CN105091908A - Secondary platform dynamic leveling system - Google Patents
Secondary platform dynamic leveling system Download PDFInfo
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- CN105091908A CN105091908A CN201510475166.3A CN201510475166A CN105091908A CN 105091908 A CN105091908 A CN 105091908A CN 201510475166 A CN201510475166 A CN 201510475166A CN 105091908 A CN105091908 A CN 105091908A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
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Abstract
The invention provides a secondary platform dynamic leveling system and belongs to the technical field of platform dynamic leveling. The drive output shaft of a first motor driver, the drive output end of a second motor driver and the drive output end of a third motor driver of an industrial personal computer assembly are connected with the coil input end of a voice coil motor rotor of a first belt gas cylinder, the coil input end of a voice coil motor rotor of a second belt gas cylinder and the coil input end of a voice coil motor rotor of a third belt gas cylinder respectively. The drive output ends of a first proportional electromagnetic valve, a second proportional electromagnetic valve and a third proportional electromagnetic valve of the industrial personal computer assembly are connected with the input end of an electronic control proportional pressure-adjusting valve of a voice coil motor of the first belt gas cylinder, the input end of an electronic control proportional pressure-adjusting valve of a voice coil motor of the belt second gas cylinder and the input end of an electronic control proportional pressure-adjusting valve of a voice coil motor of the third belt gas cylinder respectively. The secondary platform dynamic leveling system is good in instantaneity in the dynamic leveling process, the inclination conditions of a platform can be accurately detected, and then leveling is quickly performed. Leveling precision is high and can reach the arc second grade.
Description
Technical field
The invention belongs to the technical field of platform dynamic leveling.
Background technology
In modern society, the platform of the high flatness of frequent needs, such as cross in the physical simulation experiments such as docking, ground survey, navigation, network service and formation control in space, need to support whole ground emulator, for ground simulation experiment provides basic platform; For the physical simulation tests such as the checking of Satellite Formation Flying ground experiment, control algorithm validation analysis provide platform.Due to Platform movement or static time all likely because the reason such as out-of-flatness of large area horizontal base is in heeling condition, be unfavorable for for load provides the job platform of level as far as possible to ensure accurately docking, therefore need platform can both by leveling fast and accurately in static and motion state, to ensure the levelness that platform is enough.
The core of whole spacecrafts rendezvous l-G simulation test is made up of secondary platform, six degree of freedom air floating table orbiter, orbital vehicle and six degree of freedom air floating table lifting device, and whole system operates on large-scale granite surface plate.Secondary platform is one of visual plant of l-G simulation test, and this equipment is applied between marble platform and six degree of freedom air floating table (orbiter, orbital vehicle), for six degree of freedom air floating table provides horizontal base, can provide source of the gas and power supply simultaneously.Secondary platform can reduce the requirement of the flatness to marble basic platform to a certain extent, can also provide the starting condition of a l-G simulation test for six degree of freedom air floating table.In traditional platform erection scheme, when platform is static, levelling effect is better, but under motion (translation, rotation etc.), leveling precision is not high, and effect is undesirable.
Summary of the invention
The object of this invention is to provide a kind of secondary platform dynamic leveling system, to solve in existing platform erection scheme, when platform is static, levelling effect is better, but when motion, translation, rotation, there is the problem that leveling precision is not high and effect is undesirable.
Described object is realized by following scheme: described a kind of secondary platform dynamic leveling system, and it comprises platform 1, first and is with the voice coil motor 2, second of cylinder to be with the voice coil motor 3 of cylinder, voice coil motor 4, industrial computer assembly 5, base 6, the double-shaft sensor 7 of the 3rd band cylinder;
The voice coil motor 2 of described first band cylinder comprises upper flat plate 2-1, piston 2-2, voice coil motor mover 2-3, cylinder 2-4, voice coil motor stator 2-5, grating scale 2-6, lower dull and stereotyped 2-7, manual pressure regulating valve 2-8, automatically controlled proportional dump valve 2-9; The upper surface of piston 2-2 is connected with the lower surface of upper flat plate 2-1 central part; Voice coil motor mover 2-3 is enclosed within the outside of piston 2-2, and the upper surface of voice coil motor mover 2-3 is connected with the lower surface of upper flat plate 2-1; The lower surface of cylinder 2-4 and the upper surface of lower dull and stereotyped 2-7 central part are tightly connected; Voice coil motor stator 2-5 is enclosed within the outside of cylinder 2-4, and the lower surface of voice coil motor stator 2-5 is connected with the upper surface of lower dull and stereotyped 2-7; The following side of piston 2-2 is arranged in cylinder 2-4, the inner headed face of the periphery of piston 2-2 and cylinder 2-4 is sealed and is slidably connected, and the coiler part of voice coil motor mover 2-3 is connected with the annular permanent magnet portion gap magnetic induction of voice coil motor stator 2-5; The air inlet port of manual pressure regulating valve 2-8 connects source of the gas, and the air outlet of manual pressure regulating valve 2-8 is communicated with the air inlet port 2-4-1 on cylinder 2-4 lower end, and the air inlet port of automatically controlled proportional dump valve 2-9 is communicated with the air outlet 2-4-2 on cylinder 2-4 lower end; Grating scale 2-6 is arranged on voice coil motor mover 2-3 and voice coil motor stator 2-5 respectively, for detecting the relative shift between voice coil motor mover 2-3 and voice coil motor stator 2-5; The composition of the voice coil motor 3 of the second band cylinder is all with the voice coil motor 2 of cylinder identical with the composition of the voice coil motor 4 of annexation, the 3rd band cylinder with annexation with first; Described industrial computer assembly 5 comprises industrial computer 5-1, three tunnel motion control board 5-2, three road DA board 5-3, the first motor driver 5-4, the second motor driver 5-5, the 3rd motor driver 5-6, the first proportional solenoid valve control device 5-7, the second proportional solenoid valve control device 5-8, the 3rd proportional solenoid valve control device 5-9; The data of the data output input bus Duan He tri-road DA board 5-3 of three tunnel motion control board 5-2 export input bus end and are connected with data input and output total county end of industrial computer 5-1 respectively; The data input/output terminal of the data input/output terminal of the first motor driver 5-4, the data input/output terminal of the second motor driver 5-5, the 3rd motor driver 5-6 is connected on the three tunnel control data I/Os of three tunnel motion control board 5-2; The data input/output terminal of the data input/output terminal of the first proportional solenoid valve control device 5-7, the data input/output terminal of the second proportional solenoid valve control device 5-8, the 3rd proportional solenoid valve control device 5-9 is connected on the three tunnel control data I/Os of three road DA board 5-3; The voice coil motor 2, second of the first band cylinder is with the voice coil motor 4 of the voice coil motor 3 of cylinder and the 3rd band cylinder to be arranged on base 6 with angular position, makes the dull and stereotyped lower surface of the voice coil motor 2 times of the first band cylinder, lower surface that the voice coil motor 4 times of the dull and stereotyped lower surface of voice coil motor 3 times of the second band cylinder and the 3rd band cylinder is dull and stereotyped is all connected with the upper surface of base 6; The upper surface of voice coil motor 2 upper flat plate of the first band cylinder, second is made to be with the upper surface of voice coil motor 4 upper flat plate of the upper surface of voice coil motor 3 upper flat plate of cylinder and the 3rd band cylinder to be all connected with the lower surface of platform 1; The drive output of the drive output of the first motor driver 5-4 of industrial computer assembly 5, the drive output of the second motor driver 5-5, the 3rd motor driver 5-6 is with the coil input end, second of the voice coil motor mover 2-3 of the voice coil motor 2 of cylinder to be with the coil input end of the voice coil motor mover of the voice coil motor 3 of cylinder, the 3rd to be with the coil input end of the voice coil motor mover of the voice coil motor 4 of cylinder to be connected respectively with first; The drive output of the drive output of the first proportional solenoid valve control device 5-7 of industrial computer assembly 5, the drive output of the second proportional solenoid valve control device 5-8, the 3rd proportional solenoid valve control device 5-9 is with the input end of the automatically controlled proportional dump valve of the voice coil motor 2 of cylinder, second to be with the input end of the automatically controlled proportional dump valve of the voice coil motor 3 of cylinder, the 3rd to be with the input end of the automatically controlled proportional dump valve of the voice coil motor 4 of cylinder to be connected respectively with first; The signal output part of the signal output part of grating scale of the signal output part of the grating scale 2-6 of the voice coil motor 2 of the first band cylinder, the voice coil motor 3 of the second band cylinder, the grating scale of the voice coil motor 4 of the 3rd band cylinder is connected with three displacement detection signal input ends of industrial computer assembly 5 respectively; Double-shaft sensor 7 is arranged on the upper surface of platform 1, the leg-of-mutton limit making double-shaft sensor 7 detection axis and first be with the voice coil motor 2, second of cylinder to be with the voice coil motor 3 of cylinder and the 3rd to be with voice coil motor 4 position of cylinder to form is parallel, makes another detection axis of double-shaft sensor 7 parallel with above-mentioned leg-of-mutton height.
The present invention's real-time in dynamic leveling process is good, can detect the inclination conditions of platform accurately, then leveling rapidly; Leveling precision is high, can reach rad level; System adopts the Compound Control Strategy of air pressure and motor, can carry out leveling accurately to the platform of heavy load (can reach ten several tons); Good stability, reliability is high.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present invention;
Fig. 2 is the plan structure schematic diagram of platform 1 in Fig. 1;
Fig. 3 is the concrete structure that the voice coil motor 2, second of the first band cylinder in Fig. 1 is with the voice coil motor 4 of the voice coil motor 3 of cylinder, the 3rd band cylinder, double-shaft sensor 7 and industrial computer assembly 5 and the structural representation be connected to each other thereof.
Embodiment
Embodiment one: shown in composition graphs 1, Fig. 2, Fig. 3, it comprises platform 1, first and is with the voice coil motor 2, second of cylinder to be with the voice coil motor 3 of cylinder, voice coil motor 4, industrial computer assembly 5, base 6, the double-shaft sensor 7 of the 3rd band cylinder;
The voice coil motor 2 of described first band cylinder comprises upper flat plate 2-1, piston 2-2, voice coil motor mover 2-3, cylinder 2-4, voice coil motor stator 2-5, grating scale 2-6, lower dull and stereotyped 2-7, manual pressure regulating valve 2-8, automatically controlled proportional dump valve 2-9; The upper surface of piston 2-2 is connected with the lower surface of upper flat plate 2-1 central part; Voice coil motor mover 2-3 is enclosed within the outside of piston 2-2, and the upper surface of voice coil motor mover 2-3 is connected with the lower surface of upper flat plate 2-1; The lower surface of cylinder 2-4 and the upper surface of lower dull and stereotyped 2-7 central part are tightly connected; Voice coil motor stator 2-5 is enclosed within the outside of cylinder 2-4, and the lower surface of voice coil motor stator 2-5 is connected with the upper surface of lower dull and stereotyped 2-7; The following side of piston 2-2 is arranged in cylinder 2-4, the inner headed face of the periphery of piston 2-2 and cylinder 2-4 is sealed and is slidably connected, and the coiler part of voice coil motor mover 2-3 is connected with the annular permanent magnet portion gap magnetic induction of voice coil motor stator 2-5; The air inlet port of manual pressure regulating valve 2-8 connects source of the gas, and the air outlet of manual pressure regulating valve 2-8 is communicated with the air inlet port 2-4-1 on cylinder 2-4 lower end, and the air inlet port of automatically controlled proportional dump valve 2-9 is communicated with the air outlet 2-4-2 on cylinder 2-4 lower end; Grating scale 2-6 is arranged on voice coil motor mover 2-3 and voice coil motor stator 2-5 respectively, for detecting the relative shift between voice coil motor mover 2-3 and voice coil motor stator 2-5; The composition of the voice coil motor 3 of the second band cylinder is all with the voice coil motor 2 of cylinder identical with the composition of the voice coil motor 4 of annexation, the 3rd band cylinder with annexation with first; Described industrial computer assembly 5 comprises industrial computer 5-1, three tunnel motion control board 5-2, three road DA board 5-3, the first motor driver 5-4, the second motor driver 5-5, the 3rd motor driver 5-6, the first proportional solenoid valve control device 5-7, the second proportional solenoid valve control device 5-8, the 3rd proportional solenoid valve control device 5-9; The data of the data output input bus Duan He tri-road DA board 5-3 of three tunnel motion control board 5-2 export input bus end and are connected with data input and output total county end of industrial computer 5-1 respectively; The data input/output terminal of the data input/output terminal of the first motor driver 5-4, the data input/output terminal of the second motor driver 5-5, the 3rd motor driver 5-6 is connected on the three tunnel control data I/Os of three tunnel motion control board 5-2; The data input/output terminal of the data input/output terminal of the first proportional solenoid valve control device 5-7, the data input/output terminal of the second proportional solenoid valve control device 5-8, the 3rd proportional solenoid valve control device 5-9 is connected on the three tunnel control data I/Os of three road DA board 5-3; The voice coil motor 2, second of the first band cylinder is with the voice coil motor 4 of the voice coil motor 3 of cylinder and the 3rd band cylinder to be arranged on base 6 with angular position, makes the dull and stereotyped lower surface of the voice coil motor 2 times of the first band cylinder, lower surface that the voice coil motor 4 times of the dull and stereotyped lower surface of voice coil motor 3 times of the second band cylinder and the 3rd band cylinder is dull and stereotyped is all connected with the upper surface of base 6; The upper surface of voice coil motor 2 upper flat plate of the first band cylinder, second is made to be with the upper surface of voice coil motor 4 upper flat plate of the upper surface of voice coil motor 3 upper flat plate of cylinder and the 3rd band cylinder to be all connected with the lower surface of platform 1; The drive output of the drive output of the first motor driver 5-4 of industrial computer assembly 5, the drive output of the second motor driver 5-5, the 3rd motor driver 5-6 is with the coil input end, second of the voice coil motor mover 2-3 of the voice coil motor 2 of cylinder to be with the coil input end of the voice coil motor mover of the voice coil motor 3 of cylinder, the 3rd to be with the coil input end of the voice coil motor mover of the voice coil motor 4 of cylinder to be connected respectively with first; The drive output of the drive output of the first proportional solenoid valve control device 5-7 of industrial computer assembly 5, the drive output of the second proportional solenoid valve control device 5-8, the 3rd proportional solenoid valve control device 5-9 is with the input end of the automatically controlled proportional dump valve of the voice coil motor 2 of cylinder, second to be with the input end of the automatically controlled proportional dump valve of the voice coil motor 3 of cylinder, the 3rd to be with the input end of the automatically controlled proportional dump valve of the voice coil motor 4 of cylinder to be connected respectively with first; The signal output part of the signal output part of grating scale of the signal output part of the grating scale 2-6 of the voice coil motor 2 of the first band cylinder, the voice coil motor 3 of the second band cylinder, the grating scale of the voice coil motor 4 of the 3rd band cylinder is connected with three displacement detection signal input ends of industrial computer assembly 5 respectively; Double-shaft sensor 7 is arranged on the upper surface of platform 1, the leg-of-mutton limit making double-shaft sensor 7 detection axis and first be with the voice coil motor 2, second of cylinder to be with the voice coil motor 3 of cylinder and the 3rd to be with voice coil motor 4 position of cylinder to form is parallel, makes another detection axis of double-shaft sensor 7 parallel with above-mentioned leg-of-mutton height.
The model of described manual pressure regulating valve 2-8 is the western AR2000 air vent valve of moral power; The model of automatically controlled proportional dump valve 2-9 is German BURKERT proportion magnetic valve 2836; The model of the first proportional solenoid valve control device 5-7, the second proportional solenoid valve control device 5-8 and the 3rd proportional solenoid valve control device 5-9 is all the special proportional controller 8605-00178354 of German BURKERT proportion magnetic valve; The model of three road DA board 5-3 is Altay PCI8304; The model of industrial computer 5-1 is for grinding magnificent ARK5260; The model of three tunnel motion control board 5-2 is CopleyControlsCAN-PCI-02, and the model of double-shaft sensor 7 is northern micro sensing BWH526; The voice coil motor that voice coil motor mover 2-3 and voice coil motor stator 2-5 is formed can be replaced by the voice coil motor of the VLR1351-0310-00A of new company of U.S.; Grating scale 2-6 selects Reinshaw
rG2linear grating.
Principle of work:
When native system does not work, upper flat plate 2-1 is with the voice coil motor 4 of the voice coil motor 3 of cylinder, the 3rd band cylinder by the voice coil motor 2, second of the first band cylinder, is supported on base 6; It is the equilateral triangle of L=1500*sin60mm that the voice coil motor 2, second of the first band cylinder is with 3 lines of the voice coil motor 4 of the voice coil motor 3 of cylinder, the 3rd band cylinder to form a length of side.
The pressure-air that source of the gas exports enters into the voice coil motor 2 of the first band cylinder through manual pressure regulating valve 2-8, the voice coil motor 3 of the second band cylinder, in the cylinder of the voice coil motor 4 of the 3rd band cylinder, along with the voice coil motor 2 of the first band cylinder, the voice coil motor 3 of the second band cylinder, being on the increase of pressure-air amount in the cylinder of the voice coil motor 4 of the 3rd band cylinder, upper flat plate is lifted by piston by the pressure-air of its inside, industrial computer assembly 5 is by the voice coil motor 2 of the first band cylinder, the voice coil motor 3 of the second band cylinder, grating scale on the voice coil motor 4 of the 3rd band cylinder detects height that voice coil motor mover rises relative to voice coil motor stator terminal respectively as feedback, then the duty of three-way electromagnetic valve controller 6 and then control ratio electromagnetic voltage adjusting valve 5 is controlled by three road DA board 5-3, realize the voice coil motor 2 controlling the first band cylinder in real time, the voice coil motor 3 of the second band cylinder, air output in the air cavity of the voice coil motor 4 of the 3rd band cylinder, make the voice coil motor 2 of the first band cylinder, the voice coil motor 3 of the second band cylinder, the voice coil motor 4 of the 3rd band cylinder drives upper flat plate to rise certain altitude in a static condition, and be responsible for the main gravity of carrying platform,
Platform 1, after setting in motion, translation, rotation, can produce vibration and then affect the flatness of whole platform, and the inclination angle of now double-shaft sensor 7 kinetic measurement platform in X-direction and Y direction also sends to industrial computer 5;
With the central point of the equilateral triangle that the voice coil motor 3 of cylinder is with by the voice coil motor 2, second of the first band cylinder, the voice coil motor 4 of the 3rd band cylinder is formed for initial point, X-axis, Y-axis respectively with the biaxial parallel of double-shaft tilt angle sensor, set up level right angle coordinate system, when being in equilibrium state with platform, the height of barycenter sets up space coordinates for horizontal coordinate plane initial point in the z-axis direction.Might as well set certain moment 2 coordinate as
, 3 coordinates are
, 4 coordinates are
.Note platform around the inclination angle of X-axis is
, around the inclination angle of Y direction be
;
Have
,
with
,
,
pass be:
Get constraint condition
, arrange:
；
By above-mentioned algorithm, can according to X-direction and Y direction top rade sensor record around X-axis inclination angle
with around Y-axis inclination angle
the value voice coil motor 2, second of trying to achieve the first band cylinder be with the voice coil motor 3 of cylinder, the voice coil motor mover tip height of voice coil motor 4 three of the 3rd band cylinder
,
,
value, industrial computer 5 controls the voice coil motor mover motion of being with the voice coil motor 3 of cylinder, the voice coil motor 4 three of the 3rd band cylinder by the voice coil motor 2, second of the first band cylinder by three tunnel motion control board 5-2
,
,
, grating scale detects position and feeds back in industrial computer and forms position-force control, finally eliminates inclination angle
and inclination angle
, reach the object of dynamic leveling platform; Dynamic adjustments
,
,
value, can make
with
value remain at ± 1 " within, degree of regulation is higher.
Claims (1)
1. a secondary platform dynamic leveling system, is characterized in that it comprises platform (1), the voice coil motor (2) of the first band cylinder, the voice coil motor (3) of the second band cylinder, voice coil motor (4), industrial computer assembly (5), base (6), the double-shaft sensor (7) of the 3rd band cylinder;
The voice coil motor (2) of described first band cylinder comprises upper flat plate (2-1), piston (2-2), voice coil motor mover (2-3), cylinder (2-4), voice coil motor stator (2-5), grating scale (2-6), lower flat board (2-7), manual pressure regulating valve (2-8), automatically controlled proportional dump valve (2-9), the upper surface of piston (2-2) is connected with the lower surface of upper flat plate (2-1) central part, voice coil motor mover (2-3) is enclosed within the outside of piston (2-2), and the upper surface of voice coil motor mover (2-3) is connected with the lower surface of upper flat plate (2-1), the lower surface of cylinder (2-4) and the upper surface of lower flat board (2-7) central part are tightly connected, voice coil motor stator (2-5) is enclosed within the outside of cylinder (2-4), and the lower surface of voice coil motor stator (2-5) is connected with the upper surface of lower flat board (2-7), the following side of piston (2-2) is arranged in cylinder (2-4), the inner headed face of the periphery of piston (2-2) and cylinder (2-4) is sealed be slidably connected, the coiler part of voice coil motor mover (2-3) is connected with the annular permanent magnet portion gap magnetic induction of voice coil motor stator (2-5), the air inlet port of manual pressure regulating valve (2-8) connects source of the gas, the air outlet of manual pressure regulating valve (2-8) is communicated with the air inlet port (2-4-1) on cylinder (2-4) lower end, and the air inlet port of automatically controlled proportional dump valve (2-9) is communicated with the air outlet (2-4-2) on cylinder (2-4) lower end, grating scale (2-6) is arranged on voice coil motor mover (2-3) and voice coil motor stator (2-5) respectively, for detecting the relative shift between voice coil motor mover (2-3) and voice coil motor stator (2-5), the composition of the voice coil motor (3) of the second band cylinder is all with the voice coil motor of cylinder (2) identical with the composition of the voice coil motor (4) of annexation, the 3rd band cylinder with annexation with first, described industrial computer assembly (5) comprises industrial computer (5-1), three tunnel motion control boards (5-2), three roads DA board (5-3), the first motor driver (5-4), the second motor driver (5-5), the 3rd motor driver (5-6), the first proportional solenoid valve control device (5-7), the second proportional solenoid valve control device (5-8), the 3rd proportional solenoid valve control device (5-9), the data of data output input bus Duan He tri-road DA board (5-3) of three tunnel motion control boards (5-2) export input bus end and are connected with data input and output total county end of industrial computer (5-1) respectively, the data input/output terminal of the data input/output terminal of the first motor driver (5-4), the data input/output terminal of the second motor driver (5-5), the 3rd motor driver (5-6) is connected on three tunnel control data I/Os of three tunnel motion control boards (5-2), the data input/output terminal of the data input/output terminal of the first proportional solenoid valve control device (5-7), the data input/output terminal of the second proportional solenoid valve control device (5-8), the 3rd proportional solenoid valve control device (5-9) is connected on the three tunnel control data I/Os on three roads DA board (5-3), the voice coil motor (4) of the voice coil motor (2) of the first band cylinder, the voice coil motor (3) of the second band cylinder and the 3rd band cylinder is arranged on base (6) with angular position, and lower surface dull and stereotyped under the voice coil motor (3) of lower surface dull and stereotyped under making the voice coil motor (2) of the first band cylinder, the second band cylinder is all connected with the upper surface of base (6) with dull and stereotyped lower surface under the voice coil motor (4) of the 3rd band cylinder, the upper surface of voice coil motor (2) upper flat plate of the first band cylinder, second is made to be with the upper surface of voice coil motor (4) upper flat plate of the upper surface of voice coil motor (3) upper flat plate of cylinder and the 3rd band cylinder to be all connected with the lower surface of platform (1), the drive output of the drive output of first motor driver (5-4) of industrial computer assembly (5), the drive output of the second motor driver (5-5), the 3rd motor driver (5-6) is with the coil input end, second of the voice coil motor mover (2-3) of the voice coil motor of cylinder (2) to be with the coil input end of the voice coil motor mover of the voice coil motor of cylinder (3), the 3rd to be with the coil input end of the voice coil motor mover of the voice coil motor of cylinder (4) to be connected respectively with first, the drive output of the first proportional solenoid valve control device (5-7) of industrial computer assembly (5), the drive output of the second proportional solenoid valve control device (5-8), the drive output of the 3rd proportional solenoid valve control device (5-9) is with the input end of the automatically controlled proportional dump valve of the voice coil motor of cylinder (2) respectively with first, the input end of the automatically controlled proportional dump valve of the voice coil motor (3) of the second band cylinder, the input end of the automatically controlled proportional dump valve of the voice coil motor (4) of the 3rd band cylinder connects, the signal output part of the signal output part of grating scale of the signal output part of the grating scale (2-6) of the voice coil motor (2) of the first band cylinder, the voice coil motor (3) of the second band cylinder, the grating scale of the voice coil motor (4) of the 3rd band cylinder is connected with three displacement detection signal input ends of industrial computer assembly (5) respectively, double-shaft sensor (7) is arranged on the upper surface of platform (1), the leg-of-mutton limit making a detection axis and first of double-shaft sensor (7) be with the voice coil motor of cylinder (2), second to be with the voice coil motor of cylinder (3) and the 3rd to be with the voice coil motor of cylinder (4) position to form is parallel, makes another detection axis of double-shaft sensor (7) parallel with above-mentioned leg-of-mutton height.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108022820A (en) * | 2016-11-02 | 2018-05-11 | 中微半导体设备(上海)有限公司 | A kind of self-checking device and method of plasma etching machine levelness |
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| CN103438142A (en) * | 2013-08-07 | 2013-12-11 | 华中科技大学 | Six-degree-of-freedom active vibration isolation device |
| CN104317204A (en) * | 2014-10-17 | 2015-01-28 | 哈尔滨工业大学 | Virtual reality technology based secondary platform half-physical simulation system and method |
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