JP2020028873A - Langevin type ultrasonic vibrator and method of supporting the same - Google Patents

Abstract

To provide a langevin type ultrasonic vibrator which has small variation in resonance frequency of an ultrasonic vibrator and small variation in vibration displacement quantity, and a method of supporting the same.SOLUTION: A copper (s45c)-made flange 3 and a front mass 2 are formed in one body through machining. Then a female hole is formed along a center axis of the front mass 2, and a rod screw 8 is screwed in the female hole. Piezoelectric elements 4 (4a, 4b) as piezoelectric ceramic having been subjected to polarization processing and electrode plates 6 (6a, 6b) are inserted into the rod screw. A female screw provided to a copper (s45c)-made rear mass 7 is fastened to constitute a langevin type ultrasonic vibrator 1 having a flange 3. Then the flange 3 connected to the langevin type ultrasonic vibrator 1 is fastened with a male screw provided on an outer surface of a housing 9 and a vibration nut 5 to be supported and fixed. A difference between an inner radius Hin of the housing 9 and a radius Nin of a lower small-diameter part provided on a bottom face of the vibration nut 5 is 0.1 to 1 time as large as an outer diameter Fr of the front mass.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a Langevin type ultrasonic transducer and a method for supporting the same.

  Conventionally, the Langevin type ultrasonic transducer and its supporting method have a vibration node inside the Langevin type ultrasonic transducer, provide a flange for supporting the vicinity of the node, and support the flange with a support member. Was the way to do it. This configuration is described in detail in Non-Patent Document 1.

Junichi Miyoshi and others, "Ultrasonic Technology Handbook", Nikkan Kogyo Shimbun, December 1985, p1028 "Electrical Test Method for Piezoelectric Ceramic Resonators", Japan Electronics and Information Technology Industries Association, September 2010, p1 to p11 Yoshio Iwata et al., “Mechanical Vibration”, Mathematical Engineering Co., Ltd., May 2011, p112-p119

  Usually, a Langevin type ultrasonic transducer holds a flange provided near a node of vibration with a support member. Various shapes of tools are attached to the Langevin type ultrasonic transducer used in the ultrasonic processing apparatus. By attaching a tool to the Langevin type ultrasonic vibrator, the nodal position of the vibration of the Langevin type ultrasonic vibrator changes, and the support position of the flange does not match the nodal position of the vibration.

  In this case, since the flange is further away from the node of the vibration, if the flange is held firmly by the support member, the resistance to the vibration increases, and the vibration of the ultrasonic vibrator propagates to the support member and the like. For this reason, even if the same power is applied, as the node of the vibration of the Langevin type ultrasonic transducer moves away from the flange position, more vibration of the Langevin type ultrasonic transducer propagates to the support member, and the loss of vibration increases.

  SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and has as its object the object of the present invention is to provide a Langevin-type ultrasonic vibrator, which is provided with a tool or the like. It is an object of the present invention to provide a Langevin type ultrasonic vibrator having a small size and a small change in resonance frequency, and a method for supporting the same.

  According to the present invention, a Langevin type ultrasonic vibrator is supported by tightening a flange with a housing having a vibration nut and a male screw on an outer peripheral surface, and a difference between an inner radius Hin of the housing and a minimum radius Nin of the vibration nut contacts the flange. The value is 0.01 times or more and 1 time or less of the radius of the front mass Fr at the position.

  According to the present invention, a Langevin type ultrasonic vibrator is formed by integrally forming a flange and a vibration nut, and is supported by tightening the integrated vibration nut and a housing having a male screw on an outer peripheral surface.

The present invention also provides a Langevin type ultrasonic transducer which is supported by tightening a flange with a housing having a vibration nut and a male screw on an outer peripheral surface,
Total mass of the housing and the support member> Mass of the portion including the flange portion in the Langevin type ultrasonic transducer and vibrating in the same direction as the flange portion in the central axis direction ≧ Vibration nut mass or Total mass of the housing and the support member> Vibration nut mass ≥ Langevin type ultrasonic vibrator including flange part in Langevin type ultrasonic vibrator, and mass of part vibrating in the same direction in the central axis direction as flange part. .

  The present invention also provides a Langevin type ultrasonic transducer in which a flange is supported by tightening a flange with a housing having a vibration nut and a male screw on an outer peripheral surface, and a flange portion surrounded by the same two surfaces as the flange and the outer peripheral surface of the front mass. And a method of supporting the Langevin type ultrasonic vibrator in which the vibration direction at the center axis is opposite to the vibration direction at the outer peripheral edge of the vibration nut.

  According to the method of supporting a Langevin type ultrasonic transducer of the present invention, it is possible to excite a longitudinal vibration mode in which a change in resonance frequency is small and a change in vibration displacement is small. Further, it is possible to excite a vibration mode in the ultrasonic transducer without waiting for a node of vibration. Further, since the support rigidity can be increased by increasing the thickness of the flange, highly accurate ultrasonic processing can be performed.

It is a top view of the Langevin type ultrasonic transducer used for the present invention. FIG. 2 is a diagram illustrating a cross section taken along line AA in FIG. 1. It is sectional drawing which integrated the flange and the vibration nut. FIG. 2 is a cross-sectional view illustrating reciprocating vibration of the Langevin type ultrasonic transducer of FIG. 1. FIG. 5 is a cross-sectional view illustrating the vibration mode of FIG. 4 by another method. It is sectional drawing explaining the vibration mode which has a node of a vibration in the front mass of the Langevin type ultrasonic transducer. It is sectional drawing explaining the vibration mode which has two nodes of vibration in a Langevin type ultrasonic transducer, and has a node of vibration near the contact part of a flange, a vibration nut, and a housing. FIG. 4 is a cross-sectional view illustrating a vibration mode having three nodes of vibration in a configuration in which a Langevin type ultrasonic vibrator, a horn, and a tool are connected, and having nodes of vibration near contact portions of a flange, a vibration nut, and a housing. is there. It is a figure explaining the Langevin type ultrasonic transducer used for evaluation. FIG. 9 is a diagram in which the Langevin type ultrasonic transducer of FIG. 8 is supported by a housing. It is a figure which shows another Langevin type ultrasonic transducer.

(Langevin type ultrasonic transducer and its supporting method)
First, a Langevin type ultrasonic transducer for realizing the present invention and a method of supporting the same will be described. The structure of the Langevin type ultrasonic transducer 1 will be described with reference to the plan view of FIG. 1 and FIG. 2 showing a cross section taken along line AA of FIG. A flange 3 and a front mass 2 made of steel (s45c) were integrally formed by machining. Then, a female screw hole is provided in the center axis of the front mass 2, and the bar screw 8 is screwed into the female screw hole. A Langevin type ultrasonic vibrator having a flange 3 by inserting a piezoelectric element 4 made of a polarized ceramic and an electrode plate 6 into the rod screw and tightening a female screw provided on a rear mass 7 made of steel (s45c). 1. A portion surrounded by two extended surfaces of the flange 3 indicated by dotted lines of the front mass 2 and the outer peripheral surface of the front mass is referred to as a flange portion 18.

  Next, the flange 3 connected to the Langevin type ultrasonic vibrator 1 is supported and fixed by tightening with a male screw provided on the outer surface of the housing 9 and a vibration nut 5. Here, the vibration of the flange 3 is reliably transmitted to the vibration nut 5, and the vicinity of the contact portion between the flange 3 and the vibration nut 5 and the housing 9 is used as a node of the vibration. Therefore, the difference between the inner radius Hin of the housing 9 and the radius Nin of the lower small-diameter portion provided on the bottom surface of the vibration nut 5 is set to 0.01 times or more and 1 time or less of the front mass outer radius Fr. Since the electrode plate 6 and wiring (not shown) are provided inside the housing 9, the inner diameter of the housing 9 must be increased in order to secure the capacity. Therefore, the contact area between the housing 9 and the flange 3 is reduced. On the other hand, the vibration nut 9 may be larger than the diameter of the front mass 2, and the contact area between the vibration nut 9 and the flange 3 can be larger than the contact area between the housing 9 and the flange 3. By making the contact portion between the flange 3 and the vibration nut 9 larger, the vibration of the flange 3 can be well transmitted to the vibration nut 9.

  Further, a support member 15 is attached to the housing 9 in order to mount the Langevin type ultrasonic transducer 1 to the processing device, and the support member 15 is further attached to the processing device. Therefore, the Langevin type ultrasonic transducer 1 is usually supported by the housing 9 and the support member 15. The housing 9 and the support member 15 are made of a metal material, and contain iron at 50% or more of the total mass.

  Here, the vibration nut 5 will be described in detail. The vibrating nut 5 is also referred to as a "ring counterweight" because of its function. The vibration nut 5 has a lower small-diameter portion having an inner diameter smaller than the inner diameter of the screw portion formed below the screw portion, and the inner peripheral surface of the lower small-diameter portion and the cylindrical component (front mass 9) are formed. It means that a gap is formed between the side and the side.

  Further, the distance between the front mass 2 and the vibration nut 5 was reduced, and the front mass 2, the flange 3 and the vibration nut 5 shown in the sectional view of FIG. Then, a rod screw 8 was screwed into the rod screw 8, and the piezoelectric elements 4a, 4b and the electrode plates 6a, 6b were inserted into the rod screw 8, and were tightened and integrated with the female screw of the rear mass 7, thereby producing the Langevin type ultrasonic transducer 1. .

  The Langevin type ultrasonic vibrator 1 was supported and fixed to the housing 9 by screwing a housing 9 having a male screw on the outer peripheral surface into a vibration nut 5 integrated with the front mass 2 and the flange 3.

  In this configuration, the vibration of the flange 3 is transmitted to the vibration nut 5 as it is, but since the vibration nut 5 and the flange 3 are integrated, the vibration nut 5 cannot vibrate alone. Therefore, the action of the vibration nut 5 may be reduced due to the integrated influence. On the other hand, the integration can simplify the Langevin type ultrasonic transducer and the supporting method.

(Reciprocating vibration mode)
The reciprocating vibration mode of the Langevin type ultrasonic transducer 1 supported by the housing 9 in the central axis direction will be described with reference to FIGS. FIG. 3 shows a case where the Langevin type ultrasonic vibrator 1 vibrates downward in the central axis direction indicated by a straight line of an arrow as a node 11 of vibration indicated by a black circle near a contact portion between the flange 3, the vibration nut 5 and the housing 9. The vibrating nut 5 has a node 11 of the same vibration, and the outer periphery of the vibrating nut 5 vibrates in an upward direction shown by a solid thin line in the figure. Note that a solid thin line connecting two black circles indicating the cross section of the annular vibration node 11 indicates the vibration displacement of the flange portion 18, and the displacement direction of the flange portion is opposite to the vibration direction of the outer surface of the vibration nut.

  FIG. 4 is the same as FIG. 3, but shows the vibration displacement in another way. Vibration displacements of the flange 3, the flange portion 18 and the vibration nut 5 are indicated by dotted lines. The vibration direction of the center axis direction of the flange portion 18 and the vibration direction of the outer surface of the vibration nut 5 are opposite.

  As shown in FIGS. 3 and 4, the Langevin type ultrasonic vibrator 1 and the vibration nut 5 vibrate in opposite directions to the flange portion 18 with the flange 3 acting as a spring. The housing 9 connected to the spring, which is the flange 3, vibrates in the direction opposite to the flange 18 when the vibration nut 5 is not present. Thus, the vibration nut 5 vibrates as a shoulder for the housing 9. This is considered as the dynamic vibration absorber described in Non-Patent Document 1. Note that the housing 9 at the contact portion of the housing 9 with the vibration nut 5 vibrates. Therefore, the portion of the housing 9 where the vibration is reduced is a portion behind the contact portion of the housing 9 with the vibration nut 5.

  Here, since the vibration of the Langevin-type ultrasonic vibrator 1 is not transmitted to the housing 9, the total mass of the Langevin-type ultrasonic vibrator 1, the housing 9, and the supporting member is greatly different, and the Langevin-type ultrasonic vibrator and the vibration nut are different. It is desired that the masses of 5 are approximately equal. Then, it is determined that the total mass of the housing 9 and the support member is larger than the Langevin type ultrasonic transducer 1 as a condition for vibrating only the Langevin type ultrasonic transducer 1 and the vibration nut 5. Here, the large difference between the total mass of the Langevin type ultrasonic transducer 1, the housing 9 and the support member means that the total mass of the housing 9 and the support member is 1.5 times the mass of the Langevin type ultrasonic transducer 1. It is big. If the mass of the housing alone is larger than 1.5 times the mass of the Langevin type ultrasonic transducer 1, the support member need not be considered. The difference between the mass of the Langevin type ultrasonic transducer 1 and the vibration nut 5 is desirably 1.3 times or less.

  Further, since the vibration of the vibration nut 5 is not transmitted to the housing 9, the mass of the vibration nut 5 and the total mass of the housing 9 and the supporting member are largely different, and the mass of the Langevin type ultrasonic transducer 1 and the vibration nut 5 are equal. Is desired. The total mass of the housing 9 and the support member is required to be larger than the vibration nut 5 in terms of configuration.

  To function as a dynamic vibration absorber, the mass of the vibration nut 5 must be substantially the same as the mass of the Langevin type ultrasonic vibrator 1 and vibrate in the opposite directions to each other. When the mass of the vibration nut 5 differs from that of the vibration nut 5, vibration propagates to the housing 9. However, when the difference between the two masses is small, the propagation of vibration to the housing 9 is small. Therefore, the mass of the vibrating nut 5 is desirably 0.7 times or more and 1.3 times or less with respect to the mass of the Langevin type ultrasonic transducer 1.

(Vibration mode with one vibration node in the Langevin type ultrasonic transducer)
5, a vibration node 11 is provided in the Langevin type ultrasonic transducer 1 supported by the housing 9, and a vibration node indicated by a black circle near a contact portion between the flange 3, the vibration nut 5 and the housing 9. The vibration mode having 11 will be described. First, in order to generate a vibration node 11 indicated by a black circle near the contact portion between the flange 3, the vibration nut 5 and the housing 9, vibration in the center axis direction of the front mass 2 including the flange portion 18 at a portion to which the flange 3 is connected. The direction and the vibration direction of the outer periphery of the vibration nut 5 are opposite, and the mass of the front mass 2 including the flange 3 and the mass of the vibration nut 5 need to be substantially the same.

  When the Langevin type ultrasonic vibrator 1 extends in the direction indicated by the dotted line as a vibration node 11 in the front mass 2, the vibration mode is surrounded by the flange 3, the same surface as the flange 3, and the outer peripheral surface of the front mass 2. The flange portion 18 of the front mass 2 is bent like a curve shown by a dotted line. The outer peripheral edge of the vibration nut connected to the flange 3 is opposite to the bending direction of the curved line indicated by the dotted line of the flange 3 and the flange portion 18 of the front mass 2 surrounded by the same surface as the flange 3 and the outer peripheral surface of the front mass. Vibrates in the direction.

  Here, the total mass of the portion above the vibration node of the front mass, the flange portion, the piezoelectric element, and the rear mass portion is substantially equal to the mass of the vibration nut.

(Vibration mode with two nodes of vibration in Langevin type ultrasonic transducer)
FIG. 6 shows a vibration mode having a vibration node 11 near the contact portion of the flange 3, the vibration nut 5 and the housing 9, and having two vibration nodes 11 in the Langevin type ultrasonic vibrator 1. The Langevin type ultrasonic transducer 1 has a vibration node 11 in the front mass 2 and near the boundary between the piezoelectric element 4 and the rear mass 7. Between the two vibrations existing across the flange portion 18, the vibrations occur in the same direction, and the upward direction is indicated by an arrow in the figure. Then, the flange portion 18 existing between the two vibration nodes 11 naturally undergoes upward vibration. In addition, due to nodes of vibration near the contact portion of the flange 3, the vibration nut 5, and the housing 9, the outer peripheral portion of the vibration nut 5 is vibrated downward.

  The rear mass 7 at the upper end of the Langevin type ultrasonic transducer 1 and the front mass 2 at the lower end vibrate downward in the same direction. As can be seen from the figure, the upper rear mass 7 and the lower front mass 2 do not affect the vibrating nut 5.

  Here, the total mass of the front mass 2 above the lower vibration node, the flange portion 18 and the piezoelectric element 4 below the upper vibration node and the mass of the vibration nut 5 are substantially equal.

(Vibration mode with three nodes of vibration in Langevin type ultrasonic transducer)
FIG. 7 shows a configuration in which a horn 20 is connected to the tip of the Langevin-type ultrasonic transducer 1 to expand the vibration, and a tool 21 is connected to the horn 20. In this configuration, there are three vibration nodes 11.

  The flange 3 is supported and fixed to the housing 9 by tightening the flange 3 with a male screw provided on the outer periphery of the housing 9 and the vibration nut 5 to support the Langevin type ultrasonic transducer 1. Further, the housing 9 may be connected to a support member and attached to a processing device.

  Vibration nodes also occur near the contact portion between the flange 3, the vibration nut 5, and the housing 9. The vibration mode will be described using vibration nodes indicated by black circles and vibration directions indicated by arrows in the figure. The vibration direction is downward between nodes of the upper and lower vibrations of the flange portion 18. Due to this vibration, the central portion of the flange portion 18 vibrates downward as indicated by the curve. This vibration causes the outer peripheral portion of the vibration nut 5 to vibrate upward due to a node of vibration near the contact portion between the flange 3 and the vibration nut 5 and the housing 9.

  Therefore, it is desired that the mass of the vibration nut 5 is equal to the mass contributing to vibration between the nodes sandwiching the flange portion 18. Here, the mass contributing to vibration is approximately the mass of a portion of the Langevin type ultrasonic transducer 1 that includes a flange portion and vibrates in the same direction with respect to the center axis direction of the flange portion and the Langevin type vibrator. Furthermore, in order to obtain the mass of the vibrating nut with high accuracy, it is desirable to calculate using the finite element method.

(Mass of housing)
Here, since the vibration of the Langevin type ultrasonic vibrator 1 is not propagated to the housing 9, the mass of the portion of the Langevin type ultrasonic vibrator 1 and the mass of the housing 9 in the target vibration mode are greatly different, and the target is desired. It is desired that the mass of the portion that includes the flange portion 18 of the Langevin type ultrasonic transducer 1 in the vibration mode and vibrates in the same direction is substantially equal to the mass of the vibration nut 5. The condition for supporting the Langevin-type ultrasonic vibrator 1 is that the mass of the housing 9 includes the flange portion 18 of the Langevin-type ultrasonic vibrator 1 and is larger than the mass of a portion that vibrates in the same direction.

  If there is no vibration node in the Langevin type ultrasonic vibrator 1, the Langevin type ultrasonic vibrator 1 and the vibration nut are connected to each other in the vicinity of a contact portion between the flange 3, the vibration nut 5 and the housing 9. Since they vibrate in opposite directions, the mass of the Langevin type ultrasonic vibrator 1 and the vibration nut 5 must be substantially the same. Here, the mass of the housing 9 is required to be significantly different from the mass of the Langevin type ultrasonic transducer 1 and the mass of the vibration nut 5.

  When the mass of the portion that includes the flange portion 18 of the Langevin type ultrasonic transducer 1 and vibrates in the same direction and the mass of the vibration nut 5 are different, the vibration propagates to the housing 9. However, when the difference between the two masses is small, the propagation of vibration to the housing 9 is small.

  In summary, in the Langevin type ultrasonic vibrator 1 supported by tightening the flange 3 with the vibration nut 5 and the housing 9, the flange 3 acts as a spring, and the vibration of the Langevin type ultrasonic vibrator 1 and the housing 9. Acts as a dynamic vibration absorber for vibrating the Langevin type ultrasonic vibrator 1 and the vibration nut 5, including the mass of the vibration nut 5 and the flange portion 18 of the Langevin type ultrasonic vibrator 1, and vibrating in the same direction. The relationship between the masses of the parts to be formed is as follows.

Housing mass> mass of the portion of the Langevin type ultrasonic transducer 1 that includes a flange portion and vibrates in the same direction with respect to the center axis direction of the flange portion and the Langevin type transducer ≧ vibration nut mass or housing mass> vibration nut mass ≧ A mass of a portion of the Langevin type ultrasonic transducer 1 including a flange portion and vibrating in the same direction with respect to the center axis direction of the flange portion and the Langevin type transducer.

  The case where the housing 9 is not connected to the other support members 15 has been described above. If the difference between the acoustic impedances of the housing 9 and the other support members 15 is within 20%, and both are connected by a metal material, the total mass of the housing 9 and the support members 15 is defined as the housing mass.

(Restriction of vibration nut)
First, in order to confirm the effect of the vibration nut, the vibration nut was restrained, and the resonance frequency and admittance of the longitudinal primary vibration mode were measured by an impedance analyzer. Table 1 shows the results.

  From Table 1, the admittance is maximum when the rod length is 50 mm. This is considered to be because the flange is closest to the position of the node of vibration when the rod length of 50 mm is mounted. In addition, since the length generally used for a drill or an end mill, which is an actual application, is 40 mm to 70 mm, the rate of change in that range was determined. The resonance frequency was about 15%, and the admittance was about 49%.

(No constraint of vibration nut)
Next, the restraint of the vibration nut was released, and the resonance frequency and admittance of the longitudinal primary vibration mode were measured by an impedance analyzer. Table 2 shows the results. At a rod length of 60 mm, the admittance is 4.5 mS, which is a reference value because the resonance peak is broken and has a small value. However, if the resonance peak is not broken, the rod length is almost 50 mm. Guess that they are the same number. In addition, since the length generally used for a drill or an end mill, which is an actual application, is 40 mm to 70 mm, the rate of change in that range was determined. The resonance frequency was about 8%, and the admittance excluding the rod length of 60 mm was about 34%.

  In the evaluation by the impedance analyzer when the vibrating nut was constrained and when it was not constrained, it was found that both the resonance frequency and the admittance were superior when the vibrating nut was vibrated.

(Effect of vibration nut)
Then, power is actually applied to the Langevin type ultrasonic vibrator 1 and the Langevin type ultrasonic vibrator 1 shown in FIG. 8 (B) showing a plan view of FIG. 9A in which the flange 3 is fastened with a male screw provided on the outer periphery of the housing 9 and a vibration nut 5 and a housing 9 shown in FIG. 9B showing a cross section taken along line AA. The supported Langevin type ultrasonic transducer 1 was compared.

A rod made of carbide having a diameter of 4 mm was prepared, and a Langevin type ultrasonic vibrator was supported by tightening a flange with a male screw and a vibration nut around the housing shown in FIG. 9 and a housing shown in FIG. The cases were compared.
First, Table 3 shows frequencies at which a sine wave voltage of 40 Vp-p is applied to the piezoelectric element and the drive voltage phase and the current phase are in-phase with the Langevin type ultrasonic transducer.

Here, the nut vibration means that the flange of the Langevin type ultrasonic vibrator is vibrated in the longitudinal primary vibration mode and the vibrating nut is also vibrated in a state where the flange of the Langevin type ultrasonic vibrator is fastened by the male screw provided on the housing and the vibrating nut.
The longitudinal primary vibration is to vibrate at the resonance frequency of the longitudinal primary vibration mode of only the Langevin type ultrasonic transducer. The length of the rod is a length of a carbide-made rod having a diameter of 4 mm, which is attached by attaching a collet chuck to a Langevin type ultrasonic transducer.

  Since the length generally used in a drill or an end mill, which is an actual application, is 40 mm to 70 mm, the rate of change in that range was determined. For the nut vibration, the change was about 7.6% and for the Langevin type ultrasonic transducer was about 10%. As described above, the change in the resonance frequency is smaller in the nut vibration than in the longitudinal primary vibration.

  Next, Table 4 shows current values at which a sine wave voltage of 40 Vp-p is applied to the piezoelectric element and the phase of the drive voltage and the current phase are the same.

  Since the length generally used in a drill or an end mill, which is an actual application, is 40 mm to 70 mm, the rate of change in that range was determined. For the nut vibration, the change was about 17% and for the Langevin type ultrasonic transducer was about 36%. Thus, the change in the current value is smaller in the nut vibration than in the longitudinal primary vibration.

  Further, Table 5 shows the amount of vibration displacement of the tip of the rod when a sine wave voltage of 40 Vp-p is applied to the piezoelectric element and the drive voltage phase and the current phase are in phase.

  Since the length generally used in a drill or an end mill, which is an actual application, is 40 mm to 70 mm, the rate of change in that range was determined. For the nut vibration, the change was about 56% and for the Langevin type ultrasonic transducer was about 233%. Thus, the change in the amount of vibration displacement is smaller in the nut vibration than in the longitudinal primary vibration.

  This is a serious problem when actually used as an ultrasonic machine. In the Langevin type ultrasonic transducer, even if the same voltage of the resonance frequency is applied, the amount of vibration displacement of the drill or the end mill differs by about 2.3 times. That is, the amount of vibration displacement cannot be controlled only by adjusting the drive voltage.

  On the other hand, in the case of the nut vibration, the change in the vibration displacement amount is about 1/4 as compared with the Langevin type ultrasonic vibrator, so that it is greatly improved.

  The Langevin type ultrasonic transducer of the present invention and the method of supporting the same can also be realized as follows. As shown in the plan view of FIG. 10A and the cross section taken along the line AA in the plan view of FIG. 10A, the Langevin type ultrasonic transducer 1 is flanged to the tool shaft 19 as shown in FIG. 3 or by joining the flange 3 to the tool shaft 19, passing the piezoelectric element 5 through the tool shaft 19 behind the flange 3, and tightening the screw provided on the tool shaft 19 and the female screw of the rear mass 7. The Langevin type ultrasonic transducer 1 can be manufactured. Here, the portion of the tool shaft 19 before the flange 3 is also the front mass 2. The Langevin type ultrasonic vibrator 1 can be supported on the housing by tightening the flange with a male screw and a vibration nut provided on the outer periphery of the housing.

  The Langevin type ultrasonic vibrator and the supporting method of the present invention can be used particularly for an ultrasonic processing apparatus which uses a tool attached to a Langevin type ultrasonic vibrator.

DESCRIPTION OF SYMBOLS 1 Langevin type ultrasonic transducer 2 Front mass 3 Flange 4 Piezoelectric element 5 Vibration nut 6 Electrode plate 7 Rear mass 8 Bar screw 9 Housing 10 Toroidal elastic body 11 Vibration node 12 Polishing device 13 Grinding stone 14 Cutting device 15 Supporting member 16 Rotation Shaft 17 Tightening bolt 18 Flange 19 Tool shaft 20 Horn 21 Tool

Claims (4)

  A Langevin type ultrasonic vibrator is supported by tightening the flange with a housing having a vibration nut and a male screw on an outer peripheral surface, and a front mass at a position where a difference between an inner radius Hin of the housing and a minimum radius Nin of the vibration nut contacts the flange. A Langevin type ultrasonic vibrator and a method of supporting the same, wherein the radius is 0.01 times or more and 1 time or less of the radius of Fr.   A Langevin type ultrasonic vibrator characterized in that a Langevin type ultrasonic vibrator is made by integrally forming a flange and a vibrating nut, and is supported by tightening the integrated vibrating nut and a housing having a male screw on an outer peripheral surface. How to support it.   A Langevin type ultrasonic transducer is supported by tightening the flange with a housing having a vibration nut and a male screw on the outer peripheral surface, and the center axis of the flange portion surrounded by the same two surfaces as the flange and the outer peripheral surface of the front mass. A Langevin type ultrasonic vibrator characterized in that a vibration direction is opposite to a vibration direction of an outer peripheral edge of a vibration nut, and a method of supporting the same. The Langevin type ultrasonic transducer is supported by tightening the flange with a housing having a vibration nut and a male screw on the outer peripheral surface,
Total mass of the housing and the support member> Mass of the portion including the flange portion in the Langevin type ultrasonic transducer and vibrating in the same direction as the flange portion in the central axis direction ≧ Vibration nut mass or Total mass of the housing and the support member> Vibration nut mass ≧ mass of a part including a flange part in a Langevin type ultrasonic vibrator and vibrating in the same direction as the flange part in the central axis direction, and a Langevin type ultrasonic vibrator and a method of supporting the same .

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