JP2002355726A - Ultrasonic vibrating table device and its control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic vibrating table improving machining accuracy by uniformly vibrating the whole table, and moreover enlarging table area. SOLUTION: This table device that can fix a workpiece 12 mounted to a machine tool and machined, has an ultrasonic vibrating device 3 fixed into a casing 8 and vertically vibrating; a vibrating table 1 with its lower side intermediate part fixed to the upper end part of the ultrasonic vibrating device 3; and a guide member 5 projected downward from the outside lower part of the vibrating table 1 and inserted into a guide recessed part 13 formed outside the ultrasonic vibrating device 3 of the casing 8, to guide in the vertical direction while restricting the lateral movement of the vibrating table 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for processing, cutting, grinding, lapping, and the like of ultra-fine diameters of metals such as ceramics and cemented carbide, and provides an ultrasonic vibration table apparatus for applying ultrasonic vibration to a workpiece for processing. And its control method.

[0002]

2. Description of the Related Art Conventionally, when processing a material having poor workability such as fine ceramics, an ultrasonic processing apparatus has been used. For example, in Japanese Patent Application Laid-Open No. Hei 7-136818, a tool is attached to an ultrasonic unit which is cantilevered at a position above a processing table via a holding means, and the workpiece is fixed on the processing table by the tool. Discloses a processing apparatus for performing perforation.

[0003] Also, JP-A-7-30137 discloses that
As shown in FIG. 5, three or more piezoelectric elements 70
A vibration table device 75 is provided in which a vibration plate 71 is provided via a thin plate 72 and a table 73 is provided above the vibration plate 71 via a thin metal plate 72. The outer end of the sheet metal 72 is fixed to a base 74 via an extension member 76. If the table 73 vibrates in the horizontal direction, for example, when performing a drilling operation with a drill, the drilling diameter increases and the machining accuracy deteriorates, so that it was necessary to regulate this. The vibration table device 75 has a structure in which the table 73 is vibrated by the piezoelectric element 70 via the vibration plate 71. At this time, the vibration in the horizontal direction is reduced by the thin plate metal 72 whose outer end is fixed to the base. The table 73 is restricted so as to vibrate up and down.

[0004]

However, since the conventional processing apparatus has an ultrasonic unit provided on the tool side, it is difficult to remove the ultrasonic unit from the processing apparatus, and it can be used only as a dedicated ultrasonic processing machine. Did not. In addition, when the ultrasonic unit provided at the tip of the holding unit is vibrated up and down, the tool vibrates in a direction in which the tool rotates around the base of the holding unit that supports the ultrasonic unit in a cantilever manner, which affects processing accuracy. Was given. Furthermore, the size of the head of the processing apparatus has increased, and the balance has been poor.

The vibration table 73 uses a thin metal plate 72 to suppress horizontal vibration of the table. However, when the vibration table 73 is going to vibrate, the thin metal plate 72 is fixed with its both ends fixed. An attempt is made to deform the central portion into an arc-shaped cross section that projects vertically. Therefore, in the vicinity of both ends of the vibration table 73, the direction of vibration is shifted from the vertical direction, and the processing accuracy and the processing efficiency in the central part and the peripheral part of the vibration table 73 are deteriorated. further,
Sheet metal 7 fixed to base 74 via extension member 76
Since the vibration table 73 is provided inside the second table 2, there is also a disadvantage that the workable range of the vibration table 73 is reduced. Further, since the vibration table 73 is cylindrical, it is difficult to determine the mounting reference and it is difficult to fix the work to the apparatus.

When a tool of a machine tool comes into contact with a workpiece or separates from the workpiece, the tool is vibrated by ultrasonic waves, so that the tool is repelled by the workpiece, resulting in poor machining accuracy and flaws. Occurred. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides an ultrasonic vibration table capable of uniformly vibrating the entire table to improve processing accuracy, further increasing the table area, and improving processing accuracy. Aim.

[0007]

In order to solve the above problems, an ultrasonic vibration table device according to the present invention is a table device capable of fixing a work to be machined and mounted on a machine tool, wherein the table device is fixed to a casing. An ultrasonic vibrating device that vibrates up and down, a vibration table having a lower intermediate portion fixed to an upper end portion of the ultrasonic vibrating device, and an ultrasonic vibration device that protrudes downward from an outer lower portion of the vibration table, A guide member which is inserted into a guide recess formed outside the vibrating device and guides the vibration table in a vertical direction while restricting lateral movement of the vibration table.

[0008] The machine tool includes, for example, all devices having a mechanism for fixing a work such as cutting, grinding, lapping, and the like. For example, an ultrasonic vibration device that can generate a frequency of 20,000 Hz or more and has a horn that amplifies the frequency is used. As the guide member, for example, a plurality of guide members formed in a column shape can be used, and a guide member formed in a plate shape or a cylindrical shape surrounding an ultrasonic vibration device can be used. Further, a bush, a rail member, or the like that is paired with the guide member can be used.

Since the vibration table vibrated up and down by the ultrasonic vibration device is guided by the guide member and the guide recess, it can be freely moved up and down, and the vibration is not partially suppressed. Therefore, processing can be performed with high accuracy. Further, since the guide member is provided at the lower portion on the outside of the vibration table, the vibration table can be formed in the same size as the casing or larger than the casing in plan view without limiting the size of the vibration table.

It is also possible that the vibration table is formed in a rectangular shape in a plan view and the casing substantially overlaps the outer shape in a plan view. Substantially polymerization refers to forming substantially the same size.For example, a plurality of ultrasonic vibration devices can be arranged so that casings are in contact with each other. , Contact, or with a small gap. With this configuration, the workpiece can be easily positioned. Further, a plurality of ultrasonic vibration table devices can be arranged and used without gaps.

Further, the guide member is formed in a round bar shape and provided at each of four corners of the vibration table,
It is also possible to fit a cylindrical guide bush into which the guide member is inserted into the guide recess. With such a configuration, since the guide member can be provided at the corner portion avoiding the ultrasonic vibration device having a circular cross section, the device can be formed compact. Further, since the guide member is supported by the guide bush, the sliding resistance can be reduced, the vertical vibration can be performed smoothly, and the lateral gap can be reduced to reliably prevent the lateral movement.

Further, in the control method of the ultrasonic vibration table device according to the present invention, an ultrasonic vibration device fixed to a casing and vibrating up and down, and a lower intermediate portion fixed to an upper end portion of the ultrasonic vibration device. A vibrating table, which protrudes downward from a lower outside of the vibrating table, and is inserted into a guiding recess formed outside the ultrasonic vibrating device of the casing, while restricting lateral movement of the vibrating table in the vertical direction. A guide method for controlling an ultrasonic vibration table device capable of fixing the work to be machined by being attached to a machine tool, wherein the tool of the machine tool contacts the work, and When the contact portion of the tool separates from the work, at least one of the vibration frequency and the amplitude of the ultrasonic vibration device is reduced.

[0013] The time when the tool comes into contact with the work means, for example, the time from when the tip of the drill comes into contact with the work until it reaches a predetermined depth and the machining is stabilized. Further, the time when the contact portion of the tool separates from the work means, for example, after the time when the tip of the drill starts to penetrate the work. With this configuration, vibration when the contact state between the work and the tool is not stable can be reduced, and the processing accuracy of the work can be improved.

[0014]

Embodiments of the present invention will be described below. FIG. 1 shows an ultrasonic vibration table apparatus 1 according to the present invention.
0 is a front sectional view, FIG. 2 is a plan view of the ultrasonic vibration table device 10, and FIG. 4 is an explanatory diagram showing a state where the ultrasonic vibration table device 10 is mounted on a machine tool. The ultrasonic vibration table device 10 is a table device which is attached to a bed 11 of a machine tool and can fix a work 12 to be processed. The left half of FIG. 1 is a diagram cut along a plane passing through the center of the ultrasonic vibration table device 10, and the right half is a diagram cut along a plane passing through the axis of the guide member 5.

The ultrasonic vibration table device 10 is fixed to a casing 8 made of aluminum via a rubber plate 4 for shielding, and vibrates up and down. A vibrating table 1 for fixing the work 12 by fixing a lower intermediate portion thereof;
And a guide member 5 projecting downward from the outer lower portion of the housing 8 and inserted into a guide recess 13 formed outside the ultrasonic vibration device 3 of the casing 8 to guide the vibration table 1 in a vertical direction while restricting lateral movement of the vibration table 1. Have.

The casing 8 is formed in a box shape opened upward, and a ring-shaped inner flange portion 14 protruding inward is formed at an upper inner peripheral portion. At a plurality of locations of the inner flange portion 14, female screw portions 15 penetrating vertically are formed. Iron back plate 9 provided on casing 8
Is detachably formed by a bolt member 16. Since the back plate 9 is made of iron, it can be fixed with a magnet.

Further, the side portion of the casing 8 is formed by being cut out of a solid material so as to have strength, and as shown in FIG. 4, it can be fixed on the bed 11 by sandwiching it with a vise 30. is there. The guide recess 13 has, for example, a depth of 40 to
It is a round hole of about 80 mm, and the lower diameter is 5-20 mm. The upper portion of the guide recess 13 is formed to have a larger diameter than the lower portion.
Are inserted and fixed. Further, a lower end of the guide recess 13 communicates with a liquid drain hole 21 formed in a side portion of the casing 8. The drain hole 21 allows the abrasive or cooling water which may flow into the guide recess 13 when the ultrasonic vibration table device 10 is used to be discharged.

The ultrasonic vibrating device 3 includes a cylindrical vibrator 17.
An outer flange portion 18 provided on the vibrator 17 and overlapping the inner flange portion 14 is provided at an intermediate position in the height direction, and a cylindrical portion having a smaller diameter than the vibrator 17 is provided above the outer flange portion 18. And a transmission horn 2 made of aluminum. The vibrator 17 has, for example, a diameter of 10 to 70 m.
m, and the transmission horn 2 has a diameter of 15 to 50 m.
m. The outer flange portion 18 of the ultrasonic vibration device 3 and the inner flange portion 14 of the casing 8 are fastened and fixed by bolt members 19 with the rubber plate 4 interposed therebetween.

The vibration table 1 is formed, for example, in a square having a side of about 50 to 200 mm in plan view and a thickness of about 5 to 15 mm. Female threads are formed at the center of the vibration table 1 and at the upper end of the transmission horn 2 of the ultrasonic vibration device 3, respectively. The contact surfaces of the vibration table 1 and the transmission horn 2 are bonded with an adhesive.
It is fastened and fixed by a bolt member 7. Note that one side of the casing 8 is also formed to have a length of about 50 to 200 mm, and the outer shapes of the casing 8 and the vibration table 1 substantially overlap when viewed in a plan view. Further, a clamp 23 capable of fixing the work 12 and a bolt member 24 for fastening the clamp are provided at two or more places on the upper portion of the vibration table 1. The table 1 is provided with a large number of mounting holes (not shown) vertically penetrating therethrough, and the position of the clamp can be changed according to the shape of the work.

The guide member 5 has a diameter of, for example, 5 to 20 m.
The vibration table 1 is formed in a round bar shape having a length of 40 to 100 mm, and extends below four corners of the vibration table 1, and is fixed by a bolt member 20 from above the vibration table 1. The length of the guide bush 6 is formed to be 2 to 3 times the diameter of the guide member 5, for example, 10 to 60 mm. By setting this range, it is possible to prevent the vibration table 1 from being tilted more than necessary and to prevent an increase in sliding resistance between the guide member 5 and the guide bush 6. The guide member 5 and the guide bush 6
Are formed, for example, with G6 and g6 tolerances in the JIS standard and an average surface roughness of 0.2 or less. Further, as the guide bush, it is possible to use a member that can guide the guide member in only one direction, such as a cross roller type bearing, in addition to the cylindrical one.

Next, a control method of the ultrasonic vibration table device 10 will be described. As shown in FIG. 3A, when the through hole 26 is formed in the work 25, the through hole 27 having a larger diameter than the through hole 26 is provided between the work 25 and the vibration table 1.
Is disposed in advance. Note that FIG.
In the graph shown in (B), the horizontal axis represents time, and the vertical axis represents the frequency generated by the ultrasonic vibration device 3. Further, t1 to t4 in the graph correspond to times when the tip of the drill 29 in FIG. 3A is at the positions P1 to P4, respectively.

When the machine tool used pierces the work 25, the vibration of the ultrasonic vibration device 3 is continued until the tip of the drill 29 contacts the work 25 (position P1) and reaches a predetermined depth (position P2). The number is, for example, 50 to 80 during normal operation.
%. And after reaching position P2,
The cutting is continued by increasing the frequency during normal operation. After the tip of the drill 29 has penetrated the work 25 (position P3), the frequency is again increased to 50 to 80 in the normal operation.
%, And after the tip of the drill 29 penetrates the work 25 and a through hole having a diameter equal to or larger than the diameter of the drill 29 is formed in the work 25 (position P4), the drill 29 is moved upward.
Pull it out above the work 25. That is, as shown in FIG. 3 (B), the frequency of the ultrasonic vibration device 3 is set at time t2,
It fluctuates when t3 is reached.

It is also possible to change the amplitude by changing the output of the ultrasonic vibration device simultaneously with or without changing the frequency. Further, the feed speed and the rotation speed of the drill 29 can be changed at the same timing. With this configuration, the processing accuracy of the work 25 can be improved, the load applied to the tool can be reduced, and the life of the tool can be extended. As described above, the ultrasonic vibration table device according to the present invention has been described.
The present invention is not limited to the above-described embodiment. For example, the guide recess may be formed with high precision so that the guide member is directly guided.

[0024]

As described above, according to the present invention, the following effects can be obtained. (1) Since the vibration table vibrated up and down by the ultrasonic vibration device is guided by the guide member and the guide concave portion, it has sufficient lateral rigidity and can maintain a free state only in the vertical direction, resulting in energy loss. Less is. Further, since vibration is not partially suppressed, processing can be performed with high accuracy. Further, since the guide member is provided at the lower portion on the outside of the vibration table, the vibration table can be formed in the same size as the casing or larger than the casing in plan view without limiting the size of the vibration table. (2) Further, since the vibration table is formed in a rectangular shape in plan view, the work can be easily positioned. (3) Further, since the guide member is formed in a round bar shape and is provided at each of the four corners of the vibration table, the guide member can be provided at the corner avoiding the ultrasonic vibration device having a circular cross section, The device can be made compact. Further, since the guide member is supported by the guide bush, the sliding resistance can be reduced, the vertical vibration can be performed smoothly, and the lateral gap can be reduced to reliably prevent the lateral movement. (4) When the tool of the machine tool comes into contact with the workpiece,
When the contact portion of the tool separates from the work, at least one of the vibration frequency and the amplitude of the ultrasonic vibration device is reduced, so that the vibration when the contact state between the work and the tool is unstable is reduced, and the work of the work is reduced. The machining accuracy can be improved and the tool life can be improved.

[Brief description of the drawings]

FIG. 1 is a front sectional view of an ultrasonic vibration table device according to an embodiment of the present invention.

FIG. 2 is a plan view of the ultrasonic vibration table device.

FIGS. 3A and 3B are a front cross-sectional view showing a perforated state of a work using the same ultrasonic vibration table device and a graph showing a change in frequency.

FIG. 4 is a partial front sectional view showing a state where the ultrasonic vibration table device is attached to a machine tool.

FIG. 5 is a vibration table device according to a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration table 2 Transmission horn 3 Ultrasonic vibration device 4 Rubber plate 5 Guide member 6 Guide bush 7 Bolt member 8 Casing 9 Back plate 10 Ultrasonic vibration table device 11 Bed 12 Work 13 Guiding recess 14 Inner flange 15 Female screw 16 Bolt member 17 Vibrator 18 Outer flange portion 19 Bolt member 20 Bolt member 21 Drain hole 23 Clamp 24 Bolt member 25 Work 26, 27 Through hole 28 Spacer 29 Drill 30 Vise

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C048 BB13 EE00 3C049 AA01 AB01 AB06 CA05 CB01 3C069 AA04 BA09 BB01 CA03 EA01 EA02 EA05 5D107 AA04 AA07 AA13 BB01 FF03

Claims (4)

[Claims] 1. An ultrasonic vibration device fixed to a casing and vibrating up and down, comprising: a table device capable of fixing a workpiece to be processed by being attached to a machine tool; A vibrating table having a lower intermediate portion fixed thereto; a vibrating table projecting downward from an outer lower portion of the vibrating table, being inserted into a guiding recess formed outside the ultrasonic vibrating device of the casing, and being laterally mounted on the vibration table. An ultrasonic vibration table device comprising: a guide member that guides up and down while restricting movement. 2. The ultrasonic vibration table device according to claim 1, wherein the vibration table is formed in a rectangular shape in plan view, and substantially overlaps the outer shape of the casing in plan view. 3. The guide member is formed in a round bar shape and is provided at each of four corners of the vibration table.
The ultrasonic vibration table device according to claim 2, wherein a cylindrical guide bush into which the guide member is inserted is fitted into the guide recess. 4. An ultrasonic vibration device fixed to a casing and vibrating up and down, a vibration table fixed to an upper end portion of the ultrasonic vibration device at a lower intermediate portion thereof, and from a lower outside of the vibration table. A guide member that projects downward and is inserted into a guide recess formed outside the ultrasonic vibration device of the casing and guides the vibration table vertically while restricting lateral movement of the vibration table. A method of controlling an ultrasonic vibration table device capable of fixing a workpiece to be processed, wherein a tool of the machine tool contacts the workpiece, and when a contact portion of the tool separates from the workpiece,
A method of controlling an ultrasonic vibration table device, wherein at least one of a frequency and an amplitude of the ultrasonic vibration device is reduced.