CN103438142B - A kind of six-degree-of-freedoactive active vibration isolation device - Google Patents
A kind of six-degree-of-freedoactive active vibration isolation device Download PDFInfo
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- CN103438142B CN103438142B CN201310343083.XA CN201310343083A CN103438142B CN 103438142 B CN103438142 B CN 103438142B CN 201310343083 A CN201310343083 A CN 201310343083A CN 103438142 B CN103438142 B CN 103438142B
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- pneumatic spring
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- vibration isolation
- supporting leg
- connecting plate
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
Abstract
The invention discloses a kind of six-degree-of-freedoactive active vibration isolation device, there is six-degree-of-freedom vibration isolation and locating function.This device comprises lower bolster, upper mounting plate and six supporting legs; Article six, supporting leg is connected with upper mounting plate and lower bolster respectively by fixed block, forms all magnificent paralleling mechanism of history; The position of three fixed blocks on lower bolster forms equilateral triangle, and the position of three fixed blocks on upper mounting plate also forms equilateral triangle, and six leg structures are identical, and two adjacent supporting legs are orthogonal; Each supporting leg includes active actuators and pneumatic spring, and active actuators and pneumatic spring form parallel-connection structure, and wherein pneumatic spring is as passive vibration isolation parts.The present invention adopts initiatively and passive vibration isolation compound mode, can realize ultra-low frequency natural frequency, effectively can isolate the vibration exceeding natural frequency; Can realize, to the good attenuation of six-freedom degree vibration, the accurate location of six-degree-of-freedom can being realized.
Description
Technical field
The invention belongs to ultraprecise antivibration area, be specifically related to a kind of six-degree-of-freedoactive active vibration isolation device.Six-degree-of-freedoactive active vibration isolation device involved in the present invention has vibration isolation and locating function, can be used in the vibration isolation of the high precision apparatus such as lithography machine, precision machine tool, precision measurement equipment and Aero-Space precision type instrument.
Background technique
Along with the development of science and technology, the precision manufactureing equipment being representative with IC manufacturing equipment, high resolution electron microscope (HREM), surface roughness tester and precision optics equipment etc., precision measurement equipment obtain and apply more and more widely, and it is more and more higher to the requirement of precision.As realizing high-precision fundamental equipments, isolation mounting can isolate ground and ambient vibration to the impact of precision equipment, provides the working environment of " peace and quiet " to the equipment of vibration sensing, ensures the normal operation of precision equipment.
Chinese patent literature CN101382178 (publication number) discloses a kind of active damping isolation mounting and active damping vibrating isolation system, this patent documentation adopts three or more active damping isolation mounting to form vibration insulating system load-supporting, realize six-degree-of-freedom vibration damping and the vibration isolation of load, the subject matter of this technology is that vibration insulating system is made up of multiple vibration damping equipment, bulky, cost is high.
Chinese patent literature CN101398052 (publication number) discloses the vibration insulating system of a kind of heavy load precision damper and formation thereof, this patent documentation adopts pneumatic spring as vertical passive vibration isolation parts, reversely standing pendulum as level to passive vibration isolation parts, linear electric motor are as active actuators, the subject matter of this patent is, linear electric motor are only had to export active controlling force in the horizontal direction, therefore active force is in the horizontal direction less, limits vibration insulating system vibration isolation in the horizontal direction and locating function.
US Patent No. 5844664 (publication number) discloses a kind of vibration insulating system, this vibration insulating system is made up of multiple vibration damper, each vibration damper is made up of pneumatic spring and linear motor combination, the subject matter of this patent documentation is, a vibration insulating system is made up of multiple vibration damper, bulky, when cannot be applied to the limited space such as aviation, its cost is also larger.
What the disclosed product A IS vibration insulating system of Bill, Germany thatch company (http://www.bilz.ag/en) adopted is full pneumatic spring vibration isolation, it adopts the vibration damper of more than three or three to form a vibration insulating system, a vertical pneumatic spring and 4 levels are included to pneumatic spring in single vibration damper, set of system at least comprises 15 pneumatic springs, the program can provide larger level to exerting oneself, but its complex structure, cost is higher.
Above-mentioned open source literature has effect for vibration isolation in a word, but volume is comparatively large, is inconvenient to use.
Summary of the invention
The invention provides a kind of six-degree-of-freedoactive active vibration isolation device, this isolation mounting can realize the isolation of effective suppression to low-frequency excitation and dither on six-degree-of-freedom, and has six-degree-of-freedom precision positioning function.
A kind of six-degree-of-freedoactive active vibration isolation device provided by the invention, is characterized in that, this device comprises lower bolster, upper mounting plate and six supporting legs; Article six, supporting leg is connected with upper mounting plate and lower bolster respectively by fixed block, forms all magnificent paralleling mechanism of history; The position of three fixed blocks on lower bolster forms equilateral triangle, and the position of three fixed blocks on upper mounting plate also forms equilateral triangle, and six leg structures are identical, and two adjacent supporting legs are orthogonal; Each supporting leg includes active actuators and pneumatic spring, and active actuators and pneumatic spring form parallel-connection structure, and wherein pneumatic spring is as passive vibration isolation parts.
As the improvement of technique scheme, described supporting leg comprises lower flexible block, pneumatic spring housing, inlet hole, sealing film, piston body, pressure ring, flexible disk, load connecting plate, non-contact displacement transducer, active actuators, velocity transducer and upper flexible block; Lower flexible block is positioned at supporting leg bottom, and pneumatic spring housing bottom is connected with lower flexible block, and pneumatic spring housing has inlet hole; Sealing film is pressed on pneumatic spring housing upper surface by pressure ring, and sealing film inner ring is connected with piston body; A pneumatic spring is jointly formed by pneumatic spring housing, sealing film, piston body, pressure ring and inlet hole; Flexible disk excircle part is connected with pressure ring, and its core is connected with piston body, and the moving direction of piston body can only be the length direction of supporting leg; Load connecting plate bottom is connected with piston body top, and the top of load connecting plate is connected with upper flexible block; Non-contact displacement transducer is fixed on pressure ring, detects the change in displacement of load connecting plate; Velocity transducer is fixed in load connecting plate; Active actuators two ends are fixedly connected with pressure ring with load connecting plate respectively.
The present invention adopts pneumatic spring as the passive vibration isolation parts of isolation mounting, and due to the compressibility of gas, pneumatic spring has the advantage of Low rigidity, effectively can decay to the vibration higher than pneumatic spring frequency.Pneumatic spring volume is larger, and less with the relative change of pressure because vibrating the volume caused, the rigidity that can realize is lower, and vibration isolating effect is better.Pneumatic spring to be arranged into as much as possible in whole supporting leg space to expand the volume of pneumatic spring, to make isolation mounting have lower natural frequency.
The present invention adopts pneumatic spring to provide carrying and low frequency passive vibration isolation function, and six supporting legs and upper and lower platform form Stewart (Shi Douhua) paralleling mechanism, and isolation mounting can realize the function of vibration isolation and location on six-freedom degree.
Specifically, the present invention has following technique effect:
1) adopt active and passive vibration isolation compound mode, ultra-low frequency natural frequency can be realized, can the vibration exceeding natural frequency effectively be isolated;
2) adopt the mode of active actuators and passive vibration isolation Components Parallel Connection, realize the function of precision positioning;
3) isolation mounting of six supporting legs proposed and upper and lower platform composition can realize the precision vibration damping of six-degree-of-freedom, ultralow frequency, high decay, than the advantage that vibrating isolation system has compact structure, volume is little, cost is low, six-degree-of-freedom is located that multiple vibration isolator is combined to form;
4) preferred technological scheme adopts the function realizing spherical hinge without friction, gapless flexible block, avoids the adverse effect that the friction of spherical hinge and clearance impact bring to accurate vibration isolation;
5) preferred technological scheme adopts flexible disk as the guide mechanism of air-spring piston body, makes the moving direction of piston body can only be the length direction of supporting leg.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a kind of six-degree-of-freedoactive active vibration isolation device of the present invention;
Fig. 2 is the structural representation of a kind of embodiment of supporting leg;
Fig. 3 is one of setting type of six-degree-of-freedoactive active vibration isolation device;
Fig. 4 is Stewart paralleling mechanism setting type plan;
Fig. 5 is the schematic diagram of flexible disk;
In figure, 1 is lower bolster, and 2 is fixed block, 3 is supporting leg, and 4 is upper mounting plate, and 3.1 is lower flexible block, 3.2 is pneumatic spring housing, and 3.3 is inlet hole, and 3.4 is sealing film, 3.5 is piston body, and 3.6 is pressure ring, and 3.7 is flexible disk, 3.8 is load connecting plate, and 3.9 is non-contact displacement transducer, and 3.10 is voice coil motor stator, 3.11 is voice coil motor mover, and 3.12 is velocity transducer, and 3.13 is upper flexible block.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further.It should be noted that at this, the explanation for these mode of executions understands the present invention for helping, but does not form limitation of the invention.In addition, if below in described each mode of execution of the present invention involved technical characteristics do not form conflict each other and just can mutually combine.
As shown in Figure 1, six-degree-of-freedoactive active vibration isolation device is made up of lower bolster 1, upper mounting plate 4, six fixed blocks 2 and six supporting legs 3 overall structure of the present invention.Article six, supporting leg 3 is connected with upper mounting plate 1, lower bolster 4 respectively by fixed block 2, and they form Shi Douhua (Stewart) paralleling mechanism.The position of three fixed blocks 2 forms equilateral triangle on lower bolster 1, the position of other three fixed blocks 2 forms equilateral triangle on upper mounting plate 4, article six, supporting leg 3 structure is identical, and two adjacent supporting legs are orthogonal, and this distribution makes whole device have good symmetry properties and stability.This setting type can be illustrated by Fig. 4.Six limits AB, BC, CF, FE, EH, AH of square body can as six supporting legs, summit A, B, C, F, E, H are as the spherical hinge position of Stewart paralleling mechanism, and triangle ACE, triangle BFH are upper mounting plate, the lower bolster of Stewart paralleling mechanism.When upper mounting plate 4 has load equipment, because the setting type of vibration-isolating platform has symmetry properties, so there is identical support force in six supporting legs.
As shown in Figure 2, the structure of supporting leg that example of the present invention provides comprises lower flexible block 3.1, pneumatic spring housing 3.2, inlet hole 3.3, sealing film 3.4, piston body 3.5, pressure ring 3.6, flexible disk 3.7, load connecting plate 3.8, non-contact displacement transducer 3.9, active actuators, velocity transducer 3.12 and upper flexible block 3.13.
Lower flexible block 3.1 is positioned at supporting leg bottom, and flexible block has very large rigidity on supporting leg length direction, and on two bending directions, have lower rigidity, and flexible block realizes the motion of Stewart paralleling mechanism here as a kind of spherical hinge.There is the problems such as friction, gap in traditional spherical hinge, can have a negative impact to accurate vibration isolation, and flexible block does not exist the problem in friction and gap, by reasonably designing the function that can realize spherical hinge.
Be connected with lower flexible block 3.1 bottom pneumatic spring housing 3.2, pneumatic spring housing 3.2 has inlet hole 3.3.Sealing film 3.4 is pressed on pneumatic spring housing 3.2 upper surface by pressure ring 3.6, and sealing film inner ring is connected with piston body 3.5.Jointly form a pneumatic spring by pneumatic spring housing 3.2, sealing film 3.4, piston body 3.5, pressure ring 3.6 and inlet hole 3.3, pneumatic spring is as the passive vibration isolation parts of isolation mounting.Flexible disk 3.7 excircle part is connected with pressure ring 3.6, and its core is connected with piston body 3.5, and the moving direction of piston body can only be the length direction of supporting leg.Flexible disk 3.7 has Low rigidity in the axial direction, has larger rigidity diametrically.As shown in Figure 5, the shape of flexible disk 3.7 is spoke shape, adopts this kind of project organization can meet the requirement of low axial rigidity and high radial rigidity.Load connecting plate 3.8 bottom is connected with piston body 3.5 top, and the top of load connecting plate 3.8 is connected with upper flexible block 3.13.Non-contact displacement transducer 3.9 is fixed on pressure ring 3.6, detects the change in displacement of load connecting plate 3.8.Velocity transducer 3.12 is fixed in load connecting plate 3.8.Active actuators is the voice coil motor be made up of voice coil motor stator 3.10, voice coil motor mover 3.11.Voice coil motor stator 3.10 is fixed on pressure ring 3.6, and voice coil motor mover 3.11 is fixed in load connecting plate 3.8, and the fixed position of voice coil motor mover 3.11 and voice coil motor stator 3.10 can exchange.Simultaneously, active actuators also can adopt the active actuator such as piezoelectric constant, ultra-magnetic telescopic to replace, during replacement, the two ends of piezoelectric constant or magnetostriction lamp components are fixedly connected with pressure ring 3.6 with load connecting plate 3.8 respectively, make active actuators and pneumatic spring form parallel-connection structure.
Article six, in supporting leg, non-contact displacement transducer 3.9 detects the telescopic displacement of load connecting plate 3.8 on supporting leg length direction, and six supporting legs telescopic displacement is in the longitudinal direction designated as [q
1, q
2, q
3, q
4, q
5, q
6].User is it is of concern that the displacement information of upper mounting plate 4, and needing here, by a sensor transfer matrix, the telescopic displacement of every bar supporting leg is converted to upper mounting plate 4 coordinate of (three translations, three rotations) on six-freedom degree is [x, y, z, θ
x, θ
y, θ
z], formula is as follows,
By above formula, the displacement information of upper mounting plate 4 on six-freedom degree can be known.The position information of the upper mounting plate 4 of user's setting is on the six-degree-of-freedom of upper mounting plate 4, but not arranges six supporting legs telescopic displacement separately, and the displacement of setting is transformed in six landing leg stretching displacements with regard to needing an inverse matrix by this, and its formula is as follows
The Displacement Feedback of six supporting legs that non-contact displacement transducer 3.9 detects, to precise pneumatic regulating system, increases or reduces the volume of pneumatic spring to pneumatic spring air feed or exhaust by inlet hole 3.3, realizes by the precision positioning of device for vibration insutation.
Velocity transducer 3.9 detects the absolute velocity in every bar supporting leg load connecting plate 3.8, by sensor transfer matrix, be converted to the absolute velocity on the six-degree-of-freedom of upper mounting plate, feedback forms the Electric Machine Control force signal on upper mounting plate six-degree-of-freedom, this control signal is nominal control signal, and upper mounting plate six-degree-of-freedom motor is not corresponding with it, and this control signal need on the voice coil motor that exertin transfer matrix is transformed into six supporting legs, compute matrix is as follows
Article six, the damping force [f that the voice coil motor on supporting leg produces
1, f
2, f
3, f
4, f
5, f
6] reduce vibration on upper mounting plate six-degree-of-freedom, inhibit by the amplitude of device for vibration insutation.Wherein, F
x, F
y, F
zrepresent the x suffered by upper mounting plate 4 respectively, the power in y, z tri-directions, M
x, M
y, M
zrepresent the moment of rotation around x, y, z suffered by upper mounting plate 4 respectively.
The present invention can realize the effective isolation to low-frequency vibration, and realizes six-freedom degree precision positioning, and precision machining, precision measuremnt, Experiments of Optics, Aero-Space etc. are had to the field of particular/special requirement to positional accuracy, this invention has important effect.
The above is preferred embodiment of the present invention, but the present invention should not be confined to the content disclosed in this embodiment and accompanying drawing.The equivalence completed under not departing from spirit disclosed in this invention so every or amendment, all fall into the scope of protection of the invention.
Claims (1)
1. a six-degree-of-freedoactive active vibration isolation device, is characterized in that, this device comprises lower bolster (1), upper mounting plate (4) and six supporting legs (3); Article six, supporting leg (3) is connected with upper mounting plate (4) and lower bolster (1) respectively by fixed block, forms all magnificent paralleling mechanism of history; The position of three fixed blocks on lower bolster (1) forms equilateral triangle, the position of three fixed blocks on upper mounting plate (4) also forms equilateral triangle, article six, supporting leg (3) structure is identical, two adjacent supporting legs are orthogonal, and six supporting legs have identical support force; Each supporting leg (3) includes active actuators and pneumatic spring, active actuators forms parallel-connection structure with the pneumatic spring with single-degree-of-freedom guide mechanism, wherein there is the pneumatic spring of single-degree-of-freedom guide mechanism as passive vibration isolation parts, be arranged in as much as possible in whole supporting leg space to expand the volume of pneumatic spring, reduce the natural frequency of isolation mounting, to provide carrying and low frequency passive vibration isolation function, enable isolation mounting on six-freedom degree, realize the function of vibration isolation and location;
Described supporting leg (3) comprises lower flexible block (3.1), pneumatic spring housing (3.2), inlet hole (3.3), sealing film (3.4), piston body (3.5), pressure ring (3.6), flexible disk (3.7), load connecting plate (3.8), non-contact displacement transducer (3.9), active actuators, velocity transducer (3.12) and upper flexible block (3.13);
Lower flexible block (3.1) is positioned at supporting leg bottom, and pneumatic spring housing (3.2) bottom is connected with lower flexible block (3.1), and pneumatic spring housing (3.2) has inlet hole (3.3); Sealing film (3.4) is pressed on pneumatic spring housing (3.2) upper surface by pressure ring (3.6), and sealing film inner ring is connected with piston body (3.5); Jointly a pneumatic spring is formed by pneumatic spring housing (3.2), sealing film (3.4), piston body (3.5), pressure ring (3.6) and inlet hole (3.3); Flexible disk (3.7) excircle part is connected with pressure ring (3.6), and its core is connected with piston body (3.5), and the moving direction of piston body (3.5) can only be the length direction of supporting leg; Load connecting plate (3.8) bottom is connected with piston body (3.5) top, and the top of load connecting plate (3.8) is connected with upper flexible block (3.13); Non-contact displacement transducer (3.9) is fixed on pressure ring (3.6), detects the change in displacement of load connecting plate (3.8); Velocity transducer (3.12) is fixed in load connecting plate (3.8); Active actuators two ends are fixedly connected with pressure ring (3.6) with load connecting plate (3.8) respectively; The voice coil motor of active actuators for being made up of voice coil motor stator (3.10), voice coil motor mover (3.11); Voice coil motor stator (3.10) is fixed on pressure ring (3.6), and voice coil motor mover (3.11) is fixed in load connecting plate (3.8).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310343083.XA CN103438142B (en) | 2013-08-07 | 2013-08-07 | A kind of six-degree-of-freedoactive active vibration isolation device |
| PCT/CN2014/080358 WO2015018236A1 (en) | 2013-08-07 | 2014-06-20 | Six-degree-of-freedom active vibration isolation apparatus |
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|---|---|---|---|
| CN201310343083.XA CN103438142B (en) | 2013-08-07 | 2013-08-07 | A kind of six-degree-of-freedoactive active vibration isolation device |
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| CN103438142A CN103438142A (en) | 2013-12-11 |
| CN103438142B true CN103438142B (en) | 2016-01-13 |
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| CN110886802B (en) * | 2019-12-04 | 2021-08-13 | 中国直升机设计研究所 | Annular vibration isolation device of helicopter |
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| Publication number | Publication date |
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| WO2015018236A1 (en) | 2015-02-12 |
| CN103438142A (en) | 2013-12-11 |
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