CN107044505B - Based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device - Google Patents
Based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device Download PDFInfo
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- CN107044505B CN107044505B CN201710418155.0A CN201710418155A CN107044505B CN 107044505 B CN107044505 B CN 107044505B CN 201710418155 A CN201710418155 A CN 201710418155A CN 107044505 B CN107044505 B CN 107044505B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/002—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion characterised by the control method or circuitry
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
- F16F7/1005—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass
- F16F7/1011—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass by electromagnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
- F16F7/1022—Vibration-dampers; Shock-absorbers using inertia effect the linear oscillation movement being converted into a rotational movement of the inertia member, e.g. using a pivoted mass
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- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Electromagnetism (AREA)
- Vibration Prevention Devices (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
The invention belongs to every micro- technical field of shaking；The device is put by the first order, second level pendulum and actuator form；First order pendulum is made of external support structure, the first quartz fibre, the first test quality and upper connector, second level pendulum is made of the first test quality, upper connector, compound pendulum wire, the second test quality and lower connector, and giant magnetostrictive material coating of the compound pendulum wire by the second quartz fibre and coated in the second quartz fibre periphery is constituted；Actuator is made of upper magnetizer, permanent magnet, driving coil, skeleton and lower magnetizer, and the surrounding of the central shaft of the skeleton is evenly distributed with multiple cooling chambers parallel with central shaft；The present invention can not only realize the technical purpose of active vibration isolation, and simplified, the highly integrated technical advantage with system, while improve the vibrating effect to low-frequency vibration, and also take into account temperature tender subject.
Description
Technical field
The invention belongs to every micro- technical field of shaking.
Background technology
In ultra precise measurement instrument field, such as scanning probe microscopy (SPM), atomic force microscope (AFM), holographic interference
Instrument and confocal microscope etc. have high measurement sensitivity, the precision scientific instrument of repeatability and uncertainty of measurement, in each field
In demand it is very big, but in the natural environment even the small vibration of amplitude-frequency can all interfere such precision instrument measurement spirit
Sensitivity, repeatability and uncertainty, i.e., with the increasingly raising of accuracy of instrument, the vibration noise of external environment is to accuracy of instrument
Influence it is increasing, inhibit ultralow frequency vibration interference signal in terms of, every micro- technology of shaking have become limitation accuracy of instrument into
The bottleneck that one step is promoted.If the dry systems in big science engineering, such as gravitational wave detection, dark matter detection, high-intensity magnetic field and pulse
Star is required to a good low vibration environment-guarantee at research etc..Its main difficulty is that measured signal is shaken relative to environment
Moving noise seems exceptionally weak, therefore the shadow of very high requirement, especially ground vibration is proposed to the isolation of ambient vibration
It rings.If lacking ultra-low frequency isolation system, the useful signal that gravitational wave detection instrument is received will be buried in noise,
Earth pulse noise must be effectively isolated.Ultralow frequency (0.1Hz or less) becomes the research in the above field every micro- technology of shaking
Hot and difficult issue.
With ultraprecise instrument the inhibition of ambient vibration noise is required it is higher and higher, single pendulum as it is simplest it is horizontal every
Vibrating system, the anti-vibration performance of system can be increased by increasing pendulum length L, but since the suspension wire of single pendulum has certain quality, one
Determine under tension, if by lateral disturbance, just to will produce so-called string mould resonance.String mould, which resonates, limits the length of single pendulum.To make
It has better anti-vibration performance (Tunable inverse pendulum vibration isolation in low frequency
System. U.S. Patent Publication No.：US7543791B2).Single pendulum and spring are bonded inverted pendulum and put component by this method, symmetrically
It is distributed in the both sides of rectangular vibration-isolating platform, simple in structure, reliable operation, need not consuming extra power, to improve its vibration isolation
Can, this method has problems in that：Only with passive vibration isolation system, it is difficult to further increase low frequency vibration isolation performance.
In gravitational wave detection, single pendulum is laser interference gravitational wave as simplest horizontal vibrating isolation system
(LIGO) indispensable part in.To make it that there is better anti-vibration performance in terms of ultralow frequency (0.1Hz or less), the U.S.
Advanced LIGO projects use the compound pendulum vibrating isolation system of level Four, referring to document (Advanced ligo [J] .Classical
and quantum gravity)；The VIRGO (brachium is the laser interferometer gravitational wave of 3km) of Italy has developed 9
The compound pendulum vibrating isolation system SA (Super-Attenuator) of grade, referring to document (First results on the electronic
cooling of the Pisa seismic noise super-attenuator for gravitational wave
detection)、(First results from the Pisa seis-mic noise super-attenuator for
low frequency gravitational wave detection).Above method is connected by using multistage single pendulum and master
The principle of dynamic vibration isolation, further improves low frequency vibration isolation performance.However, these methods there is problems：The first, actuator
With sensor device in the suspension pendulum first order and the test quality of second level single pendulum, it is difficult to its bottom test quality (by every
Shake element) quickly and effectively buffering vibration isolation is carried out, and due to installing multiple sensors and actuator, constructional device is complicated, to preliminary
Installation and debugging dependence is very strong.Some low frequencies such as sensor the second, is placed in test quality, while thermal noise can be introduced to make an uproar
Sound.
In conclusion active control, improves level of integrated system, and it is that this field urgently solves to improve low-frequency vibration vibration isolating effect
Key technical problem certainly.
Invention content
In view of the above-mentioned problems, the invention discloses it is a kind of based on ultra-magnetic telescopic and quartzy cycloid Compound cooling mechanism every
Micro- vibrating device, core include two-stage pendulum structure, integrate perception vibration and the compound pendulum wire of compensation vibration, and for changing
The actuator of compound pendulum wire magnetic field environment can not only realize the technical purpose of active vibration isolation, and have under structure of the invention
There are system simplification, highly integrated technical advantage, while improving the vibrating effect to low-frequency vibration.
The object of the present invention is achieved like this：
It is put by first order pendulum, the second level every micro- vibrating device with quartzy cycloid Compound cooling mechanism based on ultra-magnetic telescopic
It is formed with actuator；
The first order pendulum is made of external support structure, the first quartz fibre, the first test quality and upper connector, external
It is connected by the first quartz fibre between support construction and upper connector, upper connector is symmetrically distributed in the two of the first test quality
Side；
The second level pendulum is by the first test quality, upper connector, compound pendulum wire, the second test quality and lower connector structure
At the second test quality is used as by vibration isolation element, is connected by compound pendulum wire between upper connector and lower connector, lower connector
The both sides of the second test quality are symmetrically distributed in, the compound pendulum wire is by the second quartz fibre and coated in the second quartz fibre periphery
Giant magnetostrictive material coating is constituted, and vibration signal is passed to controller by compound pendulum wire for measuring extraneous vibration；
The actuator is made of upper magnetizer, permanent magnet, driving coil, skeleton and lower magnetizer, during the skeleton is
Between there is through-hole, section to be the structure of I-shaped, upper magnetizer is located at the top of skeleton, and lower magnetizer is located at skeleton bottom, drive
Moving winding is nested in the outer shroud of skeleton, and the electric current that is passed through of driving coil is adjusted according to the vibration signal that controller obtains, and is
Compound pendulum wire provides driving magnetic field, permanent magnet be nested in magnetizer, driving coil, skeleton and lower magnetizer outer shroud, be multiple
It closes pendulum wire and bias magnetic field is provided；The surrounding of the central shaft of the skeleton is evenly distributed with multiple cooling chambers parallel with central shaft,
The through-hole for exposing cooling chamber is provided among the upper magnetizer and lower magnetizer；
The first order is put and second level pendulum series connection, shares the first test quality and upper connector；Compound pendulum wire is from actuator
Center passes through.
It is above-mentioned based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device, the number of the cooling chamber
It it is 6-8, and the distance away from central shaft is 2-3mm.
Above based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device, first quartz fibre
Four are shared, each upper connector is connect by two first quartz fibres with external support structure.
Above based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device, the compound pendulum wire is total
There are four, each lower connector is connect by two compound pendulum wires with upper connector.
Advantageous effect：
The first, in compound pendulum wire, due to being provided with giant magnetostrictive material coating in the second quartz fibre periphery, using super
The ultra-magnetic telescopic effect of magnetostriction materials, i.e., the changed effect of size under magnetic fields make compound pendulum wire collection sense
Know vibration and compensation vibration, in the external world there are when vibration interference, by changing the electric current that is passed through of driving coil, changes super
Magnetic field residing for magnetostriction materials coating, and then keep giant magnetostrictive material coating generation one opposite with extraneous vibration direction
Strain, compensation extraneous vibration realize the technical purpose of active vibration isolation to reduce interference of the extraneous vibration to system.
The second, the present invention is based on ultra-magnetic telescopic and quartzy cycloid recombination mechanisms every in micro- vibrating device, since collection is felt
It includes the second quartz fibre and the super magnetic coated in the second quartz fibre periphery to know the compound pendulum wire of vibration and compensation vibration only
Telescopic material coating is caused, it is achieved that system is simplified, collection is highly integrated with active actuating from sensing.
Third, the present invention is based on ultra-magnetic telescopic and quartzy cycloid recombination mechanisms every in micro- vibrating device, due to sensing
Device and actuator are not directly installed in the first test quality and the second test quality, therefore can solve sensor and actuator
Under this traditional structure of test quality introduce low-frequency noise the problem of, pass through reduce noise source so that the present invention for
Low-frequency vibration has better vibration isolating effect.
4th, the present invention is based on ultra-magnetic telescopic and quartzy cycloid recombination mechanisms every in micro- vibrating device, due to skeleton
Central shaft surrounding, be evenly distributed with multiple cooling chambers parallel with central shaft, setting among upper magnetizer and lower magnetizer
It is useful for exposing the through-hole of cooling chamber, therefore can be passed through constant temperature coolant liquid while active vibration isolation to cooling chamber, not only may be used
Directly to ensure that actuator is in normal temperature state, the temperature drift in magnetic field is effectively avoided, and can ensure compound pendulum wire indirectly
In normal temperature state, temperature drift when compound pendulum wire volume change is effectively avoided, and then reduces perception vibration and compensation vibration
When temperature drift, improve vibration isolating effect.
Description of the drawings
Fig. 1 is the structural schematic diagram every micro- vibrating device of ultra-magnetic telescopic of the present invention and quartzy cycloid Compound cooling mechanism.
The structure and the location diagram between compound pendulum wire that Fig. 2 is actuator.
Fig. 3 is the structural schematic diagram of skeleton.
In figure：1 external support structure, 2 first quartz fibres, 3 first test qualities, 4 upper connectors, 5 compound pendulum wires, 51
Two quartz fibres, 52 giant magnetostrictive material coatings, 6 second test qualities, 7 times connectors, 8 actuators, magnetizer, 82 are forever on 81
Magnet, 83 driving coils, 84 skeletons, 85 times magnetizers, 86 cooling chambers.
Specific embodiment
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
The present embodiment based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device, structural schematic diagram
As shown in Figure 1.This based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device by first order pendulum, the second level
Pendulum and actuator 8 form；
The first order pendulum is made of external support structure 1, the first quartz fibre 2, the first test quality 3 and upper connector 4,
It is connected by the first quartz fibre 2 between external support structure 1 and upper connector 4, upper connector 4 is symmetrically distributed in the first test matter
The both sides of amount 3；
The second level pendulum is by the first test quality 3, upper connector 4, compound pendulum wire 5, the second test quality 6 and lower connection
Part 7 is constituted, and the second test quality 6 is connected between upper connector 4 and lower connector 7 by compound pendulum wire 5 as by vibration isolation element
It connects, lower connector 7 is symmetrically distributed in the both sides of the second test quality 6, and the compound pendulum wire 5 is by the second quartz fibre 51 and is coated in
The giant magnetostrictive material coating 52 of second quartz fibre, 51 periphery is constituted, and compound pendulum wire 5 believes vibration for measuring extraneous vibration
Number pass to controller；
The actuator 8 is made of upper magnetizer 81, permanent magnet 82, driving coil 83, skeleton 84 and lower magnetizer 85, institute
Skeleton 84 is stated to be intermediate with through-hole, section is the structure of I-shaped, and upper magnetizer 81 is located at 84 top of skeleton, lower magnetizer
85 are located at 84 bottom of skeleton, and driving coil 83 is nested in the outer shroud of skeleton 84, and driving coil 83 is passed through electric current according to controller
Obtained vibration signal is adjusted, and provides driving magnetic field for compound pendulum wire 5, permanent magnet 82 is nested in magnetizer 81, driving
The outer shroud of coil 83, skeleton 84 and lower magnetizer 85 provides bias magnetic field for compound pendulum wire 5；The central shaft of the skeleton 84
Surrounding is evenly distributed with multiple cooling chambers 86 parallel with central shaft, is arranged among the upper magnetizer 81 and lower magnetizer 85
It is useful for exposing the through-hole of cooling chamber 86；The structure of actuator 8 and position relationship between compound pendulum wire 5 as shown in Fig. 2,
The structural schematic diagram of skeleton 84 is as shown in Figure 3；
The first order is put and second level pendulum series connection, shares the first test quality 3 and upper connector 4；Compound pendulum wire 5 is from actuator
8 center passes through.
In the present embodiment, the number of the cooling chamber 86 is 8, and the distance away from central shaft is 3mm；Described first
Quartz fibre 2 shares four, and each upper connector 4 is connect by two first quartz fibres 2 with external support structure 1；Described answers
It closes pendulum wire 5 and shares four, each lower connector 7 is connect by two compound pendulum wires 5 with upper connector 4.
The present invention is based on ultra-magnetic telescopics and the operation principle every micro- vibrating device of quartzy cycloid Compound cooling mechanism to be：It is multiple
It closes pendulum wire 5 and perceives extraneous vibration, vibration signal is passed into controller, controller is actively controlled according to collected vibration signal
The driving magnetic field for being passed through electric current, changing around giant magnetostrictive material coating 52 of driving coil 83 processed, utilizes ultra-magnetic telescopic
The ultra-magnetic telescopic effect of material makes compound pendulum wire 5 generate a strain opposite with extraneous vibration direction, to reduce the external world
The interference to system is vibrated, realizes the technical purpose of active vibration isolation.While active vibration isolation, it is cold to be passed through constant temperature to cooling chamber 86
But liquid not only can directly ensure that actuator 8 is in normal temperature state, effectively avoids the temperature drift in magnetic field, and can be indirect
Ensure that compound pendulum wire 5 is in normal temperature state, effectively avoids temperature drift when compound 5 volume change of pendulum wire, and then reduce perception
Temperature drift when vibration and compensation vibration improves vibration isolating effect.
Claims (4)
1. based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device, which is characterized in that put by the first order,
The second level is put and actuator (8) composition；
The first order pendulum is by external support structure (1), the first quartz fibre (2), the first test quality (3) and upper connector (4)
It constitutes, is connect by the first quartz fibre (2) between external support structure (1) and upper connector (4), upper connector (4) symmetrically divides
Both sides of the cloth in the first test quality (3)；
Second level pendulum by the first test quality (3), upper connector (4), compound pendulum wire (5), the second test quality (6) and under
Connector (7) is constituted, and the second test quality (6) passes through as by vibration isolation element between upper connector (4) and lower connector (7)
The connection of compound pendulum wire (5), lower connector (7) are symmetrically distributed in the both sides of the second test quality (6), the compound pendulum wire (5) by
Second quartz fibre (51) and the giant magnetostrictive material coating (52) for being coated in the second quartz fibre (51) periphery are constituted, compound pendulum wire
(5) it is used to measure extraneous vibration, vibration signal is passed into controller；
The actuator (8) is by upper magnetizer (81), permanent magnet (82), driving coil (83), skeleton (84) and lower magnetizer
(85) it constitutes, the skeleton (84) is to be intermediate with through-hole, and section is the structure of I-shaped, and upper magnetizer (81) is located at skeleton
(84) top, lower magnetizer (85) are located at skeleton (84) bottom, and driving coil (83) is nested in the outer shroud of skeleton (84), drives line
The electric current that is passed through of circle (83) is adjusted according to the vibration signal that controller obtains, and provides driving magnetic field for compound pendulum wire (5), forever
Magnet (82) be nested in magnetizer (81), driving coil (83), skeleton (84) and lower magnetizer (85) outer shroud, be compound pendulum
Silk (5) provides bias magnetic field；The surrounding of the central shaft of the skeleton (84), is evenly distributed with multiple coolings parallel with central shaft
The through-hole for exposing cooling chamber (86) is provided among chamber (86), the upper magnetizer (81) and lower magnetizer (85)；
The first order is put and second level pendulum series connection, shares the first test quality (3) and upper connector (4)；Compound pendulum wire (5) is from actuating
The center of device (8) passes through.
2. it is according to claim 1 based on ultra-magnetic telescopic and quartzy cycloid Compound cooling mechanism every micro- vibrating device,
It is characterized in that, the number of the cooling chamber (86) is 6-8, and the distance away from central shaft is 2-3mm.
3. it is according to claim 1 or 2 based on ultra-magnetic telescopic and quartzy cycloid Compound cooling mechanism every micro- vibrating device,
It is characterized in that, first quartz fibre (2) shares four, each upper connector (4) by two first quartz fibres (2) with
External support structure (1) connects.
4. it is according to claim 1 or 2 based on ultra-magnetic telescopic and quartzy cycloid Compound cooling mechanism every micro- vibrating device,
It is characterized in that, the compound pendulum wire (5) shares four, connector (7) is each descended to pass through two compound pendulum wires (5) and upper company
Fitting (4) connects.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710418155.0A CN107044505B (en) | 2017-06-06 | 2017-06-06 | Based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device |
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| CN201710418155.0A CN107044505B (en) | 2017-06-06 | 2017-06-06 | Based on ultra-magnetic telescopic with quartzy cycloid Compound cooling mechanism every micro- vibrating device |
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| CN107044505B true CN107044505B (en) | 2018-10-30 |
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| CN109559731B (en) * | 2017-09-25 | 2023-11-24 | 佛山市顺德区美的电热电器制造有限公司 | Magnetostriction noise reduction assembly |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1724892A (en) * | 2005-05-20 | 2006-01-25 | 上海微电子装备有限公司 | Precision vibration damping and locating device |
| EP1845281A1 (en) * | 2006-04-11 | 2007-10-17 | Integrated Dynamics Engineering GmbH | Active vibration isolating system |
| CN101441104A (en) * | 2007-11-21 | 2009-05-27 | 中国科学院半导体研究所 | Electromagnetic damping optical fiber vibration sensor |
| CN101718327A (en) * | 2009-11-26 | 2010-06-02 | 重庆师范大学 | Precise vibration isolation system |
| CN102901556A (en) * | 2012-10-09 | 2013-01-30 | 北京航空航天大学 | Magnetic suspension type ultra-low-frequency vibration sensor |
| CN203838353U (en) * | 2014-05-21 | 2014-09-17 | 哈尔滨工程大学 | Two-dimensional compound-pendulum tilting low-frequency vibration-isolation device based on capacitive sensing |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5660255A (en) * | 1994-04-04 | 1997-08-26 | Applied Power, Inc. | Stiff actuator active vibration isolation system |
| US20030168295A1 (en) * | 2002-02-12 | 2003-09-11 | Zhixiu Han | Active vibration isolation system |
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2017
- 2017-06-06 CN CN201710418155.0A patent/CN107044505B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1724892A (en) * | 2005-05-20 | 2006-01-25 | 上海微电子装备有限公司 | Precision vibration damping and locating device |
| EP1845281A1 (en) * | 2006-04-11 | 2007-10-17 | Integrated Dynamics Engineering GmbH | Active vibration isolating system |
| CN101441104A (en) * | 2007-11-21 | 2009-05-27 | 中国科学院半导体研究所 | Electromagnetic damping optical fiber vibration sensor |
| CN101718327A (en) * | 2009-11-26 | 2010-06-02 | 重庆师范大学 | Precise vibration isolation system |
| CN102901556A (en) * | 2012-10-09 | 2013-01-30 | 北京航空航天大学 | Magnetic suspension type ultra-low-frequency vibration sensor |
| CN203838353U (en) * | 2014-05-21 | 2014-09-17 | 哈尔滨工程大学 | Two-dimensional compound-pendulum tilting low-frequency vibration-isolation device based on capacitive sensing |
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