WO2005044509A1

WO2005044509A1 - Vibration table

Info

Publication number: WO2005044509A1
Application number: PCT/JP2004/016554
Authority: WO
Inventors: Kazumasa Ohnishi
Original assignee: Kazumasa Ohnishi
Priority date: 2003-11-06
Filing date: 2004-11-08
Publication date: 2005-05-19
Also published as: JPWO2005044509A1

Abstract

A vibration table (10), comprising a rigid base (11), a rigid three-dimensional frame (12) fixed onto the base (11), and a bolted Langevin type ultrasonic vibrator (13) having a flat top face and fixedly supported on the rigid three-dimensional frame (12) at a position where the node of vibration generated is formed. A work can be machined with high accuracy by the vibration table.

Description

Specification

Vibrating table

Technical field

The present invention relates to a vibration table that can be advantageously used when machining a workpiece formed of a hard and brittle material such as glass or silicon.

Background art

[0002] It is not easy to perform high-precision mechanical processing such as cutting, drilling, cutting, grinding or polishing on a hard and brittle material such as glass, ceramic or silicon, or an object formed from a material. For this reason, conventionally, there has been proposed a method of machining such a workpiece by using a tool to which ultrasonic vibration is applied. For example, a method of cutting a workpiece while imparting ultrasonic vibration to a tool such as a knot is called ultrasonic cutting.

[0003] Ultrasonic cutting has an advantage that the life of the tool is prolonged because the cutting resistance is reduced by applying ultrasonic vibration to the tool. Also, in ultrasonic cutting, since ultrasonic vibration having a frequency higher than the natural frequency of the object to be processed is applied to the tool, harmful vibrations such as chattering are hardly generated on the object to be processed. For this reason, supersonic cutting is said to exhibit excellent machining accuracy.

[0004] Japanese Patent Application Laid-Open No. 2002-355726 discloses an ultrasonic vibration table device having a configuration in which an ultrasonic vibration device is set on a lower surface of a table to which an object to be processed is temporarily fixed during machining. Have been. In this vibration table device, an ultrasonic vibration is generated by an ultrasonic vibration device, and the ultrasonic vibration is applied to a workpiece temporarily fixed to an upper surface of the table. The workpiece to which the ultrasonic vibration is applied on the vibration table device is mechanically cut using a tool such as a drill, for example.

[0005] The vibration table device includes a cylindrical casing fixed on a back plate, an ultrasonic vibration device supported and fixed on the upper end of the casing, and a fixing device on the upper surface of the ultrasonic vibration device. The table is made up of power. The ultrasonic vibrator has a transmission horn fixed to the lower surface of the table and a transmission horn fixed to the lower surface of the transmission horn. Oscillator force is composed. A flange is formed at an intermediate position in the height direction of the transmission horn, and the ultrasonic vibration device is supported and fixed to the upper end of the casing by the flange of the transmission horn. The vibrating table device includes a guide member that protrudes downward from the outer lower part of the table and is inserted into a guide recess formed in the upper part of the casing.

[0006] In this vibration table device, since the table is held free only in the up and down directions by the guide member provided on the table, the loss of vibration energy is small. It is said that the target can be machined with high precision. The publication also states that a plurality of ultrasonic vibration table devices can be arranged side by side.

[0007] Japanese Patent Application Laid-Open No. 2003-220530 discloses a vibration table device having a structure in which a plurality of columnar bolted vibrators are fixed to a lower surface of a table of a disk ^ for temporarily fixing a workpiece. Have been. The disk-shaped table is supported and fixed to the upper end of a cylindrical case, and each bolted vibrator is fixed and suspended on the lower surface of the table. Ultrasonic vibration generated by the bolted vibrator is applied to the work piece temporarily fixed to the upper surface of the table, so that a work piece made of a hard and brittle material can be drilled with an extremely small diameter. It is said that the insert processing becomes easier and the time required for machining is reduced.

Patent Document 1: JP-A-2002-355726 (FIG. 1)

Patent Document 2: Japanese Patent Application Laid-Open No. 2003 _ 220530 (FIG. 1)

DISCLOSURE OF THE INVENTION

Problems to be solved by the invention

[0008] In the vibration table device described in JP-A-2002-355726, the ultrasonic vibration device is supported and fixed to the upper end of the casing by a flange portion of a transmission horn having a vibrator on the lower surface. I have. In general, a transducer generates an ultrasonic vibration having a wavelength twice its length, and the length of the transmission horn is set to half the length of the ultrasonic vibration generated by the transducer. . That is, the length of the transmission horn is set to a length approximately equal to the length of the vibrator. For this reason, a horn with a vibrator on the lower surface In order to support and fix to the upper end of the casing, it is necessary to set the height of the casing to 1.5 times or more the length of the vibrator. The height of the vibrating table device is at least 2.0 times the length of the vibrator.

[0009] The use of a height casing such as "h" makes it easy for the casing to sway in the lateral direction, and the table surface fixed to the upper end of the casing via the transmission horn also acts in the lateral direction. For this reason, when this vibration table device is used, the swinging of the table with respect to the casing in the horizontal direction is reduced by the guide member, but the swinging of the casing itself in the horizontal direction causes the table to swing in the horizontal direction. In addition, it is difficult to increase the precision of machining because it is easy to cause deflection, and a high-vibration table device requires a moving distance of a tool such as a ready-made machining device such as a ready-made drilling machine. However, it is difficult to incorporate into a machining device, or even if it can be incorporated, the workability at the time of machine calorie tends to deteriorate.

[0010] In addition, since this vibration table device has a configuration in which one ultrasonic vibration device is fixed to the center of the lower surface of the table, the central portion of the upper surface of the table is large and approaches the end. Small, easy to vibrate. For this reason, if a large-sized workpiece is temporarily fixed to the upper surface of the table and machined at an upper position near the end of the table, machining at the position above the center of the table The accuracy of machining is likely to be lower than that of That is, this vibration table device has another problem that it is difficult to machine a large workpiece with uniformity and high accuracy.

[0011] On the other hand, the publication discloses that a plurality of the vibration table devices described above may be arranged side by side. By simply arranging a plurality of the vibration table devices described in the same publication while arranging them, it is easy for each table to sway in the horizontal direction as in the above case. In some cases, the accuracy of the machining cannot be obtained, and it is also difficult to incorporate the vibration table device into a ready-made machining device.

[0012] Further, as in a vibration table device described in Japanese Patent Application Laid-Open No. 2003-220530, a plurality of bolted vibrators are fixed in a suspended state on the lower surface of a disk-shaped table, so that the table is suspended. The upper surface of the vibrator can be ultrasonically vibrated to some extent uniformly, and the height of the vibrating table device can be made as high as the length of the vibrator. But However, this vibration table device uses a mass of a bolted vibrator fixed in a suspended state on the lower surface of the table, a mass of a workpiece placed on the upper surface of the table, or a tool for machining. The table tends to bend due to the force applied to the table. In addition, the ultrasonic vibration force applied to the table by the bolted vibrator can impart large ultrasonic vibration to the workpiece that can easily escape to the outside through the cylindrical case that supports and fixes the disk-shaped table. difficult. For this reason, it is difficult to increase the accuracy of machining when using this vibration table device to a certain degree or more.

[0013] Further, since the disk-shaped table is supported and fixed on the upper end of the cylindrical case at the periphery thereof, the amplitude of the ultrasonic vibration is zero at the periphery of the table, and The amplitude increases as approaching the center. That is, the amplitude of the ultrasonic vibration of the table is not uniform within the upper surface of the table. For this reason, when using the vibration stapling apparatus described in the publication, when the workpiece is machined at a position above the center of the table, the workpiece can be machined with a high degree of accuracy. If machining is performed at an upper position near the periphery of, sufficient machining accuracy may not be obtained. '

An object of the present invention is to provide a vibration table which can be advantageously used for machining a workpiece with high accuracy, and which can be easily incorporated into a ready-made machining apparatus. It is in.

Another object of the present invention is to provide a vibration table which can be advantageously used to machine a large-sized workpiece uniformly and with high precision, and which can be easily incorporated into a ready-made machining apparatus. It is in. .

Means for solving the problem

[0015] The present invention provides a rigid base, a rigid three-dimensional frame fixed on the base, and the rigid three-dimensional frame described above at a position where the top surface is a flat surface and serves as a node of generated vibration. The port-fastened Langevin type ultrasonic vibrator supported and fixed to the frame;

Preferred embodiments of the vibration table of the present invention are as follows.

(1) A rigid three-dimensional frame consists of a spacer fixed to a base, a flat support plate connected to the upper part of the spacer, and a bolted Langevin type ultrasonic transducer is -A Langevin type ultrasonic vibrator in which the above-mentioned laminated body of the support plate and the piezoelectric vibrator plate is fastened together with metal members arranged on the upper and lower sides by means of a port. .

(2) The area of the top surface of the upper metal member is 1.1 to 8.0 times the area of the upper surface of the piezoelectric vibrator plate.

(3) The area force of the bottom surface of the upper metal member is not less than the area of the upper surface of the piezoelectric vibrator plate and is not more than the area of the top surface of the upper metal member. .

(4) The laminated body is composed of a support plate and an even number of piezoelectric vibrator plates arranged so as to overlap on the upper surface or the lower surface of the support plate. .

(5) The laminate comprises a support plate, and an even number of piezoelectric vibrator plates arranged on the upper surface and the lower surface of the support plate, respectively.

(6) A rigid plate is fixed to the top surface of the bolted Langevin type ultrasonic transducer.

[0017] The present invention also provides a rigid base, a plurality of rigid three-dimensional frames fixed in parallel on the base, and a position where the top is a plane and serves as a node of generated vibration. It consists of a plurality of identical bolted Langevin type ultrasonic vibrators which are supported and fixed one by one on each of the three-dimensional frame bodies, each of which has a top surface. There is also a vibration table whose position is adjusted so that it is located on the same plane.

A preferred embodiment of the vibration table of the present invention provided with the plurality of ported Langevin type ultrasonic transducers is as follows.

(1) Each rigid three-dimensional frame consists of a spacer fixed to the base and a planar support plate connected to the upper part of the spacer, and is supported by each rigid three-dimensional frame. A fixed bolted Langevin type ultrasonic vibrator fastens the laminated body of the support plate and the piezoelectric vibrator plate together with the metal members arranged on the upper side and the lower side by bolts. Type ultrasonic transducer.

(2) The area of the top surface of the upper metal member of each of the bolted Langevin type ultrasonic transducers is 1.1 to 8.0 times the area of the upper surface of the piezoelectric vibrator plate. .

(3) The area of the bottom surface of the upper metal member of each bolted Langevin type ultrasonic transducer is equal to or more than the area of the upper surface of the piezoelectric vibrator plate and equal to or less than the area of the top surface of the upper metal member. It is.

(4) Each of the ported Langevin type ultrasonic vibrators comprises a laminated force supporting plate, and an even number of piezoelectric vibrating plates which are arranged on the upper surface or the lower surface of the supporting plate.

(5) The laminated body force support plate of each ported Langevin type ultrasonic vibrator is composed of an even number of piezoelectric vibrator plates that are arranged on the upper surface and the lower surface of the support plate, respectively.

(6) A rigid plate is fixed to the top surface of each bolted Langevin type ultrasonic transducer.

(7) The rigid plates fixed to each of the bolted Langevin type ultrasonic transducers are connected to each other on their side surfaces to be integrated to form a connected rigid plate.

(8) Each of the bolted Langevin type ultrasonic transducers is provided with a driving device for applying an AC voltage having a frequency corresponding to the resonance frequency of each bolted Langevin type ultrasonic transducer.

[0019] The present invention also provides a processing object having a surface area larger than the area of the top surface of one port-fastened Langevin type ultrasonic vibrator on the vibration table of the present invention provided with the above-mentioned plurality of bolted Langevin type ultrasonic vibrators. An object is placed, and at least a bolted Langepan-type ultrasonic oscillator in contact with the object to generate ultrasonic vibrations, thereby machining the object while applying the ultrasonic vibration to the object. There is also a machining method to do.

[0020] In the present specification, "the position serving as a node of vibration" means that the amplitude of the ultrasonic vibration is zero regardless of the passage of time in a bolted Langevin type ultrasonic vibrator that performs ultrasonic vibration. A position within a distance from a position corresponding to one-eighth of the wavelength of the ultrasonic vibration. The position where the amplitude of the ultrasonic vibration is zero in the bolted Langevin type ultrasonic vibrator that performs ultrasonic vibration is determined, for example, by the vibration analysis software `` ANSYS '' (manufactured by ANSYS, Inc.) using the finite element method. ) Can be accurately specified by computer simulation.

The invention's effect

In the vibration table of the present invention, the bolted Langevin type ultrasonic vibrator is At a position that serves as a node of movement, it is stably supported by a low-rigid rigid three-dimensional frame fixed on a rigid base, so that its height can be reduced and The top surface of the Langevin type transducer to which the object is temporarily fixed is unlikely to oscillate in the lateral direction. Therefore, the object to be processed is temporarily fixed to the top B of the Langevin type ultrasonic vibrator of the vibration table of the present invention, and the ultrasonic vibration is generated by the ultrasonic vibration generated by the Langevin type vibrator. The workpiece can be machined with high precision while being applied to the workpiece. Further, since the height of the vibration table of the present invention can be reduced, it has an advantage that it can be easily incorporated into a ready-made machining apparatus.

BEST MODE FOR CARRYING OUT THE INVENTION

[0022] The vibration table of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a front view showing a configuration example of a vibration table of the present invention, FIG. 2 is a plan view of the vibration table of FIG. 1, and FIG. 3 is an exploded perspective view of the vibration table of FIG. It is.

[0023] The vibration table 10 shown in Figs. 1 to 3 has a rigid base 11, a rigid three-dimensional frame 12 fixed on the base 11, and a top surface 13a that is flat. The port-fastened Langevin type ultrasonic transducer 13 supported and fixed to the rigid three-dimensional frame 12 at a position serving as a node of the vibration to be generated.

[0024] The vibration table 10 generates ultrasonic vibrations with a port-fastened Langevin type ultrasonic vibrator (hereinafter also referred to as a Langevin 'type vibrator) 13, and the ultrasonic vibration is applied to the top surface of the Langevin type vibrator 13. It is provided to the workpiece temporarily fixed to 13a. The workpiece to which the ultrasonic vibration has been applied is machined using a tool such as a drill, a cutting tool or a grindstone.

[0025] Examples of the method of temporarily fixing the object to be processed to the surface 13a of the Langevin type vibrator 13 of the vibration table 10 include a method of temporarily fixing using a port, a method of temporarily fixing magnetically or electrostatically. A method to place the workpiece on the top surface of the Langevin type vibrator through water and freeze the water to temporarily fix the workpiece, and a method to place a vacuum pump on the top surface of the Langevin type vibrator There is a method in which a suction port to be connected is formed, and a processing object disposed on the suction port is vacuum-adsorbed and temporarily fixed. The work piece may be temporarily fixed to the table surface via the support plate of the work piece (eg, a metal plate, a resin plate, or a carbon plate). Les ,. The workpiece support plate prevents damage to the top surface of the Langevin-type vibrator by tools used for machining.

[0026] The rigid 1 "raw three-dimensional frame 12 is composed of a spacer 12a fixed to the base 11, and a planar support plate 12b connected to the upper portion of the spacer 12a. The bolted Langevin type ultrasonic vibrator 13 is composed of a laminate of the support plate 12b of the rigid three-dimensional frame 12 and the piezoelectric vibrator plates 14a and 14b arranged on the upper and lower sides thereof, respectively. This is a Langevin type ultrasonic vibrator constituted by fastening together with members 15a and 15b with bolts.

The ported Langevin type ultrasonic transducer 13 is fixed to the rigid three-dimensional frame 12 at a position that serves as a node of the generated vibration. The port-fastened Langevin type ultrasonic transducer 13. identifies the position where the amplitude of the generated ultrasonic vibration is zero by computer simulation as described above, and, from the position where the amplitude of the ultrasonic vibration is zero, It is supported and fixed to the rigid three-dimensional frame 12 at a position within a distance corresponding to one-eighth of the wavelength of the acoustic vibration. As the position for supporting and fixing the Portugal-type Langevin type ultrasonic transducer 13 moves away from the position where the amplitude of the ultrasonic vibration is zero, the generated ultrasonic vibration is transmitted through the rigid three-dimensional frame 12 and the rigid base μ. The amplitude of the ultrasonic vibration on the top surface 13a of the Langevin-type vibrator 13 tends to be small, because it easily escapes to the outside. For this reason, it is most preferable that the ported Langevin type ultrasonic transducer is supported and fixed to the rigid three-dimensional frame at a position where the amplitude of the ultrasonic vibration is zero.

[0028] Normally, the length of the bolted Langevin type ultrasonic transducer 13 is designed to be half the wavelength of the generated ultrasonic vibration. The position where the amplitude of the ultrasonic vibration becomes zero in the Port-fastened Langevin type ultrasonic vibrator designed in this way depends on the shape, material or mass of the piezoelectric vibrator plates 14a and 14b and the metal members 15a and 15b. The fluctuating force is approximately at the center of the Langevin-type vibrator 13 in the longitudinal direction. Therefore, the bolted Langevin type ultrasonic transducer 13 specifies the position where the amplitude of the ultrasonic vibration of the Langevin type transducer 13 is zero by the computer simulation as described above, and at this position, the rigid three-dimensional frame It is most preferable to be fixedly supported by the body, but in practice, it is only necessary to be fixedly supported by the rigid three-dimensional frame 12 at a position approximately at the center in the longitudinal direction. [0029] When the bolted Langevin type ultrasonic transducer 13 is supported and fixed to the rigid three-dimensional frame 12 at a position that becomes a node of the vibration in this manner, the height of the rigid three-dimensional frame 12 is increased by the Lange pan. The height can be set to about half the length of the mold vibrator 13, that is, about one third of the height of the casing of the vibration table device disclosed in JP-A-2002-355726. The ported Langevin type ultrasonic vibrator 13 is stably supported and fixed to the rigid three-dimensional frame having such a very low height, so that it is difficult to cause lateral deflection. Therefore, by using the vibration table 10, the workpiece can be mechanically calibrated with high accuracy. The height of the vibration table 10 is about half of the height of the vibration table device described in the publication. It is easy to incorporate into a machine tool made by ¾.

[0030] On the other hand, the vibration table device described in the above-mentioned Japanese Patent Application Laid-Open No. 2003-220530 can make the height approximately the same as the length of the port tightening vibrator, Since the bolted vibrator is fixed to the lower surface of the table with a slight edge as described above, a radius is easily generated in the table for temporarily fixing the workpiece. For this reason, when the vibration table device described in the publication is used, it is difficult to increase the machining accuracy to a certain degree or more. In contrast, when the vibration table of the present invention is used, the object to be processed is temporarily fixed to the top surface of the bolted Langevin type ultrasonic transducer stably supported and fixed to the rigid three-dimensional frame, The workpiece can be machined with high precision. '

[0031] Further, in the vibration table device described in Japanese Patent Application Laid-Open No. 2003-220530, the ultrasonic vibration applied to the table by the port tightening vibrator escapes outside through the case for supporting and fixing the table. It is difficult to apply large ultrasonic vibration to the work piece. On the other hand, the vibration table of the present invention has a supersonic wave vibration because the bolted Langevin type ultrasonic vibrator is fixed to the rigid three-dimensional frame at a position where the vibration is a node of the vibration. It is difficult to escape, and large ultrasonic vibration can be applied to the object to be processed. Therefore, by using the vibration table of the present invention, the workpiece can be mechanically calibrated with high accuracy.

Next, a method of manufacturing the vibration table 10 shown in FIG. 1 will be described with reference to FIGS. 1 and 3. The vibration table 10 is manufactured, for example, as follows. [0033] First, the support plate 12b of the rigid three-dimensional frame 12 and the piezoelectric vibrator plates 14a and 14b are overlapped to form a laminate. Next, the metal members 15a and 15b are arranged on the upper and lower sides of the laminate, respectively, and the laminate is tightened together with the metal members 15a and 15b with the bolts 16 to thereby provide a bolted Langevin type ultrasonic vibration. A child 13 is formed and supported and fixed to a support plate 12b of the rigid three-dimensional frame 12. The bottom of the spacer 12a of the rigid three-dimensional frame 12 to which the bolted Langevin type ultrasonic transducer 13 is supported and fixed is fixed on the rigid base 11 with bolts, etc. 10 are made.

[0034] The rigid base 11 is formed of, for example, a metal material such as iron or titanium, or an alloy material such as stainless steel. What is the rigid base 11? It is also preferable to use a vibration damping material such as a 6-〇0-31 alloy (eg, Novinite (trade name), manufactured by Nihon Hosho Co., Ltd.). Further, the vibration table of the present invention can be used, for example, by arranging it on a metal table for temporarily fixing a processing object provided in a ready-made drilling machine. In such a case, by forming the rigid base 11 with magnetic stainless steel, the vibration table can be stably arranged on the metal table provided in the drilling machine.

The rigid three-dimensional frame 12 is composed of a spacer 12a fixed to a base and a flat support plate 12b connected to an upper part of the spacer 12a. Metallic material force formed. A through hole having a diameter larger than the diameter of the bolt 16 is formed in the support plate 12b.

[0036] Each of the piezoelectric vibrator plates 14a and 14b is formed with a through hole having a diameter larger than the diameter of the bolt 16. The piezoelectric vibrator plates 14a and 14b are each formed of, for example, an annular piezoelectric body made of a lead zirconate titanate-based piezoelectric ceramic material and an annular electrode plate attached to the surface of each. Be composed. As the electrode plate, for example, a thin (or thin-film) electrode formed by force such as silver or bronze is used. Since the metal member 15a, the metal member 15b, and the support plate have conductivity and can be used as electrodes of the piezoelectric vibrator plate, the surface of the piezoelectric vibrator plate that comes into contact with any of them can be used. The electrode plate does not need to have an electrode plate.

[0037] The piezoelectric body provided in each of the piezoelectric vibrator plates 14a and 14b is polarized, for example, in the directions indicated by arrows 18a and 18b shown in Fig. 3, respectively. And the piezoelectric vibrator plate 14a, 1 By applying an AC voltage to each of the piezoelectric vibrators 4b, the piezoelectric vibrator plate 14a generates an ultrasonic vibration that vibrates in a direction perpendicular to the top surface 13a of the Langevin type vibrator 13, and the piezoelectric vibrator plate 14b An ultrasonic vibration is generated that vibrates in the direction indicated by the arrow 17 written in. By setting the phase difference of the AC voltage applied to these piezoelectric vibrator plates 14a and 14b to 90 degrees, the top surface 13a of the Langevin type vibrator 13 vibrates in a direction perpendicular to the top surface 13a. An elliptical vibration composed of a component and a vibration component vibrating in the direction indicated by arrow 17 shown in FIG. By applying such an elliptical vibration to the object to be processed, for example, the force S can be efficiently subjected to surface grinding with high accuracy along the direction indicated by the arrow 17. .

[0038] The piezoelectric bodies included in the piezoelectric vibrator plates 14a and 14b may be polarized in the thickness direction. In this case, it is preferable to arrange the piezoelectric vibrator plates 14a and 14b so that the polarization directions of the piezoelectric bodies are opposite to each other. If the piezoelectric bodies provided in the piezoelectric vibrator plates 14a and 14b are polarized in the thickness direction, the top surface of the port-fastened Langevin type ultrasonic vibrator can be greatly ultrasonically vibrated in the vertical direction. By applying such a large ultrasonic vibration to the processing target portion, for example, a processing target can be efficiently drilled with high accuracy using a drill.

[0039] The metal members 15a and 15b are formed of a metal material such as stainless steel, for example. The upper metal member 15a is, for example, a single metal part manufactured by machining a part of a stainless steel bar into a cylindrical shape using a lathe.

The metal member 1 has a hole formed with a female screw to be fitted with the bolt 16. The metal member 15b has a through hole in which a female screw to be fitted with the bolt 16 is formed. The metal member 15a and the metal member 15b are electrically connected to each other via the port 16.

An AC power supply 19 is electrically connected to the ported Langevin type ultrasonic transducer 13, for example, as shown in FIG. It is preferable that the upper metal member 15a of the bolted Langevin type ultrasonic transducer is grounded to prevent electric shock. The upper metal member 15a is grounded via the bolt 16 and the lower metal member 15b. As shown in FIG. 1, the lower electrode plate of the piezoelectric vibrator plate 14a and the upper electrode plate of the piezoelectric vibrator plate 14b When an AC voltage is applied to the plates by using an AC power supply 19, the piezoelectric vibrator plates 14a and 14b are each ultrasonically vibrated by the force S, and the bolted Langevin type ultrasonic vibrator 13 generates ultrasonic vibrations.

[0041] The laminate for forming the Portugal-type Langevin type ultrasonic vibrator includes a support plate 12b of the rigid three-dimensional frame 12, and an even number of piezoelectric layers arranged on the lower surface of the support plate 12b. It is preferable that the vibrator plate force be configured. This is because if the number of piezoelectric vibrator plates is odd, the metal members 15a, 15b and the support plate 12b are grounded to prevent electric shock, and for example, the piezoelectric vibrator disposed at the bottom In order to apply an AC voltage to each of the piezoelectric vibrator plates other than the vibrator plate ', it is necessary to ground both the upper surface and the lower surface of the piezoelectric vibrator plate disposed at the lowest side. This is because AC voltage cannot be applied to the piezoelectric vibrator plate. It is practical that the number of piezoelectric vibrator plates is two, four or six. The greater the number of piezoelectric vibrator plates, the greater the ultrasonic vibration of the Langevin type vibrator, but the greater the power consumption and the more complicated the electrical connection between the piezoelectric vibrator plate and the AC power supply. It is.

[0042] In the vibration table of the present invention, the area of the top surface of the metal member on the upper side of the bolted Langevin type ultrasonic vibrator is the piezoelectric vibrator plate (or the uppermost surface when a plurality of piezoelectric vibrator plates are provided). It is preferably 1.1 times or more and 8.0 times or less of the area of the upper surface of the piezoelectric vibrator plate disposed on the surface. The area of the top surface of the metal member 15a on the upper side of the bolted Langepan type ultrasonic transducer 13 included in the vibration table 10 of FIG. 1 is set to be about 4.5 times the area of the upper surface of the piezoelectric vibrator plate 14a. Te, ru. '

[0043] By making the area of the top surface of the upper metal member 15a of the bolted Langevin type ultrasonic transducer 13 larger than the area of the upper surface of the piezoelectric vibrator plate, the top surface of the upper metal member 15a can be made superfluous. Forces that tend to reduce the amplitude of sound wave vibration When the load on the vibration table fluctuates, for example, when a workpiece with a large mass is placed on the top surface of a Langevin type vibrator, or depending on the tool used for machining Experiments have shown that even when a large force is applied to the top surface of the Langevin-type transducer, the workpiece can be machined with stable accuracy. The cause is understood as follows.

Generally, in order to obtain an ultrasonic vibration having a large amplitude, a metal horn is attached to the ultrasonic vibrator. It is known to connect. As the horn, for example, a metal member in the shape of a truncated cone having a top surface area smaller than that of a bottom surface is used. When such a horn is fixed to the ultrasonic vibrator at the bottom surface, it is known that the amplitude of the ultrasonic vibration generated by the ultrasonic vibrator reaches the top surface of the horn. . Since the energy of the ultrasonic vibration generated by the ultrasonic vibrator is constant, the amplitude of the ultrasonic vibration reaching the top surface of the horn increases, but the ultrasonic vibration causes It is also known that the force applied to the load connected to the top surface is reduced.

In the vibration tape holder of the present invention, when the area of the top surface of the upper metal member 15a of the bolted Langevin type ultrasonic transducer 13 is set to be larger than the area of the bottom surface as described above, Conversely, although the amplitude of the ultrasonic vibration on the top surface of the upper metal member is reduced, it is understood that the ultrasonic vibration increases the force applied to the workpiece and the workpiece can be stably ultrasonically vibrated. You. Therefore, by using a vibration table equipped with a Langevin type vibrator in which the area of the top surface of the upper metal member is set to be larger than the area of the bottom surface, the workpiece can be stabilized even when the load on the vibration table fluctuates. It is understood that the machine can be machined with the same accuracy.

The area of the bottom surface of the upper metal member 15a of the bolted Langevin type ultrasonic transducer 13 is equal to or larger than the area of the upper surface of the piezoelectric vibrator plate 14a and equal to or smaller than the area of the top surface of the upper metal member 15a. Is more preferable. If the area of the bottom surface of the upper metal member 15a is smaller than the area of the upper surface of the piezoelectric vibrator plate 14a, the ultrasonic vibration generated on the surface portion may not be brought into contact with the metal member 15a of the piezoelectric vibrator plate 14a. This is because the amplitude of the ultrasonic vibration on the top surface 13a of the Langevin-type vibrator 13 is reduced because it is not transmitted to the upper metal member 14a. On the other hand, if the area of the bottom surface of the upper metal member 15a is larger than the area of the top surface, the amplitude of the ultrasonic vibration of the top surface 13a of the Langevin-type vibrator 13 increases as in the case of the horn. This is because the accuracy of the mechanical force becomes unstable with respect to the load variation when the ultrasonic vibration exerts a small force on the workpiece.

Further, a rigid plate formed by force, such as a metal material, may be fixed to the top surface of the bolted Langevin type ultrasonic vibrator of the vibration table of the present invention. The rigid plate shall be fixed to the top surface of the upper metal member of the Langevin type vibrator using, for example, porto. Can do. Even when the rigid plate is fixed, the rigid plate is stably supported on the lower surface by the port-fastened Langevin type ultrasonic vibrator; Is unlikely to occur. By temporarily fixing the object to be processed on the upper surface of the rigid plate and applying ultrasonic vibration to the caroly object, the object to be processed can be machined with high accuracy. By fixing the rigid plate, the top surface of the ported Langevin type ultrasonic vibrator can be protected from damage by tools used for machining.

FIG. 4 is a front view showing another configuration example of the vibration table of the present invention. The configuration of the vibration table 40 in FIG. 4 is such that the laminate for forming the bolted Langevin type ultrasonic vibrator 43 is composed of a support plate 12b of the rigid three-dimensional frame 12, and an upper surface of the support plate 12b. The vibration table is the same as the vibration table of FIG. 1 except that the force of the piezoelectric vibrator plates 14a and 14b arranged one by one on each of the lower surfaces is also formed. In the vibration table 40, an AC voltage is applied to the support plate 12b so that ultrasonic vibration is generated by the port-fastened Langevin type ultrasonic vibrator 43. For this reason, it is preferable that the rigid three-dimensional frame 12 including the support plate 12b and the base 11 be electrically insulated from each other.

FIG. 5 is a front view showing still another example of the configuration of the vibration table of the present invention. The configuration of the vibration table 50 in Fig. 5 is such that the laminate for forming the bolted Langevin type ultrasonic transducer 53 is mounted on the support plate 12b of the rigid three-dimensional frame 12 and the upper surface of the support plate 12b. It is composed of two piezoelectric vibrator plates 14a and 14b arranged one on top of the other! Except for /, it is the same as the vibration table in Fig. 1. The number of piezoelectric vibrator plates is preferably an even number for the same reason as in the case of the vibration table 10 in FIG.

FIG. 6 is a front view showing still another configuration example of the vibration table of the present invention. The configuration of the vibration table 60 in FIG. 6 is such that the laminate for forming the bolted Langevin type ultrasonic vibrator 63 includes a support plate '12b of the rigid three-dimensional frame 12, and an upper surface of the support plate 12b. Vibration table 10 in Fig. 1 except that two piezoelectric vibrator plates (a total of four piezoelectric vibrator plates 14a, 14b, 14c, 14d) are also superposed on each of the lower surfaces. Same as. In order to form a bolted Langevin type ultrasonic transducer in this way, the laminated body is composed of a support plate, and piezoelectric vibrator plates which are disposed on the upper surface and the lower surface of the support plate, respectively. The upper and lower surfaces of the support plate It is preferable to arrange several piezoelectric vibrator plates in an overlapping manner. Thereby, the metal members 65a and 65b and the rigid three-dimensional frame 12 of the vibration table 63 can be grounded.

As described above, the Langevin-type vibrator in which the area of the top surface of the upper metal member is set to be 1.1 to 8.0 times the area of the upper surface of the piezoelectric vibrator plate is used. By using the vibration table provided, the workpiece can be machined with stable accuracy even when the load fluctuates. When the area of the top surface of the upper metal member is increased in this way, it is preferable that the shape of the upper metal member be symmetrical with respect to the axis of the ported Langevin type ultrasonic transducer.

FIG. 7 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. The configuration of the vibration table 70 in FIG. 7 is such that a truncated pyramid-shaped metal member having a top surface area larger than a bottom surface area is used as the upper metal member 75a of the ported Langevin type ultrasonic transducer 73. Figure 1 except that a rigid three-dimensional frame 72 consisting of a cylindrical spacer 72a and a planar support plate 72b connected to the top of the spacer 72a is used. The same as the vibration table 10 of FIG.

FIG. 8 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. The configuration of the vibration table 80 in FIG. 8 is a cylindrical metal member having a top surface area larger than the upper surface area of the piezoelectric vibrator plate 14a as the upper metal member 85a of the ported Langevin type ultrasonic vibrator 83. And that the diameter of the cylindrical spacer 82a of the rigid three-dimensional frame 82 is made equal to the diameter of the upper metal member 85a. Is the same as

FIG. 9 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. The configuration of the vibration table 90 shown in FIG. 9 is that the upper metal part 95a of the ported Langevin type ultrasonic vibrator 93 is an upper part of a frustoconical metal member whose top surface and product are larger than the area of the bottom surface. 7 is the same as the vibration table 70 in FIG. 7 except that a metal member prepared by cutting vertically is used so that the top surface becomes a square.

FIG. 10 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. The configuration of the vibration table 100 in FIG. 10 is such that a rectangular parallelepiped metal member having a square top surface is used as the upper metal member 105a of the ported Langevin type ultrasonic transducer 103. It is the same as the vibration table 70 of FIG. 7 except that it is used.

FIG. 11 is a perspective view showing still another configuration example of the vibration table of the present invention. The configuration of the vibration table 110 shown in FIG. 11 is such that a truncated cone-shaped metal member having a top area larger than a bottom area is used as the upper metal member 115a of the bolted Langevin type ultrasonic transducer 113. And that the Langevin type vibrator 113 is supported and fixed to an annular support plate 112b of a rigid three-dimensional frame 112 formed integrally with the upper metal member 115a, and the support plate 112b is The vibration table is the same as the vibration table 70 in FIG. 7 except that it is fixed to the rigid base 11 by four columnar spacers 112a. In this way, the bolted Langevin type ultrasonic transducer may be supported and fixed to the rigid three-dimensional frame by the upper metal member (the lower metal member).

FIG. 1.2 is a front view showing still another configuration of the vibration table of the present invention, and FIG. 13 is a plan view of the vibration table of FIG. The vibrating tape holder 120 shown in FIGS. 12 and 13 has a rigid base 121, a total of four rigid three-dimensional frames 122 fixed on the base 121, and a top surface 123 a having a flat surface. It is composed of a total of four cylindrical Porte-clamped Langevin type ultrasonic transducers 123 which are respectively supported and fixed to the rigid three-dimensional frame 122 at positions which are nodes of generated vibrations. The positions of the four bolted Langevin type ultrasonic transducers 123 are adjusted such that their top surfaces 123a are on the same plane. '

[0058] The rigid three-dimensional frame 122 includes a spacer 122a fixed to a base and a planar support plate 122b connected to an upper portion of the spacer 122a. In order to reduce the lateral shaking of the rigid three-dimensional frame 122, a reinforcing column 127 is provided at the center of the lower surface of the support plate 122b. The configuration of each of the bolted Langevin type ultrasonic transducers 123 is different from that of the first embodiment in that a cylindrical metal member having the same diameter as the piezoelectric vibrator plate 14a is used as the upper metal member 125a. It is the same as the bolted Langevin type ultrasonic transducer 13 of the vibration table 10 of FIG.

[0059] On the vibration table in which the plurality of bolted Langevin-type ultrasonic vibrators are supported and fixed on the rigid three-dimensional frame as described above, the workpiece to be processed is larger than the area of the top surface of one Langevin-type vibrator. Is placed at least on the Langevin type vibrator in contact with the workpiece. When more ultrasonic vibrations are generated and the workpiece is machined while applying the ultrasonic vibrations to the workpiece, the workpiece is subjected to a plurality of Langevin-type vibrations that apply ultrasonic vibration to each workpiece. Since the workpiece is stably supported by the child, a large-sized workpiece can be machined uniformly and with high accuracy.

FIG. 14 is a front view showing still another example of the configuration of the vibration table of the present invention, and FIG. 15 is a plan view of the vibration table of FIG. 14 and 15 includes a rigid base 141, a plurality of (eg, nine) rigid three-dimensional frames 12 fixed in parallel on the base 141, and a top surface 13a having a flat surface. A plurality of (eg, nine) bolt-fastened Langevin-type ultrasonic vibrators 13 supported and fixed to the rigid three-dimensional frame 12 one by one at a position serving as a node of the generated vibration 13 The positions of the plurality of bolted Langevin type ultrasonic transducers 13 are adjusted so that their top surfaces 13a are located on the same plane. Each bolted Langevin type ultrasonic. The configuration of the vibrator 13 is the same as that used for the vibration table 10 in FIG.

The plurality of bolted Langevin type ultrasonic transducers 13 are fixed, for example, after a plurality of rigid three-dimensional frames each having a bolted Langevin type ultrasonic transducer are fixed on a rigid base 141. By simply polishing or grinding the top surfaces of multiple Langevin type vibrators in parallel with the bottom surface of the rigid base, it is possible to adjust the position so that each top surface is located on the same plane. it can.

[0062] The vibration table 140 is less likely to cause lateral deflection because each Langevin type vibrator 13 is stably supported and fixed to the rigid base. For this reason, an object to be processed that is larger than the area of the top surface 13a of the Langevin-type vibrator 13 is placed on the vibration table 140, and at least an ultrasonic vibration is generated by the Langevin-type vibrator in contact with the object to be processed. By machining the workpiece while applying the ultrasonic vibration to the workpiece, a large-sized workpiece can be uniformly and highly accurately machined. In addition, as in the case of the vibration table of FIG. 1, the vibration table 140 has a low height, so that it can be easily incorporated into a ready-made machining apparatus.

FIG. 16 is a front view showing another example of the configuration of the vibration table of the present invention, and FIG. 17 is a plan view of the vibration table of FIG. Vibration tape shown in Fig. 16 and Fig. 17 The configuration of the nozzle 160 is such that the plurality of Langevin-type vibrators 13 are joined to each other by the resin material 167 on the upper side surface of each upper metal member 15a, and the plurality of Langevin-type vibrators 13 are It is the same as the vibration table 140 shown in FIG. 14 except that a frame 168 surrounding the frame 167 is provided.

[0064] The resin material 167 that joins the plurality of Langevin-type vibrators 13 to each other is used when a grinding fluid such as water or oil is used in machining, for example, when the grinding fluid is used between the Langevin-type vibrators. Gap force Prevents falling to base 151.

[0065] As the resin material 167, for example, an epoxy resin is used. Since the acoustic impedance of the resin material 167 and that of the upper metal member 15a made of, for example, stainless steel, are significantly different from each other, the ultrasonic vibration generated in each Langevin type vibrator 13 is transmitted to other vibrators. Each of the plurality of Langevin-type transducers 13 that is difficult to transmit vibrates almost independently with ultrasonic waves. In other words, the same large-sized workpiece placed on multiple Langevin-type transducers

■ Ultrasonic vibration of a magnitude is applied. Therefore, by using the vibration table 160, a large-sized workpiece can be machined uniformly and with high accuracy.

FIG. 18 is a front view showing still another example of the configuration of the vibration table of the present invention, and FIG. 19 is a plan view of the vibration table of FIG.

The configuration of the vibration table 180 shown in FIGS. 18 and 19 is such that the top surface of the metal member 185a on the upper side of each of the bolted Langevin type ultrasonic transducers 183 has a hexagonal shape. The rigid base 181 is shaped like a disk, and the frame 188 is a disk-shaped metal plate having a through hole surrounding the upper metal member 185a of each Langevin type vibrator above the metal member 185a. The vibration table is the same as the vibration table 160 in FIG. 16 except that it is used.

As described above, by making the shape of the top surface of the metal member on the upper side of the Langevin type vibrator of each of the hexagons hexagonal, the top surface of the Langevin type vibrator can be compared with a case where the shape of the upper surface is quadrangular. Can be more uniformly ultrasonically vibrated.

FIG. 20 is a perspective view showing still another configuration example of the vibration table of the present invention. The vibration table 200 shown in FIG. 20 has a rigid base 201, a rigid three-dimensional frame 92 fixed in parallel on the base 201, and a position where the plane of the plane is a plane and serves as a node of generated vibration. Tertiary rigid Each of the original frame bodies 92 is supported and fixed to one of the four roto-clamped Langevin type ultrasonic vibrators 93, which are identical to each other. The position is adjusted so that the top surface is on the same plane. The configuration of each of the bolted Langevin type ultrasonic transducers 93 and the frame body 92 is the same as that used for the vibration table 90 in FIG. , '

[0070] A rigid plate (not shown) may be fixed to the top surface of each of the bolted Langevin type ultrasonic vibrators 93 of the vibration table 200 in Fig. 20. The rigid plates may be connected to each other on their side surfaces and integrated to form a connected rigid plate. As shown in FIG. 20, the connection rigid plate 207 can be fixed on a plurality of bolted Langevin type ultrasonic transducers 93 using, for example, bolts.

FIG. 21 is an electric circuit block diagram showing a configuration example of a driving device of the ported Langevin type ultrasonic transducer 1 provided in the vibration table of the present invention. .

The drive device 211 in FIG. 21 uses a bolted Langevin type ultrasonic wave provided in the vibration table. The vibrator 13 is supplied with an AC voltage having a frequency corresponding to the resonance frequency thereof, usually a frequency in the range of 15 to 100 kHz (eg, , Sinusoidal voltage).

The PLL (Phase-locked loop) circuit 212 of the drive device 211 in FIG. 21 generates a rectangular wave voltage having a frequency corresponding to the resonance frequency of the Langevin-type vibrator 13. The rectangular wave voltage is power-amplified by the driver circuit 213, then the electric power factor is improved by the matching circuit 214, and applied to the Langevin type vibrator 13 as a sine wave voltage. When the Langevin type vibrator includes two piezoelectric vibrator plates, this sinusoidal voltage is applied to each piezoelectric vibrator plate.

The voltage Z current detection circuit 215 provided between the matching circuit 214 and the Langevin-type vibrator 13 detects an AC voltage and an AC current applied to the Langevin-type vibrator 13 and their phases.

The power control unit 217 calculates the power value applied to the Langevin-type vibrator 13 based on the AC voltage, the AC current detected by the voltage / current detection circuit 215, and these phases. . The power control unit 217 controls the power amplification factor of the driver circuit 213 based on the calculated power value so that a predetermined amount of power is applied to the Langevin type vibrator. To do.

On the other hand, the phase circuit '216 inputs the signal output from the voltage / current detection circuit 215, which is obtained by converting the current flowing through the Langevin-type vibrator 13 into a current and a voltage, and controls the control frequency force ^s Langevang of the frequency control block 218. After phase-shifting the signal so that the resonance frequency of the vibrator 13 becomes the resonance frequency, a voltage signal converted into a pulsed voltage is output to the PLL circuit 212.

[0077] The PLL circuit 212 controls the frequency of the rectangular wave voltage output from the PLL circuit so that the phase of the pulsed voltage output from the phase circuit 216 matches the phase of the rectangular wave voltage output from the PLL circuit. I do. By such control, even when the resonance frequency of the Langevin-type vibrator 13 fluctuates slightly due to, for example, a change in the environmental temperature, an AC voltage having a frequency corresponding to the resonance frequency is always applied to the Langevin-type vibrator 13. Since the voltage can be applied, the Langevin-type vibrator 13 can generate ultrasonic vibration having a large amplitude.

When the vibration table is provided with a plurality of Langevin type vibrators, it is preferable to connect one drive device of FIG. 14 to each of the Langevin type vibrators. Thus, even when the resonance frequency of each Langevin type vibrator fluctuates, an AC voltage having a frequency corresponding to the resonance frequency can always be applied to each Langevin type vibrator. For this reason, it is possible to generate ultrasonic vibration having a large amplitude in each Langevin type transducer.

When the vibration table includes a plurality of Langevin type vibrators, it is preferable to apply an AC voltage having the same phase to each of the plurality of Langevin type vibrators. '' In this case, it is even more preferable to adjust the magnitude of the AC voltage applied to each Langevin type vibrator so that the top surface of each Langevin type vibrator is ultrasonically vibrated with the same amplitude. . Alternatively, a plurality of Langevin-type transducers may be electrically connected in parallel, and an AC voltage may be applied to the parallel-connected Langevin-type transducers using a single driving device.

As shown in FIG. 21, it is preferable that the driving device 211 includes a central processing unit (CPU) 222, a storage unit 223, and a display unit 224.

[0081] The central processing unit 222 detects the AC voltage and the AC voltage detected by the voltage / current detection circuit 215. The electric power applied to the Langevin type vibrator 13 is calculated based on the current and these phases. The central processing unit 222 controls the power amplification factor of the driver circuit 213 based on the calculated power value so that a predetermined amount of power is applied to the Langevin-type vibrator 13, and also calculates the calculated power The value data is output to the storage unit 223. The power value data stored in the storage unit 223 is displayed on a display or output to a printer or the like, for example. .

Further, the central processing unit 222 causes the display means (for example, a display device) 224 to display the amplitude and frequency of the rectangular wave voltage output from the PLL circuit 212, and the rectangular wave output from the PLL circuit 212. When an abnormal condition occurs in the Langevin-type vibrator 13 based on information such as AC voltage and AC voltage applied to the Langevin-type vibrator 13 output from the voltage or voltage / current detection circuit 215 ( For example, when the wiring to the vibrator is broken, or when the applied voltage is not controlled according to the fluctuation of the resonance frequency of the vibrator), a warning is displayed on the display unit 224. When such a driving device 211 is used, the state of control of the Langevin-type vibrator 13 can be confirmed, so that when machining is performed using a vibration table, occurrence of a machining defect can be found at an early stage.

Brief description of the drawings ''

FIG. 1 is a front view showing a configuration example of a vibration table of the present invention. ,

FIG. 2 is a plan view of the vibration table of FIG. 1.

FIG. 3 is an exploded perspective view of the vibration table of FIG. 1. "

FIG. 4 is a front view showing another configuration example of the vibration table of the present invention.

FIG. 5 is a front view showing still another configuration example of the vibration table of the present invention.

FIG. 6 is a front view showing still another configuration example of the vibration table of the present invention.

FIG. 7 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention.

FIG. 8 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention.

FIG. 9 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention.

FIG. 10 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention.

FIG. 11 is a perspective view showing still another configuration example of the vibration table of the present invention. FIG. 12 is a front view showing still another configuration example of the vibration table of the present invention.

FIG. 13 is a plan view of the vibration table of FIG. 12.

FIG. 14 is a front view showing still another configuration example of the vibration table of the present invention.

FIG. 15 is a plan view of the vibration table of FIG.

FIG. 16 is a front view showing still another configuration example of the vibration table of the present invention.

FIG. 17 is a plan view of the vibration table shown in FIG. 16.

FIG. 18 is a front view showing still another configuration example of the vibration table of the present invention.

FIG. 19 is a plan view of the vibration table of FIG. 18.

FIG. 20 is a perspective view showing still another configuration example of the vibration table of the present invention.

FIG. 21 is an electric circuit block diagram showing a configuration example of a driving device for a port-fastened Langevin-type ultrasonic transducer included in the vibration table of the present invention.

Explanation of symbols

10, 40, 50, 60 vibration table

11 Rigid base

12 Rigid three-dimensional frame

12a Spacer

12b Support plate

13, 43, 53, 63 bolted Langevin type ultrasonic transducer

13a Top face of Portugal-type Langevin type ultrasonic transducer

14a, 14b, 14c, 14d Piezoelectric vibrator plate

15a, 15b Metal parts

16 volt

18a, 18b Arrows indicating the direction of polarization of the piezoelectric body of the piezoelectric vibrator plate

19 AC power supply

45a, 45b metal parts

55a, 55b metal parts

65a 65B Metal parts

70, 80, 90, 100, 110 Vibration table 72, 82, 92, 102, 112 Rigid three-dimensional frame

72a, 82a, 92a, 112a spacer

72b, 92b, 102b, 112b Support plate

73, 83, 93, 103, 113 Bolt-fastened Langevin type ultrasonic transducer 75a, 75b Metal parts

85a, 85b Metal parts.

95a, 95b metal parts

105a, 105b Metal 咅 | 5 materials

115a, 115b ^ group member

120 Vibration table

121 Rigid base

122 rigid three-dimensional frame

122a Spacer

122b support plate

123-bolt Langevin type ultrasonic transducer.

123a Top surface of bolted Langevin type ultrasonic transducer

125a, 125b Metal members

127 prop

140, 160, 180 Vibration tape

141, 181, 201 Oka base

167 resin material

168, 188 frame

183 bolted Langevin type ultrasonic transducer

183a Top surface of bolted Langevin type ultrasonic transducer

185a, 185b Metal parts

200 vibration table

206 Porto for connecting rigid plate

207 Misformed rigid plate 211 drive

212 PLL (Phase-locked loop) circuit

213 driver circuit

214 Matching circuit

215 Voltage / current detection circuit

216 Phase circuit

217 Power control unit

218 Frequency control block

219 Power control block

222 central processing unit (CPU)

223 storage means

224 Display means

Claims

The scope of the claims

[1] A rigid base, a rigid three-dimensional frame fixed on the base, and a flat top surface, which is supported and fixed to the rigid three-dimensional frame at a position that is a node of generated vibration. Vibration table with bolted Langevin type ultrasonic vibrator.

[2] A rigid three-dimensional frame is composed of a spacer fixed to a base and a planar support plate connected to the upper part of the spacer, and a bolted Langevin type ultrasonic vibrator is provided on the support. 2. The vibration tape holder according to claim 1, wherein the vibration tape holder is a Langevin type ultrasonic vibrator formed by fastening a laminate of a plate and a piezoelectric vibrator plate together with metal members disposed on an upper side and a lower side by bolts.

3. The vibration table according to claim 2, wherein the area of the top surface of the upper metal member is at least 1.1 times and not more than 8.0 times the area of the upper surface of the piezoelectric vibrator plate.

4. The vibration table according to claim 3, wherein the area of the bottom surface of the upper metal member is equal to or greater than the area of the upper surface of the piezoelectric vibrator plate and equal to or less than the area of the top surface of the upper metal member.

5. The vibration table according to claim 2, wherein the laminate includes a support plate and an even number of piezoelectric vibrator plates arranged so as to overlap on the upper surface or the lower surface of the support plate.

6. The vibration table according to claim 2, wherein the laminated body has a support plate and an even number of piezoelectric vibrator plates arranged to be superposed on each of an upper surface and a lower surface of the support plate.

7. The vibration table according to claim 1, wherein a rigid plate is fixed to a top surface of the bolted Langevin type ultrasonic transducer.

[8] A rigid base, a plurality of rigid three-dimensional frames fixed in parallel on the base, and the rigid three-dimensional frame at a position where the top surface is a flat surface and serves as a node of generated vibration. A plurality of the same bolted Langevin type ultrasonic transducers supported and fixed one by one to each of the plurality of bolted Langevin type ultrasonic transducers, each of which has its top surface located on the same plane. Table adjusted in position.

[9] Each rigid three-dimensional frame is composed of a spacer fixed to the base and a planar support plate connected to the upper part of the spacer, and is supported and fixed to each rigid three-dimensional frame. The bolted Langevin-type ultrasonic vibrator is used to tighten the laminated body of the support plate and the piezoelectric vibrator plate with bolts together with the metal members disposed on the upper and lower sides, respectively. 9. The vibration table according to claim 8, which is a Juban type ultrasonic vibrator.

[10] The area of the top surface of the metal member on the upper side of each bolted Langevin type ultrasonic transducer Force is 1.1 to 8.0 times the area of the upper surface of the piezoelectric vibrator plate. The vibration table described in.

[11] The area of the bottom surface of the upper metal member of each bolted Langevin type ultrasonic transducer

11. The vibration table according to claim 10, wherein the area is equal to or more than the area of the upper surface of the 1S piezoelectric vibrator plate and equal to or less than the area of the top surface of the upper metal member.

[12] The claim according to claim 9, wherein each of the laminates of the bolted Langevin type ultrasonic transducers is composed of a support plate and an even number of piezoelectric vibrator plates arranged so as to overlap on the upper surface or the lower surface of the support plate. The vibration table according to the above.

[13] The laminated body of each of the bolted Langevin type ultrasonic vibrators has a support plate and an even number of piezoelectric vibrator plates arranged to be superposed on the upper surface and the lower surface of the support plate, respectively. Item 7. The vibration table according to item 9.

14. The vibration table according to claim 8, wherein a rigid plate is fixed to a top surface of each of the bolted Langevin type ultrasonic transducers.

15. The vibration tape holder according to claim 14, wherein the rigid plates fixed to each of the bolted Langevin type ultrasonic transducers are connected to each other on their side surfaces to form a connected rigid plate. .

[16] The driving device according to claim 8, further comprising a driving device for applying an AC voltage having a frequency corresponding to a resonance frequency of each of the bolted Langevin type ultrasonic transducers to each of the bolted Langevin type ultrasonic transducers. The described vibration table.

[17] An object to be processed that is larger than the area of the top surface of one of the bolted Langevin type ultrasonic vibrators is placed on the vibration table according to claim 8, and is at least in contact with the object to be processed. A machining method for machining an object to be processed while applying the ultrasonic vibration to the object by generating ultrasonic vibrations using a mold type ultrasonic vibrator.