CN101382178B - Active vibration damping and vibration isolating device and active vibration damping and vibration isolating system - Google Patents

Active vibration damping and vibration isolating device and active vibration damping and vibration isolating system Download PDF

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Publication number
CN101382178B
CN101382178B CN2008102013119A CN200810201311A CN101382178B CN 101382178 B CN101382178 B CN 101382178B CN 2008102013119 A CN2008102013119 A CN 2008102013119A CN 200810201311 A CN200810201311 A CN 200810201311A CN 101382178 B CN101382178 B CN 101382178B
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bearing
air
load
active damping
active
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CN101382178A (en
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刘赟
严天宏
袁志扬
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Abstract

The invention provides an active vibration-reduction and isolation device and a vibration-reduction and isolation system which consists of the active vibration-reduction and isolation device, wherein,the active vibration-reduction and isolation device comprises an air chamber which is provided with a sealing piston, an inverted pendulum provided with one end fixedly connected with the piston, a bearing part which is fixedly connected with the other end of the inverted pendulum; a vertical beeline executer which is arranged between the bearing part and the air chamber and connected with the bearing part and the shell of the air chamber so as to apply the active force on the bearing part, and a horizontal beeline executer which is arranged between the bearing part and the air chamber and connected with the bearing part and the shell of the air chamber so as to apply the active force on the bearing part.

Description

Active damping isolation mounting and active damping vibrating isolation system
Technical field
The invention relates to a kind of vibration damping equipment and the vibration insulating system of forming by this vibration damping equipment, and particularly relevant for a kind of active damping isolation mounting and the vibration damping and vibration isolation system that forms by this active damping isolation mounting.
Background technique
Along with the raising that the user requires precision equipment, a lot of precision equipments (such as lithography machine, fine measuring instrument etc.) are also more and more harsher to the requirement of vibration.Traditional passive type vibration damper can't satisfy the demands, and must use active damper that vibration is controlled.
Common active damper generally adopts piezoelectric actuator, pneumatic/hydraulic unit driver or electromagnetic driver at present.
Piezoelectric actuator utilizes the inverse piezoelectric effect principle to carry out work, promptly applies alternating electric field on piezoelectric crystal, and piezo crystals is known from experience the mechanical strain that produces alternation on a certain direction, but range of movement can not be used for the high load of vibration amplitude generally at 20-25 μ m.
Pneumatic/hydraulic unit driver utilizes gas/liquid to press transmission to carry out work, and control force is bigger, but reaction velocity is slower, makes that the stabilization time of load is longer.
Electromagnetic driver utilizes the interaction principle of magnetic, iron to carry out work.Usually form by movable core and fixing permanent magnet, twine drive coil on the magnet.When applying alternating voltage on drive coil, the alternating magnetic field that is produced will drive iron core motion, ouput force and displacement.The general planar motor that adopts in the active damper, cost is higher.
It is the vibration damping equipment of assisting based on passive, ACTIVE CONTROL that Chinese patent application CN200510026019.4 discloses a kind of, comprise that passive damping part and active damping power unit form jointly, passive damping part is a kind of horizontal stroke, vertically all can has the cavity of certain range of movement to construct, the piston type mechanism that supports by this cavity is connected to by on the platform of vibration damping, and vibration source is carried out by a relatively large margin isolation or decay on broad frequency band; There are being the ACTIVE CONTROL parts to be connected by between damping means and the passive damping part, these ACTIVE CONTROL parts are by vibration transducer, signal processor, data acquisition unit, computing decision-making device, motor driver, and two linear electric motor compositions on level and the Vertical direction, carry out assist location.
Use linear electric motor as driver in the U.S. Pat 5844664, and mover, stator are fixedlyed connected respectively with load, pedestal.Like this when a plurality of damper combination are used, since linear electric motor only controlling party to range of movement bigger, other direction only can be moved among a small circle, generally in 100 μ m, so vertical linear electric motor are when the catenary motion scope is big, level can limit its motion to motor; Vice versa, that is to say that the motion between each driver was easy to generate conflict when load was subjected to disturbance greatly, can seriously reduce effectiveness in vibration suppression.
U.S. Pat 5823307 discloses a kind of active suspension system, uses piezo-electric motor as driver, and the passive energy dissipation parts are surveyed these passive energy dissipation parts by sensor and eliminated vibrations to adjust driver between piezoelectric actuator and load-bearing component.
U.S. Patent application US20070235276 discloses a kind of active suspension system, and the position change by the vibrations of sensor detecting structure produce calculates corrected signal, eliminates vibrations with the controlling and driving device.
U.S. Patent application US20070284794 discloses a kind of active suspension system, surveys the bottom surface vibrations by sensor, and has the compensating signal that a control gear calculates at least two degrees of freedom, eliminates vibrations with the controlling and driving device.
Summary of the invention
The vibration damping and vibration isolation system that the invention provides a kind of active damping isolation mounting and form by this active damping isolation mounting.
The disclosed active damping isolation mounting of the present invention comprises: the air cavity with packed-piston; Reversely standing pendulum, the one end is fixedlyed connected with described piston; Load-bearing component, it is fixedlyed connected with the other end of described reversely standing pendulum; Vertical linear actuator is provided with between described load-bearing component of what and the air cavity, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force; Level is provided with between described load-bearing component of what and the air cavity to linear actuator, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force.
The disclosed active damping isolation mounting of the present invention also comprises vertical air-bearing, and wherein said vertical linear actuator is connected with described air cavity shell by described vertical air-bearing.
The disclosed active damping isolation mounting of the present invention also comprises level to air-bearing, and wherein said level is connected with described air cavity shell to air-bearing by described level to linear actuator.
Described linear actuator is linear electric motor or voice coil motor.
Described air-bearing is vacuum preload air-bearing or two-way lift of gas preload air-bearing.
The disclosed vibration damping and vibration isolation system that is made up of this active damping isolation mounting of the present invention comprises: a plurality of active damping isolation mountings, realize ACTIVE CONTROL to the vibration of load six-degree-of-freedom; Wherein said active damping isolation mounting comprises: the air cavity with packed-piston; Reversely standing pendulum, the one end is fixedlyed connected with described piston; Load-bearing component, it is fixedlyed connected with the other end of described reversely standing pendulum; Vertical linear actuator is provided with between described load-bearing component of what and the air cavity, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force; Level is provided with between described load-bearing component of what and the air cavity to linear actuator, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force.
The disclosed vibration damping and vibration isolation system that is made up of this active damping isolation mounting of the present invention also comprises vertical air-bearing, and wherein said vertical linear actuator is connected with described air cavity shell by described vertical air-bearing.
The disclosed vibration damping and vibration isolation system that is made up of this active damping isolation mounting of the present invention also comprises level to air-bearing, and wherein said level is connected with described air cavity shell to air-bearing by described level to linear actuator.
Described linear actuator is linear electric motor or voice coil motor.
Described air-bearing is vacuum preload air-bearing or two-way lift of gas preload air-bearing.
Described a plurality of active damping isolation mounting is 3 or 3 above active damping isolation mountings.
The disclosed vibration damping and vibration isolation system that is made up of this active damping isolation mounting of the present invention also comprises air feeder, and its air cavity with described active damping isolation mounting links to each other.Described air feeder also comprises gas holder.
The present invention increases air floating structure between the stator of linear actuator and pedestal, provide two-way stiffness by vacuum preload or the opposite lift of gas of both direction, make that vertical linear actuator integral body can be at horizontal in-plane moving, and horizontal linear final controlling element integral body can be moved in vertical plane.Vertical like this final controlling element is when catenary motion, and level can not limit its motion to final controlling element; Vice versa.The structure that the present invention proposes has been eliminated the mutual constraint between the both direction final controlling element, has increased the range of movement (>100 μ m) of load, has improved the effectiveness in vibration suppression of active damper greatly; When a plurality of active damper constitute the use of active damping system, can reduce the coupled interference between each vibration damper, thereby reach excellent vibration damping effect.In addition, the present invention has increased gas holder, makes under the situation that air feed interrupts suddenly, and active damper still can proper functioning a period of time, thereby avoids causing the load damage because active damper is fallen load suddenly.
For above-mentioned feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Figure 1 shows that first embodiment's of active damping isolation mounting of the present invention structural representation.
Figure 2 shows that first embodiment's of active damping isolation mounting of the present invention air-bearing structural representation.
Figure 3 shows that second embodiment's of active damping isolation mounting of the present invention structural representation.
Figure 4 shows that second embodiment's of active damping isolation mounting of the present invention air-bearing structural representation.
Figure 5 shows that an embodiment's of active damping vibrating isolation system of the present invention schematic representation.
Figure 6 shows that an embodiment's of active damping vibrating isolation system of the present invention horizontal layout schematic representation.
Figure 7 shows that another embodiment's of active damping vibrating isolation system of the present invention horizontal layout schematic representation.
Embodiment
In order more to understand technology contents of the present invention, especially exemplified by specific embodiment and cooperate appended graphic being described as follows.
Figure 1 shows that first embodiment's of active damping isolation mounting of the present invention structural representation.As shown in fig. 1,1 is the damper unit shell, and 2 is air cavity, and 3 is piston, 4 is reversely standing pendulum, 5 is vertical vacuum preload air-bearing, and 6 is vertical linear actuator stator, and 7 is vertical linear actuator mover, 8 is that level is to the vacuum preload air-bearing, 9 be level to the linear actuator stator, 10 be level to the linear actuator mover, 11 is load-bearing component, 12 is single damper unit, 13 is the air-bearing pressure area, and 14 is the air-bearing region of no pressure, and 15 is the air-bearing vacuum pipe, 16 is the air-bearing air-pressure duct, 17 is gas holder, and 18 is reduction valve, and 24 is seal ring.
Figure 2 shows that first embodiment's of active damping isolation mounting of the present invention air-bearing structural representation.As shown in Figure 2, pressurized gas forms pressure area 13 by air-bearing air-pressure duct 16 between air-bearing and supporting surface, vacuum equipment by air-bearing vacuum pipe 15 at air-bearing and make formation region of no pressure 14 between the dormancy.
As shown in Figure 1,24 pairs of air cavitys 2 of seal ring seal, and the gas in the air cavity is by piston 3 and reversely standing pendulum 4 supporting load-bearing components 11, and wherein gas carries out vertical passive vibration damping to load-bearing component, and reversely standing pendulum carries out level to passive vibration damping to load-bearing component.Vertical linear actuator stator 6 contacts with damper unit shell 1 by vertical air-bearing 5, and vertical linear actuator mover 7 is connected with load-bearing component, thereby load-bearing component is applied vertical control force, carries out active vibration control.Level contacts with damper unit shell 1 to air-bearing 8 by level to linear actuator 9, and level is connected with load-bearing component to linear actuator 10, thereby load-bearing component is applied level to control force, carries out active vibration control.Mover 7 can only be at catenary motion with respect to stator 6 in the frame of broken lines, and the air supporting that moves through of other direction retrains; Mover 10 can only be in level to motion with respect to stator 9, and the air supporting that moves through of other direction retrains.
Owing to have vibration, so the air-bearing between stator and damper unit shell must carry out preload.Structure illustrated in figures 1 and 2 is carried out preload by vacuum, and pressure area 13 provides buoyancy to form bearing capacity, and region of no pressure 14 provides suction.Have buoyancy and suction between air-bearing and the surface of contact simultaneously, malleation is floated bearing, makes it have the ability of bearing pressure; Negative pressure of vacuum produces suction, reduces bearing capacity, makes it have the ability of bearing pulling force.The former increases air-film thickness, and the latter then makes air-film thickness reduce, and when both mate, forms a stable air-film thickness, makes air-bearing have two-way stiffness, can bear two-way load.
Figure 3 shows that second embodiment's of active damping isolation mounting of the present invention structural representation.As shown in Figure 3,19 is the damper unit shell; 20 is vertical two-way air-bearing; 21 is that level is to two-way air-bearing.
Figure 4 shows that second embodiment's of active damping isolation mounting of the present invention air-bearing structural representation.As shown in Figure 4, pressurized gas forms pressure area 23 by air-bearing air-pressure duct 22 between air-bearing and supporting surface.
Fig. 3 and structure shown in Figure 4 are carried out preload by the opposite lift of gas of both direction, and the pressure area, top provides downward pressure, and the pressure area, below provides supporting force upwards.During both balances, air-film thickness is stable, makes air-bearing have two-way stiffness, can bear two-way load.
Figure 5 shows that an embodiment's of active damping vibrating isolation system of the present invention schematic representation.As shown in Figure 5,3 damper units 12 are formed vibration insulating system, and load-bearing component is carried out vibration control.Pressurized gas enters gas holder 17 after reducing pressure by reduction valve 18, and gas holder is to 3 damper unit 12 air feed then.
Mainly by the gas support load in the air cavity 2, load is generally precision equipment to damper unit, in case because uncontrollable factor causes air feed to interrupt suddenly, and the load meeting is fallen fast, might cause load to damage.For avoiding this kind situation to occur, in vibration insulating system, increase a gas holder 17, pressurized gas enters gas holder 17 after reducing pressure by reduction valve 18, and gas holder is to 3 damper unit 12 air feed then.Have no progeny suddenly when air feed like this, the gas in the gas holder also can be kept vibration insulating system work a period of time, makes load that time enough adjustment be arranged, thereby avoids causing the load damage because active damper is fallen load suddenly.
Figure 6 shows that an embodiment's of active damping vibrating isolation system of the present invention horizontal layout schematic representation.As shown in Figure 6, the installation direction of 3 damper units makes the interior level of each damper unit identical with double-head arrow direction among the figure to the driving force direction of linear actuator.
The present invention uses 3 or a plurality of active damping isolation mounting formation vibration insulating system support load, realizes the six-degree-of-freedom vibration damping and the vibration isolation of load.When adopting 3 active damping isolation mountings, each active damping isolation mounting is symmetrical arranged, and its installation direction makes inner horizontal identical with double-head arrow direction among Fig. 6 to the driving force direction of linear actuator.
Another embodiment of the present invention is for using 8 active damping isolation mountings.Figure 7 shows that another embodiment's of active damping vibrating isolation system of the present invention horizontal layout schematic representation.As shown in Figure 7,8 active damping isolation mountings among this embodiment are symmetrical arranged, and its installation direction makes inner horizontal identical with double-head arrow direction among Fig. 7 to the driving force direction of linear actuator.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; have in the technical field under any and know the knowledgeable usually; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking claims person of defining.

Claims (14)

1. an active damping isolation mounting is characterized in that, comprising:
Air cavity with packed-piston;
Reversely standing pendulum, the one end is fixedlyed connected with described piston;
Load-bearing component, it is fixedlyed connected with the other end of described reversely standing pendulum;
Vertical linear actuator is arranged between described load-bearing component and the air cavity, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force;
Level is arranged between described load-bearing component and the air cavity to linear actuator, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force;
Vertical air-bearing, described vertical linear actuator is connected with described air cavity shell by described vertical air-bearing;
Level is to air-bearing, and described level is connected with described air cavity shell to air-bearing by described level to linear actuator.
2. active damping isolation mounting as claimed in claim 1 is characterized in that described linear actuator is linear electric motor.
3. active damping isolation mounting as claimed in claim 1 is characterized in that described linear actuator is a voice coil motor.
4. active damping isolation mounting as claimed in claim 1 is characterized in that, described air-bearing is the vacuum preload air-bearing.
5. active damping isolation mounting as claimed in claim 1 is characterized in that, described air-bearing is two-way lift of gas preload air-bearing.
6. an active damping vibrating isolation system is characterized in that, comprising:
A plurality of active damping isolation mountings are realized the ACTIVE CONTROL to the vibration of load six-degree-of-freedom;
Wherein said active damping isolation mounting comprises:
Air cavity with packed-piston;
Reversely standing pendulum, the one end is fixedlyed connected with described piston;
Load-bearing component, it is fixedlyed connected with the other end of described reversely standing pendulum;
Vertical linear actuator is arranged between described load-bearing component and the air cavity, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force;
Level is arranged between institute's load-bearing component of going back and the air cavity to linear actuator, and is connected with the gentle chamber enclosure of described load-bearing component, so that described load-bearing component is applied active force;
Vertical air-bearing, described vertical linear actuator is connected with described air cavity shell by described vertical air-bearing;
Level is to air-bearing, and described level is connected with described air cavity shell to air-bearing by described level to linear actuator.
7. active damping isolation mounting as claimed in claim 6 is characterized in that described linear actuator is linear electric motor.
8. active damping isolation mounting as claimed in claim 6 is characterized in that described linear actuator is a voice coil motor.
9. active damping isolation mounting as claimed in claim 6 is characterized in that, described air-bearing is the vacuum preload air-bearing.
10. active damping isolation mounting as claimed in claim 6 is characterized in that, described air-bearing is two-way lift of gas preload air-bearing.
11. active damping vibrating isolation system as claimed in claim 6 is characterized in that, described a plurality of active damping isolation mountings are 3 active damping isolation mountings.
12. active damping vibrating isolation system as claimed in claim 6 is characterized in that, described a plurality of active damping isolation mountings are 3 above active damping isolation mountings.
13. active damping vibrating isolation system as claimed in claim 6 is characterized in that, also comprises air feeder, its air cavity with described active damping isolation mounting links to each other.
14. active damping vibrating isolation system as claimed in claim 13 is characterized in that described air feeder also comprises gas holder.
CN2008102013119A 2008-10-16 2008-10-16 Active vibration damping and vibration isolating device and active vibration damping and vibration isolating system Active CN101382178B (en)

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