JP2003290719A - Large capacity ultrasonic wave composite vibrator - Google Patents

Large capacity ultrasonic wave composite vibrator

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Publication number
JP2003290719A
JP2003290719A JP2002132097A JP2002132097A JP2003290719A JP 2003290719 A JP2003290719 A JP 2003290719A JP 2002132097 A JP2002132097 A JP 2002132097A JP 2002132097 A JP2002132097 A JP 2002132097A JP 2003290719 A JP2003290719 A JP 2003290719A
Authority
JP
Japan
Prior art keywords
vibration
vibrating body
capacity
vibrating
composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002132097A
Other languages
Japanese (ja)
Inventor
Jiromaru Tsujino
次郎丸 辻野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsujino Jiromaru
Original Assignee
Tsujino Jiromaru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsujino Jiromaru filed Critical Tsujino Jiromaru
Priority to JP2002132097A priority Critical patent/JP2003290719A/en
Publication of JP2003290719A publication Critical patent/JP2003290719A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a large capacity ultrasonic composite vibrator which has rigidity as a composite vibrating body for various kinds of powerful ultrasonic waves. <P>SOLUTION: The n sets of BLTs (1, 1', 2, 2',...n, n') having the same properties are arranged at the outer circumference part of a disk vibration body 4 oppositely to each other and at regular intervals. Each opposite BLT is driven in an opposite phase mode. A phase between adjacent BLTs of each set is driven in a vibration mode to shift the phase by π/n. A vibration rod joined at the center of the disk vibration body is excited by a composite vibration output having a vibration capacity of n times of one set of BLT induced at the center of the disk vibration body 4. A plurality of vibrators are joined to further increase the vibration capacity. <P>COPYRIGHT: (C)2004,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、金属、プラスチッ
クス、セラミックス、電子部品等を振動加工(接合、切
削、研磨、塑性加工等)する超音波加工機、移動装置等
に用いられる大容量超音波複合振動装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic processing machine for vibration processing (bonding, cutting, polishing, plastic working, etc.) of metals, plastics, ceramics, electronic parts, etc. The present invention relates to a sound wave composite vibration device.

【0002】[0002]

【従来の技術】従来、超音波複合振動装置として特開平
11−87437に記載されたものが知られている。従
来技術は、直交する2個の駆動用縦振動子で複合曲げ振
動体を励振するものである。
2. Description of the Related Art Conventionally, as an ultrasonic composite vibration device, one disclosed in Japanese Patent Laid-Open No. 11-87437 has been known. The conventional technique excites a complex bending vibrating body with two orthogonal vertical driving oscillators.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、従来技
術では、2個の駆動用縦振動子による曲げ振動棒の励振
のため、大容量(大出力)の振動エネルギを提供するこ
とは不可能で、線径0.7mm以内のワイヤボンダとし
て応用範囲に限界があった。
However, in the prior art, it is impossible to provide a large capacity (large output) of vibration energy because the bending vibration rod is excited by the two driving vertical vibrators. There was a limit to the range of application as a wire bonder with a wire diameter of 0.7 mm or less.

【0004】 このため、ワイヤ以外の金属板のスポッ
ト接合や、シーム溶接、プラスチック接合、金属の塑性
加工等の超音波加工用に大容量の超音波複合振動装置が
切望されていた。
Therefore, a large-capacity ultrasonic compound vibration device has been earnestly desired for spot welding of metal plates other than wires, seam welding, plastic joining, ultrasonic machining such as plastic working of metal.

【0005】 本発明の課題は、振動体材料が剛性に富
み、振動損失の小な円盤振動体に超音波振動子を複数組
設置することにより、大容量の超音波複合振動装置を提
供することにある。
An object of the present invention is to provide a large-capacity ultrasonic composite vibration device by installing a plurality of sets of ultrasonic vibrators on a disk vibrating body in which a vibrating body material is rich in rigidity and vibration loss is small. It is in.

【0006】[0006]

【課題を解決するための手段】この課題を解決するため
に本発明は、円盤振動体外周部に互いに対向して逆相で
駆動する複数組の超音波振動子を等間隔に設置すること
によって、円盤振動体中心部がリサジュー軌跡を描く複
合振動を誘起することを見出してなされたものである。
In order to solve this problem, the present invention provides a plurality of sets of ultrasonic transducers, which are opposed to each other and are driven in reverse phase, at equal intervals on the outer peripheral portion of a disk vibrating body. It was made by finding that the central part of the disk vibrating body induces a complex vibration that draws a Lissajous locus.

【0007】 請求項1の発明は、中央部が振動ループ
となる円盤振動体の外周部に同一特性のボルト締めラン
ジュバン形超音波振動子(以下BLTと略称)をn組
(n≧2)対向して等間隔に設置し、それぞれ対向する
BLTは逆相モードで駆動し、各組の相隣るBLT間の
位相はπ/nづつ移相する振動モードで駆動することに
より、円盤振動体の中心部を複合振動する構造とした大
容量の超音波複合振動装置である。
According to the first aspect of the present invention, n sets (n ≧ 2) of bolted Langevin type ultrasonic transducers (hereinafter abbreviated as BLT) having the same characteristics are opposed to the outer periphery of the disk vibrating body having a vibration loop at the center. Then, the BLTs facing each other are driven in a reverse phase mode, and the phases between adjacent BLTs in each set are driven in a vibration mode in which the phase is shifted by π / n. This is a large-capacity ultrasonic composite vibration device having a structure in which the central part performs composite vibration.

【0008】 請求項2の発明は、請求項1の発明にお
いて更に、前記円盤振動体の中心部に複合曲げ振動モー
ドで振動する振動丸棒の振動の腹部を結合した構造とし
てなるようにしたものである。
According to a second aspect of the present invention, in addition to the first aspect of the present invention, a vibration antinode portion of a vibrating rod that vibrates in a complex bending vibration mode is coupled to the central portion of the disk vibrating body. Is.

【0009】[0009]

【作用】第1組のBLTが互いに逆相の縦振動で振動す
ると、同BLTと機械的に結合した円盤振動体は両BL
Tの軸心を結ぶ直径方向に励振される。第1組のBLT
からπ/n位相を遅らせて第1組の隣の第2組のBLT
を励振し、更に第2組からπ/n位相を遅らせて第2組
の隣の第3組のBLTを励振し、同様に第n組までBL
Tを励振する。
Operation When the first set of BLTs vibrate with the longitudinal vibrations of opposite phases, the disk vibrating body mechanically coupled to the BLTs of both BLs
It is excited in the diametrical direction connecting the axis of T. First set of BLT
To the second set of BLTs next to the first set by delaying the π / n phase from
And further delays the π / n phase from the second set to excite the BLT of the third set adjacent to the second set, and similarly, BL up to the nth set.
Excite T.

【0010】 円盤振動体はn組のBLTにより励振さ
れて、その中心部はリサジュー軌跡を画く複合振動を誘
起し、その振動出力はBLT単体の場合の2n倍の容量
となる。円盤振動体の中心に複合曲げ振動モードで振動
する振動丸棒の振動の腹部を結合することにより、同振
動丸棒の先端からBLT単体の場合の2n倍の大容量の
複合振動出力を得ることが可能となる。
The disk vibrating body is excited by n sets of BLTs, the central part thereof induces a composite vibration that draws a Lissajous locus, and the vibration output has a capacity of 2n times that of the BLT alone. By connecting the vibration antinode of the vibrating rod that vibrates in the compound bending vibration mode to the center of the disc vibrating body, a compound vibration output with a large capacity of 2n times that of a BLT unit can be obtained from the tip of the vibrating rod. Is possible.

【0011】 従って、この振動丸棒の先端に目的に応
じた超音波複合振動加工用の工具・スライダ等を装着す
ることにより、大容量の超音波複合振動加工機・移動装
置等を提供することが出来る。
Therefore, a large-capacity ultrasonic compound vibration machine, moving device, etc. are provided by mounting a tool, a slider, etc. for ultrasonic compound vibration processing according to the purpose on the tip of this vibrating rod. Can be done.

【0012】[0012]

【発明の実施の形態】図1は本発明の大容量の超音波複
合振動装置の原理を示すブロック図、図2は振動系の構
成例を示す外観図、図3は振動丸棒先端中心の振動モー
ドを示す実測図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing the principle of a large-capacity ultrasonic composite vibration device of the present invention, FIG. 2 is an external view showing a structural example of a vibration system, and FIG. It is an actual measurement figure which shows a vibration mode.

【0013】 図1に示すように、円盤振動体4の外周
部の3組(n=3)のBLT1、1’、2、2’、3、
3’を等間隔に配置してある。円盤中心部には図2に示
すように、複合曲げ振動モードで励振する振動丸棒5を
円盤振動体に垂直に結合してある。図2に示す振動系の
各部の結合は全て中心ボルト(図示せず)で締結する構
成のため剛性の高い構造となっている。各BLTは電歪
素子6を金属ブロックで挟持したボルト締めランジュバ
ン形構造となっていて、6個のBLTは振動特性の揃っ
たものを使用する。
As shown in FIG. 1, three sets (n = 3) of BLTs 1, 1 ′, 2, 2 ′, 3, on the outer peripheral portion of the disk vibrating body 4 are provided.
3'is arranged at equal intervals. As shown in FIG. 2, a vibrating rod 5 which is excited in the composite bending vibration mode is vertically connected to the disc vibrating body at the center of the disc. The connection of each part of the vibration system shown in FIG. 2 is a structure having high rigidity because all are connected by a central bolt (not shown). Each BLT has a bolted Langevin type structure in which the electrostrictive element 6 is sandwiched between metal blocks, and six BLTs having uniform vibration characteristics are used.

【0014】 対向する1組のBLT1,1’は、発振
器13、位相推移器付き電力増幅器10と出力トランス
7に接続されていて、電気信号は出力トランス7によっ
て互いに逆相で印加される。このため、BLT1が電気
信号によって伸張する弾性振動モード15のときは、B
LT1’は短縮する弾性振動モード16となる。この場
合、円盤振動体4の中心はBLT1からBLT1’の方
向に変位する。BLT1→円盤振動体4→BLT1’の
振動モードは14となり、円盤振動体と振動丸棒の結合
部中心はBLT1、1’の軸心方向に振動モード17と
なる。
The pair of BLTs 1, 1 ′ facing each other are connected to the oscillator 13, the power amplifier 10 with a phase shifter, and the output transformer 7, and electric signals are applied by the output transformer 7 in opposite phases to each other. Therefore, when the BLT1 is in the elastic vibration mode 15 that expands by an electric signal, B
LT1 'becomes the elastic vibration mode 16 which shortens. In this case, the center of the disk vibrating body 4 is displaced in the direction from BLT1 to BLT1 '. The vibration mode of BLT1 → disk vibrating body 4 → BLT1 ′ is 14, and the center of the joint between the disk vibrating body and the vibrating round bar is vibration mode 17 in the axial direction of BLT1, 1 ′.

【0015】 位相推移器付き電力増幅器11と出力ト
ランス8によるBLT1、1’の駆動よりπ/3位相を
遅らせてBLT2、2’を駆動し、続いて位相推移器付
き電力増幅器12と出力トランス9により更にπ/3位
相を遅らせてBLT3、3’を駆動する。
The phase shifter-equipped power amplifier 11 and the output transformer 8 drive the BLT 2, 2 ′ by delaying π / 3 phase from the driving of the BLT 1, 1 ′, and then the phase shifter-equipped power amplifier 12 and the output transformer 9 Drive the BLTs 3 and 3 ′ by further delaying the π / 3 phase.

【0016】 円盤振動体4の中心部は3組のBLTの
振動によるベクトル和となってリサージ軌跡を画く複合
振動を誘起する。
The central portion of the disk vibrating body 4 becomes a vector sum due to the vibrations of the three sets of BLTs, and induces a composite vibration that draws a litharge locus.

【0017】 従って振動丸棒5は、円盤振動体4に誘
起した複合振動によって励振され、その先端の振動モー
ドは図3の楕円振動となる。楕円振動軌跡は各BLTの
駆動電圧と共振周波数のわずかな差によって発生するも
ので、位相推移器付きの電力増幅器の各駆動電圧および
駆動位相を調整することにより円形にすることが出来
る。
Therefore, the vibrating rod 5 is excited by the composite vibration induced in the disc vibrating body 4, and the vibration mode at the tip thereof becomes the elliptical vibration in FIG. The elliptical vibration locus is generated by a slight difference between the drive voltage of each BLT and the resonance frequency, and can be made circular by adjusting each drive voltage and drive phase of the power amplifier with the phase shifter.

【0018】 図1で、円盤振動体4の材質を鉄鋼S4
5C(直径126mm、厚さ40mm)、各BLTの縦
共振周波数を27kHz(直径40mm)、振動丸棒5
の材質を鉄鋼S45C(直径40mm、長さ366m
m)とし、各BLTの駆動電圧を150Vrmsとした
場合、振動丸棒5先端の複合振動変位振幅 4.5μm
が得られた。
In FIG. 1, the material of the disk vibrating body 4 is steel S4.
5C (diameter 126 mm, thickness 40 mm), longitudinal resonance frequency of each BLT is 27 kHz (diameter 40 mm), vibration round bar 5
Is made of steel S45C (diameter 40 mm, length 366 m
m) and the drive voltage of each BLT is 150 Vrms, the composite vibration displacement amplitude of the vibrating rod 5 is 4.5 μm.
was gotten.

【0019】 本実施形態によれば、以下の作用があ
る。BLTの共振周波数に同調した発振器13の信号を
位相推移付き電力増幅器10、11、12で順次π/n
ずつ位相を推移して、出力信号を出力トランス7、8、
9に印加する。この信号は中間タップ付きトランス7、
8、9により互いに逆相モードの2信号となって各組の
BLTに印加される。
According to this embodiment, there are the following effects. The signal of the oscillator 13 tuned to the resonance frequency of the BLT is sequentially π / n in the power amplifiers 10, 11 and 12 with phase shift.
The output signal is output from the output transformers 7, 8 by shifting the phase by
9 is applied. This signal is a transformer with a center tap 7,
Two signals in the opposite phase mode are applied to each other by 8 and 9 and are applied to each set of BLTs.

【0020】 BLTは電気信号を機械的弾性振動に変
換し、円盤振動体4を駆動する。円盤振動体の中心は振
動の腹となって複合振動を誘起し、その振動出力はBL
T単体の6倍となる。
The BLT converts an electric signal into a mechanical elastic vibration and drives the disc vibrating body 4. The center of the disc vibrating body serves as an antinode of the vibration to induce the composite vibration, and the vibration output is BL.
6 times that of T alone.

【0021】 円盤振動体4の中心に結合した振動丸棒
5は、円盤振動体の中心の複合振動で励振され、その先
端は複合振動となって、出力はBLT単体の6倍となり
大容量の超音波複合振動装置が実現できる。
The vibrating rod 5 coupled to the center of the disc vibrating body 4 is excited by the composite vibration at the center of the disc vibrating body, and its tip becomes the composite vibration, and the output is 6 times as large as that of the BLT simple substance and has a large capacity. An ultrasonic compound vibration device can be realized.

【0022】 以上、本発明の実施の形態を図面により
詳述したが、本発明の具体的な構成はこの実施の形態に
限られるものではなく、本発明の要旨を逸脱しない範囲
の設計の変更があっても本発明に含まれる。例えば、円
盤振動体の縦振動節部で厚さを変える、または振動丸棒
の節面で直径を変える(段付き振動体等)ことにより振
動振幅を任意に設定可能である。
The embodiment of the present invention has been described in detail above with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and a design change is made within the scope not departing from the gist of the present invention. Even so, it is included in the present invention. For example, the vibration amplitude can be arbitrarily set by changing the thickness at the longitudinal vibration node of the disk vibrating body or changing the diameter at the node surface of the vibrating round bar (stepped vibrating body or the like).

【0023】 各BLTの設置位置は必ずしも等間隔で
ある必要はなく、適宜に設置位置を変更することもでき
る。
The installation positions of the BLTs do not necessarily have to be at equal intervals, and the installation positions can be changed appropriately.

【0024】 また、実施形態では互いに逆相モードで
駆動する1組のBLT用に中間タップ付きトランスを使
用したが、BLTを構成する電歪素子の分極方向を互い
に逆方向にすれば、電気信号は同相で印加することが可
能になり、中間タップ付きトランスは不要とすることが
できる。
In the embodiment, the transformer with the intermediate tap is used for one set of BLTs that are driven in the opposite phase mode, but if the polarization directions of the electrostrictive elements forming the BLTs are opposite to each other, an electric signal is generated. Can be applied in the same phase, and a transformer with an intermediate tap can be eliminated.

【0025】 更に、M個の外周部に多数のBLT振動
子を設置した円盤振動体を振動位相を合致させて振動丸
棒で縦続接合し、各円盤振動体のBLT振動子を並列に
駆動することにより、M倍の大容量の超音波複合振動装
置を構成することが可能である。
Further, disc vibrating bodies having a large number of BLT transducers installed on the outer periphery of M pieces are cascade-joined by vibrating round bars so that the vibration phases are matched, and the BLT transducers of each disc vibrating body are driven in parallel. As a result, it is possible to configure an M-times large capacity ultrasonic composite vibration device.

【0026】 また対向する各組の駆動位相を変えて円
盤振動体中心を振動ループおよび振動ノードとするよう
に駆動することにより、円盤中心部に設置した振動丸棒
を曲げ振動および縦振動で駆動することが可能で、振動
棒先端部の2次元、3次元の複合振動を実現できる。
Further, by changing the driving phase of each pair facing each other so that the center of the disk vibrating body serves as the vibration loop and the vibration node, the vibrating round bar installed at the center of the disk is driven by bending vibration and longitudinal vibration. It is possible to realize two-dimensional and three-dimensional compound vibration of the vibrating rod tip.

【0027】 また複合振動棒に多数のBLTを振動位
相を考慮して設置することにより大容量の複合振動源を
構成することも可能である。
It is also possible to construct a large-capacity composite vibration source by installing a large number of BLTs on the composite vibration rod in consideration of the vibration phase.

【0028】 これらの超音波複合振動源は、振動体の
適当な位置に設置した振動検出器の出力を用いる、また
は振動源の動アドミッタンスを検出して用いることによ
り共振周波数自動追尾型の帰還発振器を構成し、さらに
振動振幅・振動出力を一定に制御する構成にすることが
可能である。
These ultrasonic composite vibration sources use the output of a vibration detector installed at an appropriate position of the vibrating body, or detect and use the dynamic admittance of the vibration source to use a resonance frequency automatic tracking type feedback oscillator. Can be configured, and further, the vibration amplitude and the vibration output can be controlled to be constant.

【0029】 また各組のBLTの駆動周波数は必ずし
も同一である必要はなく、楕円・円形でなく包絡線が方
形・矩形の複合振動軌跡であっても接合などの目的に対
しては同様な効果が得られる。
The drive frequencies of the BLTs of the respective groups do not necessarily have to be the same, and even if the envelope is a complex vibration locus having a square / rectangular envelope instead of an elliptical / circular shape, a similar effect is obtained for the purpose of joining or the like. Is obtained.

【0030】[0030]

【発明の効果】以上のように本発明によれば、振動体の
剛性に富んだ大容量の超音波複合振動装置を得ることが
できる。
As described above, according to the present invention, it is possible to obtain a large-capacity ultrasonic composite vibrating device in which the vibrating body is rich in rigidity.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1は本発明の大容量の超音波複合振動装置の
原理を示すブロック図である。
FIG. 1 is a block diagram showing the principle of a large-capacity ultrasonic composite vibration device of the present invention.

【図2】図2は、本発明の大容量の超音波複合振動系の
構成を示す外観図である。
FIG. 2 is an external view showing a configuration of a large-capacity ultrasonic composite vibration system of the present invention.

【図3】図3は、本発明の大容量の超音波複合振動装置
の振動丸棒先端中心の振動モードを示す実測図である。
FIG. 3 is an actual measurement diagram showing a vibration mode at the center of the vibrating round bar tip of the large-capacity ultrasonic composite vibration device of the present invention.

【符号の説明】[Explanation of symbols]

1 1、1’、2、2’、3、3’ BLT 4 円盤振動体 5 振動丸棒 6 電歪素子 7、8,9 出力トランス 10、11、12 位相推移器付き電力増幅器 13 発振器 14 BLT1、1’による円盤振動体の振動モード 15、16、17 各部の振動方向を示す 18 振動丸棒5の先端の複合振動モード(振動軌跡) 11 1,1 ', 2,2', 3,3 'BLT 4 disk vibrator 5 vibration round bar 6 Electrostrictive element 7,8,9 output transformer Power amplifier with phase shifter 13 oscillators 14 Vibration mode of disk vibrating body by BLT1, 1 ' 15, 16, 17 Indicates the vibration direction of each part 18 Compound vibration mode (vibration locus) of the tip of the vibrating rod 5

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 中央が振動ループとなる円盤振動体の外
周部に同一特性のボルト締めランジュバン形超音波振動
子を2組以上、n組を対向して等間隔に設置し、それぞ
れ対向する超音波振動子は逆位相モードで駆動し、各組
の相隣る超音波振動子間の位相はπ/nずつ移相する振
動モードで駆動することにより、円盤振動体の中心部を
複合振動する構造としたことを特徴とした大容量複合振
動装置。
1. Two or more sets of bolted Langevin type ultrasonic transducers having the same characteristics are installed on the outer peripheral portion of a disk vibrating body having a vibration loop at the center, and n sets are opposed to each other at equal intervals. The ultrasonic transducers are driven in antiphase mode, and the ultrasonic transducers in each set are driven in a vibration mode in which the phase between adjacent ultrasonic transducers is shifted by π / n, so that the central portion of the disc vibrator vibrates in a complex manner. Large-capacity compound vibration device characterized by having a structure.
【請求項2】 前記円盤振動体の中心部に複合曲げ振動
モードで振動する振動丸棒の振動の腹部で結合した構造
としてなる請求項1に記載の大容量超音波複合振動装
置。
2. The large-capacity ultrasonic composite vibration device according to claim 1, wherein the disk vibrating body has a structure in which a central portion of the vibrating body is coupled to a vibration antinode of a vibrating rod vibrating in a composite bending vibration mode.
【請求項3】 前記円盤振動体を振動位相を合致させて
振動丸棒で縦続接合し、各円盤振動体の各組の超音波振
動子を並列または独立に駆動する構成とした大容量の超
音波複合振動装置。
3. A large-capacity ultrasonic transducer configured such that the disc vibrators are cascade-joined by vibrating round bars with their vibration phases matched and the ultrasonic transducers of each set of the disc vibrators are driven in parallel or independently. Sound wave compound vibration device.
JP2002132097A 2002-03-30 2002-03-30 Large capacity ultrasonic wave composite vibrator Pending JP2003290719A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002132097A JP2003290719A (en) 2002-03-30 2002-03-30 Large capacity ultrasonic wave composite vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002132097A JP2003290719A (en) 2002-03-30 2002-03-30 Large capacity ultrasonic wave composite vibrator

Publications (1)

Publication Number Publication Date
JP2003290719A true JP2003290719A (en) 2003-10-14

Family

ID=29244044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002132097A Pending JP2003290719A (en) 2002-03-30 2002-03-30 Large capacity ultrasonic wave composite vibrator

Country Status (1)

Country Link
JP (1) JP2003290719A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082060A (en) * 2004-09-17 2006-03-30 Jiromaru Tsujino Ultrasonic complex vibratory device
JP2014069274A (en) * 2012-09-28 2014-04-21 Fuji Industrial Co Ltd Torsion vibration device
JP2016068148A (en) * 2014-10-01 2016-05-09 株式会社アドバンストシステムズジャパン Metal joining device and joining method
CN109225790A (en) * 2018-10-30 2019-01-18 河南理工大学 Novel bending-twisting composite vibration ultrasonic cutting method and device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082060A (en) * 2004-09-17 2006-03-30 Jiromaru Tsujino Ultrasonic complex vibratory device
JP4624750B2 (en) * 2004-09-17 2011-02-02 次郎丸 辻野 Ultrasonic composite vibrator
JP2014069274A (en) * 2012-09-28 2014-04-21 Fuji Industrial Co Ltd Torsion vibration device
JP2016068148A (en) * 2014-10-01 2016-05-09 株式会社アドバンストシステムズジャパン Metal joining device and joining method
CN109225790A (en) * 2018-10-30 2019-01-18 河南理工大学 Novel bending-twisting composite vibration ultrasonic cutting method and device
CN109225790B (en) * 2018-10-30 2023-11-17 河南理工大学 Novel bending-torsion composite vibration ultrasonic cutting method and device

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