corresponding to the resonance frequency of the bolted Langevin type ultrasonic transducer 2. The vibrator in FIG. 5 is a bolted Langevin type ultrasonic vibrator 2.

  A PLL (Phase-locked-loop) circuit shown in FIG. 5 generates a rectangular wave voltage having a frequency corresponding to the resonance frequency of the bolted Langevin type ultrasonic transducer 2. This rectangular wave voltage is amplified by the driver circuit, and then the electric power factor is improved by the matching circuit, and is applied to the bolted Langevin type ultrasonic transducer 2 as a sine wave voltage.

  The voltage / current detection circuit provided between the matching circuit and the bolt-clamped Langevin type ultrasonic transducer 2 detects an AC voltage, an AC current, and a phase thereof applied to the bolt-clamped Langevin type ultrasonic transducer. To do.

  The power control unit calculates the power applied to the bolted Langevin type ultrasonic transducer based on the AC voltage and AC current detected by the voltage / current detection circuit and their phases. The power control unit controls the power amplification factor of the driver circuit based on the calculated power value so that a predetermined amount of power is applied to the bolted Langevin type ultrasonic transducer.

  On the other hand, the phase circuit inputs a signal obtained by converting the current flowing in the bolt-clamped Langevin type ultrasonic transducer from the voltage / current detection circuit into current-voltage, and the control frequency of the frequency control block is the bolt-clamped Langevin type ultrasonic wave The signal is phase-shifted so as to have the resonance frequency of the vibrator, and then a voltage signal converted into a pulse voltage is output to the PLL circuit.

  The PLL circuit controls the frequency of the rectangular wave voltage output from the PLL circuit so that the phase of the pulsed voltage output from the phase circuit matches the phase of the rectangular wave voltage output from the PLL circuit. By such control, even when the resonance frequency of the bolted Langevin type ultrasonic transducer is slightly changed due to a change in the environmental temperature, for example, the resonance frequency of the bolted Langevin type ultrasonic transducer is always changed. It is possible to apply an alternating voltage with a frequency corresponding to.

  Further, as shown in FIG. 6, it goes without saying that the apparent resonance frequency of the bolted Langevin type ultrasonic transducer can be moved by connecting a coil or a capacitor in series with the bolted Langevin type ultrasonic transducer.

  When the resonance frequency of a bolted Langevin type ultrasonic transducer is close to another vibration mode, connect a coil or capacitor in series to the bolted Langevin type ultrasonic transducer and use the apparent bolted Langevin type ultrasonic transducer. Moving the resonance frequency of the vibrator is indispensable for exciting highly efficient vibration.

  The vibration of the bolted Langevin type ultrasonic transducer propagates to the workpiece through the aluminum table. When ultrasonic vibration is excited on the workpiece, the cutting ability of the dicer is greatly improved due to the effect of ultrasonic processing.

  Specific figures for the cutting effect resulted in about 20 percent lower dicer spindle current and about 40 percent lower blade wear.

  This is an effect described in detail on pages 679 to 684 of “Ultrasonic Handbook” (Maruzen Co., Ltd., issued in 1999). In other words, ultrasonic cutting has proved that the cutting force is reduced, so that the frictional heat of the cutting tool is small, the thermal distortion of the processed surface is small, and the life of the cutting tool is extended.

  Moreover, the same effect was confirmed even if the processing conditions of the dicer were changed. In addition, chipping of cut ceramic ceramic workpieces has been greatly reduced. In this way, machining accuracy was improved. The effect of the content described in detail on pages 679-684 of “Ultrasonic Handbook” (Maruzen Co., Ltd., published in 1999) was also confirmed.

  FIG. 7 is a plan view showing a second configuration of the present invention, and FIG. 8 is a side sectional view taken along line AA of FIG. This is an ultrasonic vibration table 1 having four bolted Langevin type ultrasonic transducers 2a, 2b, 2c, and 2d in order to cope with a case where the workpiece size is large. The bolt-clamped Langevin type ultrasonic transducer 2 is characterized in that the flange 12 of the support component 9 joined to the end of the rear mass 4 is located at the center of the bolt-clamped Langevin type ultrasonic transducer 2 as shown in FIGS. The same configuration as that shown in FIG.

  The flange 12 of the support component 9 of the bolted Langevin type ultrasonic transducer 2 integrated by tightening with the bolt 7 and the nut 8 is located at the center of the bolted Langevin type ultrasonic transducer 2. This position is a vibration node of the bolted Langevin type ultrasonic transducer 2, and the flange 12 is also a vibration node. Therefore, it is possible to prevent the vibration of the bolted Langevin type ultrasonic transducer 2 from being propagated to other parts by joining the flange 12 to the base 10.

Since the support component 9 supports the end portion of the rear mass 4 to fix the bolted Langevin type ultrasonic transducer 2, the load due to the weight of the bolted Langevin type ultrasonic transducer 2 and the table 11 is bolted. Since it is added to the rear mass 4 side of the Langevin type ultrasonic transducer 2, no load operation is possible even if there is no workpiece or a fixture to which the workpiece is attached.
If the bolted Langevin type ultrasonic transducer 2 is operated without load, the bolted Langevin type ultrasonic transducer 2 or the ultrasonic oscillation circuit 16 may be damaged.

  7 and FIG. 8, since a relatively large work is mounted, a large electrical input is required. In such a case, especially when a bolt-tightened Langevin type ultrasonic vibrator is operated without load, a bolt-tightened Langevin is used. The ultrasonic transducer or ultrasonic power supply may be damaged. In such a case, the configuration of the present invention is particularly effective.

  The ultrasonic oscillation circuits 16a and 16b in FIG. 9 apply a sine wave voltage having a frequency corresponding to the resonance frequency of each bolted Langevin type ultrasonic transducer 2 to each of two or more bolted Langevin type ultrasonic transducers 2. To do. Three or more ultrasonic oscillation circuits 16 are omitted for the sake of illustration.

  The ultrasonic oscillation circuit of FIG. 9 is composed of four ultrasonic oscillation circuits 16 that drive individual bolted Langevin type ultrasonic transducers. Each ultrasonic oscillation circuit 16 has the same configuration as that shown in FIG. The four ultrasonic oscillation circuits 16 are housed in one storage case.

  When the ultrasonic oscillation circuit of FIG. 9 is used, even if the resonance frequency of each bolted Langevin type ultrasonic transducer fluctuates, each bolted Langevin type ultrasonic vibration is caused by each ultrasonic oscillation circuit 16. An alternating voltage having a frequency corresponding to the resonance frequency can always be applied to the child. For this reason, each bolted Langevin type ultrasonic transducer can exhibit an ultrasonic vibration having a large amplitude.

  Conventionally, when driving a plurality of bolt-clamped Langevin type ultrasonic transducers, the plurality of bolt-clamped Langevin type ultrasonic transducers are electrically connected in parallel, and the bolted bolts connected in parallel are connected. An AC voltage is applied to the Langevin type ultrasonic transducer using a single ultrasonic oscillation circuit. However, as described above, the resonance frequency of the plurality of bolt-clamped Langevin type ultrasonic transducers changes for each bolt-clamped Langevin type ultrasonic transducer due to load and temperature fluctuations. One ultrasonic oscillation circuit cannot apply an alternating voltage at the resonance frequency of each bolted Langevin type ultrasonic transducer. For this reason, when such a drive device is used, each bolted Langevin type ultrasonic vibrator cannot be sufficiently ultrasonically vibrated, and the vibration table may not be able to exhibit its performance sufficiently. .

  Further, when an AC voltage is applied to a plurality of bolt-clamped Langevin type ultrasonic transducers using a single ultrasonic oscillation circuit as described above, the vibration displacement at the center of the table increases.

  When the ultrasonic vibration table is operated by an ultrasonic oscillation circuit that constantly applies an AC voltage having a frequency corresponding to the resonance frequency to each bolted Langevin type ultrasonic vibrator, the vibration of the table becomes almost uniform. Propagates to the workpiece. When ultrasonic vibration is excited on the workpiece, the cutting ability of the dicer is greatly improved due to the effect of ultrasonic processing.

  Specific figures for the cutting effect resulted in about 20 percent lower dicer spindle current and about 40 percent lower blade wear.

  The ultrasonic vibration table is noisy when the vibration frequency is 15 KHz or less, and the vibration amplitude of the Langevin type ultrasonic transducer exceeding 100 KHz is small and is not suitable as a vibration source of the vibration table.

  Therefore, in the ultrasonic vibration table, it is desirable that the frequency of the AC voltage applied to the bolted Langevin type ultrasonic transducer is 15 KHz or more and 100 KHz or less.

  The ultrasonic vibration table of the present invention can be used as a processing table used in a machining facility or the like.

  It is a top view which shows the ultrasonic vibration table of the 1st structure of this invention.   It is a side view which shows the ultrasonic vibration table of the 1st structure of this invention.   It is a top view which attached the workpiece | work, the fixing plate, and the fixing device to the table.   It is the side view which attached the workpiece | work, the fixing plate, and the fixing device to the table.   It is an electric circuit block diagram which shows an example of the ultrasonic oscillation circuit which drives the bolting Langevin type ultrasonic transducer of the ultrasonic vibration table of FIG.   It is an electric circuit block diagram which shows the example which connected the circuit element in series to the bolt fastening Langevin type ultrasonic transducer | vibrator of FIG.   It is a top view which shows the ultrasonic vibration table of the 2nd structure of this invention.   It is a side view which shows the ultrasonic vibration table of the 2nd structure of this invention.   It is an electric circuit block diagram showing an example of an ultrasonic oscillation circuit of an ultrasonic vibration table having a plurality of bolted Langevin type ultrasonic transducers.   It is a side view of the conventional ultrasonic vibration table.   It is a top view of another conventional ultrasonic vibration table.   It is a side view of another conventional ultrasonic vibration table.   It is a figure which shows the vibration displacement of the table surface of the conventional ultrasonic vibration table.   It is a figure which shows the vibration displacement of the table surface of another conventional ultrasonic vibration table.   It is a top view of the conventional bolting Langevin type ultrasonic transducer.   It is side surface sectional drawing of the conventional bolting Langevin type ultrasonic transducer | vibrator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ultrasonic vibration table 2 Bolt tightening Langevin type ultrasonic transducer 3 Front mass 4 Rear mass 5 Piezoelectric ceramic 6 Electrode plate 7 Bolt 8 Nut 9 Support component 10 Base stand 11 Table 12 Flange 13 Fixing device 14 Fixing plate 15 Workpiece 16 Ultrasonic Oscillator circuit

Claims (5)

A table apparatus for fixing and holding a workpiece to be processed by being attached to a machine tool, comprising an ultrasonic vibration table apparatus having one or more bolted Langevin type ultrasonic vibrators and applying ultrasonic vibrations to the table. Are connected to the front mass of the bolted Langevin type ultrasonic transducer, and the support parts for supporting the bolted Langevin type ultrasonic transducer are connected to the end of the rear mass of the bolted Langevin type ultrasonic transducer. An ultrasonic vibration table device. The support part connected to the end of the rear mass of the bolted Langevin type ultrasonic transducer is connected to the base table at a position near the center of the bolted Langevin type ultrasonic transducer. Sonic vibration table device. A vibration table having a plurality of bolted Langevin type ultrasonic transducers, wherein the number of ultrasonic oscillation circuits is the same as that of bolted Langevin type ultrasonic transducers. 4. The ultrasonic vibration table device according to claim 3, wherein the magnitude of the AC voltage applied to each bolted Langevin type ultrasonic transducer is adjusted. 4. The ultrasonic vibration table device according to claim 3, wherein the ultrasonic oscillation circuit applies an AC voltage substantially equal to a resonance frequency of each bolted Langevin type ultrasonic transducer.

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