CN117553098A - Tandem piezoelectric actuation vibration isolator - Google Patents
Tandem piezoelectric actuation vibration isolator Download PDFInfo
- Publication number
- CN117553098A CN117553098A CN202410043190.9A CN202410043190A CN117553098A CN 117553098 A CN117553098 A CN 117553098A CN 202410043190 A CN202410043190 A CN 202410043190A CN 117553098 A CN117553098 A CN 117553098A
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- piezoelectric
- vibration isolation
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- vibration
- horizontal
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- 238000002955 isolation Methods 0.000 claims abstract description 106
- 230000000694 effects Effects 0.000 claims abstract description 6
- 238000012544 monitoring process Methods 0.000 claims abstract description 4
- 230000006835 compression Effects 0.000 claims description 24
- 238000007906 compression Methods 0.000 claims description 24
- 125000006850 spacer group Chemical group 0.000 claims 2
- 230000001133 acceleration Effects 0.000 description 9
- 238000004088 simulation Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000001629 suppression Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/08—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with rubber springs ; with springs made of rubber and metal
- F16F15/085—Use of both rubber and metal springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention relates to the technical field of micro-vibration isolation, in particular to a serial piezoelectric actuation vibration isolator, which comprises a vertical vibration isolation assembly, a horizontal vibration isolation assembly, a sensor assembly, a vibration isolator supporting assembly and a control system, wherein the sensor assembly is arranged on the vertical vibration isolation assembly; the vertical vibration isolation assembly and the horizontal vibration isolation assembly are arranged in the vibration isolator supporting assembly and used for isolating micro vibration of the ground in the horizontal direction and the vertical direction of a load placed on the vibration isolator supporting assembly; the horizontal vibration isolation assembly comprises a spring vibration isolation assembly for completing passive vibration isolation and a piezoelectric vibration isolation assembly for completing active vibration isolation; the sensor assembly is connected with the vibration isolator supporting assembly and used for monitoring in real time and transmitting signals to the control system, and the control system adjusts the vibration isolation effect of the vertical vibration isolation assembly and the horizontal vibration isolation assembly according to the signals.
Description
Technical Field
The invention relates to the technical field of micro-vibration isolation, in particular to a series piezoelectric actuation vibration isolator.
Background
The precision instrument is extremely sensitive to micro-vibration, so vibration isolation measures are required for vibration sources beyond the allowable range of the system to ensure the normal operation of the precision instrument. And the vibration source may be multi-angled, requiring vibration isolation from multiple directions. In the aspect of high-frequency vibration, a passive vibration isolation system is generally adopted, and the passive vibration isolation system has the characteristics of high reliability and no need of energy sources. But its effect on low frequency vibration is not ideal and even a formant amplifying vibration effect is generated. Therefore, an active vibration isolation technology is adopted in the aspect of low-frequency vibration, a piezoelectric actuator is adopted for active vibration isolation, and the piezoelectric actuator has the characteristics of high response speed, large output force and high control precision. Therefore, it is necessary to design a series-type piezoelectric-actuation vibration isolator to isolate vibration sources that exceed the allowable range of the precision instrument system.
Disclosure of Invention
In order to solve the problems, the invention provides a series piezoelectric actuation vibration isolator, force feedback and speed feedback are formed by adopting force sensors and piezoelectric actuators in a vertical vibration isolation assembly and a horizontal vibration isolation assembly, the piezoelectric actuators are controlled by a vibration controller to actively inhibit low-frequency vibration, and a rubber pad is used to passively inhibit high-frequency vibration.
The invention provides a series piezoelectric actuation vibration isolator which comprises a vertical vibration isolation assembly, a horizontal vibration isolation assembly, a sensor assembly and a vibration isolator supporting assembly, wherein the vertical vibration isolation assembly is connected with the sensor assembly; the vertical vibration isolation assembly and the horizontal vibration isolation assembly are arranged in the vibration isolator supporting assembly and used for isolating vibration of the ground in the horizontal direction and the vertical direction of a load placed on the vibration isolator supporting assembly; the horizontal vibration isolation assembly comprises a spring vibration isolation assembly for completing passive vibration isolation and a piezoelectric vibration isolation assembly for completing active vibration isolation; the spring vibration isolation assembly and the piezoelectric vibration isolation assembly are positioned at two sides of the vertical vibration isolation assembly; the sensor assembly is connected with the vibration isolator supporting assembly and is used for monitoring and transmitting the speed and the stress condition of the vibration isolator supporting assembly to the control system in real time; the control system adjusts vibration isolation effects of the vertical vibration isolation assembly and the horizontal vibration isolation assembly according to the information of the sensor assembly.
Further, the vibration isolator support assembly comprises a shell, top rubber and a support frame; the shell is a hollow cylinder with a bottom sealing function and is used for placing the support frame, the vertical vibration isolation assembly and the horizontal vibration isolation assembly; the side wall of the shell is provided with a first through hole and a second through hole which are opposite to each other and are respectively used for installing a spring vibration isolation assembly and a piezoelectric vibration isolation assembly; the support frame is of a column structure and is positioned in the shell; a vertical mounting groove for mounting the vertical vibration isolation assembly is formed along the axial direction of the support frame; a first horizontal mounting groove and a second horizontal mounting groove are formed on two sides of the support frame and correspond to the through holes to the axle center of the support frame, and are respectively opposite to the first through holes and the second through holes; the top rubber is fixed on the support frame for placing.
Further, the vertical vibration isolation assembly comprises a vertical piezoelectric actuator and a piezoelectric device mounting block; wherein: the fixed end of the vertical piezoelectric actuator is fixed at the bottom of the shell through a bolt; the output end of the vertical piezoelectric actuator stretches into the vertical mounting groove and is connected with the supporting frame through the piezoelectric device mounting block.
Further, the spring vibration isolation assembly comprises a compression spring base, a compression spring and a compression spring end cover; one end of the compression spring extends into the first horizontal mounting groove and is fixedly connected with the support frame through the compression spring end cover; the compression spring base penetrates through the first through hole and is fixedly connected with the other end of the compression spring.
Further, the piezoelectric device vibration isolation assembly comprises a piezoelectric device mounting block, a horizontal piezoelectric actuator and a piezoelectric end cover; the output end of the horizontal piezoelectric actuator extends into the second horizontal mounting groove and is connected with the supporting block through the piezoelectric device mounting block; the piezoelectric end cover passes through the second through hole and is fixed on the fixed end of the horizontal piezoelectric actuator through bolts.
Further, the sensor assembly includes a force sensor and a pickup; the force sensor is connected with the top rubber and used for detecting the stress of the top rubber, and the detector is connected with the supporting frame and used for detecting the absolute speed of the supporting frame.
Further, the control system includes a vibration controller, a speed feedback controller, and a force feedback controller. The speed feedback controller and the detector and the differentiator form a speed feedback control loop. The force feedback controller and the force sensor, the second differential device form a force feedback control loop. The output ends of the absolute feedback controller and the force feedback controller are connected with the vibration controller, and the vertical piezoelectric actuator and the horizontal piezoelectric actuator are controlled by the vibration controller.
Compared with the prior art, the invention has the following beneficial effects:
compared with the traditional vibration isolation table, the active actuator adopted by the vibration isolator is the piezoelectric actuator, the piezoelectric actuator has the characteristics of high control precision and high response speed and output force, and the piezoelectric actuator and the passive vibration isolation system are connected in series, so that the vibration isolator has high rigidity and the disturbance rejection capability of the vibration isolator is improved by matching with the proposed control system. Meanwhile, the dual sensors are adopted, the resolution ratio of the force sensor is high, the low-frequency performance of the speed sensor is good, the low-frequency vibration suppression method has the advantages in the aspect of low-frequency vibration suppression, and meanwhile the resonance peak of the vibration isolator is suppressed. The horizontal vibration isolation assembly and the vertical vibration isolation assembly are decoupled by utilizing the characteristics of small horizontal rigidity and large vertical rigidity of the rubber gasket.
Drawings
Fig. 1 is a schematic structural view of a tandem piezoelectric active vibration isolator provided according to an embodiment of the present invention;
figure 2 is a cross-sectional block diagram of a vibration isolator support assembly provided in accordance with an embodiment of the present invention;
figure 3 is a cross-sectional block diagram of a vertical vibration isolation assembly provided in accordance with an embodiment of the present invention;
figure 4 is a cross-sectional block diagram of a spring vibration isolation assembly provided in accordance with an embodiment of the present invention;
fig. 5 is a cross-sectional block diagram of a piezoelectric vibration isolation assembly provided in accordance with an embodiment of the present invention;
fig. 6 is a schematic diagram of feedback control principle of a tandem piezoelectric active vibration isolator according to an embodiment of the present invention;
fig. 7 is a graph of frequency domain simulation of acceleration in the X direction of a tandem piezoelectric actuated vibration isolator provided in accordance with an embodiment of the present invention;
fig. 8 is a graph of frequency domain simulation of acceleration in the Y direction of a tandem piezoelectric actuated vibration isolator provided in accordance with an embodiment of the present invention;
fig. 9 is a graph of frequency domain simulation of acceleration in the Z direction of a tandem piezoelectric actuated vibration isolator provided in accordance with an embodiment of the present invention;
fig. 10 is a time domain simulation plot of acceleration in the X direction of a tandem piezoelectric actuated vibration isolator provided in accordance with an embodiment of the present invention;
fig. 11 is a time domain simulation plot of acceleration in the Y direction of a tandem piezoelectric actuated vibration isolator provided in accordance with an embodiment of the present invention;
fig. 12 is a time domain simulation plot of acceleration in the Z direction of a tandem piezoelectric actuated vibration isolator provided in accordance with an embodiment of the present invention;
reference numerals: isolator support assembly 1, housing 101, top rubber 102, support frame 103, vertical mounting slot 104, first through hole 105, second through hole 106, first horizontal mounting slot 107, second horizontal mounting slot 108, vertical isolator assembly 2, vertical piezoelectric actuator 201, rubber pad 202, rubber pad adapter 203, piezoelectric pad 204, spring isolator assembly 3, compression spring base 301, compression spring 302, compression spring end cap 303, piezoelectric isolator assembly 4, horizontal piezoelectric actuator 401, piezoelectric end cap 402, sensor assembly 5, force sensor 501, detector 502, control system 6.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
The serial piezoelectric actuation vibration isolator provided by the invention adopts vertical and horizontal bidirectional vibration isolation, and adopts a sensor assembly to form force feedback and speed feedback in each vibration isolation assembly in cooperation with a piezoelectric actuator, so as to actively inhibit low-frequency vibration. The rubber pad is adopted in the horizontal vibration isolation assembly to achieve passive high-frequency vibration suppression.
Fig. 1 shows a structure of a tandem piezoelectric active vibration isolator provided according to an embodiment of the present invention.
As shown in fig. 1, the tandem piezoelectric actuation vibration isolator provided by the embodiment of the invention comprises a vibration isolator supporting component 1, a vertical vibration isolator component 2, a horizontal vibration isolator component, a sensor component 5 and a control system 6; wherein the vertical vibration isolation assembly 2 and the horizontal vibration isolation assembly are installed inside the vibration isolator support assembly 1 for isolating vibrations of the ground in the horizontal and vertical directions of the load placed on the vibration isolator support assembly 1.
The horizontal vibration isolation assembly comprises a spring vibration isolation assembly 3 for achieving passive vibration isolation and a piezoelectric vibration isolation assembly 4 for achieving active vibration isolation; and the spring vibration isolation assembly 3 and the piezoelectric vibration isolation assembly 4 are positioned at both sides of the vertical vibration isolation assembly 2.
Figure 2 illustrates a cross-sectional configuration of a vibration isolator support assembly provided in accordance with an embodiment of the present invention.
As shown in fig. 2, the isolator support assembly includes a housing 101, a top rubber 102, and a support bracket 103; the shell 101 is a hollow cylinder with a bottom cover and is used for placing the support frame 103, the vertical vibration isolation assembly 2 and the horizontal vibration isolation assembly; a first through hole 105 and a second through hole 106 which are opposite are formed in the side wall of the shell 101 and are respectively used for installing the spring vibration isolation assembly 3 and the piezoelectric vibration isolation assembly 4; the support frame 103 is of a column structure and is positioned in the shell 101; a vertical mounting groove 104 for mounting the vertical vibration isolation assembly 2 is formed along the axial direction of the support frame 103; on both sides of the support 103, a first horizontal mounting groove 107 and a second horizontal mounting groove 108 are provided corresponding to the through holes toward the axis of the support 103, and are respectively opposite to the first through hole 105 and the second through hole 106. The top rubber 102 is fixed to the support frame 103 for placing a load.
Figure 3 illustrates a cross-sectional view of a vertical vibration isolation assembly provided in accordance with an embodiment of the present invention.
As shown in fig. 2 and 3, the vertical vibration isolation assembly 2 includes a vertical piezoelectric actuator 201 and a piezoelectric device mounting block; wherein: the fixed end of the vertical piezoelectric actuator 201 is fixed at the bottom of the shell 101 through a bolt; the output end of the vertical piezoelectric actuator 201 extends into the vertical mounting groove 104 and is connected with the support frame 103 through a piezoelectric device mounting block.
The piezoelectric mounting block includes a rubber pad 202, a rubber pad adapter block 203, and a piezoelectric pad 204. Wherein, the rubber gasket 202 is fixed on the piezoelectric cushion block 204 through the rubber gasket adapter block 203; the output end of the vertical piezoelectric actuator 201 is connected with the piezoelectric cushion block 204 through a screw; the rubber gasket 202 is in contact with the support frame 103.
Fig. 4 shows a cross-sectional view of a spring vibration isolation assembly provided in accordance with an embodiment of the present invention.
As shown in fig. 2 and 4, the spring vibration isolation assembly 3 includes a compression spring base 301, a compression spring 302, and a compression spring end cap 303; one end of the compression spring 302 extends into the first horizontal mounting groove 107 and is fixedly connected with the support frame 103 through the compression spring end cover 303; the compression spring base 301 passes through the first through hole 105 and is connected and fixed with the other end of the compression spring 302.
Fig. 5 shows a cross-sectional structure of a piezoelectric vibration isolation assembly provided according to an embodiment of the present invention.
As shown in fig. 2 and 5, the piezoelectric vibration isolation assembly 4 includes a piezoelectric mounting block, a horizontal piezoelectric actuator 401, and a piezoelectric end cap 402; the output end of the horizontal piezoelectric actuator 401 extends into the second horizontal mounting groove 108, and is connected with the piezoelectric cushion block 204 through a screw, and then is connected with the supporting block 103; the piezoelectric end cap 402 passes through the second through hole 106 and is fixed to the fixed end of the horizontal piezoelectric actuator 401 by a bolt.
The serial piezoelectric actuation vibration isolator provided by the embodiment of the invention is simulated, and can be obtained through the sensor assembly 5: when excited by the ground, the vibration isolator typically has a rotational vibration amplitude that is much smaller than a translational vibration amplitude.
As shown in fig. 1 and 2, the sensor assembly 5 includes a force sensor 501 and a pickup 502; the force sensor 501 is connected with the top rubber 102, the detector 502 is connected with the support frame 103 and is used for monitoring and transmitting the speed of the support frame 103 and the stress condition of the top rubber 102 to the control system 6 in real time, and the control system 6 adjusts the vibration isolation effect of the vertical vibration isolation assembly 2 and the horizontal vibration isolation assembly according to the speed of the support frame 103 and the stress condition of the top rubber 102.
Fig. 6 illustrates the feedback control principle of a tandem piezoelectric active vibration isolator provided according to an embodiment of the present invention.
As shown in fig. 6, the control system 6 includes a vibration controller, a speed feedback controller, and a force feedback controller. The speed feedback controller and the detector 502, the differentiator forms a speed feedback control loop. The force feedback controller and force sensor 501, the second order differentiator, form a force feedback control loop. The absolute feedback controller is connected with the output end of the force feedback controller, and the vibration controller is used for controlling the vertical piezoelectric actuator 201 and the horizontal piezoelectric actuator 401.
Fig. 7 to 9 respectively show acceleration frequency domain simulation curves of the X direction, the Y direction and the Z direction of the tandem piezoelectric actuation vibration isolator according to the embodiment of the present invention.
As shown in fig. 7 to 9, after broadband white noise is applied to the ground, the series piezoelectric active vibration isolator provided by the embodiment of the invention provides excellent isolation performance in multiple directions, and can provide attenuation exceeding-20 dB in all three translational directions within the range of 1-10Hz, so that the effective load keeps inertially stable in multiple degrees of freedom.
Fig. 10 to 12 respectively show acceleration time domain simulation curves of the X direction, the Y direction and the Z direction of the tandem piezoelectric actuation vibration isolator according to the embodiment of the present invention.
As shown in fig. 10 to 12, after broadband white noise is applied to the ground, the amplitude of the acceleration response of the series piezoelectric actuation vibration isolator provided by the embodiment of the invention can be attenuated by more than 10 times in all three translational directions X, Y, Z.
The tandem piezoelectric actuation vibration isolator provided by the embodiment of the invention has vertical and horizontal vibration isolation capability, and can be applied to a six-degree-of-freedom vibration isolation platform if three tandem piezoelectric actuation vibration isolators are arranged in parallel under a load platform.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (8)
1. The series piezoelectric actuation vibration isolator is characterized by comprising a vertical vibration isolation assembly, a horizontal vibration isolation assembly, a sensor assembly, a vibration isolator supporting assembly and a control system; wherein,
the vertical vibration isolation assembly and the horizontal vibration isolation assembly are arranged in the vibration isolator supporting assembly and used for isolating vibration of the ground in the horizontal direction and the vertical direction of a load placed on the vibration isolator supporting assembly;
the horizontal vibration isolation assembly comprises a spring vibration isolation assembly for completing passive vibration isolation and a piezoelectric vibration isolation assembly for completing active vibration isolation; the spring vibration isolation assembly and the piezoelectric vibration isolation assembly are positioned on two sides of the vertical vibration isolation assembly;
the sensor assembly is connected with the vibration isolator supporting assembly and is used for monitoring and transmitting the speed and the stress condition of the vibration isolator supporting assembly to the control system in real time;
and the control system adjusts the vibration isolation effect of the vertical vibration isolation assembly and the horizontal vibration isolation assembly according to the information of the sensor assembly.
2. The tandem piezoelectric actuated vibration isolator of claim 1, wherein the vibration isolator support assembly comprises a housing, a top rubber and a support frame; wherein,
the shell is a hollow cylinder with a bottom cover and is used for placing the support frame, the vertical vibration isolation assembly and the horizontal vibration isolation assembly; the side wall of the shell is provided with a first through hole and a second through hole which are opposite to each other and are respectively used for installing the spring vibration isolation assembly and the piezoelectric vibration isolation assembly;
the support frame is of a column structure and is positioned in the shell; a vertical mounting groove for mounting the vertical vibration isolation assembly is formed along the axial direction of the support frame; a first horizontal mounting groove and a second horizontal mounting groove are formed in the two sides of the support frame and correspond to the through holes to the axle center of the support frame, and the first horizontal mounting groove and the second horizontal mounting groove are respectively opposite to the first through holes and the second through holes;
the top rubber is fixed on the support frame and used for placing the load.
3. The tandem piezoelectric actuated vibration isolator of claim 2, wherein said vertical vibration isolation assembly comprises a vertical piezoelectric actuator and a piezoelectric device mounting block; wherein:
the fixed end of the vertical piezoelectric actuator is fixed at the bottom of the shell through a bolt; the output end of the vertical piezoelectric actuator stretches into the vertical mounting groove and is connected with the supporting frame through the piezoelectric device mounting block.
4. The tandem piezoelectric actuated vibration isolator of claim 2, wherein the spring vibration isolation assembly comprises a compression spring base, a compression spring, and a compression spring end cap; one end of the compression spring extends into the first horizontal mounting groove and is fixedly connected with the support frame through the compression spring end cover; the compression spring base penetrates through the first through hole and is fixedly connected with the other end of the compression spring.
5. The tandem piezoelectric actuation vibration isolator of claim 2, wherein the piezoelectric vibration isolator assembly comprises a piezoelectric mounting block, a horizontal piezoelectric actuator and a piezoelectric end cap; the output end of the horizontal piezoelectric actuator extends into the second horizontal mounting groove and is connected with the supporting block through the piezoelectric device mounting block; the piezoelectric end cover penetrates through the second through hole and is fixed on the fixed end of the horizontal piezoelectric actuator through bolts.
6. The tandem piezoelectric actuation vibration isolator according to claim 3 or 5, wherein the piezoelectric device mounting block comprises a rubber spacer, a rubber pad adapter block, and a piezoelectric spacer block; the rubber gasket is fixed on the piezoelectric cushion block through the rubber gasket adapter block; the output end of the vertical piezoelectric actuator or the horizontal piezoelectric actuator is connected with the piezoelectric cushion block through a screw; the rubber gasket is in contact with the support frame.
7. The tandem piezoelectric actuated vibration isolator of claim 5, wherein said sensor assembly comprises a force sensor and a pickup; the detector is connected with the supporting frame and used for detecting the absolute speed of the supporting frame.
8. The tandem piezoelectric actuated vibration isolator of claim 7, wherein the control system comprises a vibration controller, a velocity feedback controller, and a force feedback controller; the speed feedback controller and the detector and the differentiator form a speed feedback control loop; the force feedback controller and the force sensor, and the second-order differentiator form a force feedback control loop; the absolute feedback controller is connected with the output end of the force feedback controller, and the vibration controller is used for controlling the vertical piezoelectric actuator and the horizontal piezoelectric actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202410043190.9A CN117553098A (en) | 2024-01-11 | 2024-01-11 | Tandem piezoelectric actuation vibration isolator |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410043190.9A CN117553098A (en) | 2024-01-11 | 2024-01-11 | Tandem piezoelectric actuation vibration isolator |
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