JPWO2005044509A1 - Vibration table - Google Patents

Abstract

A rigid base (11), a rigid three-dimensional frame (12) fixed on the base (11), and a rigid three-dimensional frame at a position where the top surface is a flat surface and becomes a node of generated vibration By using the vibration table (10) including the bolted Langevin type ultrasonic transducer (13) supported and fixed to the body (12), the workpiece can be machined with high accuracy.

Description

  The present invention relates to a vibration table that can be used advantageously when machining a workpiece formed of a hard and brittle material such as glass or silicon.

  It is not easy to perform machining such as cutting, drilling, cutting, grinding or polishing with high accuracy on a workpiece formed of a hard and brittle material such as glass, ceramic or silicon. For this reason, conventionally, there has been proposed a method of machining such a workpiece with a tool provided with ultrasonic vibration. For example, a method of cutting a workpiece while applying ultrasonic vibration to a tool such as a tool is called ultrasonic cutting.

  Ultrasonic cutting has the advantage that the tool life is extended because the cutting resistance is reduced by applying ultrasonic vibration to the tool. Further, in ultrasonic cutting, since ultrasonic vibration having a frequency higher than the natural frequency of the object to be processed is applied to the tool, harmful vibration such as chatter is hardly generated on the object to be processed. For this reason, ultrasonic cutting is said to show excellent machining accuracy.

  Japanese Patent Application Laid-Open No. 2002-355726 discloses an ultrasonic vibration table device having a configuration in which an ultrasonic vibration device is fixed to a lower surface of a table on which a workpiece is temporarily fixed when machining. In this vibration table device, ultrasonic vibration is generated by the ultrasonic vibration device, and this ultrasonic vibration is applied to the workpiece temporarily fixed on the upper surface of the table. Then, the workpiece to which the ultrasonic vibration is applied on the vibration table device is machined using a tool such as a drill.

  The vibration table device includes a cylindrical casing fixed on the back plate, an ultrasonic vibration device supported and fixed on the upper end of the casing, a table fixed on the upper surface of the ultrasonic vibration device, and the like. ing. The ultrasonic vibration device includes a transmission horn fixed to the lower surface of the table and a vibrator fixed to the lower surface of the transmission horn. A flange portion is formed at an intermediate position in the height direction of the transmission horn, and the ultrasonic vibration device is supported and fixed to the upper end of the casing by the flange portion of the transmission horn. The vibration table device includes a guide member that protrudes downward from the outer lower portion of the table and is inserted into a guide recess formed in the upper portion of the casing.

  In this vibration table device, since the table is freely held only in the vertical direction by the guide member provided on the table, there is little loss of vibration energy. Therefore, by using this vibration table device, the workpiece can be accurately processed. It is said that it can be machined. In the publication, there is a description that a plurality of the ultrasonic vibration table devices can be arranged side by side.

Japanese Patent Application Laid-Open No. 2003-220530 discloses a vibration table device having a configuration in which a plurality of columnar bolting vibrators are fixed to the lower surface of a disk-like table for temporarily fixing a workpiece. The disk-shaped table is supported and fixed at the upper end of a cylindrical case, and each bolting vibrator is fixed in a suspended state on the lower surface of the table. Then, by applying the ultrasonic vibration generated by the bolting vibrator to the workpiece temporarily fixed on the upper surface of the table, a very small diameter drilling or groove of the workpiece formed from a hard and brittle material It is said that pouring is easy and the time required for machining can be shortened.
JP 2002-355726 A (FIG. 1) Japanese Patent Laying-Open No. 2003-220530 (FIG. 1)

  In the vibration table device described in JP 2002-355726 A, the ultrasonic vibration device is supported and fixed to the upper end of the casing by a flange portion of a transmission horn having a vibrator on the lower surface. Generally, the vibrator generates ultrasonic vibration having a wavelength twice that length, and the length of the transmission horn is set to half the wavelength of the ultrasonic vibration generated by the vibrator. That is, the length of the transmission horn is set to the same length as the length of the vibrator. For this reason, in order to support and fix the horn having the vibrator on the lower surface to the upper end of the casing at the flange portion, the height of the casing is set to a height of 1.5 times or more of the length of the vibrator. There is a need. The height of the vibration table device is at least 2.0 times the length of the vibrator.

  When a casing having such a high height is used, the casing tends to sway in the lateral direction, and the table surface fixed to the upper end of the casing via the transmission horn also easily sways in the lateral direction. For this reason, when this vibration table device is used, the table member tends to cause lateral shaking of the table due to lateral shaking of the casing itself, although the shaking of the table relative to the casing is reduced by the guide member. It is difficult to increase the accuracy of machining sufficiently. In addition, a high vibration table device is difficult or can be incorporated into an off-the-shelf machining device, for example, a machining device with a limited tool movable distance, such as an off-the-shelf drilling machine. Even if it exists, it is easy to deteriorate the workability | operativity at the time of machining.

  In addition, since this vibration table device has a configuration in which one ultrasonic vibration device is fixed at the center of the lower surface of the table, the central portion of the upper surface of the table is large and vibrates small as it approaches the end. easy. For this reason, if a workpiece of a large size is temporarily fixed on the upper surface of the table and machined at an upper position near the end of the table, machining is performed at a position above the center of the table. As a result, the accuracy of machining tends to decrease. That is, this vibration table device has another problem that it is difficult to machine a large workpiece uniformly and with high accuracy.

  On the other hand, the publication describes that a plurality of the vibration table devices may be arranged side by side. However, if a plurality of vibration table devices described in the publication are simply arranged side by side, each table is likely to sway in the horizontal direction as in the above case, so that a sufficiently high machining accuracy cannot be obtained. In some cases, it is also difficult to incorporate the vibration table device into an off-the-shelf machining device.

  Further, like the vibration table device described in Japanese Patent Application Laid-Open No. 2003-220530, by fixing a plurality of bolting vibrators in a suspended state on the lower surface of the disk-shaped table, the upper surface of the table is fixed. The ultrasonic vibration can be uniformly performed to some extent, and the height of the vibration table device can be set to the same height as the length of the vibrator. However, this vibration table device is configured such that the mass of a bolting vibrator fixed in a suspended state on the lower surface of the table, the mass of a workpiece to be placed on the upper surface of the table, or a tool that is used during machining. The table tends to bend due to the force applied to it. Also, the ultrasonic vibration applied to the table by the bolt tightening vibrator easily escapes to the outside through the cylindrical case that supports and fixes the disk-shaped table, and it is difficult to apply large ultrasonic vibration to the workpiece. . For this reason, it is difficult to increase the machining accuracy when this vibration table device is used to a certain degree.

  Furthermore, since the disk-shaped table is supported and fixed at the upper edge of the cylindrical case at the peripheral edge, the amplitude of the ultrasonic vibration is zero at the peripheral edge of the table, and the amplitude increases as it approaches the center of the table. Become. That is, the amplitude of the ultrasonic vibration of the table is not uniform within the table upper surface. For this reason, when the vibration table device described in the publication is used, if the workpiece is machined at a position above the center of the table, it can be machined with a certain degree of accuracy. If machining is performed at an upper position near the periphery, sufficient machining accuracy may not be obtained.

An object of the present invention is to provide a vibration table that can be advantageously used for machining a workpiece with high accuracy and can be easily incorporated into a ready-made machining apparatus.
Another object of the present invention is to provide a vibration table that can be advantageously used for machining a large-sized workpiece uniformly and with high accuracy, and that can be easily incorporated into a ready-made machining apparatus. It is in.

  The present invention provides a rigid base, a rigid three-dimensional frame fixed on the base, and a top surface that is a flat surface and is supported by the rigid three-dimensional frame at a position that is a node of vibration that occurs. The vibration table is composed of a fixed bolted Langevin type ultrasonic transducer.

Preferred embodiments of the vibration table of the present invention are as follows.
(1) The rigid three-dimensional frame is composed of a spacer fixed to the base and a planar support plate connected to the upper portion of the spacer, and a bolted Langevin type ultrasonic transducer is connected to the above support plate. This is a Langevin type ultrasonic vibrator formed by fastening a laminated body with a piezoelectric vibrator plate together with metal members arranged on the upper side and the lower side with bolts.
(2) The area of the top surface of the upper metal member is 1.1 to 8.0 times the area of the upper surface of the piezoelectric vibrator plate.
(3) The area of the bottom surface of the upper metal member is not less than the area of the upper surface of the piezoelectric vibrator plate and not more than the area of the top surface of the upper metal member.
(4) The laminate is composed of a support plate and an even number of piezoelectric vibrator plates arranged on the upper surface or lower surface of the support plate.
(5) The laminated body is composed of a support plate and an even number of piezoelectric vibrator plates arranged to overlap each of the upper surface and the lower surface of the support plate.
(6) A rigid plate is fixed to the top surface of the bolted Langevin type ultrasonic transducer.

  The present invention also provides a rigid base, a plurality of rigid three-dimensional frames fixed in parallel on the base, and the above-described rigid three-dimensional structure at a position where the top surface is a plane and becomes a node of generated vibration. A plurality of bolt-clamped Langevin type ultrasonic transducers that are supported and fixed one by one on each of the frames, and each of these bolt-clamped Langevin type ultrasonic transducers has a top surface on the same plane. There is also a vibration table whose position is adjusted to be positioned.

The preferable aspect of the vibration table of this invention provided with this some bolting Langevin type ultrasonic transducer | vibrator is as follows.
(1) Each rigid three-dimensional frame is composed of a spacer fixed to the base and a planar support plate connected to the upper portion of the spacer, and a bolt supported and fixed to each rigid three-dimensional frame. A tightened Langevin type ultrasonic vibrator is a Langevin type ultrasonic vibrator formed by tightening a laminated body of the support plate and the piezoelectric vibrator plate together with a metal member disposed on each of the upper side and the lower side with a bolt. .
(2) The area of the top surface of the upper metal member of each bolted Langevin type ultrasonic transducer is 1.1 to 8.0 times the area of the upper surface of the piezoelectric transducer plate.
(3) The area of the bottom surface of the upper metal member of each bolted Langevin type ultrasonic transducer is not less than the area of the upper surface of the piezoelectric transducer plate and not more than the area of the top surface of the upper metal member.
(4) Each of the bolted Langevin type ultrasonic vibrators is composed of a support plate and an even number of piezoelectric vibrator plates arranged on the upper or lower surface of the support plate.
(5) Each of the bolted Langevin type ultrasonic vibrators is composed of a support plate and an even number of piezoelectric vibrator plates arranged on the upper and lower surfaces of the support plate.
(6) A rigid plate is fixed to the top surface of each bolted Langevin type ultrasonic transducer.
(7) Rigid plates fixed to each bolted Langevin type ultrasonic transducer are connected to each other at their side surfaces to be integrated to form a connected rigid plate.
(8) Each bolted Langevin type ultrasonic transducer is provided with a drive device that applies an AC voltage having a frequency corresponding to the resonance frequency of each bolted Langevin type ultrasonic transducer.

  The present invention also arranges a workpiece that is larger than the area of the top surface of one bolt-clamped Langevin type ultrasonic transducer on the vibration table of the present invention comprising the plurality of bolt-clamped Langevin type ultrasonic transducers. In addition, a machining method for machining a workpiece while applying the ultrasonic vibration to the workpiece by generating ultrasonic vibration with at least a bolted Langevin type ultrasonic vibrator in contact with the workpiece. is there.

  In the present specification, the “position that becomes the node of vibration” means that, in a bolted Langevin type ultrasonic vibrator that ultrasonically vibrates, from the position where the amplitude of ultrasonic vibration is zero regardless of the passage of time, This means a position within a distance corresponding to one-eighth of the wavelength of this ultrasonic vibration. The position where the amplitude of the ultrasonic vibration is zero in the bolted Langevin type ultrasonic vibrator that vibrates ultrasonically is, for example, the software “ANSYS” (manufactured by ANSYS, Inc.) for vibration analysis using the finite element method. ) Can be specified accurately by computer simulation.

  The vibration table of the present invention is stably supported by a low-profile rigid three-dimensional frame fixed on a rigid base at a position where the bolted Langevin type ultrasonic transducer becomes a node of the vibration. Therefore, the height can be reduced, and the top surface of the Langevin type transducer on which the workpiece is temporarily fixed is less likely to cause lateral shaking. For this reason, the workpiece is temporarily fixed to the top surface of the bolted Langevin type ultrasonic transducer of the vibration table of the present invention, and the ultrasonic vibration is generated by the Langevin type transducer. The processing object can be machined with high accuracy while being applied to the object. Moreover, since the height of the vibration table of the present invention can be lowered, there is also an advantage that it can be easily incorporated into an already-made machining apparatus.

  A vibration table according to the present invention will be described with reference to the accompanying drawings. 1 is a front view showing a configuration example of the vibration table of the present invention, FIG. 2 is a plan view of the vibration table of FIG. 1, and FIG. 3 is an exploded perspective view of the vibration table of FIG. .

  The vibration table 10 shown in FIGS. 1 to 3 has a rigid base 11, a rigid three-dimensional frame 12 fixed on the base 11, and a top surface 13 a as a flat surface and serves as a vibration node. It is composed of a bolted Langevin type ultrasonic transducer 13 supported and fixed to the rigid three-dimensional frame 12 at a position.

  The vibration table 10 generates ultrasonic vibrations with a bolted Langevin type ultrasonic transducer (hereinafter also referred to as a Langevin type transducer) 13, and the ultrasonic vibrations are temporarily fixed to the top surface 13 a of the Langevin type transducer 13. To the processed object. The workpiece to which the ultrasonic vibration is applied is machined using a tool such as a drill, a cutting tool, or a grindstone.

  Examples of the method of temporarily fixing the workpiece to the top surface 13a of the Langevin type vibrator 13 of the vibration table 10 include a method of temporarily fixing using a bolt, a method of temporarily fixing magnetically or electrostatically, a Langevin type Place the workpiece on the top surface of the vibrator via water and freeze the water to temporarily fix the workpiece, and form the air inlet connected to the vacuum pump on the top surface of the Langevin type vibrator In addition, there is a method in which a workpiece to be processed arranged on the air inlet is vacuum-sucked and temporarily fixed. The object to be processed may be temporarily fixed to the table surface via a support plate (for example, a metal plate, a resin plate, or a carbon plate) of the object to be processed. The workpiece support plate prevents damage to the top surface of the Langevin type vibrator by a tool used for machining.

  The rigid three-dimensional frame 12 includes a spacer 12a fixed to the base 11 and a planar support plate 12b connected to the upper portion of the spacer 12a. The bolt-clamped Langevin type ultrasonic vibrator 13 is a metal plate in which the laminated body of the support plate 12b of the rigid three-dimensional frame 12 and the piezoelectric vibrator plates 14a and 14b is arranged on the upper side and the lower side, respectively. It is a Langevin type ultrasonic vibrator configured to be fastened with bolts together with the members 15a and 15b.

  The bolted Langevin type ultrasonic transducer 13 is fixed to the rigid three-dimensional frame 12 at a position that becomes a node of the generated vibration. The bolted Langevin type ultrasonic vibrator 13 identifies the position where the amplitude of the generated ultrasonic vibration is zero by computer simulation as described above, and starts ultrasonic vibration from the position where the amplitude of the ultrasonic vibration is zero. The rigid three-dimensional frame 12 is supported and fixed at a position within a distance corresponding to one-eighth of the wavelength. As the position for supporting and fixing the bolted Langevin type ultrasonic transducer 13 moves away from the position where the amplitude of the ultrasonic vibration is zero, the generated ultrasonic vibration is transmitted through the rigid three-dimensional frame 12 and the rigid base 11. It tends to escape to the outside, and the amplitude of the ultrasonic vibration of the top surface 13a of the Langevin type vibrator 13 tends to be small. For this reason, the bolted Langevin type ultrasonic transducer is most preferably supported and fixed to the rigid three-dimensional frame at a position where the amplitude of the ultrasonic vibration is zero.

  Usually, the length of the bolted Langevin type ultrasonic transducer 13 is designed to be a half of the wavelength of the generated ultrasonic vibration. In the bolt-clamped Langevin type ultrasonic vibrator designed as described above, the position where the amplitude of the ultrasonic vibration becomes zero varies depending on the shape, material or mass of the piezoelectric vibrator plates 14a and 14b and the metal members 15a and 15b. In general, the center position in the length direction of the Langevin type vibrator 13 is obtained. Therefore, the bolted Langevin type ultrasonic transducer 13 specifies a position where the amplitude of the ultrasonic vibration of the Langevin type transducer 13 is zero by computer simulation as described above, and the rigid three-dimensional frame body at this position. However, in practice, it is only necessary to be supported and fixed to the rigid three-dimensional frame 12 at a position approximately in the center in the length direction.

  When the bolted Langevin type ultrasonic transducer 13 is supported and fixed to the rigid three-dimensional frame 12 at the position of the vibration node in this manner, the height of the rigid three-dimensional frame 12 is set to the height of the Langevin type transducer 13. The height can be about half of the length, that is, about one third of the height of the casing of the vibration table device disclosed in Japanese Patent Laid-Open No. 2002-355726. Since the bolted Langevin type ultrasonic transducer 13 is stably supported and fixed to the rigid three-dimensional frame having a very low height as described above, it is difficult to cause lateral shaking. For this reason, the workpiece can be machined with high accuracy by using the vibration table 10. Further, the vibration table 10 has a height that is about half of the height of the vibration table device described in the publication, and can be easily incorporated into a ready-made machining apparatus.

  On the other hand, the vibration table device described in the above-mentioned Japanese Patent Application Laid-Open No. 2003-220530 can be set to the same height as the length of the bolt tightening vibrator. Since the vibrator is fixed in a suspended state on the lower surface of the table, the table on which the workpiece is temporarily fixed is likely to be bent. For this reason, when the vibration table device described in the publication is used, it is difficult to increase the machining accuracy to a certain degree. On the other hand, when the vibration table of the present invention is used, the workpiece is temporarily fixed to the top surface of the bolted Langevin type ultrasonic transducer that is stably supported and fixed to the rigid three-dimensional frame, The workpiece can be machined with high accuracy.

  In addition, the vibration table device described in the above-mentioned Japanese Patent Application Laid-Open No. 2003-220530 is easy to escape to the outside because the ultrasonic vibration applied to the table by the bolt tightening vibrator is transmitted through the case that supports and fixes the table. It is difficult to apply large ultrasonic vibrations. On the other hand, the vibration table of the present invention has a bolt-clamped Langevin type ultrasonic vibrator fixed to a rigid three-dimensional frame at a position that becomes a node of the vibration. A large ultrasonic vibration can be applied to the workpiece. For this reason, the workpiece can be machined with high accuracy by using the vibration table of the present invention.

  Next, a method for manufacturing the vibration table 10 of FIG. 1 will be described with reference to FIGS. The vibration table 10 is produced, for example, as follows.

  First, the laminated body is configured by superimposing the support plate 12b of the rigid three-dimensional frame 12 and the piezoelectric vibrator plates 14a and 14b. Next, metal members 15a and 15b are disposed on the upper side and the lower side of the laminate, respectively, and the laminate is fastened together with the metal members 15a and 15b with the bolts 16, so that a bolt-clamped Langevin type ultrasonic vibrator is provided. 13 is supported and fixed to the support plate 12b of the rigid three-dimensional frame 12. 1 is manufactured by fixing the bottom of the spacer 12a of the rigid three-dimensional frame 12 to which the bolted Langevin type ultrasonic transducer 13 is supported and fixed onto the rigid base 11 with a bolt or the like. Is done.

  The rigid base 11 is made of, for example, a metal material such as iron or titanium, or an alloy material such as stainless steel. The rigid base 11 is also preferably formed from a vibration damping material such as an Fe—Ni—Co—Si alloy (eg, trade name Novinite, manufactured by Enomoto Casting Co., Ltd.). Moreover, the vibration table of this invention can also be arrange | positioned and used on the metal table which temporarily fixes the process target with which a ready-made drilling machine is equipped, for example. In such a case, by forming the rigid base 11 from magnetic stainless steel, the vibration table can be stably placed on the metal table provided in the drilling machine.

  The rigid three-dimensional frame 12 includes a spacer 12a fixed to the base and a planar support plate 12b connected to the upper portion of the spacer 12a, and is formed of a metal material such as stainless steel, for example. A through hole having a diameter larger than the diameter of the bolt 16 is formed in the support plate 12b.

  Each of the piezoelectric vibrator plates 14 a and 14 b is formed with a through hole having a diameter larger than the diameter of the bolt 16. Each of the piezoelectric vibrator plates 14a and 14b includes, for example, an annular piezoelectric body formed of a lead zirconate titanate-based piezoelectric ceramic material and an annular electrode plate attached to each surface thereof. . As the electrode plate, for example, a thin plate (or thin film) electrode made of silver or phosphor bronze is used. Since the metal member 15a, the metal member 15b, and the support plate have conductivity and can be used as electrodes of the piezoelectric vibrator plate, the surface of the piezoelectric vibrator plate in contact with any one of them is not provided. The electrode plate may not be attached.

  The piezoelectric bodies included in each of the piezoelectric vibrator plates 14a and 14b are subjected to polarization processing, for example, in the directions indicated by arrows 18a and 18b shown in FIG. Then, by applying an AC voltage to each of the piezoelectric vibrator plates 14a and 14b, the piezoelectric vibrator plate 14a generates ultrasonic vibrations that vibrate in a direction perpendicular to the top surface 13a of the Langevin type vibrator 13, and piezoelectric The vibrator plate 14b generates ultrasonic vibration that vibrates in the direction indicated by the arrow 17 shown in FIG. By setting the phase difference of the AC voltage applied to these piezoelectric vibrator plates 14a and 14b to 90 degrees, the top surface 13a of the Langevin type vibrator 13 has a vibration component that vibrates in a direction perpendicular to the top surface 13a. , An elliptical vibration composed of a vibration component that vibrates in the direction indicated by the arrow 17 shown in FIG. By applying such elliptical vibration to the workpiece, for example, the workpiece can be efficiently surface ground along the direction indicated by the arrow 17 with high accuracy.

  The piezoelectric bodies included in the piezoelectric vibrator plates 14a and 14b may be polarized in the thickness direction. In this case, it is preferable to arrange the piezoelectric vibrator plates 14a and 14b so that the polarization directions of the piezoelectric bodies are opposite to each other. When the piezoelectric bodies included in the piezoelectric vibrator plates 14a and 14b are polarized in the thickness direction, the top surface of the bolted Langevin type ultrasonic vibrator can be greatly ultrasonically vibrated in the vertical direction. By applying such a large ultrasonic vibration to the processing target portion, for example, the processing target can be efficiently drilled with high accuracy using a drill.

The metal members 15a and 15b are made of a metal material such as stainless steel, for example. The upper metal member 15a is, for example, a single metal part produced by machining a part of a square member made of stainless steel into a cylindrical shape using a lathe.
The metal member 15 a includes a hole in which a female screw to be fitted with the bolt 16 is formed. The metal member 15b includes a through hole in which a female screw to be fitted with the bolt 16 is formed. The metal member 15a and the metal member 15b are electrically connected to each other via a bolt 16.

  For example, as shown in FIG. 1, an AC power supply 19 is electrically connected to the bolted Langevin type ultrasonic transducer 13. The upper metal member 15a of the bolted Langevin type ultrasonic transducer is preferably grounded to prevent electric shock. The upper metal member 15a is grounded via the bolt 16 and the lower metal member 15b. Then, as shown in FIG. 1, an AC voltage is applied to the lower electrode plate of the piezoelectric vibrator plate 14a and the upper electrode plate of the piezoelectric vibrator plate 14b using an AC power source 19, whereby the piezoelectric vibrator plate 14a. , 14b each vibrate ultrasonically, and the bolted Langevin type ultrasonic vibrator 13 generates ultrasonic vibrations.

  The laminated body for constituting the bolted Langevin type ultrasonic vibrator is composed of a support plate 12b of the rigid three-dimensional frame 12 and an even number of piezoelectric vibrator plates arranged on the lower surface of the support plate 12b. It is preferable to be configured. This is because when the number of piezoelectric vibrator plates is an odd number, the metal members 15a and 15b and the support plate 12b are grounded to prevent electric shock, for example, the piezoelectric vibrator plate disposed at the lowermost side. In order to apply an AC voltage to each of all the piezoelectric vibrator plates except for the piezoelectric vibrator plate, it is necessary to ground both the upper surface and the lower surface of the lowermost piezoelectric vibrator plate. This is because an AC voltage cannot be applied to the plate. It is practical that the number of piezoelectric vibrator plates is two, four, or six. As the number of piezoelectric vibrator plates increases, the Langevin type vibrator can be vibrated ultrasonically, but the power consumption increases and the electrical connection between the piezoelectric vibrator plate and the AC power supply becomes more complicated. It is.

  Further, in the vibration table of the present invention, the area of the top surface of the upper metal member of the bolted Langevin type ultrasonic vibrator is arranged on the uppermost side when a plurality of piezoelectric vibrator plates are provided. It is preferable that it is 1.1 times or more and 8.0 times or less of the area of the upper surface of the piezoelectric vibrator plate). The area of the top surface of the upper metal member 15a of the bolted Langevin type ultrasonic vibrator 13 provided in the vibration table 10 of FIG. 1 is set to about 4.5 times the area of the upper surface of the piezoelectric vibrator plate 14a. Yes.

  By making the area of the top surface of the upper metal member 15a of the bolted Langevin type ultrasonic vibrator 13 larger than the area of the upper surface of the piezoelectric vibrator plate, the ultrasonic vibration of the top surface of the upper metal member 15a is reduced. Although the amplitude tends to be small, when the load on the vibration table fluctuates, for example, when a workpiece with a large mass is placed on the top surface of the Langevin type vibrator, or with a tool used for machining, Langevin type vibration Experiments have shown that the workpiece can be machined with stable accuracy even when a large force is applied to the top surface of the child. This cause is understood as follows.

  In general, it is known to connect a metal horn to an ultrasonic transducer in order to obtain ultrasonic vibration with a large amplitude. As the horn, for example, a metal member having a truncated cone shape in which the area of the top surface is set smaller than the bottom surface is used. It is known that when such a horn is fixed to the ultrasonic vibrator at its bottom surface, the amplitude of the ultrasonic vibration generated by the ultrasonic vibrator increases when it reaches the top surface of the horn. And since the energy of the ultrasonic vibration generated by the ultrasonic vibrator is constant, the amplitude of the ultrasonic vibration that has reached the top surface of the horn increases. It is also known that the force applied to the load connected to is small.

  In the vibration table of the present invention, if the area of the top surface of the upper metal member 15a of the bolted Langevin type ultrasonic transducer 13 is set larger than the area of the bottom surface as described above, the upper metal is contrary to the case of the horn. Although the amplitude of the ultrasonic vibration of the top surface of the member is reduced, it is understood that the force applied to the workpiece is increased by the ultrasonic vibration, and the workpiece can be stably ultrasonically vibrated. For this reason, by using a vibration table equipped with a Langevin-type vibrator in which the top surface area of the upper metal member is set larger than the bottom surface area, the workpiece can be stabilized even when the vibration table load fluctuates. It is understood that it can be machined with high accuracy.

  Further, the area of the bottom surface of the upper metal member 15a of the bolted Langevin type ultrasonic transducer 13 is not less than the area of the upper surface of the piezoelectric transducer plate 14a and not more than the area of the top surface of the upper metal member 15a. Is more preferable. When the area of the bottom surface of the upper metal member 15a is smaller than the area of the upper surface of the piezoelectric vibrator plate 14a, ultrasonic vibration generated in the surface portion of the piezoelectric vibrator plate 14a that does not contact the metal member 15a is generated. This is because the amplitude of the ultrasonic vibration of the top surface 13a of the Langevin type transducer 13 becomes small because it is not transmitted to 14a. On the other hand, when the area of the bottom surface of the upper metal member 15a is larger than the area of the top surface, the amplitude of the ultrasonic vibration of the top surface 13a of the Langevin type vibrator 13 increases as in the case of the horn. This is because the force applied to the object to be processed becomes small, and the accuracy of machining becomes unstable with respect to load fluctuation.

  In addition, a rigid plate made of a metal material or the like may be fixed to the top surface of the bolted Langevin type ultrasonic transducer of the vibration table of the present invention. The rigid plate can be fixed to the top surface of the upper metal member of the Langevin vibrator using, for example, a bolt. Even when the rigid plate is fixed, the rigid plate is stably supported by the bolted Langevin type ultrasonic vibrator on the lower surface thereof, so that it is difficult to cause lateral vibration on the surface. By temporarily fixing the workpiece on the upper surface of the rigid plate and applying ultrasonic vibration to the workpiece, the workpiece can be machined with high accuracy. By fixing the rigid plate, the top surface of the bolted Langevin type ultrasonic transducer can be protected from damage by a tool used for machining.

  FIG. 4 is a front view showing another configuration example of the vibration table of the present invention. The structure of the vibration table 40 of FIG. 4 is that the laminated body for constituting the bolted Langevin type ultrasonic transducer 43 is composed of the support plate 12b of the rigid three-dimensional frame 12, the upper surface and the lower surface of the support plate 12b. 1 is the same as the vibration table of FIG. 1 except that the piezoelectric vibrator plates 14a and 14b are arranged one by one. In the vibration table 40, an AC voltage is applied to the support plate 12b in order to generate ultrasonic vibrations in the bolted Langevin type ultrasonic vibrator 43. For this reason, it is preferable that the rigid three-dimensional frame 12 provided with the support plate 12b and the base 11 are electrically insulated from each other.

  FIG. 5 is a front view showing still another configuration example of the vibration table of the present invention. In the configuration of the vibration table 50 in FIG. 5, the laminated body for forming the bolted Langevin type ultrasonic transducer 53 is arranged so as to overlap the support plate 12b of the rigid three-dimensional frame 12 and the upper surface of the support plate 12b. Except for being composed of two piezoelectric vibrator plates 14a and 14b, the same vibration table as in FIG. The number of piezoelectric vibrator plates is preferably an even number for the same reason as in the case of the vibration table 10 of FIG.

  FIG. 6 is a front view showing still another configuration example of the vibration table of the present invention. The structure of the vibration table 60 in FIG. 6 is that the laminated body for constituting the bolted Langevin type ultrasonic transducer 63 includes a support plate 12b of the rigid three-dimensional frame 12, and an upper surface and a lower surface of the support plate 12b. 1 is the same as the vibration table 10 of FIG. 1 except that it is composed of two piezoelectric vibrator plates (a total of four piezoelectric vibrator plates 14a, 14b, 14c, and 14d) disposed on each other. is there. In order to construct a bolted Langevin type ultrasonic transducer in this way, the laminate is composed of a support plate and a piezoelectric transducer plate that is placed on each of the upper and lower surfaces of the support plate. It is preferable to arrange an even number of piezoelectric vibrator plates on each of the upper surface and the lower surface of the support plate. Thereby, the metal members 65a and 65b and the rigid three-dimensional frame 12 of the vibration table 63 can be grounded.

  As described above, the vibration table including the Langevin type vibrator in which the area of the top surface of the upper metal member is set in the range of 1.1 times or more and 8.0 times or less of the area of the upper surface of the piezoelectric vibrator plate. By using, the workpiece can be machined with stable accuracy even when the load fluctuates. When the area of the top surface of the upper metal member is increased in this way, the shape of the upper metal member is preferably symmetrical with respect to the axis of the bolted Langevin type ultrasonic transducer.

  FIG. 7 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. In the configuration of the vibration table 70 of FIG. 7, a pyramid-shaped metal member having a top surface area larger than a bottom surface area is used as the upper metal member 75 a of the bolted Langevin ultrasonic transducer 73. 1 except that a rigid three-dimensional frame 72 composed of a cylindrical spacer 72a and a planar support plate 72b connected to the upper portion of the spacer 72a is used.

  FIG. 8 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. The vibration table 80 shown in FIG. 8 has a cylindrical metal member whose top surface area is larger than the upper surface area of the piezoelectric vibrator plate 14a as the upper metal member 85a of the bolted Langevin type ultrasonic vibrator 83. 7 is used, and the diameter of the cylindrical spacer 82a of the rigid three-dimensional frame 82 is equal to the diameter of the upper metal member 85a.

  FIG. 9 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. The vibration table 90 shown in FIG. 9 is configured such that the upper metal member 95a of the bolted Langevin type ultrasonic transducer 93 has an upper portion of a truncated cone-shaped metal member having a top surface area larger than the bottom surface area. 7 is the same as the vibration table 70 of FIG. 7 except that a metal member produced by cutting vertically so as to form a square is used.

  FIG. 10 is a partially cutaway perspective view showing still another configuration example of the vibration table of the present invention. The vibration table 100 of FIG. 10 has the same structure as that of FIG. 7 except that a rectangular parallelepiped metal member having a square top surface is used as the upper metal member 105a of the bolted Langevin ultrasonic transducer 103. This is the same as the table 70.

  FIG. 11 is a perspective view showing still another configuration example of the vibration table of the present invention. In the configuration of the vibration table 110 in FIG. 11, a truncated cone-shaped metal member having a top surface area larger than a bottom surface area is used as the upper metal member 115 a of the bolted Langevin ultrasonic transducer 113. The Langevin-type vibrator 113 is supported and fixed to the annular support plate 112b of the rigid three-dimensional frame 112 formed integrally with the upper metal member 115a, and the four support plates 112b are provided. Except that it is fixed to the rigid base 11 by a columnar spacer 112a, it is the same as the vibration table 70 of FIG. As described above, the bolted Langevin type ultrasonic transducer may be supported and fixed to the rigid three-dimensional frame by the upper metal member (or the lower metal member).

  FIG. 12 is a front view showing still another configuration of the vibration table of the present invention, and FIG. 13 is a plan view of the vibration table of FIG. The vibration table 120 shown in FIGS. 12 and 13 is generated by a rigid base 121, a total of four rigid three-dimensional frames 122 fixed on the base 121, and a top surface 123a. A total of four cylindrical bolted Langevin type ultrasonic transducers 123 supported and fixed to the rigid three-dimensional frame 122 at positions serving as vibration nodes are formed. The positions of the four bolted Langevin type ultrasonic transducers 123 are adjusted so that the top surfaces 123a are located on the same plane.

  The rigid three-dimensional frame 122 includes a spacer 122a fixed to the base and a planar support plate 122b connected to the top of the spacer 122a. In order to reduce lateral shaking of the rigid three-dimensional frame 122, a reinforcing column 127 is provided at the center of the lower surface of the support plate 122b. Each bolted Langevin type ultrasonic vibrator 123 has the same configuration as that of FIG. 1 except that a cylindrical metal member having the same diameter as the piezoelectric vibrator plate 14a is used as the upper metal member 125a. This is the same as the ten bolted Langevin type ultrasonic transducer 13.

  On the vibration table in which a plurality of bolted Langevin type ultrasonic transducers are supported and fixed to the rigid three-dimensional frame in this way, a workpiece larger than the area of the top surface of one Langevin type transducer is arranged, At least ultrasonic vibration is generated by a Langevin type transducer in contact with the workpiece, and when the workpiece is machined while this ultrasonic vibration is applied to the workpiece, each workpiece is ultrasonically vibrated on the workpiece. Therefore, a large-sized workpiece can be machined uniformly and with high accuracy.

  FIG. 14 is a front view showing still another configuration example of the vibration table of the present invention, and FIG. 15 is a plan view of the vibration table of FIG. The vibration table 140 shown in FIGS. 14 and 15 has a rigid base 141, a plurality of (for example, nine) rigid three-dimensional frame bodies 12 fixed in parallel on the base 141, and a top surface 13a. And a plurality of (for example, nine) bolt-clamped Langevin type ultrasonic transducers 13 that are supported and fixed one by one on each of the rigid three-dimensional frames 12 at positions where vibrations are generated. The positions of the plurality of bolted Langevin type ultrasonic transducers 13 are adjusted so that the top surfaces 13a are located on the same plane. The configuration of each bolted Langevin type ultrasonic transducer 13 is the same as that used for the vibration table 10 of FIG.

  The plurality of bolted Langevin type ultrasonic transducers 13 are, for example, a plurality of Langevin types after a plurality of rigid three-dimensional frames each having bolted Langevin type ultrasonic transducers are arranged and fixed on a rigid base 141. By a simple operation of polishing or grinding the top surface of the vibrator in parallel with the bottom surface of the rigid base, the position can be adjusted so that each top surface is located on the same plane.

  The vibration table 140 is less likely to cause lateral shaking because each Langevin type vibrator 13 is stably supported and fixed to the rigid base. For this reason, a processing object larger than the area of the top surface 13a of one Langevin type vibrator 13 is arranged on the vibration table 140, and at least ultrasonic vibration is generated by the Langevin type vibrator in contact with the processing object. By machining the workpiece while applying ultrasonic vibration to the workpiece, a large-size workpiece can be machined uniformly and with high accuracy. Similarly to the case of the vibration table of FIG. 1, the vibration table 140 is easy to incorporate into a ready-made machining apparatus because of its low height.

  16 is a front view showing still another configuration example of the vibration table of the present invention, and FIG. 17 is a plan view of the vibration table of FIG. The vibration table 160 shown in FIGS. 16 and 17 is configured such that a plurality of Langevin type vibrators 13 are joined to each other by a resin material 167 on the upper side surface of each upper metal member 15a, and a plurality of Langevin types 14 is the same as the vibration table 140 of FIG. 14 except that a frame body 168 surrounding the mold vibrator 13 with a resin material 167 is provided.

  The resin material 167 that joins the plurality of Langevin vibrators 13 to each other is formed from the gap between the Langevin vibrators when machining, for example, when a grinding liquid such as water or oil is used. It is prevented from flowing down to the table 151.

  As the resin material 167, for example, an epoxy resin is used. Since the acoustic impedances of the resin material 167 and the upper metal member 15a made of stainless steel, for example, show greatly different values, the ultrasonic vibration generated in each Langevin type vibrator 13 is transmitted to other vibrators. Is not easily transmitted, and each of the plurality of Langevin type vibrators 13 vibrates ultrasonically almost independently. That is, ultrasonic vibrations of the same size are applied from each Langevin transducer to a large-size workpiece to be placed on a plurality of Langevin transducers. For this reason, by using the vibration table 160, a large-sized workpiece can be machined uniformly and with high accuracy.

  18 is a front view showing still another configuration example of the vibration table of the present invention, and FIG. 19 is a plan view of the vibration table of FIG.

  The configuration of the vibration table 180 shown in FIGS. 18 and 19 is that the top surface of the upper metal member 185a of each bolted Langevin type ultrasonic transducer 183 has a hexagonal shape, and the rigid base 181 has Except that the shape is a disk shape, and a disk-shaped metal plate having a through hole surrounding the upper metal member 185a of each Langevin type vibrator is used as the frame 188. Is the same as the vibration table 160 of FIG.

  In this way, by making the top surface of the metal member on the upper side of each Langevin type transducer a hexagon, the top surface of the Langevin type transducer is made more uniform than when the top surface is a quadrangle. It can be ultrasonically vibrated.

  FIG. 20 is a perspective view showing still another configuration example of the vibration table of the present invention. The vibration table 200 in FIG. 20 includes a rigid base 201, a rigid three-dimensional frame 92 fixed in parallel on the base 201, and a rigid surface at a position where the top surface is a plane and becomes a node of the generated vibration. The four bolted Langevin type ultrasonic transducers 93 are fixedly supported one by one on each of the three-dimensional frames 92, and the plurality of bolted Langevin type ultrasonic transducers 93 are respectively The position is adjusted so that the top surfaces are located on the same plane. The configuration of each bolted Langevin type ultrasonic transducer 93 and frame 92 is the same as that used for the vibration table 90 of FIG.

  A rigid plate (not shown) may be fixed to the top surface of each bolted Langevin type ultrasonic transducer 93 of the vibration table 200 of FIG. The rigid plates may be connected to each other at their side surfaces to be integrated to form a connected rigid plate. As shown in FIG. 20, the connecting rigid plate 207 can be fixed on a plurality of bolted Langevin type ultrasonic transducers 93 using, for example, bolts.

  FIG. 21 is an electric circuit block diagram showing a configuration example of a drive device for a bolt-clamped Langevin type ultrasonic transducer provided in the vibration table of the present invention.

  The driving device 211 in FIG. 21 applies an AC voltage (for example, a sine wave voltage) having a frequency corresponding to the resonance frequency, usually in the range of 15 to 100 kHz, to the bolted Langevin type ultrasonic vibrator 13 included in the vibration table. ) Is applied.

  A PLL (Phase-locked loop) circuit 212 of the driving device 211 in FIG. 21 generates a rectangular wave voltage having a frequency corresponding to the resonance frequency of the Langevin type vibrator 13. This rectangular wave voltage is amplified by the driver circuit 213, and then the electric power factor is improved by the matching circuit 214, and applied to the Langevin vibrator 13 as a sine wave voltage. When the Langevin type vibrator is provided with two piezoelectric vibrator plates, this sine wave voltage is applied to each piezoelectric vibrator plate.

  A voltage / current detection circuit 215 provided between the matching circuit 214 and the Langevin type vibrator 13 detects an AC voltage, an AC current, and a phase thereof applied to the Langevin type vibrator 13.

  The power control unit 217 calculates the power value applied to the Langevin type vibrator 13 based on the AC voltage and AC current detected by the voltage / current detection circuit 215 and their phases. The power control unit 217 controls the power amplification factor of the driver circuit 213 based on the calculated power value so that a predetermined amount of power is applied to the Langevin type vibrator.

  On the other hand, the phase circuit 216 receives a signal output from the voltage / current detection circuit 215 and converted from the current flowing in the Langevin type vibrator 13 into a current voltage, and the control frequency of the frequency control block 218 is set to After the signal is phase-shifted so as to have a resonance frequency, a voltage signal converted into a pulse voltage is output to the PLL circuit 212.

  The PLL circuit 212 controls the frequency of the rectangular wave voltage output from the PLL circuit so that the phase of the pulsed voltage output from the phase circuit 216 matches the phase of the rectangular wave voltage output from the PLL circuit. By such control, even when the resonance frequency of the Langevin type vibrator 13 slightly fluctuates due to, for example, a change in environmental temperature, an AC voltage having a frequency corresponding to the resonance frequency is always applied to the Langevin type vibrator 13. Therefore, the Langevin type vibrator 13 can generate ultrasonic vibration having a large amplitude.

  Further, in the case where a plurality of Langevin vibrators are provided on the vibration table, it is preferable to connect one drive device shown in FIG. 14 to each Langevin vibrator. Thereby, even if the resonance frequency of each Langevin type vibrator fluctuates, an AC voltage having a frequency corresponding to the resonance frequency can always be applied to each Langevin type vibrator. For this reason, ultrasonic vibration with a large amplitude can be generated in each Langevin type vibrator.

  Further, when the vibration table includes a plurality of Langevin type vibrators, it is also preferable to apply AC voltages having the same phase to each of the plurality of Langevin type vibrators. In this case, it is more preferable to adjust the magnitude of the AC voltage applied to each Langevin type transducer to ultrasonically vibrate the top surface of each Langevin type transducer with the same amplitude. Alternatively, a plurality of Langevin type vibrators may be electrically connected in parallel, and an AC voltage may be applied to the Langevin type vibrators connected in parallel using a single driving device.

As shown in FIG. 21, the driving device 211 includes a central processing unit (CPU).
unit) 222, storage means 223, and display means 224 are preferably provided.

  The central processing unit 222 calculates the power value applied to the Langevin type vibrator 13 based on the AC voltage and AC current detected by the voltage / current detection circuit 215 and their phases. Then, the central processing unit 222 controls the power amplification factor of the driver circuit 213 based on the calculated power value so that a predetermined amount of power is applied to the Langevin type vibrator 13, and the calculated power The value data is output to the storage means 223. The power value data stored in the storage unit 223 is displayed on a display or output to a printer, for example.

  The central processing unit 222 displays the amplitude and frequency of the rectangular wave voltage output from the PLL circuit 212 on the display means (for example, a display device) 224, and outputs the rectangular wave voltage output from the PLL circuit 212 or the voltage / When an abnormal state occurs in the Langevin type vibrator 13 based on information such as an AC voltage and an AC voltage applied to the Langevin type vibrator 13 output from the current detection circuit 215 (for example, wiring to the vibrator is In the case of disconnection or when the applied voltage is not controlled in accordance with the fluctuation of the resonance frequency of the vibrator), a warning is displayed on the display means 224. When such a driving device 211 is used, the state of control of the Langevin type vibrator 13 can be confirmed, so that when machining is performed using the vibration table, the occurrence of machining defects can be detected at an early stage.

It is a front view which shows the structural example of the vibration table of this invention. It is a top view of the vibration table of FIG. It is a disassembled perspective view of the vibration table of FIG. It is a front view which shows another structural example of the vibration table of this invention. It is a front view which shows another structural example of the vibration table of this invention. It is a front view which shows another structural example of the vibration table of this invention. It is a partially notched perspective view which shows another structural example of the vibration table of this invention. It is a partially notched perspective view which shows another structural example of the vibration table of this invention. It is a partially notched perspective view which shows another structural example of the vibration table of this invention. It is a partially notched perspective view which shows another structural example of the vibration table of this invention. It is a perspective view which shows another structural example of the vibration table of this invention. It is a front view which shows another structural example of the vibration table of this invention. It is a top view of the vibration table of FIG. It is a front view which shows another structural example of the vibration table of this invention. It is a top view of the vibration table of FIG. It is a front view which shows another structural example of the vibration table of this invention. It is a top view of the vibration table of FIG. It is a front view which shows another structural example of the vibration table of this invention. It is a top view of the vibration table of FIG. It is a perspective view which shows another structural example of the vibration table of this invention. It is an electric circuit block diagram which shows the structural example of the drive device of the bolt fastening Langevin type ultrasonic transducer | vibrator with which the vibration table of this invention is provided.

Explanation of symbols

10, 40, 50, 60 Vibration table 11 Rigid base 12 Rigid three-dimensional frame 12a Spacer 12b Support plate 13, 43, 53, 63 Bolt tightened Langevin type ultrasonic transducer 13a Top of bolt tightened Langevin type ultrasonic transducer Surfaces 14a, 14b, 14c, 14d Piezoelectric vibrator plates 15a, 15b Metal members 16 Bolts 18a, 18b Arrows indicating the polarization direction of the piezoelectric bodies included in the piezoelectric vibrator plates 19 AC power supplies 45a, 45b Metal members 55a, 55b Metal members 65a , 65b Metal members 70, 80, 90, 100, 110 Vibration tables 72, 82, 92, 102, 112 Rigid three-dimensional frames 72a, 82a, 92a, 112a Spacers 72b, 92b, 102b, 112b Support plates 73, 83, 93, 103, 113 Bolt tightened Langevin type ultrasonic Lever 75a, 75b Metal member 85a, 85b Metal member 95a, 95b Metal member 105a, 105b Metal member 115a, 115b Metal member 120 Vibration table 121 Rigid base 122 Rigid three-dimensional frame 122a Spacer 122b Support plate 123 Bolt tightening Langevin type Ultrasonic vibrator 123a Top surface 125a, 125b of bolt tightening Langevin type ultrasonic vibrator 127 Metal member 127 Strut 140, 160, 180 Vibration table 141, 181, 201 Rigid base 167 Resin material 168, 188 Frame 183 Bolt tightening Langevin Type ultrasonic transducer 183a Top surface 185a, 185b of bolted Langevin type ultrasonic transducer Metal member 200 Vibration table 206 Bolt for connecting rigid plate 207 Joint rigid plate 211 Driving device 2 2 PLL (Phase-locked loop) circuit 213 driver circuit 214 matching circuit 215 voltage / current detecting circuit 216 phase circuit 217 power control unit 218 the frequency control block 219 the power control block 222 the central processing unit (CPU: central processing unit)
223 storage means 224 display means

Claims (17)

  Rigid base, rigid three-dimensional frame fixed on the base, and bolt tightening supported and fixed to the rigid three-dimensional frame at a position where the top surface is a plane and becomes a node of vibration to be generated A vibration table consisting of a Langevin type ultrasonic transducer.   The rigid three-dimensional frame is composed of a spacer fixed to the base and a planar support plate connected to the upper portion of the spacer, and a bolted Langevin type ultrasonic transducer includes the support plate and the piezoelectric transducer plate. 2. The vibration table according to claim 1, which is a Langevin type ultrasonic transducer formed by tightening the laminated body with a metal member disposed on each of the upper side and the lower side with a bolt.   The vibration table according to claim 2, wherein the area of the top surface of the upper metal member is 1.1 times or more and 8.0 times or less of the area of the upper surface of the piezoelectric vibrator plate.   The vibration table according to claim 3, wherein an area of the bottom surface of the upper metal member is not less than an area of the upper surface of the piezoelectric vibrator plate and not more than an area of the top surface of the upper metal member.   3. The vibration table according to claim 2, wherein the laminated body includes a support plate and an even number of piezoelectric vibrator plates arranged on the upper surface or the lower surface of the support plate.   3. The vibration table according to claim 2, wherein the laminated body includes a support plate and an even number of piezoelectric vibrator plates arranged to overlap each of an upper surface and a lower surface of the support plate.   The vibration table according to claim 1, wherein a rigid plate is fixed to a top surface of the bolted Langevin type ultrasonic transducer.   A rigid base, a plurality of rigid three-dimensional frames fixed in parallel on the base, and a single top of each of the rigid three-dimensional frames at a position where the top surface is a plane and becomes a node of generated vibration It consists of multiple identical bolted Langevin type ultrasonic transducers that are supported and fixed one by one, and the position of the multiple bolted Langevin type ultrasonic transducers is adjusted so that their top surfaces are on the same plane Vibration table.   Each rigid three-dimensional frame is composed of a spacer fixed to the base and a planar support plate connected to the upper portion of the spacer. The sound wave vibrator is a Langevin type ultrasonic vibrator formed by fastening a laminated body of the support plate and the piezoelectric vibrator plate together with a metal member disposed on each of the upper side and the lower side with a bolt. Vibration table.   The area of the top surface of the upper metal member of each bolted Langevin type ultrasonic transducer is 1.1 to 8.0 times the area of the upper surface of the piezoelectric transducer plate. Vibration table.   The area of the bottom surface of the upper metal member of each bolted Langevin type ultrasonic transducer is not less than the area of the upper surface of the piezoelectric transducer plate and not more than the area of the top surface of the upper metal member. Vibration table.   10. The vibration according to claim 9, wherein each laminate of bolted Langevin type ultrasonic vibrators comprises a support plate and an even number of piezoelectric vibrator plates arranged on the upper surface or the lower surface of the support plate. table.   The laminated body of each bolted Langevin type ultrasonic transducer is composed of a support plate and an even number of piezoelectric transducer plates arranged on the upper surface and the lower surface of the support plate, respectively. Vibration table.   The vibration table according to claim 8, wherein a rigid plate is fixed to a top surface of each bolted Langevin type ultrasonic transducer.   The vibration table according to claim 14, wherein the rigid plates fixed to the respective bolted Langevin type ultrasonic transducers are connected to each other at their side surfaces to be integrated to form a connected rigid plate.   The vibration table according to claim 8, wherein each bolted Langevin type ultrasonic transducer is provided with a drive device that applies an AC voltage having a frequency corresponding to the resonance frequency of each bolted Langevin type ultrasonic transducer. . A workpiece to be processed larger than the area of the top surface of one bolt-clamped Langevin type ultrasonic transducer is arranged on the vibration table according to claim 8, and at least a bolt-clamped Langevin type ultrasonic vibration in contact with the workpiece. A machining method of machining an object to be processed while applying the ultrasonic vibration to the object to be processed by generating ultrasonic vibration by a child.

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